INTEGRATED DUAL-PROBE RAPID IN-SITU SWITCHING MEASUREMENT METHOD AND DEVICE OF ATOMIC FORCE MICROSCOPE

Abstract

An atomic force microscope has dual probes composed of a hinge structure, two cantilever beams and needle tips arranged on free ends of the cantilever beams. The hinge structure is a U-shaped body having two ends respectively extended with a first cantilever beam and a second cantilever beam. The free end of the first cantilever beam and the free end of the second cantilever beam are respectively provided with a first needle tip and a second needle tip. The integrated dual probes is operated by the driving function of the probe clamp. Therefore, only a set of motion control and measurement system of the atomic force microscope is required to realize the rapid in-situ switching function of the dual probes.

Claims

1. An integrated dual-probe rapid in-situ switching measurement device of an atomic force microscope, characterized by comprising dual probes composed of a hinge structure, two cantilever beams and needle tips arranged on free ends of the cantilever beams; the hinge structure is a U-shaped body; two ends are respectively extended with a first cantilever beam and a second cantilever beam; and the free end of the first cantilever beam and the free end of the second cantilever beam are respectively provided with a first needle tip and a second needle tip.

2. The integrated dual-probe rapid in-situ switching measurement device of the atomic force microscope according to claim 1, characterized in that the dual probes are arranged on a dual-probe clamp; the dual-probe clamp comprises: a fixture, a probe base, a probe clamp fixing base and piezoelectric ceramics for driving a single cantilever arm; the probe base is connected with the probe clamp fixing base, and the hinge structure is fixed on the probe base through the fixture; and a piezoelectric ceramic controller connected with the piezoelectric ceramics is used to drive the single-sided cantilever beam by controlling the piezoelectric ceramics to realize independent motion of the single-sided cantilever beam.

3. The integrated dual-probe rapid in-situ switching measurement device of the atomic force microscope according to claim 1, characterized in that at least one of spring constants of the two cantilever arms, the sizes of two needle tips and the materials of the two needle tips is different.

4. The integrated dual-probe rapid in-situ switching measurement device of the atomic force microscope according to claim 2, characterized in that the piezoelectric ceramic controller connected with the piezoelectric ceramics is used to drive two cantilever beams by controlling the piezoelectric ceramics to realize independent motion of the two-sided cantilever beams.

5. The integrated dual-probe rapid in-situ switching measurement device of the atomic force microscope according to claim 1, characterized in that the surfaces of the two cantilever arms are located in the same plane, and the distance between the two adjacent cantilever arms is less than 10 microns.

6. The integrated dual-probe rapid in-situ switching measurement device of the atomic force microscope according to claim 1, characterized by further comprising a reflected light detector; and the reflected light detector is used to receive laser reflected by two cantilever arms.

7. The integrated dual-probe rapid in-situ switching measurement device of the atomic force microscope according to claim 1, characterized by being used to achieve a contact mode, a tapping mode or a peak force tapping mode through the dual probes.

8. An integrated dual-probe rapid in-situ switching measurement method of an atomic force microscope, characterized by comprising the following steps: in a non-operating state, the positions of the two cantilever beams are in a horizontal state, and a sample is located below the first needle tip of the first cantilever beam; controlling the two cantilever beams to produce relative motion; making the position of the first needle tip lower than the position of the second needle tip; controlling the first cantilever beam and the sample to produce relative motion with a distance of z3, and at this time, making the first needle tip come into contact with a test point on the sample for measurement or scanning imaging; controlling the two cantilever beams to produce relative motion and making the positions thereof in a horizontal state; controlling the relative motion between the dual probes and the sample, and making the sample move along the direction of motion by a distance d which is the distance between two needle tips; and at this moment, making a measurement point located below the second needle tip; controlling the two cantilever beams to produce relative motion; making the position of the second needle tip lower than the position of the first needle tip; controlling the second cantilever beam and the sample to produce relative motion with a distance of z4, and making the second needle tip come into contact with a measurement point for measurement or scanning imaging to complete a rapid in-situ switching process of the probe.

9. An integrated dual-probe measurement method for bending motion and twisting motion of an atomic force microscope, characterized by comprising the following steps: irradiating the laser on the two cantilever beams, forming two spots on the first cantilever beam and the second cantilever beam, reflecting to the reflected light detector, and forming a first laser spot and a second laser spot respectively; controlling the two cantilever beams to produce relative motion; making the position of the second cantilever beam lower than the position of the first cantilever beam; at this moment, making the second laser spot reflected by the second cantilever beam move downwards; making the first cantilever beam not move, and making the first laser spot reflected by the first cantilever beam not move; adjusting the position of the reflected light detector, making the center of the second laser spot in the center position of the reflected light detector, and making the first laser spot at the outer side or the edge of the reflected light detector; when the second cantilever beam moves independently, producing corresponding transverse and longitudinal motion by the second laser spot reflected to the reflected light detector by the second cantilever beam to obtain the twisting motion and the bending motion of the second cantilever beam respectively; when the first laser spot reflected by the static first cantilever beam is located inside the reflected light detector, making the first laser spot stationary to obtain the twisting motion and the bending motion of the second cantilever beam.

10. An integrated dual-probe tapping mode imaging method of an atomic force microscope, characterized by comprising the following steps: irradiating the laser on one cantilever beam of the dual probes and reflecting to the reflected light detector to form a laser spot; sending a compound signal of a DC shift signal and an AC vibration signal generated by an operating probe displacement driver to the piezoelectric ceramic controller, driving a single piezoelectric ceramic corresponding to the cantilever beam to produce compound motion of static shift and high frequency vibration, and driving the cantilever beam to produce compound motion of the same mode; detecting the motion of the cantilever beam by the reflected light detector after amplified by the laser light path, and sending a generated operating probe AC signal into a lock-in amplifier as an input signal; making a compound signal of the DC shift signal and the AC vibration signal pass through a DC isolation circuit, and sending the AC vibration signal into the lock-in amplifier as a reference signal; outputting the amplitude of a signal component of the operating probe AC signal in the same frequency as the reference signal by the lock-in amplifier, sending the amplitude into a subtracter to make a difference with a set value of the amplitude, and sending the difference value to a feedback controller; and outputting a control signal by the feedback controller and sending to a three-dimensional motion driver to control the three-dimensional motion of a scanning head or sample to realize scanning imaging.

Description

DESCRIPTION OF DRAWINGS

[0031] FIG. 1 is a structural schematic diagram of integrated dual probes of the present invention; wherein 1 is a hinge structure, 2 and 3 are probe cantilever beams respectively, and 4 and 5 are probe tips respectively;

[0032] FIG. 2a is a structural schematic diagram 1 of integrated dual probes and two forms of probe champs of the present invention;

[0033] FIG. 2b is a structural schematic diagram 2 of integrated dual probes and two forms of probe champs of the present invention; wherein 6 and 7 are piezoelectric ceramics respectively; 8 is a fixture; 9 and 10 are piezoelectric ceramic controllers respectively; 11 is a probe base; and 12 is a probe champ fixing base;

[0034] FIG. 3 is a schematic diagram 1 of independent motion of one probe of integrated dual probes driven by a probe champ in the present invention;

[0035] FIG. 4 is a schematic diagram 2 of independent motion of one probe of integrated dual probes driven by a probe champ in the present invention;

[0036] FIG. 5 is a schematic diagram 1 of an independent in-situ switching process of two probes in integrated dual probes in the present invention;

[0037] FIG. 6 is a schematic diagram 2 of an independent in-situ switching process of two probes in integrated dual probes in the present invention;

[0038] FIG. 7 is a schematic diagram 3 of an independent in-situ switching process of two probes in integrated dual probes in the present invention;

[0039] FIG. 8 is a schematic diagram 4 of an independent in-situ switching process of two probes in integrated dual probes in the present invention;

[0040] wherein 13 is a test point, 14 is a tested sample and 15 is a motion direction of the sample relative to a probe;

[0041] FIG. 9 is a schematic diagram 1 of a measurement method for bending motion and twisting motion of independent operating probes;

[0042] FIG. 10 is a schematic diagram 2 of a measurement method for bending motion and twisting motion of independent operating probes;

[0043] wherein 16 is a spot formed by irradiating laser on a cantilever beam 2; 17 is a spot formed by irradiating the laser on a cantilever beam 3; 18 is a laser spot reflected on or outside a laser position sensitive detector 300 through the cantilever beam 2; 19 is a laser spot reflected on the laser position sensitive detector 300 through the cantilever beam 3; and 20 is a laser path;

[0044] FIG. 11a is a schematic diagram of an atomic force microscope system which can realize rapid in-situ switching, imaging and measurement of integrated dual probes under the condition that dual probes can be driven;

[0045] FIG. 11b is a schematic diagram of an atomic force microscope system which can realize rapid in-situ switching, imaging and measurement of integrated dual probes under the condition that only a single-sided probe can be driven;

[0046] wherein 21 is an AC signal of an operating probe; 22 is a lock-in amplifier; 23 is a subtracter; 24 is a feedback controller; 25 is a three-dimensional motion driver for controlling the scanning imaging of an atomic force microscope; 26 is a displacement driver of the operating probe; 27 is a compound signal of DC shift and an AC vibration signal; and 28 is a DC isolation circuit;

[0047] FIG. 12 shows a motion state curve of the operating probe during measurement or imaging; wherein 29 is high-frequency up and down motion made by the cantilever beams, and 30 is a distance that the operating probe moves towards a sample surface.

DETAILED DESCRIPTION

[0048] The present invention will be further described in detail below in combination with the drawings and the embodiments.

[0049] Integrated dual probes, and drive, measurement and control devices thereof are provided. More than one probe is arranged. The physical properties of the probes comprise spring constants, needle tip sizes and needle tip material, at least one of which has essential difference.

[0050] Interaction points between the probes and the sample can be replaced by translation of a hinge system. the replacement time is less than 10 seconds; the repeated positioning accuracy of the interaction points of the probes is higher than 1 micron; A multi-probe operation and use method based on an atomic force microscope technology has more than one probe.

[0051] Interaction points between the probes and the sample can be replaced by translation of a hinge system. The replacement time is less than 10 seconds; the repeated positioning accuracy of the interaction points of the probes is higher than 1 micron.

[0052] The distance between two cantilever beams of the integrated dual probes is less than 10 microns.

[0053] The integrated dual probes adopt a hinge structure. A probe carrier of the integrated dual probes can move independently. The independent motion of the probe carrier of the integrated dual probes is driven by a piezoelectric ceramic driving mode. Piezoelectric ceramics produce a driving force for the independent probes, and the probe carrier produces the deformation of a lever principle to realize independent motion, with a motion range greater than 1.5 microns.

[0054] The independent displacement measurement of the integrated dual probes is realized by a light rod measurement method. Laser spots are simultaneously irradiated on two cantilever beams and reflected onto position sensitive detectors (PSDs). An operating probe for imaging or measurement produces periodical motion, a non-operating probe does not produce periodical motion. The interference of the non-operating probe is removed by a “DC isolation” circuit or background noise removal method with peak force tapping.

[0055] The operating probe can realize advanced imaging and measurement modes such as a contact mode and a peak force tapping mode.

[0056] As shown in FIG. 1, the integrated dual probes 100 of the present invention are composed of a hinge structure 1, cantilever beams 2 and 3 and needle tips 4 and 5 on free ends of the cantilever beams. The main geometry of the hinge structure is of “U” shape, and two cantilever beams 2 and 3 protrude from “U”-shaped ends respectively. The cantilever beams 2 and 3 and the hinge structure form an asymmetric cantilever beam. Two probe needle tips 4 and 5 protrude from the lower parts of the free ends of the cantilever beams 2 and 3 respectively, and the needle tips 4 and 5 may have different geometric sizes or/and different materials according to application requirements.

[0057] As shown in FIG. 2a, an integrated dual-probe champ 200 of the present invention is composed of probe independent driving piezoelectric ceramics 6 and 7, a fixture 8, a probe base 11 and a probe clamp fixing base 12. The probe base 11 is rigidly connected with the probe clamp fixing base 12, and the integrated dual probes 100 are fixed on the probe base 11 through the fixture 8 by a certain force. Piezoelectric ceramic controllers 9 and 10 control the piezoelectric ceramics 6 and 7 respectively to drive the integrated dual probes to realize independent motion.

[0058] As shown in FIG. 2b, in another form of the integrated dual-probe champ 200 of the present invention, only one probe is driven to realize the rapid in-situ switching and measurement of the operating probe and the non-operating probe. The integrated dual-probe champ 200 is composed of probe independent driving piezoelectric ceramic 7, a fixture 8, a probe base 11, a probe clamp fixing base 12 and a single-probe fixing base 6. The probe fixing base 6, the probe base 11 and the probe clamp fixing base 12 are rigidly connected, and the integrated dual probes 100 are fixed on the probe base 11 through the fixture 8 by a certain force. A piezoelectric ceramic controller 10 controls the piezoelectric ceramic 7 to drive the single-sided probe of the integrated dual probes to realize independent motion.

[0059] As shown in FIG. 3, when the integrated dual probes and the probe champ of the present invention are in a stationary state, the probes do not produce any motion. FIG. 4 shows an embodiment of the present invention. When the piezoelectric ceramic 7, the probe base 11 and fixture 8 form a lever structure and the piezoelectric ceramic 7 extends by zl distance, bending deformation is produced on one side of the hinge structure 1 corresponding to the cantilever beam 3 using the fixture 8 as a supporting point; and a displacement distance at the needle tip 5 is z2. The extension distance zl of the piezoelectric ceramic 7 is directly related to the displacement distance z2 of the needle tip 5.

[0060] Therefore, the displacement distance z2 of the needle tip 5 can be controlled by the extension distance z1 of the piezoelectric ceramic 7.

[0061] FIG. 5 to FIG. 8 show embodiments of the independent in-situ switching process of two probes in the integrated dual probes of the present invention. As shown in FIG. 5, in a non-operating state, the positions of the cantilever beams 2 and 3 are in a horizontal state, a test point 13 on a sample 14 is located below the needle tip 4, and a distance between the needle tip 4 and the needle tip 5 is d. As shown in FIG. 6, the cantilever beam 2 is controlled to produce relative motion with a distance of z3 from the sample 14. At this moment, the needle tip 4 comes into contact with the test point 13 on the sample 14 for measurement or scanning imaging. As shown in FIG. 7, the cantilever beams 2 and 3 are controlled to produce relative motion and the positions thereof are in a horizontal state. The relative motion between the integrated dual probes 100 and the sample 14 is controlled, and the sample 14 moves along a motion direction 15 by a distance d. At this moment, the measurement point 13 is located below the needle tip 5. As shown in FIG. 8, the cantilever beam 3 is controlled to produce relative motion with a distance of z4 from the sample. The needle tip 5 comes into contact with the measurement point 13 for measurement or scanning imaging. Thus, the present embodiment completes a rapid in-situ switching process of the probe.

[0062] FIG. 9 and FIG. 10 show measurement methods for bending motion and twisting motion of independent operating probes. As shown in FIG. 9, the laser is irradiated on the cantilever beams 2 and 3, and laser spots 16 and 17 are formed on the cantilever beams respectively, and reflected onto a position sensitive detector 300 to form laser spots 18 and 19 respectively. The cantilever beam 3 is controlled to move downward, and at this moment, the laser spot 19 reflected by the cantilever beam 3 also moves downward. The cantilever beam 2 does not move, and the laser spot 18 reflected by the cantilever beam 2 does not move. The position of the position sensitive detector 300 is adjusted, so that the position sensitive detector 300 is in the center position and the laser spot 18 is located at the outer side or at the edge of the position sensitive detector 300. As shown in FIG. 10, the position sensitive detector 300 is a four-quadrant detector. When the cantilever beam 3 moves independently, the laser spot 19 reflected to the position sensitive detector 300 by the cantilever beam produces corresponding transverse and longitudinal motion, and the laser spot 18 reflected by the stationary cantilever beam 2 is outside the position sensitive detector 300, so as to analyze the twisting motion and the bending motion of the cantilever beam 3. When the laser spot 18 reflected by the stationary cantilever beam 2 is inside the position sensitive detector 300, because the laser spot 18 is stationary, the twisting motion and the bending motion of the cantilever beam 3 can be analyzed by methods of low pass filtering, DC isolation or background noise removal.

[0063] FIG. 11a shows an embodiment of an atomic force microscope system which can realize tapping mode imaging of the integrated dual probes. Single-sided driving is taken as an example in the present embodiment, and the driving of the other side is similar to the present embodiment. The laser is irradiated on the operating cantilever beam 3, and reflected onto the position sensitive detector 300 to form the laser spot 19. A compound signal 27 of a DC shift signal and an AC vibration signal generated by an operating probe displacement driver 26 is sent to the piezoelectric ceramic controller 10, the piezoelectric ceramic 7 is driven to produce compound motion of static shift and high frequency vibration, and the cantilever beam 3 is driven to produce compound motion of the same mode. The piezoelectric ceramic controller 9 does not operate, and does not produce any driving signal. The motion of the cantilever beam 3 is detected by the position sensitive detector 300 after amplified by the laser light path 20, and a generated operating probe AC signal 20 is sent into a lock-in amplifier 22 as an input signal. A compound signal 27 of the DC shift signal and the AC vibration signal passes through a DC isolation circuit 28, and the AC vibration signal is sent into the lock-in amplifier 22 as a reference signal. The lock-in amplifier 22 outputs the amplitude of a signal component of the operating probe AC signal 21 in the same frequency as the reference signal, sends the amplitude into a subtracter 23 to make a difference with a set value of the amplitude, and sends the difference value to a feedback controller 24. The feedback controller 24 outputs a control signal and sends to a three-dimensional motion driver 25 to control the three-dimensional motion of a scanning head or sample to realize scanning imaging.

[0064] FIG. 11b shows an embodiment of an atomic force microscope system which can realize tapping mode imaging of the integrated dual probes. A single-sided probe is driven only in the present embodiment, and the probe on the other side is a stationary probe. The laser is irradiated on the operating cantilever beam 3, and reflected onto the position sensitive detector 300 to form the laser spot 19. A compound signal 27 of a DC shift signal and an AC vibration signal generated by an operating probe displacement driver 26 is sent to the piezoelectric ceramic controller 10, the piezoelectric ceramic 7 is driven to produce compound motion of static shift and high frequency vibration, and the cantilever beam 3 is driven to produce compound motion of the same mode. The motion of the cantilever beam 3 is detected by the position sensitive detector 300 after amplified by the laser light path 20, and a generated operating probe AC signal 20 is sent into a lock-in amplifier 22 as an input signal. A compound signal 27 of the DC shift signal and the AC vibration signal passes through a DC isolation circuit 28, and the AC vibration signal is sent into the lock-in amplifier 22 as a reference signal. The lock-in amplifier 22 outputs the amplitude of a signal component of the operating probe AC signal 21 in the same frequency as the reference signal, sends the amplitude into a subtracter 23 to make a difference with a set value of the amplitude, and sends the difference value to a feedback controller 24. The feedback controller 24 outputs a control signal and sends the signal to a three-dimensional motion driver 25 to control the three-dimensional motion of a scanning head or sample to realize scanning imaging.

[0065] As shown in FIG. 12, an operating probe shift position 30 represents the distance that the operating probe moves towards the surface of the sample and the need tip comes into contact with the sample. The high frequency vibration motion 29 of the operating probe represents that the cantilever beam makes high-frequency up and down motion, to drive a tapping mode or a compound peak force tapping mode.