Optical modulator

Abstract

An optical modulator includes a substrate, an optical waveguide, a control electrode applying a high frequency signal in order to modulate light waves propagating through the optical waveguide, and a relay substrate provided with a relay line to transfer the high frequency signal to the control electrode. The control electrode and the relay line together have a coplanar line structure inclusive of at least electrical connection portions of both the control electrode and the relay line. The control electrode includes an electrical connection portion and a routing portion positioned between the electrical connection portion and an active portion applying an electrical field to the optical waveguide. The routing portion has a coplanar line structure. A distance between ground electrodes sandwiching a signal electrode in the electrical connection portion of the control electrode is substantially equal to a distance between ground electrodes sandwiching a signal electrode of the routing portion.

Claims

1. An optical modulator comprising: a substrate having an electro-optical effect; an optical waveguide formed on the substrate; a control electrode formed on the substrate and applying a high frequency signal in order to modulate light waves propagating through the optical waveguide; and a relay substrate provided with a relay line in order to transfer the high frequency signal to the control electrode, wherein the control electrode and the relay line together have a coplanar line structure inclusive of at least electrical connection portions of both the control electrode and the relay line, the control electrode comprises an electrical connection portion of the control electrode, and a routing portion positioned between the electrical connection portion of the control electrode and an active portion applying an electrical field to the optical waveguide, the routing portion has a coplanar line structure, and a distance G2 between ground electrodes sandwiching a signal electrode in the electrical connection portion of the control electrode is substantially equal to a distance G1 between ground electrodes sandwiching a signal electrode of the routing portion.

2. The optical modulator according to claim 1, wherein a distance G3 between ground lines sandwiching a signal line in the electrical connection portion of the relay line is substantially equal to the distance G2 between the ground electrodes sandwiching the signal electrode in the electrical connection portion of the control electrode.

3. The optical modulator according to claim 2, wherein the signal electrode in the electrical connection portion of the control electrode is electrically connected from the relay line and comprises a pad portion having a largest width and a tapered portion which continues from the pad portion to the routing portion, and a length L of the pad portion is set to a tenth or less of a wavelength of the high frequency signal.

4. The optical modulator according to claim 3, wherein the signal electrode in the electrical connection portion of the control electrode is electrically connected from the relay line and comprises a pad portion having a largest width and a tapered portion which continues from the pad portion to the routing portion, and a width S2 of the pad portion is set to a tenth or less of the wavelength of the high frequency signal.

5. The optical modulator according to claim 4, wherein a material of the substrate having an electro-optical effect is lithium niobate or a polymer-based material.

6. The optical modulator according to claim 3, wherein a material of the substrate having an electro-optical effect is lithium niobate or a polymer-based material.

7. The optical modulator according to claim 2, wherein the signal electrode in the electrical connection portion of the control electrode is electrically connected from the relay line and comprises a pad portion having a largest width and a tapered portion which continues from the pad portion to the routing portion, and a width S2 of the pad portion is set to a tenth or less of the wavelength of the high frequency signal.

8. The optical modulator according to claim 7, wherein a material of the substrate having an electro-optical effect is lithium niobate or a polymer-based material.

9. The optical modulator according to claim 2, wherein a material of the substrate having an electro-optical effect is lithium niobate or a polymer-based material.

10. The optical modulator according to claim 1, wherein the signal electrode in the electrical connection portion of the control electrode is electrically connected from the relay line and comprises a pad portion having a largest width and a tapered portion which continues from the pad portion to the routing portion, and a length L of the pad portion is set to a tenth or less of a wavelength of the high frequency signal.

11. The optical modulator according to claim 10, wherein the signal electrode in the electrical connection portion of the control electrode is electrically connected from the relay line and comprises a pad portion having a largest width and a tapered portion which continues from the pad portion to the routing portion, and a width S2 of the pad portion is set to a tenth or less of the wavelength of the high frequency signal.

12. The optical modulator according to claim 11, wherein a material of the substrate having an electro-optical effect is lithium niobate or a polymer-based material.

13. The optical modulator according to claim 10, wherein a material of the substrate having an electro-optical effect is lithium niobate or a polymer-based material.

14. The optical modulator according to claim 1, wherein the signal electrode in the electrical connection portion of the control electrode is electrically connected from the relay line and comprises a pad portion having a largest width and a tapered portion which continues from the pad portion to the routing portion, and a width S2 of the pad portion is set to a tenth or less of the wavelength of the high frequency signal.

15. The optical modulator according to claim 14, wherein a material of the substrate having an electro-optical effect is lithium niobate or a polymer-based material.

16. The optical modulator according to claim 1, wherein a material of the substrate having an electro-optical effect is lithium niobate or a polymer-based material.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a diagram illustrating a first example according to an optical modulator of the present disclosure.

(2) FIG. 2 is a diagram illustrating a second example according to the optical modulator of the present disclosure.

DESCRIPTION OF THE EMBODIMENTS

(3) Hereinafter, an optical modulator of the present disclosure will be described in detail using examples. As illustrated in FIG. 1, the optical modulator of the present disclosure is an optical modulator that includes a substrate 1 having an electro-optical effect, an optical waveguide (not shown) formed on the substrate, a control electrode formed on the substrate and applying a high frequency signal in order to modulate light waves propagating through the optical waveguide, and a relay substrate 4 provided with a relay line in order to transfer the high frequency signal to the control electrode. The control electrode and the relay line together have a coplanar line structure inclusive of at least electrical connection portions of both the control electrode and the relay line, the control electrode includes an electrical connection portion (A) of the control electrode and a routing portion (B) positioned between the electrical connection portion of the control electrode and an active portion applying an electrical field to the optical waveguide. The routing portion has a coplanar line structure. A distance G2 between ground electrodes sandwiching a signal electrode in the electrical connection portion of the control electrode is substantially equal to a distance G1 between ground electrodes sandwiching a signal electrode of the routing portion.

(4) In FIG. 1, the control electrode has a coplanar line structure constituted by a signal electrode 3 and ground electrodes (20, 21) sandwiching the signal electrode. In addition, a relay line formed on the relay substrate also has a coplanar line structure constituted by a signal line 6 and ground lines (50, 51) sandwiching the signal line. In the present disclosure, the coplanar line structure is not a component required for all of the control electrodes and relay lines, and it is necessary to provide a coplanar line structure in at least a portion electrically connecting the control electrode and the relay line and a portion of the routing portion B connected to the electrical connection portion A of the control electrode.

(5) Lithium niobate and a polymer-based material can be used in known techniques for a material of a substrate having an electro-optical effect. In addition, it is needless to say that a known technique in the related art such as a method of forming an optical waveguide through Ti diffusion and ridge formation or a method of forming a control electrode on a base electrode of, for example gold (Au) or titanium, by gold plating can also be applied to the present disclosure. Further, an insulating material such as alumina can be used for the relay substrate.

(6) A feature of the present disclosure is to make a distance (G2) between ground electrodes of a region in which a pad portion of the signal electrode of the electrical connection portion A is formed and a distance (G1) between ground electrodes of the routing portion B substantially equal to each other. The wording being substantially equal to in the present disclosure not only means being equal but also means that a deviation from equality may be allowed in a range in which effects (an effect of reducing a propagation loss) of the present disclosure are exhibited.

(7) In this manner, a distance between the ground electrodes (20, 21) is set to be fixed regardless of a change in the width of the signal electrode 3 to make a high frequency signal flow smoothly, and thus it can be confirmed that a propagation loss can be reduced.

(8) Further, a distance G3 between the ground lines (50, 51) sandwiching the signal line 6 in the electrical connection portion of the relay line is set to be substantially equal to the distance G2 between the ground electrodes (20, 21) sandwiching the signal electrode 3 in the electrical connection portion A of the control electrode, and thus it is possible to further reduce a propagation loss.

(9) In addition, the signal electrode 3 in the electrical connection portion A of the control electrode is electrically connected from the relay line and includes a pad portion having the largest width and a tapered portion (a portion denoted by sign T) which continues from the pad portion to the routing portion B. A length L of the pad portion is set to a quarter or less, and more preferably, a tenth or less of the wavelength of a high frequency signal and thus it is possible to suppress the influence of a change in the width of the signal electrode due to the pad portion on a propagation loss as much as possible. For example, in a case of a high frequency signal of 32 GHz, approximately 0.5 mm may be set as a tenth of a wavelength when an effective dielectric constant of a line is taken into account.

(10) Further, the signal electrode 3 in the electrical connection portion A of the control electrode is electrically connected from the relay line and includes a pad portion having the largest width and a tapered portion which continues from the pad portion to the routing portion B. A width S2 of the pad portion is set to a quarter or less, and more preferably a tenth or less of the wavelength of a high frequency signal, and thus it is possible to suppress the influence of a change in the width of the signal electrode due to the pad portion on a propagation loss as much as possible.

(11) FIG. 2 is a diagram illustrating the electrical connection portion A, provided with a pad portion, and the routing portion B which constitute the control electrode, and an active portion C applying an electrical field to the optical waveguide. The optical modulator of the present disclosure is not limited to that illustrated in FIG. 2, and it is possible to relatively suppress the influence of the electrical connection portion A when the length L of the electrical connection portion A or the pad portion is shorter than the length of a portion in which the distance G1 between the ground electrodes of the routing portion B becomes equal to the distance G2 between the ground electrodes of the electrical connection portion A.

(12) In FIG. 2, the widths (S1, S0) of the signal electrodes in the routing portion B and the active portion C are set to be equal to each other, but are not limited thereto. The width of the signal electrode can also be changed in the middle of the routing portion B. In addition, the distance G1 between the ground electrodes of the routing portion B is changed only once just before being connected to the active portion C, but is not limited thereto. The distance G1 can also be changed a plurality of times in the middle of the routing portion B.

(13) The present disclosure provides an optical modulator that includes a substrate having an electro-optical effect, an optical waveguide formed on the substrate, a control electrode formed on the substrate and applying a high frequency signal in order to modulate light waves propagating through the optical waveguide, and a relay substrate provided with a relay line in order to transfer the high frequency signal to the control electrode, in which the control electrode and the relay line together have a coplanar line structure inclusive of at least electrical connection portions of both the control electrode and the relay line, the control electrode includes an electrical connection portion of the control electrode and a routing portion positioned between the electrical connection portion of the control electrode and an active portion applying an electrical field to the optical waveguide, the routing portion has a coplanar line structure, and a distance G2 between ground electrodes sandwiching a signal electrode in the electrical connection portion of the control electrode is substantially equal to a distance G1 between ground electrodes sandwiching a signal electrode of the routing portion. Therefore, discontinuity of a current path in the electrical connection between the control electrode of the optical modulator and the relay line of the relay substrate is eliminated, and thus it is possible to reduce a propagation loss of the high frequency signal.

(14) As described above, according to the present disclosure, it is possible to provide an optical modulator in which a propagation loss of a high frequency signal in electrical connection between a control electrode of the optical modulator and a relay line of a relay substrate is reduced.

(15) It will be apparent to those skilled in the art that various modifications and variations can be made to the disclosed embodiments without departing from the scope or spirit of the disclosure. In view of the foregoing, it is intended that the disclosure covers modifications and variations provided that they fall within the scope of the following claims and their equivalents.