Storage circuit provided with variable resistance type elements, and its test device
11705176 · 2023-07-18
Assignee
Inventors
Cpc classification
G11C29/24
PHYSICS
G11C2013/0042
PHYSICS
G11C7/062
PHYSICS
G11C29/04
PHYSICS
G11C2013/0054
PHYSICS
International classification
Abstract
A storage circuit includes: the array of a memory cell MC including a variable-resistance element; a conversion circuit that converts the resistance value of each memory cell into the signal level of an electric signal; a reference signal generation circuit that generates a reference signal common to a plurality of columns; a correction circuit that corrects one of the signal level of the reference signal and the signal level of the electric signal for each column of the array of the memory cell; and an RW circuit that determines data stored in the memory cell belonging to a corresponding column by comparing one of the reference level and the signal level of the electric signal, corrected by the correction circuit, and the other of the reference level and the signal level of the electric signal.
Claims
1. A storage circuit comprising: a memory cell array comprising a plurality of memory cells arranged in a matrix-form, each of the memory cells comprising a variable-resistance element; a selection circuit that selects a memory cell in the memory cell array; a conversion circuit that converts a resistance value of the memory cell selected by the selection circuit into an electric signal; a reference signal generation circuit that generates a reference signal for determining data stored in the memory cell selected by the selection circuit; sense amplifiers each of which is arranged in a respective column of the memory cell array, and compares a respective electric signal with the reference signal, to determine the data stored in the memory cell selected by the selection circuit; a correction data storage that stores correction data for correcting, for each of the sense amplifiers, one of the respective electric signal and the reference signal for determining the data stored in the memory cell selected by the selection circuit; and correction circuits each of which is provided for respective sense amplifier and corrects one of the respective electric signal and the reference signal based on respective correction data; wherein the correction data storage stores digital correction data for each of the sense amplifiers; the correction circuits comprise: digital to analog (D/A) circuits each of which is provided for a respective sense amplifier, and converts a respective digital correction data stored in the correction data storage to an analog correction signal; and adder circuits each of which is provided for a respective sense amplifier, adds the analog correction signal output from the respective D/A circuit, to one of the respective electric signal and the reference signal, and supplies the resultant signal to the respective one of sense amplifies.
2. A storage circuit comprising: a memory cell array comprising a plurality of memory cells arranged in a matrix-form, each of the memory cells comprising a variable-resistance element; a selection circuit that selects a memory cell in the memory cell array; a conversion circuit that converts a resistance value of the memory cell selected by the selection circuit into an electric signal; a reference signal generation circuit that generates a reference signal for determining data stored in the memory cell selected by the selection circuit; sense amplifiers each of which is provided for a respective column of the memory cell array, and compares respective electric signals with respective reference signals, to determine the data stored in the memory cell selected by the selection circuit; a correction data storage that stores correction data for correcting, for each of the sense amplifiers, one of the respective electric signal and the reference signal for determining the data stored in the memory cell selected by the selection circuit; and correction circuits each of which corrects one of the respective electric signals and the reference signal based on a respective correction data, and supplies a corrected signal to respective sense amplifier; wherein each of the correction circuit comprises, a digital to analog (D/A) circuit that converts the digital correction data stored in the correction data storage to the analog correction signal; and an amplifier circuit that amplifies one of the respective electric signal and the reference signal by an amplification factor corresponding to the analog correction signal, and supplies the amplified signal to the respective sense amplifier.
3. A storage circuit, comprising: a memory cell array comprising a plurality of memory cells arranged in a matrix-form, each of the memory cell comprising a variable-resistance element; a selection circuit that selects the memory cell in the memory cell array; a conversion circuit that converts a resistance value of the memory cell selected by the selection circuit into an electric signal; a reference signal generation circuit that generates a reference signal for determining data stored in the memory cell selected by the selection circuit; sense amplifiers each of which is provided for a respective column of the memory cell array, and compares a respective electric signal with the reference signal, to determine the data stored in the memory cell selected by the selection circuit; a correction data storage that stores correction data for correcting, for each of the sense amplifiers, a physical property for determining the data stored in the memory cell selected by the selection circuit; and a correction circuit that corrects the physical property based on the correction data, for each sense amplifier; wherein the correction circuit comprises an amplifier circuit that amplifies one signal of the electric signal and the reference signal by an amplification factor based on the correction data stored in the correction data storage, the amplifier circuit comprises: an operational amplifier; and an amplification factor change circuit that changes at least one of a resistance value between an output terminal and negative input terminal of the operational amplifier, and a resistance value between the reference voltage and the negative input terminal of the operational amplifier, based on the correction data.
4. A storage circuit comprising: a memory cell array comprising a plurality of memory cells arranged in a matrix-form, each of the memory cells comprising a variable-resistance element; a selection circuit that selects the memory cell in the memory cell array; a conversion circuit that converts a resistance value of the memory cell selected by the selection circuit into an electric signal; a reference signal generation circuit that generates a reference signal for determining data stored in the memory cell selected by the selection circuit; sense amplifiers each of which is provided for respective column of the memory cell array, and compares a respective electric signal with the reference signal, to determine the data stored in the memory cell selected by the selection circuit; a correction data storage that stores correction data for correcting, for each of the sense amplifiers, a physical property for determining the data stored in the memory cell selected by the selection circuit; and a correction circuit that corrects the physical property based on the correction data stored in the correction data storage, for each sense amplifier; wherein the correction circuit comprises a dividing resistance changer that corrects an electric signal output from the conversion circuit by changing a resistance value between a first reference voltage and one end of each memory cell, and a resistance value between each memory cell and a second reference voltage, based on the correction data.
5. The storage circuit according to claim 4, wherein the correction circuit comprises a plurality of transistors that electrically connects between the first reference voltage and one end of each memory cell, the plurality of transistors being turned on/off based on the correction data stored in the correction data storage.
6. The storage circuit according to claim 5, wherein the correction circuit comprises resistance elements that are serially connected to current paths of the plurality of transistors.
7. A testing device for testing a storage circuit, the storage circuit having: a memory cell array comprising a plurality of memory cells arranged in a matrix-form, each of the memory cells comprising a variable-resistance element; a selection circuit that selects the memory cell in the memory cell array; a conversion circuit that converts a resistance value of the memory cell selected by the selection circuit into an electric signal; a reference signal generation circuit that generates a reference signal for determining data stored in the memory cell selected by the selection circuit; sense amplifiers each of which is provided for a respective column of the memory cell array, and compares a respective electric signal with a respective reference signal, to determine the data stored in the memory cell selected by the selection circuit; a correction data storage that stores correction data for correcting, for each of the sense amplifiers, a physical property for determining the data stored in the memory cell selected by the selection circuit; and a correction circuit that corrects the physical property based on the correction data stored in the correction data storage, for each sense amplifier; wherein the testing circuit comprises a write circuit, a readout circuit, a determiner and a setter; the write circuit writes first data having a first value into each of the memory cells; the readout circuit reads out stored data from each of the memory cells for each of the correction data while changing correction quantity corresponding to the correction data by controlling the correction circuit, the determiner determines whether or not the stored first data can be correctly read out, for each of the correction data, the write circuit writes second data different from the first data into each of the memory cells; the read circuit reads out stored data from each of the memory cells for each of the correction data while changing correction quantity corresponding to the correction data by controlling the correction circuit, the determiner determines whether or not the stored second data can be correctly read out, for each of the correction data, and the setter selects adequate correction data for each of the sense amplifiers based on the determination results obtained by the determiner, and sets selected correction data for each of the sense amplifiers into the correction memory.
8. The testing device according to claim 7, wherein the setter sets, in the correction memory, the correction data, with which it has been determined that all first and second data stored in the memory cells in each column can be correctly read out, based on the result of the determination, by the unit of the column of the matrix of the memory cells.
9. The testing device according to claim 7, wherein the storage circuit comprises a column of redundant memory cells, and the setter performs setting so that an access to a defective memory cell is replaced with an access to one of the redundant memory cells based on the result of the determination by the determiner.
10. The storage circuit according to claim 1, wherein each respective electric signal and respective reference signal comprises a voltage signal, each of the D/A circuits converts the correction data read from the correction data storage, to an analog voltage signal having one of a plurality of positive voltages, zero voltage, and a plurality of negative voltages, each of the adding circuits is provided for one of the respective sense amplifiers, and adds the voltage signal output from the D/A circuit to one of the respective electrical signal and the respective reference signal.
11. The storage circuit according to claim 1, wherein each respective electric signal and respective reference signal comprises a current signal, each of the D/A circuits converts the correction data read from the correction data storage, to an analog voltage signal having one of a plurality of positive voltages, a zero voltage, and a plurality of negative voltages, each of the adding circuits comprises: a current generator which generates a correction current having a polarity and volume corresponding the analog voltage signal output from the D/A circuit, and a circuit which adds the correction current to one of the respective electric signal and the respective reference signal.
12. The storage circuit according to claim 2, wherein each of the respective electric signal and the respective reference signal comprises a voltage signal, each of the D/A circuits converts the correction data read for the correction data storage, to an analog correction voltage signal, each of the amplifier circuits is provided for one of the respective sense amplifiers, and amplifies one of the respective electric signal and the respective reference signal by an amplification factor corresponding to the analog correction voltage signal output from the D/A circuit.
13. The storage circuit according to claim 2, wherein each of the respective electric signals and the respective reference signals comprises a current signal, each of the D/A circuits converts the correction data read from the correction data storage, to an analog correction voltage signal, each of the amplification circuits is provided for one of the respective sense amplifiers, and amplifies one of the respective electric signal and the respective reference signal by an amplification factor corresponding to the analog correction voltage signal.
14. The storage circuit according to claim 10, wherein each of the sense amplifiers includes an input transistor circuit which includes a first and second MOS transistors, the first MOS transistor receives the electrical voltage signal or the corrected electrical voltage signal at a gate thereof, and the second MOS transistor receives the corrected reference voltage signal or the reference voltage signal at a gate thereof.
15. The storage circuit according to claim 12, wherein each of the sense amplifiers includes an input transistor circuit which includes a first and second MOS transistors, the first MOS transistor receives the electrical voltage signal or the corrected electrical voltage signal at a gate thereof, and the second MOS transistor receives the corrected reference voltage signal or the reference voltage signal at a gate thereof.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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EMBODIMENTS
(32) A storage circuit 11 according to an embodiment of the present disclosure will be described below with reference to the drawings. The storage circuit 11 of the present embodiment is a storage circuit in which a reference voltage used in a sense amplifier arranged in each column of a memory cell array can be corrected and optimized for each column.
(33) As illustrated in
(34) The memory cell array 21 includes memory cells MC.sub.ij (i=1 to m, j=1 to n) arrayed in a matrix form of m rows and n columns. Each of m and n is a natural number.
(35) The redundant memory cell array 22 is arranged adjacently in the column direction of the memory cell array 21, and includes redundant memory cells RMC.sub.ij (i=1 to m, j=1 to N) arrayed in a matrix form of m rows and N columns. The case of N=1, that is, an example in which the redundant memory cells RMC are arrayed in a matrix form of m rows and one column is illustrated in
(36) The reference cell array 23 is arranged adjacently in the column direction of the redundant memory cell array 22. The reference cell array 23 includes:
(37) reference cells RC.sub.i (i=1 to m) arrayed in a matrix form of m rows and one column;
(38) and a common fixed resistance FR.
(39) The memory cells MC.sub.ij, the redundant memory cells RMC.sub.i, and the reference cells RC.sub.i each include a magnetic tunneling junction (MTJ) element which is an example of a variable-resistance element, and have the same configuration and characteristics as each other. The details thereof will be described later with reference to
(40) The positions, in the row direction on a semiconductor substrate, of the memory cells MC.sub.ij, the redundant memory cells RMC.sub.i, and the reference cells RC.sub.i, in the row i, are set to be the same as each other.
(41) The RW circuit array 24 includes: an RW circuit 24.sub.j (j=1 to n) arrayed in one row and n columns; and N redundant RW circuits 24.sub.R. In the present embodiment, one redundant RW circuit 24.sub.R is arranged in
(42) Each of the RW circuits 24.sub.j and 24.sub.R has both of a read function and a write function, that is, i) a sense amplifier function of reading out data stored in the memory cell MC.sub.ij or redundant memory cell RMC.sub.i arranged in the same column as that thereof in a read operation, and ii) a function of writing data in the memory cell MC.sub.ij or redundant memory cell RMC.sub.i arranged in the same column as that thereof in a write operation. The details of the RW circuits 24.sub.j and the redundant RW circuits 24.sub.R will be described later. In the following discussion, the RW circuit 24.sub.j and the redundant RW circuit 24.sub.R may be collectively referred to as “RW circuits 24”.
(43) One end of the current path (source-drain path) of the selection transistor ST.sub.ij is connected to one end of memory cell MC.sub.ij included in the memory cell array 21. The other end of the current path of the selection transistors ST.sub.ij in the column j is connected in common to a source line SL.sub.j arranged in the column j. The selection transistor ST.sub.ij includes an NMOS transistor, the drain thereof is connected to one end of the corresponding memory cell MC.sub.ij, and the source thereof is connected to the source line SL.sub.j.
(44) One end of the source line SL.sub.j is grounded through the current path of a grounding transistor RQ.sub.j. The other end of the source line SL.sub.j is connected to the source line terminal TS of the RW circuit 24.sub.j.
(45) The other end of the memory cell MC.sub.ij in the column j are connected in common to a bit line BL.sub.j arranged in the column j. One end of the bit line BL.sub.j in column j is connected to the bit line terminal TB of the RW circuit 24.sub.j in the column j.
(46) One end of the current path of a load transistor RT.sub.j is connected to the bit line BL.sub.j in the column j. A readout voltage V.sub.R is applied to the other end of the current path of the load transistor RT.sub.j. The load transistor RT.sub.j includes a PMOS transistor, and functions as a load resistance when data is read out.
(47) One end of the current path of redundant selection transistor RST.sub.i is connected to one end of the redundant memory cell RMC.sub.i included in the redundant memory cell array 22. The other end of the current path of each redundant selection transistor RST.sub.i is connected in common to a redundant source line RSL. Each redundant selection transistor RST.sub.i has the same configuration and characteristics as those of the selection transistor ST.sub.ij.
(48) One end of the redundant source line RSL is grounded through the current path of a redundant grounding transistor RRQ. The other end of the redundant source line RSL is connected to the source line terminal TS of the redundant RW circuit 24.sub.R.
(49) The other end of the redundant memory cell RMC.sub.i is connected in common to a redundant bit line RBL. One end of the redundant bit line RBL is connected to the bit line terminal TB of the redundant RW circuit 24.sub.R.
(50) One end of the current path of a redundant load transistor RRT is connected to the redundant bit line RBL. A readout voltage V.sub.R is applied to the other end of the current path of the redundant load transistor RRT. The redundant load transistor RRT has the same configuration as that of the load transistor RT.sub.j.
(51) One end of the current path of selection transistor AT.sub.i is connected to one end of reference cell RC.sub.i included in the reference cell array 23. The other end of the current path of the selection transistor AT.sub.i is connected in common to a reference source line SL.sub.R. The selection transistor AT.sub.i has the same configuration and characteristics as those of the selection transistors ST.sub.ij and RST.sub.i.
(52) One end of the reference source line SL.sub.R is grounded through the current path of a grounding transistor RQ.sub.R. The gate of the grounding transistor RQ.sub.R is pulled up to a readout voltage V.sub.R.
(53) The other end of the reference cell RC.sub.i is connected in common to a reference bit line BL.sub.R. The one end of reference bit line BL.sub.R is connected in common to the reference bit line terminals TR of the RW circuits 24.sub.1 to 24.sub.n and the redundant RW circuit 24.sub.R.
(54) One end of the current path of a reference load transistor RT.sub.R is connected to a position, outside the reference cell array 23, of the reference bit line BL.sub.R. A readout voltage V.sub.R is applied to the other end of the current path of the reference load transistor RT.sub.R. The reference load transistor RT.sub.R functions as a load when data is read out, and has the same configuration and characteristics as those of the load transistors RT.sub.1 to RT.sub.n and RRT.
(55) A fixed resistance FR is inserted between a connection node between the reference bit line BL.sub.R and the reference cell RC.sub.m in the row m, and a connection node between the reference bit line BL.sub.R and the reference load transistor RT.sub.R.
(56) For distinction, i) the portion, closer to the reference memory cell RC.sub.i than the connection node between the reference bit line BL.sub.R and the reference load transistor RT.sub.R, of the reference bit line BL.sub.R is referred to as “first reference bit line BL.sub.R1”, and ii) the portion, closer to the RW circuit array 24 than the connection node between the reference bit line BL.sub.R and the reference load transistor RT.sub.R, of the reference bit line BL.sub.R is referred to as “second reference bit line BL.sub.R2”, in the following description.
(57) The material, thickness, and width of the first reference bit line BL.sub.R1 are equal to those of the bit line BL.sub.j. In contrast, the cross-sectional area (product of thickness and width) of the second reference bit line BL.sub.R2 is formed to be greater than the cross-sectional area of the first reference bit line BL.sub.R1, and the resistance value per unit length of the second reference bit line BL.sub.R2 is less than the resistance value per unit length of the first reference bit line BL.sub.R1.
(58) A low-active read enable signal /RE is applied to the gates of the grounding transistors RQ.sub.j and the redundant grounding transistor RRQ through an inverter INV.
(59) A low-active read enable signal /RE is applied to the gates of the load transistor RT.sub.j, the redundant load transistor RRT, and the reference load transistor RT.sub.R.
(60) The load transistor RT.sub.j, the bit line BL.sub.j, the selection transistor ST.sub.ij, and the grounding transistor RQ.sub.j cooperatively function as an example of a conversion circuit that converts the resistance value of the memory cell MC.sub.ij into a bit line voltage V.sub.bj. In the present embodiment, the resistance value of the memory cell MC.sub.ij is converted into a voltage signal which is an example of an electric signal, and the bit line voltage V.sub.bj is an example of the signal level of an electric signal.
(61) The redundant load transistor RRT, the redundant bit line RBL, the redundant selection transistor RST.sub.i, and the redundant grounding transistor RRQ cooperatively function as an example of a conversion circuit that converts the resistance value of each redundant memory cell RMC.sub.i into a redundant bit line voltage RV.sub.b. The redundant bit line voltage RV.sub.b is an example of a signal level corresponding to the resistance value of each redundant memory cells RMC.sub.i.
(62) The reference load transistor RT.sub.R, the reference bit line BL.sub.R (BL.sub.R1, BL.sub.R2), the selection transistor AT.sub.i, and the grounding transistor RQ.sub.R cooperatively function as an example of a reference signal generation circuit that generates a reference voltage V.sub.ref that corresponds to the combined resistance of the reference memory cells RC.sub.i and the resistance value R.sub.fix of the fixed resistance FR and is common to all sense amplifiers 241. The reference voltage V.sub.ref is an example of the reference level of a reference signal.
(63) The row decoder 31 decodes a row address from a higher-level device which is not illustrated, and sets, at a high level, the voltage of a word line WL.sub.i in a row belonging to a memory cell MC.sub.ij to be accessed.
(64) The column decoder 32 decodes a column address from a higher-level device. According to a read/write control signal, the column decoder 32 i) outputs a high-active readout column selection signal CLR.sub.j to the RW circuit 24.sub.j in a column to which a memory cell MC.sub.ij for readout belongs, and ii) outputs a high-active writing column selection signal CLW.sub.j to the RW circuit 24.sub.j in a column to which a memory cell MC.sub.ij for writing belongs.
(65) The row decoder 31, the column decoder 32, the word lines WL.sub.i, and the selection transistors ST.sub.ij are an example of selection circuits that select the memory cell MC.sub.ij.
(66) According to a read/write control signal from a higher-level device which is not illustrated, the read/write controller 33 i) outputs a low-active read enable signal /RE in common to the gates of the load transistor RT.sub.j and the redundant load transistor RRT, ii) outputs a read enable signal /RE to the gates of the grounding transistor RQ.sub.j and the redundant grounding transistor RRQ through the inverter INV, and further iii) outputs a low-active sense amplifier activating signal to all the RW circuit 24.sub.j and the redundant RW circuit 24.sub.R, in a readout operation. According to the read/write control signal, the read/write controller 33 outputs a low-active write enable signal /WE to all the RW circuit 24.sub.j and the redundant RW circuit 24.sub.R, in a writing operation.
(67) The bit line terminal TB, reference bit line terminal TR, and source line terminal TS of the RW circuit 24.sub.j are connected to the bit line BL.sub.j in the same column as that thereof, the second reference bit line BL.sub.R2 in the same column as that thereof, and the source line SL.sub.j in the same column as that thereof, respectively.
(68) To the RW circuit 24.sub.j, the readout column selection signal CLR.sub.j and the writing column selection signal CLW.sub.j are supplied from the column decoder 32, and the read enable signal /RE, the write enable signal /WE, and a sense amplifier enable signal /SAE are supplied from the read/write controller 33.
(69) When data is read out, the RW circuit 24.sub.j in the column j differentially amplifies the bit line voltage V.sub.bj supplied from the bit line BL.sub.j and the reference voltage V.sub.ref supplied from the second reference bit line BL.sub.R2 in response to the readout column selection signal CLR.sub.j, the read enable signal /RE, and the sense amplifier enable signal /SAE, latches an amplification result (readout data DATA.sub.j), and outputs the amplification result to a bus 25.
(70) When data is written, the RW circuit 24.sub.j in the column j applies a voltage between the bit line BL.sub.j and the source line SL.sub.j to write data in the memory cells MC.sub.ij according to the writing data DATA) supplied from the bus 25 in response to the writing column selection signal CLW.sub.j and the write enable signal /WE.
(71) The redundant RW circuit 24.sub.R basically includes the same configuration as that of the RW circuit 24.sub.j. When data is read out, the redundant RW circuit 24.sub.R differentially amplifies the redundant bit line voltage RV.sub.b supplied from the redundant bit line RBL and the reference voltage V.sub.ref supplied from second reference bit line BL.sub.R2 in response to a readout column selection signal CLR.sub.R, the read enable signal /RE, and the sense amplifier enable signal /SAE, latches an amplification result (readout data DATA), and outputs the amplification result to the bus 25. When data is written, the redundant RW circuit 24.sub.R applies a voltage between the redundant bit line RBL and the reference source line SL.sub.R to write data in the redundant memory cells RMC.sub.i according to the writing data DATA supplied from the bus 25 in response to a writing column selection signal CLW.sub.R and the write enable signal /WE.
(72) The bus 25 is a bus having a bus width of 1 bit.
(73) The memory cell MC.sub.ij, the redundant memory cell RMC.sub.i, and the reference cell RC.sub.i will now be described with reference to
(74) Each memory cell MC.sub.ij includes one two-terminal-type MTJ element M. The MTJ element includes three layers of a pinned (fixed) layer MP, an insulation layer MI, and a free layer MF, as illustrated in
(75) The pinned layer MP and the free layer MF are formed of a material such as a ferromagnetic material (for example, CoFeB) or a ferromagnetic Heusler alloy (for example, Co.sub.2FeAl or Co.sub.2MnSi).
(76) The direction of the magnetization of the pinned layer MP is fixed. Even if a current flows into the layer, the direction of the magnetization of the layer is not changed.
(77) In contrast, the direction of the magnetization of the free layer MF is changeable. When a current flows into the layer, the direction of the magnetization of the layer is changed.
(78) The insulation layer MI is a thin film disposed between the pinned layer MP and the free layer MF. The insulation layer MI includes a material such as, for example, magnesium oxide (MgO), alumina (Al.sub.2O.sub.3), or a spinel single crystal (MgAl.sub.2O.sub.4).
(79) When the direction of the magnetization of the free layer MF is relatively changed with respect to the direction of the magnetization of the pinned layer MP, the resistance value between one end T1 and the other end T2 of the MTJ element M is changed.
(80) In the storage circuit 11 in
(81) As illustrated in
(82) The resistance value R.sub.ap of the MTJ element M in the anti-parallel state is greater than the resistance value R.sub.p of the MTJ element M in the parallel state. The resistance state of the MTJ element M in the anti-parallel state is referred to as “high-resistance state”, while the resistance state of the MTJ element M in the parallel state is referred to as “low-resistance state”.
(83) In the present embodiment, the high-resistance state of the MTJ element M is associated with data “1”, and the low-resistance state of the MTJ element M is associated with data “0”.
(84) In the present embodiment, it is considered that the MTJ element M is in the high-resistance state in a case in which a write current I having not less than a current threshold value flows from the pinned layer MP to the free layer MF, while the MTJ element M is in the low-resistance state in a case in which a write current I having not less than the current threshold value flows from the free layer MF to the pinned layer MP. Accordingly, for writing data “1” in the memory cell MC.sub.ij, it is necessary to allow a current to flow from the pinned layer MP to the free layer MF, that is, from the source line SL.sub.j to the bit line BL.sub.j through the selection transistor ST.sub.ij and the memory cell MC.sub.ij. In contrast, for writing data “0” in the memory cell MC.sub.ij, it is necessary to allow a current from the free layer MF to the pinned layer MP, that is, from the bit line BL.sub.j to the source line SL.sub.j through the memory cell MC.sub.ij and the selection transistor ST.sub.ij.
(85) A reference circuit that generates the reference voltage V.sub.ref will now be described with reference to
(86) The reference circuit includes the reference cell RC.sub.i and the fixed resistance FR common to the reference cell RC.sub.i.
(87) The reference cell RC.sub.i has the same structure (material, size, impurity concentration, and the like) as that of the MTJ element M included in the memory cell MC.sub.ij. However, the reference cell RC.sub.i is set in the low-resistance state (parallel state) in which the directions of the magnetizations of the pinned layer MP and the free layer MF are the same as each other, and stores fixed data. The same configuration does not mean the completely same configuration. It should be understood that a slight structural difference does not have any problem but is included within the same range if both the MTJ elements can achieve the substantially same function and action.
(88) The fixed resistance FR is a high-precision linear resistance. The resistance value R.sub.fix of the fixed resistance FR is set to a value that is more than 0 and less than R.sub.ap−R.sub.p (=R.sub.p×MR ratio). Moreover, the resistance value R.sub.fix of the fixed resistance FR is set to a value that allows a difference between the bit line voltage V.sub.b and reference voltage V.sub.ref transmitted to the positive input terminal and negative input terminal of the sense amplifier in the RW circuit 24, respectively, to be not less than the resolving power of the sense amplifier when stored data is read out from a memory cell MC.
(89) The configuration of the RW circuit 24 will now be described with reference to
(90) As illustrated, the RW circuit 24.sub.j in the column j includes a readout circuit 240.sub.j and a writing circuit 246.sub.j.
(91) The readout circuit 240.sub.j includes a sense amplifier 241.sub.j, a correction memory 242.sub.j, a D-A conversion circuit 243.sub.j, an adder circuit 244.sub.j, and a memory controller 245.sub.j.
(92) One end of the bit line BL.sub.j arranged in the same column as that of the sense amplifier 241.sub.j is connected to the positive input terminal of the sense amplifier 241.sub.j, and the output terminal of the adder circuit 244.sub.j is connected to the negative input terminal of the sense amplifier 241.sub.j.
(93) The sense amplifier 241.sub.j amplifies a difference (V.sub.bj−EV.sub.refj) between the bit line voltage V.sub.bj and the effective bit line voltage EV.sub.refj, where V.sub.bj is the voltage of the bit line BL.sub.j connected to the positive input terminal, and EV.sub.refj is an effective reference voltage supplied from the adder circuit 244.sub.j to the negative input terminal, latches the amplified difference (V.sub.bj−EV.sub.refj), and outputs the latched data. In other words, the sense amplifier 241.sub.j generates and latches data “1” in the case of (V.sub.bj−EV.sub.refj)>0 or data “0” in the case of (V.sub.bj−EV.sub.refj)<0, and outputs the latched data DATA.sub.j of 1 bit to the bus 25.
(94) The correction memory 242.sub.j stores correction data D.sub.j of 3 bits, instructing a correction voltage V.sub.amej. The correction memory 242.sub.j includes rewritable nonvolatile storage elements. The nonvolatile storage elements may be, for example, MTJ elements manufactured with the same manufacturing process as the process of manufacturing the memory cells MC or the like. However, the nonvolatile storage elements and a circuit configuration are optional.
(95) When a writing control signal WC.sub.j and the correction data D.sub.j of 3 bits are supplied from the memory controller 245.sub.j, the correction memory 242.sub.j stores the correction data D.sub.j of 3 bits, and then outputs the stored correction data Dj of 3 bits to the D-A conversion circuit 243.sub.j.
(96) The D-A (digital-analog) conversion circuit 243.sub.j converts, into the analog correction voltage V.sub.amej, the correction data D.sub.j of 3 bits output by the correction memory 242.sub.j, and supplies the analog correction voltage V.sub.amej to the adder circuit 244.sub.j. The correspondence relationship between the correction data D.sub.j and the correction voltage V.sub.amej is set forth in
(97) As illustrated in
(98) The D-A conversion circuit 243.sub.j and the adder circuit 244.sub.j cooperatively convert, into the analog correction voltage V.sub.amej, the correction data D.sub.j of 3 bits output by the correction memory 242.sub.j, and supply the analog correction voltage V.sub.amej to the adder circuit 244.sub.j. The correspondence relationship between the correction data D.sub.j and the correction voltage V.sub.amej is set forth in
(99) The memory controller 245.sub.j receives a memory address from a higher-level device, data, and a writing instruction signal. When the memory controller 245.sub.j is specified by a memory address and a writing control signal is turned on, the memory controller 245.sub.j supplies the supplied correction data D.sub.j and the writing control signal WC.sub.j to the correction memory 242.sub.j to write the correction data D.sub.j in the correction memory 242.sub.j.
(100) The correction memory 242.sub.j is an example of a correction data storage that stores the correction data D.sub.j for correcting a physical property (physical quantity) for determining stored data for respective sense amplifier. The physical property to be corrected in such a case is the reference voltage V.sub.ref corresponding to the magnitude (physical quantity) of a signal input into the sense amplifier 241.sub.j. Moreover, each of the correction memory 242.sub.j, the D-A conversion circuit 243.sub.j, the adder circuit 244.sub.j, and the memory controller 245.sub.j is an example of a correction circuit that corrects the physical property of a reference signal for the sense amplifier circuit. Moreover, the correction memory 242.sub.j and the D-A conversion circuit 243.sub.j is an example of a correction signal generation circuit that generates a correction signal that generates the correction signal.
(101) In the writing circuit 246.sub.j, the bit line BL.sub.j is connected to an output terminal Tout1, and the source line SL.sub.j is connected to an output terminal Tout2. Moreover, the write enable signal /WE and the writing column selection signal CLW.sub.j are supplied to the writing circuit 246.sub.j. Moreover, the writing data DATA.sub.j is supplied from the bus 25 to the data terminal TD of the writing circuit 246.
(102) When the write enable signal /WE is at a low level and the writing column selection signal CLW.sub.j specifies the column to which the writing circuit 246.sub.j belongs, the writing circuit 246.sub.j controls a voltage between the output terminal Tout1 and the output terminal Tout2 in accordance with the writing data DATA.sub.j supplied from the bus 25, to write data in the memory cell MC.sub.ij to be accessed. Specifically, the writing circuit 246.sub.j applies a first voltage V1 to the output terminal Tout2 and a second voltage V2 that is lower than the first voltage V1 to the output terminal Tout1, to flow a current through output terminal Tout2.fwdarw.bit line BL.sub.j.fwdarw.selected memory cell MC.sub.ij.fwdarw.selection transistor ST.sub.ij that is turned on.fwdarw.source line SL.sub.j.fwdarw.output terminal Tout1, and writes data “0” in the memory cell MC.sub.ij, as illustrated in
(103) The redundant RW circuit 24.sub.R has the same configuration and function as those of the RW circuit 24.sub.j.
(104) The operations of the storage circuit 11 having the configuration described above will now be described.
(105) First, a readout operation will be described with reference to timing charts in
(106) Here, to facilitate understanding, the readout operation is described by taking, as an example, an operation with a page mode in which data stored in a plurality of memory cells MC in the same row is read out in turn. A row for the readout is regarded as the row 1, and the stored data is read out in order of memory cell MC.sub.11 in row 1 and column 1.fwdarw.memory cell MC.sub.12 in row 1 and column 2.fwdarw. . . . .fwdarw.memory cell MC.sub.1n in row 1 and column n.
(107) Moreover, the correction data D.sub.j with a suitable value has been stored in the correction memory 242.sub.j included in the readout circuit 240.sub.j of each RW circuit 24. The manner of the storage will be described later.
(108) First, to perform the readout, the read/write controller 33 sets the read enable signal /RE at a low level which is an active level, as illustrated in
(109) All of the load transistors RT.sub.1 to RT.sub.n, the redundant load transistor RRT, and the reference load transistor RT.sub.R are turned on in response to setting of the read enable signal /RE at the low level. As a result, all of the bit lines BL.sub.1 to BL.sub.n, the redundant bit line RBL, and the reference bit line BL.sub.R are charged in the readout voltage V.sub.R, as illustrated in
(110) Moreover, the inverted signal of the read enable signal /RE is supplied to the gates of the grounding transistors RQ.sub.1 to RQ.sub.n and the redundant grounding transistor RRQ to turn on the grounding transistors RQ.sub.1 to RQ.sub.n and the redundant grounding transistor RRQ. As a result, all of the source lines SL.sub.1 to SL.sub.n, redundant source line RSL, and reference source line SL.sub.R become a ground level.
(111) Moreover, all the RW circuits 24.sub.1 to 24.sub.n and the redundant RW circuit 24.sub.R become a read mode, and the sense amplifiers 241 of the interiors thereof become a standby state.
(112) Subsequently, the row decoder 31 sets the voltage of the word line WL.sub.1 at a high level and maintains the voltages of the other word lines WL at a low level to access the memory cell MC.sub.1j in the row 1, as illustrated in
(113) Then, a current flows through load transistor RT.sub.j.fwdarw.bit line BL.sub.j.fwdarw.memory cell MC.sub.ij in row 1.fwdarw.selection transistor ST.sub.1j in row 1.fwdarw.source line SL.sub.j.fwdarw.grounding transistor RQ.sub.j.fwdarw.grounding, in each column. Therefore, the bit line voltage V.sub.bj depending on the resistance value of the memory cell MC.sub.1j is generated at the bit line BL.sub.j, as illustrated in
(114) Moreover, a current flows through reference load transistor RT.sub.R.fwdarw.fixed resistance FR.fwdarw.first reference bit line BL.sub.R1.fwdarw.reference cell RC.sub.1 in row 1.fwdarw.selection transistor AT.sub.1 in row 1.fwdarw.reference source line SL.sub.R.fwdarw.grounding transistor RQ.sub.R.fwdarw.grounding, and the reference voltage V.sub.ref depending on the sum (combined resistance) of the resistance value of the reference cell RC.sub.1 and the resistance value of the fixed resistance FR is generated in the first reference bit line BLR.sub.1, as illustrated in
(115) The adder circuit 244.sub.j adds the correction voltage V.sub.amej supplied from the D-A conversion circuit 243.sub.j, to the reference voltage V.sub.ref supplied through the reference bit line terminal TR, to obtain the effective reference voltage EV.sub.refj, in the interior of each RW circuit 24.sub.j and the redundant RW circuit 24.sub.R. In other words, the adder circuit 244.sub.j corrects the reference voltage V.sub.ref common to all the sense amplifiers 241 to the effective reference voltage EV.sub.refj for the column j by adding the correction voltage V.sub.amej corresponding to a correction quantity suitable for the column j. The effective reference voltage EV.sub.refj is equivalent to a reference voltage optimal for determining data stored in the plurality of memory cells MC.sub.ij connected to the bit line BL.sub.j in the column.
(116) Here, the read/write controller 33 sets the sense amplifier enable signal /SAE at a low level (active), as illustrated in
(117) The sense amplifiers 241.sub.j in all the columns and redundancy columns differentially amplify the bit line voltage V.sub.bj and the effective reference voltage EV.sub.refj in parallel in response to the fall of the sense amplifier enable signal /SAE, and latch the amplified data.
(118) The column decoder 32 decodes a column address, and sets the readout column selection signals CLR.sub.1 to CLR.sub.n at high levels in turn according to a read/write control signal, as illustrated in
(119) Afterward, a similar operation is repeated according to the row and column addresses of a memory cell MC for readout.
(120) Without limitation to the readout of stored data in a page mode, it is also possible to switch row and column addresses in turn, access a memory cell MC, and read out the stored data.
(121) Here, it is assumed that the memory cell MC.sub.1k in the row 1 and the column k (k is any of 1 to n) of the memory cell array 21 is defective, and the memory cell MC.sub.1k in the row 1 and the column k is replaced with the redundant memory cell RMC.sub.1 in advance. In such a case, the row and column addresses of the defective memory cell MC.sub.1k are registered as addresses targeted for replacement in the row decoder 31 and the column decoder 32, and the row and column addresses of the redundant memory cell RMC.sub.1 are registered as addresses destined for replacement in advance. The way of the registration will be described later.
(122) When the row and column addresses specify the row 1 and the column k, the row decoder 31 sets the word line WL.sub.1 in the row 1 at a high level, and the column decoder 32 sets the readout column selection signal CLR.sub.R that selects a redundancy column at a high level while maintaining the readout column selection signal CLR.sub.k at a low level, according to the setting.
(123) As described above, the sense amplifier 241.sub.R differentially amplifies the redundant bit line voltage RV.sub.b and the effective reference voltage EV.sub.refR in response to the fall of the sense amplifier enable signal /SAE, and latches the amplified data.
(124) Subsequently, when the column address specifies the column k, the column decoder 32 sets the readout column selection signal CLR.sub.R that selects a redundancy column at a high level while maintaining the readout column selection signal CLR.sub.k at a low level. As a result, the sense amplifier 241.sub.R in the redundancy column outputs the latched readout data DATA onto the bus 25.
(125) In such a manner, data stored in each memory cell MC.sub.ij is determined and read out based on the effective reference voltage EV.sub.refj. Moreover, the defective memory cell MC.sub.ij is replaced with the redundant memory cell RMC.sub.j, and stored data is read out from the redundant memory cell RMC.sub.j.
(126) It is difficult to set a reference voltage V.sub.ref suitable for determining data stored in memory cells MC in a plurality of columns, as described with reference to
(127) It is also conceivable that a reference voltage generation circuit is provided in each column of a memory cell array to optimize the reference voltage V.sub.ref for each column. However, the size of the reference voltage generation circuit is too large in such a method. In the present embodiment, the effective reference voltage EV.sub.refj in each column can be relatively easily set in the relatively small size of the circuit.
(128) Moreover, the sense amplifier 241 of the present embodiment also has an offset voltage ΔV.sub.offset as described in the section of Background, and fluctuates or varies between the sense amplifiers 241. If any measures are not taken, stored data may be mistakenly determined due to variations in the offset voltage ΔV.sub.offset. In contrast, in the present embodiment, the correction voltage V.sub.ame can be set for each sense amplifier 241, to substantially cancel out the offset voltage. Accordingly, it is possible to suppress false determination due to the variations in the offset voltage ΔV.sub.offset.
(129) In the present embodiment, the reference cell RC.sub.i in the row i and the memory cell MC.sub.ij in the row i are arranged at the same position in the row direction. Therefore, the position of the accessed reference cell RC.sub.i is changed with the position in the row direction of the memory cell MC.sub.ij to be accessed. Therefore, the reference voltage V.sub.ref is also changed in response to a change in bit line voltage V.sub.bj due to a change in the position in the row direction of the memory cell MC.sub.ij to be accessed. Accordingly, data from the memory cell MC.sub.ij can be precisely read out.
(130) The writing operation of the storage circuit 11 will now be described. Here, it is assumed that data is written in the memory cell MC.sub.ij in the row i and the column j.
(131) First, the read/write controller 33 sets the write enable signal /WE at a low level according to a read/write control signal.
(132) The row decoder 31 decodes a row address, and sets, at a high level, the voltage of the word line WL.sub.i in the row i to which the memory cell MC.sub.ij to be written belongs.
(133) Moreover, the column decoder 32 decodes a column address, and supplies the writing column selection signal CLW.sub.j to the RW circuit 24.sub.j in the column j to which the memory cell MC.sub.ij to be written belongs.
(134) Moreover, a higher-level device outputs “1” or “0” as the writing data DATA.sub.j of 1 bit onto the bus 25. The data is transmitted to all the writing circuits 246.
(135) The writing circuit 246.sub.j executes a write operation in response to the write enable signal /WE at the low level and the writing column selection signal CLW.sub.j at the high level, and sets the voltage of the output terminal Tout2 at the first voltage V1 at a high level and the voltage of the output terminal Tout1 at the second voltage V2 at a low level in a case in which the writing data DATA.sub.j is “0”. As a result, a write current I flows through output terminal Tout2.fwdarw.bit line BL.sub.j memory cell MC.sub.ij.fwdarw.selection transistor ST.sub.ij.fwdarw.source line SL.sub.j.fwdarw.output terminal Tout1, and data “0” is written in the memory cell MC.sub.ij. The writing circuit 246.sub.j sets the voltage of the output terminal Tout2 at the second voltage V2 at the low level and the voltage of the output terminal Tout1 at the first voltage V1 at the high level in a case in which the writing data is “1”. As a result, the write current I flows through output terminal Tout1.fwdarw.source line SL.sub.j.fwdarw.selection transistor ST.sub.ij.fwdarw.memory cell MC.sub.ij.fwdarw.bit line BL.sub.j.fwdarw.output terminal Tout2, and data “1” is written in the memory cell MC.sub.ij.
(136) Here, it is assumed that the memory cell MC.sub.ik in the row i and the column k (k is any of 1 to n) of the memory cell array 21 is defective, and is replaced with the redundant memory cell RMC.sub.i in advance. In such a case, the column decoder 32 is set to set the writing column selection signal CLW.sub.R that selects a redundancy column at a high level while maintaining the writing column selection signal CLW.sub.k at a low level when the defective memory cell MC.sub.ik is specified.
(137) When the column address specifies the column k which is a defect column, the column decoder 32 sets the writing column selection signal CLW.sub.R that selects a redundancy column at a high level while maintaining the writing column selection signal CLW.sub.k at the low level, according to the setting. The writing circuit 246R executes the write operation to write the writing data DATA.sub.j in the redundant memory cell RMC.sub.i in response to the write enable signal /WE at the low level and the writing column selection signal CLW.sub.R at the high level.
(138) A method of setting the correction data D.sub.j in the correction memory 242.sub.j in the readout circuit 240.sub.j of each RW circuit 24.sub.j to generate the suitable effective reference voltage EV.sub.refj for each column will now be described. This setting process is performed in, for example, an operation of testing a semiconductor chip including the storage circuit 11 after the manufacturing of the storage circuit 11.
(139) First, a testing device that executes the testing operation will be described.
(140) As illustrated in
(141) When the testing device 100 is connected, the row decoder 31 outputs, on an as-is basis, a row address supplied from the testing device 100, the column decoder 32 outputs, on an as-is basis, a column address supplied from the testing device 100, and the read/write controller 33 outputs, on an as-is basis, the sense amplifier enable signal /SAE, read enable signal /RE, and write enable signal /WE supplied from testing device 100. When the address of each of the memory controllers 245.sub.1 to 245.sub.n, and 245.sub.R is specified, each of the memory controllers 245.sub.1 to 245.sub.n, and 245.sub.R outputs the correction data D.sub.j and writing control signal WC.sub.j, supplied from the testing device 100, to the correction memory 242.sub.j on an as-is basis.
(142) The testing device 100 includes a CPU 101, a memory 102, an interface (I/F) 103, an auxiliary storage device 104, and an input-output device (I/O device) 105, as illustrated in
(143) The central processing unit (CPU) 101 executes a test program stored in the memory 102, and executes evaluation and testing processes described later.
(144) The memory 102 includes a random access memory (RAM), a read only memory (ROM), and/or the like, stores the test program executed by the CPU 101, and functions as the working memory of the CPU 101.
(145) The interface (I/F) 103 is connected to the row decoder 31, column decoder 32, and read/write controller 33, of the storage circuit 11 to be tested, each of the memory controllers 245.sub.1 to 245.sub.n, and 245.sub.R, and the bus 25, and transmits and receives a signal.
(146) The auxiliary storage device 104 includes a flash memory, a hard disk device, and/or the like, and stores the intermediate data of the test, and a test result, for example, a corrigendum illustrated as an example in
(147) The I/O device 105 includes an input device, a display device, and the like, and functions as a user interface.
(148) The operation in which the testing device 100 tests the storage circuit 11 will now be described.
(149) The testing operation generally includes a corrigendum generation process illustrated in
(150) The corrigendum generation process is a process of determining whether or not data stored in the memory cell MC.sub.ij and the redundant memory cell RMC.sub.i can be correctly read out for a plurality of correction voltages, and of generating a corrigendum indicating the results thereof. The evaluation process is a process in which suitable correction data D.sub.j is set in the correction memory 242.sub.j according to each column on the basis of the generated corrigendum. The processes will be described in turn below.
(151) First, the I/F 103 of the testing device 100 is connected to the storage circuit 11, as illustrated in
(152) A person responsible for the test operates the I/O device 105 to instruct the corrigendum generation process to be started. In response to the instruction, the CPU 101 starts the execution of the test program stored in the memory 102, and starts the corrigendum production process illustrated in the flow chart in
(153) First, the CPU 101 controls the read/write controller 33, the column decoder 32, and the row decoder 31 to write bit data “1” in all the memory cells MC.sub.ij and all the redundant memory cells RMC.sub.i in turn (step S11). Collective writing by magnetic writing may be used as the writing. It is assumed that data “0” is stored in the reference cells RC.sub.i in advance.
(154) Then, the CPU 101 sets the read enable signal /RE at a low level which is an active level and the sense amplifier enable signal /SAE at a low level which is an active level (step S12).
(155) Then, the CPU 101 sets a column pointer j=1 (step S13) and a row pointer i=1 (step S14).
(156) Then, the CPU 101 determines whether or not the data “1” stored in the selected memory cell MC.sub.ij can be correctly read out for each of correction voltages V.sub.amej in seven phases, that is, a plurality of correction quantities (step S15). The execution of step S15 allows the CPU 101 to function as a determiner.
(157) Specific explanation will be given with reference to
(158) The CPU 101 writes correction data D.sub.j “000” in the correction memory 242 through the selected memory controller 245.sub.j in the column j (step S22). As a result, the D-A conversion circuit 243.sub.j outputs a correction voltage V.sub.amej of 0 mV. The adder circuit 244.sub.j sets the effective reference voltage EV.sub.refj at (V.sub.ref+0 mV). The sense amplifier 241.sub.j compares the bit line voltage V.sub.bj of the bit line BL.sub.j in the column j with the effective reference voltage EV.sub.refj, and determines and latches read-out data. The sense amplifier 241.sub.j outputs the latched data DATA.sub.j to the bus 25.
(159) The CPU 101 sets correction data D.sub.j, stands by for a certain period of time until the output data is stable, subsequently fetches the data output from the bus 25 through the I/F 103 (step S23), and determines whether or not the read-out data is “1” (step S24). When the read-out data is “1” and correct (step S24: Yes), the CPU 101 registers “correct” in the corrigendum (step S25). When the read-out data is “0” and incorrect (step S24: No), the CPU 101 registers “incorrect” in the corrigendum (step S26).
(160) Then, the CPU 101 determines whether or not the process for all of the seven items of the correction data D.sub.j is ended (step S27). When the process is not ended (step S27: No), one unprocessed item of the correction data D.sub.j, for example, “001” is selected and set in the correction memory 242.sub.j to update the correction data D.sub.j (step S28). Then, the control returns to step S23, and a similar process is repeated.
(161) When the process is ended for the seven items of the correction data D.sub.j, a corrigendum indicating a correction voltage V.sub.amej at which it is possible to correctly read out the stored data “1” and a correction voltage V.sub.amej at which it is impossible to correctly read out the stored data “1” is formed for the selected memory cell MC.sub.ij.
(162) Then, in step S27, it is determined that all the items of the correction data D.sub.j have been processed (step S27: Yes), and the control goes to step S16 in
(163) In step S16, the CPU 101 determines whether or not the process of generating the corrigendum is ended for all the currently selected memory cells MC.sub.ij or redundant memory cells RMC.sub.i in the column j.
(164) When the process is not ended (step S16: No), a row pointer i is updated (+1) (step S17), the control is allowed to return to step S15, a process similar to the process described above is executed for the next memory cell MC.sub.ij.
(165) In such a manner, a corrigendum is generated in turn for each selected memory cell MC.sub.ij in the column j in the auxiliary storage device 104, as illustrated in
(166) When the corrigendum is generated for all the selected memory cells MC.sub.ij or redundant memory cells RMC.sub.i in the column j or the redundancy column, it is determined that the corrigendum in the column j is completed in step S16 (step S16: Yes), and the process goes to step S18.
(167) In step S18, it is determined whether or not the process is ended for all the columns of the memory cells MC.sub.ij and the redundant memory cells RMC.sub.i.
(168) When an unprocessed column remains (step S18: No), the column pointer j is updated (step S19), the process returns to step S14, and the operation described above is repeated. It is assumed that the CPU 101 basically sets the column pointer j=j+1 in step S19. However, when the updated column pointer is (m+1), j=the column 1 of the redundant memory cell array 22 is set.
(169) The corrigendum indicating the correction voltages V.sub.amej at which it is possible or impossible to correctly read out stored data “1” is completed for all the memory cells MC.sub.ij and the redundant memory cells RMC.sub.i in the auxiliary storage device 104, as illustrated in
(170) Then, in step S18, it is determined that the process is ended for all the columns of the memory cell array 21 and the redundant memory cell array 22 (step S18: Yes), and the control goes to step S20.
(171) In step S20, bit data “0” is written in all the memory cells MC.sub.ij and the redundant memory cells RMC.sub.i, and operations similar to those in steps S12 to S19 are subsequently repeated, whereby a corrigendum for the readout data “0” is generated as illustrated in
(172) The corrigenda as illustrated in
(173) Subsequently, the CPU 101 starts the evaluation process of setting the correction data D.sub.j, illustrated in
(174) First, the CPU 101 sets the column pointer j at 1 (step S31).
(175) Then, it is determined whether correction data D.sub.j in which both data “1” and “0” can be correctly read is present for all the memory cells MC.sub.1j to MC.sub.mj in the column j with reference to the corrigenda illustrated in
(176) For example, for the memory cell MC.sub.11, data “1” can be correctly read out at correction voltage V.sub.ame1=+12 my to −8 my, and data “0” can be correctly read out at correction voltage V.sub.ame1=+4 mV to −12 mV, in examination with reference to the corrigenda in
(177) In consideration of only the memory cells MC.sub.11, MC.sub.21, and MC.sub.31 in the corrigenda in
(178) When it is determined that a correction quantity, that is, a correction voltage V.sub.amej, at which stored data can be appropriately determined, is present for all the memory cells MC.sub.ij in the column j, the CPU 101 sets correction data D.sub.j corresponding to the correction voltage V.sub.amej in the correction memory 242.sub.j (step S33). In other words, the CPU 101 functions as a setter, and sets a suitable correction quantity in the correction memory according to each column.
(179) In consideration of only the memory cells MC.sub.11, MC.sub.21, and MC.sub.31 in the corrigenda in
(180) When an odd number of correction voltages V.sub.amej at which stored data can be appropriately determined are specified for all the memory cells MC.sub.ij in the column j, correction data D.sub.j in which the median correction voltage thereof can be obtained is set. When an even number of correction voltages V.sub.amej at which stored data can be correctly determined are specified for all the memory cells MC.sub.ij in the column j, one of the two medians thereof is set based on an error rate and/or the like so that the maximum operation margin is achieved.
(181) In consideration of only the memory cells MC.sub.11, MC.sub.21, and MC.sub.31 in the corrigenda in
(182) Then, the CPU 101 determines whether or not the process is ended for all the columns of the memory cell array 21 and the redundant memory cell array 22 (step S34).
(183) When an unprocessed column remains (step S34: No), the column pointer j is updated (step S35), the process returns to step S32, and the operation described above is repeated. In step S35, the CPU 101 basically sets the column pointer j=j+1. However, when the updated column pointer is (m+1), j=column 1 of redundant memory cell array 22 is set.
(184) In such a manner, the CPU 101 sets the correction data D.sub.j instructing a correction quantity, that is, the correction voltage V.sub.amej in the correction memory 242.sub.j for the normal column j.
(185) When it is determined that any correction voltage V.sub.amej at which stored data can be appropriately determined is not present for all the memory cells MC.sub.ij or the redundant memory cells RMC.sub.i in the column j in step S32 (step S32: No), a column number is recorded as a defective column (step S36), and the process goes to step S34.
(186) When it is determined that the process is ended for all the columns in step S34 (step S34: Yes), the CPU 101 specifies a defective memory cell included in the defective column recorded in step S36 (step S37). Specifically, a memory cell MC in which it is impossible to correctly read out stored data at any correction voltage V.sub.amej is regarded as the defective memory cell.
(187) Then, it is determined whether or not the specified defective memory cell can be replaced with a redundant memory cell (step S38). For example, it is determined that it is possible to replace the defective memory cell when a redundant memory cell in the same row as that of the defective memory cell has not been used, and it is determined that it is impossible to replace the defective memory cell when a redundant memory cell in the same row as that of the defective memory cell has been already used or is a defective cell.
(188) Then, when it is determined it is possible to replace the specified defective memory cell with the redundant memory cell (step S38: Yes), a correction voltage V.sub.amej at which data can be correctly read out from a memory cell MC other than the defective memory cell MC in the defective column is specified, correction data D.sub.j corresponding to the specified correction voltage V.sub.amej is set in the correction memory 242 in the defective column (step S39).
(189) Then, when the defective memory cell MC is addressed, the row decoder 31 and column decoder 32 are set so that a redundant memory cell RMC in the same row in the redundant memory cells is selected (step S40). In other words, the CPU 101 functions as a setter, and sets the defective memory cell MC to be replaced with the redundant memory cell RMC.
(190) For example, it is assumed that the memory cell in the row 1 and the column k of the memory cell array 21 is incapable of correctly reading out stored data at any correction voltage V.sub.amek. In addition, it is assumed that only the memory cell MC.sub.1k in the row 1 in the memory cells MC.sub.ik in the column k is a defective memory cell. Moreover, it is assumed that the redundant memory cell RMC.sub.1 in the row 1 is normal and not used.
(191) In such a case, the memory cell MC.sub.1k in the row 1 and the column k is specified as a defective cell (step S37). Then, as the redundant memory cell RMC.sub.1 in the row 1 of the redundant memory cell column is not used, it is determined to be able to be replaced (step S38: Yes). Subsequently, in such a case, the CPU 101 sets the correction data D.sub.k in the correction memory 242.sub.k in the column k so that data stored in the memory cells MC.sub.2k to MC.sub.mk in the rows 2 to m and the column k can be correctly read out (step S39). When an address specifying the row 1 and the column k is supplied to the row decoder 31 and the column decoder 32, the row decoder 31 carries out the setting for setting the word line WL.sub.1 at a high level, and setting, at a high level, the readout column selection signal CLR.sub.R or the writing column selection signal CLW.sub.R specifying the row 1 in the column of the redundant memory cell RMC.
(192) In contrast, when it is impossible to replace the defect memory cell MC with the redundant memory cell RMC in step S38 (step S38: No), the storage circuit 11 is regarded as a defective item (step S41). In such a case, for example, the I/O device 105 is informed accordingly.
(193) When there is a plurality of defective memory cells, steps S35 to S41 are executed for each memory cell.
(194) As described above, the testing process is ended.
(195) As described above, each sense amplifier 241.sub.j determines the level of the bit line voltage V.sub.bj on the basis of the effective reference voltage EV.sub.refj peculiar to each sense amplifier 241.sub.j in accordance with the storage circuit 11 according to the present embodiment. Accordingly, data can be more precisely determined. Moreover, the effective reference voltage EV.sub.refj can be easily generated based on the reference voltage V.sub.ref common to all the sense amplifiers 241 and the correction voltage V.sub.amej peculiar to each sense amplifier 241.sub.j. Moreover, the defect of the storage circuit 11 in which it is impossible to precisely determine data can be suppressed, resulting in enabling the yield rate of the circuit to be increased.
(196) The embodiments described above are examples of the present disclosure, and the present disclosure is not limited thereto.
(197) For example, the example in which the adder circuit 244.sub.j adds the correction voltage V.sub.amej to the reference voltage V.sub.ref to generate the effective reference voltage EV.sub.refj is described in
(198) In the embodiment, a physical property to be corrected is regarded as the reference voltage V.sub.ref, and the correction (customization) is performed according to each sense amplifier 241.sub.j. Without limitation thereto, it is acceptable that a physical property to be corrected is regarded as the bit line voltage V.sub.bj, and the bit line voltage V.sub.bj is customized for each sense amplifier 241.sub.j, as illustrated in
(199) As illustrated in
(200) As illustrated in
(201) This disclosure is not limited to these techniques. If the reference voltage V.sub.ref or the bit line voltage V.sub.bj can be adjusted to a suitable voltage level according to the data stored in the correction memory 242.sub.j in the column j, that is, if a potential difference between the two input voltages of the sense amplifier 241.sub.j can be adjusted, the configuration thereof is optional. For example, the bit line voltage V.sub.bj of the bit line BL.sub.j can also be adjusted to a suitable voltage by controlling the resistance value of the load resistance (transistor RT.sub.j) arranged in each column of the memory cell array 21 according to the correction data D.sub.j stored in the correction memory 242.sub.j in the column j. In such a case, for example, a load resistance circuit 248.sub.j is arranged instead of the load transistor RT.sub.j in the column j, as illustrated in
(202) The load resistance circuit 248.sub.j connects the bit line K.sub.j in the column j and the terminal, to which the readout voltage V.sub.R is applied, to each other when the read enable signal /RE is at a low level, and changes the resistance value according to the correction data D.sub.j stored in the correction memory 242.sub.j.
(203) The bit line voltage V.sub.bj is V.sub.R-(combined resistance value of resistance value of memory cell MC.sub.ij, ON resistance value of selection transistor ST.sub.ij, and ON resistance value of grounding transistor RQ.sub.j)/(combined resistance of resistance value of load resistance circuit 248.sub.j, resistance value of memory cell MC.sub.ij, ON resistance value of selection transistor ST.sub.ij, and ON resistance value of grounding transistor RQ.sub.j). Accordingly, the bit line voltage V.sub.bj can be decreased by increasing the resistance value of the load resistance circuit 248.sub.j, and the bit line voltage V.sub.bj can be increased by decreasing the resistance value of the load resistance circuit 248.sub.j.
(204) A similar function can also be achieved by arranging a ground resistance circuit 249.sub.j instead of the grounding transistor RQ.sub.j in the column j as illustrated in
(205) The load resistance circuit 248.sub.j and the ground resistance circuit 249.sub.j may have configurations in which the resistance values thereof are changed according to the correction voltage V.sub.amej.
(206) In the configurations illustrated in
(207) In the embodiments described above, an example is described in which the correction voltage V.sub.ame is set in seven phases in total, of which the median is 0 V, with ±3 phases. However, the number of correction voltages V.sub.ame is optional.
(208) It is also acceptable that the reference voltage V.sub.ref is set at a lower voltage in advance, and the correction voltage V.sub.ame is set only at a positive voltage. Likewise, it is also acceptable that the reference voltage V.sub.ref is set at a higher voltage in advance, and the correction voltage V.sub.ame is set only at a negative voltage.
(209) In the embodiments described above, data stored of all the memory cells MC in the selected row is read out in parallel, and determined in the readout operation. This disclosure is not limited to such a form. A configuration is also acceptable in which only a memory cell specified by row and column addresses is read-accessed to read out a bit line voltage V.sub.b and to determine stored data.
(210) In the embodiments described above, an explanation is given in which the testing operation is executed after the completion of the storage circuit 11. However, the present disclosure is not limited thereto. For example, the testing operation may be executed upon each lapse of a certain period of time to address aged deterioration. The testing operation may be executed periodically, for example, every six months.
(211) A configuration is acceptable in which read-out data is automatically written back in a memory cell MC after the end of the readout operation.
(212) In the embodiments described above, the low resistance of the MTJ element is assigned with data “0”, and the high-resistance of the MTJ element is assigned with data “1”. However, the low resistance of the MTJ element may be assigned with data “1”, and the high resistance of the MTJ element may be assigned with data “0”.
(213) In the configurations in
(214) The configuration of the testing device 100 is optional as long as a similar function can be achieved.
(215) The test sequence is an example. A procedure itself is optional as long as optimal correction data is specified based on a column unit and can be set in the correction memory 242.
(216) In
(217) When the memory cells MC are multivalued memories, a common correction voltage V.sub.ame may be added to a plurality of reference voltages V.sub.ref1 to V.sub.refs, or a configuration is acceptable in which correction voltages V.sub.ame1 to V.sub.ames optimized for each of the plurality of reference voltages V.sub.ref1 to V.sub.refs are added.
(218) In the above description, the circuits, in which a voltage is an electric signal, or which is operated with a voltage, are described. Resistance variable storage devices include those operated with a current as an electric signal. The present disclosure can also be applied to a storage circuit that is operated with a current. An explanation will be given below with reference to
(219)
(220) The configurations of the memory cells MC.sub.ij and selection transistors ST.sub.ij are the same as the configurations illustrated in
(221) A sense amplifier 341.sub.j applies a readout voltage to a bit line K.sub.j connected to a positive input terminal. Then, a bit line current I.sub.bj with a magnitude depending on the resistance value (stored data) of the selected memory cell MC.sub.ij flows through the bit line BL.sub.j. The magnitude of the bit line current I.sub.bj is equivalent to the signal level of an electric signal.
(222) A constant current source 323 is connected to the negative input terminal of the sense amplifier 341.sub.j through a reference current line. The reference current line BL.sub.R is connected to the negative input terminals of a plurality of sense amplifiers 341.sub.j in common, and a reference current I.sub.ref from the constant current source 323 flows through the reference current line BL.sub.R. The reference current I.sub.ref is equivalent to the signal level of a reference signal.
(223) A current correction circuit 345.sub.j is arranged in each sense amplifier 341.sub.j. The current correction circuit 345.sub.j includes a correction memory 342.sub.j, a D-A conversion circuit 343.sub.j for correction, and a correction current source 344.sub.j.
(224) The correction memory 342.sub.j corresponds to the correction memory 242.sub.j, and stores correction data D.sub.j set by a higher-level device (testing device). The D-A conversion circuit 343.sub.j for correction converts correction data are into a correction voltage. The correction current source 344.sub.j allows a correction current I.sub.amej corresponding to the correction voltage generated by the D-A conversion circuit 343.sub.j for correction to flow. The correction current I.sub.amej is equivalent to a correction quantity at which the current correction circuit 345.sub.j corrects the reference current I.sub.ref.
(225) An effective reference current EI.sub.refj equivalent to the sum of the reference current I.sub.ref and the correction current I.sub.amej flows through the negative terminal of the sense amplifier 341.sub.j. Switching to such a sense amplifier 341.sub.j in a selected column is performed, and the reference current I.sub.ref is supplied to the sense amplifier 341.sub.j in the selected column. In contrast, the correction current I.sub.amej is peculiar to each individual sense amplifier 341.sub.j.
(226) Each sense amplifier 341.sub.j amplifies the difference (I.sub.bj−EI.sub.refj), where I.sub.bj is the bit line current, and EI.sub.refj is the effective reference current, latches amplified difference (I.sub.bj−EI.sub.refj), and outputs the latched data. A readout column selection signal CLR.sub.j is supplied to the sense amplifier 341.sub.j and the correction current source 344.sub.j, and they operate when the memory cells MC.sub.ij in the column j are selected as targets for readout.
(227) Even in such a configuration, the reference current I.sub.ref in the column j can be corrected with the correction current I.sub.amej to optimize the effective reference current EI.sub.refj supplied to each sense amplifier 341.sub.j for each column by setting the correction data D.sub.j in accordance with the characteristic of each column in the correction memory 342.sub.j. However, the reference current I.sub.ref can be used in common in such sense amplifiers 341.sub.j in a plurality of columns.
(228) As illustrated in
(229) A specific circuit example of each portion of the storage circuit 11 according to the embodiment will now be described.
(230) First, a circuit example of the voltage driving type sense amplifier 241.sub.j illustrated in
(231) As illustrated in
(232) The latch body 111 includes PMOS transistors P1 to P5, and NMOS transistors N1 to N2. The latch body 111 functionally includes: an input transistors circuit 111A of which the gate receives an input voltage; a CMOS latch 111B; and the PMOS transistor P5 that activates/deactivates a latch circuit.
(233) The input transistors circuit 111A includes the PMOS transistors P1 and P2. A bit line voltage V.sub.bj or effective bit line voltage EV.sub.bj to be determined is applied to the gate of the PMOS transistor P1. The source of the PMOS transistor P1 is connected to the drain of the PMOS transistor P5, and the drain is connected to the source of the PMOS transistor P3. An effective reference voltage EV.sub.ref or a reference voltage V.sub.ref is applied to the gate of the PMOS transistor P2. The source of the PMOS transistor P2 is connected to the drain of the PMOS transistor P5, and the drain is connected to the source of the PMOS transistor P4.
(234) The CMOS latch 111B includes a CMOS circuit including the PMOS transistors P3 and P4, and the NMOS transistors N1 and N2. The drain of the PMOS transistor P3 is connected to the drain of the NMOS transistor N1. The source of the NMOS transistor N1 is grounded. The drain of the PMOS transistor P4 is connected to the drain of the NMOS transistor N2. The source of the NMOS transistor N2 is grounded.
(235) A readout voltage V.sub.R is applied to the source of the PMOS transistor P5, and a sense amplifier enable signal /SAE is applied to the gate of the PMOS transistor P5.
(236) The gate of the PMOS transistor P3, the gate of the NMOS transistor N1, and the connection node between the PMOS transistor P4 and the NMOS transistor N2 are connected to each other. The gate of the PMOS transistor P4, the gate of the NMOS transistor N2, and the connection node between the PMOS transistor P3 and the NMOS transistor N1 are connected to each other.
(237) The reset circuit 112 includes NMOS transistors N3 and N4, and resets the sense amplifier.
(238) One end of the current path of the NMOS transistor N3 is connected to the connection node LA1 between the drain of the PMOS transistor P3 and the drain of the NMOS transistor N1, and the other end of the current path is grounded. One end of the current path of the NMOS transistor N4 is connected to the connection node LA2 between the drain of the PMOS transistor P4 and the drain of the NMOS transistor N2, and the other end of the current path is grounded. In addition, a sense amplifier reset signal SARESET is applied to the gates of the NMOS transistors N3 and N4. The sense amplifier reset signal SARESET is a signal that is maintained at a high level during normal operation, allows the sense amplifier 241.sub.j to be maintained in a reset state (in which both the connection nodes LA1 and LA2 are at ground levels), and becomes at a low level when the sense amplifier 241.sub.j is operated.
(239) The output circuit 113 includes NMOS transistors N5 to N8. The connection node LA1 is connected to the gate of the NMOS transistor N5. One end of the current path of the NMOS transistor N5 is grounded, and the other end thereof is connected to one end of the current path of the NMOS transistor N7. The other end of the current path of the NMOS transistor N7 is pulled up to output the output data DATA.
(240) The connection node LA2 is connected to the gate of the NMOS transistor N6. One end of the current path of the NMOS transistor N6 is grounded, and the other end thereof is connected to one end of the current path of the NMOS transistor N8. The other end of the current path of the NMOS transistor N8 is pulled up to output the inverting output data /DATA. Accordingly, output data is a pair of DATA.sub.j and complementary data /DATA.sub.j.
(241) A readout column selection signal CLR.sub.j is supplied to the gates of the NMOS transistor N7 and the NMOS transistor N8.
(242) Another configuration example of such a sense amplifier 241.sub.j will be described with reference to
(243) In
(244) The sense circuit 121 includes: NMOS transistors N11 and N12 which are cross-couple-connected to each other; and an NMOS transistor N13 included in a grounding transistor. The inverted signal SAE of the sense amplifier enable signal /SAE is applied to the gate of the grounding transistor N13.
(245) The latch circuit 122 is connected to the sense circuit 121, and includes: PMOS transistors P11 and P12 cross-couple-connected to each other; and a PMOS transistor P13 that activates/deactivates the sense amplifier 241.sub.j. The sense amplifier enable signal /SAE is applied to the gate of the PMOS transistor P13.
(246) When the sense amplifier enable signal /SAE is changed to a low level, the NMOS transistor N13 and the PMOS transistor P13 are turned on. Then, the NMOS transistors N11 and N12 included in the sense circuit 121 amplify the potential difference between the bit line voltage V.sub.bj (or effective bit line voltage EV.sub.bj) and the effective reference voltage EV.sub.refj (reference voltage V.sub.ref). The PMOS transistors P11 and P12, which are included in the latch circuit 122 and cross-couple-connected, latch the amplified voltage.
(247) The output circuit 123 outputs data DATA.sub.j latched by the latch circuit 122, and the complementary data /DATA.sub.j thereof.
(248) In such a manner, a sense amplifier of a type in which the gate of MOSFET receives a voltage signal (
(249) A configuration example of the correction memory 242 illustrated in
(250)
(251) The connection node between the gate of the PMOS transistor P21 and the gate of the NMOS transistor N21, and the connection node between the drain of the PMOS transistor P22 and the drain of the NMOS transistor N22 are connected to each other. The connection node between the gate of the PMOS transistor P22 and the gate of the NMOS transistor N22, and the connection node between the drain of the PMOS transistor P21 and the drain of the NMOS transistor N21 are connected to each other.
(252) A readout voltage V.sub.R is applied to the source of the PMOS transistor P23, a memory enable signal /ME is applied to the gate of the PMOS transistor P23, and the drain of the PMOS transistor P23 is connected to the sources of the PMOS transistors P21 and P22.
(253) The connection node between the drain of the PMOS transistor P21 and the drain of the NMOS transistor N21 is connected to a data terminal /MOUT.sub.j through an NMOS transistor N23 included in a transfer gate. The connection node between the drain of the PMOS transistor P22 and the drain of the NMOS transistor N22 is connected to a data terminal MOUT.sub.j through an NMOS transistor N24 included in a transfer gate.
(254) The connection node between the PMOS transistor P21, the NMOS transistor N21, and the data terminal /MOUT.sub.j is connected to one end of a memory cell MC1 through an NMOS transistor N25 included in a selection transistor. The other end of the memory cell MC1 is connected to a bit line MBL.
(255) The connection node between the PMOS transistor P22, the NMOS transistor N22, and the data terminal MOUT.sub.j is connected to one end of a memory cell MC2 through the NMOS transistor N26 included in the selection transistor. The other end of the memory cell MC2 is connected to the bit line MBL.
(256) A memory selection signal MSEL.sub.j is applied to the gates of the NMOS transistors N23 and N24. A memory cell selection signal MSELNV.sub.j is applied to the gates of NMOS transistors N25 and N26.
(257) The correction memory 242.sub.j illustrated in
(258) The memory selection signal MSEL.sub.j, the memory enable signal /ME, and the memory cell selection signal MSELNV.sub.j are signals common to the three memory elements 242a included in the correction memory 242.sub.j in the column j. The bit line MBL is connected in common to the memory cells MC1 and MC2 of the three memory elements 242a included in the correction memory 242.sub.j in the column j.
(259) The memory cells MC1 and MC2 store complementary data.
(260) The operation of the memory elements 242a will now be described.
(261) Each memory element 242a includes: a volatile memory that is primarily operated during passing current; and a nonvolatile memory that saves, at the time of power off, data stored in the volatile memory. In other words, first, correction data is written in the volatile memory when the correction data is written in the memory elements 242a during the test operation illustrated in
(262) The volatile memory includes the PMOS transistors P21, P22, and P23, and the NMOS transistors N21, N22, N23, and N24, has a circuit configuration similar to the circuit configuration of a common six-transistor-type SRAM cell, and operates in a manner similar to the manner of SRAM. In other words, data is written by setting the memory enable signal /ME at a low level and the memory selection signal MSEL.sub.j at a high level, followed by setting voltages according the data, intended to be written, in the complementary data terminals MOUT.sub.j and /MOUT.sub.j.
(263) By setting the memory enable signal /ME at a low level and the memory selection signal MSEL.sub.j at a high level, a voltage depending on data stored in the memory element is generated in the complementary data terminals MOUT.sub.j and /MOUT.sub.j, and therefore, the readout of data from the volatile memory is enabled by sensing the voltage.
(264) The nonvolatile memory includes the NMOS transistors N25 and N26 and the memory cells MC1 and MC2, has a circuit configuration similar to the circuit configuration of a so-called 2T2MTJ-type MRAM cell, and operates in a manner similar to the manner of 2T2MTJ-type MRAM. In other words, data is written by setting the bit line MBL terminal in a floating state and the memory cell selection signal MSELNV.sub.j at a high level in a state in which the drain terminals of the NMOS transistors N25 and N26 (the common connection terminal of the MOS transistors P21, N23, and N21 of the volatile memory, and the common connection terminal of the MOS transistors P22, N24, and N26, respectively) are at voltages complementary to each other. As a result, for example, when the drain terminals of the NMOS transistors N25 and N26 are at high and low levels, respectively, a current flows in a pathway of NMOS transistor N25.fwdarw.memory cell MC1.fwdarw.memory cell MC2.fwdarw.NMOS transistor N26, and high and low resistances are written in the memory cells MC1 and MC2, respectively. The reversal of the drain terminals of the NMOS transistors N25 and N26 results in the reversal of the resistance values of the memory cells MC1 and MC2.
(265) In the operation described above, a similar writing operation is also enabled by putting one pulse of which the level is changed in the manner of (1) low level.fwdarw.(2) high level.fwdarw.(3) low level, instead of by setting the bit line MBL terminal in the floating state. This is caused by performing the following operation in each period of (1) to (3). For example, when the drain terminals of the NMOS transistors N25 and N26 are at high and low levels, respectively, first, a current flows in the direction of NMOS transistor N25.fwdarw.bit line MBL in the period of (1) (and (3)), and the writing operation of the memory cell MC1 in a high-resistance state is performed. In such a case, the operation of writing data does not occur because both the bit line MBL and the drain terminal of the NMOS transistor N26 are at the same low level, and a current does not flow through the memory cell MC2. Then, a current flows in the direction of bit line MBL.fwdarw.the NMOS transistor N26 in the period of (2), and the writing operation of the memory cell MC2 in a low-resistance state is performed. In such a case, the operation of writing data does not occur because both the bit line MBL and the drain terminal of the NMOS transistor N25 are at the same high level, and a current does not flow through the memory cell MC1. When the drain terminals of the NMOS transistors N25 and N26 are at low and high levels, respectively, in reverse with respect to the above, the reversal of the resistance values of the memory cells MC1 and MC2 occurs.
(266) The readout of data in the nonvolatile memory is the operation of transferring the data from the memory cells MC1 and MC2 of the nonvolatile memory to the SRAM which is the volatile memory. From a state in which the memory enable signal /ME is set at a high level, the memory cell selection signal MSELNV.sub.j is set at a low level, and the bit line MBL is set at a low level, first, MSELNV.sub.j is set at a high level, and /ME is then set at a low level. In such a manner, a voltage depending on the resistance states of the memory cells MC1 and MC2 is latched by the memory element 242a, and therefore, the data in the nonvolatile memory is transferred to the volatile memory.
(267) Specific examples of the amplifier circuits 247.sub.ej and 247.sub.hj illustrated in
(268) First, a first example of a correction circuit that generates an effective reference voltage EV.sub.refj from a reference voltage V.sub.ref in the column j is described with reference to
(269) As illustrated in
(270) The reference voltage V.sub.ref is applied to the positive input terminal of the operational amplifier OP.sub.j. The series circuits of the first resistance RU (j, 1) to the p-th resistance RU (j, p) and the first NMOS transistor TU (j, 1) to the p-th NMOS transistor TU (j, p) are connected in parallel between the operational amplifier OP.sub.j and the negative input terminal thereof. Moreover, the series circuits of the first resistance RL (j, 1) to the p-th resistance RL (j, p) and the NMOS transistor TL (j, 1) to the p-th NMOS transistor TL (j, p) are connected in parallel between the negative input terminal of the operational amplifier OP.sub.j and the ground.
(271) Each of the NMOS transistor TU (j, k) and the NMOS transistor TL (j, k) (k=natural number of 1 to p) is included in a switch. In the correction memory 242.sub.j in
(272) The bit signal SU (j, k) of the k-th bit of the correction memory 242 is applied to the gate of the NMOS transistor TU (j, k), and the inverted signal SL (j, k) of the bit signal of the k-th bit of the correction memory 242.sub.j is applied to the gate of the NMOS transistor TL (j, k). SL (j, k)=/SU (j, k) is established.
(273) The resistance values of the resistances RU (j, 1) to RU (j, p) and RL (j, 1) to RL (j, p) are optional. For example, the resistance values may be equal to each other or different from each other, or it is also acceptable that only some of the resistance values are equal to each other and the other are different from each other. The setting of the resistance values at values different from each other can result in an increase in the number of the possible values of the effective reference voltage EV.sub.refj, and is more desirable.
(274) In accordance with such a configuration, one of the NMOS transistor TU (j, k) and the NMOS transistor TL (j, k) is turned on depending on whether the bit signal of the k-th bit of the correction memory 242.sub.j is “1” or “0”. Therefore, the amplification factor of the amplifier circuit is changed to change the effective reference voltage EV.sub.refj depending on data stored in the correction memory 242.sub.j. Therefore, the reference voltage V.sub.ref can be customized for each column.
(275) As illustrated in
(276) In the above description, complementary signals are supplied to the gates of the NMOS transistor TU (j, k) and the NMOS transistor TL (j, k). However, different bit signals may be supplied to the gates. In such a case, the number of the bits of the correction memory 242.sub.j is 2.Math.p.
(277) As long as the effective reference voltage EV.sub.refj or the effective bit line voltage EV.sub.bj can be adjusted by changing the amplification factor of the amplifier circuit depending on the correction data D.sub.j, the configuration of the circuit is optional. For example, a plurality of resistances RU or RL may be connected to each NMOS transistor TU or TL, as illustrated in
(278) In addition, the series circuit of resistances RU and RL can also establish connection between the output terminal and negative input terminal of the operational amplifier OP.sub.j, and between the negative input terminal of the operational amplifier OP.sub.j and the ground, as illustrated in
(279) In the configuration in
(280) Moreover, an example in which one or more resistances RU or RL are connected to one NMOS transistor TU or TL is illustrated in
(281) In the configurations in
(282) A specific example of the load resistance circuit 248.sub.j illustrated in
(283)
(284) In such a configuration, the bit line BL.sub.j in the column j is pulled up to the readout voltage V.sub.R by a plurality of PMOS transistors TP (j, 1) to TP (j, p). Voltages SB (j, 1) to SB (j, p) obtained by analog conversion of bit data of a bit corresponding to the correction data D.sub.j stored in the correction memory 242 are applied to the gates of the PMOS transistors TP (j, 1) to TP (j, p). As a result, electrical connection between one end of each memory cell MC.sub.ij and the readout voltage V.sub.R (terminal to which the readout voltage V.sub.R is applied) is established by the current paths of the plurality of transistors TP (j, 1) to TP (j, p). The plurality of transistors TP (j, 1) to TP (j, p) is turned on/off in accordance with the correction data D.sub.j.
(285) The ON resistances (current drive abilities) of the PMOS transistors TP (j, 1) to TP (j, p) may be identical with or the same as each other. The bit line voltage V.sub.bj can be adjusted depending on data stored in the correction memory 242.sub.j by adjusting the number of turned-on PMOS transistors TP (j, 1) to TP (j, p), or selecting turned-on PMOS transistors, and further by a combination thereof. It is desirable to set the correction data D.sub.j so that at least one of the PMOS transistors TP (j, 1) to TP (j, p) is turned on.
(286) A voltage signal obtained by the generation of the logical product of each bit of the correction data D.sub.j and a read enable signal /RE, and the analog conversion of each bit of operation results may be applied to the gate of the PMOS transistor TP (j, k). A load transistor RT.sub.j turned on/off by the read enable signal /RE may be arranged, as illustrated in
(287) In addition, the series circuit of a memory cell MC and a PMOS transistor may be arranged, as illustrated in
(288) A configuration example of a sense amplifier having the function of adjusting the offset voltage ΔV.sub.offset illustrated in
(289) A sense amplifier 241a illustrated in
(290) The configuration of the CMOS latch 111B is identical with the configuration illustrated in
(291) The gate receiving circuit 111C includes p PMOS transistors P31 to P3p. The gates of the PMOS transistors P31 to P3p are connected in common to a bit line BL.sub.j, and receive a bit line voltage V.sub.bj. The drains of the PMOS transistors P31 to P3p are connected in common to a connection node LA1.
(292) The gate receiving circuit 111D includes p PMOS transistors P41 to P4p. The gates of the PMOS transistors P41 to P4p are connected in common to a reference bit line BL.sub.R2, and receive a reference voltage V.sub.ref. The drains of the PMOS transistors P41 to P4p are connected in common to a connection node LA2. The sources of the PMOS transistors P41 to P4p are connected to the sources of the PMOS transistors P31 to P3p, respectively.
(293) The drains of PMOS transistors P51 to 5p included in the bias circuit 111E are connected to corresponding connection nodes between the sources of the PMOS transistors P31 to 3p and the sources of the PMOS transistors P41 to 4p. Voltage signals SB (j, 1) to SB (j, p) obtained by the analog conversion of the bit data of the corresponding bit of the correction memory 242.sub.j are applied to the gates of the PMOS transistors P51 to 5p. A sense amplifier enable signal /SAE is applied to the gate of P5.
(294) In accordance with such a configuration, the bias transistors P51 to P5p are turned on/off depending on correction data D.sub.j to pull up the voltage of a connection node NA1 and the voltage of LA2 to be closer to a readout voltage V.sub.R. The degree of such pulling up varies in accordance with the correction data D.sub.1.
(295) The ON resistances of the PMOS transistors P31 to P3p vary depending on the bit line voltage V.sub.bj. Likewise, the ON resistances of the PMOS transistors P41 to P4p vary depending on the reference voltage V.sub.ref. Therefore, the potential difference between the connection nodes LA1 and LA2 varies depending on the bit line voltage V.sub.bj, the reference voltage V.sub.ref, and the correction data D.sub.j. Such a variation is equivalent to a variation in offset voltage ΔV.sub.offset. In such a manner, the offset voltage ΔV.sub.offset can be adjusted by the correction data D.sub.j. Accordingly, it is possible to adjust the offset voltage ΔV.sub.offset of the sense amplifier 241a for each column, and to appropriately determine data stored in a memory cell.
(296) In the above description, the storage circuit 11 of a type in which the reference voltage V.sub.ref common to the plurality of memory cells is used is described. Examples of storage circuits include a storage circuit of a type in which a storage element is included in a pair of memory cells complementarily storing data, and the stored data is determined by comparing complementary bit line voltages V.sub.b and /V.sub.b generated by complementary data stored in the pair of memory cells. This disclosure can also be applied to this type of the storage circuit.
(297) An embodiment in which the present disclosure is applied to this type of the storage circuit will be described below with reference to
(298) In
(299) One ends of the memory cells MC.sub.ij in the column j are connected in common to a bit line BL.sub.j. The bit line BL.sub.j is pulled up to a readout voltage V.sub.R by a load transistor RT.sub.j. One end of the current path of each selection transistor ST.sub.ij is connected to the other end of each memory cell MC.sub.ij. A source line SL.sub.j is connected in common to the other ends of the current paths of the selection transistors ST.sub.ij in the column j.
(300) Likewise, one ends of the memory cell /MC.sub.ij in the column j are connected in common to a bit line /BL.sub.j. The bit line /BL.sub.j is pulled up to the readout voltage V.sub.R by a load transistor /RT.sub.j. One end of the current path of each selection transistor /ST.sub.ij is connected to the other end of each memory cell /MC.sub.ij. A source line /SL.sub.j is connected in common to the other ends of the current paths of the selection transistors /ST.sub.ij in the column j.
(301) The gates of the selection transistors ST.sub.ij and /ST.sub.ij in the row i are connected in common to a word line WL.sub.i.
(302) The source lines SL.sub.j and/SL.sub.j in the column j are grounded through a grounding transistor RQ.sub.j. The invert signal of a read enable signal /RE is connected in common to the gates of the grounding transistors RQ.sub.j.
(303) The bit line BL.sub.j is connected to the positive input terminal of a sense amplifier. In contrast, the bit line /BL.sub.j is connected to an adder circuit 244.sub.j. The adder circuit 244.sub.j adds a bit line voltage /V.sub.bj and a correction voltage V.sub.amej, generates an effective bit line voltage /EV.sub.bj, and supplies the effective bit line voltage /EV.sub.bj to the negative input terminal of the sense amplifier 241.sub.j. The sense amplifier 241.sub.j differentially amplifies and latches a bit line voltage V.sub.bj and the effective bit line voltage /EV.sub.bj, and outputs output data DATA.sub.j.
(304) In such a configuration, the bit line voltage /V.sub.bj can be corrected to a suitable value by correction data D.sub.j stored in a correction memory 242.sub.j. As a result, data stored in the memory cells MC.sub.ij and /MC.sub.ij can be appropriately read out even when the number of the memory cells MC.sub.ij and /MC.sub.ij connected to the bit lines BL.sub.j and /BL.sub.j is large.
(305) In the case of using complementary memory elements as illustrated in
(306) The disclosure is described using a positive logic in the above description. However, the present disclosure can be similarly applied to a storage circuit using a negative logic.
(307) The plurality of correction circuits described above may be combined. For example, the configuration of
(308) In addition, the storage element is not limited to an MTJ element. The storage element may be a variable-resistance storage element such as a resistance random access memory (ReRAM). In such a case, the configuration of a variable-resistance element included in a reference circuit is also allowed to be identical with the configuration of a variable-resistance element included in a memory cell and to be set at a low resistance RL, and the resistance value of a fixed resistance FR is also set at more than 0 and less than the difference between the high resistance RH and low resistance RL of the variable-resistance element. In particular, it is desirable that the resistance value is substantially equal to (α/100)×RL. Here, α is the upper limit value (%) of variations in the resistance value of the variable-resistance element, acceptable from the resolution (the minimum detectable value of the difference between the voltage of the positive input terminal and the voltage of the negative input terminal) of the sense amplifier used in the storage circuit. In such a case, a configuration in which a fixed resistance is arranged for each reference cell, and a configuration in which one fixed resistance is arranged (used in common) in a plurality of reference cells (variable-resistance elements) are also possible.
(309) The present disclosure is not limited to the description of the above-described embodiments and the drawings. The above-described embodiments, the drawing, and the like can be modified as appropriate.
(310) This application claims the benefit of Japanese Patent Application No. 2020-134555, filed on Aug. 7, 2020, the entire disclosure of which is incorporated by reference herein.