DEVICE AND METHOD FOR CONTACTLESSLY TRANSFERRING AT LEAST PARTLY FERROMAGNETIC ELECTRONIC COMPONENTS FROM A CARRIER TO A SUBSTRATE

Abstract

The device and method according to the invention are used to transfer an electronic ferromagnetic component from a carrier to a substrate using a magnetic assembly. The magnetic assembly is designed and arranged to aid in the correct positioning of the at least partly ferromagnetic electronic component on the substrate. The magnetic field generated by the magnetic assembly produces a magnetic force oriented from the carrier towards the substrate, said magnetic force aiding the transfer of the component from the carrier to the substrate such that a significantly increased positioning accuracy of the component is achieved compared to a transfer without said magnetic force.

Claims

1. A device for transferring at least partly ferromagnetic electronic components from a dispensing carrier to a receiving substrate, wherein the device comprises: a first holding fixture for the dispensing carrier which carrier is configured and arranged to hold at least partly ferromagnetic electronic components on the side of the carrier facing the substrate, and wherein the first holding fixture is located at a predetermined distance from a second holding fixture for the receiving substrate, which is configured and arranged to receive one of the components at a place predetermined for this on the substrate, a detachment unit, which is configured and arranged at least to support a detachment of one of the components in each case from the carrier in order to transfer it to the substrate, a magnetic arrangement, which is to be positioned relative to the second holding fixture for the substrate so that a magnetic field produced by it exerts a magnetic attraction force directed from the carrier towards the substrate on the component, at least during the transfer of the component, wherein the attraction force at least supports a placement of the component onto the place predetermined for this on the substrate, characterized in that the detachment unit for detaching the components attached to the carrier from the carrier is a laser that is controllable in its intensity, and a mirror arrangement of one or more movable mirrors and at least one mirror positioning actuator are provided, wherein the mirror positioning actuator is adapted to move and/or to swivel at least a single mirror of the mirror arrangement to reflect an emitted laser beam of the detachment unit.

2. The device according to claim 1, wherein the magnetic arrangement comprises one or more permanent magnets and/or electromagnets, and/or further comprising at least one magnet adjustment or positioning device, which is configured and arranged to move and/or to swivel at least one magnet of the magnetic arrangement.

3. The device according to claim 1, wherein the second holding fixture for the substrate is configured and arranged to move the substrate successively or continuously relative to the first holding fixture for the dispensing carrier, wherein the substrate has a plurality of predetermined places for receiving components.

4. The device according to claim 3, wherein the side of the substrate facing away from the component is guided by the second holding fixture over a support.

5. The device according to claim 3, wherein the magnetic arrangement is positioned at least partly in a receiving device of the support provided for this.

6. The device according to claim 1, further comprising a first actuator, which is configured and arranged to move and/or to swivel the first holding fixture, and/or further comprising a second actuator, which is configured and arranged to move and/or to swivel the second holding fixture.

7. The device according to claim 1, further comprising a first sensor, in particular an imaging sensor, which is configured and arranged to determine a position of the component on the carrier directly and/or by detection of a reference marking, and/or further comprising a second sensor, in particular an imaging sensor, which is configured and arranged to determine a position of the component on the substrate directly and/or by detection of a reference marking.

8. The device according to claim 7, further comprising at least one programmable control unit with a memory function, which is configured to evaluate and/or store the information of the first sensor, and/or to evaluate and/or store the information of the second sensor.

9. A method for transferring at least partly ferromagnetic electronic components from a dispensing carrier to a receiving substrate, wherein the method is characterized by: provision of at least partly ferromagnetic electronic components on the side of the carrier facing the substrate, positioning of the carrier by a first holding fixture at a predetermined distance from a second holding fixture for the substrate and in relation to a detachment unit for the components, detachment of one of the components in each case from the carrier, at least supported by the detachment unit, in order to transfer the respective component from the carrier to a place predetermined for this on the substrate, wherein the detachment unit is a laser controllable in its intensity for detaching the components attached to the carrier from the carrier, provision of a mirror arrangement of one or more movable mirrors and at least one mirror positioning actuator, movement and/or swivelling of at least a single mirror of the mirror arrangement by means of the mirror positioning actuator to reflect an emitted laser beam of the detachment unit, attraction of the at least partly ferromagnetic electronic component by a magnetic attraction force, which is exerted by a magnetic field on the component, wherein the magnetic field is produced by a magnetic arrangement, which is positioned relative to the substrate located in the second holding fixture so that the magnetic attraction force at least supports a placement of the component on the place predetermined for this on the substrate, and receiving of the component at the place predetermined for this on the substrate, which is positioned by the second holding fixture.

10. The method according to claim 9, wherein the magnetic arrangement is formed from one or more magnets and/or electromagnets, and/or wherein at least one magnet of the magnetic arrangement is moved and/or swivelled by at least one magnet adjustment or positioning device.

11. The method according to claim 9, wherein the first holding fixture is moved and/or swivelled by a first actuator, and/or wherein the second holding fixture is moved and/or swivelled by a second actuator.

12. The method according to claim 9, further comprising a first sensor, in particular an imaging sensor, which determines a position of the component on the carrier directly and/or by detection of a reference marking, and/or further comprising a second sensor, in particular an imaging sensor, which determines a position of the component on the substrate directly and/or by detection of a reference marking.

13. The method according to claim 12. further comprising at least one programmable control unit with a memory function, which evaluates and/or stores the information of the first sensor, and/or evaluates and/or stores the information of the second sensor.

14. The method according to claim 11, further comprising at least one programmable control unit with a memory function, which controls the first actuator, and/or controls the second actuator, and/or controls each mirror positioning actuator independently of one another in each case.

15. The method according to claim 9, further comprising at least one programmable control unit with a memory function, which controls the intensity of the laser.

16. The method according to claim 10, further comprising at least one programmable control unit with a memory function, which controls each magnet adjustment or positioning device independently of one another in each case, and/or controls a power supply for each electromagnet independently of one another in each case.

17. The device according to claim 6, further comprising at least one programmable control unit with a memory function, which is configured to control the first actuator, and/or to control the second actuator, and/or to control each mirror positioning actuator of the mirror arrangement according independently of one another in each case.

18. The device according to claim 1, further comprising at least one programmable control unit with a memory function, which is configured to control the intensity of the laser.

19. The device according to claim 2, further comprising at least one programmable control unit with a memory function, which is configured to control each magnet adjustment or positioning device independently of one another in each case, and/or to control a power supply for each electromagnet independently of one another in each case.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0043] FIG. 1 is a schematic depiction of an exemplary embodiment of the device with a laser and a single permanent magnet.

[0044] FIG. 2 is a schematic depiction of an exemplary embodiment of the device with a positionable laser and an arrangement of several electromagnets controlled by way of their power supply.

[0045] FIG. 3 is a schematic depiction of an exemplary embodiment of the device with a stationary laser, a positionable mirror and an arrangement of several partly positionable electromagnets, which are controlled by way of their power supply.

[0046] FIG. 4 is a schematic depiction of the control system as a block circuit diagram.

DETAILED DESCRIPTION OF THE EMBODIMENTS

[0047] The device shown in FIG. 1 shows schematically (in cross section) a fork-shaped holding fixture 4, which takes up a wafer foil 2 located in a clamping ring by fixing the clamping ring only at two opposing contact points by one retaining clamp in each case. Neither the front side of the wafer foil 2, on which the components 1 are mounted, nor the opposing rear side are concealed by the fork-shaped holding fixture 4.

[0048] In the variant shown in FIG. 1, the at least partly ferromagnetic electronic components 1 are dies with so-called Ni/Au connection faces.

[0049] The components 1, described below as dies, are located on the front side of the wafer foil 2 and are attached there by a thermally deactivatable adhesive film 11 (thermal release tape).

[0050] In other embodiments all other types of carriers of electronic components that are used in the manufacturing processes of semiconductor technology can be used instead of the wafer foil 2 described here. The electronic components can be attached by an adhesive, in particular by a thermally deactivatable adhesive to the respective carriers, but this is not necessary in every embodiment. The vaporization of a boundary layer between the electronic component and a wafer foil is also provided in one embodiment.

[0051] In one embodiment the adhesive film can also reduce its adhesive force to the die by UV radiation, wherein the heat input associated with this completely removes the adhesion.

[0052] Other embodiments can also contain holding fixtures or holders that fix a wafer foil or a carrier completely or at least in parts along its outer edge by different attachment techniques. Embodiments are also possible that contact a wafer foil or a carrier additionally or exclusively at contact points which are not positioned on its outer edge. A partial masking of at least one of the sides of the wafer foil or carrier by a holding fixture or holder can occur in other embodiments.

[0053] In the embodiment shown here in FIG. 1, the fork-shaped holding fixture 4 is moved freely in space by an actuator 12, at least in one working area, wherein the actuator 12 includes here a three-dimensionally swivellable electric linear drive, which is controlled by an electronic control unit (ECU) 18. The actuator 12 also includes an electric motor likewise controlled by the ECU 18, which motor causes a rotation of the wafer foil 2 at least up to a certain angle by rotating the retaining clamps, which are used to fix the clamping ring of the wafer foil 2. The wafer foil 2 can be tilted by this. Finally, the actuator 12 described here includes an electromechanical component, likewise controlled by the ECU 18, which brings about the opening or closing of the retaining clamps.

[0054] In other embodiments a plurality of other actuators can be used and can either replace or supplement the electric linear drive and the electric motor or the electromechanical element, in particular by hydraulic or pneumatic actuators or other electromechanical elements. Freedom of movement in all three spatial dimensions and the possibility of rotating the wafer foil are not implemented in all embodiments here.

[0055] FIG. 1 also shows a substrate 3, to which the dies 1 are transferred. Located on the substrate 3 at several places 6 provided for this are metallisations and adhesive, onto which a die 1 is transferred in each case.

[0056] In one embodiment the place 6 provided on the substrate 3 can be an antenna connection pair of an antenna or a conductive adhesive deposit.

[0057] In other embodiments the die is first transferred to an intermediate carrier. In one embodiment the substrate is an intermediate carrier with structuring and without adhesive. Embodiments are also possible in which several dies are transferred side by side from the wafer foil to a place provided on the substrate.

[0058] FIG. 1 also showsanalogous to the fork-shaped holding fixture 4 of the wafer foil 2a fork-shaped holding fixture 5, which holds the substrate 3 by fixing it only at two opposing contact points by one retaining clamp in each case. Neither the front side of the substrate 3, on which the places 6 provided for take-up are located, nor the opposing rear side are concealed by the fork-shaped holding fixture 5.

[0059] Other embodiments can include holding fixtures or holders that fix the substrate completely or at least in parts along its outer edge by different attachment techniques. Embodiments are also possible that contact the substrate additionally or exclusively at contact points which are not positioned on its outer edge. A partial masking of at least one of the sides of the substrate by a holding fixture or holder can occur in other embodiments.

[0060] In one variant the substrate is configured and arranged to be moved incrementally or continuously from a first roll to a second roll and to be guided in this process over the support. In this case the second holding fixture can be a roll pair in particular, wherein one roll of the roll pair can be driven by a servomotor.

[0061] In the embodiment shown here in FIG. 1, the fork-shaped holding fixture 5analogous to the fork-shaped holding fixture 4 of the wafer foil 2is moved freely in space by an actuator 13, at least in one working area, wherein the actuator 13 includes here a three-dimensionally swivellable electric linear drive, which is controlled by the ECU 18. Moreover the actuator 13 includes an electric motor, likewise controlled via the ECU 18. This causes a rotation of the substrate 3 at least up to a certain angle by rotating the retaining clamps, which are used to fix the substrate 3. The substrate can thus be tilted. Finally, the actuator 13 described here includes an electromechanical component, likewise controlled by the ECU 18, which brings about the opening or closing of the retaining clamps.

[0062] In other embodiments a plurality of other actuators can be used and can either replace or supplement the electric linear drive and the electric motor or the electromechanical element, in particular by hydraulic or pneumatic actuators or electromechanical actuators. Freedom of movement in all three spatial dimensions and the possibility of rotating the substrate are not always implemented here.

[0063] In the further description of FIG. 1 it is assumed as given that at least during the transfer of the dies 1, the front side of a wafer foil 2 faces the side of the substrate 3 on which the prepared places 6 are located, regardless of whether the described holding fixtures 4 and 5 permit other possible arrangements.

[0064] FIG. 1 also shows a laser 7, which can be controlled in its intensity by the ECU 18, for detaching individual dies 1 from the adhesive film 11. To do this the laser 7 irradiates the point lying opposite the component 1 on the rear side of the wafer foil 2 and thus generates a selectively raised temperature. It thereby deactivates the adhesive properties of the adhesive film 11, which is located between the die 1 and the wafer foil 2.

[0065] The properties of the laser 7 permit the detachment of a single die 1 without influencing the adhesive properties of the adhesive film 11 in the area of the second die in such a way that this would likewise be detached.

[0066] The laser 7 is mounted fixedly. In the variant shown in FIG. 1, which serves purely for understanding, the laser 7 is movable by a positioning actuator 10, wherein the positioning actuator 10 here includes an electric linear drive, which is swivellable in all three spatial dimensions and controlled by the ECU 18. Hereby the laser 7 can be positioned by the positioning actuator 10 in any way, at least in one working area. An electric motor additionally integrated into the positioning actuator 10 and likewise controlled by the ECU 18 permits the rotation of the laser 7, at least up to a certain angle, along an axis orthogonal to the laser beam emitted. The incident angle of the laser beam onto the rear side of the wafer foil 2 can be influenced by this. Since the wafer foil 2 can likewise be rotated as described, this functionality is necessary to avoid a laser beam, which impacts the wafer foil at too flat an angle, unintentionally also detaching adjacent dies due to heating.

[0067] In other embodiments a plurality of other actuators can be used and can either replace or supplement the electric linear drive and the electric motor, in particular by hydraulic or pneumatic actuators as well as electromechanical actuators. Freedom of movement in all three spatial dimensions and the possibility of rotating the detachment unit are not always implemented here.

[0068] FIG. 1 shows furthermore a stationary permanent magnet 8 positioned directly underneath the provided place 6, which magnet produces a magnetic field 9, which exerts a magnetic force on the die 1. This force attracts the die 1 detached by the laser 7 from the adhesive film 11, so that positioning on the place 6 provided for this on the substrate 3 is at least supported. The magnetic force that acts on the die 1 is always directed in this case from the wafer foil 2 towards the substrate.

[0069] FIG. 1 further shows the two camera sensors 14 and 16. The camera sensor 14 determines the position of the marking aid 15 and forwards this information to the ECU 18. Since the geometric position of the marking aid 15 on the wafer foil 2 is known to the ECU 18 as well as the state of rotation of the wafer foil 2, the ECU 18 thus also has the position information of each die 1 on the wafer foil 2.

[0070] In another embodiment the camera sensor 14 determines the position of a die 1 on the wafer foil 2 directly and without a marking aid.

[0071] In the exemplary embodiment shown, only those dies 1 that were found to be suitable in a preceding quality inspection (which is not part of the device described here) are transferred from the wafer foil 2 to the substrate 3. A list of these positively examined dies and their geometrical position on the wafer foil 2 is stored in the memory of the ECU 18.

[0072] The camera sensor 16 determines the position of the marking aid 17 and the position of the places 6 provided for the transfer on the substrate 3 and forwards this information to the ECU 18. Since the geometric position of the marking aid 16 on the substrate 3 is known to the ECU 18 as well as the state of rotation of the substrate 3, the ECU 18 thus also has the position information of each individual place 6 provided on the substrate 3. Since the provided places 6 can also be detected directly by the camera sensor 16 in the present exemplary embodiment, a quality inspection takes place following the conclusion of the transfer process in regard to correct positioning of the die 1 on the place 6 provided on the substrate 3 by the camera sensor 16.

[0073] In another embodiment the quality inspection takes place exclusively through another camera sensor provided exclusively for this.

[0074] FIG. 2 shows an assemblage like FIG. 1 with the modification that an arrangement of three electromagnets 8* is shown instead of the permanent magnet 8.

[0075] In other embodiments any other number of electro- and/or permanent magnets, in particular even a single magnet, can be used.

[0076] The electromagnets 8* together produce a magnetic field 9*, which exerts a magnetic force on the die 1. This force attracts the die 1 detached by the laser 7 from the adhesive film 11 in such a way that positioning on the place 6 provided for this on the substrate 3 is at least supported.

[0077] Each of the electromagnets 8* shown in FIG. 2 is connected to a power supply 22 that is separately adjustable by the ECU 18.

[0078] FIG. 3 shows an assemblage like FIG. 2 with two variants (modification A and modification B).

[0079] Modification A:

The laser 7** is a stationary laser in FIG. 3. The mirror 20 shown in FIG. 3 reflects the laser beam directed onto it onto a point determined by the ECU 18 on the rear side of the wafer foil 2. The mirror 20 is moved freely in space by a mirror positioning actuator 21, at least in one working area, wherein the mirror positioning actuator 21 here includes a three-dimensionally swivellable electric linear drive, which is controlled by the ECU 18. The mirror positioning actuator 21 further includes an electric motor likewise controlled by the ECU 18, which motor facilitates a rotation of the mirror, at least up to a certain angle.

[0080] Modification B:

In FIG. 3 the magnetic arrangement 8** replaces the magnetic arrangement 8* from FIG. 2. The magnetic arrangement 8** has all the features of the magnetic arrangement 8*, but in addition parts of the magnetic arrangement in FIG. 3 can be positioned by the magnet adjustment or positioning devices 19.

[0081] Two magnets of the magnetic arrangement 8** shown are each moved freely in space by a magnet positioning actuator 19, at least in one working area, wherein each magnet positioning actuator 19 here includes a three-dimensionally swivellable electric linear drive, which is controlled by the ECU 18. Furthermore, each magnet positioning actuator 19 includes an electric motor likewise controlled via the ECU 18, which motor facilitates a rotation of the respective magnet, at least up to a certain angle.

[0082] FIG. 4 shows a logic circuit diagram, which depicts schematically the information input and the control access of the ECU 18. All the reference signs refer to the preceding FIGS. 1 to 3 and their descriptions.

[0083] The variants of the device described here and their functional and operational aspects serve only for a better understanding of their structure, mode of operation and properties; they do not restrict the disclosure to the embodiments. The figures are partly schematic, wherein substantial properties and effects are depicted significantly enlarged in part, in order to clarify the functions, active principles, technical configurations and features. Each mode of operation, each principle, each technical configuration and each feature that is/are disclosed in the figures or in the text can be freely combined in any way with all claims, each feature in the text and in the other figures, other modes of operation, principles, technical configurations and features that are contained in this disclosure or result from it, so that all conceivable combinations are to be associated with the devices described. Combinations between all individual implementations in the text, meaning in each section of the description, in the claims and even combinations between different variants in the text, in the claims and in the figures are also comprised in this case and can be made the subject matter of other claims. Nor do the claims limit the disclosure and thus the combination possibilities of all features shown with one another. All disclosed features are explicitly disclosed here also individually and in combination with all other features.