Immersion objective
11703674 · 2023-07-18
Assignee
Inventors
Cpc classification
G02B21/0072
PHYSICS
G02B21/33
PHYSICS
International classification
Abstract
An immersion objective includes a correction group or correcting a spherical aberration. The displacement of the correction group along the optical axis leads to a substantially negligible defocus aberration.
Claims
1. An objective, comprising: a plurality of lenses arranged along an optical axis of the objective, wherein: the objective is an immersion objective; the objective comprises a correction group which comprises at least one of the plurality of lenses; the correction group is displaceable along the optical axis; the objective has a working distance that is dependent on at least one member selected from the group consisting of an immersion medium and a cover glass that may be used; aberrations of a wavefront coming from an axis point are describable by Zernike polynomials with Zernike coefficients; the Zernike coefficient Z4 has a sensitivity Z4.sub.sens with respect to a displacement of the correction group along the optical axis; the Zernike coefficient Z9 has a sensitivity Z9.sub.sens with respect to the displacement of the correction group along the optical axis; and
|Z4.sub.sens:Z9.sub.sens|<1.
2. The objective of claim 1, wherein: the Zernike coefficient Z16 has a sensitivity Z16.sub.sens with respect to the displacement of the correction group along the optical axis; and
|Z4.sub.sens:Z16.sub.sens|<1.
3. The objective of claim 1, wherein: the Zernike coefficient Z25 has a sensitivity Z25.sub.sens with respect to the displacement of the correction group along the optical axis; and
|Z4.sub.sens:Z25.sub.sens|<4.
4. The objective of claim 1, wherein |Z4.sub.sens|<1 nm/μm.
5. The objective of claim 1, wherein: the plurality of lenses comprises a lens that is adjacent an object side of the correction group and a lens adjacent to an image side of the correction group; a distance of the correction group from the lens adjacent on the object side is changeable; and a distance of the correction group from the lens that is adjacent on the image side is changeable.
6. The objective of claim 5, wherein, when the correction group is displaced along the optical axis, a change in the distance of the correction group from the lens that is adjacent on the object side is proportional to a change in the distance of the correction group from the lens that is adjacent on the image side.
7. The objective of claim 6, wherein, when the correction group is displaced along the optical axis, only lenses of the correction group are displaced and all other lenses of the immersion objective remain fixed relative to one another.
8. The objective of claim 5, wherein, when the correction group is displaced along the optical axis, only lenses of the correction group are displaced and all other lenses of the immersion objective remain fixed relative to one another.
9. The objective of claim 1, wherein, when the correction group is displaced along the optical axis, only lenses of the correction group are displaced and all other lenses of the immersion objective remain fixed relative to one another.
10. The objective of claim 1, wherein: the Zernike coefficient Z16 has a sensitivity Z16.sub.sens with respect to the displacement of the correction group along the optical axis;
|Z4.sub.sens:Z16.sub.sens|<1; the Zernike coefficient Z25 has a sensitivity Z25.sub.sens with respect to the displacement of the correction group along the optical axis; and
|Z4.sub.sens:Z25.sub.sens|<4.
11. The objective of claim 10, wherein |Z4sens|<1 nm/μm.
12. The objective of claim 11, wherein, when the correction group is displaced along the optical axis, only lenses of the correction group are displaced and all other lenses of the immersion objective remain fixed relative to one another.
13. The objective of claim 10, wherein, when the correction group is displaced along the optical axis, only lenses of the correction group are displaced and all other lenses of the immersion objective remain fixed relative to one another.
14. The objective of claim 1, wherein: the Zernike coefficient Z16 has a sensitivity Z16.sub.sens with respect to the displacement of the correction group;
|Z4.sub.sens:Z9.sub.sens|<1; and
|Z4.sub.sens|<1 nm/μm.
15. The objective of claim 14, wherein, when the correction group is displaced along the optical axis, only lenses of the correction group are displaced and all other lenses of the immersion objective remain fixed relative to one another.
16. The objective of claim 1, wherein: the plurality of lenses comprises a lens that is adjacent an object side of the correction group and a lens adjacent to an image side of the correction group; and a distance of the correction group from the lens adjacent on the object side is changeable.
17. The objective of claim 1, wherein the working distance of the objective is dependent on an immersion medium.
18. The objective of claim 1, further comprising a cover glass, wherein the working distance of the objective is dependent on the cover glass.
19. A microscope, comprising: an objective according to claim 1.
20. A method of setting a microscope which comprises a focus drive and an immersion objective comprising a correction group, the method comprising: positioning the correction group to pre-set the immersion objective; actuating the focus drive to reduce a defocus aberration; displacing the correction group to reduce a spherical aberration without increasing the defocus aberration by more than 10%.
21. The method of claim 20, wherein the method is performed in an automated fashion.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) Features and details of the disclosure are evident from the description of the exemplary embodiments with reference to the figures, in which:
(2)
(3)
(4)
(5)
DETAILED DESCRIPTION
(6) Different variants of an immersion objective 1 having a correction group 2 are described below.
(7) All of the designs described below have an object-side numerical aperture of 0.8, an imaging scale of −25× and an object field with a diameter of 0.720 mm. This should not be understood to be limiting. All the stated parameters can also have different values.
(8) All of the immersion objectives 1 described below have been corrected in a spectrally broadband manner. They have been corrected, for example, in the wavelength range from 480 nm to 850 nm.
(9) The immersion objectives 1 described below should be used in principle with an immersion medium. Typical immersion media and the refractive indices thereof for wavelengths of 480 nm, 546 nm and 850 nm are given in table 1.
(10) TABLE-US-00001 TABLE 1 Refractive indices of different immersion media for different wavelengths n.sub.480 n.sub.546 n.sub.850 Water 1.337167 1.334193 1.326855 Silicone oil 1.410422 1.406366 1.39831 Glycerol 1.459507 1.455671 1.447288 Immersion oil 1.523668 1.517984 1.507114
(11) A first variant of an immersion objective 1 will be described below with reference to
(12) After a change of the immersion medium in the case of the immersion objective 1 according to
(13) The working distance (AA) of the immersion objective 1 is given in table 2 for different immersion media and for the use with or without a cover glass (CG). Table 2 additionally indicates the distances between the lenses L2 and L3 (d4) and the lenses L3 and L4 (d6), and the distance (d18) between the last lens L10 of the immersion objective 1 and the contact surface in the collimated infinity space between the immersion objective 1 and the tube lens for prescribed positions of the correction group 2 for eight different configurations. The combination of the immersion media with/without a cover glass is denoted below in accordance with the numbering of the configuration used here.
(14) TABLE-US-00002 TABLE 2 Prescribed positions of the correction group for different configurations Immersion Cover glass AA d4 d6 d18 Configuration medium (CG) [mm] [mm] [mm] [mm] 1 Water Yes 0.600000 0.099632 3.605443 0.868677 2 Water No 0.744802 0.083474 3.756895 0.758683 3 Glycerol No 0.827475 0.141959 3.208700 1.165055 4 Glycerol Yes 0.666646 0.147192 3.159649 1.199808 5 Silicone No 0.794274 0.121357 3.401806 1.025885 6 Silicone Yes 0.666646 0.130461 3.316469 1.086565 7 Immersion oil No 0.869853 0.168789 2.957204 1.34707 8 Immersion oil Yes 0.700800 0.168768 2.957408 1.346128
(15) The immersion objective 1 has ten lenses L1 to L10. The optical design data of the lenses are summarized in table 3.
(16) TABLE-US-00003 TABLE 3 Optical design data of the objective according to FIG. 1 Half Surface Radius Thickness diameter (Fl) [mm] [mm] Material n.sub.546 n.sub.365 n.sub.850 [mm] CG 0 ∞ 0.170000 N-K5 1.524583 1.544127 1.515107 0.80 AA 1 ∞ 0.600000 Water 1.334190 1.346757 1.326855 0.80 L1 2 ∞ 1.989171 N-FK5 1.489143 1.504009 1.481404 0.80 L2 3 −1.335161 4.605033 S-LAH58 1.888145 1.939182 1.865804 1.32 4 −4.785539 0.099632 4.34 L3 5 25.715407 2.653813 N-PK51 1.530193 1.545274 1.522811 5.99 6 −20.024029 3.605443 6.16 L4 7 8.989651 3.195437 S-TIL1 1.550984 1.579591 1.538490 7.13 8 11.830204 2.281269 6.58 L5 9 135.977057 1.113925 N-KZFS11 1.641325 1.676362 1.625462 6.50 L6 10 6.985893 5.114958 S-FPL53 1.439854 1.449862 1.434820 5.96 11 −20.404137 0.099516 6.04 L7 12 19.940955 5.509717 N-PK51 1.530193 1.545274 1.522811 5.99 L8 13 −6.840815 0.998484 N-KZFS11 1.641325 1.676362 1.625462 5.85 14 −97.373462 0.099790 5.93 L9 15 15.076736 7.758107 S-LAH64 1.791960 1.830167 1.774401 5.92 16 9.101629 5.330806 4.49 L10 17 −6.321406 2.466643 S-FTM16 1.596669 1.639749 1.579677 4.73 18 −6.825204 0.868677 5.54 19 ∞ 0.000000 5.65 TUBE 20 ∞ 126.500000 5.65 21 189.417000 10.900000 N-BALF4 1.582122 1.606583 1.570691 19.90 22 −89.417000 60.000000 19.90 23 ∞ 80.000000 BK7 1.518722 1.536270 1.509840 11.66 24 ∞ 48.200000 10.31 25 ∞ 0.000000 9.09 26 ∞ 0.000000 9.11
(17) In addition to the optical design data of the lenses L1 to L10 of the immersion objective 1, table 3 also includes the optical design data of the tube (F120 to F126).
(18) The immersion objective 1 has ten lenses L1 to L10. The figures additionally each show a cover glass CG. The immersion objective 1 can be used with or without the cover glass CG. In this case, the working distance changes.
(19) The lenses L5 and L6 and also the lenses L7 and L8 respectively form a cemented doublet element.
(20) The lens L3 forms the correction group 2. The lens L3 is displaceable along the optical axis oA. It has a variable distance from the lens L2. It has a variable distance from the lens L4. The displacement of the correction group 2, that is to say of the lens L3, is such that the changes in distance between the lenses L2 and L3 (Δd4) and the distance between the lenses L3 and L4 (Δd6) are proportional to one another. The proportionality constant α has the value −9.373: Δd6=−9.373Δd4.
(21) When displacing the correction group 2, the aberrations of the immersion objective 1 change, mainly for the image point on the optical axis oA. Primarily, spherical aberration occurs and, to a certain degree, defocus aberration, which is also simply referred to as defocus. The defocus aberration is described below by way of the aberration in the wavefront, such as by the Zernike coefficient Z4. This description is independent of the type of image formation. The spherical aberration is expressed correspondingly by Zernike coefficients. Z9 is a measure of the lowest-order (third-order) spherical aberration. Z16 and Z25 serve for characterizing higher-order spherical aberration.
(22) Table 4 contains the specifications relating to the amount by which the distance d4 and the distance d6 of the correction group 2 from the lenses L2 and L4, which are adjacent on the object side and image side respectively, are changed as compared to the configuration “Immersion medium water and use of a cover glass made of the material N-K5” with a thickness of 170 μm for setting the optimum prescribed position. The setting of the immersion objective 1, in particular the displacement position of the correction group 2 for this configuration (water and cover glass), is also referred to as the main position of the immersion objective 1.
(23) In addition, table 4 indicates the changes in the Zernike coefficients Z4, Z9, Z16 and Z25 of an axis point that are brought about in the case of an increase of the distance d4 by 1 μm and a simultaneous reduction in the distance d6 by 9.373 μm in the respective configuration.
(24) TABLE-US-00004 TABLE 4 Sensitivities of selected Zernike coefficients in the case of a displacement of the correction group such that d4 is increased by 1 μm, d6 is decreased by 9.373 μm. Z4.sub.sens = Z9.sub.sens = Z16.sub.sens = Z25.sub.sens = AA Δd4 Δd6 δZ4/δd4 δZ9/δd4 δZ16/δd4 δZ25/δd4 Configuration [mm] [mm] [mm] [nm/μm] [nm/μm] [nm/μm] [nm/μm] 1 0.600 0.000 0.000 0.058 −11.604 −1.085 −0.084 2 0.745 −0.016 0.151 0.123 −11.750 −1.101 −0.088 3 0.828 0.042 −0.397 −0.123 −11.233 −1.044 −0.075 4 0.667 0.048 −0.446 −0.146 −11.188 −1.039 −0.074 5 0.794 0.022 −0.204 −0.033 −11.411 −1.064 −0.079 6 0.640 0.031 −0.289 −0.072 −11.332 −1.055 −0.077 7 0.870 0.069 −0.648 −0.246 −11.006 −1.019 −0.070 8 0.701 0.069 −0.648 −0.246 −11.006 −1.019 −0.070
(25) Table 4 shows that in the case of a displacement of the correction group 2, practically no defocus (Z4) but significant third-order spherical aberrations (Z9) and higher-order spherical aberrations (Z16, Z25) occur. In other words: The correction group 2 makes a correction of the spherical aberration possible without this producing a significant defocus (Z4).
(26) In other words, in the case of a displacement of the correction group 2, the spherical aberration (Z9, Z16, Z25) strongly dominates the defocus term (Z4). This ensures the constancy of the focus upon actuation of the correction mechanism is maintained for all intended settings.
(27) It is furthermore apparent that the sensitivities are substantially independent of the configuration (i.e. type of the immersion and presence of a cover glass).
(28) The sensitivity of Z9 is great compared to the sensitivity of Z4. In general, the following applies: |Z9.sub.sens|>|Z4.sub.sens (e.g., |Z9.sub.sens>10|Z4.sub.sens|, |Z9.sub.sens|>20|Z4.sub.sens|, |Z9.sub.sens|>50|Z4.sub.sens, |Z9.sub.sens|>100|Z4.sub.sens, Z9.sub.sens|>200|Z4.sub.sens|). These specifications can relate to configuration 1 (water and cover glass).
(29) The defocus brought about by the change in the immersion/cover glass combination can be compensated easily by focusing, i.e. actuating the focus drive of the microscope. During focusing, either the immersion objective 1 or the microscope stage with the object that is to be imaged can be moved.
(30) Owing to the small ratio of the sensitivities of Z4 and Z9 of the displacement position of the correction group 2, the correction mechanism can then be actuated for correcting any remaining spherical aberration without this leading to an appreciable new defocus.
(31) The method for setting the microscope, such as for adapting the microscope to changes in the object space, such as for adapting the microscope to a change of the immersion medium, is described below with reference to
(32)
(33) The region between the object plane 4 and the frontmost surface (F2) of the immersion objective 1 is called the object space 5. Typically, an immersion medium with a refractive index n is arranged in the object space 5 when using the immersion objective 1. Depending on the desired properties, a cover glass (CG) having a thickness and a refractive index can also be arranged in the object space 5. A typical thickness of the cover glass is 170 μm. The cover glass can be made from N-K5, for example. At a wavelength of 480 nm, it can have a refractive index of 1.524583.
(34) A change of the immersion medium to an immersion medium with the refractive index n.sub.2 involves an adaptation of the immersion objective 1. In the case of such a change of the immersion medium, the immersion objective 1 can be pre-set to the new immersion medium by way of a displacement of the correction group 2. The immersion objective 2 for this purpose preferably has a plurality of prescribed positions. Such prescribed positions can be characterized, for example, by markers on the objective. Reference is made in this respect to DE 10 2004 051 357 B4 and DE 10 2006 052 142 B4.
(35) The perfectly adapted state is shown schematically in
(36) In the general case, the situations in the object space 5 can deviate from the prescribed values. In this case, the spherical aberration has not yet been optimally compensated, in particular has not yet been completely compensated, after setting the correction group 2 to the new prescribed position and focusing of the immersion objective 1. This situation is shown schematically in
(37) In the case of the optical design of the immersion objective 1 according to
(38) By displacing the correction group 2, in particular by finely adjusting the displacement position thereof, the spherical aberration can be reduced, preferably be at least compensated as far as possible (
(39) After prescription of a specific configuration, that is to say of the properties in the object space 5, in particular prescription of the refractive index of the immersion medium used and prescription of whether or not a cover glass is used and possibly what thickness and refractive index the cover glass has, and corresponding pre-setting of the correction group 2, the immersion objective 1 according to
(40) A variant of the immersion objective 1 will be described below with reference to
(41) Certain details of this variant correspond to those of the objective according to
(42) In the immersion objective 1 according to
(43) When the correction group 2 is displaced, the distances d8 from the lens L4 that is adjacent on the object side and d11 from the lens L7 that is adjacent on the image side are changed. The distance change in these distances is proportional. The proportionality constant α is −1.344: Δd11=−1.344Δd8.
(44) The optical data of the immersion objective 1 according to
(45) Corresponding to table 2, table 6 summarizes some of the optical data of the prescribed positions for the different configurations.
(46) TABLE-US-00005 TABLE 5 Optical design data of the objective according to FIG. 3 Immersion AA d8 d11 d18 Configuration medium CG [mm] [mm] [mm] [mm] 1 Water Yes 0.600000 2.107503 0.205535 2.246009 2 Water No 0.744919 2.197234 0.084929 2.302136 3 Glycerol No 0.827661 1.867890 0.527596 2.105492 4 Glycerol Yes 0.666689 1.838487 0.567116 2.086285 5 Silicone No 0.794431 1.988076 0.366055 2.180234 6 Silicone Yes 0.639911 1.936273 0.435684 2.146846 7 Immersion oil No 0.870073 1.727977 0.715653 2.014574 8 Immersion oil Yes 0.700858 1.726277 0.717937 2.013225 PV value 0.470957 0.633008 0.288911
(47) TABLE-US-00006 TABLE 6 Prescribed positions of the correction group for different configurations Half Surface Radius Thickness diameter (Fl) [mm] [mm] Material n.sub.546 n.sub.365 n.sub.850 [mm] CG 0 ∞ 0.170000 N-K5 1.524583 1.544127 1.515107 0.80 1 ∞ 0.600000 Water 1.334190 1.346757 1.326855 0.80 L1 2 ∞ 1.883086 N-FK5 1.489143 1.504009 1.481404 0.80 L2 3 −1.307214 3.969105 S-LAH58 1.888145 1.939182 1.865804 1.29 4 −4.385572 0.097937 3.92 L3 5 117.474093 2.437249 N-PK51 1.530193 1.545274 1.522811 5.18 6 −11.831944 2.703312 5.45 L4 7 10.239040 5.719627 S-TIL1 1.550984 1.579591 1.538490 6.51 8 11.294919 2.107503 5.65 L5 9 −108.960802 0.993547 N-KZFS11 1.641325 1.676362 1.625462 5.67 L6 10 7.595830 5.127040 N-PK51 1.530193 1.545274 1.522811 5.82 11 −11.971971 0.205535 5.94 L7 12 17.340409 4.452998 N-PK51 1.530193 1.545274 1.522811 5.76 L8 13 −7.257071 2.893171 N-KZFS11 1.641325 1.676362 1.625462 5.64 14 37.431933 0.099906 5.34 L9 15 13.195415 5.437993 N-LAF35 1.746883 1.781081 1.730919 5.35 16 8.837864 4.305595 4.38 L10 17 −6.119887 3.110778 S-FTM16 1.596669 1.639749 1.579677 4.53 18 −6.906536 2.246009 5.58 19 ∞ 0.000000 5.63 TUBE 20 ∞ 126.500000 5.65 21 189.417000 10.900000 N-BALF4 1.582122 1.606583 1.570691 19.90 22 −189.417000 60.000000 19.90 23 ∞ 80.000000 BK7 1.518722 1.536270 1.509840 9.53 24 ∞ 48.200000 9.14 25 ∞ 0.000000 9.09 26 ∞ 0.000000 9.12
(48) TABLE-US-00007 TABLE 7 Sensitivities of selected Zernike coefficients in the case of a displacement of the correction group such that d8 is increased by 1 μm, d11 is decreased by 1.344 μm. Z4.sub.sens = Z9.sub.sens = Z16.sub.sens = Z25.sub.sens = δZ4/δd8 δZ9/δd8 δZ16/δd8 δZ25/δd8 Configuration AA Δd8 Δd11 [nm/μm] [nm/μm] [nm/μm] [nm/μm] 1 0.600 0.000 0.000 −0.007 2.125 0.225 −0.010 2 0.745 0.090 −0.121 0.026 2.146 0.225 −0.011 3 0.828 −0.240 0.322 −0.093 2.072 0.226 −0.007 4 0.667 −0.269 0.362 −0.103 2.065 0.226 −0.007 5 0.794 −0.119 0.161 −0.050 2.098 0.225 −0.009 6 0.640 −0.171 0.230 −0.068 2.087 0.225 −0.008 7 0.870 −0.380 0.510 −0.141 2.041 0.226 −0.006 8 0.701 −0.381 0.512 −0.142 2.040 0.226 −0.006
(49) Corresponding to table 4, table 7 gives, by way of example, the change in the Zernike coefficients Z4, Z9, Z16 and Z25 during a displacement of the correction group such that the distance d8 from the lens that is adjacent on the object side changes by 1 μm.
(50) A variant of the immersion objective 1 will be described below with reference to
(51) Certain details of this variant correspond to those of the objective according to
(52) In the immersion objective 1 according to
(53) When the correction group 2 is displaced, the distances d6 from the lens L3 that is adjacent on the object side and d12 from the lens L8 that is adjacent on the image side are changed. The distance change in these distances is proportional. The proportionality constant α is −1: Δd12=−Δd6. This is particularly advantageous because this means that, during a displacement of the correction group 2, all remaining lenses L1 to L3 and L8 to L10 remain fixed in place relative to one another. In this way, the construction outlay for the mechanical design of the immersion objective 1 is significantly reduced.
(54) The optical data of the immersion objective 1 according to
(55) TABLE-US-00008 TABLE 8 Optical design data of the objective according to FIG. 4 Half Surface Radius Thickness diameter (Fl) [mm] [mm] Material n.sub.546 n.sub.365 n.sub.850 [mm] CG 0 ∞ 0.170000 D263M 1.525589 1.547406 1.515270 0.80 1 ∞ 0.600000 Water 1.334190 1.346757 1.326855 0.80 L1 2 ∞ 0.968399 N-FK5 1.489143 1.504009 1.481404 0.83 L2 3 −1.054497 5.061973 S-LAH58 1.888145 1.939182 1.865804 0.99 4 −4.998689 0.099634 4.14 L3 5 19.963237 3.098229 S-PHM53 1.605199 1.625474 1.595229 5.78 6 −24.089702 5.522361 6.01 L4 7 −58.094865 1.000000 N-KZFS11 1.641325 1.676362 1.625462 6.62 L5 8 19.689147 4.581070 CAFUV 1.434942 1.444913 1.430041 6.91 9 −14.655434 0.099854 7.18 L6 10 76.205405 5.517322 CAFUV 1.434942 1.444913 1.430041 7.03 L7 11 −8.840077 1.500000 N-KZFS11 1.641325 1.676362 1.625462 7.25 12 −39.648516 0.180389 7.93 L8 13 16.516752 4.364122 CAFUV 1.434942 1.444913 1.430041 8.33 14 −50.344026 18.948425 8.20 L9 15 −9.273566 1.500000 S-LAM3 1.720563 1.755314 1.704937 4.70 16 55.567645 1.566624 5.13 L10 17 117.199711 2.980259 S-FTM16 1.596669 1.639749 1.579677 5.64 18 −13.363861 2.241377 5.95 19 ∞ 0.000000 N-FK5 1.489143 1.504009 1.481404 6.13 20 ∞ 0.000000 6.13 21 ∞ 0.000000 6.13 TUBE 22 ∞ 15.000000 6.13 23 ∞ 150.000000 6.89 24 175.086000 5.500000 S-FPL51 1.498454 1.511762 1.491855 14.52 25 −64.939400 3.200000 S-BAH10 1.673402 1.706632 1.658578 14.54 26 −124.100700 60.000000 14.66 27 ∞ 20.000000 N-BK7 1.518722 1.536270 1.509840 12.74 28 ∞ 104.980350 12.33 29 ∞ 0.000000 9.06 30 0 0 9.124
(56) Corresponding to table 4, table 9 summarizes some of the optical data of the prescribed positions for the different configurations.
(57) TABLE-US-00009 TABLE 9 Prescribed positions of the correction group for different configurations Immersion AA d6 d12 d18 Configuration medium CG [mm] [mm] [mm] [mm] 1 Water Yes 0.600000 5.522361 0.180389 2.241377 2 Water No 0.744802 5.603434 0.099316 2.266586 3 Glycerol No 0.827475 5.312800 0.389947 2.183928 4 Glycerol Yes 0.666646 5.286577 0.416171 2.174747 5 Silicone No 0.794274 5.416678 0.286072 2.217078 6 Silicone Yes 0.639890 5.370336 0.332413 2.201467 7 Immersion oil No 0.869853 5.184382 0.518368 2.141429 8 Immersion oil Yes 0.700800 5.182151 0.520599 2.140488 PV value 0.421283 0.421283 0.126098
(58) TABLE-US-00010 TABLE 10 Sensitivities of selected Zernike coefficients during a displacement of the correction group such that the distance d6 from the lens that is adjacent on the object side changes by 1 μm. Z4.sub.sens = Z9.sub.sens = Z16.sub.sens = Z25.sub.sens = δZ4/δd6 δZ9/δd6 δZ16/δd6 δZ25/δd6 Configuration AA Δd6 Δd12 [nm/μm] [nm/μm] [nm/μm] [nm/μm] 0.600 0.000 0.000 0.055 2.382 0.276 0.032 2 0.745 0.081 −0.081 0.090 2.405 0.280 0.032 3 0.827 −0.210 0.210 −0.035 2.323 0.266 0.030 4 0.667 −0.236 0.236 −0.046 2.315 0.264 0.030 5 0.794 −0.106 0.106 0.009 2.352 0.271 0.031 6 0.640 −0.152 0.152 −0.010 2.339 0.268 0.031 7 0.870 −0.338 0.338 −0.089 2.287 0.260 0.029 8 0.701 −0.340 0.340 −0.090 2.286 0.259 0.029
(59) Corresponding to table 4, table 10 gives, by way of example, the change in the Zernike coefficients Z4, Z9, Z16 and Z25 during a displacement of the correction group such that the distance d6 from the lens that is adjacent on the object side changes by 1 μm.