MANUFACTURING METHOD OF DIAMOND POROUS GRINDING BLOCK BASED ON 3D PRINTING AND APPLICATION THEREOF

Abstract

A manufacturing method of a diamond porous grinding block based on 3D printing. The manufacturing method includes designing a 3D printing model of a grinding block unit cell with an adjustable porosity according to an internal cooling space for abrasive debris required in a grinding process, importing the 3D printing model of the grinding block unit cell into a MAGICS software, filling a frame of a 3D printing model of a diamond porous grinding block with a plurality of 3D printing models of grinding block unit cells; preparing mixed powder of diamond abrasive particles and an aluminum alloy binder as printing powder, performing 3D printing to the 3D printing model of the diamond porous grinding block by an SLM technology to obtain the diamond porous grinding block. The diamond porous grinding block is configured to form a diamond structure grinding disc for grinding a semiconductor substrate.

Claims

1. A manufacturing method of a diamond porous grinding block based on three-dimensional (3D) printing, comprising: S1: designing a porosity of a grinding block unit cell according to an internal cooling space for abrasive debris required in a grinding process, and obtaining a 3D printing model of the grinding block unit cell with the porosity by a designing software based on a mathematical function relationship; S2: creating a frame of the diamond porous grinding block in a MAGICS software, filling the frame of the diamond porous grinding block with a plurality of 3D printing models of grinding block unit cells; determining a size of the frame of the diamond porous grinding block to obtain a 3D printing model of the diamond porous grinding block; and S3: preparing mixed powder of diamond abrasive particles and an aluminum alloy binder as printing powder, performing 3D printing to the 3D printing model of the diamond porous grinding block by a selective laser melting (SLM) technology; wherein the steps S1 comprises: S11: selecting a mathematical function Gyroid as a curved function for generating the 3D printing model of the grinding block unit cell; and modeling in a MATLAB software to obtain a 3D model of the grinding block unit cell with the porosity in an STL format; and S12: importing the 3D model of the grinding block unit cell in the STL format into a SOLIDWORKS software to obtain the 3D printing model of the grinding block unit cell; wherein the porosity of the grinding block unit cell is 0.3-0.8; a volume fraction of the diamond abrasive particles is 10%-30%; a laser power of the SLM technology is 200-400 W; a scanning speed is 2500-3500 mm/s; a scanning interval is 100-150 m; a spot diameter is 70-90 m.

2. The manufacturing method according to claim 1, wherein in the step S3, an average particle size of the diamond abrasive particles is 40-80 m; the aluminum alloy binder is AlSi.sub.7Mg; the mixed powder is prepared by mechanical mixing the diamond abrasive particles with the aluminum alloy binder; a mixing time is 8-15 hours.

3. The manufacturing method according to claim 2, wherein the mixed powder is dried in a vacuum drying oven before 3D printing; a drying temperature is 80-100 C.; a drying time is 8-15 hours.

4. A diamond porous grinding block manufactured by the manufacturing method according to claim 1, comprising holes communicated with each other in a 3D space.

5. A diamond structure grinding disc for grinding a semiconductor substrate, comprising: a plurality of diamond porous grinding blocks according to claim 4; the plurality of diamond porous grinding blocks are built up to form the diamond structure grinding disc.

6. The diamond structure grinding disc according to claim 5, wherein each of the diamond porous grinding blocks is hexahedron, octahedron, or dodecahedron.

Description

BRIEF DESCRIPTION OF DRAWINGS

[0025] FIG. 1A is a schematic diagram showing a principle of generating a 3D printing model of a grinding block unit cell corresponding to a mathematical function Gyroid according to one embodiment of the present disclosure.

[0026] FIG. 1B is a schematic diagram showing the principle of generating the 3D printing model of the grinding block unit cell corresponding to the mathematical function Gyroid according to one embodiment of the present disclosure.

[0027] FIG. 1C is a schematic diagram showing the principle of generating the 3D printing model of the grinding block unit cell corresponding to the mathematical function Gyroid according to one embodiment of the present disclosure.

[0028] FIG. 2 is a structural schematic diagram of the 3D printing model of the grinding block unit cell having a porosity of 0.3-0.8 according to one embodiment of the present disclosure.

[0029] FIG. 3 is a structural schematic diagram of a diamond porous grinding block assembled by grinding block unit cells according to one embodiment of the present disclosure.

[0030] FIG. 4 is a schematic diagram showing a principle of forming a diamond structure grinding disc for grinding a semiconductor substrate according to one embodiment of the present disclosure.

DETAILED DESCRIPTION

[0031] The present disclosure will be further explained below in conjunction with the accompanying drawings and specific embodiments. The drawings of the present disclosure are only schematic diagrams for well understanding of the present disclosure, and specific proportions thereof can be adjusted according to design requirements.

[0032] The present disclosure further provides a diamond porous grinding block for grinding a semiconductor substrate. The diamond porous grinding block comprises grinding block unit cells. A three-dimensional (3D) model of each of the grinding block unit cells is modeling in a MATLAB software according to a mathematical function Gyroid. An editable code of an advanced program of the mathematical function Gyroid accurately identifies and processes the mathematical function Gyroid to generate the 3D model of the grinding block unit cell with the porosity that is adjustable in an STL format. The porosity of the grinding block unit cell is determined according to grinding and flowing requirements. Next, a series of processes is performed by a 3D modeling processing software (i.e., SOLIDWORKS software) to obtain a 3D printing model of the grinding block unit cell with the porosity that is adjustable. The 3D printing model of the grinding block unit cell is capable of being processed by a selective laser melting (SLM) printing manufacturing device. 3D printing models of the grinding block unit cells are built up to form a 3D printing model of the diamond porous grinding block by a print debugging software (i.e., a MAGICS software).

[0033] Specifically, a tool creation command in a task menu bar of the MAGICS software is adopted to create a frame of the diamond porous grinding block. The frame of the diamond porous grinding block is a hexahedron, a octahedron, a dodecahedron, or etc. Then, a structure of the 3D printing models of the grinding block unit cells is selected and imported into the MAGICS software. Finally, a size of the frame of the diamond porous grinding block is determined to obtain the 3D printing model of the diamond porous grinding block Laser printing is carried out to obtain one diamond porous grinding block, and then a plurality of diamond porous grinding blocks are built up to form a diamond structure grinding disc for grinding the semiconductor substrate.

[0034] A design concept of the diamond porous grinding block is based on a special function of the MAGICS software that generates a 3D solid model for a multi-dimensional surface in a mathematical function space base on a program code and a 3D digital model. The mathematical function Gyroid is selected as a curved function for generating the 3D printing model of the grinding block unit cell.

[0035] As shown in FIGS. 1A-1C, a method of generating a model structure corresponding to the mathematical function Gyroid comprises following steps. [0036] 1: A cube point set is established according to predetermined value ranges of x, y, and z. An equivalent surface is obtained by an isosurface function according to a curved surface expression.

[0037] Namely, an isosurface function of a MATLAB software is used. [0038] 2: Since the model structure meeting 3D printing requirements must be a closed 3D model, while a model in an STL format only comprise a housing and is not closed, the 3D model of the grinding block unit cell in an STL format is further combined with the an isocaps function. [0039] 3: Different periodic arrangements of the 3D model of the grinding block unit cell are achieved by changing the predetermined value ranges of x, y, and z. The larger an incremental step (that is, a total number of intervals between x and x), the finer a grid of the model of the grinding block unit. [0040] 4: The 3D model of the grinding block unit cell is saved in the STL format. [0041] 5: Using the Gyroid function to establish the 3D printing model of the grinding block unit cell with the porosity of 0.3-0.8. Specifically,

[00001]$\sin \left(\frac{2}{a}.Math.x\right)\cos \left(\frac{2}{a}.Math.y\right)+\sin \left(\frac{2}{a}.Math.y\right)\cos \left(\frac{2}{a}.Math.z\right)+\sin \left(\frac{2}{a}.Math.z\right)\cos \left(\frac{2}{a}.Math.x\right)=1$

[0042] Where a is the size of the grinding block unit cell and t represents a relative density thereof.

[0043] Codes entered in the MATLAB software is as follows:

f=@(x,y,z)sin(x).*cos(y)+sin(y).*cos(z)+sin(z).*cos(x);

c=(porosity0.501)/0.333;

pos=above;

[0044] The structure of the grinding block unit cell with the porosity of 0.3-0.8 is as shown in FIG. 2. The porosity of the grinding block unit cell is adjusted according to processing conditions (such as a size of abrasive debris and a flowing space of the cooling liquid).

[0045] As shown in FIG. 3, the 3D printing models of the grinding block unit cells are built up to form the 3D printing model of the diamond porous grinding block by the print debugging software (i.e., the MAGICS software).

[0046] Specifically, the tool creation command in the task menu bar of the MAGICS software is adopted to create the frame of the diamond porous grinding block. The frame of the diamond porous grinding block is the hexahedron, the octahedron, the dodecahedron, or etc. Then, the structure of the 3D printing models of the grinding block unit cells is selected and imported into the MAGICS software. Finally, the size of the frame of the diamond porous grinding block is determined and the 3D printing models of grinding block unit cells are filled in the frame of the diamond porous grinding block to obtain the 3D printing model of the diamond porous grinding block. The 3D printing model of diamond porous grinding block is printed by the SLM technology to obtain one diamond porous grinding block, and then the plurality of diamond porous grinding blocks are built up to form the diamond structure grinding disc for grinding the semiconductor substrate.

[0047] A 3D printing process adopted to make the diamond structure grinding disc is the SLM technology. A laser power of the SLM technology is 300 W. A scanning speed is 3000 mm/s. A scanning interval is 120 m. A spot diameter is 80 m.

[0048] Printing powder for laser printing the diamond porous grinding block is mixed powder of diamond abrasive particles (an average particle size of the diamond abrasive particles is 60 m) and AlSi.sub.7Mg (which is an aluminum alloy binder). A volume fraction of the diamond abrasive particles is 15%. A volume fraction of AlSi.sub.7Mg is 85%. A powder mixing device is a 3D printing metal powder mixing device. The diamond abrasive particles and AlSi.sub.7Mg are prepared into the mixed powder for 3D printing by mechanical mixing, and a mixing time is 11 hours. A powder drying device is a vacuum drying oven. A drying temperature is 90 C. A drying time is 11 hours, which meets powder fluidity requirements of printing and manufacturing.

[0049] As shown in FIG. 4, printed diamond porous grinding blocks are assembled to form the diamond structure grinding disc for grinding the semiconductor substrate based on 3D printing.

[0050] The foregoing embodiments are only configured to further illustrate a manufacturing method of a diamond porous grinding block based on 3D printing and an application thereof of the present disclosure, and the present disclosure is not limited to the embodiments. Any simple modifications, equivalent changes, and modifications based on the present disclosure fall within the protection scope of technical solutions of the present disclosure.