Method for manufacturing a flat polymer coated electrostatic chuck

Abstract

A process for manufacturing a flat, polymer-coated electrostatic chuck platen involves imposing forces on the chuck to compensate for platen warpage induced during shrinkage of the polymer coating as it is cured.

Claims

1. A process for manufacturing a polymer-coated platen, comprising: applying a curable coating composition to a gripping surface of a platen; curing the curable coating composition, the curing causing concave bending of the platen, and applying a force to the platen, the force being effective to counter the concave bending, wherein the force is sufficient to remove the concave bending.

2. The process of claim 1, wherein the force causes convex bending of the gripping surface.

3. The process of claim 1, further comprising discontinuing the force, the gripping surface relaxing upon the discontinuing of the force to a state having less of the concave bending.

4. The process of claim 3, wherein the state having less of the concave bending is flat.

5. The process of claim 1, wherein the curing induces formation of a polymer coating on the gripping surface, the formation causing the concave bending, and wherein the force is applied by clamping edges of the polymer-coated platen and compressing a center section of the platen against a curved surface to bend the polymer-coated platen.

6. The process of claim 1, wherein the force is applied before and during application of the curable coating composition, and before and during the curing; and further comprising discontinuing application of the force after the curable coating composition has cured.

7. The process of claim 1, wherein the platen comprises glass.

8. The process of claim 7, wherein the glass comprises a titania-silica glass.

9. The process of claim 1, wherein the curable coating composition is radiation curable.

10. The process of claim 9, wherein the radiation-curable coating composition is selected from the group consisting of epoxy acrylate, urethane acrylate, polyester acrylate, polyether acrylate, acrylic acrylate and silicone acrylate resins.

11. The process of claim 1, wherein the curable coating composition is thermally curable.

12. The process of claim 11, wherein the thermally-curable coating composition is selected from the group consisting of polyester, epoxy, phenolic, vinyl ester, polyurethane, silicone, polyamide and polyamide-imide resins.

13. The process of claim 1, wherein the curing induces formation of a polymer coating on the gripping surface, the formation causing the concave bending.

14. The process of claim 13, further comprising imbibing the cured polymer coating with a solvent that causes the cured polymer coating to swell.

15. The process of claim 14, wherein the force is applied to the swelled polymer coating.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a flowchart of a process for manufacturing a flat polymer-coated platen in accordance with a first aspect of this disclosure.

(2) FIGS. 2A-2G illustrate a platen at various steps during the process of FIG. 1.

(3) FIG. 3 is a flowchart of a process for manufacturing a flat polymer-coated electrostatic chuck platen in accordance with a second aspect of this disclosure.

(4) FIGS. 4A-4C illustrate a platen at various steps during the process of FIG. 3.

(5) FIG. 5 is a diagram of a typical electrostatic chuck.

DETAILED DESCRIPTION OF SPECIFIC EMBODIMENTS

(6) A flowchart showing the steps of a process for manufacturing a flat, polymer-coated electrostatic platen for lithographic operations, in accordance with a first aspect of this disclosure, is shown in FIG. 1. While the disclosed processes are illustrated for making a platen for a chuck used to hold a reflective reticle in an electrostatic clamp for extreme ultraviolet lithography, the disclosed processes and resulting polymer-coated electrostatic platens are also suitable for holding other substrates and other applications, such as a silicon wafer upon which features are fabricated using photolithographic techniques. The disclosed processes and resulting polymer-coated electrostatic chuck platens are also usable with other lithographic techniques. The required flatness will depend on the type of lithographic techniques being employed and the dimensions of the features being fabricated.

(7) In accordance with the process shown in FIG. 1 and FIGS. 2A-2G, the first step 101 involves applying a curable coating composition to the gripping surface of an electrostatic chuck platen. The curable coating composition is cured to yield a platen 201 having a polymer coating 202. The curable coating composition is preferably a liquid composition. In one embodiment, the curable coating composition is a viscous liquid composition. The curable coating composition can be a thermally-curable coating composition, a radiation-curable composition, a composition with a combination of thermally-curable components and radiation-curable components. Curable coating compositions that can be cured with radiation (e.g., ultraviolet radiation or electron beam radiation) and/or heat to form a crosslinked polymer network usable in the practice of the disclosed processes include radiation-curable compositions such as acrylates, epoxy acrylate, urethane acrylate, polyester acrylate, polyether acrylate, acrylic acrylate, silicone acrylate resins, and methacrylate or other substituted analogs thereof; and thermally-curable compositions such as polyester, epoxy, phenolic, vinyl ester, polyurethane, silicone, polyamide and polyamide-imide resins. Such curable compositions are comprised of monomers, oligomers, and/or polymers; crosslinkers (e.g., tri-functional, or more highly functional molecules); and may contain initiators, inhibitors, and/or other additives, as needed or desired. The coating composition may be applied to the surface of the platen using generally any known technique, such as spraying, brushing, roll-coating, dipping, etc. However, a preferred technique is spin-coating, which provides a very uniform coating thickness and is conducive to the objective of producing a flat, polymer-coated platen. The platen can be an organic (e.g. polymer) or inorganic (e.g. glass or metal) material. In one embodiment, the platen is fabricated of an ultra-low expansion glass (e.g., silica-titania glass) which has a very low coefficient of expansion.

(8) The coated composition on the gripping surface of platen 201 is then cured in step 102 to form polymer coating 202. Curing can be accomplished, for example by exposing the coating composition to a suitable radiation and/or elevated temperature. Curing causes the coating composition to react to form polymer coating 202. As curing proceeds, formation of polymer coating 202 is accompanied by contraction and binding with the gripping surface of platen 201. The binding and contraction that occurs as polymer coating 202 forms introduces a force that causes the platen to bend or warp. The gripping, surface of the polymer-coated platen becomes concave, as shown in FIG. 2B.

(9) In step 103, the polymer coating 202 is imbibed with a solvent that causes the coating to swell. The solvent is selected so that it has a solubility parameter similar to that of the components (e.g., oligomers or polymers) of the coating composition, and so that it is compatible with the cured coating. In one embodiment, the solvent is selected so that it has the effect of lowering the glass transition temperature (T.sub.g) of the cured polymer coating 202, thus allowing the cured polymer coating 202 to be worked or shaped.

(10) The platen 201 having a swollen polymer coating is then placed on a mandrel 203 having a curved surface (e.g., spherical or cylindrical) in step 104. It is not necessary that the entire mandrel 203 has a curved shape, as shown in FIG. 2D. It is sufficient that the portion of the mandrel that is in contact with the platen 201 is curved.

(11) A force is then applied in step 105 to the edges of platen 201 (held by a jig) to cause the platen to bend in the direction opposite of the bend originally caused by shrinkage of coating composition to form polymer coating 202, so that the gripping surface of platen 201 exhibits a predetermined amount of convexity, as shown in FIG. 2E.

(12) While maintaining the predetermined convexity of the gripping surface using a fixture or jig, the solvent is removed from the swollen polymer coating in step 106 (FIG. 2F). This can be done using heat and/or vacuum to evaporate the solvent.

(13) After the solvent has been removed from the polymer coating, the polymer-coated platen can be released from the fixture to yield a flat, polymer-coated electrostatic chuck platen (FIG. 2G). Routine experimentation may be needed to determine the appropriate amount of force and/or predetermined convexity of the gripping surface. The appropriate force will depend on various factors such as the thickness and other dimensions of the platen, the selected coating composition and thickness, the mechanical properties of the polymer coating and/or platen, etc.

(14) A flowchart showing the steps of a process for manufacturing a flat, polymer-coated electrostatic platen for lithographic operations, in accordance with a second aspect of this disclosure, is shown in FIG. 3 and FIGS. 4A-4C. In this aspect of the disclosure, the platen 201 is pre-stressed to impart a restoring force to the platen that is predetermined to counter the warping effect induced by the subsequent curing of a coating composition applied to the gripping surface of the platen. Unless otherwise indicated, the materials comprising platen 201 and polymer coating 202 in this second aspect can be generally any of the materials usable in the process described above for the first aspect of the disclosure.

(15) In the first step 301, the platen 201 is bent before applying a curable coating, as shown in FIG. 4A to form a concave gripping surface. A mandrel (not shown, but similar to mandrel 203 of FIG. 2D) can be pressed against a central section of platen 201 resting on a fixture 410 to create a predetermined amount of concavity of the gripping surface of the platen. Routine experimentation may be needed to determine the appropriate force or concavity needed to produce a flat polymer-coated platen upon completion of the remaining steps.

(16) In step 302, a curable coating composition is then applied to the upper or gripping side of platen 201.

(17) Alternatively, a curable coating composition can be applied to a flat platen that is subsequently bent before curing.

(18) In step 303, the curable coating composition is cured to form polymer coating 202 (FIG. 4B), such as with heat and/or radiation.

(19) In step 304, the force applied to the platen 201 is removed to produce a flat, polymer coated electrostatic chuck platen suitable for use in extreme ultraviolet or other photolithographic applications. Removal of the force is accomplished by releasing platen 201 from fixture 410.

(20) The described embodiments are preferred and/or illustrated, but are not limiting. Various modifications are considered within the purview and scope of the appended claims.

(21) Unless otherwise expressly stated, it is in no way intended that any method set forth herein be construed as requiring that its steps be performed in a specific order. Accordingly, where a method claim does not actually recite an order to be followed by its steps or it is not otherwise specifically stated in the claims or description that the steps are to be limited to a specific order, it is no way intended that any particular order be inferred.