APPARATUS AND METHOD FOR ANALYSING A SOLID SPECIMEN MATERIAL

Abstract

An apparatus and a method for analysing a solid specimen material by means of ablating particles of the solid specimen material by laser into a carrier liquid, having: a specimen holder for arranging the solid specimen material covered by the carrier liquid, a laser apparatus for irradiating the solid specimen material to produce a suspension of particles of the solid specimen material and the carrier liquid, an analysis apparatus for analysing the particles, an ablation cell with the specimen holder, having a liquid channel for the carrier liquid and having an entry window made of a material that transmits the laser beam, a supply line for supplying the carrier liquid into the liquid channel of the ablation cell and a discharge line for discharging the suspension of particles of the solid specimen material and the carrier liquid from the liquid channel of the ablation cell into the analysis apparatus.

Claims

1. A device for analysing a solid sample material by means of laser ablation of particles of the solid sample material in a carrier liquid, comprising: a sample holder for positioning the solid sample material covered with the carrier liquid; a laser device for irradiating the solid sample material with a laser beam in a manner such that a suspension of particles of the solid sample material and of the carrier liquid can be produced, an analytical device for analysing the particles of the solid sample material, wherein the sample holder is in an ablation cell comprising a liquid channel for the carrier liquid and an entry window produced from a material that is transparent to the laser beam of the laser device, a supply line to supply the carrier liquid to the liquid channel of the ablation cell, a discharge line to discharge the suspension of particles of the solid sample material and of the carrier liquid from the liquid channel of the ablation cell to the analytical device and a dosing device for introducing a defined volume of a standard liquid into the supply line.

2. The device as claimed in claim 1, wherein the ablation cell comprises the sample holder and a housing comprising the liquid channel and the entry window.

3. The device as claimed in claim 2, wherein the housing contains a section of the supply line and/or a section of the discharge line, wherein the section of the supply line and/or the section of the discharge line are respectively connected to the liquid channel formed on an underside of the housing wherein the underside faces the solid sample material in an operational condition.

4. The device as claimed in claim 2, wherein the housing is connected to the solid sample material via a releasable connection.

5. The device as claimed in claim 2, wherein the housing comprises a sealing element on the underside facing the solid sample material.

6. The device as claimed in claim 5, wherein the height of the liquid channel corresponds to the thickness of the sealing element.

7. The device of claim 1, wherein the liquid channel has a constant height between the sample holder and the entry window.

8. The device of claim 1, wherein the supply line for the carrier liquid is connected to a pump device, wherein the pump device maintains constant volumetric flow of the carrier liquid through the liquid channel of the ablation cell.

9. The device of claim 1, wherein the dosing device has a dosing loop for introducing the defined volume of the standard liquid into the supply line.

10. The device as claimed in claim 9, wherein the dosing device comprises a multi-way valve.

11. The device of claim 1, further comprising a mechanism to produce a relative movement between the ablation cell and the laser device in the longitudinal direction (x) and/or in the transverse direction (y) of the sample holder and/or in the height direction (z) essentially perpendicular to the longitudinal direction (x) and transverse direction (y).

12. The device as claimed in claim 1, wherein the analytical device comprises an optical emission spectrometer or a mass spectrometer.

13. A method for analysing a solid sample material by means of laser ablation of particles of a solid sample material in a carrier liquid, comprising: providing the solid sample material and a layer of the carrier liquid which covers the solid sample material, irradiating the solid sample material with a laser beam in a manner such that a suspension of particles of the solid sample material and of the carrier liquid is produced, analysing the particles of the solid sample material, wherein the solid sample is in a sample holder in an ablation cell; supplying the carrier liquid to a liquid channel of the ablation cell; conveying the carrier liquid through the liquid channel of the ablation cell, wherein the particles of the solid sample material are ablated into the carrier liquid by irradiation with the laser beam; discharging the suspension of particles of the solid sample material and of the carrier liquid from the liquid channel of the ablation cell.

14. The method as claimed in claim 13, comprising the following steps: moving the solid sample material relative to the laser beam in the longitudinal direction (x) and/or in the transverse direction (y) of the solid sample material and/or in the height direction (z) of the solid sample material; analysing the particles of solid sample material as a function of an x-position and/or a y-position and/or a z-position of the solid sample material relative to the laser beam.

15. A device for analysing a solid sample material by means of laser ablation of particles of the solid sample material in a carrier liquid, comprising: a sample holder for positioning the solid sample material covered with the carrier liquid; a laser device for irradiating the solid sample material with a laser beam in a manner such that a suspension of particles of the solid sample material and of the carrier liquid can be produced, an analytical device for analysing the particles of the solid sample material, wherein the sample holder is in an ablation cell comprising a liquid channel for the carrier liquid and an entry window produced from a material that is transparent to the laser beam of the laser device, wherein the ablation cell comprises a housing with the liquid channel and the entry window, the ablation cell further comprising the sample holder, the sample holder being separate from the housing; a releasable connection for connecting the housing of the ablation cell to the solid sample material; a supply line to supply the carrier liquid to the liquid channel of the ablation cell, and a discharge line to discharge the suspension of particles of the solid sample material and of the carrier liquid from the liquid channel of the ablation cell to the analytical device.

Description

[0055] The invention will now be explained in more detail with reference to the accompanying exemplary embodiments; the invention is not, however, limited thereto.

[0056] FIG. 1 shows a block diagram of a device in accordance with the invention for analysing a suspension of particles of a solid sample material and a carrier liquid the suspension being obtained by laser ablation;

[0057] FIG. 2 shows an illustrative view of an ablation cell of the device according to FIG. 1, wherein the ablation cell is connected to a supply line and a discharge line for the carrier liquid;

[0058] FIG. 3 shows a diagrammatic side view of the ablation cell according to FIG. 2;

[0059] FIG. 4 shows a detailed view of the section of the ablation cell in the box of FIG. 3,

[0060] FIG. 5 shows a graph of the signal-time plot of respectively a Sr as well as a Ti emission line in an analytical device of the device according to FIG. 1;

[0061] FIG. 6 shows an alternative embodiment of the LASIL device 1.

[0062] FIG. 1 shows a device 1 for analysing a solid sample material 2 (see FIG. 4) by laser ablation of particles 3 of solid sample material 2 in a carrier liquid. The device 1 comprises a sample holder 5 (see FIG. 4) for arranging the solid sample material 2 covered with the carrier liquid. Furthermore, a laser device 6 is provided (shown only diagrammatically) which can emit a focussed and pulsed laser beam 7. The laser beam causes particles 3 to be detached from the surface of the solid sample material 2, whereupon a suspension of particles 3 of the solid sample material 2 and of the carrier liquid is produced. The LASIL device 1 additionally comprises an analytical device 8 for the analysis of the suspension of particles 3 of the solid sample material 2 and of the carrier liquid. The analytical device 8 may comprise an optical emission spectrometer with an ionisation source, in particular in the form of what is known as ICP-OES (inductively coupled plasma optical emission spectrometry). Alternatively, what is known as ICP-MS (inductively coupled plasma mass spectrometry) may be used.

[0063] In the embodiment shown, the detachment of the particles 3 from the solid sample material 2 is carried out in an ablation or washout cell 9, in which the sample holder 5 is received to accommodate the solid sample material 2. The ablation cell 9 additionally comprises a liquid channel 10 which is closed in cross section, through which the carrier liquid is conveyed. Furthermore, a supply line 11 is provided to supply the carrier liquid to the liquid channel 10 of the ablation cell 9 (see arrow 20 in FIGS. 2, 4) and a discharge line 12 is provided for discharging the suspension of particles 3 of the solid sample material 2 and of the carrier liquid from the liquid channel 10 of the ablation cell 9 to the analytical device 8 (see arrow 21 in FIGS. 2, 4).

[0064] As can be seen in FIGS. 2 to 4, the ablation cell 9 comprises an entry window 13 formed from a (solid) material which is transparent to the laser beam 7 of the laser device 6, for example CaF.sub.2, fused quartz or borosilicate glass. In the embodiment of FIGS. 2 to 4, the entry window 13 is retained on the sample holder 5 of the ablation cell 9 via a releasable connection, in order to allow the solid sample material 2 below the entry window 13 to be changed. Furthermore, in this embodiment, the liquid channel 10 is formed within the sample holder 5.

[0065] Accordingly, the laser beam 7 passes through the entry window 13, penetrates into the carrier liquid and impinges upon the surface of the solid sample material 2, whereupon particles 3 of the solid sample material 2 are detached. The liquid channel 10 between the sample holder 5 and the entry window 13 comprises an essentially constant height of 10 m to 1 mm, in particular of 50 m to 200 m (with respect to the direction of transport of the carrier liquid along the x axis). The height of the liquid channel in this case refers to the extent of the liquid channel in the z direction, i.e. in the direction essentially perpendicular to the principal plane of the sample holder which extends in the x axis and y axis.

[0066] The suspension formed, consisting of the carrier liquid and the (nano) particles 3 of the solid sample material 2, is conveyed to the analytical device 8, in which qualitative or quantitative investigations of the particles 3 are undertaken.

[0067] As can also be seen in FIG. 1, the supply line 11 for the carrier liquid is connected to a pump device 14 with which carrier liquid is pumped from a liquid reservoir 15 into the supply line 11 for the ablation cell 9. The pump device 14 produces an essentially constant volumetric flow of carrier liquid through the liquid channel 10 of the ablation cell 9, which is coordinated with the capacity of the analytical device 8.

[0068] As can also be seen in FIG. 1, in addition, a dosing device 16 with a dosing loop 17 is provided in order to introduce a defined volume of a standard liquid into the supply line 11. In the embodiment shown, the dosing device 16 comprises a 6-way valve 18.

[0069] As can also be seen in FIG. 1, in the embodiment shown, a device 19 is provided to produce a relative movement between the ablation cell 9 and the laser device 6 in the longitudinal x-direction, in the transverse y-direction of the sample holder 5 perpendicular thereto and in the height z-direction perpendicular to the longitudinal x-direction and the transverse y-direction.

[0070] FIGS. 3 and 4 show the ablation cell 9. According to them, the carrier liquid coming from the supply line 11 is conveyed through the essentially horizontal liquid channel 10. Meanwhile, the surface of the solid sample material 2 is irradiated with the laser beam 7, whereupon particles 3 of the solid sample material 2 are taken up in the carrier liquid. The suspension formed is conveyed to the analytical device 8. As can be seen in FIG. 3, the supply line 11 comprises an end section 22 which runs essentially perpendicular to the principal plane of the entry window 13 and the discharge line 12 comprises an end section 23 which runs essentially perpendicular to the principal plane of the entry window 13. The end section 22 of the supply line 11 is hydraulically connected to one end of the liquid channel 10 in the ablation cell 9. Correspondingly, the end section 23 of the discharge line 12 is hydraulically connected to the other end of the liquid channel 10 in the ablation cell 9.

[0071] A method for analysing a solid sample material 2 by laser ablation of particles 3 of the solid sample material 2 into a carrier liquid may be carried out using the device 1 described above; the method comprises at least the following steps: [0072] providing the solid sample material 2 and a layer of the carrier liquid which covers the solid sample material 2, [0073] irradiating the solid sample material 2 with a laser beam 7 in a manner such that a suspension of particles 3 of the solid sample material 2 and of the carrier liquid is produced, [0074] analysing the suspension of particles 3 of solid sample material 2 and the carrier liquid, [0075] supplying the carrier liquid to a liquid channel 10 of a through-flow ablation cell 9; [0076] conveying the carrier liquid through a liquid channel 10 of an ablation cell 9, wherein the particles 3 of the solid sample material 2 are ablated into the carrier liquid by irradiation with the laser beam 7; and [0077] discharging the suspension of particles 3 of the solid sample material 2 and of the carrier liquid from the liquid channel 10 of the ablation cell 9.

[0078] In order to obtain a spatially resolved analysis of the solid sample material 2, in addition, the following steps may be carried out: [0079] moving the solid sample material 2 relative to the laser beam in the longitudinal x-direction and/or in the transverse y-direction of the solid sample material 2 and/or in the height z-direction of the solid sample material 2; [0080] analysing the suspension of particles 3 of solid sample material 2 and of the carrier liquid as a function of an x-position and/or a y-position and/or a z-position of the solid sample material 2 relative to the laser beam 7.

[0081] Accordingly, an analytical method is provided which combines the advantages of solid and liquid analytical systems. The sample in this case is located in a specially prepared ablation or washout cell 9 which is flushed with a stream of carrier liquid, which is preferably flowing essentially continuously, in particular water or an advantageously diluted acid. The ablation cell 9 is configured with an entry window 13 which is transparent to the wavelength of the laser device 6. If the laser beam 7 is directed through the entry window 13 onto the sample surface, very fine particles 3 are produced which form a nanosol in the stream of liquid. This suspension is transported out of the ablation cell 9 and to an analytical device 8 in the form of an ICP-OES or ICP-MS instrument in order to display a transient analyte signal. The measurement signals may be quantified with the aid of aqueous standards (standard liquids). The aqueous standards may be introduced into the supply line 11 for the carrier liquid via a dosing device 16, in particular in the form of a flow injection system with a dosing loop 17. This procedure can be automated with the device 1, whereupon an analysis of the sample is possible without manual intervention. In this manner, materials can easily be analysed, particularly when they are difficult to dissolve, such as ceramics. The method provides benefits also for other samples. The single fundamental prerequisite is that these samples must be insoluble in the carrier liquid employed.

EXAMPLE

[0082] The method was used to analyse the stoichiometry of a SrTiO.sub.3 layer produced by laser deposition (PLDpulsed laser deposition). The SrTiO.sub.3 layer was applied to a substrate of small yttrium-stabilised zirconium oxide plates. The thickness of the layer was approximately 500 nm.

[0083] FIG. 5 shows the signal-time plot of a Sr emission line 24 as well as of a Ti emission line 25 respectively during a spot ablation of the sample with a laser beam 7 with a diameter of 200 m and a laser output of 1.83 mJ. Ten laser pulses were fired onto the sample. In FIG. 5, the sufficiency of the signal intensity for both of the analytes of interest as well as good washout behaviour of the ablation cell 9 can be seen. By means of calibration using the dosing device 16, it could be established that the total of the ablated and detected quantity of sample material 2 was approximately 140 ng.

[0084] The relative composition of the sample material 2 could be determined by means of the standard liquids introduced via the dosing device 16. By constructing a mean value from six individual measurements, a ratio of 1.0000.017 (Sr) to 0.9880.017 (Ti) was determined. The values obtained were not significantly different from a ratio of 1:1. From this, it could be concluded that a stoichiometric layer was present. This example demonstrates an application of the online LASIL method, with which a substantial amount of time can be saved compared with the sample preparation which is necessary for conventional liquid analytical procedures. The SrTiO.sub.3 layer could only be dissolved by using an intensive fusion disintegration procedure. In addition, a liquid measurement would not outperform the precision of the measurements demonstrated here.

[0085] FIG. 6 shows an alternative embodiment of the LASIL device 1, wherein only the differences between this and the embodiment of FIGS. 1 to 5 will be considered below.

[0086] In the embodiment of the LASIL device 1 of FIGS. 1 to 5, the solid sample material 2 is placed in a chamber 5a (see FIG. 4) of the sample holder 5, which also contains the liquid channel 10. In particular, the chamber 5a may be configured as a basin-shaped depression on the upper side of the sample holder 5. In order to prepare for the measurement, the solid sample material 2 is placed in the chamber 5a with the entry window 13 removed before the liquid channel 10 is closed with the entry window 13.

[0087] According to FIG. 6, the ablation cell 9 comprises on one side a housing 9a with the liquid channel 10 and the entry window 13, and on the other side the sample holder 5 for the solid sample material 2. The housing 9 with the liquid channel 10 and the entry window 13, and the sample holder 5 with the solid sample material 2 are separate from each other. In this embodiment, the sample holder 5 does not have a liquid channel 13. As an example, the sample holder 5 may thus be formed by an underlay which in particular is shaped like a plate. In this embodiment, the housing 9a thus forms the actual ablation cell 9, which in the intended operational condition, i.e. during ablation, is positioned on the solid sample material 2. To this end, the housing 9a is provided with a sealing element 26 on the underside facing the solid sample material 2; in the operational condition, the sealing element is in sealing contact with the solid sample material 2. Preferably, the sealing element 26 is formed from an elastomer, in particular polymethylmethacrylate (PMMA) or silicone. Furthermore, a releasable connection, in particular a clamp or screw connection, may be provided in order to firmly retain the housing 9 on the solid sample material 2 when in the assembled operational condition. The solid sample material 2 preferably has a flat shape, in particular with an even upper side.

[0088] In this embodiment, in contrast to FIGS. 1 to 5, a greater flexibility during analysis of various samples is obtained because the sample does not have to fit into the chamber 5a of the sample holder 5. The principle of the analysis is unchanged in this regard.

[0089] As can be seen in FIG. 5, the housing 9a has a section 11a of the supply line 11 which is upstream of the liquid channel 10 in the direction of flow and a section 12a of the discharge line 12 which is downstream of the liquid channel 10 in the direction of flow. The supply line 11 and the discharge line 12 respectively open into the liquid channel 10, which in the embodiment shown is formed on the underside of the housing 9a. In the embodiment shown, the liquid channel 10 is delimited by the underside of the housing 9a, the sealing element 26 and the surface of the solid sample material 2. As described above, the liquid channel 10 is flushed with a stream of liquid from the supply line 11. In this regard, a film of liquid 3 is produced on the surface of the sample. In the embodiment shown, the height of the film of liquid essentially corresponds to the thickness of the sealing element 26, which in the operational condition is located between the housing 9a and the sample surface. Preferably, the sealing element has a thickness of 10 m to 1 mm, in particular from 50 m to 200 m. Preferably, the sealing element 26 essentially extends over the entire underside of the housing 9a, however with a recess corresponding to the liquid channel 10. Above the liquid channel 10 is the optical entry window, for example formed from CaF.sub.2 or fused quartz, which is highly transparent at the wavelength of the laser employed. When the laser beam 7 impinges upon the sample surface, nanoparticles of the sample material are formed (in the same way as indicated above in connection with FIGS. 1 to 5), which are transported away by the liquid stream in the direction of the outlet 12.

[0090] The housing 9a is preferably produced from a synthetic material, so that in particular, no metallic contaminants can be released into the liquid to be analysed. Preferred synthetic materials are chemically inert; examples here are polyoxymethylene (POM) or polytetrafluoroethylene (PTFE).

[0091] According to FIG. 6, the housing 9 comprises a recess 27, sections of which in the variation shown converge downwardly in the manner of a funnel. The entry window 13 is disposed at the underside of the recess and closes the liquid channel 10 from the top.

[0092] The embodiment of FIG. 6 is characterized by being particularly flexible and user-friendly. Advantageously, a particularly good washout behaviour can be obtained. It is possible to minimise the effective region through which liquid flows, because the entire sample no longer has to be flushed with the liquid.