Imaging mass spectrometer

10593533 ยท 2020-03-17

Assignee

Inventors

Cpc classification

International classification

Abstract

A time-of-flight mass spectrometer is disclosed comprising: an ion deflector (305) configured to deflect ions to different positions in a first array of positions at different times; a position sensitive ion detector (187); and ion optics (180) arranged and configured to guide ions from the first array of positions to the position sensitive detector (187) so as to map ions from the first array of positions to a second array of positions on the position sensitive detector (187); wherein the ion optics includes at least one ion mirror for reflecting the ions.

Claims

1. A time-of-flight mass spectrometer comprising: an ion deflector arranged to receive ions at different times and configured to deflect the ions received at different times to different respective positions in a first array of positions at said different times, wherein the ion deflector is configured to deflect the ions so that the ions exit the ion deflector along different axes in an array of parallel axes at different times; a position sensitive ion detector comprising an array of separate detection regions arranged at different positions on the position sensitive detector; and ion optics arranged and configured to guide ions from the first array of positions to the position sensitive detector so as to map ions from the first array of positions to a second array of positions on the position sensitive detector; wherein the ion optics includes at least one ion mirror for reflecting the ions; and wherein the time-of-flight mass spectrometer is configured to determine that ions received at different ones of said detection regions have originated from different positions in the first array of positions.

2. The spectrometer of claim 1, wherein ions at any given position in the first array of positions are mapped to the same relative position in the second array of positions on the detector.

3. The spectrometer of claim 1, wherein the ion deflector comprises at least one electrode and at least one voltage supply for applying voltages to said at least one electrode, and wherein the voltage supply is configured to vary the voltage applied to the at least one electrode with time so as to deflect the ions to different positions in said first array of positions at different times such that the ions are mapped to corresponding different positions in the second array of positions on the detector at different times.

4. The spectrometer of claim 3, wherein the voltage supply is configured to vary the voltage applied to the at least one electrode with time so as to deflect all of the ions to a first position in said first array of positions at a first time and so as to deflect all of the ions to a second, different position in said first array of positions at a second, different time.

5. The spectrometer of claim 1, wherein the ion deflector is configured to receive ions along a first axis, and to deflect ions with a velocity component orthogonal to the first axis so that the ions exit the ion deflector along a second axis that is substantially parallel to the first axis, wherein the second axis is displaced from the first axis by a distance that varies with time.

6. The spectrometer of claim 1, wherein the ion deflector comprises at least one entrance electrode and at least one voltage source for deflecting the ions in a first direction, at any given time, and at least one downstream exit electrode and at least one voltage source for deflecting the same ions in a second, opposite direction at said given time.

7. The spectrometer of claim 6, comprising one or more ion focusing member arranged between the at least one entrance electrode and the at least one exit electrode; wherein the ion deflector is configured to deflect ions in a first dimension and the one or more ion focusing member is configured to focus ions in a second dimension orthogonal to the first dimension.

8. The spectrometer of claim 1, further comprising an ion accelerator for pulsing the ions from said first array of positions into the ion optics and towards the detector, wherein an ion guide or ion trap is arranged upstream of the ion accelerator and is configured to release packets of ions to the ion accelerator, wherein the ion guide or ion trap and the ion accelerator are configured such that the releasing of packets of ions from the ion guide or ion trap is synchronized with the pulsing of ions from the ion accelerator towards the detector; wherein the spectrometer is configured to provide a delay time between the release of each packet of ions from the ion guide or ion trap and the time at which these ions are pulsed from the ion accelerator towards the detector, and wherein the delay time is varied as a function of the mass to charge ratio or ion mobility of the ions released from the ion guide or ion trap.

9. The spectrometer of claim 8, wherein an ion separation device, source of ions or ion filter is arranged upstream of said ion guide or ion trap for supplying ions of different mass to charge ratio or ion mobility to said ion guide or ion trap at different times; and/or wherein the ion guide or ion trap comprises an ion filter or ion separator and is configured such that the mass to charge ratio or range of mass to charge ratios stored by the ion guide or ion trap, or the ion mobility or range of ion mobilities stored by the ion guide or ion trap, vary with time.

10. The spectrometer of claim 1, comprising an ion separator arranged upstream of the ion deflector and configured to separate ions according to a physicochemical property, such as mass to charge ratio or ion mobility; and wherein the spectrometer is configured to control the ion deflector so as to deflect ions having different values of said physicochemical property to respective different positions in said first array of positions such that ions having said different values of said physicochemical property are guided to respective different positions in second array of positions at different times.

11. The spectrometer of claim 10, comprising a controller configured to control the separator device to perform a plurality of ion separation cycles, during each of which ions are separated according to said physicochemical property, and to control the ion deflector to perform a corresponding plurality of ion deflection cycles, during each of which ions are deflected to said different positions within said first array of positions at different times; and wherein the ion deflection cycles are synchronized with the ion separation cycles.

12. The spectrometer of claim 1, comprising an ion accelerator for pulsing the ions from said first array of positions into the ion optics and towards the detector, and wherein the spectrometer is configured to determine the flight times of the ions from the ion accelerator to the detector; wherein the ion accelerator is configured to pulse ions towards the detector in a series of ion accelerator pulses, wherein the timings of the pulses are determined by an encoding sequence that varies the duration of the time interval between adjacent pulses as the series of pulses progresses; and wherein the spectrometer comprises a processor configured to use the timings of the pulses in the encoding sequence to determine which ion data detected at the detector relate to which ion accelerator pulse so as to resolve spectral data obtained from the different ion accelerator pulses.

13. The spectrometer of claim 1, wherein the ion optics includes at least two ion mirrors for reflecting ions; wherein said ion optics, including the at least two ion mirrors, are arranged and configured such that the ions are reflected by each of the mirrors and between the mirrors a plurality of times before reaching the detector; or wherein the ion optics include at least one ion mirror for reflecting ions and at least one electrostatic or magnetic sector for receiving ions and guiding the ions into the at least one ion mirror; wherein the at least one ion mirror and at least one sector are configured such that the ions are transmitted from the at least one sector into each mirror a plurality of times such that the ions are reflected by said each ion mirror a plurality of times.

14. The spectrometer of claim 1, further comprising an ion accelerator downstream of the deflector, for pulsing the ions from said first array of positions into the ion optics and towards the detector.

15. The spectrometer of claim 14, wherein said ion accelerator is an orthogonal accelerator that receives the ions from the deflector along an axis and pulses the ions orthogonally to that axis.

16. A method of time-of-flight mass spectrometry comprising: receiving ions at a deflector at different times and deflecting the ions received at the different times to different respective positions in a first array of positions at said different times, wherein the ion deflector deflects the ions so that the ions exit the ion deflector along different axes in an array of parallel axes at different times; using ion optics to guide ions from the first array of positions to a position sensitive detector that comprises an array of separate detection regions arranged at different positions on the position sensitive detector, so as to map ions from the first array of positions to a second array of positions on the position sensitive detector, wherein the ion optics includes at least one ion mirror that reflects the ions; and determining that ions received at different ones of said detection regions have originated from different positions in the first array of positions.

17. A method of time-of-flight mass spectrometry comprising: pulsing a first pulse of ions out of a first side of an ion accelerator or ion source and into a first ion mirror at a first time and such that the ions of the first pulse arrive at a first position on a position sensitive detector system that comprises an array of separate detection regions at different positions on the position sensitive detector; and pulsing a second pulse of ions out of a second, opposite, side of the ion accelerator or ion source and into a second, different ion mirror at a second time and such that the ions of the second pulse arrive at a second, different position on the position sensitive detector system; and determining that ions received at different positions on the position sensitive detector system have originated from different pulses of ions.

18. The method of claim 17, wherein the detector system comprises a first detecting side and a second, opposite detecting side; and wherein ions in the first pulse are detected on the first detecting side and ions in the second pulse are detected on the second, opposite detecting side; or wherein ions in the first pulse are detected on same detecting side of the detector system as ions in the second pulse, but at different positions on the detecting side.

19. A time-of-flight mass spectrometer comprising: first and second ion mirrors; an ion accelerator or ion source; a position sensitive ion detector comprising an array of separate detection regions at different positions on the position sensitive detector; and a controller configured to control the spectrometer to: pulse a first pulse of ions out of a first side of the ion accelerator or ion source and into the first ion mirror at a first time such that the ions in the first pulse arrive at a first position on the position sensitive detector; and pulse a second pulse of ions into out of a second, opposite, side of the ion accelerator or ion source and into the second ion mirror at a second time such that the ions in the second pulse arrive at a second, different position on the position sensitive detector; wherein the spectrometer is configured to determine that ions received at different positions on the position sensitive detector have originated from different pulses of ions.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Various embodiments will now be described, by way of example only, and with reference to the accompanying drawings in which:

(2) FIG. 1 shows a known mass microscope;

(3) FIGS. 2A and 2B illustrate a known multi-reflecting mass spectrometer;

(4) FIGS. 2C and 2D show schematics of spectrometers according to embodiments of the present invention having ion deflectors;

(5) FIG. 3A schematically illustrates an analyzer of an embodiment of the present invention, wherein ions are transferred from pixels of an ion source array to corresponding pixels of an ion detector array;

(6) FIG. 3B shows a schematic of an orthogonal accelerator according to an embodiment of the present invention for increasing the duty cycle of the instrument;

(7) FIGS. 4A to 4C show telescopic and microscopic lens arrangements that may be used in the present invention;

(8) FIG. 5 shows a schematic of a spectrometer according to an embodiment of the present invention wherein electric sectors guide ions into and from a multi-reflecting time of flight region;

(9) FIG. 6 shows various different topologies that may be used to form electrostatic fields in the time of flight region of the embodiments of the present invention;

(10) FIGS. 7A-7C and 8A-8C show various arrays of ion sources that may be used in the embodiments of the present invention;

(11) FIGS. 9A-9C show a schematic of an instrument according to an embodiment of the present invention for mapping ions from a 1D array of ion sources to a detector;

(12) FIG. 10 shows a schematic of another instrument according to an embodiment of the present invention for mapping ions from a 1D array to a detector;

(13) FIG. 11 shows a schematic of an instrument according to an embodiment of the present invention for mapping ions from a 2D array to a 2D detector;

(14) FIG. 12A shows a 2D mapping instrument having an array of pulsed vacuum ion sources; and FIG. 12B shows an embodiment that uses a mask for separating individual secondary ion beams emitted from an ion source target plate; and

(15) FIG. 13 illustrates an embodiment comprising a single source, a distributing RF guide and a 1D array of RF quadrupoles.

DETAILED DESCRIPTION

(16) In order to assist the understanding of the present invention, a prior art instrument will now be described with reference to FIG. 1. FIG. 1 shows a mass microscope 10 as described in U.S. Pat. No. 5,128,543. The mass microscope comprises a target T that is illuminated by a laser pulse, a position sensitive Time of Flight (TOF) detector 16, and an analyzer that is formed by lenses L, slits S and three 90-degree spherical electrostatic sectors 13, 14 and 15 that are separated by field-free regions. Secondary ion packets originate from point 11 on the target T with an angular spread. The ions travel within the dashed curved area of trajectories and are focused onto the position sensitive detector 16 at point 17. A multiplicity of emitting spots form a magnified two dimensional image on the detector 16, while the TOF detector also measures the ion masses by their flight times. In an all-mass mode, a dual microchannel plate (MCP) detector with resistive anode is used to determine the X and Y positions of rare striking ions. Alternatively, imaging may be performed on a phosphor screen downstream of an MCP by using higher ion fluxes and selecting ions of a single mass with a time gate. The typical size of the image field is 200 microns, the spatial resolution is 3 m and the magnification from the target to the detector is 60. A moderate mass resolution of about 3,000 is achieved, although this is limited by the short flight path available in the sectors 13-15.

(17) More recent multi-sector systems provide higher mass resolutions, although at a compromised spatial resolution of 100 m for DE-MALDI sources. A small viewing field, and moderate spatial and mass resolutions are characteristic for electric sector TOF instruments since they have a limited flight path length and compensate only for first order spatial and time-of-flight aberrations.

(18) FIGS. 2A and 2B illustrate a prior art instrument according to WO 2005/001878. The instrument is a multi-reflecting mass spectrometer 20 comprising a pair of planar mirrors 21, a drift space 22, a periodic lens array 23, a pulsed ion source 24 and a detector 26. The planar ion mirrors 21 are formed by metal frames and are extended in a direction along the ion drift direction Z. The ions pulsed into the drift space 22 between the ion mirrors 21 such that they perform multiple reflections between the ion mirrors 21 as they drift in the z-direction to the detector 26. The multiple mirror reflections extend the flight path of the ions, which improves mass resolution. The periodic lens 23 confine the ion packets along the main zig-zag trajectory 25.

(19) FIG. 2B shows a view in the X-Y plane. Due to lower order lens time of flight aberrations, the analyzer has higher acceptance in the Y-direction. WO2007044696 proposes using an orthogonal accelerator oriented in vertical Y-direction.

(20) The ion mirrors employed in WO 2005/001878 are known to simultaneously provide second order time-of-flight focusing:
T|BB=T|BK=T|KK=T|YY=T|YK=T|YB=0(1)
with spatial confinement in the vertical Y-direction and with compensation of second order spatial aberrations after an even number of reflections:
Y|B=Y|K=0; Y|BB=Y|BK=Y|KK=0(2a)
B|Y=B|K=0; B|YY=B|YK=B|KK=0(2b)
combined with a third order time per energy focusing
T|K=T|KK=T|KKK=0(3)
where the aberrations are expressed with the Taylor expansion coefficients, Y is vertical coordinate, B is the angle to axis, K is ion energy and T is the flight time.

(21) In WO 2013/063587, the focusing properties of planar MRTOFs were improved by achieving third order full time-of-flight focusing, including cross terms:
T|BBK=T|YBK=T|YYK=0(4)
and by reaching up to fifth order time-per-energy focusing:
T|K=T|KK=T|KKK=T|KKKK=T|KKKKK=0(5)

(22) Both spatial and time-of-flight aberrations of mirrors appear far superior compared to sector based TOF mass spectrometers, since sectors compensate for only first order aberrations, i.e. satisfy only equation 1 above.

(23) Although ion mirrors provide advanced ion optical properties compared to sectors, the spatial focusing and image mapping properties of gridless planar ion mirrors were not appreciated and were not used for multiple practical reasons. The present invention employs a time of flight region comprising at least one ion mirror for mapping ions onto a position sensitive detector.

(24) FIG. 2C shows an embodiment of the present invention comprising an ion source 301, a radio frequency quadrupole ion guide 302, an exit aperture 303, a ion optical lens 304; an ion deflector system 305 for ion beam displacement in the Y-direction; and a 1D mapping MRTOF 180 comprising a 1D mapping orthogonal accelerator 185. In operation, the ion source may emit or generates a single flow of ions. The ion flow may be substantially constant or may vary with time. The ions are guided along a central axis in the Z-direction by the ion guide 302 and ion optical lens 304 until they reach the ion deflector system 305. The ion deflector system 305 comprises a pair of entrance deflector plates and a pair of exit deflector plates. The ions are received at the deflector system 305 and are deflected away from the central axis by the entrance deflector plates. This is achieved by supplying opposing electrodes of the entrance deflector plates with voltages of opposing polarities. The ions continue to travel away from the central axis as they travel in the Z-direction and until they reach the exit deflector plates. The exit deflector plates are supplied with voltages so as to halt the motion of the ions away from the central axis and so as to compensate for the motion in the Y-direction imparted to the ions by the entrance deflector plates. The ions then continue downstream along a longitudinal axis extending in the Z-direction that is parallel to the central axis. Accordingly, the ion deflector system 305 has displaced the ions in the Y-direction, as shown by ion beam 306 in FIG. 2C.

(25) The deflected ions are then transmitted into the orthogonal accelerator 185, wherein they are accelerated into the MRTOF 180 for time of flight mass analysis. As described in more detail below, the MRTOF 180 maps the positions of the ions entering the MRTOF to corresponding positions on the position sensitive detector 187. Accordingly, the ions deflected to position 306 by the ion deflector system 305 are received at a corresponding position on the position sensitive detector 187 that is displaced from the central axis of the detector 187.

(26) The voltages applied to the ion deflector system 305 are varied with time such that the displacement of the ions in the Y-direction at the exit of the ion deflector system 305 varies with time. Accordingly, the displacement of the ions received at the position sensitive detector 187 also varies in a corresponding manner.

(27) The ions have a relatively long time of flight in the MRTOF 180 due to the multiple reflections between the ion mirrors. This enables the ions in each pulse become temporally well separated in the time of flight region, thus providing the instrument with a high resolution. However, due to this high temporal separation of the ions, pulsing the ions into the MRTOF 180 at too high a rate would lead to spectral overlap in which slow ions from a first ion injection pulse are detected after fast ions from a second, later ion injection pulse. This limits the rate at which ions can be pulsed into the MRTOF 180 before spectral overlap occurs, thus limiting the duty cycle of the instrument.

(28) In order to overcome this problem, the instrument may be operated in an encoded frequency pulsing (EFP) mode. In this mode, the orthogonal accelerator 185 pulses ions into the Time of Flight region in a series of pulses, wherein the time delay between pairs of adjacent ion injection pulses is varied in a predetermined manner, as opposed to the conventional method of employing a uniform time delay between all of the pairs of adjacent pulses. The ions may then be pulsed into the MRTOF 180 at a relatively high rate, in which the ions in a first pulse temporally overlap with the ions in a subsequent pulse. The detector 187 then detects the arrival times of the ions and obtains a signal corresponding to the overlapping spectra. As the variable time delays between ion injection pulses are known in the EFP method, this can be used to unpick overlapping peaks in the TOF spectra so as to obtain non-overlapping spectra. This may be performed by correlating the overlapping spectra with the encoded sequence for injecting ions into the MRTOF 180. The EFP mode enables ions to be injected into the TOF device at time intervals that are shorter than the TOF separation time and so enables the duty cycle of the spectrometer to be increased. For example, the orthogonal accelerator may be operated with an average pulse period of 5 to 10 s.

(29) The method of deflecting the ions onto different regions of the detector 187 with the ion deflection system 305 may bypass dynamic range limits in the EFP method, e.g. posed by signal overlaps with peaks of chemical noise such as in LC-MS analysis and parent ion detection in data dependent LC-MS-MS analysis (DDA). For example, in an LC-MS analysis the ion flow may be considered to be constant relative to the time scale of spectral acquisition. During the EFP mode of operation, the spectral dynamic range may be limited by chemical background noise. The number of spectral overlaps may be reduced by deflecting the ions using the ion deflector system 305 such that the same ion beam is deflected onto different strips of the detector 187 at different times. This improves the dynamic range of the instrument during EFP spectral acquisition. Splitting the ion signal between different detector data channels in this manner retains the useful ion signal, whilst reducing the number of overlaps with chemical background peaks in a manner that is proportional to the number of data acquisition channels that the ion beam is split between.

(30) Alternatively, a device upstream of the ion deflecting system 305 may transmit different ions at different times to the ion deflecting system 305. The ions may be released from the upstream device in a cyclical manner. For example, the upstream device may be a mass or ion mobility separator that cyclically separates ions according to mass or ion mobility. Alternatively, the upstream device may be fragmentation cell that cyclically varies the fragmentation energy. The ion deflecting system 305 may deflect ions across the detector 187 in a cyclical manner, and may be synchronized with the cycle time of the upstream device. Accordingly, different ions from the upstream device are able to be mapped onto different regions of the detector 187. This method enables mapping of ions that are separated over relatively fast time-scales, while using longer accumulation times of the data acquisition system 188, and enables data for multiple cycles to be summed. For example, the signal detected at each detector position in multiple cycles may be summed. If an EFP mode is use the method also provides an improved dynamic range.

(31) The exit aperture 303 may be operated as an ion gate by selectively applying a voltage to it that blocks the path of ions through the exit aperture 303. The voltage may be operated so as allow ions to pass through the exit aperture in pulses. The pulses may be synchronized with the pulsed orthogonal extraction of the orthogonal accelerator 185 so as to optimize the duty cycle of the instrument.

(32) Voltages may be applied to the quadrupole 302 such that it operates as a mass filter, in which only ions of selected mass to charge ratio(s) are stable and are transmitted by the quadrupole 302. The quadrupole may be operated with a low mass cut-off, a high-mass cut off, or as a band pass filter. When the exit aperture 303 is operated as an ion gate, the delay time between a pulse of ions being released through the ion gate and that same pulse of ions being orthogonally accelerated in the orthogonal accelerator 185, may be selected based on the value(s) of the mass to charge ratio(s) transmitted by the quadrupole 302.

(33) FIG. 2D shows a schematic of an embodiment that is substantially the same as that of FIG. 2C, except that ion focusing elements 307 are provided between the pairs of deflector electrodes in the ion deflecting system 305 for focusing the ions in the X-direction. The ion focusing elements 307 may be opposing planar electrodes spaced apart in the X-direction and between which the ions pass.

(34) The ion deflecting system 305 may receive a beam of ions that varies in intensity as a function of time. Alternatively, or additionally, the ion deflecting system 305 may receive a beam of ions having a physicochemical property value that changes with time. For example, the mass to charge ratios or ion mobilities of the ions received at the ion deflecting system 305 may vary with time.

(35) The ion deflecting system 305 may deflect different portions of the time varying ion beam to different positions on the detector 187, thereby providing a set of independent spectra. For example, different mass to charge ratios or mass to charge ratio ranges may be directed to different parts of the detector by the ion deflecting system 305. Alternatively, different ion mobilities or ion mobility ranges may be directed to different parts of the detector by the ion deflecting system 305. Alternatively, or additionally, ions from different ion sources may be directed to different parts of the detector by the ion deflecting system 305. For example, ions derived from different channels in a multi-channel LC device, or from different sprays in a multiple sprays device, may be directed to different parts of the detector by the ion deflecting system 305. Alternatively, ions generated from different regions of an analytical sample, from different samples, or from different regions on a sample plate may be directed to different parts of the detector by the ion deflecting system 305. For example, ions from different spots on a MALDI sample plate may be directed to different parts of the detector by the ion deflecting system 305. Alternatively, ions fragmented with different fragmentation energies in a collisionally induced fragmentation cell or generated by time-variable in-source fragmentation may be directed to different parts of the detector by the ion deflecting system 305.

(36) FIG. 3A schematically illustrates the ability of analyzer to transfer ions from pixels of the ion source array 44 to corresponding pixels of the ion detector array 45. Pixelated detectors, such as those disclosed in U.S. Pat. No. 8,884,220, may be used to record time-of-flight signals from a matrix of individual pixels in the detector by using an array channel data system 47.

(37) The spatial dimensions of the ion source array (i.e. view field) may be, for example, up to 7-10 mm and that the number of spots may form a 66 matrix, whilst retaining a mass resolution of approximately 100,000-200,000 for each individual pixel. The combination of a large field of view, and the spatial and mass resolutions provided is unprecedented and provides opportunities for high throughput mass spectrometric analysis. The analyzers may have a larger field of view and/or a larger source matrix density, such as a field of view up to 15-20 mm and/or a source matrix density of at least 1010.

(38) The mapping MRTOF described herein may be used for a number of applications. For example, the instrument may be used for crude surface imaging at a high throughput rate. Alternatively, or additionally, the instrument may be used for analyzing multiple samples deposited onto a surface as a macroscopic sample array. Such an analysis may be enhanced by sample micro-scanning within a pixel, i.e. within a sample well. The instrument may be used to analyze ions from multiple independent ionization sources, such as atmospheric or ambient sources, for high throughput analysis. For example, the instrument may analyze multiple sample spots ionized by ambient sources. A sample may be spatially separated by mass or mobility, and the instrument may be used for simultaneous parallel mass analysis of different separation fractions.

(39) The ion mapping from the ion source to the detector may be performed in one dimension or in two dimensions. For example, in one dimensional ion mapping ions may be generated from multiple sample regions that are distributed along the Y-dimension (or Z-dimension) of the ion source, and these ions may be mapped onto the detector at respective multiple regions that are distributed along the Y-dimension (or Z-dimension) of the detector. In two dimensional ion mapping ions may be generated from multiple sample regions that are distributed in the Y-Z plane of the ion source, and these ions may be mapped onto the detector at respective multiple regions that are distributed in the Y-Z plane of the detector.

(40) The field of view of an analyzer may be limited in both the Y- and Z-dimensions, before high order spatial aberrations degrade spatial resolution and cross-term aberrations degrade mass resolution. For example, the field of view may be 1 mm or less in any dimension. However, the position sensitive detector and/or the source array may occupy a relatively large area (e.g. larger than 1 mm in any dimension), or may have a relatively large (or small) pixel size. Also, the ion source and detector may be different sizes. The imaging and mapping system therefore may be subjected to a mismatch in spatial scales and/or a lack of space within the MRTOF analyzer to accommodate the source or detector. This may be accommodated for, as discussed further below.

(41) Although the spatial resolution of the described embodiment is moderate in terms of number of resolved pixels, it is very unusual for TOF analyzers to sustain imaging properties at large fields of view in comparison to prior art TOF mass microscopes, in which the imaging field is well under 1 mm.

(42) Due to the spatial resolution of the MRTOF, it can be seen that the ion packets in land on separated spots of the ion detector. As a result, the analyzer transfers ions from a matrix of ion source spots to a corresponding matrix of spots on the detector. This system may allow independent acquisition of a matrix of ion beams or ion packets, with minimal ion losses and without any signal interference between individual pixels at the detector. This leads to an improvement in the analysis throughput. Although a 66 matrix of ion sources has been described, denser matrices and larger fields of view may be provided using the analyzer.

(43) FIG. 3B shows a schematic of an orthogonal accelerator for increasing the duty cycle of the instrument. In FIG. 2A the ions are illustrated as being accelerated from only one side of the orthogonal accelerator 24. According to the modification of FIG. 3B, the orthogonal accelerator may inject ion packets into the Time of Flight region in two opposite directions. The ions injected in the opposite directions are reflected by the ion mirrors multiple times before they hit the detector. The detector 26 may be replaced by a double-sided ion detector and ions injected in opposite directions into the Time of Flight region may impact on opposite sides of the detector. Alternatively, the ions injected in opposite directions into the Time of Flight region may be injected at acute angles to the X-dimension that are different to each other such that the ions injected in the opposite directions travel a different total distance in the Z-dimension by the time that they impact on the detector. The ions injected in opposite directions into the Time of Flight region may therefore be detected at different positions on the detector 26. Voltages may be applied to the orthogonal accelerator so as to alternately eject ions from opposite sides of the orthogonal accelerator. The orthogonal accelerator of FIG. 3B allows ion packets to be introduced into the analyzer at a faster rate without spectral overlap.

(44) Telescopic (e.g. microscopic) ion optical sets, including lenses, mirrors or sectors may be used to map the ions from the source to the detector. FIGS. 4A-4C show telescopic and microscopic lens arrangements that may be used.

(45) FIG. 4A shows a schematic of a telescopic device 50 for interfacing a source array 51 that is relatively wide in the Y- and Z-dimensions to an analyzer having a detector 52 that is smaller in the Y- and Z-dimensions.

(46) FIG. 4B shows a schematic of a microscope lens set 53 for expanding the ion beams from a source array 54 in the Y- and Z-dimensions. For example, the microscope lens set 53 may image a small surface with a field of view of about 1 mm in each of the Y- and Z-dimensions to a wider ion packet array within the analyzer 55, e.g. optimized to an array size of about 3-5 mm in each of the Y- and Z-dimensions.

(47) FIG. 4C shows a schematic of a telescopic expander 56 for expanding the ion beams from a source array 57 that is relatively small in the Y- and Z-dimensions to an analyzer 58 having a detector that is larger in the Y- and Z-dimensions (e.g. 15-25 mm). Such a detector may be used to retain macroscopic pixels and handle larger ion fluxes.

(48) FIG. 5 shows an embodiment comprises a multi-beam ion source 71 for forming a 1D or 2D array of continuous ion beams. A static telescopic lens system 72 is provided for converting the beam array to a beam array having smaller dimensions. A beam converter 73 is provided for forming pulsed ion packets. An isochronous and imaging sector 75 is provided for transferring ion packets into the TOF region 76. The ions then separate according to time of flight in the TOF region 76. An isochronous imaging sector 77 is provided for guiding ions out of the TOF region 76 and through a magnifying lens 78 and then onto a pixelated detector 79. The use of sectors, such as electrostatic sectors, is particularly useful as it allows the ion source or detector to be moved externally from the MRTOF analyzer.

(49) Both sectors 75 and 77 may be either cylindrical, torroidal or spherical, depending on whether 1D or 2D ion mapping is desired. A cylindrical sector may be used for 1D mapping, or torroidal or spherical sectors may be used for 2D mapping. The sectors may be combined with electrostatic lenses. Both sectors may be composed of several sector sections for optimal spatial resolution and isochronicity. The sector steering angles may be optimized depending on the overall arrangement, for example, as described in WO 2006/102430.

(50) Electrostatic sectors serve multiple functions. They allow a relatively large ion source array and detector to be arranged outside of the MRTOF, whilst introducing ions into and extracting ions from the TOF region. Also, sectors are capable of removing excessive energy spread of the ions so as to optimize spatial and mass resolution with only moderate ion losses. Sectors may also be used as part of telescopic arrangements for optimal adoption of spatial scales between the ion source, the TOF analyzer and the detector.

(51) In the analyzers of the embodiments described herein, spatial resolution may be primarily limited by high order spatial aberrations, such as spherical aberration Y|YYY or view-field curvature Y|BBY, or by other high order cross-aberrations including energy terms. Thus, spatial resolution is expected to improve at smaller ion trajectory offset and smaller view field. The smaller view field may be magnified with telescopic lenses or sectors, also may incorporate diverging trajectories of the MRTOF analyzer, as has been described in relation to FIG. 4.

(52) Although only the use of planar ion mirrors for the TOF region have been described above, it is contemplated that other geometries may be employed.

(53) FIG. 6 shows various different topologies of planar and curved electrodes that may be used to form two-dimensional electrostatic fields for use as the TOF regions in the analyzers of embodiments. These topologies may be used to provide the ion mapping properties described above, whilst providing denser packaging of ion trajectories. It may be desired for the analyzers to combine both sectors and ion mirrors, since ion mirrors are capable of compensating for multiple sector aberrations. Combined (hybrid) systems may have similar ion optical properties to systems built from only ion mirrors.

(54) The topology labeled 101 schematically illustrates the electrode arrangement for the planar MRTOF that has already been described above, having two parallel, straight ion mirrors. The topology labeled 102 schematically illustrates the electrode arrangement for a hybrid folded analyzer having a sector that guides ions between two ion mirrors. The topology labeled 103 schematically illustrates the electrode arrangement for another hybrid system built using multiple sectors and an ion mirror. The topology labeled 104 schematically illustrates the electrode arrangement for another analyzer that may be used for multiplexing, e.g. as described in WO 2011/086430. The topology labeled 105 schematically illustrates the electrode arrangement for an analyzer that is similar to topology 101, except that the mirrors are cylindrically wrapped. The topology labeled 106 schematically illustrates the electrode arrangement for an analyzer that is similar to topology 102, except that the mirrors and sector are cylindrically wrapped. The topology labeled 107 schematically illustrates the electrode arrangement for an analyzer that is similar to topology 105, except that the upper mirror is replaced by a spherical sector. The illustrated instruments having mixed symmetry and employing curved ion trajectory axes provide compact analyzers and allow geometrical up-scaling at a given instrument size. Ion mapping and imaging properties, as with TOF resolution, are rapidly improved with the analyzer up-scaling due to the fast reduction of high order aberrations.

(55) As described above, the pixelated detector may provide independent mass spectral analysis for each individual pixel, or groups of pixels in the ion source. Prior art ion mapping instruments typically have a field of view with each dimension under 1 mm. In contrast, the embodiments described herein may provide instruments having lower resolution ion mapping but with a much larger field of view, such as up to 1010 mm in combination with parallel (simultaneous) acquisition of high resolution mass spectra for all mapped pixels. The mass spectral mapping of macroscopic size spots (e.g. spots having a dimension in each direction of 1-2 mm) allows the opportunity of parallel and independent analysis for multiple ion sources, either from 1D or 2D arrays.

(56) Various methods and apparatus are contemplated herein for miniaturizing ion source arrays, ion transfer arrays, ion optics arrays, and forming appropriate pulsed converters for such arrays, enabling multi-channel MRTOF with high throughput analysis.

(57) The mapping MRTOF described herein allows parallel analysis of multiple ion flows. Various arrays of ambient ion sources are known, although they are conventionally multiplexed in an atmospheric or vacuum interface for analysis in a single channel mass spectrometer. In contrast, the ion source arrays may be used in the present invention for parallel analysis and hence the instrument provides a much higher throughput than prior art instruments.

(58) FIGS. 7A-7C show various arrays of ion sources that may be used with the mapping MRTOF. The ion source may comprise an array of independent ion sources, such as ESI, APCI, APPI, CGD, DESI, DART, or MALDI ion sources. Each array may comprise multiple ion sources of the same type or of different types. The arrays of ion sources may operate at atmospheric pressure, or at lower pressures, such as 1-100 Torr gas pressure, e.g. in the case of gaseous MALDI ion sources or conditioned glow discharge (e.g. as described in WO 2012/024570). The ion sources in any given ion source array may ionize multiple different samples simultaneously and therefore may provide the instrument with a high throughput. The ion sources in any given ion source array may be connected to multiple samples, e.g. to multiple chromatographic channels or may be used for surface imaging at ambient gas pressure.

(59) Different types of ion sources may be used in any given array of ion sources. The ion sources may be used for the simultaneous analysis of the same sample, for example, for obtaining additional information due to variations in softness, charge states, selectivity, fragmentation patterns, variations in discrimination effects, or for calibrations in mass, intensity or at quantitative concentration measurements.

(60) FIG. 7A shows a schematic of an ion source array comprising an array of ESI spray micro-tips 132 connected to a multi-well sample plate 131. The sample flow to spray tips 132 may be induced by pressurizing the sample with gas. If a relatively large array dimension is used (e.g. 386 wells), the well plate 131 may be incrementally moved across the array of sampling nozzles 132.

(61) In one example of practical importance, the instrument may be used for proteomic analyses. State of the art proteomic analyses with single channel LC-MS-MS may last for several hours, as several thousand runs may be required for each study. For higher throughput the multi-channel MRTOF described herein may be used. The proteomic samples may be pre-separated, e.g. by affinity separation or salt exchange chromatography and prior to the step of enzymatic digestion. Then separated fractions may be analyzed in parallel using multiple independent LC-MS channels or LC-MS.sup.E channels (more preferable), whilst using a single mapping MRTOF mass spectrometer as described herein. Compared to the conventional single channel LC-MS-MS experiment, the MRTOF is expected to obtain more information per sample (e.g. in research programs) or obtain the same information at much faster LC gradients (e.g. for high throughput clinical analysis). Alternatively, multiple proteomic samples may be analyzed in parallel for higher throughput with a LC-MS.sup.E method. Higher throughput may also be highly desirable for other LC-MS and GC-MS analyses in clinical, environmental, and metabolomic studies.

(62) FIG. 7B shows a schematic of an ion source array for 1D array flow sampling. The ion source may be used for ambient surface imaging. A DART or DESI flux 134 of primary particles (e.g. charged droplets or metastable Penning Argon atoms) may be used to ionize a sample or samples over a relatively large sample surface 135. A linear array of nozzles 136 may be provided to sample ions from a linear array of parallel surface pixels on the target surface 135. The spatial resolution (i.e. pixel size) is defined by the size of ion collection into each nozzle, typically being about 3 times larger than the nozzle diameter. The nozzle diameter may be chosen to be 0.1-0.3 mm for a spatial resolution of 0.3-1 mm. As the 1D array of nozzles collects ions from a strip along the target surface 135, the sample plate may be scanned across the entrances to the nozzles. The resolution of the surface imaging may be somewhat improved with sample plate scans 137. The array analysis notably accelerates the surface analysis with DART and DESI, which is slow with existing single channel mass spectrometers.

(63) FIG. 7C shows a schematic of another ion source array. The spatial resolution of the ambient surface analysis may be enhanced in this embodiment by using an array of small size ionizing beams, such as focused laser beams 139. The laser beams 139 may be produced using an array of micro-lenses or using interference of coherent laser beams. The sample plate may be scanned across the laser beams, or vice versa. For example, each laser beam may be scanned across the target plate within a portion corresponding to a pixel on the target plate. This embodiment provides parallel analysis of the source array with ion mapping to the detector and high mass resolution.

(64) FIG. 8A shows a further embodiment of the source array. In this embodiment, ESI spray tips 130 are assisted with focusing electrodes in order to provide sharper focused ESI plumes. Ion flows from multiple sources 130 are sampled by electric fields and by gas flow into an array of heated capillaries 141. The heated capillaries may have sharp tips or cones with sampling apertures at their tops. The ions may then be transmitted into and confined in channels 142. The channels may be defied by apertured plates and RF potentials may be applied to these plates so as to confine the ions in the channels.

(65) A capillary diameter of about 0.5 mm nay be used for higher sensitivity, leading to approximately 1 L/s gas flux through the 36 channels. A mechanical pump (e.g. a scroll pump) may be used to evacuate a large gas flux past the capillaries, for example with a pumping speed above 30 L/s, as shown by white arrows. This brings the gas pressure down to under 30 Torr, i.e. into the range for effective RF confining within RF channels 142.

(66) FIG. 8B shows a further embodiment of the source array wherein the sampling plate 144 comprises sharp cones with relatively smaller sampling nozzles apertures, limiting the sampled gas flow. Ions are further sampled by gas flow into relatively wider channels 146 that may be machined in a heated block 145, for example by point EDM. Once gas flow is limited by apertures of sampling plate 144, the internal part of the block 145 may be constructed of split pieces, for example, from plates, cylinders, cones, or wedges, for ease of making channels 146 and for cleaning.

(67) The nozzle spacing may be spread spatially for efficient sampling from an array of multiple macroscopic ion sources, while channels 146 may converge towards the exit. Since ion collection diameter may be desired to be at least three times the nozzle aperture diameter, for imaging applications, the nozzle diameter could be reduced, for example, to 0.3 mm so as to reduce the gas load through the nozzle array, which may be about 0.4 L/s for 36 channels. A single mechanical pump pumping at 10 L/s may be provided to drop the gas pressure to under 30 Torr. Even lower gas loads may be provided by using finer nozzles for surface imaging at higher spatial resolutions.

(68) FIG. 8C shows a further embodiment of the source array that is similar to that of FIG. 8B, except that a sectioned nozzle array 149 is provided with distributed pumping, as shown by the white arrows. If a relatively large number of channels (e.g. 100) are used or larger nozzle apertures are used (e.g. for improved sensitivity), the nozzle array 149 may comprise two or more aligned stages of heated channels with differential gas evacuation in between the stages. Ion transfer between the stages may be assisted by gas dynamic focusing of ions on the axis of each heated capillary and/or by electrostatic focusing onto sharp capillary tips of the second stage. Alternatively, the nozzle array may comprise perforated apertures with alternated DC potentials and with distributed pumping between the plates. Gas jets formed on the axis of each channel will transfer ions at nearly sonic speed this way, generating the time alternated force required to provide spatial confinement of ions to the axis.

(69) It is desired to form ion beams and ion packets, e.g. for small size arrays.

(70) FIGS. 9A-9C depict a schematic of a multi-channel MRTOF having a 1D array of ambient ion sources and configured to perform 1D ion mapping onto the detector 175. As shown in FIG. 9A, the instrument comprises a 1D array of RF quadrupoles 165, a set of micro-lenses 171 for forming a low divergence beam array 172, a telescopic lens 173 (e.g. having a magnification of one, or having size compression), an orthogonal accelerator 175 with a wire mesh 176, a lens 178 terminating the field of the orthogonal accelerator 175, and a sectioned deflector 177.

(71) FIG. 9B depicts the ion focusing downstream of the quadrupole array 165 by micro-lens 171. In this example, the pitch of quadrupole array is 2 mm with inscribed diameter of each quadrupole being 1.4 mm. An RF signal of 5 MHz with an amplitude of 300-500V is used to compress the ion flow to a diameter under d=0.1 mm. The ion flow is refocused at the electrostatic extraction point by an exit skimmer (the first set of apertures downstream of the quadrupole array), and is then expanded to a diameter of approximately D=0.5 mm within the micro-lens 171. The micro-lens array 171 with 1 mm diameter apertures accelerates ions to an energy eU=50 eV and forms wider but less divergent ion beams 172. The beam expansion D/d=5 causes a proportional reduction of ion beam angular divergence. The angular divergence of thus formed ion beams may be estimated as 2*(kT/eU){circumflex over ()}0.5*D/d and is approximately =10 mrad, i.e. half a degree. Without the micro-lens, the divergence would be 2.5 degrees. The reduction of the angular divergence of the beams serves two important purposes: it reduces ion beam interference at mapping, and it proportionally reduces the turn-around time in the orthogonal accelerator 175.

(72) The array of ion beams then enters the telescopic lens 173. The telescopic lens is used for delivering narrow ion beams into the orthogonal accelerator 175, thus preserving ion beam separation. The telescopic lens also interfaces the spatial scale of the ion source to MRTOF field of view. For example, a 20 mm wide beam array may be compressed into a beam array within the accelerator 175 that is 7-10 mm wide. The icon 173 illustrates a particular example of the telescopic lens with unit magnification. The view is compressed about twice in the Z scale. The lens is 120 mm long and with a 30 mm inner diameter. The beam array is refocused by two lenses without any additional spreading of beam width, despite an initial divergence angle of 2 degrees. The telescopic lens may be tuned to provide spatial ion beam refocusing in the middle of the accelerator 175. Without the telescopic lens, the ion beams would spread for 1 mm while passing into the accelerator, which must be spaced from the quadrupole array, at least for reasons of differential pumping.

(73) The orthogonal accelerator 175 shown in FIG. 9C is designed to accept a wide (e.g. 10 mm) array of ion beams while minimizing angular ion scattering if using any mesh. The intermediate stages of the accelerator 175 may employ a mesh 176 made of wires oriented along ion beams, but may use an accelerating field of equal strength around the mesh to minimize the ion scattering on the mesh. The exit stage of the accelerator may be terminated by a wide open lens 177 to avoid angular ion scattering. Any ion beam angular focusing is accounted for and balanced with other spatially focusing elements of the MRTOF, e.g. either the ion mirror 21 or periodic lenses 23 of FIG. 2 or 5.

(74) The ion beams at the entrance of the orthogonal accelerator 175 may have a diameter under 1 mm, a mean ion energy of 50 eV, and an angular divergence of about 0.5 degrees. In order to provide a short sub-nanosecond turn-around time, the accelerator may be arranged with a large extraction field, e.g. 300-500 V/mm, thus creating an energy spread of about 300-500 eV.

(75) In order to handle ion packets having a large energy spread, the MRTOF may be operated at the highest practical acceleration voltage applied to drift region, e.g. 8 to 10 kV. The natural inclination angle of ion trajectories is =70 mrad (square root of energies 50 eV and 10 keV). In case of orienting ion beams along the Z-direction, and if no measures are taken, the ion packet advance would appear too high, i.e. 70 mm per mirror reflection, which would require an MRTOF having a large width in the Z-direction. To drop the inclination angle , the orthogonal accelerator 175 is tilted at the angle , and the packets are then steered by a deflector for the same angle . The deflector 178 may be composed of several sections for a more uniform deflection field. The ion beam energy at the accelerator entrance may be adjusted so that both the tilt and steering provide mutual compensation of the first order time aberration, as described in WO 2007/044696. In the chosen example of =70 mrad, =20 mrad, a resultant inclination angle of =30 mrad, at 5% relative energy spread, and if using ion packets under 25 mm length, the amplitude of residual second order aberration T|ZK stays under 1 ns with the peak FWHM being under 0.25 ns. With the chosen Z-pitch per ion reflection of 30 mm, the practical ion packet length is expected about 15 mm. At 50 eV ion energy, ions of 1000 amu travel with speed of 3 mm/s and traverse the useful extracted 15 mm portion of continuous packet within 5 s time.

(76) FIG. 10 shows an embodiment 180 of 1D multi-channel MR-TOF. The MRTOF instrument may comprise an array of ambient ion sources forming an array of ion flows 181, or may comprise a single ion source producing a single ion flow that is then split into multiple ion flows 182. The instrument comprises a multi-channel interface 183, oriented along the Z-axis, or a similar multi-channel interface 184 being oriented along the Y direction. The instrument comprises a 1D or 2D imaging MRTOF analyser 186, as described herein, and a pixelated detector 187 that is connected to a multi-channel data acquisition system 188.

(77) The array interfaces 183 or 184 may comprise a nozzle array 140 of type described above, an array of RF ion guide channels 163, an array of RF quadrupoles 165 having exit skimmers (optionally connected to pulse generator 185), an array of micro-lens 171, a telescopic lens 173, and an orthogonal accelerator 175.

(78) In one, continuous mode of operation, ion flows 181 may be separately transferred from individual ion sources, through individual channels of interface 183, into the orthogonal accelerator 175 as spatially separated ion beams. Each of the ions beams is then converted into spatially distinguished ion packets, elongated in the Z-direction and narrow in the Y-direction. The mapping MRTOF 186 transfers ion packets to the pixelated detector 187 without mixing the packets. The pixels of data system may be combined into strips along the Z-direction, and data system 188 may acquire multiple mass spectra in parallel, for each channel. The MRTOF 180 effectively forms an array of parallel operating mass spectrometers, while sharing a common vacuum chamber, differential pumping system, electronics and unifying analytical components, e.g. including making multiple apertures in one block rather than making multiple blocks for the nozzles, RF ion guide channels, RF quadrupoles, and ion optics.

(79) In another operational mode, extraction pulses are applied (from block 185) to the exit skimmers of the RF quadrupoles 165 in a manner that traps and releases ions in the RF quadrupoles. The pulses of the orthogonal accelerator 175 are synchronized in time with the pulses of the ions from the quadrupoles. A single pulse may be applied to the quadrupoles and the orthogonal accelerator in order to analyze ions from all channels simultaneously. This method enables an improvement in the duty cycle of the accelerator, though at the expense of a narrower mass range being admitted in each pulse. It is also contemplated that the timing of the extraction pulses 185 may vary between channels or between accelerator shots. This may be used to admit a wider overall mass range, or optimize the delay for the expected mass range of a particular quadrupole channel. The pulsed ion release may also be used to form a crude mass separation in the second direction, along the ion beams. The two dimensional pixelated detector may thus detect a narrow mass range per pixel, which reduces spectral population per pixel.

(80) FIG. 11 illustrates a MRTOF for performing two-dimensional mapping. The 2D Multi-channel MRTOF 190 comprises a 2D array of ambient sources 191, a 2D nozzle array 192, a 2D array of RF ion guide channels 193, a 2D curved interface 194; a 2D array pulsed converter 195, a 2D imaging MRTOF analyzer 197, a 2D pixelated detector 197, and a 2D array data system 198.

(81) The 2D array of ambient sources 191 may be of the type described herein above, e.g. in the form of a 2D array of spray tips 130. The 2D nozzle array 192 may be of the type described herein above, e.g. in the form of capillary array 141 and heated block 143 with machined channels (optionally a split heated block 148 of plates with channels). The curved interface 194 may be a 2D array of RF ion guide channels (194 RF), e.g. composed of mutually tilted perforated plates or PCB boards. Alternatively, the curved interface 194 may be a 2D array of electrostatic sectors (194 ES) for bypassing fringing fields of the ion mirrors, e.g. as described in U.S. Pat. No. 7,326,925 (X-inlet). The curved interface 194 allows the ion source array to be located externally to the MRTOF analyzer such that it does not interfere with the MRTOF analyzer.

(82) Compared to ambient sources, arranging an array of vacuum ion sources is the task of relatively lower complexity, since vacuum ion sources do not require multi-channel ion transfer interfaces and a powerful pumping system. The task is even simpler if using naturally pulsed ion sources, like pulsed SIMS, MALDI or DE-MALDI.

(83) FIG. 12A shows an embodiment of a 2D mapping MRTOF having an array of pulsed vacuum ion sources 210. The instrument may comprise a mapped target plate 211, which may be a mapped sample or a multi-well sample plate. An array of focused primary ion beams 212 may be directed onto the target plate 211 in order to ionize the sample thereon. Alternatively, an array of laser beams may be used to ionize the samples on the target plate 211. Different ion beams or laser beams may be directed onto different regions of the target plate 211 in order to ionize different areas/pixels on the target plate 211. Alternatively, a laser beam such as a scanning focused beam 213, may be scanned across the target plate to ionize the sample thereon. The beam may be scanned across the target plate so as to ionize different areas/pixels at different times. The instrument further comprises a mapping MRTOF analyzer 196, a pixelated detector 197, and a multi-channel data system 198 for parallel mass spectral acquisition.

(84) As described above, a variety of vacuum ion sources may be used. For example, when a plurality of laser beams are used to ionize the sample, an array 212 of fine-focused primary laser beams may be provided from a single, wide laser beam with the aid of multiple UV lenses or by an array of concave reflectors. When a single laser beam 213 is scanned across the target plate to ionize the sample, this may be performed with galvanic fast-moved mirrors. The laser beam(s) may be pulsed for MALDI, LD or DE MALDI ionization. When ion beams are directed at the target plate to ionize the sample, an array 212 of primary ion beams (e.g. for SIMS ionization) may be formed by an array of electrostatic micro-lenses. The primary ion beams 213 may be scanned across the target plate in a stepped or continuous and smooth manner. The ion beams may be scanned in at least one direction by electrostatic deflectors.

(85) When pulsed ionization is performed (e.g. SIMS, MALDI, DE MALDI, or LD), and when mapping within a wide field of view, the secondary ions (i.e. analyte ions) may be focused by an array of micro-lenses, optionally followed by a single wide aperture telescopic lens such as the type described in relation to FIG. 9. As the primary beams may be focused to a much finer spot size (e.g. 10-100 m) as compared to pixel size (e.g. 0.1-1 mm), the sample plate and/or ion beams and/or laser beam(s) may be micro-scanned (e.g. rastered) within sample pixel boundaries, as illustrated by arrows and R icon in FIG. 12. Where multiple ion or laser beams are used to ionize the sample, the ion or laser beams may aligned in a 1D array on the target plate that extends in a first direction, and the 1D array may be scanned or stepped across the target plate in a second (e.g. orthogonal) direction.

(86) FIG. 12B, shows an embodiment 214 that uses a close view mask 215 for separating individual secondary ion beams emitted from the target plate, e.g. if a continuous glow discharge ionization process is used. The spatial focusing of individual ion beams may be assisted by a micro-lens array 216 that may be followed by a large aperture single lens 217. Ion packets may be formed by pulsed acceleration past the mask 215.

(87) The parallel analysis by mapping multiple spots in a vacuum highly accelerates the analysis throughput. Using relatively fine ionizing beams in a vacuum allows multiple strategies for high spatial resolution for large overall sample sizes.

(88) As described above, the primary beam 213 may be rastered across the target plate. Rastering the primary beam 213 may be of assistance where the dose of the primary beam is limited by the sample stability. Rastering of the primary beam may be performed at a faster time scale than the period of the pulsed acceleration. In this manner, a single ion beam effectively acts as multiple beams. The rastering may use stepped selection of ionization spots, rather than smooth scanning. For higher throughput at high spatial resolution, the primary beam spots may be selected with a strategy of non-redundant sampling (NRS), e.g. as described in WO 2013/192161 and depicted by icon 215. The combination of spots within a pixel/area may be varied between acceleration pulses. The signal on the detector may be acquired as a data string without losing time information. The mass spectrum for a particular fine spot may then be extracted by correlation with the position of the spot. For practical convenience, the encoding pattern may be the same for all pixels and may be performed with surface 2D stepped rastering.

(89) The resolution of MRTOF devices is limited by the initial parameters of the incoming ion beam. For pulsed acceleration of the ions, the angular divergence of a continuous ion beam introduces velocity spread V in the TOF direction, which leads to so-called turn-around time T. The time spread T could possibly be reduced by using higher strength accelerating pulsed fields E, since T=V*m/qE. However, unfortunately the field strength is limited by the energy acceptance of the analyzer X*E<K. Thus, the ion beam emittance Em=X*V limits TOF MS resolution. The problem may be solved by using finer size quadrupoles, however, this requires the use of multiple quadrupoles to avoid space-charge expansion of the ion cloud at practical ion currents of several nA to tens of nA.

(90) FIG. 13 illustrates an embodiment comprising a single source 301, a distributing RF guide 308, 1D array of small quadrupoles (RFQ) 165, a planar lens 305; and either a mapping MRTOF 180 or a mapping Re-TOF 220. In operation, a single ion flow (e.g. up to a few nano-Amperes for LC-MS instruments) from the source 301 is distributed into multiple ion beams by the distributor 308, which may be, for example, a slit RF channel. The ions then enter multiple channels of the 1D RFQ array 165. The 1D RFQ array 165 may be made by EDM for better precision and a small inscribed diameter of RFQ. Distribution of the ion current between multiple RFQ channels drops the ion current per channel, thus avoiding (or reducing) space-charge effects and the resulting beam expansion. Each of the RF-only ion guides 165 may have a small inscribed radius R1 mm and may be operated at elevated frequencies of, for example, 10 MHz and an amplitude of at least V=1 kV in order to form narrow ion beams. To keep parameter q=4V*ze/m/R.sup.2(2 pi*F).sup.2<1 at a low m/z of 100 amu, at R=1 mm and at high amplitude V=1 kV (o-p), higher frequencies of F=10 MHz are desired. The dynamic well in a RFQ is known to be W(r)=(r/R).sup.2*q*V/4. For an upper m/z of 2000 amu (q=0.05), the beam size in an RFQ may be estimated assuming W(r)=kT: d=2R*(4 kT/qVe).sup.0.5=0.1 mm.

(91) Ion beams may be extracted from the RFQ array 165 by a negative bias on skimmers, which form local crossovers near the skimmer plane. The planar optics 305 then provide ion beam spatial expansion while reducing angular divergence in the X-direction, say by 10-fold (e.g. in line with U.S. Pat. No. 8,895,920). Planar optics 365 allow mixing of multiple beams in the Y-direction, thus forming wide ion packets in the orthogonal accelerator 185, illustrated by the dark square.

(92) Strong spatial compression of ion beams in the X-direction reduces the beam emittance, thus reducing the turn-around time and increasing the resolution in the MRTOF 190 or Re-TOF 220.