Optically Activated Transistor, Switch, and Photodiode

Abstract

An optically activated device that includes an active material on a substrate with two electrodes electrically connected to the active material, the active material conducts current in the presence of light and does not conduct appreciable current in the absence of light. The optically activated device functions as a photodiode, a switch, and an optically gated transistor. The optically activated device conducts current in the presences of light. The active material may be layers of germanium selenide and germanium selenide and an element. Germanium selenide may be sputtered onto a substrate to create layers of material separated by layers of co-sputtered germanium selenide with the element. The active material may be deposited onto a flexible substrate.

Claims

1. An optically activated device comprising: an active material on a substrate; a first electrode electrically connected to the active material; and a second electrode electrically connected to the active material, wherein the active material conducts current bidirectionally in the presence of light and wherein the active material does not conduct appreciable current in the absence of light.

2. The optically activated device of claim 1, wherein an amount of current conducted by the active material is dependent on an intensity of the light.

3. The optically activated device of claim 2, wherein the optically activate device comprises no more than two electrodes in contact with the active material.

4. The optically activated device of claim 3, wherein the two electrodes are spaced between 1 micrometer and 10 millimeters apart on a surface of the active material.

5. The optically activated device of claim 1, wherein the optically active device exhibits a current-voltage curve with operating regions that include at least a linear region and a saturation region.

6. The optically activated device of claim 1, wherein the active material comprises: a layer comprising germanium selenide (GeSe).

7. The optically activated device of claim 1, wherein the active material comprises: a first layer comprising germanium selenide (GeSe); and a second layer comprising germanium GeSe and an element.

8. The optically activated device of claim 1, wherein the active material comprises: a first layer comprising germanium selenide (GeSe); a second layer comprising GeSe and an element; a third layer comprising GeSe, wherein the second layer is positioned between the first layer and the third layer; a fourth layer comprising GeSe and the element, wherein the third layer is positioned between the second layer and the fourth layer; and a fifth layer comprising GeSe, wherein the fourth layer is positioned between the third layer and the fifth layer.

9. The optically activated device of claim 8, the first layer having a thickness of approximately 100 angstroms, the second layer having a thickness of approximately 10 angstroms to 30 angstroms, the third layer having a thickness of approximately 100 angstroms, the fourth layer having a thickness of approximately 10 angstroms to 30 angstroms, and the fifth layer having a thickness of approximately 100 angstroms.

10. The optically activated device of claim 8, wherein the GeSe further comprises Ge.sub.2Se.sub.3.

11. The optically activated device of claim 8, wherein the element comprises tin (Sn), aluminum (Al), carbon (C), Chromium (Cr), Tungsten (W), Titanium (Ti), or copper (Cu).

12. The optically activated device of claim 1, wherein the active material is flexible.

13. The optically activated device of claim 1, wherein the substrate includes a p-type silicon substrate.

14. A method of providing an optically activated device comprising: forming a first layer by depositing germanium selenide (GeSe) onto a substrate; forming a second layer by depositing GeSe and an element onto the first layer; forming a third layer by depositing GeSe onto the second layer; forming a fourth layer by depositing GeSe and the element onto the fourth layer; and forming a fifth layer by depositing GeSe onto the fourth layer.

15. The method of claim 14, electrically connecting only two terminals to the fifth layer of the optically activated device.

16. The method of claim 14, wherein forming the first layer further comprises sputtering the GeSe, the first layer having a thickness of approximately 100 angstroms.

17. The method of claim 14, wherein forming the second layer further comprises co-sputtering the GeSe and the element, the second layer having a thickness of approximately 10 to 30 angstroms.

18. The method of claim 14, wherein forming the third layer further comprises sputtering the GeSe, the third layer having a thickness of approximately 100 angstroms.

19. The method of claim 14, wherein forming the fourth layer further comprises co-sputtering GeSe and the element, the fourth layer having a thickness of approximately 10 to 30 angstroms.

20. The method of claim 14, wherein forming the fifth layer further comprises sputtering the GeSe, the fifth layer having a thickness of approximately 100 angstroms.

21. An optically activated device comprising: a p-type silicon substrate comprising a native oxide layer; a first layer comprising germanium selenide (GeSe) deposited on the p-type silicon substrate; a second layer comprising GeSe and an element deposited on the first layer; a third layer comprising GeSe deposited on the second layer; a fourth layer comprising GeSe and the element deposited on the third layer; a fifth layer comprising GeSe deposited on the fourth layer; a first electrode in contact with the fifth layer; and a second electrode in contact with the fifth layer, wherein the combination of the substrate, the first layer, the second layer, the third layer, the fourth layer, and the fifth layer conducts current between the first electrode and the second electrode in the presence of light and does not conduct appreciable current in the absence of light, and wherein no more than two electrodes are in contact with the fifth layer.

22. The optically activated device of claim 21, wherein the optically active device exhibits a current-voltage curve with operating regions that include at least a linear region and a saturation region.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0011] FIG. 1 depicts a block diagram of an embodiment of a device having an active material that conducts current in the presence of light.

[0012] FIG. 2 is a graph depicting the effect of electrode spacing on an active material usable with an embodiment of the disclosed device.

[0013] FIG. 3 is a graph depicting test data associated with Ge.sub.2Se.sub.3 in the presence of light.

[0014] FIG. 4 is a graph depicting test data associated with Ge.sub.2Se.sub.3 and tin (Sn) in the presence of light.

[0015] FIG. 5 is a graph depicting test data associated with Ge.sub.2Se.sub.3 and aluminum (Al) in the presence of light.

[0016] FIG. 6 is a graph depicting test data associate with Ge.sub.2Se.sub.3 and carbon (C) in the presence of light.

[0017] FIG. 7 is a graph depicting IV curves exhibited by an embodiment of the disclosed device including Ge.sub.2Se.sub.3 only.

[0018] FIG. 8 is a graph depicting IV curves exhibited by an embodiment of the disclosed device including Ge.sub.2Se.sub.3 and Sn.

[0019] FIG. 9 is a graph depicting IV curves exhibited by an embodiment of the disclosed device including Ge.sub.2Se.sub.3 and Al.

[0020] FIG. 10 is a graph depicting IV curves exhibited by an embodiment of the disclosed device including Ge.sub.2Se.sub.3 and C.

[0021] FIG. 11 is a flow chart depicting one embodiment of a method of producing a device that conducts current in the presence of light.

[0022] While the disclosure is susceptible to various modifications and alternative forms, specific embodiments have been shown by way of example in the drawings and will be described in detail herein. However, it should be understood that the disclosure is not intended to be limited to the particular forms disclosed. Rather, the intention is to cover all modifications, equivalents and alternatives falling within the scope of the disclosure as defined by the appended claims.

DETAILED DESCRIPTION

[0023] FIG. 1 shows a block diagram of an optically activated device 100. The device 100 may include active material 104 deposited onto a substrate 102. The substrate may include doped silicon. In particular, the substrate may include a p-type silicon substrate. While an n-type substrate may also be contemplated, a p-type silicon substrate was shown to exhibit transistor properties as described herein.

[0024] The p-type silicon substrate may further include a native oxide layer (not shown). While other coatings of the p-type silicon substrate are also contemplated, the native oxide layer was shown to exhibit desirable transistor properties. In some embodiments, the substrate may be flexible. Other substrates are also contemplated as would be appreciated by one of ordinary skill in the art having the benefit of this disclosure.

[0025] The active material 104 may include various layers 106, 108, 110, 112, 114. The first layer 106 may include GeSe alone without the addition of other elements. The first layer 106 may have a thickness of approximately 100 angstroms, which may be formed by sputtering GeSe. The second layer 108 may include GeSe and an element. Examples of elements that may be used include Sn, Al, and C. In some embodiments, both carbon and a metal may be used, with the carbon narrowing the current response of the device. The second layer 108 may have a thickness of approximately 10 angstroms to 30 angstroms, which may be formed by co-sputtering the element with GeSe onto the first layer 106. The third layer 110 may include GeSe alone. The third layer 110 may have a thickness of approximately 100 angstroms, which may be formed by sputtering GeSe. The fourth layer 112 may include GeSe and an element. The fourth layer 112 may have a thickness of approximately 10 angstroms to 30 angstroms, which may be formed by co-sputtering GeSe and the element onto the third layer 110. The fifth layer 114 may include GeSe alone. The fifth layer 114 may have a thickness of approximately 100 angstroms, which may be formed by sputtering GeSe.

[0026] The active material 104 may include various layers comprised of GeSe and various layers comprised of GeSe and an element. The layers 106, 108, 110, 112, 114 are shown for illustrative purposes only as would be appreciated by one of ordinary skill in the art having the benefit of this disclosure. The thicknesses of the layers 106, 108, 110, 112, 114 of the active material 104 are shown for illustrative purposes only may be varied depending on the application as would be appreciated by one of ordinary skill having the benefit of this disclosure.

[0027] The optically activated device 100 may include two terminals, or electrodes, 116, 118 connected to the active material 104. Advantageously, the optically activated device 100 only requires two terminals 116, 118 to function as a transistor as opposed to the three terminals required of traditional FET devices. The terminals 116, 118 may be separated by a distance D 120. A larger distance D 120 may produce a greater response, in terms of electrical conductivity, when in the presence of light. The distance D 120 may range from 10 micrometers to 100 micrometers. This spacing is not to be considered as limiting. For example, some of the tests described herein used ranges on the order of 7 millimeters. In some embodiments, the distance D 120 may be between one micrometer and 10 millimeters, or even lower than one micrometer.

[0028] During operation, the optically activated device 100 may be activated by the application of light to the active material 104. The optical activation of the device 100 permits the device to be used to electrically isolate a portion, or portions, of a circuit (not shown) coupled to the electrodes 116, 118. The application of light may switch on the device 100 to electrically connect an isolated portion of the circuit to the rest of the circuit as would be appreciated by one of ordinary skill in the art having the benefit of this disclosure.

[0029] FIG. 2 is a graph showing the effect a distance between probes on an optically activated material. In order to generate the graph depicted in FIG. 2, a layer of Ge.sub.2Se.sub.3 and Sn was prepared on a p-type substrate. Probe tips were attached at 10 micrometers while an incandescent light was used to apply two different levels of light, labeled Light 1 and Light 2, with Light 1 being more intense than Light 2. Another measurement was taken with the light turned away, labeled Dark. In each light state, a 0V to 15V voltage sweep was conducted. The process was also performed with the probes being 100 micrometers apart. As shown in FIG. 2, in each case more intense light produces more current and a steeper IV curve. Further, positioning the probes further apart creates a more pronounced light effect, meaning the device 100 has a steeper IV curve with a lower current response at voltages between approximately 0V and 4V and a higher current response at voltages above 4V.

[0030] While the test depicted in FIG. 2 was performed using probes, as opposed to electrodes fabricated on the material, the data shows that the optically activated material may behave as an optically gated transistor. Further, a wider separation between the probes results in a more pronounced transistor effect up to a certain limit. The optically activated material may behave as a photodiode or photovoltaic device as it conducts current upon the application of light. However, the optically activated material disclosed herein conducts current bidirectionally, which differs from the behavior of photodiodes and photovoltaic devices. As used herein, bidirectionally is not intended to mean that current is conducted in a symmetrical pattern. Rather, bidirectionally means that current may flow in either direction between terminals depending on a voltage applied to each terminal. The optically activated material disclosed herein may be used as an optically activated switch. The optically activated material also differs as an optically gated transistor based on the intensity of light applied to the device.

[0031] FIGS. 3, 4, 5, and 6 are graphs depicting light responses associated with various types of active material usable with device 100. In each case, blanket material deposited on a substrate was tested with probes spaced approximately 10 micrometers apart. An incandescent light was used to apply two different levels of light, labeled Light 1 and Light 2, with Light 1 being more intense than Light 2. Another measurement was taken with the light turned away, labeled Dark. In each light state, a 0V to 15V voltage sweep was conducted.

[0032] FIG. 3 depicts a light response associated with Ge.sub.2Se.sub.3 alone in the presence of light. As shown in FIG. 3, the Ge.sub.2Se.sub.3 alone begins to exhibit a current in the presence of light at about 3V with the current level rising to about 75 nanoamperes for the Light 1 intensity level and to about 45 nanoamperes for the Light 2 intensity level. FIG. 4 depicts a light response associated with Ge.sub.2Se.sub.3 and Sn in the presence of light. As shown in FIG. 4, the Ge.sub.2Se.sub.3 with the Sn begins to exhibit a current in the presence of light at less than 2V with the current level rising to about 200 nanoamperes for the Light 1 intensity level and to about 130 nanoamperes for the Light 2 intensity level. FIG. 5 depicts a light response associated with Ge.sub.2Se.sub.3 and Al in the presence of light. As shown in FIG. 5, the Ge.sub.2Se.sub.3 with the Al begins to exhibit a current in the presence of light at less than 1V with the current level rising to about 70 nanoamperes for the Light 1 intensity level and to about 40 nanoamperes for the Light 2 intensity level. FIG. 6 depicts a light response associated with Ge.sub.2Se.sub.3 and C in the presence of light. As shown in FIG. 6, the Ge.sub.2Se.sub.3 with the C begins to exhibit a current in the presence of light at about 3V with the current level rising to about 60 nanoamperes for the Light 1 intensity level and to about 30 nanoamperes for the Light 2 intensity level.

[0033] In each of FIGS. 3-6, the IV curves somewhat conform to transistor IV curves having multiple regions, or operating modes. The regions are more pronounced in devices having structures that conform more substantially to the active optical device 100, as described with reference to FIGS. 7-10. Further, as seen in FIGS. 3-6, materials with Ge.sub.2Se.sub.3 and Sn or Al produce the highest light response as compared to materials with Ge.sub.2Se.sub.3 alone. Sn and Al also appear to be more effective than other metals, such as chromium (Cr), tungsten (W), titanium (Ti), and copper (Cu). However, Cr, W, Ti, and Cu may also be used as an element in the disclosed device. As shown in FIG. 6, the light response may be reduced in materials with Ge.sub.2Se.sub.3 and C compared to the Ge.sub.2Se.sub.3 control of FIG. 3.

[0034] FIGS. 7, 8, 9, and 10 are graphs depicting IV curves for the device 100 using different materials as the element. In each of FIGS. 7-10, the device 100 was formed using different elements in the active material 104. Multiple levels of incandescent light (i.e., Light 1, Light 2, Light 3) were applied to each device. A voltage sweep between 0V to 15V was performed at each of the levels of light for each device. Further, a voltage sweep was performed in the absence of light.

[0035] FIG. 7 depicts IV curves associated with Ge.sub.2Se.sub.3 alone at multiple levels of light intensity. As shown in FIG. 7, a linear region 902 and a saturation region 904 are exhibited. The linear region 902 occurs approximately between 0V and 2V. The saturation current for the maximum intensity of light, Light 1, is between 8 and 10 microamps, and decreases as the intensity of light decreases. FIG. 8 depicts IV curves associated with Ge.sub.2Se.sub.3 and Sn at multiple levels of light intensity. As shown in FIG. 8, the linear region 902 occurs approximately between 0V and 2V. The saturation current for the maximum intensity of light, Light 1, is between 30 and 40 microamps, and decreases as the intensity of light decreases. FIG. 9 depicts IV curves associated with Ge.sub.2Se.sub.3 and Al at multiple levels of light intensity. As shown in FIG. 9, the linear region 902 occurs approximately between 0V and 2V. The saturation current for the maximum intensity of light, Light 1, is between 15 and 18 microamps, and decreases as the intensity of light decreases. FIG. 10 depicts IV curves associated with Ge.sub.2Se.sub.3 and C at multiple levels of light intensity. As shown in FIG. 10, the linear region 902 occurs approximately between 0V and 2V. The saturation current for the maximum intensity of light, Light 1, is between 23 and 25 microamps, and decreases as the intensity of light decreases.

[0036] As can be seen in each of FIGS. 8-10, the optically activated device 100 may operate as a transistor. For example, the optically activated device 100 may exhibit an IV curve that includes at least a linear region 902 and a saturation region 904. At low levels of light, the current may further be cutoff. As such, the device 100 may include a cut-off mode, an active mode, and a saturation mode similar to voltage gated transistors. Further, the IV curves all have a sharp transition, which is desirable for use as a transistor.

[0037] FIG. 11 is a flow chart for an embodiment of a method 1300 of providing an optically activated device. The method 1300 may include turning on a Ge.sub.2Se.sub.3 target to sputter Ge.sub.2Se.sub.3 and turning on an element target to sputter an element, at 1302. However, the shutters for both the Ge.sub.2Se.sub.3 and the element are closed during step 1302 so the material is not sputtered onto a substrate.

[0038] A shutter for the Ge.sub.2Se.sub.3 may be opened, at 1304, to permit the Ge.sub.2Se.sub.3 to be sputtered alone on the substrate to form a layer with a thickness of about 100 angstroms. This may form the first layer 106 on the substrate 102.

[0039] At 1306, the shutter for the element may be opened permitting the Ge.sub.2Se.sub.3 to be co-sputtered with the element onto the substrate to form a layer with a thickness of about 10 to 30 angstroms. This may result in the formation of the second layer 108.

[0040] The shutter for the element may again be closed so that Ge.sub.2Se.sub.3 may be sputtered alone onto the substrate, at 1308, to form a layer with a thickness of about 100 angstroms. This may result in the formation of the third layer 110.

[0041] At 1310, the shutter for the element may be opened permitting the Ge.sub.2Se.sub.3 to be co-sputtered with the element onto the substrate to form a layer with a thickness of about 10 to 20 angstroms. This may result in the formation of the fourth layer 112.

[0042] The shutter for the element may again be closed so that Ge.sub.2Se.sub.3 may be sputtered alone onto the substrate, at 1312, to form a layer with a thickness of about 100 angstroms. This may result in the formation of the fifth layer 114.

[0043] After the method 1300 is performed, both of the shutters may be closed and/or the sputtering targets are turned off. The method 1300 provides an active material on a substrate that is an optically activated device as discussed herein. The thickness of the sputtered material are for illustrative purposes and may be varied depending on the application as would be appreciated by one of ordinary skill in the art having the benefit of this disclosure. Further, the method 1300 may include additional steps sputtering Ge.sub.2Se.sub.3 and co-sputtering Ge.sub.2Se.sub.3 and the element onto the substrate depending on the application. The power of the element target is selected so that when co-sputtering Ge.sub.2Se.sub.3 and the element onto the substrate the Ge.sub.2Se.sub.3 is doped with the element.

[0044] Although this disclosure has been described in terms of certain preferred embodiments, other embodiments that are apparent to those of ordinary skill in the art, including embodiments that do not provide all of the features and advantages set forth herein, are also within the scope of this disclosure. Accordingly, the scope of the present disclosure is defined only by reference to the appended claims and equivalents thereof.