Plasma Device with an External RF Hollow Cathode for Plasma Cleaning of High Vacuum Systems

Abstract

A compact cylindrical vacuum chamber made from a dielectric ceramic or glass wrapped with a cylindrical electrode connected to an RF source make a hollow cathode RF plasma source. The dielectric cylinder is used as the vacuum container with the conductive electrode outside the vacuum region to excite plasma inside. A gas is supplied by a gas source at low flow on one end of the cylinder and after being excited exhausts into a connected vacuum chamber carrying excited metastables and radicals. RF power is applied to the electrode to excite the plasma via the hollow cathode effect. This remote RF plasma source can be used to create ions, electrons, excited metastables, and atomic radicals for use downstream depending on choices of gas, pressure, flow rates, RF power and frequency, and extraction electrodes.

Claims

1. A device for the production of plasma using a radio-frequency hollow cathode discharge for delivery of plasma to a vacuum chamber, the device comprising: a) a hollow cylinder formed of a dielectric material, the cylinder having an exterior, and an interior, and an upstream end in communication with a source of gas through a gas flow control device, wherein the interior is devoid of objects other than the gas; and b) a single cylindrical electrode formed of conducting material and surrounding and generally coextensive with the exterior of the cylinder, the electrode in communication with a source of radio-frequency electrical power, wherein, upon energizing the electrode with radio-frequency electric power and passage of gas through the cylinder under vacuum, a plasma is formed by radio-frequency, hollow cathode effect coupling inside the dielectric cylinder to generate reactive neutral species: and c) a vacuum chamber in communication with a downstream end of the hollow cylinder.

2. The device of claim 1, wherein the cylinder is formed of a material comprising about 55% fluorophlogopite mica and 45% borosilicate glass.

3. The device of claim 1, wherein the vacuum chamber is in a charged-particle-beam instrument and the reactive neutral species are used to clean the vacuum chamber.

4. The device of claim 3, wherein the gas is air and the vacuum chamber is cleaned by Oxygen radicals that are the neutral specie that remove carbon compounds by oxidation from the vacuum chamber, but do not oxidize the conducting material of the electrode.

5. The device of claim 1, wherein the gas is hydrogen.

6. The device of claim 1, wherein the upstream end of the cylinder is closed by an end wall formed of the dielectric material and the gas enters through an aperture in the end wall.

7. The device of claim 1, wherein a virtual anode is formed by a hollow cathode effect along a central axis of the cylinder in the plasma and an electrical ground is defined by the vacuum chamber walls.

8. The device of claim 1, wherein the cylindrical electrode is a brass cylinder extending around the exterior of the hollow cylinder.

9. The device of claim 1, wherein the gas flow control device includes an aperture through which gas flows into the cylinder under vacuum.

10. The device of claim 1, wherein the gas flow control device is a variable valve.

11. The device of claim 1, wherein the cylinder is formed of a material comprising fluorophlogopite mica and borosilicate glass.

12. A device for the production of plasma using electrical energy for delivery of plasma to a vacuum chamber, the device comprising: a) a hollow cylinder formed of a material including fluorophlogopite mica and borosilicate glass, the cylinder having an exterior and an interior; b) an electrode formed of conducting material and at least partially surrounding the exterior of the cylinder, the electrode in communication with a source of electrical power, wherein, upon energizing the electrode with electric power and passage of gas through the cylinder under vacuum, a plasma is formed to generate reactive neutral species: and c) a vacuum chamber in communication with a downstream end of the hollow cylinder.

13. The device according to claim 12, wherein the electrode further comprises: a single cylindrical electrode formed of conducting material and surrounding and generally coextensive with the exterior of the cylinder, the electrode in communication with a source of radio-frequency electrical power, wherein, upon energizing the electrode with radio-frequency electric power and passage of gas through the cylinder under vacuum, a plasma is formed by radio-frequency, hollow cathode effect coupling inside the dielectric cylinder to generate reactive neutral species.

14. The device according to claim 13, wherein the cylindrical electrode is a brass cylinder extending around the exterior of the hollow cylinder.

15. The device of claim 12, wherein an upstream end of the cylinder is closed by an end wall formed of the dielectric material and the gas enters through an aperture in the end wall.

16. A method of generating a plasma having increased numbers of secondary electrons and density, the method comprising the steps of: evacuating a vacuum chamber to a selected pressure; flowing a gas through a cylinder in fluid communication with the vacuum chamber, the cylinder being formed of a material including fluorophlogopite mica and borosilicate glass; and energizing an electrode surrounding the cylinder with RF electrical energy, wherein a plasma is formed in the cylinder from the gas, and the plasma density is enhanced by the electron and ion bombard of the mica/borosilicate glass that increases the secondary electron production.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0029] FIG. 1A is a longitudinal section view of an embodiment of the present invention

[0030] FIG. 1B is a perspective view, partially in section, of the embodiment of FIG. 1A.

[0031] FIG. 2 is a perspective view of another embodiment of the present invention.

[0032] FIG. 3A is a longitudinal section view of still another embodiment of the present invention.

[0033] FIG. 3B is a perspective view, partially in section, of the embodiment of FIG. 3A.

[0034] FIG. 4 is a graphical comparison of data showing that Macor ceramic produces a denser plasma than quartz when it is used as the dielectric cylinder 1.

[0035]

TABLE-US-00001 Reference Numerals in Drawings dielectric cylinder or tube 1 plasma 2 hollow cathode electrode 4 center conductor 6 coaxial cable 8 RF impedance match 9 vacuum seal o-rings 10 KF flange O-ring 11 conductive grounded shield 12 insulator 14 activated gas 16 gas entrance hole 20 tube end wall 21 metal welded or brazed seal 22 metal ring or tube connected to seal 24 vacuum feedthrough 26 flexible gas tube 28 manifold 30 on/off valve 32 gas control device 34 gas ballast 36 chamber exit flange 40 connector flange 42 sealing CF joint with knife edge 50 rotating ring 52 baseplate 54 copper ring 55 CF connector flange 56

DETAILED DESCRIPTION OF THE INVENTION

[0036] Referring now to the Figures and in particular to FIGS. 1A and 1B, a first embodiment of the plasma device according to the present invention comprises a hollow cylinder 1 made of a dielectric material such as the machinable ceramic composed of about 55% fluorophlogopite mica and 45% borosilicate glass and sold under the trademark Macor by Corning Incorporated, Houghton Park CB-08, Corning, N.Y. 14831. Cylinder 1 is in fluid communication at its downstream end with the vacuum chamber of an instrument and thus is itself under vacuum conditions and is used to contain a plasma 2 in a plasma chamber defined in the interior of the cylinder 1. Other dielectric materials such glass, quartz, Teflon, and other ceramics were tested and it was found that they did not produce as dense a plasma as the Macor ceramic (see discussion in connection with FIG. 4, below). While Macor ceramic material provided unexpectedly good results, the other materials listed above, as well as other dieletric materials, may also be suitable for use in the present invention.

[0037] A hollow cathode electrode 4, made from a conductive material such as brass, is placed around and in close contact with cylinder 1. Electrode 4 may be a machined cylinder that is placed around the exterior of cylinder 1 or a thin sheet of conductor wrapped around cylinder 1. Electrode 4 may also be assembled of halves or quarters machined or otherwise formed from electrically conductive metals or other conductive materials that are closely joined together, electrically, physically, or structurally, upon assembly to form a single, unitary electrode. Electrode 4 is intended to be a continuous thin conductive cylinder, as distinguished from a coil or other interrupted structure, to avoid inductive coupling effects. Other conductive materials such as aluminum or copper could also be used for the electrode. The electrode 4 is connected to the center conductor 6 of a 50-Ohm coaxial cable 8 that carries radio-frequency (RF) power (3 KHz to 300 GHz) to the electrode from an RF impedence matching network 9. As illustrated in FIGS. 1A through 3, electrode 4 is generally coextensive with the exterior of cylinder 1, leaving only the ends of the cylinder (where electrode effects on plasma are negligible) uncovered by the conductive material.

[0038] A cylindrical, electrically conductive shield 12 is placed around the electrode 4 and is electrically grounded. Vacuum seal O-rings 10 are used so that the plasma chamber 2 is under vacuum and the electrode 4 is at atmospheric pressure. Shield 12 is grounded by a connection to the shield of the RF cable 8 (not shown). The shield also provides an RF ground for the plasma 2 by being in contact with ceramic cylinder 1 on either of the ends extending beyond the electrode insulation 14. An insulator 14 in the form of an air gap (as shown), or solid dielectric material, separates electrode 4 from shield 12. Between the O-rings 10 and the electrode 4, the grounded cylinder 12 may make contact with cylinder 1.

[0039] In this embodiment, an upstream end of cylinder 1 has a gas entrance aperture or hole 20 through an end wall 21 in communication with a source or supply of gas to supply the feed or reactant gas to the interior of cylinder 1 to generate and maintain a plasma. End wall 21 should be placed by empirical design away from the intense (brightest) plasma 2 region inside the hollow cathode of cylinder 1 to avoid ion bombardment damage to the end wall.

[0040] The feed gas is fed through a gas manifold 30 that contains an on/off valve 32 to control the entrance of gas into chamber 2 and a device for controlling the gas flow or leak rate to and through aperture 20. The leak rate of gas through aperture 20 into the interior of cylinder 1 may be a fixed rate through a gas rate control device 34, such as an orifice or a variable opening or needle or other metering valve that may be controlled manually, or may be varied by a feedback method that uses pressure, plasma density, optical spectra, reaction rate, current, or other physical properties of the plasma to adjust flow. The gas feed pressure to the rate control device 34 is at atmospheric pressure or an otherwise controlled higher pressure. A volume of gas called the gas ballast 36 exists in the manifold tube between valves 32 and 36 that rises to the input pressure when gas is not flowing (valve 32 is closed) and drops suddenly when valve 32 is opened, causing a short-duration gas pressure burst downstream in plasma chamber 2, which assists in igniting a plasma. This gas burst technique follows the disclosures of Vane in U.S. Patent Publication 2015-0097485 and Williamson in U.S. Pat. Nos. 4,800,282 and 4,977,353.

[0041] An exit end 40 of the plasma chamber 2 is attached to a connector flange 42 that connects to the main vacuum chamber of the instrument. Typically, KF (or QF) clamp flanges are used with an O-ring 11 mounted on a centering ring (not shown). The activated gas particles 16 from the plasma chamber 2 flow into the connected main vacuum chamber to clean it or accomplish other downstream processes.

[0042] In the preferred embodiments, a fixed-flow-rate orifice is used as a gas flow-rate control device 34. Experiments have shown that cleaning at the pressures achieved by turbo-molecular pumps (TMP), acting on instrument vacuum chambers in the range of between 1 milliTorr and 30 milliTor, provides satisfactory cleaning rates, and that the flow rate into the plasma chamber of reactant gas is more important than the measured pressure. Thus, a fixed flow rate of 5 to 40 standard cubic centimeters per minute (sccm) satisfies and maintains these conditions both for generation of plasma and flow of and cleaning with the plasma subsequent to generation. By providing fixed input gas flow rate to any TMP system, a plasma can usually be ignited by an RF-Hollow Cathode described in this invention regardless of the pumping speed except in extreme cases.

[0043] FIG. 2 depicts a second embodiment of the invention that differs from that of FIGS. 1A and 1B in that a flexible dielectric tube 28 is connected to one end of the cylinder 1 through the hole 20 in the wall 21 to supply the feed or reactant gas to the interior or plasma chamber within cylinder 1. This embodiment is otherwise similar to that of FIGS. 1A and 1B but is placed inside a larger vacuum chamber. The gas supply and manifold are fed in from outside the main vacuum chamber.

[0044] The flexible gas tube 28 is connected through a vacuum feedthrough 26 to a gas control manifold 30 outside the vacuum chamber. The gas control manifold 30 has a gas on/off valve 32 and a device 34 to control gas flow rate into the chamber. Device 34 may be either an aperture or a gas flow control valve. A gas ballast 36 is located in the tube between the two valves 32 and 34 and serves to assist in igniting a plasma. By being on a flexible tube 28 and RF cable 8 tether, this embodiment may be placed anywhere in the vacuum system where plasma cleaning or carbon removal is needed.

[0045] FIGS. 3A and 3B illustrate a third embodiment of the invention in which the downstream end of cylinder 1 is sealed to a stainless steel or other metal tube or ring 50 that can be welded or brazed 22 to be made part of a ultra-high vacuum apparatus with all-metal seals or welds. No Viton or other elastomer vacuum seals are needed and the resulting apparatus can be baked or exposed to high temperature.

[0046] Dielectric plasma cylinder 1 can be welded or brazed 22 to metal ring 24 and connected by flanges that allow a metal-to-metal seal for an ultra-high vacuum connection to the rest of the vacuum system with metal gaskets such as knife-edge copper gaskets 55. CF or ConFlat (trademark of Agilent Technologies, Inc., 5301 Stevens Creek Boulevard, Santa Clara, Calif. 95051) knife-edge copper-gasket-sealed flanges are preferred. Sealing ring 50 is connected by a metal ring 24 and braze seal 22 to cylinder 1. Sealing ring 50 is compressed by a rotating bolt ring 52. At the upstream or gas-entrance end of tube 1, a metal ring 24 is welded or brazed 22 to cylinder 1. The gas feed entrance 20 may be located at any location on the baseplate 54 but the gas will be fed into the most intense portion of the plasma if it is in the center, to feed on the central axis of the plasma chamber 1. A ground shield 12 is located between the baseplate 54 and rotating ring 52. The electrode 4 and the ground shield 12 are isolated from each other by an insulator 14. The gas feed and RF inputs are described in the first embodiment FIG. 1 and the other figure numbers correspond. The RF electrode on the outside 14 and ground shield 12 can be removable half shells and surround the dielectric tube plasma chamber and electrode, respectively. The RF connection 6 with cable 8 should be a simple pin type to allow the RF cable to be removed. The valve 32 must have metal seals and be bakeable. The rest of the gas manifold and connections can be attached to valve 32 via a metal swage seal fitting or a copper gasket connector.

[0047] FIG. 4 is a comparison of plasma density as measured by hydrocarbon removal rates with air plasma made in a quartz tube versus a Macor tube as the dielectric 1 tube inside the external hollow cathode 4. Measurements were made in a 50 L vacuum chamber, using a quartz crystal monitor or microbalance (QCM) to measure deposition rates at 15 cm from the wall port (25 cm from the plasma source). Chamber pressure (in the 50 L vacuum chamber and interior of cylinder 1) during plasma operations was 1.0610.sup.3 Torr, and the flow rate through cylinder 1 was 12 sccm. RF power was as marked on the graph. The most resistant material to sputtering was found in Macor machinable ceramic made by Corning Inc. Quartz has been used in plasma chambers for ICP type plasma sources to separate the plasma from the electrode. We found that hollow cathode plasma at 50 Watts tended to damage a quartz tube and create a white powder in the chamber. The Macor ceramic tube showed no such damage after a longer exposure. In addition, Macor ceramic emits more secondary electrons than quartz. This allows a Macor tube to sustain a higher density plasma than a quartz tube, resulting in a higher cleaning rate. While Macor ceramic exhibits unexpected results in the cylinder of the cathode of the invention, other dielectric materials are suitable for, and within the scope of, the present invention.

[0048] In the development of the first embodiment of the invention it was observed that no significant plasma self-bias voltage could be observed between the RF hollow cathode 4 and the chamber ground 12. Because there is no conductive plasma path between the two due to the dielectric cylinder 1 inside the anode, this was not surprising, but it indicates a significant unusual property of the invention. The plasma oscillates about a virtual ground anode on the axis of the hollow cathode assembly 1, 4 and does not need a physical ground anode in contact with plasma to support a discharge. The plasma discharge sheath from said device cylinder is not described in standard texts and reference papers about plasmas. The references ignore the topic of no definable sheath width without a solid surface nearby.

[0049] The invention has been described in connection with preferred and illustrative embodiments thereof. It is thus not limited, but is susceptible to variation and modification without departing from the scope and spirit of the invention, which is defined in the appended claims.