Axial feed plasma spraying device

Abstract

A spray coating apparatus includes a cathode and an anode nozzle to form a pair. A front end of the anode nozzle is provided with three or more plasma jet jetting holes, and a spray material jetting hole is disposed at the center of an area surrounded by the plasma jet jetting holes. The spray material jetted through the jetting hole is fed into the center axis of a complex plasma arc or a complex plasma jet. The spray material jetted through the spray material jetting hole is melted at high thermal efficiency, to thereby enhance yield of coating film. Reflection of the spray material by the outer periphery of plasma flame, penetration of the spray material through plasma flame, and scattering of the spray material caused by reflection or penetration, due to the differences in particle diameter, mass, etc. of the spray material is prevented.

Claims

1. An axial feed plasma spraying apparatus serving as a main plasma torch and comprising: plasma gas feeding means; spray material feeding means; a single cathode; and an anode nozzle provided with three or more plasma jet jetting holes located at specific intervals in a circular pattern centered at a center axis of the anode nozzle, so as to split a plasma arc generated in front of the single cathode, the plasma arc branching into the plasma jet jetting holes and jetted therethrough to form flows of plasma jet, wherein the single cathode is axially aligned with the center axis of the circular pattern of plasma jet jetting holes, and wherein a spray material fed by the spray material feeding means is melted by the flows of plasma jet, and further comprising a spray material jetting hole at the front end of the anode nozzle located at the center of an area surrounded by the plasma jet jetting holes.

2. The axial feed plasma spraying apparatus according to claim 1, wherein the plasma jet jetting holes are slanted such that flows of plasma jet jetted through the plasma jet jetting holes intersect one another at an intersection point on the center axis of the anode nozzle in front of the anode nozzle.

3. The axial feed plasma spraying apparatus according to claim 1, wherein the plasma jet jetting holes are in parallel to the center axis such that flows of plasma jet jetted through the plasma jet jetting holes do not intersect at a point on the center axis of the anode nozzle before the plasma jet reaches a coating substrate.

4. The axial feed plasma spraying apparatus according to claim 1, further comprising a plasma generation chamber segmented into a front chamber and a rear chamber, each of which is provided with a plasma gas feeding source.

5. The axial feed plasma spraying apparatus according to claim 4, wherein the plasma gas feeding source is in a tangential direction with respect to the plasma generation chamber, so as to generate a swirl flow of the plasma gas fed through the plasma gas feeding source.

6. The axial feed plasma spraying apparatus according to claim 1, further comprising a sub plasma torch disposed in front of the anode nozzle such that the center axis of the sub plasma torch intersects the center axis of the main plasma torch.

7. The axial feed plasma spraying apparatus according to claim 6, further comprising a plurality of sub plasma torches arranged such that the axis of flow of plasma jets from the sub plasma torches intersect the flows of plasma jet of the main plasma torch.

8. The axial feed plasma spraying apparatus according to claim 7, wherein the number of sub plasma torches is identical to that of the plasma jet jetting holes of the main plasma torch.

9. The axial feed plasma spraying apparatus according to claim 8, wherein the number of the plasma jet jetting holes is three and the number of the sub plasma torches is three.

10. The axial feed plasma spraying apparatus according to claim 8, wherein each of the plasma arc jetted through each of the plasma jet jetting holes is joined to form a hairpin arc respectively with a flow of sub plasma arc achieved by one of the sub plasma torches, which is in the closest vicinity, and wherein respective flows of hairpin arc are independent from one another without intersecting.

11. The axial feed plasma spraying apparatus according to claim 10, wherein the center axis of the sub plasma torch is orthogonal to the center axis of the main plasma torch, or slanted, toward the rear direction, with respect to the center axis of the main plasma torch.

12. The axial feed plasma spraying apparatus according to claim 1, further comprising an ultra-high-speed nozzle attached to the front end of the anode nozzle.

13. The axial feed plasma spraying apparatus according to claim 1, wherein the polarity of the cathode and anode are inverted.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a cross-sectional view of a plasma spraying apparatus according to Embodiment 1 of the present invention.

(2) FIG. 2 is a cross-sectional view of a plasma spraying apparatus according to Embodiment 2 of the present invention.

(3) FIG. 3 is a cross-sectional view of a plasma spraying apparatus according to Embodiment 3 of the present invention.

(4) FIG. 4 is a cross-sectional view of a plasma spraying apparatus according to Embodiment 4 of the present invention.

(5) FIG. 5 is a cross-sectional view of a plasma spraying apparatus according to Embodiment 5 of the present invention.

(6) FIG. 6 is a side elevational view of the torch of Embodiment 5.

(7) FIG. 7 is an enlarged cross-sectional view of a jetting hole serving as plasma gas feeding means of the main torch of FIG. 5.

(8) FIG. 8 is an enlarged cross-sectional view of a plasma jet jetting hole of the anode nozzle FIG. 5.

(9) FIG. 9 is a cross-sectional view of a plasma spraying apparatus according to Embodiment 6 of the present invention.

(10) FIG. 10 is a right side elevational view of the plasma spraying apparatus of Embodiment 6.

(11) FIG. 11 is a vertical cross-sectional view of a plasma spraying apparatus according to Embodiment 7 of the present invention.

(12) FIG. 12 is a side view of a complex torch of FIG. 11.

(13) FIG. 13 is a vertical cross-sectional view of a plasma spraying apparatus according to Embodiment 8 of the present invention.

(14) FIG. 14 is a vertical cross-sectional view of a plasma spraying apparatus according to Embodiment 9 of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

Embodiment 1

(15) FIG. 1 shows embodiment 1 of the present invention, which is a spraying apparatus called one-stage-type single torch. In FIG. 1, reference numeral 1 denotes a torch, serving as the axial feed plasma spraying apparatus of the present invention. The torch 1 has a pair of cathode and anode nozzle; i.e., a cathode 8 and an anode nozzle (anode) 2. The cathode 8 is formed in the rear part of the torch 1, and the anode nozzle 2 is formed in the front part thereof.

(16) A front end 3 of the anode nozzle 2 is provided with three plasma jet jetting holes 4 which are disposed at specific intervals along a circle centered at the center axis of the nozzle. The plasma jet jetting holes 4 are angled such that flows of plasma jet 12 jetted through the plasma jet jetting holes 4 intersect one another at an intersection point P on the axis passing the center of the circle.

(17) Reference numeral 5 denotes a spray material jetting hole which is disposed at the center of the circle on which the plasma jet jetting holes 4 are disposed. A spray material is fed to the spray material jetting hole 5 via a spray material feeding hole 6 connected to a spray material feeder (not illustrated).

(18) Reference numeral 7 denotes a plasma generation chamber which is provided in the anode nozzle 2 and to the rear of the plasma jet jetting holes 4. The cathode 8 is disposed at the axial center of the plasma generation chamber 7. When a power switch 13 is closed, a high current/low voltage is applied from a power source 10 to the anode nozzle 2 and the cathode 8, whereby a plasma arc 11 is generated in front of the cathode 8. The plasma arc 11 is branched into said plurality of plasma jet jetting holes 4, and jetted through jetting holes 4, to thereby form flows of plasma jet 12, which intersect at the intersection point P in front of the jetting holes 4.

(19) Reference numeral 9 denotes plasma gas feeding means for feeding a plasma gas (e.g., an inert gas) into the plasma generation chamber 7. In Embodiment 1, jetting holes 9a are disposed in a tangential direction with respect to the plasma generation chamber 7, so as to generate a swirl flow in the plasma generation chamber 7, to stabilize the plasma arc 11. Reference numeral 15 denotes an insulation spacer, and 33 indicates the jetting direction of the molten spray material.

(20) In Embodiment 1, three plasma jet jetting holes 4 having the same size are provided. However, the number of the jetting holes is not particularly limited to 3, and a number of 3 to 8 is preferred for practical use. The inclination angle of any of the jetting holes 4 is determined in accordance with the position of P in front of the front end of the nozzle 3. In Embodiment 1, the three jetting holes 4 are disposed along a circle at uniform intervals. However, the intervals may be appropriately modified in accordance with needs.

Embodiment 2

(21) In FIG. 2, members having the same structure and functions as those of the members shown in FIG. 1 are denoted by the same reference numerals, and overlapping descriptions will be omitted. As shown in FIG. 2, in Embodiment 2, a plasma generation chamber 7 provided in the anode nozzle 2 and is segmented into a rear chamber 7a and a front chamber 7b, except for the axial center portion of the chamber 7. Each of the chambers 7a, 7b is provided with plasma gas feeding means; i.e., jetting holes 9a, 9b. A cathode 8 is attached to the rear chamber 7a.

(22) Since the plasma generation chamber 7 is segmented into the rear chamber 7a and the front chamber 7b in Embodiment 2, the output of plasma arc 11 can be enhanced, and inexpensive compressed air, nitrogen, or the like can be used as a plasma gas to be fed to the front chamber 7b. In Embodiment 2, the anode nozzle 2 consists of a nozzle portion 2a of the rear chamber 7a and a nozzle portion 2b of the front chamber 7b. Switches 13a and 13b selectively couple the power supply 10 between the anode sections 2a and 2b and the cathode 8.

Embodiment 3

(23) In FIG. 3, members having the same structure and functions as those of the members shown in FIG. 1 are denoted by the same reference numerals, and overlapping descriptions will be omitted. As shown in FIG. 3, Embodiment 3 is a complex torch comprising the torch 1 as described in Embodiment 1, and a sub plasma torch 51 disposed in front of the torch 1, such that the flow of sub plasma jet 62, in the direction orthogonal to the main plasma jet flow, intermingles with the main plasma jet 12a at the intersection point P (hereinafter, the sub plasma torch may be referred to simply as sub torch). A nozzle 64 of the sub torch 51 serves as a cathode, and a sub torch electrode 56 serves as an anode. Through provision of the sub torch 51, a complex plasma arc 31 can be formed, at the intersection point P or a point in front of P. The Complex plasma arc 31 includes the main plasma arc 11a provided by the main plasma torch 1a (hereinafter may be referred to simply as main torch) and a sub plasma arc 61 provided by sub torch 51.

(24) In Embodiment 3, the sub torch 51 is disposed so as to be orthogonal to the intersection point P. However, the sub torch 51 may be slightly slanted toward the rear direction. Most preferably, the sub plasma arc 61 jetted through the sub torch 51 intermingles with the main plasma arc 11a at the intersection point P, but the intermingle point may be slightly shifted to the left or right of point P as viewed in FIG. 3.

(25) The sub torch 51 has no spray material feeding means and has only one sub plasma jet jetting hole 54 at the axial center.

(26) By means of the complex torch, the sub plasma arc 61 formed by the sub torch 51 is added to the main plasma arc 11a formed in front of the anode nozzle 2 of the main torch 1a, to thereby form the complex plasma arc 31. In this case, since a spray material can be directly fed to the axial center of the complex plasma arc 31, the material remains at the center of the plasma arc 31 for a longer period of time, thereby elevating melting performance.

(27) In FIG. 3 showing Embodiment 3, reference numerals 13b, 13c denote switches coupling power supply 10a to anodes 2 and 56. Reference numeral 32 is a complex plasma jet, reference numeral 50 is a sub power source coupled by switches 53 between anode 56 and cathode 64 of sub torch 51. Reference numeral 57 is a plasma generation chamber, while reference numeral 59 is a plasma gas feeding means, and reference numeral 65 is an insulation spacer.

Embodiment 4

(28) In FIG. 4, members having the same structure and functions as those of the members shown in FIGS. 1 to 3 are denoted by the same reference numerals, and overlapping descriptions will be omitted. Embodiment 4 is a complex torch having the two-stage-type single torch described in Embodiment 2 in combination with the sub torch 51 described in Embodiment 3, for attaining the surprising and unexpected synergistic effects obtained from utilizing Embodiments 2 and 3.

OPERATION EXAMPLES

(29) Operation Examples of the aforementioned Embodiments 1 to 4 are as follows.

(1) Operation Example of Embodiment 1

(30) FIG. 1, one-stage-type, single torch

(31) Spray coating film: ceramic spray coating film

(32) Current, voltage, output: 800 A90 V=72 kW

(33) Gas species, gas flow rate: argon (25 L/min), hydrogen (60 L/min)

(2) Operation Example of Embodiment 2

(34) FIG. 2, two-stage-type, single torch

(35) Spray coating film: ceramic spray coating film

(36) Current, voltage, output: 480 A150 V=72 kW

(37) Gas species, gas flow rate: argon (25 L/min), hydrogen (60 L/min)

(3) Operation Example of Embodiment 3

(38) FIG. 3, one-stage-type, complex torch including sub torch

(39) Spray coating film: ceramic spray coating film

(40) Current, voltage, output: 360 A200 V=72 kW

(41) Gas species, gas flow rate: argon (80 L/min)

(4) Operation Example of Embodiment 4

(42) FIG. 4, two-stage-type, complex torch including sub torch

(43) Spray coating film: ceramic spray coating film

(44) Current, voltage, output: 240 A300 V=72 kW

(45) Gas species, gas flow rate: argon (25 L/min), compressed air (75 L/min)

Embodiment 5

(46) Embodiment 5 is a complex torch similar to that of Embodiment 4 having one sub torch 51, but the complex torch of Embodiment 5 has three sub torches 51, arranged as shown in FIGS. 5 to 8. Embodiment 5 contemplates a linear and stable flow of plasma arc or plasma jet. In FIGS. 5 to 8, members having the same structure and functions as those of the members shown in FIG. 4 are denoted by the same reference numerals, and overlapping detailed descriptions will be omitted. In FIGS. 5, 10A, 10B, and 10C each denote a transistor power source, and S.sub.1, S.sub.2, and S.sub.3 each denote a switch.

(47) The complex torch of Embodiment 5 has an anode nozzle 2b provided with three plasma jet jetting holes 4 in a circumferential direction with uniform intervals. The number of the jetting holes 4 (FIG. 6) and the interval between the holes may be appropriately modified in accordance with needs.

(48) As shown in FIG. 8, each jetting hole 4 is slanted by an angle with respect to the center axis 2C of the anode nozzle 2. The inclination angle is appropriately modified in accordance with needs, and is adjusted to, for example, from about 4 to about 6. The jetting hole 4 consists of an inlet 4a of an inverted frustum shape, and a straight tube outlet 4b connected to the inlet 4a. The main plasma arc 11a and the main plasma jet 12a can readily enter the jetting hole 4. The spray material jetting hole 5 is provided with one spray material feeding hole 6 (FIG. 5). However, a plurality of feeding holes 6 may be provided in accordance with needs. In one possible mode, a pair of feeding holes 6 are centro-symmetrically disposed, and different spray materials may be fed through the respective feeding holes 6, followed by mixing the materials.

(49) As shown in FIG. 7, the main torch 1a is provided with a plurality of jetting holes 9a. Each jetting hole is disposed in a tangential direction with respect to the plasma generation chamber 7a. Therefore, the plasma gas G fed through one jetting hole 9a is guided along the inner wall of the plasma generation chamber 7a in a direction denoted by arrows A9, to thereby form a swirl flow. In a similar manner, the plasma gas fed through another jetting hole 9b into the plasma generation chamber 7b forms a swirl flow. The swirl flow is divided into respective plasma jet jetting holes 4. In each jetting hole 4, the plasma gas flows with a swirling action and is jetted to the intersection point P (FIGS. 5 and 8).

(50) Sub plasma torches 51 are provided three in number, that number corresponding to the number of the plasma jet jetting holes 4 of the main plasma torch 1a. The sub torches 51 are disposed in a circumferential direction with respect to the center axis of the main torch at uniform intervals, as seen in FIG. 6, such that the center axis of the main torch 1a intersects the center axis of each sub torch 51. Each sub torch 51 generates a sub plasma arc 61 by closing the switches 53a, 53b, or 53c (on state). The sub plasma arc 61 is joined to form arc of a hairpin shape (so-called hairpin arc) with a flow of the plasma arc 11a of the main torch 1a present at the closest vicinity of each sub plasma torch. As a result, a conduction path is formed from the tip of the cathode 8 of the main torch 1a to the anode tip of a sub torch electrode 56 of the sub torch 51. The switches 53a, 53b, and 53c are opened after the formation of the hairpin arc (off state).

(51) The spray material fed through the spray material feeding hole 6 is jetted through the spray material jetting hole 5 to the aforementioned intersection point P. While the material is melted at high temperature, it flows while being surrounded by flows of the main plasma jet 12a (FIG. 5). The particles of the molten spray material; i.e., melt particles, collide with a substrate (coating substrate) 80, to thereby form a spray coating film 70. In this case, since three flows of the hairpin arc are converged at the intersection point P, the complex plasma arc 31 or the complex plasma jet 32 can be more stabilized, as compared with the case where one sub torch is employed (Embodiment 4).

Embodiment 6

(52) Embodiment 6 is shown in FIGS. 9 and 10. In FIGS. 9 and 10, members having the same structure and functions as those of the members shown in FIG. 2 are denoted by the same reference numerals, and overlapping detailed descriptions will be omitted.

(53) This embodiment is a single torch similar to that of Embodiment 2 (FIG. 2), but the plasma jet jetting holes 4 are disposed in parallel or generally in parallel (slightly slanted) to the center axis, as shown in FIGS. 9, 10. Embodiment 6 contemplates prevention of intermingling the flows of plasma jet 12A jetted through the plasma jet jetting holes 4A at an intersection point on the center axis 2C of the anode nozzles 2a, 2b of the torch 1, before the plasma jet 12A reaches a coating substrate 80. The center axis (center axis line) 2C of the anode nozzles 2a, 2b coincides with the center axis (center axis line) of the main torch 1a.

(54) As shown in FIG. 10, six plasma jet jetting holes 4A are disposed (on an imaginary circle) in a circular pattern at specific equal angular intervals so as to surround the spray material jetting hole 5. The number and intervals of disposition of the jetting holes 4A may be appropriately chosen in accordance with needs. For example, 4 jetting holes 4A with uniform intervals may be employed.

(55) The aforementioned plasma jet jetting holes 4A are disposed in parallel to the center axis 2C of the anode nozzles 2a, 2b. However, the holes are not necessarily disposed in parallel, and may be disposed generally in parallel. Specifically, the jetting holes 4A are disposed with a small inclination angle such that flows of plasma jet 12A jetted through the jetting holes 4A do not intersect at a point on the center axis 2C of the anode nozzles 2a, 2b, before the plasma jet 12A reaches a coating substrate 80. Such a small inclination angle is, for example, +2 to 2, so that the plasma jetting holes 4A are disposed generally in parallel to the center axis 2C of the anode nozzles 2a, 2b.

(56) In Embodiment 6, the spray material jetted through the spray material jetting hole 5 is melted by the plasma jet 12A, and the formed melt particles collide with the substrate 80, to thereby form a spray coating film 70. In Embodiment 6, the spray material jetting hole 5 is disposed at the center of an imaginary circle (center axis) on which the plasma jet jetting holes 4 are present, and the plasma jet jetting holes 4A are disposed on the circle at specific intervals. Thus, flows of the plasma jet 12A jetted through the plasma jet jetting holes 4A form a cylindrical shape flow targeting the substrate 80.

(57) The spray material jetted through the spray material jetting hole 5 goes straight to the substrate 80, while being surrounded by the cylindrical plasma jet. Thus, the spray material does not come into direct contact with the plasma jet immediately after jetting of the material, and can flow to the substrate while the material is surrounded by flows of the divided plasma jet 12A, to thereby minimize contact with air. As a result, a spray coating film of interest can be formed, even when there is used a spray material which melts with low heat due to low melting point or a small particle size. A spray coating film of interest can be formed, even when a spray material which is deteriorated in function by oxidation or transformation, due to high heat for melting, or which sublimates, and otherwise would fail to form a spray-coating film.

Embodiment 7

(58) Embodiment 7 is shown in FIGS. 11 and 12. In FIGS. 11 and 12, members having the same structure and functions as those of the members shown in FIGS. 5 to 10 are denoted by the same reference numerals, and overlapping detailed descriptions will be omitted.

(59) This embodiment is a complex torch similar to that of Embodiment 5 (FIGS. 5 to 8), but the plasma jet jetting holes are disposed in parallel or generally in parallel (slightly slanted) to the center axis, as shown in FIGS. 11, 12 (similar to Embodiment 6 (FIGS. 9, 10)). Embodiment 7 contemplates prevention of intermingling the flows of plasma arc 11a or plasma jet 12a jetted through the plasma jet jetting holes 4A at an intersection point on the center axis 2C of the anode nozzles 2a, 2b of the torch 1a, before the plasma arc 11a and plasma jet 12 reaches a coating substrate 80.

(60) As shown in FIG. 12, three plasma jet jetting holes 4A of the main torch 1a are provided at uniform intervals in a circumferential direction with respect to the center axis of the main torch. These jetting holes 4A are formed in the same manner as employed in Embodiment 6. Sub plasma torches 51 are provided three in number, that number corresponds to the number of the letting holes 4A of the main plasma torch 1a.

(61) In Embodiment 7, flows of sub plasma arc 61 provided by the sub torches 51 are joined to the main plasma arc 11a jetted through the plasma jet jetting holes 4A at the closest vicinity of the sub torches, to form a hairpin arc. As a result, a conduction path is formed from the tip of the cathode 8 of the main torch 1a to the anode tip of a sub torch electrode 56 of each sub torch 51.

(62) In this way, three hairpin arc flows are individually generated so that the flows of main plasma arc 11a jetted through the plasma jet jetting holes 4A do not intersect one another. Also, flows of plasma jet 12a jetted through the jetting holes 4A do not intersect one another before the plasma jet collides with a coating substrate 80.

(63) In Embodiment 7, the spray material fed through the spray material feeding hole 6 does not enter directly to the main plasma jet 12a or the main plasma arc 11a. In addition, contact of the spray material with air is inhibited, since the material is surrounded by the space defined by the main plasma jet 12a and the main plasma arc 11a. By virtue of the characteristic features, the same effects as those of Embodiment 6 can be attained.

Embodiment 8

(64) Embodiment 8 is shown in FIG. 13. In FIG. 13, members having the same structure and functions as those of the members shown in FIG. 4 are denoted by the same reference numerals, and overlapping detailed descriptions will be omitted. In this embodiment, a complex torch similar to that of Embodiment 4 (FIG. 4), but the sub torch 51 torch is slanted toward the rear direction, with respect to the center axis of the main plasma jet, as shown in FIG. 13. Embodiment 8 contemplates a linear and stable flow of plasma arc or plasma jet.

(65) In Embodiment 8, the sub torch 51 is slanted in the rear direction with respect to the intersection point P. That is, the sub torch 51 is slanted in such a direction that the sub torch electrode 56 is apart from the main torch 1a. The inclination angle; i.e., the angle between the center axis of the main torch 1a and the center axis of the sub torch 51, is 45. The inclination angle may be appropriately modified and is selected from a range, for example, of from about 35 to about 55. Needless to say, this feature of Embodiment 8 may be applied to Embodiment 3 (FIG. 3) and other embodiments.

Embodiment 9

(66) Embodiment 9 is a single torch similar to that of Embodiment 2, but an ultra-high-speed nozzle 90 is attached to the front end 3 of the anode nozzle 2, as shown in FIG. 14. Embodiment 9 contemplates production of ultra-high-speed plasma jet. In FIG. 14, members having the same structure and functions as those of the members shown in FIG. 2 are denoted by the same reference numerals, and overlapping detailed descriptions will be omitted.

(67) The ultra-high-speed nozzle 90 of Embodiment 9 consists of an upstream funnel-like section 93, which opens and widens radially toward the inlet of a drawn section 91; and an downstream funnel-like section 95, which opens and widens radially toward the outlet of the drawn section 91. The upstream funnel-like section 93 has a length in the axial direction almost the same as that of the downstream funnel-like section 95. The opening size of the downstream funnel-like section 95 is greater. In FIG. 14, reference numeral W denotes a cooling medium supplied to a cooling section, and 12S denotes a supersonic plasma jet.

(68) In Embodiment 9, the plasma jet 12 jetted through the plasma jet jetting holes 4 is transferred to the upstream funnel-like section 93 and narrowed in the drawn section 91. When the narrowed plasma jet 12 is released to the downstream funnel-like section 95, whereby the plasma jet rapidly expands, thereby generating an ultrasonic speed plasma jet 12S. As a result, the flying speed of the particles of the molten spray material can elevated to a supersonic speed; for example, a speed 3 to 5 times the speed of sound. Thus, a high-performance spray coating film having higher density and high adhesion can be formed.

(69) Needless to say, the high-speed nozzle of Embodiment 9 may also be employed in Embodiment 1 and other embodiments.

(70) The present invention is not limited to the aforementioned Embodiments, and the following embodiments also fall within the scope of the present invention.

(71) (1) The polarity of the cathode and that of the anode employed in each of the single torches and complex torches of the above Embodiments may be inverted. Specifically, the polarity of the cathode 8 and that of the anode nozzle 2 of the single torch, the cathode 8 and that of the anode nozzle 2 of the main torch of the complex torch, or the sub torch electrode 56 and the nozzle 64 of the sub torch may be inverted, respectively.

(72) (2) In the above Embodiments, three plasma jet jetting holes 4 are provided on the front end 3 of the anode nozzle 2 of the above Embodiments such that the three holes are disposed on a single imaginary circle at specific intervals. Alternatively, a plurality of plasma jet jetting holes 4 may be provided such that the holes are disposed at specific intervals on a plurality of (two or more) concentric imaginary circles present at specific intervals. Through employment of the alternative feature, plasma flame assumes a ring-like form, and air entering into the plasma flame can be prevented. In the above case, the jetting holes 4 are arranged in a houndstooth pattern. However, the disposition pattern may be appropriately modified in accordance with needs.

(73) The present invention is widely employed in industry, particularly in surface modification treatment. The present invention is applicable to a variety of uses such as liquid crystal/semiconductor producing parts, electrostatic chucks, printing film rollers, aircraft turbine blades, jigs for firing, a power generation element for solar cells, fuel cell electrolytes, as examples.

DESCRIPTION OF REFERENCE NUMERALS

(74) 1 torch 1a main torch 2 anode nozzle 4 plasma jet jetting hole 5 spray material jetting hole 7 plasma generation chamber 8 cathode 9 plasma gas feeding means 11 plasma arc 12 plasma jet 31 complex plasma arc 32 complex plasma jet 51 sub torch 56 sub torch electrode 64 nozzle

(75) It will become apparent to those skilled in the art that various modifications to the preferred embodiment of the invention as described herein can be made without departing from the spirit or scope of the invention as defined by the appended claims.