NOZZLE

Abstract

A nozzle for an abatement apparatus and a method are disclosed. The nozzle is for abatement apparatus operable to treat an effluent stream from a processing tool, the nozzle comprises: a nozzle body defining a nozzle inlet operable to receive the effluent stream, a nozzle outlet, and a conduit extending between the nozzle inlet and the nozzle outlet and operable to convey the effluent stream in a direction of flow from the nozzle inlet to the nozzle outlet; and an effluent stream rotator configured to impart a rotational component to the effluent stream to rotate the effluent stream around the direction of flow. In this way, the effluent stream is rotated as it passes through the nozzle body. The destruction rate efficiency achieved by an abatement apparatus when receiving such rotating effluent streams has been found to be significantly improved compared to non-rotating effluent streams.

Claims

1. A nozzle for abatement apparatus operable to treat an effluent stream from a processing tool, said nozzle comprising: a nozzle body defining a nozzle inlet operable to receive said effluent stream, a nozzle outlet, and a conduit extending between said nozzle inlet and said nozzle outlet and operable to convey said effluent stream in a direction of flow from said nozzle inlet to said nozzle outlet; and an effluent stream rotator configured to impart a rotational component to said effluent stream to rotate said effluent stream around said direction of flow.

2. The nozzle of claim 1, wherein said effluent stream rotator is configured to rotate said effluent stream about a flow axis defined by said direction of flow.

3. The nozzle of claim 1, wherein said effluent stream rotator is configured to rotate said effluent stream into a vortex.

4. The nozzle of claim 1, wherein said effluent stream rotator comprises a protruding structure upstanding from a surface of said conduit.

5. The nozzle of claim 4, wherein said protruding structure is helical.

6. The nozzle of claim 4, wherein said conduit has a radius R and said protruding structure has an upstanding height into said conduit of between around 1/16 R and 3/16 R, and typically R.

7. The nozzle of claim 4, comprising a plurality of said protruding structures.

8. The nozzle of claim 7, wherein said plurality of said protruding structures define a multi-start thread arrangement.

9. The nozzle of claim 1, wherein said effluent stream rotator comprises at least one secondary inlet located to convey a fluid to impart said rotational component to said effluent stream.

10. The nozzle of claim 9, wherein said secondary inlet is orientated introduce said fluid with a tangential component within said conduit.

11. The nozzle of claim 9, wherein said secondary inlet is orientated introduce said fluid tangentially with respect to said conduit.

12. The nozzle of claim 9, wherein said secondary inlet is orientated introduce said fluid with a direction of flow component within said conduit.

13. The nozzle of claim 9, comprising a plurality of said secondary inlets.

14. The nozzle of claim 13, wherein said plurality of said secondary inlets are located circumferentially around said conduit.

15. A method comprising: providing a nozzle for an abatement apparatus operable to treat an effluent stream from a processing tool, said nozzle comprising a nozzle body defining a nozzle inlet operable to receive said effluent stream, a nozzle outlet, and a conduit extending between said nozzle inlet and said nozzle outlet and operable to convey said effluent stream in a direction of flow from said nozzle inlet to said nozzle outlet; and imparting a rotational component to said effluent stream to rotate said effluent stream around said direction of flow using an effluent stream rotator.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Embodiments of the present invention will now be described further, with reference to the accompanying drawings, in which:

[0046] FIG. 1 is a cross-section schematic through an abate apparatus assembly according to one embodiment;

[0047] FIGS. 2A to 2C illustrate nozzles according to embodiments;

[0048] FIGS. 3A and 3B illustrate thread profiles according to embodiments;

[0049] FIG. 4 illustrates the destructive rate efficiency (DRE) achieved by different configuration nozzles; and

[0050] FIGS. 5A and 5B illustrate a nozzle according to one embodiment.

DETAILED DESCRIPTION

[0051] Before discussing the embodiments in any more detail, first an overview will be provided. Embodiments provide an abatement apparatus nozzle. The nozzle has an inlet, an outlet and a conduit. The inlet receives an effluent stream, which flows through the conduit from the inlet to the outlet. The nozzle has a rotator which rotates the effluent stream within a plane which is transverse to the direction of flow. In particular, the effluent stream is typically rotated into a vortex, in which the effluent stream rotates about an axis line extending between the inlet and the outlet, along the conduit. Accordingly, the rotator rotates the effluent stream as it passes through the nozzle, which delivers a rotating effluent stream into the treatment chamber. In some embodiments, the rotator comprises a structure placed within the conduit which interacts with the effluent stream as it flows through the conduit, typically by providing a surface extending into the conduit which interacts with the flow of the effluent stream and causes it to rotate. Embodiments also provide a fluid which is injected into the conduit and the interaction between that fluid and the effluent stream causes the effluent stream to rotate.

Abatement Apparatus

[0052] FIG. 1 is a cross-section schematic through an abatement apparatus assembly, generally 8, according to one embodiment. The abatement apparatus assembly 8 treats an effluent gas stream pumped from a manufacturing process tool such as a semiconductor or flat panel display process tool, typically by means of a vacuum-pumping system. The effluent stream is received at an inlet 70 of a nozzle 12. The effluent stream is conveyed from the inlet 70 of the nozzle 12 to an outlet 80 of the nozzle 12 and injected into a cylindrical treatment chamber 14. In this embodiment, the abatement apparatus assembly 8 comprises four nozzles 12 arranged circumferentially, each conveying an effluent gas stream pumped from a respective tool by a respective vacuum-pumping system. Alternatively, the effluent stream from a single process tool may be split into a plurality of streams, each one of which is conveyed to a respective nozzle 12. Each nozzle 12 is located within a respective bore 16 formed in a ceramic top plate 18 which defines an upper or inlet surface of the treatment chamber 14.

[0053] The treatment chamber 14 has side walls defined by an exit surface 21 of a foraminous sleeve 20 in the form of a cylindrical tube. A plenum volume 22 is defined between an entry surface 23 of the foraminous sleeve 20 and a cylindrical outer shell 24. The cylindrical outer shell 24 is concentrically enclosed within an outer insulating sleeve 60 in order to reduce the outer surface temperature to safe levels should the temperature of the cylindrical outer shell 24 become raised due to, for example, stray heating. Additional, or alternatively, a cooler may be located within or against the outer shell in order to provide cooling.

[0054] A gas is introduced into the plenum volume 22 via an inlet nozzle (not shown). The gas may be air and a flammable gas mixture (such as a hydrocarbon, for example methane), or a blend of air and flammable gas mixture together with other species such as water vapour, CO.sub.2. The gas is introduced and passes from the entry surface 23 to the exit surface 21 of the foraminous sleeve 20 where it combusts to heat the treatment chamber 14.

Nozzles

[0055] FIGS. 2A to 2C are sectional views illustrating nozzles according to embodiments. In these embodiments, each nozzle 12A-12C has an internal diameter of 16 millimetres and an axial length of 76 millimetres.

[0056] As can be seen in FIG. 2A, a single-start thread 100A is provided on an interior surface 110A of the nozzle 12A. In operation, the effluent stream is introduced through the inlet 70A and travels towards the outlet 80A. As the effluent passes through the nozzle 12A, the presence of the thread 100A causes the effluent stream to begin to rotate circumferentially within the nozzle 12A in the direction R, about the elongate axis of the nozzle 12A. In other words, the effluent stream interacts with the upstream surfaces of the thread 100A. This interaction imparts a rotational component R about a centre axis of the nozzle 12A. A rotating effluent stream, typically in the form of a vortex then enters the treatment chamber 14.

[0057] As can be seen in FIG. 2B, a single-start thread 100B is provided on an interior surface 110B of the nozzle 12B. The nozzle 12B has a thread 100B which is similar in cross-section to thread 100A, but has a finer pitch. That is to say, there are more turns per axial length of the nozzle 12B compared to that of nozzle 12A. In particular, nozzle 12B has nine turns compared to nozzle 12A which has five turns. In operation, the effluent stream is introduced through the inlet 70B and travels towards the outlet 80B. As the effluent passes through the nozzle 12B, the presence of the thread 100B causes the effluent stream to begin to rotate circumferentially within the nozzle 12B in the direction R, about the elongate axis of the nozzle 12B. In other words, the effluent stream interacts with the upstream surfaces of the thread 100B. This interaction imparts a rotational component R about a centre axis of the nozzle 12B. A rotating effluent stream, typically in the form of a vortex then enters the treatment chamber 14.

[0058] As can be seen in FIG. 2C, a single-start thread 100C is provided on an interior surface 110C of the nozzle 12C. Nozzle 12C has a thread 100C whose cross-section is similar to that of 100A, but the thread in this embodiment is a double-start thread which has a coarser pitch compared to that of FIG. 2A. That is to say, for each of the two threads, there are fewer turns per axial length of the nozzle 12C compared to that of nozzle 12A. In operation, the effluent stream is introduced through the inlet 70C and travels towards the outlet 80C. As the effluent passes through the nozzle 12C, the presence of the thread 100C causes the effluent stream to begin to rotate circumferentially within the nozzle 12C in the direction R, about the elongate axis of the nozzle 12C. In other words, the effluent stream interacts with the upstream surfaces of the thread 100B. This interaction imparts a rotational component R about a centre axis of the nozzle 12B. A rotating effluent stream, typically in the form of a vortex then enters the treatment chamber 14.

Thread Profiles

[0059] FIGS. 3A and 3B illustrate thread profiles according to embodiments. As shown in FIG. 3A, the height H1 of the thread 100A is 2 millimetres, its width T1 is 2 millimetres and it has a pitch P1 between threads. However, for this size of nozzle, the height and width is selected typically in the range of 1 to 3 millimetres. Although not illustrated in FIG. 3A, the edges of the thread 100A is rounded. Also, as shown in FIG. 3B, it will be appreciated that the profile of the thread 100A may be reversed, with the thread 100A instead protruding into the thickness of the nozzle wall itself. As shown in FIG. 3B, it has the height H1, it has a width T2 and it has the pitch P1 between threads.

Destructive Rate Efficiency

[0060] FIG. 4 illustrates the destructive rate efficiency (DRE) achieved by different configuration nozzles.

[0061] Results (1) show the destruction rate efficiency at different rates of effluent stream using an existing inlet nozzle arrangement which has a dog-leg portion, such as that illustrated in EP 2 989 387 A1.

[0062] Results (2) show the destruction rate efficiency for a straight nozzle, such as that illustrated in FIG. 1, which omits the thread on the inner surface. As can he seen, the DRE for such a straight nozzle drops compared to that of the existing nozzle.

[0063] Results (12C) show the DRE for the nozzle 12C. As can be seen, the DRE of such a nozzle improves compared to that of a straight nozzle with no thread on the inner surface.

[0064] Results (12A) show the DRE of the nozzle 12A. As can be seen, the DRE of nozzle 12A is improved compared to that of nozzle 12C.

[0065] Results (12B) show the performance of the nozzle 12B. As can be seen, the DRE matches or exceeds that of the existing nozzle and avoids the problems of powder or debris gathering in the dog-leg.

Fluid Rotator

[0066] FIGS. 5A and 5B illustrate a nozzle 12D according to one embodiment. FIG. 5A is an end sectional view. FIG. 5B is a side sectional view. In this embodiment, one or more circumferentially located openings 180 are, provided in the wall of the nozzle 12D. The openings 180 are orientated to introduce a fluid stream into the nozzle 12D to interact with the flow of the effluent stream through the nozzle 12D. In particular, the openings 180 are arranged to inject the fluid in a direction which has a flow component which is transverse to the direction of flow of the effluent stream. As can be seen in FIG. 5A, typically, each opening 80 is orientated to inject the fluid in a direction D which is tangential to the inner surface 110D of the nozzle 12D. The introduction of the fluid interacts with the effluent stream to cause the effluent stream to rotate in the direction R about the central axis of the nozzle 12D in a similar manner to that described above. However, an advantage of this arrangement is that the need for the threads 100A to 100C is obviated, which reduces the possibility of debris gathering within the nozzle 12D. As can be seen in FIG. 5B, the openings 180 are tilted to provide a flow component which is in the direction of flow F of the effluent stream. In other words, the openings 180 are tilted to move the fluid at least partially in the direction of flow of the effluent stream. This helps to provide a stable vortex.

[0067] Accordingly, embodiments provide a modification to a straight through nozzle arrangement which enhances abatement performance. Embodiments seek to expand the useful range of operation of these nozzles to lower flow rates.

[0068] In embodiments, a nozzle is constructed from a heat and chemically-resistant metal alloy, for example ANC16. The nozzle is typically formed by a casting process, for example lost wax casting. In one embodiment, at least one helical vane, protruding from the inner wall of the nozzle extends at least partially in the direction of the flow axis. It is found that the abatement performance of a gas such as NF.sub.3 is very much improved by this feature. The improvement is significantly greater than that obtained by reducing the nozzle diameter to that of the narrowest dimension of the vane, indicating that a swirl is introduced into the gas by the vane, thereby improving performance. Embodiments deliberately induce a swirl in the incoming process gas. Variations include the pitch and number of starts of the helix, also the depth i.e. the protrusion of the helix into the gas stream. Such nozzles may be used with all radiant burner products, including induction-heated and gas-fired burners.

[0069] Although illustrative embodiments of the invention have been disclosed in detail herein, with reference to the accompanying drawings, it is understood that the invention is not limited to the precise embodiment and that various changes and modifications can he effected therein by one skilled in the art without departing from the scope of the invention as defined by the appended claims and their equivalents.

[0070] Although elements have been shown or described as separate embodiments above, portions of each embodiment may be combined with all or part of other embodiments described above.

[0071] Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are described as example forms of implementing the claims.