Surface-coated cutting tool

Abstract

In a surface-coated cutting tool, a hard coating includes one or more layers. At least one layer thereof is a hard coating layer composed of a complex nitride or carbonitride layer of Al, Cr, and Si and satisfying (Al.sub.1-x-yCr.sub.xSi.sub.y)(C.sub.zN.sub.1-z) where x, y and z are atomic ratios and satisfy 0.1x0.4, 0.01y0.2, and 0z0.3, respectively. The hard coating layer contains particles including: less than 10 atomic % of non-metal components selected from C and N; and metal components selected from Cr, Al and Si. In the cross-section perpendicular to the tool body surface, the number ratio of oblate particles with an Al content of 50 atomic % or less, a long diameter of less than 0.5 m, and an aspect ratio of 2.0 or more is 90% or more with respect to the total number of the particles.

Claims

1. A surface-coated cutting tool comprising: a tool body made of tungsten carbide-based cemented carbide; and a hard coating coated on a surface of the tool body, wherein (a) the hard coating comprises one or more layers, and at least one layer thereof is a hard coating layer composed of a complex nitride layer or a complex carbonitride layer of Al, Cr, and Si, having an average thickness of 0.5 to 8.0 m, and satisfying an average composition formula: (Al.sub.1-x-yCr.sub.xSi.sub.y)(C.sub.zN.sub.1-z) in which x, y and z are atomic ratios and satisfy 0.1x0.4, 0.01y0.2, and 0z0.3, respectively; (b) the hard coating layer includes a plurality of particles comprising: less than 10 atomic % of non-metal component which is one or more selected from the group consisting of C and N, and metal component which is one or more elements selected from the group consisting of Cr, Al and Si; and (c) in a cross-section of the hard coating perpendicular to the surface of the tool body, the plurality of particles include oblate particles having an Al content of 50 atomic % or less, a long diameter of less than 0.5 m in the cross-section, and an aspect ratio of 2.0 or more, a number ratio of the oblate particles is 90% or more with respect to a total number of the plurality of the particles.

2. The surface-coated cutting tool according to claim 1, wherein in the cross-section of the hard coating perpendicular to the surface of the tool body, a number ratio of oblate particles in each of which an angle between a straight line forming the long diameter and the surface of the tool body is 45 or less and each of which satisfies A>B where A is an area of a region surrounded by the straight line and outer circumference of the oblate particle at a surface side of the hard coating and B is an area of region surrounded by the straight line and the outer circumference of the oblate particle at a tool body side, is 80% or more with respect to a total number of the oblate particles in the hard coating layer.

3. The surface-coated cutting tool according to claim 1, wherein the average thickness of the hard coating layer is 0.7 to 7.5 m.

4. The surface-coated cutting tool according to claim 1, wherein the hard coating layer is the outermost layer of the hard coating.

5. The surface-coated cutting tool according to claim 3, wherein the hard coating layer is the outermost layer of the hard coating.

6. The surface-coated cutting tool according to claim 1, wherein the amount of the non-metal component is contain 0.5 atomic % or more and less than 10 atomic %.

7. The surface-coated cutting tool according to claim 1, wherein Al content of the metal component is 0.5 atomic % to 20 atomic %.

8. The surface-coated cutting tool according to claim 1, wherein the number of a plurality of the particles per unit area is 1/m.sup.2 to 5/m.sup.2 in the cross-section.

9. The surface-coated cutting tool according to claim 2, wherein the average thickness of the hard coating layer is 0.7 to 7.5 m.

10. The surface-coated cutting tool according to claim 2, wherein the hard coating layer is the outermost layer of the hard coating.

11. The surface-coated cutting tool according to claim 1, wherein the hard coating layer is formed in a furnace at a temperature higher than 500 C.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1A is a schematic illustration of an arc ion plating furnace for forming a hard coating of a coated tool of the present invention and is a cross-sectional plane view of the arc ion plating furnace.

(2) FIG. 1B is a schematic illustration of the arc ion plating furnace for forming the hard coating of the coated tool of the present invention and is a longitudinal cross-sectional view of the arc ion plating furnace.

(3) FIG. 2A is a TEM image of a cross-section of an (Al.sub.0.63Cr.sub.0.27Si.sub.0.10)N layer of an invention coated tool 8 as an example of the coated tool of the present invention.

(4) FIG. 2B is a N mapping image by EDS of the cross-section of the (Al.sub.0.63Cr.sub.0.27Si.sub.0.10)N layer of the invention coated tool 8 as an example of the coated tool of the present invention.

(5) FIG. 2C is an Al mapping image by EDS of the cross-section of the (Al.sub.0.63Cr.sub.0.27Si.sub.0.10)N layer of the invention coated tool 8 as an example of the coated tool of the present invention.

(6) FIG. 2D is a Cr mapping image by EDS of the cross-section of the (Al.sub.0.63Cr.sub.0.27Si.sub.0.10)N layer of the invention coated tool 8 as an example of the coated tool of the present invention.

(7) FIG. 2E is a Si mapping image by EDS of the cross-section of the (Al.sub.0.63Cr.sub.0.27Si.sub.0.10)N layer of the invention coated tool 8 as an example of the coated tool of the present invention.

(8) FIG. 3A is an image obtained at the time of composition analysis of particles present in the cross-section of the (Al.sub.0.63Cr.sub.0.27Si.sub.0.10)N layer of the invention coated tool 8 as an example of the coated tool of the present invention and shows an analyzed particles and measurement points.

(9) FIG. 3B shows result of EDS composition analysis at the measurement point of the particle shown in FIG. 3A.

DETAILED DESCRIPTION OF THE INVENTION

(10) The present invention will be described below in detail.

(11) Hard coating layer composed of (Al, Cr, Si)(C, N) layer or (Al, Cr, Si)N layer:

(12) In a hard coating layer composed of (Al, Cr, Si)(C, N) layer or (Al, Cr, Si)N layer, as the constituent component thereof, Al component improves high-temperature hardness and heat resistance, Cr component improves high-temperature strength, and Si component improves oxidation resistance. In addition, coexistence of Al and Cr improves high-temperature oxidation resistance.

(13) However, in the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer, when the Cr content x is less than 0.1 with respect to the total amount of Al, Cr, and Si, Al content is relatively high. Thus, in milling of work material with high adhesivity, the adhesion resistance to the work material and chips cannot be ensured, and high-temperature strength is deteriorated. Therefore, adhesion and chipping easily occur. On the other hand, when the Cr content x exceeds 0.4 with respect to the total amount of Al, Cr, and Si, the melting point of the target is high at the time of forming the hard coating layer using a PVD method. Therefore, Cr concentration of by-produced spherical particles is high and the melting point of the particles is high relative to particles of which the Cr content x is 0.4 or less with respect to the total amount of Al, Cr, and Si. Therefore, after particle generated from the target is attached to the film and until the particle sticks, the heat quantity removed from the particle is small, and thus the particle sticks while keeping the spherical shape thereof. By depositing a film thereon, voids are remained below the particles. Due to existence of voids, during cutting, cracks occur from voids as a start point and chipping easily occurs.

(14) Accordingly, the Cr content x with respect to the total amount of Al, Cr, and Si is set to 0.1 to 0.4. The content x is preferably 0.15 to 0.37 and more preferably 0.2 to 0.3, but is not limited thereto.

(15) Here, the proportion of metal component and non-metal component is not limited to 1:1 as stoichiometric proportion. As long as the same crystal structure as a case where the proportion is 1:1 is maintained, the effects of the present invention can be obtained.

(16) When the Si content y is less than 0.01 with respect to the total amount of Al, Cr, and Si, effect of improving oxidation resistance is small. In addition to this, the Cr content is relatively high, and thus the melting point of the particles is high. Therefore, as described above, voids are formed below the particle included in the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer, resulting in small effect of improving chipping resistance. On the other hand, when the Si content y exceeds 0.2 with respect to the total amount of Al, Cr, and Si, high-temperature toughness and high-temperature strength of the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer are deteriorated. Therefore, the Si content y with respect to the total amount of Al, Cr, and Si is set to 0.01 to 0.2. The content y is preferably 0.07 to 0.2 and more preferably 0.1 to 0.15, but is not limited thereto.

(17) When the C content z exceeds 0.3 with respect to the total amount of C and N, the hardness of the hard coating layer is excessively high and thus chipping resistance thereof is deteriorated in cutting. Therefore, the C content z with respect to the total amount of C and N is set to 0.3 or less. The content z is preferably 0 to 0.2, but is not limited thereto.

(18) When the thickness of the hard coating layer is less than 0.5 m, after an early stage of cutting, the hard coating layer is early lost, and wear resistance cannot be exhibit sufficiently. On the other hand, when the thickness exceeds 8.0 m, compressive residual stress accumulated on the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer increases. Therefore, the hard coating layer on the edge-tip ridge portion is highly sensitive to external force during cutting and chipping easily occurs at an early stage of cutting. Alternatively, the film self-destructs.

(19) Accordingly, the average thickness of the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer is set to 0.5 m to 8.0 m. The average thickness of the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer is preferably 0.7 m to 7.5 m, but is not limited thereto.

(20) Constitution of Particles:

(21) A plurality of particles included in the hard coating layer of the present invention means an agglomeration including: less than 10 atomic % of non-metal components (that is, one or more selected from C and N); and metal components which are other than the non-metal components (one or more selected from Cr, Al, and Si).

(22) The amount of the non-metal components is preferable 0.5 atomic % to less than 10 atomic %. In a plurality of the particles included in the hard coating layer, a small amount of inevitable impurities may be mixed in addition to the above-mentioned non-metal components and the metal components. However, inevitable impurities may be mixed only if the mixed inevitable impurities do not significantly affect chipping resistance and/or adhesion resistance of the hard coating including the hard coating layer.

(23) The Al content of each of the particles can be set to 50 atomic % or less, mainly by controlling the total pressure of nitrogen and methane within a range of 4 to 10 Pa at the time of forming the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer using a PVD method.

(24) When the Al content in each particle exceeds 50 atomic %, the particles with a melting point lower than that of the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer are present in the layer, due to which high-temperature strength cannot be maintained and thus adhesion easily occurs.

(25) Accordingly, the Al content in each of a plurality of the particles (oblate particles) is set to 50 atomic % or less. The Al content of each particle is preferably 0.5 to 50 atomic %, and more preferably 0.5 to 20 atomic %, but is not limited thereto.

(26) For the particles in the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer as the hard coating layer included in the hard coating of the coated tool of the present invention, when a cross-sectional long diameter of each particle in a cross-section perpendicular to the surface of the tool body is 0.5 m or more, the particles with relatively low hardness are present widely in the layer, and hardness of the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer lowers. As a result, wear resistance during cutting cannot be ensured sufficiently.

(27) For the particles in the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer as the hard coating layer included in the hard coating of the coated tool of the present invention, when the aspect ratio of each particle is less than 2.0 m, the shape of each particle is substantially spherical at the time of forming the hard coating layer using a PVD method and thus the voids are formed below the spherical particles. Therefore, the voids serve as a start point of generation of cracks during cutting, and thus the chipping resistance is deteriorated.

(28) Accordingly, for the particles in the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer as the hard coating layer included in the hard coating of the coated tool of the present invention, the cross-sectional long diameter of each particle is set to less than 0.5 m and the aspect ratio of each particle is set to 2.0 or more.

(29) However, it is not necessary for all the particles to have the Al content of the 50 atomic % or less, the cross-sectional long diameter of less than 0.5 m, and the aspect ratio of 2.0 or more. If the number ratio of particles (oblate particles) having an Al content of the 50 atomic % or less, a cross-sectional long diameter of less than 0.5 m, and an aspect ratio of 2.0 or more is 90% or more with respect to the total number of the particles, chipping resistance and adhesion resistance intended in the present invention can be obtained.

(30) The cross-sectional long diameter of the particle included in the hard coating layer of the surface coated tool of the present invention is defined as the length of the longest one of the straight lines which can be drawn only within the particle when the cross-sectional shape of the particle in the cross-section of the film perpendicular to the surface of the tool body is observed. That is, a straight line laid passingly out of the particle is not used for deciding the cross-sectional long diameter.

(31) Additionally, the aspect ratio of the particle included in the hard coating layer of the surface coated tool of the present invention is a value of the cross-sectional long diameter/a cross-sectional short diameter where the cross-sectional short diameter of the particle is defined as the longest value of particle widths orthogonal to the straight line forming the cross-sectional long diameter in the cross-section of the film perpendicular to the surface of the tool body.

(32) In the present invention, in addition to the condition where each of all particles including in the hard coating layer has the Al content of 50 atomic % or less, the cross-sectional long diameter of less than 0.5 and the aspect ratio of 2.0 or more, in a case where a number ratio of particles in each of which an angle between the straight line forming the cross-sectional long diameter thereof and the surface of the tool body is 45 or less and which each satisfies A>B where A is an area of a region surrounded by the straight line forming the cross-sectional long diameter and outer circumference of the particle at a surface side of the hard coating and B is an area of region surrounded by the straight line and the outer circumference of the particle at a tool body side, is 80% or more with respect to a total number of the particles, more excellent chipping resistance is exhibited.

(33) This is because of the following reasons.

(34) That is, as the wear of the hard coating layer proceeds during cutting, the particles (oblate particles) are exposed on the surface of the hard coating layer. Since the hardness of the particles is small compared with the hard coating layer, wear proceeds quickly at the particle portions compared with the hard coating layer. Therefore, wear proceeds such that the particle portions are hollowed deeply compared with the hard coating layer, and concave portions are formed. At this time, if the angle between the straight line forming the cross-sectional long diameter of each particle and the surface of the tool body exceeds 45, or if AB is satisfied, the formed concave portions are relatively deep. Therefore, stress in a shear direction caused by cutting concentrates at the edges of the concave portions, they serve as a start point of fracture proceeding in the hard coating, and thus chipping easily occurs. However, if the angle between the straight line forming the cross-sectional long diameter of each particle and the surface of the tool body is 45 or less and A>B is satisfied, the formed concave portions are relatively shallow. Therefore, it is difficult to concentrate shear stress during cutting, and thus occurrence of chipping can be suppressed.

(35) Accordingly, in the present invention, it is desirable that a number ratio of particles (oblate particles) in each of which the angle between the straight line forming the cross-sectional long diameter thereof and the surface of the tool body is 45 or less and each of which satisfies A>B where A is an area of a region surrounded by the straight line forming the long diameter and outer circumference of the particle at the surface side of the hard coating and B is an area of region surrounded by the straight line and the outer circumference of the particle at the tool body side, be 80% or more with respect to a total number of the particles. Thereby, chipping resistance and adhesion resistance are further improved, and excellent cutting performance is exhibited.

(36) The compositions of the hard coating layer and the particles included in the hard coating layer can be obtained by structure observation and composition analysis of the cross-section of the hard coating layer perpendicular to the surface of the tool body using a transmission electron microscope-energy dispersive X-ray spectrometry (TEM-EDS). An observed range in this case is within 20 m in a direction parallel to the surface of the tool body. Further, elemental mapping is performed on the cross-section of the hard coating layer with a space resolution of 0.01 m or less. Thereby, for example, it can be confirmed that the composition of the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer is within the prescribed range. Simultaneously, the composition of the particles can be analyzed by point analysis in the cross-section of the film.

(37) The aspect ratio of each particle can be obtained as following. First, the longest diameter of particle in the cross-section thereof is regarded as a cross-sectional long diameter, and the longest value of the particle widths orthogonal to a straight line forming the cross-sectional long diameter is regarded as a cross-sectional short diameter of the particle. Then, the cross-sectional long diameter and the cross-sectional short diameter of each particle are obtained, from which an aspect ratio (=the cross-sectional long diameter/the cross-sectional short diameter) of each particle is obtained.

(38) The number ratio of the particles with the Al content of 50 atomic % or less, the cross-sectional long diameter of less than 0.5 m, and the aspect ratio of 2.0 or more, can be obtained as following. For the coated tool as a measuring object, the cross-section of the hard coating layer is analyzed similar to the above-described analysis. First, the total number of the particles present in the observed region (5 m5 m) is counted in a N mapping image using TEM-EDS. Secondly, among all particles, the number of the particles is counted, each of which contains 90 atomic % or more of one or more elements selected from Cr, Al, and Si with respect to the total amount of the constituent elements constituting the particles, has the Al content of 50 atomic % or less, the cross-sectional long diameter of less than 0.5 m, and the aspect ratio of 2.0 or more. Based on the results of counting the number of the particles, with respect to the total number of the particles, the number ratio of the particles (oblate particles) with the Al content of 50 atomic % or less, the cross-sectional long diameter of less than 0.5 m, and the aspect ratio of 2.0 or more, is calculated. Here, the number of the particles per unit area is preferably 1/m.sup.2 to 5/m.sup.2.

(39) For all particles present in the observed region, the angle between a straight line forming the cross-sectional long diameter of each metal particle and the surface of the tool body is obtained. For each of the particles in which the angle is 45 or less, an area A of a region surrounded by the straight line forming the cross-sectional long diameter and the outer circumference of the particle at the surface side of the hard coating and an area B of a region surrounded by the straight line and the outer circumference of the particle at the tool body side, are obtained. The values of A and B are compared with each other, and the number ratio of the particles satisfying A>B is calculated. The method of calculating the areas A and B is as follows. A TEM-EDS mapping image of each particle is used. By using a mapping image where an amount of N is analyzed, boundaries between the particle and the hard coating layer can be distinguished. The outer circumference of the particle is selected, and the area of region surrounded thereby can be calculated using image analysis software (for example, Adobe Photoshop or the like). The calculated area is represented as A. Further, the cross-sectional long diameter of the particle and the outer circumference of the particle at the tool body side are selected, and the area of region surrounded thereby is calculated using the image analysis software and is represented as B. This process is performed on each particle, and the number ratio of the particles satisfying A>B is calculated.

(40) Next, Examples of the coated tool of the present embodiment will be described in detail.

EXAMPLE

(41) As a raw material powders, a medium-coarse WC powder with an average grain size of 5.5 m, a fine WC powder with an average grain size of 0.8 m, a TaC powder with an average grain size of 1.3 m, a NbC powder with an average grain size of 1.2 m, a ZrC powder with an average grain size of 1.2 m, a Cr.sub.3C.sub.2 powder with an average grain size of 2.3 m, a VC powder with an average grain size of 1.5 m, a (Ti, W)C powder [TiC/WC=50/50 in terms of mass ratio] with an average grain size of 1.0 m, and a Co powder with an average grain size of 1.8 m, were prepared. These raw material powders were mixed in compositions shown in Table 1. Wax was further added thereto. The mixture was blended in acetone by a ball mill for 24 hours and was dried under reduced pressure. Thereafter, the resultant was press-formed at a pressure of 100 MPa into various types of compacts having predetermined shapes. The compacts were heated to a predetermined temperature in a range of 1370 to 1470 C. in a vacuum atmosphere of 6 Pa at a heating rate of 7 C./min, and were held at this temperature for one hour. Thereafter, the compacts were sintered under furnace-cool conditions, thereby forming sintered round bar for forming tool bodies with a diameter of 8 mm. From the sintered round bar, by grinding, tool bodies (end mills) A to E made of WC-based cemented carbide having a two-edge ball shape with a helix angle of 30 in dimensions of 6 mm13 mm as the diameterthe length of the cutting edge portion were produced.

(42) Next, these tool bodies A to E were loaded in the arc ion plating furnace shown in FIGS. 1A and 1B, and subjected to Ar bombardment under the following conditions.

(43) First, while the inside of the furnace was evacuated and maintained in a vacuum at 0.1 Pa or lower, the inside of the furnace was heated to 500 C. by a heater. Thereafter, under the atmosphere with Ar gas pressure of 0.5 to 1.0 Pa, and under the condition where current flowing through a tungsten filament was 50 to 60 A, bombard treatment for one minute was repeated for three times, thereby removing contaminations such as organic substances inevitably attached to the surface of the tool body.

(44) Secondly, using targets with compositions shown in Table 2, (Al, Cr, Si)(C, N) layer or (Al, Cr, Si)N layer with a predetermined thickness was deposited under the film formation conditions shown in Table 2. Thereby, invention coated tools 1 to 10 were produced.

(45) In the film formation conditions of Table 2, the reasons why the temperatures of inside of the furnace were set higher than that of the conventional condition (500 C.) was aiming to elongate time after scattering particles were attached to the hard coating layer and until the temperature of the particles became lower than the melting point thereof, thereby facilitating formation of particles with an aspect ratio of 2.0 or more.

(46) The reason for setting the total pressure of nitrogen and methane within a range of 4 to 10 Pa is as follows. When the total pressure of nitrogen and methane is less than 4 Pa, movement of an arc spot is relatively slow and particles with the cross-sectional long diameter of 0.5 m or more generate easily. Since such particles have relatively low degree of nitriding and low hardness compared with the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer, the hardness of the entire hard coating is small and wear resistance lowers during cutting. On the other hand, when the total pressure of nitrogen and methane exceeds 10 Pa, the movement of the arc spot is unstable and film formation is difficult.

(47) For setting the temperatures of inside of the furnace higher than that of the conventional condition (500 C.), it is effective to provide cylindrical heaters in front of the targets and heat the space in front of the targets to high temperature. Thereby, particles generated from the targets can be prevented from solidifying in the atmosphere, and deform along the shape of the tool body at the time of attaching to the tool body. Damages to the film due to radiation heat from the cylindrical heater can be prevented by providing a cooling mechanism on the jigs for tool body. The cylindrical heaters for heating the space in front of the targets extend to substrate direction as seen from the targets, and the length thereof is desirably set such that the tip end of the heater is located at the position of about to of distance between the target and tool body. When the length is too long, the film is damaged due to the radiation heat. On the other hand, when the length is too short, the space at the high temperature in front of the target is narrow and thus the particles solidify before attaching to the tool body. In order to appropriately heat the space in front of the targets, the heaters are preferably disposed in the range of 50 mm or less from the surface of the targets, for example, may be disposed in front of an anode electrodes or the like. Examples of the cooling mechanism of the tool bodies include a method for cooling the tool bodies by flowing coolant water to the jigs for tool body.

(48) For the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer of the invention coated tools 1 to 10, structure observation and composition analysis of the cross-section of the hard coating layer perpendicular to the surface of the tool body were performed using a transmission electron microscope-energy dispersive X-ray spectrometry (TEM-EDS). An observed range of each invention coated tool was within 20 m in a direction parallel to the surface of the tool body. Elemental mappings were performed on the cross-section of the hard coating layer with a space resolution of 0.01 m or less. Thereby, it was confirmed that the composition of each of the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer was within the prescribed range, and simultaneously, the composition of each particle was analyzed by point analysis in the cross-section of the film.

(49) Next, the longest diameter of each particle in the cross-section thereof was regarded as a cross-sectional long diameter, and the longest value of the particle widths orthogonal to a straight line forming the cross-sectional long diameter was regarded as a cross-sectional short diameter of the particle. The cross-sectional long diameter and the cross-sectional short diameter of each particle were obtained, from which an aspect ratio (=the cross-sectional long diameter/the cross-sectional short diameter) of each particle was obtained.

(50) The total number of the particles present in the observed region of each invention coated tool and the number of the particles each of which contained 90 atomic % or more of one or more elements selected from Cr, Al, and Si with respect to the total amount of the constituent elements constituting the particle, had an Al content of 50 atomic % or less, a cross-sectional long diameter of less than 0.5 m, and an aspect ratio of 2.0 or more, was counted. Thereby, the number ratio of the particles with an Al content of 50 atomic % or less, a cross-sectional long diameter of less than 0.5 m, and an aspect ratio of 2.0 or more, was calculated.

(51) For all particles present in the observed region, the angle between a straight line forming the cross-sectional long diameter of each metal particle and the surface of the tool body was obtained. For each of the particles in which the angle was 45 or less, an area A of a region surrounded by the straight line forming the cross-sectional long diameter and the outer circumference of the particle at the surface side of the hard coating and an area B of a region surrounded by the straight line and the outer circumference of the particle at the tool body side, were obtained. The values of A and B were compared with each other, and the number ratio of the particles satisfying A>B was calculated. The method of calculating the areas A and B was as following. A TEM-EDS mapping image of each particle was used. By using a mapping image where an amount of N was analyzed, boundaries between the particles and the hard coating layer was able to be distinguished. The outer circumference of each particle was selected, and the area of region surrounded thereby was able to be calculated using image analysis software (for example, Adobe Photoshop or the like). The calculated area is represented as A. Further, the cross-sectional long diameter of the particle and the outer circumference of the particle at the tool body side were selected, and the area of region surrounded thereby was calculated using the image analysis software and was represented as B. This process was performed on each particle, and the number ratio of the particles satisfying A>B was calculated.

(52) These measured values and the calculated values are shown in Table 3.

(53) TEM-EDS mapping images obtained by measurement on the cross-section of (Al.sub.0.63Cr.sub.0.27Si.sub.0.10)N layer of the invention coated tool 8 as an example are shown in FIGS. 2A to 2E.

(54) The results of composition analysis measured for the particles present in the cross-section of the (Al.sub.0.63Cr.sub.0.27Si.sub.0.10)N layer of the invention coated tool 8 are shown in FIGS. 3A and 3B.

(55) Next, for the purpose of comparison, using the arc ion plating furnace, the surfaces of the tool bodies A to E were subjected to Ti bombardment under the same conditions as the invention examples. Then, (Al, Cr, Si)(C, N) layer or (Al, Cr, Si)N layer with a predetermined thickness in which particles were dispersed, was deposited under the conditions shown in Table 4. Thereby, comparative coated tools 1 to 10 were produced.

(56) For the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer of each of the comparative coated tools 1 to 10, the cross-section thereof was observed using the TEM-EDS, and compositions of the particles were analyzed by point analysis in the cross-section of the film. The number ratio of the particles having an Al content of 50 atomic % or less, a cross-sectional long diameter of less than 0.5 m, and an aspect ratio of 2.0 or more with respect to the total number of the particles, was measured. In addition, for all particles present in the measured region, the angle between a straight line forming the cross-sectional long diameter of each particle and the surface of the tool body was obtained. For each of the particles in which the angle was 45 or less, an area A of a region surrounded by the straight line forming the cross-sectional long diameter and the outer circumference of the particle at the surface side of the hard coating and an area B of a region surrounded by the straight line and the outer circumference of the particle at the tool body side, were obtained. The values of A and B were compared with each other, and the number ratio of the particles satisfying A>B was calculated with respect to the total number of all particles present in the measured region.

(57) These values are shown in Table 5.

(58) The thickness of each hard coating of the invention coated tools 1 to 10 and the comparative coated tools 1 to 10 was measured using a scanning electron microscope (SEM). As a result, all of them had substantially the same average thickness as the target thickness shown in Tables 3 and 5.

(59) TABLE-US-00001 TABLE 1 Mixing composition (mass %) Diameter length of Type Co (Ti, W)C TaC NbC ZrC Cr.sub.3C.sub.2 VC WC cutting edge portion (mm) Tool body A 5 5 Medium-coarse grain: balance 6 13 (End mill) B 6 1 0.5 Fine grain: balance 6 13 C 6 1 1 0.5 0.5 Fine grain: balance 6 13 D 8 0.5 0.5 Fine grain: balance 6 13 E 9 25 10 1 Medium-coarse grain: balance 6 13

(60) TABLE-US-00002 TABLE 2 Forming conditions of (Al, Cr, Si)(C, N) layer Tool Temperature in Reaction gas body Target composition (atomic ratio) furnace Arc current Bias voltage pressure N.sub.2:CH.sub.4 Type type Al Cr Si ( C.) (A) (V) (Pa) gas ratio Invention 1 A 78 15 7 550 100 50 4.0 100:0 coated 2 A 75 15 10 600 100 50 6.0 90:10 tool 3 B 65 15 20 650 100 50 9.0 80:20 4 C 70 20 10 550 100 50 4.0 100:0 5 C 60 20 20 600 150 50 9.0 90:10 6 B 65 25 10 550 150 25 4.0 100:0 7 D 45 35 20 600 150 25 9.0 90:10 8 D 63 27 10 550 200 25 4.0 100:0 9 B 58 27 15 600 200 25 6.0 100:0 10 E 43 37 20 650 200 25 9.0 90:10

(61) TABLE-US-00003 TABLE 3 Composition and target thickness of Composition, shape, (Al, Cr, Si)(C, N) layer and present ratio Non-metal of particles Metal elements elements Target Average Al Tool composition composition average content of body (atomic ratio) (atomic ratio) thickness all particles Type type Al Cr Si N C (m) (atomic %) Invention 1 A 78 15 7 100 0 0.7 5 coated 2 A 75 15 10 90 10 4.0 10 tool 3 B 65 15 20 80 20 6.0 4 4 C 70 20 10 100 0 2.0 6 5 C 60 20 20 90 10 4.0 8 6 B 65 25 10 100 0 4.0 10 7 D 45 35 20 90 10 6.0 9 8 D 63 27 10 100 0 2.0 10 9 B 58 27 15 100 0 4.0 5 10 E 43 37 20 90 10 7.5 10 Composition, shape, and present ratio of particles Number ratio of particles having angle of 45 or less between Number Number Number straight line ratio of ratio of ratio of forming particles particles particles Number cross-sectional with Al with with ratio of long diameter content cross-sectional aspect particles and surface of of 50 long diameter ratio of prescribed tool body and atomic % of less than 2.0 or in present satisfying or less 0.5 m more invention A/B > 1 Type (%) (%) (%) (%) (%) Invention 1 97.5 95.0 97.5 92.5 95.0 coated 2 97.5 95.0 97.5 95.0 90.0 tool 3 97.5 100.0 95.0 95.0 87.5 4 95.0 97.5 100.0 95.0 77.5 (*2) 5 95.0 95.0 97.5 95.0 92.5 6 95.0 97.5 97.5 95.0 97.5 7 100.0 95.0 97.5 95.0 82.5 8 97.5 97.5 100.0 97.5 90.0 9 92.5 95.0 97.5 92.5 87.5 10 100.0 95.0 97.5 95.0 92.5 (*2) indicates that value is out of the range of Claim 2.

(62) TABLE-US-00004 TABLE 4 Forming conditions of (Al, Cr, Si)(C, N) layer Tool Temperature in Reaction gas body Target composition (atomic ratio) furnace Arc current Bias voltage pressure N.sub.2:CH.sub.4 Type type Al Cr Si ( C.) (A) (V) (Pa) gas ratio Comparative 1 A 80 15 5 500 100 50 4.0 100:0 coated 2 A 70 20 10 500 100 50 9.0 90:10 tool 3 B 65 25 10 550 150 50 2.0 80:20 4 C 63 27 10 600 150 50 2.0 100:0 5 C 78 15 7 550 100 50 4.0 0:100 6 B 85 5 10 600 150 50 9.0 100:0 7 D 40 50 10 500 100 50 4.0 90:10 8 D 78 20 2 500 100 25 9.0 50:50 9 B 50 20 30 550 100 25 4.0 100:0 10 E 20 50 30 600 100 50 9.0 90:10

(63) TABLE-US-00005 TABLE 5 Composition and target thickness of Composition, shape, (Al, Cr, Si)(C, N) layer and present ratio Non-metal of particles Metal elements elements Target Average Al Tool composition composition average content of body (atomic ratio) (atomic ratio) thickness all particles Type type Al Cr Si N C (m) (atomic %) Comparative 1 A 80 15 5 100 0 4.0 8 coated 2 A 70 20 10 90 10 6.0 10 tool 3 B 65 25 10 80 20 0.5(*1) 7 4 C 63 27 10 100 10(*1) 12 5 C 78 15 7 0(*1) 100(*1) 4.0 11 6 B 85 5(*1) 10 90 10 4.0 10 7 D 40 50(*1) 10 90 10 4.0 15 8 D 78 20 2(*1) 50(*1) 50(*1) 4.0 8 9 B 50 20 30(*1) 100 0 0.5(*1) 4 10 E 20 50 30(*1) 90 10 10(*1) 5 Composition, shape, and present ratio of particles Number ratio of particles having angle of 45 or less between Number Number Number straight line ratio of ratio of ratio of forming particles particles particles Number cross-sectional with Al with with ratio of long diameter content cross-sectional aspect particles and surface of of 50 long diameter ratio of prescribed tool body and atomic % of less than 2.0 or in present satisfying or less 0.5 m more invention A/B > 1 Type (%) (%) (%) (%) (%) Comparative 1 95.0 97.5 42.5(*1) 42.5(*1) 55.0(*2) coated 2 97.5 100.0 65.0(*1) 62.5(*1) 67.5(*2) tool 3 95.0 72.5(*1) 100.0 67.5(*1) 85.0 4 92.5 65.0(*1) 100.0 62.5(*1) 90.0 5 70.0(*1) 95.0 75.0(*1) 72.5(*1) 65.0(*2) 6 97.5 97.5 80.0(*1) 75.0(*1) 72.5(*2) 7 100.0 95.0 97.5 90.0 82.5 8 92.5 95.0 82.5(*1) 77.5(*1) 72.5(*2) 9 100.0 95.0 97.5 92.5 87.5 10 100.0 97.5 100.0 92.5 90.0 (*1)indicates that value is out of the range of Claim 1. (*2)indicates that value is out of the range of Claim 2.

(64) Next, using the invention coated tools 1 to 10 and the comparative coated tools 1 to 10, milling test was performed under the following conditions, and then the wear width of a flank face of each cutting edge was measured.

(65) Work material: a JIS SKD 61 block material (HRC 52)

(66) Rotation speed: 17000/min.

(67) Cutting speed: 300 m/min.

(68) Depth of cut: ap 2.0 mm, ae 0.3 mm

(69) Feed rate: 0.06 mm/tooth

(70) Coolant: Air blow

(71) Cutting length: 300 m

(72) The results of the cutting test and whether or not chipping or adhesion was occur are shown in Table 6.

(73) TABLE-US-00006 TABLE 6 Wear width Presence or absence Cutting test Presence or absence of flank face of adhesive or results of adhesive or Type (mm) chipping Type (m) chipping Invention 1 0.15 Absence Comparative 1 30 Chipping coated 2 0.17 Absence coated 2 40 Chipping tool 3 0.13 Absence tool 3 100 Absence 4 0.19 Absence 4 50 Chipping 5 0.15 Absence 5 20 Adhesion 6 0.17 Absence 6 30 Chipping 7 0.13 Absence 7 200 Chipping 8 0.10 Absence 8 20 Chipping 9 0.12 Absence 9 100 Chipping 10 0.15 Absence 10 120 Chipping Cutting test results in boxes of comparative coated tools indicate a cutting length (m) until the end of a tool life was reached due to chipping or adhesion, or a cutting length (m) at the time when the wear width of flank face exceeded 0.2 mm.

(74) In the results shown in Tables 3 and 6, each of the invention coated tools 1 to 10 had the (Al, Cr, Si)(C, N) layer or the (Al, Cr, Si)N layer of the hard coating which included particles containing 90 atomic % or more of one or more elements selected from Cr, Al and Si with respect to the total amount of constituent elements and in which the number ratio of the particles having an Al content of 50 atomic % or less, a cross-sectional long diameter of less than 0.5 m, and an aspect ratio of 2.0 or more was 90% or more with respect to the total number of the particles. Therefore, in the milling, they exhibited excellent chipping resistance, adhesion resistance, and wear resistance.

(75) In addition, in the invention coated tools 1 to 3, and 5 to 10, the number ratio of particles (oblate particles) in each of which the angle between a straight line forming the cross-sectional long diameter of the particle and the surface of the tool body was 45 or less and each of which satisfies A>B where A was an area of a region surrounded by the straight line forming the long diameter and outer circumference of the particle at the surface side of the hard coating and B was an area of region surrounded by the straight line and the outer circumference of the particle at the tool body side, was 80% or more with respect to a total number of the particles. Therefore, in the milling, they exhibited more excellent chipping resistance and adhesion resistance and as a result, they exhibited excellent wear resistance for a long time.

(76) On the other hand, in the comparative coated tools 1 to 6, and 8, although the particles were formed in the hard coatings, the number ratio of the particles having an Al content of 50 atomic % or less, a cross-sectional long diameter of less than 0.5 m, and an aspect ratio of 2.0 or more was out of the range prescribed in the present invention. Therefore, it is clear that in the milling, the end of the tool life thereof was reached within a short time due to occurrence of chipping, adhesion or the like. Further, the particles in each of the comparative coated tools 1, 2, 5, 6, and 8 did not have 45 or less of the angle between a straight line forming the cross-sectional long diameter of each particle and the surface of the tool body, and did not satisfy the relation of A>B where A was an area of a region surrounded by the straight line forming the long diameter and outer circumference of the particle at the surface side of the hard coating and B was an area of region surrounded by the straight line forming the long diameter and the outer circumference of the particle at a tool body side. Therefore, it is clear that in the milling, the end of the tool life thereof was reached within a further short time due to occurrence of chipping, adhesion or the like.

(77) In the comparative coated tools 7, 9, and 10, although the particles were formed in the hard coating layer, the composition or thickness of the hard coating layer was out of the range prescribed in the present invention. Therefore, it is clear that in the milling, the end of the tool life thereof was reached within a short time due to occurrence of chipping.

INDUSTRIAL APPLICABILITY

(78) As described above, the coated tool of the present invention exhibits excellent chipping resistance and adhesion resistance and enables extend the tool life, for example, in high-speed cutting of work material such as a carbon steel and an alloy tool steel, while it can be used for cutting of the other work material or under the other conditions.

(79) In addition, the above example describes the hard coatings constituted by one layer. However, even when the hard coating includes two or more layers, the same effects are exhibited as long as at least one layer is the film described in the example.

REFERENCE SIGNS LIST

(80) 1 ARC ION PLATING FURNACE 2 ROTATION TABLE 3 MAGNET COIL 4A CATHODE ELECTRODE (AlCrSi ALLOY) 4B CATHODE ELECTRODE (TARGET) (AlCrSi ALLOY OR TARGET FOR FORMING LOWER LAYER) 5 ANODE ELECTRODE 6 HEATER 7 CYLINDRICAL HEATER 8 JIG FOR TOOL BODY 9 TOOL BODY 10 COOLANT WATER 11 ARC ELECTRIC POWER SUPPLY 12 BIAS ELECTRIC POWER SUPPLY 13 REACTION GAS 14 EXHAUST GAS 15 PARTICLES 16 MEASUREMENT POINT W1 DISTANCE FROM SURFACE OF TARGET TO TIP END SURFACE OF CYLINDRICAL HEATER (FOR EXAMPLE, LENGTH ABOUT OF DISTANCE BETWEEN TARGET AND TOOL BODY) W2 DISTANCE FROM SURFACE OF TARGET TO POSTERIOR END SURFACE OF CYLINDRICAL HEATER (FOR EXAMPLE, 50 mm OR LESS)