Bonding method of crystal body
10519567 ยท 2019-12-31
Assignee
Inventors
- Atsushi Fukazawa (Tokyo, JP)
- Satoshi Hayata (Tokyo, JP)
- Kazuyuki Sato (Tokyo, JP)
- Kiminori Omura (Tokyo, JP)
- Hiromu Kasai (Tokyo, JP)
Cpc classification
C03B29/12
CHEMISTRY; METALLURGY
B29C66/004
PERFORMING OPERATIONS; TRANSPORTING
B29C65/66
PERFORMING OPERATIONS; TRANSPORTING
B29C66/345
PERFORMING OPERATIONS; TRANSPORTING
B29C66/45
PERFORMING OPERATIONS; TRANSPORTING
B29C66/70
PERFORMING OPERATIONS; TRANSPORTING
International classification
B29C65/00
PERFORMING OPERATIONS; TRANSPORTING
Abstract
To improve the production yield rate of a synthesis corundum cell superior in translucency, chemical resistance or an optical component comprising calcium fluoride. On the other end side of synthetic corundum piece, spacer intervenes between the surfaces which will be bonded. The spacer is crushed flat by pressure force which effects the other end side of synthetic corundum piece in the case of heat-treatment after the temporary bonding. Thereby, the spacer does not disturb the synthetic optical contacting or chemical pressurized fusion bonding state of corundum piece.
Claims
1. A method of bonding crystal body pieces, the method comprising: overlapping and contacting bonding surfaces of the crystal body pieces to define a first end side and a second end side of the crystal body pieces; pressing the first end side of the crystal body pieces so as to generate an interference fringe between the bonding surfaces; dissipating the interference fringe by heating the crystal body pieces to a temperature lower than a melting point of the crystal body pieces and inserting a spacer that intervenes between the bonding surfaces at the second end side of the crystal body pieces, wherein the spacer consists of material which can be crushed flat by a pressure force at the time of heating, and the crystal body pieces are synthetic corundum (Al2O3), calcium fluoride (CaF2), or magnesium fluoride (MgF2).
2. The method of bonding crystal body pieces according to claim 1, wherein the diameter of the spacer is 15-60 m and the spacer comprises fiber.
3. The method of bonding crystal body pieces according to claim 1, wherein a pressing part pressed during the pressing of the first end side of the crystal body pieces is only a part of a widthwise direction of the crystal body pieces.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1)
(2)
(3)
(4)
(5)
(6)
BEST MODE FOR CARRYING OUT THE INVENTION
(7) An embodiment of the present invention based on an attached drawing is explained below, alternatively in
(8)
(9) These synthetic corundum pieces 1, 2 are cut from a crystal block, the pieces are washed subsequently after having the surfaces which will be bonded together ground polish, and it is confirmed that there are no contamination and particles on the bonding surface.
(10) Alternatively, while two synthetic corundum pieces are overlapped in the illustration example, but it synthetic corundum pieces are overlapped three or more can bond simultaneously.
(11) It is not necessary to completely synchronize a crystal axis, edge and axial angle when overlapping the synthetic corundum piece 1, 2.
(12) It is preferable to assume a displacement of less than 5 degrees of axes, edge and axial angle of the corundum piece 1, 2.
(13) The one end of synthetic corundum piece 1,2 is pressed or clamped strongly by jig 4. It is possible to press the whole area of the widthwise direction by jig 4, however in the illustration example, it is pressed or clamped only at the center of the widthwise direction, thereby reducing incompatible portion after the bonding.
(14) On the other end side of synthetic corundum piece 1, 2, spacer 3 intervenes between the surfaces which will be bonded.
(15) The spacer 3 is larger than the fact to make plain with the figure, in the preferred embodiment, 30 m diameter of cotton fiber is used.
(16) Spacer 3 is crushed flat by pressure force which effects the other end side of synthetic corundum piece 1, 2 in the case of heat-treatment after the temporary bonding. Thereby, spacer 3 does not disturb the synthetic optical contacting or chemical pressurized fusion bonding state of corundum piece 1, 2.
(17) As for spacer 3, gel beads can be applied too.
(18) Material generating large quantities of gas in the case of heat-treatment after the temporary bonding are not recommendable suitable, because an air bubble may remain on the bonding surface.
(19)
(20) The interval of the above described interference fringe is proportional to the size of the minute gap of the bonding surface, therefore, by counting the number of the interference fringes per unit length in the temporary bonding state, it is possible to judge beforehand whether the minute gap of the bonding surface of the synthetic corundum piece 1,2 is in the proper range or not. In this embodiment, 5 stripes are observed in a unit length.
(21) The above-mentioned temporary bonding synthetic corundum piece is heated to a temperature less than the melting point of the corundum and maintained for a predetermined time.
(22) Then, as for the one end, it already becomes optical contacting or chemical pressurized fusion bonding state, and this optical contacting or chemical pressurized fusion bonding state progresses from one end to the other end side, in accordance with this progress, existing gas is completely removed between the synthetic corundum pieces, then the whole bonding surface becomes optical contacting or chemical pressurized fusion bonding state.
(23)
(24) In each pair, a flow channel to let a fluid go through is formed in the center portion.
(25) A portion of both right and left side of this flow channel is an bonded surface, and an interference fringe is observed before heat-treatment.
(26) Also photograph of (b) showing after heat-treatment, the above described interference fringe was not observed at all, and an optical boundary surface was not recognized in all specimens.
(27)
(28)
(29) The three-dimensional structure 5 consists of base plate 5a and four pieces of side-plates 5b, 5c, 5d, 5e comprising synthetic corundum, the side-plates are bonded along a sides of base plate 5a.
(30) The three-dimensional structure 5 is manufactured by one heat-treatment by applying the present invention method to the facing portion between base plate 5a and side-plates 5b, 5c, 5d, 5e, and facing portion between each side-plate.
(31) Also, the method of the present invention can be applied to the bonding of a crystal body such as calcium fluoride as well as synthetic corundum or magnesium fluoride.
(32) In addition, the example is shown in which a synthetic corundum piece and synthetic corundum piece, or magnesium fluoride crystal body and magnesium fluoride crystal body were bonded, however, the present invention method can apply to the bonding of a synthetic corundum piece and magnesium fluoride crystal body piece, synthetic corundum piece and calcium fluoride crystal body piece, or magnesium fluoride crystal body piece and a calcium fluoride crystal body piece.
INDUSTRIAL APPLICABILITY
(33) The method of the present invention can apply to not only flow cell installed in particle counter but also a lens, various optical components such as prisms, a machine part which requires hardness and a vacuum chamber where an bonding surface is a sealing up state.
(34) As for the vacuum chamber, gas enclosure glass cell and high vacuum glass chamber are exemplified, which are used for e calibration of a variable wavelength laser, calibration of a light spectrum analyzer, calibration of a gas analyzer, calibration of a wavelength meter, frequency standard, stable frequency source, laser cooling of atoms in magneto optical trap method.
EXPLANATION OF LETTERS OR NUMERALS
(35) 1.2 . . . synthetic corundum piece, 3 . . . spacer, 4 . . . press jig, 5 . . . three-dimensional structure.