ACTUATORS

Abstract

An actuator (18) includes a first part (3), a second part (2) and eight shape memory alloy, SMA, wires (4.sub.1, . . . , 4.sub.8) connected between the first part (3) and the second part (2) so as to enable the second part (2) to be moved relative to the first part (3) with at least two degrees of freedom. Two of the SMA wires (4.sub.1, . . . , 4.sub.8) are located on each of four sides (s.sub.1, . . . , s.sub.4). The four sides (s.sub.1, . . . , s.sub.4) extend in a loop around a primary axis (z). On contraction, a first group (4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7) of four of the SMA wires each provide a force on the second part (2) with a component in a first direction along the primary axis (z), and a second group (4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8) of the other four of the SMA wires each provide a force on the second part (2) with a component in a second, opposite direction along the primary axis (z). Each of the eight SMA wires (4.sub.1, . . . , 4.sub.8) is configured such that a length perpendicular to the primary axis (z) is foreshortened relative to a length (l.sub.1, . . . , l.sub.4) of a corresponding one of the four sides (s.sub.1, . . . , s.sub.4).

Claims

1. An actuator comprising: a first part; a second part; and eight shape memory alloy (SMA) wires connected between the first part and the second part so as to enable the second part to be moved relative to the first part with at least two degrees of freedom, wherein: two of the SMA wires are located on each of four sides, the four sides extending in a loop around a primary axis; on contraction, a first group of four of the SMA wires each provides a force on the second part with a component in a first direction along the primary axis, and a second group of the other four of the SMA wires each provides a force on the second part with a component in a second, opposite direction along the primary axis; and each of the eight SMA wires is configured such that a length perpendicular to the primary axis is foreshortened relative to a length of a corresponding one of the four sides.

2. The actuator according to claim 1, wherein; each of the eight SMA wires is configured such that a resonant frequency for movement of the second part relative to the first part along the primary axis is increased relative to a reference configuration; and in the reference configuration, the length of each SMA wire perpendicular to the primary axis is substantially equal to a length of a corresponding side of the first to fourth sides.

3. The actuator according to claim 1, wherein the component of each SMA wire perpendicular to the primary axis is 85% or less than the length of a respective side.

4. The actuator according to claim 1, wherein each SMA wire makes an acute angle of greater than or equal to 10 degrees to a plane perpendicular to the primary axis.

5. The actuator according to claim 1, wherein: the SMA wires are connected to the first and second parts at connection points; the connection points corresponding to first and second sides are offset towards a first corner joining the first and second sides; and the connection points corresponding to third and fourth sides are offset towards a third corner joining the third and fourth sides.

6. The actuator according to claim 1, wherein: the SMA wires are connected to the first and second parts at connection points; the connection points corresponding to a first side are offset towards a first corner joining the first side to a second side; the connection points corresponding to the second side are offset towards a second corner joining the second side to a third side; the connection points corresponding to the third side are offset towards a third corner joining the third side to a fourth side; and the connection points corresponding to the fourth side are offset towards a fourth corner joining the fourth side to the first side.

7. The actuator according to claim 1, wherein: the SMA wires are connected to the first and second parts at connection points; the connection points corresponding to first and second sides are offset towards a first corner joining the first and second sides; the connection points corresponding to a third side are offset towards a third corner joining the third side to a fourth side; and the connection points corresponding to the fourth side are offset towards a fourth corner joining the fourth side to the first side.

8. The actuator according to claim 5, wherein the offsetting of the connection points corresponding to at least one side defines a corresponding volume that is within a footprint of the first part.

9. The actuator according to claim 8, wherein the volume at least partly receives at least one of a portion of the first part and one or more terminal connections for making electrical connection to the eight SMA wires.

10. The actuator according to claim 1, wherein; the SMA wires are connected to the first and second parts at connection points; and for each side of the four sides, one set of connection points is separated by a smaller distance along the primary axis than the other set of connection points on that side, so as to move a crossing point of the respective pair of SMA wires towards the centre of that side.

11. The actuator according to claim 10, wherein for each side of the four sides, the set of connection points which is separated by a smaller distance along the primary axis corresponds to the connection points to the second part.

12. The actuator according to claim 1, wherein each of the SMA wires has a length parallel to the primary axis which is less than or equal to 5 mm.

13. An actuator comprising: a first part; a second part; and eight shape memory alloy (SMA) wires connected between the first part and the second part so as to enable the second part to be moved relative to the first part with at least two degrees of freedom, wherein: two of the SMA wires are located on each of first, second, third, and fourth sides, the four sides extending in a loop around a primary axis; on contraction, a first group of four of the SMA wires each provide a force on the second part with a component in a first direction along the primary axis, and a second group of the other four of the SMA wires each provide a force on the second part with a component in a second, opposite direction along the primary axis; the SMA wires are connected to the first and second parts at connection points; one or more connection points corresponding to the first side are displaced relative to corresponding connection points of a reference actuator, so as to define an additional volume relative to the reference actuator; the connection points corresponding to at least one of the second, third, and fourth sides coincide with the corresponding connection points of the reference actuator; and in the reference actuator, the relative positioning of the connection points corresponding to the first and third sides substantially correspond, and the relative positioning of the connection points corresponding to the second and fourth sides substantially correspond.

14. The actuator according to claim 13, wherein the one or more connection points corresponding to the first side are displaced parallel to the primary axis relative to the reference actuator, such that the additional volume is defined at least partly above or below the two SMA wires corresponding to the first side.

15. The actuator according to claim 13, wherein: the one or more connection points corresponding to the first side are displaced relative to the reference actuator such that a projected boundary of the loop corresponds to an irregular quadrilateral; and the additional volume is formed at least partly between the primary axis and one or both of the SMA wires corresponding to the first side.

16. The actuator according to claim 13, wherein: the one or more connection points corresponding to the first side are displaced relative to the reference actuator such that the SMA wires corresponding to the first side are not parallel when projected onto a plane perpendicular to the primary axis, such that the additional volume is formed at least partly between the primary axis and one of both of the SMA wires corresponding to the first side; and in the reference actuator, the SMA wires corresponding to the first side are parallel when projected onto a plane perpendicular to the primary axis.

17. The actuator according to claim 13, wherein one or more terminals for electrical connection to the SMA wires are received within the additional volume.

18. The actuator according to claim 13, wherein one or more connection points corresponding to the first side are displaced perpendicular to a plane parallel to the primary axis relative to the reference actuator.

19. An actuator comprising: a first part; a second part; and eight shape memory alloy (SMA) wires connected between the first part and the second part so as to enable the second part to be moved relative to the first part with at least two degrees of freedom, wherein: two of the SMA wires are located on each of four sides, the four sides extending in a loop around a primary axis, wherein the two SMA wires on each side include an inner SMA wire and an outer SMA wire, wherein the outer SMA wire is, on average, further from the primary axis than the inner SMA wire; on contraction, a first group of four of the SMA wires each provide a force on the second part with a component in a first direction along the primary axis, and a second group of the other four of the SMA wires each provide a force on the second part with a component in a second, opposite direction along the primary axis; moving clockwise about the loop and viewing each side along a radial direction perpendicular to the primary axis and that side, the corresponding two SMA wires adopt either a first wire configuration in which the inner SMA wire slopes upwards in a direction tangential to the loop whilst the outer SMA wire slopes downwards, or a second wire configuration in which the inner SMA wire slopes downwards in the direction tangential to the loop whilst the outer SMA wire slopes upwards; upwards denotes a component in the positive direction relative to the primary axis and downwards denotes a component in the negative direction relative to the primary axis; and each side has the same configuration of the first and second wire configurations as at least one adjacent side.

20. The actuator according to claim 19, wherein all of the sides correspond to the first wire configuration, or all of the sides correspond to the second wire configuration.

21. The actuator according to claim 19, wherein moving about the loop, first and second sides of the four sides correspond to the first wire configuration and third and fourth side of the four sides correspond to the second wire configuration.

22. The actuator according to claim 19, wherein: each SMA wire is attached at either end to respective connection features; at least one connection feature is common to a pair of SMA wires which correspond to adjacent sides of the four sides; and the connection feature is folded about a corner between the adjacent sides.

23. A camera comprising: an actuator comprising: a first part; a second part; and eight shape memory alloy (SMA) wires connected between the first part and the second part so as to enable the second part to be moved relative to the first part with at least two degrees of freedom, wherein: two of the SMA wires are located on each of four sides, the four sides extending in a loop around a primary axis: on contraction, a first group of four of the SMA wires each provides a force on the second part with a component in a first direction along the primary axis, and a second group of the other four of the SMA wires each provides a force on the second part with a component in a second, opposite direction along the primary axis; and each of the eight SMA wires is configured such that a length perpendicular to the primary axis is foreshortened relative to a length of a corresponding one of the four sides, an image sensor; and a lens attached to the second part.

24-33. (canceled)

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0080] Certain embodiments of the present invention will now be described, by way of example only, with reference to the accompanying drawings, in which:

[0081] FIGS. 1A to 1E schematically illustrate a known actuator;

[0082] FIG. 2 schematically illustrates a camera module incorporating the known actuator;

[0083] FIGS. 3A to 3E schematically illustrate a first modified actuator;

[0084] FIG. 4A to 4C schematically illustrate a preferred definition of the side lengths of an actuator;

[0085] FIGS. 5A to 5E schematically illustrate a second modified actuator;

[0086] FIGS. 6A and 6B schematically illustrate wire-crossing points of the first modified actuator shown in FIGS. 3A to 3EI

[0087] FIGS. 7A and 7B schematically illustrate wire-crossing points of a third modified actuator;

[0088] FIGS. 8A to 8E schematically illustrate a fourth modified actuator;

[0089] FIGS. 9A to 9E schematically illustrate a fifth modified actuator;

[0090] FIGS. 10A to 10C schematically illustrate a sixth modified actuator;

[0091] FIGS. 11A to 11C schematically illustrate a seventh modified actuator;

[0092] FIGS. 12A and 12B schematically illustrate an improved method for forming coupons supporting connection features, for use in assembling actuators;

[0093] FIGS. 13A to 13E schematically illustrate an eighth modified actuator;

[0094] FIGS. 14A and 14B schematically illustrate an improved method for forming coupons supporting connection features, for use in assembling a ninth modified actuator shown in FIG. 15;

[0095] FIGS. 15A to 15E schematically illustrate the ninth modified actuator; and

[0096] FIG. 16 schematically shows a further possible wire configuration.

DETAILED DESCRIPTION

[0097] In the following, like parts are denoted by like reference numerals.

[0098] Known SMA Actuator

[0099] Referring to FIGS. 1A to 1E, a known SMA actuator 1 (also referred to simply as the known actuator) will now be described.

[0100] FIG. 1A is a plan view, and a set of right-handed orthogonal Cartesian axes is drawn in FIG. 1A for reference purposes. FIGS. 1B through 1E represent views which would be observed when observing the known actuator 1 from above (along the negative z direction) via a mirror oriented at an angle of 45 degrees to the primary axis x (thus the axes become left-handed in FIGS. 1B through 1E). For example, FIG. 1B shows known actuator 1 of FIG. 1A, reflected through a mirror plane parallel to the y-axis and angled at 45 degrees to the x-axis and primary axis z, the mirror plane positioned to the left of FIG. 1A. This style of projection is selected, and FIGS. 1B through 1E are scaled and positioned relative to FIG. 1A to permit convenient mapping of features between FIG. 1A and each of FIGS. 1B through 1E. In the interests of visual clarity, only features from the nearer half of the actuator 1 (to the mirror plane) are shown in FIGS. 1B through 1E.

[0101] The known actuator 1 includes a moving part 2 (also referred to as a moveable element or second part) supported on a static part 3 (also referred to as a support structure or first part) by eight SMA wires 4.sub.1, . . . , 4.sub.8.

[0102] The moving part 2 may in general be any type of element. As viewed along a primary axis z, the moving part 2 has the shape of a square with two diagonally-opposite corners that are rounded. However, more generally, the moving part 2 could have any shape. The static part 3 has a square base 5 with two parts 6.sub.a, 6.sub.b (also referred to as support posts) that extend from this base 5 into the space left by the rounded corners of the moving part 2. However, in general, the static part 3 could be any type of element suitable for supporting the moving part 2. The static part 3 supports the moving part 2 in a manner allowing movement of the moving part 2 relative to the static part 3. In this example, the moving part 2 is supported on the static part 3 solely by the SMA wires 4.sub.1, . . . , 4.sub.8, but the known actuator 1 may comprise a suspension system (for example including one or more bearings and/or flexures) additionally supporting the moving part 2 on the static part 3.

[0103] Each SMA wire 4 comprises a piece of SMA wire connected at each end via a connection feature 7 to a respective one of the moving part 2 and the static part 3. Herein, a connection feature 7.sub.na connects the n.sup.th of 1n8 SMA wires 4.sub.1, . . . , 4.sub.8 to the static part 3, a connection feature 7.sub.nb connects the n.sup.th SMA wire 4.sub.n to the moving part 2, and a connection feature in general (or the connection features collectively) shall be referred to as connection feature(s) 7.

[0104] As will be described in more detail below, the connection features 7 in the illustrated examples are crimp portions (and will be generally referred to as such). However, more generally, any suitable means that provides mechanical connection may be used to provide connection features 7. In addition, electrical connections are made to the SMA wires 4.sub.1, . . . , 4.sub.8, for example via the crimp portions 7, so that a current in each of the eight SMA wires 4.sub.1, . . . , 4.sub.8 may be controlled independently of each other SMA wire 4.sub.1, . . . , 4.sub.8.

[0105] Each SMA wire 4.sub.1, . . . , 4.sub.8 extends along a corresponding side s.sub.1, s.sub.2, s.sub.3, s.sub.4 of the known actuator 1. In the example illustrated in FIG. 1A, moving clockwise about the primary axis z, the first and second SMA wires 4.sub.1, 4.sub.2 extend along the first side s.sub.1, the third and fourth SMA wires 4.sub.3, 4.sub.4 extend along the second side s.sub.2, the fifth and sixth SMA wires 4.sub.5, 4.sub.6 extend along the third side s.sub.3, and the seventh and eighth SMA wires 4.sub.7, 4.sub.8 extend along the fourth side s.sub.4. Each SMA wire 4.sub.1, . . . , 4.sub.8 is held in tension, thereby applying a component of force in a direction along the primary axis z and a component of force in a lateral direction perpendicular to the primary axis z.

[0106] SMA material has the property that on heating it undergoes a solid-state phase change which causes the SMA material to contract. At low temperatures, the SMA material enters the Martensite phase. At high temperatures the SMA enters the Austenite phase which induces a deformation causing the SMA material to contract. The phase change occurs over a range of temperature due to the statistical spread of transition temperature in the SMA crystal structure. Thus heating of the SMA wires 4.sub.1, . . . , 4.sub.8 causes them to decrease in length. The SMA wires 4.sub.1, . . . , 4.sub.8 may be made of any suitable SMA material, for example Nitinol or another titanium-alloy SMA material. Advantageously, the material composition and pre-treatment of the SMA wires 4.sub.1, . . . , 4.sub.8 is chosen to provide phase change over a range of temperature that is above the expected ambient temperature during normal operation and as wide as possible to maximise the degree of positional control.

[0107] On heating of one of the SMA wires 4.sub.1, . . . , 4.sub.8, the stress therein increases and it contracts. This causes movement of the moving part 2 (second part). A range of movement occurs as the temperature of the SMA increases over the range of temperature in which there occurs the transition of the SMA material from the Martensite phase to the Austenite phase. Conversely, on cooling of one of the SMA wires 4.sub.1, . . . , 4.sub.8 so that the stress therein decreases, and it expands under the force from opposing ones of the SMA wires 4.sub.1, . . . , 4.sub.8. This allows the moving part 2 to move in the opposite direction.

[0108] The position of the moving part 2 relative to the static part along the primary axis z is controlled by varying the temperature of the SMA wires 4.sub.1, . . . , 4.sub.8. This is achieved by passing through each of SMA wires 4.sub.1, . . . , 4.sub.8 a drive current that provides resistive heating. Heating is provided directly by the drive current.

[0109] Cooling is provided by reducing or ceasing the drive current to allow the SMA wires 4.sub.1, . . . , 4.sub.8 and/or the moving part 2 to cool by conduction to the surroundings.

[0110] Two of the SMA wires 4.sub.1, . . . , 4.sub.8 are arranged on each of the four sides s.sub.1, s.sub.2, s.sub.3, s.sub.4 around the primary axis z. The two of the SMA wires 4.sub.1, . . . , 4.sub.8 on each side s.sub.1, . . . , s.sub.4, for example SMA wires 4.sub.5 and 4.sub.6 on the third side s.sub.3, are inclined in opposite senses with respect to each other, as viewed perpendicular from the primary axis z, and cross each other (clearly seen FIG. 1D, and similar wire crossings may be observed in FIGS. 1B, 1C and 1E). The four sides s.sub.1, s.sub.2, s.sub.3, s.sub.4 on which the SMA wires 4.sub.1, . . . , 4.sub.8 are arranged extend in a loop around the primary axis z. In this example, the sides s.sub.1, s.sub.2, s.sub.3, s.sub.4 are perpendicular and so form a square as viewed along the primary axis z, but alternatively the sides s.sub.1, s.sub.2, s.sub.3, s.sub.4 could take a different e.g. quadrilateral shape. In this example, the SMA wires 4.sub.1, . . . , 4.sub.8 are parallel to the outer faces of the square envelope of the moving part 2 which conveniently packages the known actuator 1, but this is not essential.

[0111] One of the SMA wires 4.sub.1, . . . , 4.sub.8 on each side s.sub.1, . . . , s.sub.4 provides a force on the moving part 2 in the same direction along the primary axis z. In particular, the SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 form a first group (drawn with solid lines in FIG. 1) that provide a force in one direction (upwards) and the other SMA wires 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 form a second group (drawn with chained lines in FIG. 1) that provide a force in the opposite direction (downwards). Herein, up and down generally refer to opposite directions along the primary axis z, wherein movement of the moving part 2 away from the base 5 of the static part 3 is up.

[0112] The SMA wires 4.sub.1, . . . , 4.sub.8 have an arrangement in which lengths and inclination angles are the same. The configuration of the first and second SMA wires 4.sub.1, 4.sub.2 relative to the first side s.sub.1 is equivalent to the configuration of the fifth and sixth SMA wires 4.sub.5, 4.sub.6 relative to the third side s.sub.3. Similarly, the configuration of the third and fourth SMA wires 4.sub.3, 4.sub.4 relative to the second side s.sub.2 is equivalent to the configuration of the seventh and eights SMA wires 4.sub.7, 4.sub.8 relative to the fourth side s.sub.4.

[0113] As a result of this arrangement of SMA wires 4.sub.1, . . . , 4.sub.8, different combinations of the SMA wires 4.sub.1, . . . , 4.sub.8, when selectively actuated are capable of driving movement of the moving part 2 (second part) with multiple degrees of freedom relative to the static part 3 (first part), as follows.

[0114] The first group of SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 and the second group of SMA wires 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 when commonly actuated drive movement in different directions along the primary axis z.

[0115] Within each group, adjacent pairs of the SMA wires (for example on one hand SMA wires 4.sub.1, 4.sub.7 and on the other hand SMA wires 4.sub.3, 4.sub.5) when differentially actuated drive tilting about a lateral axis perpendicular to the primary axis z.

[0116] Tilting in any arbitrary direction may be achieved as a linear combination of tilts about the two lateral axes.

[0117] Sets of four SMA wires, including two SMA wires from each group, (for example on one hand SMA wires 4.sub.1, 4.sub.2, 4.sub.3, 4.sub.4 and on the other hand SMA wires 4.sub.5, 4.sub.6, 4.sub.7, 4.sub.8) when commonly actuated drive movement along a lateral axis (e.g. the line y=x) perpendicular to the primary axis z. Movement in any arbitrary direction perpendicular to the primary axis z may be achieved as a linear combination of movements along the two lateral axes (e.g. y=x and y=x).

[0118] A control circuit can be electrically connected to the SMA wires 4.sub.1, . . . , 4.sub.8 for supplying drive currents thereto to drive these movements, e.g. as described in WO 2011/104518 A1 (which is incorporated by reference to the maximum extent permissible by law).

[0119] Use in a camera module Although the known actuator 1 may be used to provide positional control of a wide range of types of movable elements (moving parts 2), a non-limitative example in which the known actuator 1 is used in a miniaturised camera.

[0120] Referring also to FIG. 2, a camera module 8 incorporating the known actuator 1 is shown.

[0121] In this example, the known actuator 1 is used in a camera module 8 arranged to perform autofocus (AF) and optical image stabilisation (OIS). The camera module 8 is to be incorporated in a portable electronic device such as a mobile telephone. Thus, miniaturisation is an important design criterion.

[0122] The static part 3 (first part) takes the form of a camera support supporting an image sensor 9 on the base 5. The reverse side of the base 5 (to the image sensor 9) supports an IC (integrated circuit) chip 10 in which a control circuit for the actuator 1 is implemented. The moving part 2 (second part) takes the form of a lens carriage supporting one or more camera lens elements 11 arranged to focus an image onto the image sensor 9. The image sensor 9 captures the image and may be of any suitable type for example a CCD (charge-coupled device) or a CMOS (complementary metal-oxide-semiconductor) device. The camera module 8 is a miniature (or compact) camera module in which the camera lens element 11 has one or more lenses with a diameter of e.g. at most 12 mm. The static part 3 of the camera module 8 also includes an upstanding wall 12 (up relative to the primary axis z) extending around the perimeter of the base 5. The upper end of the wall 12 connects to a top plate 13 which is parallel to the base 5, and which includes an aperture 14 for image forming by the camera lens element(s) 11. In the example shown, the moving part 2 protrudes through the aperture 14 to a point above the top plate 13 (relative to the primary axis z), although in other examples the moving part 2 may only extend above the static part 3 for a portion of a range of motion of the known actuator 1, or not at all.

[0123] In this example, OIS is provided by moving the camera lens element 11 laterally relative to the primary axis z, which is parallel to the optical axis of the camera lens element 11 (and may be collinear with the optical axis when the camera lens element 11 is in a central position). In addition, the camera lens element 11 may be moved along the primary axis z to provide AF. Thus, the AF and OIS functions are combined in the known actuator 1.

[0124] The control circuit implemented using the IC chip 10 may be configured as described in WO 2011/104518 A1 in order to provide this functionality.

[0125] Referring again to FIGS. 1A to 1E, the arrangement of SMA wires 4.sub.1, . . . , 4.sub.8 and the configuration of the connection features 7 in the known actuator 1 will now be described further.

[0126] On each side s (e.g. the first side s.sub.1 illustrated in FIG. 1B), there are two SMA wires 4 (e.g. wires 4.sub.1, 4.sub.2) that cross e.g. when viewed along a direction to normal to that side s.

[0127] The pair of SMA wires 4 on each side s are connected to the moving part 2 via respective connection features 7.sub.1b, . . . , 7.sub.8b (also referred to as moving connection features) and are connected to one of the support posts 6a, 6b via a respective connection feature 7.sub.1a, . . . , 7.sub.8a (also referred to as a static connection features).

[0128] In this example, each connection feature 7 takes the form of a crimp feature, to which an end of a SMA wire 4.sub.1, . . . , 4.sub.8 is crimped. For example, the connection features 7 may be formed from sheet metal, and each may include a portion (for example an end) bent back on itself to form a space for receiving an SMA wire 4.sub.1, . . . , 4.sub.8 prior to securement by crimping.

[0129] Each connection (crimp) feature 7 includes a wire connection point 15 (or simply connection point) which is connected to a support portion 16 by an intermediate portion 17. Although only explicitly labelled for the connection features 7.sub.2a and 7.sub.4a, all of the connection features 7 include a connection point 15 connected to a support portion 16 by an intermediate portion 17. The support portion of each connection (crimp) feature 7 is attached (in any suitable way) to the moving part 2 or to a support post 6.sub.a, 6.sub.b of the static part 3. In this example, the connection points 15 of each connection feature 7 take the form of crimp connections.

[0130] Although illustrated as separate, it is possible for the support portions 16 of the static connection features 7.sub.na to be interconnected, or for the support portions 16 of the moving connection features 7.sub.nb to be interconnected (although not both at once). For example, on the first side s.sub.1, the support portions 16 of connection features 7.sub.1b and 7.sub.2b may be interconnected (or integrally formed).

[0131] Drive currents for the first and second SMA wires 4.sub.1, 4.sub.2 may still be independently varied by using the interconnected connection features 7.sub.1b and 7.sub.2b as a common return. In this way, the number of electrical connections required to be made to the moving part 2 may be reduced.

[0132] On each side s.sub.1, . . . s.sub.4, the support portions 16 are each generally planar and lie in the same plane S.sub.1, S.sub.2, S.sub.3, S.sub.4, referred to as the support plane for the respective side s.sub.1, . . . , s.sub.4. Each support plane S.sub.2, . . . , S.sub.4 is parallel to the primary axis z. The same applies to the regions of the moving part 2 and the support posts 6.sub.a, 6.sub.b of the static part 3 to which the support portions 16 of the connection features 7 are attached.

[0133] The connection points 15, intermediate portions 17 and support portions 16 are integrally formed, e.g. from sheet metal. In this example, the connection points 15 in the form of crimp connections are formed by folding the sheet metal back over itself, followed by crimping when the respective SMA wire 4.sub.1, . . . , 4.sub.8 is between the folded portions.

[0134] The pair of SMA wires 4.sub.1, . . . , 4.sub.8 on each side s.sub.1, . . . , s.sub.4 include an inner SMA wire 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 and an outer wire 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 that is, on average, further from the primary axis z than the inner wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7. The inner wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 are located on first planes that correspond to, or are parallel to, the support planes S.sub.1, . . . , S.sub.4 of the respective sides s.sub.1, . . . , s.sub.4, and the outer wires 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 are located on second planes that are parallel to the respective first planes and are further from the primary axis z than the first planes.

[0135] In the illustrated example, the inner wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 are the same as the first group of SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 which when commonly actuated move the moving part 2 away from the base 5 along the primary axis z. Similarly, the outer wires 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 are the same as the second group of SMA wires 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 when which when commonly actuated move the moving part 2 towards the base 5 along the primary axis z. In an alternative configuration of the known actuator 1, the first group of SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 may be configured as the outer wires whilst the second group of SMA wires 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 are configured as the inner wires.

[0136] Accordingly, on each side s.sub.1, . . . , s.sub.4, the connection points 15 for the outer wires 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 are offset from the respective support planes S.sub.1, . . . , S.sub.4 in a direction away from the primary axis z. This may be achieved by angling the relevant intermediate portions 17, e.g. with a fold between the support portion 16 and the intermediate portion 17 and an opposite fold between the intermediate portion 17 and the connection point 15, so that the connection point 15 is substantially parallel to the support portion 16. For example, see the side views of connections points 7.sub.4a and 7.sub.8b in FIG. 1B, connection points 7.sub.2a and 7.sub.6b in FIG. 1C, connection points 7.sub.4b and 7.sub.8a in FIG. 1D and connection points 7.sub.6a and 7.sub.2b in FIG. 1E.

[0137] The connection points 15 for the inner wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 may be similarly offset from the support portions 16, albeit to a lesser degree, or they may lie in substantially the same plane as the support portions 16.

[0138] All of the connection features 7 for a side s.sub.1, . . . , s.sub.4 may be provided as a single component or coupon (see discussion of FIGS. 12 to 15 hereinafter) for attachment to that side s.sub.1, . . . , s.sub.4. For example, the connection features 7.sub.1a, 7.sub.1b, 7.sub.2a, 7.sub.2b for the first side s.sub.1 may be formed by etching a metal sheet, leaving each of the connection features 7.sub.1a, 7.sub.1b, 7.sub.2a, 7.sub.2b connected to a support structure (for example support 35 in FIG. 12) by one or more sprues/connection members (for example sprues 39 in FIG. 12). The connection features 7.sub.2a, 7.sub.2b which will provide offsetting of the outer SMA wire 4.sub.2 from the support plane S.sub.1 are bent/folded to shape prior to attachment of the coupon to the static and moving parts 3, 2. Preferably the SMA wires 4.sub.1, 4.sub.2 are connected between the connection features 7.sub.1a, 7.sub.1b, 7.sub.2a, 7.sub.2b (for example by crimping) whilst these are still connected to the support structure (for example support 35 in FIG. 12).

[0139] The coupon is connected to the side s.sub.1 by attaching the support portions 16 of the static connection features 7.sub.1a, 7.sub.2b to the post 6.sub.a of the static part 3, and attaching the support portions 16 of the moving connection features 7.sub.1b, 7.sub.2b to the moving part 2. The connection features 7.sub.1a, 7.sub.1b, 7.sub.2a, 7.sub.2b may then be detached from the support structure (for example support 35 in FIG. 12).

[0140] The configuration of the connection features 7.sub.1a, 7.sub.1b, 7.sub.2a, 7.sub.2b relative to the first side s.sub.1 is equivalent to the configuration of the connection features 7.sub.5a, 7.sub.5b, 7.sub.6a, 7.sub.6b relative to the third side s.sub.3. Consequently, identical coupons may be connected to the first and third sides s.sub.1, s.sub.3 to provide the corresponding connection features 7.

[0141] Similarly, the configuration of the connection features 7.sub.3a, 7.sub.3b, 7.sub.4a, 7.sub.5b relative to the second side s.sub.2 is equivalent to the configuration of the connection features 7.sub.7a, 7.sub.7b, 7.sub.8a, 7.sub.8b relative to the fourth side s.sub.4. However, whilst identical coupons may be connected to the second and fourth sides s.sub.2, s.sub.4 to provide the corresponding connection features 7, they cannot be identical to those for the first and third sides s.sub.1, s.sub.3, since the two configurations of connection features 7 are mirror images of each other and hence cannot be brought into coincidence with one another by rotations or translations.

[0142] The present specification concerns improvements in the design of SMA actuators 1, and similar actuators such as, for example, actuator configurations described in WO 2011/104518 A1. See in particular FIGS. 1 to 5, 11 to 20 of WO 2011/104518 A1, and the corresponding passages of description.

[0143] Reduced z-Height Actuators

[0144] One or more miniature cameras are typically included in devices such as smart phones, tablet computers, smart watches, laptop computers and the like. There is a desire to make such devices as thin as possible, both in order to make them lighter and easier to hold for a user and also as a result of aesthetic considerations. This leads to a corresponding requirement to reduce the thickness of miniature camera modules 8, including components such as SMA actuators 1 which provide AF and/or OIS functions to such camera modules 8.

[0145] However, it is not so simple as merely reducing the distance between connection points 15 of connection features 7 features parallel to the primary axis z (for example the distance between connection features 7.sub.1a and 7.sub.2a parallel to the primary axis z). Such simple adjustments will permit reducing the thickness of an actuator along the primary axis z, but at the cost of reducing the angle made between the SMA wires 4.sub.1, . . . , 4.sub.8 and a plane perpendicular to the primary axis z. A reduction in SMA wire 4.sub.1, . . . , 4.sub.8 angle decreases the resonant frequency for motions of the moving part 2 (second part) along the primary axis, adversely affecting the controllability of the moving part 2 for motions along the primary axis z.

[0146] In general, design rules for SMA actuators hold that the length of SMA wires 4.sub.1, . . . , 4.sub.8 should be as long as the space allows, since the longer the natural length of the SMA wire 4.sub.1, . . . , 4.sub.8, the larger the potential length change from phase transitions. Consequently, in known actuators 1 the SMA wires 4.sub.1, . . . , 4.sub.8 extend substantially along the length of the corresponding sides s.sub.1, . . . , s.sub.4. Combined with the hereinbefore outlined considerations of resonant frequency for movements along the primary axis z, the minimum height/thickness of an actuator 1 along the primary axis z is conventionally determined by the desired side s.sub.1, . . . , s.sub.4 length (e.g. by the diameter of an objective lens 11).

[0147] However, the inventors of the present specification have realised that this conventional restriction may be broken without compromising performance of an SMA actuator. In particular, the height/thickness along the primary axis z may be reduced whilst maintaining the SMA wire 4.sub.1, . . . , 4.sub.8 angles by reducing the SMA wire 4.sub.1, . . . , 4.sub.8 lengths so that the SMA wires 4.sub.1, . . . , 4.sub.8 do not extend along the whole length of each side s.sub.1, . . . , s.sub.4. In other words the SMA wires 4.sub.1, . . . , 4.sub.8 are foreshortened relative to the sides s.sub.1, . . . , s.sub.4 (and the known actuator 1).

[0148] Referring also to FIGS. 3A to 3E, a first modified actuator 18 (hereinafter first actuator) is shown.

[0149] FIGS. 3B to 3E have the same geometric relationships to FIG. 3A as FIGS. 1B to 1E to FIG. 1A.

[0150] The first actuator 18 is the same as the known actuator 1 (in the alternative configuration with the first group of SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 configured as the outer wires), except that each of the eight SMA wires 4.sub.1, . . . , 4.sub.8 has an overall length and is angled such that a length of each SMA wire 4.sub.1, . . . , 4.sub.8 perpendicular to the primary axis z is foreshortened relative to a length of a corresponding side s.sub.1, . . . , s.sub.4 of the first to fourth sides s.sub.1, . . . , s.sub.4. In other words, a length of each SMA wire 4.sub.1, . . . , 4.sub.8 perpendicular to the primary axis z is foreshortened relative to a length of the corresponding SMA wire 4.sub.1, . . . , 4.sub.8 of the known actuator 1.

[0151] Referring also to FIG. 4A, a preferred definition of side s.sub.1, s.sub.2, s.sub.3, s.sub.4 lengths is illustrated.

[0152] FIG. 4A shows a projection of the onto a plane perpendicular to the primary axis z (i.e. an x-y plane). Denoting the length of the first side s.sub.1 as l.sub.1, the length of the second side s.sub.2 as l.sub.2, and so forth, the length l.sub.1, . . . , l.sub.4 of each side s.sub.1, . . . , s.sub.4 may correspond to a respective side length of a quadrilateral of maximum area and bounded (or encompassed) by the projections of the SMA wires 4.sub.1, . . . , 4.sub.8 on the plane. The quadrilateral is of maximum area in the sense of being the largest quadrilateral which does not extend at any point beyond the projection of the SMA wires 4.sub.1, . . . , 4.sub.8 onto the x-y plane. The quadrilateral may equally be regarded as formed by extending lines parallel to the projections of the inner SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 until those lines intersect the lines extended from adjacent sides s. The lengths l.sub.1, . . . l.sub.4 correspond to an at rest or neutral configuration in which all of the SMA wires 4.sub.1, . . . , 4.sub.8 are unpowered.

[0153] Although FIG. 4A corresponds to the configuration of the known actuator 1, such that the quadrilateral takes the form of a square, depending on the specific configuration of the SMA wires 4.sub.1, . . . , 4.sub.8, the quadrilateral may be a kite, a parallelogram, or even an irregular quadrilateral.

[0154] For example, referring also to FIG. 4B, the projection of the SMA wires 4.sub.1, . . . , 4.sub.8 onto a plane perpendicular to the primary axis z is shown for a case when the quadrilateral so formed is irregular. Again, the lengths l.sub.1, . . . , l.sub.4 of each side s.sub.1, . . . , s.sub.4 may be conveniently defined as the lengths the sides of the quadrilateral.

[0155] In both of FIGS. 4A and 4B, the SMA wires 4.sub.1, . . . , 4.sub.8 extend for distances perpendicular to the primary axis z which substantially span the respective side s.sub.1, . . . , s.sub.4 lengths l.sub.1, . . . , l.sub.8 (minus small shortfalls due to practicalities of connections, the sizes of which have been exaggerated in FIGS. 4A and 4B for visual clarity).

[0156] However, referring also to FIG. 4C, the equivalent projection of the first actuator 18 is shown.

[0157] Whilst the orientation of the SMA wires 4.sub.1, . . . , 4.sub.8 keeps the quadrilateral the same shape as for the known actuator 1, the projected lengths of the SMA wires 4.sub.1, . . . , 4.sub.8 perpendicular to the primary axis z are significantly foreshortened.

[0158] Unless stated otherwise, any reference hereinafter to the lengths l.sub.1, . . . , l.sub.4 of the first to fourth sides s.sub.1, . . . , s.sub.4 should be understood as referring to the lengths of the sides of the quadrilateral of maximum area and bounded by the projections of the SMA wires 4.sub.1, . . . , 4.sub.8 on the plane perpendicular to the primary axis z.

[0159] Alternative definitions of the side lengths are possible, even if not preferred herein. For example, the length of the first side s.sub.1 as illustrated in FIG. 3 could alternatively be considered to be the dimension of the base 5 of the static part 3 parallel to the y-axis as drawn. Similarly, each of the first to fourth sides s.sub.1, . . . , s.sub.4 could be considered to correspond to a physical edge of the static part 3, so that the length of each side s.sub.1, . . . , s.sub.4 would be equal to the length of the respective edge of the static part.

[0160] Alternatively, the length of each side s.sub.1, . . . , s.sub.4 could be considered to correspond to a dimension of the first actuator 18 parallel to that side, s.sub.1, . . . , s.sub.4 (for example in implementations in which the static part 3 does not define an outer perimeter of the actuator 18). In such cases, each length may correspond to a respective edge/side of the first actuator 18.

[0161] In other implementations it may be more convenient to define the length of each side s.sub.1, . . . , s.sub.4 as corresponding to a respective side length of a quadrilateral which bounds a projection of the moving part 2 onto the plane perpendicular to the primary axis z.

[0162] Given that the lengths of the SMA wires 4.sub.1, . . . , 4.sub.8 change in use whereas the side lengths l.sub.1, . . . , l.sub.4 do not (the quadrilateral is defined relative to an unpowered neutral condition), it should be noted that any comparisons made herein between the lengths of the SMA wires 4.sub.1, . . . , 4.sub.8 (or components thereof) and dimensions such as the lengths l.sub.1, . . . , l.sub.4 of the sides s.sub.1, . . . , s.sub.4, also refer to the same unpowered (or neutral, or central), configuration in which the moving part 2 is in the middle of its range of motion relative to the static part 3.

[0163] Preferably, each of the eight SMA wires 4.sub.1, . . . , 4.sub.8 of the first actuator 18 should be angled, and the respective lengths of the SMA wires 4.sub.1, . . . , 4.sub.8 perpendicular to the primary axis z foreshortened, such that a resonant frequency for movement of the moving part 2 relative to the static part 3 along the primary axis z is increased relative to a configuration in which the length of each SMA wire 4.sub.1, . . . , 4.sub.8 perpendicular to the primary axis z is substantially equal to the length l.sub.1, . . . , l.sub.4 of a corresponding side s.sub.1, . . . , s.sub.4 of the first to fourth sides s.sub.1, . . . , s.sub.4. In this context, substantially equal may correspond to more than 80% of a corresponding side length l.sub.1, . . . , l.sub.4.

[0164] In other words, compared to the known actuator 1, the first actuator 18 may have an advantageously increased resonant frequency for movements along the primary axis z whilst retaining the same overall height along the primary axis z, or the first actuator 18 may maintain the same resonant frequency for movements along the primary axis z whilst reducing the overall height along the primary axis z.

[0165] The comparison relative to the known actuator 1 is helpful for understanding how the lengths of each SMA wire 4.sub.1, . . . , 4.sub.8 perpendicular to the primary axis z are foreshortened relative to the lengths l.sub.1, . . . , l.sub.4 of a corresponding side s.sub.1, . . . , s.sub.4. For example, the component of each SMA wire 4.sub.1, . . . , 4.sub.8 perpendicular to the primary axis z may preferably be 80% or less, 75% or less, 75% or less, or 70% or less than the length l.sub.1, . . . l.sub.4 of the respective side s.sub.1, . . . , s.sub.4 (i.e. the dimension of the respective side of the quadrilateral defined hereinbefore).

[0166] Alternatively, if the side s.sub.1, . . . , s.sub.4 lengths are defined relative to dimensions of the static part 3 (or the first actuator 18), as described hereinbefore, the component of each SMA wire 4.sub.1, . . . , 4.sub.8 perpendicular to the primary axis z may preferably be 80% or less, 75% or less, 75% or less, or 70% or less than the length of the respective side s.sub.1, . . . , s.sub.4.

[0167] In another alternative, if the side s.sub.1, . . . , s.sub.4 lengths were defined relative to dimensions of the moving part 2, as described hereinbefore, the component of each SMA wire 4.sub.1, . . . , 4.sub.8 perpendicular to the primary axis z may preferably be 90% or less, 85% or less, 83% or less, or 80% or less than the length of the respective side.

[0168] Still further definitions internal to the first actuator 18 are possible, based on the angles of inclination of each SMA wire 4.sub.1, . . . , 4.sub.8. For example, each SMA wire 4.sub.1, . . . , 4.sub.8 should make an acute angle of greater than or equal to 14 degrees to a plane perpendicular to the primary axis z, for example greater than or equal to 15 degrees, greater than or equal to 16 degrees, or greater than or equal to 17 degrees.

[0169] Although the inclination angles of the SMA wires 4.sub.1, . . . , 4.sub.8 may always be increased by increasing the length of each SMA wire 4.sub.1, . . . , 4.sub.8 parallel to the primary axis z, there are practical limits imposed by the height of the first actuator 18 along the primary axis z, which in many applications (for example miniature cameras) should be kept to a minimum. Preferably, each of the SMA wires 4.sub.1, . . . , 4.sub.8 has a length parallel to the primary axis z which is less than or equal to 1.2 times a maximum dimension of the static part 3 parallel to the primary axis z. For example, less than or equal to 1.1 times, or less than equal to 1.0 times the maximum dimension of the static part 3 parallel to the primary axis z. Similar considerations and bounds apply if the lengths of the SMA wires 4.sub.1, . . . , 4.sub.8 parallel to the primary axis z are instead considered by reference to the dimensions of the moving part 2. Preferably, no more than 30% of the length of each SMA wire 4.sub.1, . . . , 4.sub.8 parallel to the primary axis z should extend above (relative to the primary axis) a top surface of the static part 3 and/or a top surface of the moving part 2.

[0170] It should be noted that the ranges of relative lengths, angles and so forth described herein have been selected because these ranges (or bounds) are particularly suited to SMA actuators for use in miniature cameras, taking into account typical sizes of objective lenses, maximum heights along the primary axis z, and the need to obtain suitable response frequencies for providing AF and/or OIS functions in such miniature cameras when a device incorporating the camera is held in a hand.

[0171] In the first actuator 18, the foreshortening of the SMA wires 4.sub.1, . . . , 4.sub.8 relative to the side s.sub.1, . . . , s.sub.4 lengths l.sub.1, . . . , l.sub.4 provides additional freedom for the relative positioning of the SMA wires 4.sub.1, . . . , 4.sub.8 on the sides s.sub.1, . . . , s.sub.4. In a simple case, the connection features 7 (defining the connection points 15) may be disposed so that each SMA wire 4.sub.1, . . . , 4.sub.8 is located centrally on the respective side s.sub.1, . . . , s.sub.4.

[0172] Alternatively, and as illustrated in FIG. 3, the connection features 7 (and associated connection points 15) corresponding to the first and second sides s.sub.1, s.sub.2 are offset towards a first corner joining the first and second sides s.sub.1, s.sub.2, whilst the connection features 7 (and associated connection points 15) corresponding to the third and fourth sides s.sub.3, s.sub.4 are offset towards a third corner joining the third and fourth sides s.sub.3, s.sub.4. In other words, the connection features 7 (and associated connection points 15) are offset towards the posts 6.sub.a, 6.sub.b on each side s.sub.1, . . . , s.sub.4. This configuration may be advantageous over the simple solution of centrally locating the SMA wires 4.sub.1, . . . , 4.sub.8, since it makes space available at the diagonally opposite corners of the moving part 2. For example, the regions 19a, 19b of the moving part 2 indicated in FIG. 3A may be omitted/truncated, generating additional free volume for positioning components of the first actuator 18 and/or a device incorporating the first actuator 18 (for example a camera). In this way, the first actuator 18 may have reduced height (along the primary axis z) and also reduced lateral size (perpendicular to the primary axis z) compared to the known actuator 1.

[0173] In an alternative configuration (not illustrated) of the first actuator, instead of being offset towards the first and third (static) corners, the connection features 7 (and associated connection points 15) may instead be offset on the second and third sides s.sub.2, s.sub.3 towards a second (moving) corner joining those sides, whilst the connection features 7 (and associated connection points 15) on the first and fourth sides s.sub.1, s.sub.4 are offset towards a fourth (moving) corner joining those side.

[0174] In an further alternative configuration (not illustrated) of the first actuator, the connection features 7 (and associated connection points 15) corresponding to the first side s.sub.1 may be offset towards the first (static) corner joining the first side s.sub.1 to the second side s.sub.2, the connection features 7 (and associated connection points 15) corresponding to the second side s.sub.2 may be offset towards the second (moving) corner joining the second side s.sub.2 to the third side s.sub.3, the connection features 7 (and associated connection points 15) corresponding to the third side s.sub.3 may be offset towards the third (static) corner joining the third side s.sub.3 to the fourth side s.sub.4, and the connection features 7 (and associated connection points 15) corresponding to the fourth side s.sub.4 may be offset towards the fourth (moving) corner joining the fourth side s.sub.4 to the first side s.sub.1.

[0175] Referring also to FIGS. 5A to 5E, a second modified actuator 20 (hereinafter second actuator) is shown.

[0176] FIGS. 5B to 5E have the same geometric relationships to FIG. 5A as FIGS. 1B to 1E to FIG. 1A.

[0177] The second actuator 20 is the same as the first actuator 18, except that the connection features 7 (and corresponding connection points 15) are offset differently relative to the sides s.sub.1, . . . , s.sub.4. In the second actuator 20, the connection features 7 (and associated connection points 15) corresponding to the third and fourth sides s.sub.3, s.sub.4 are offset towards the third (static) corner joining the third and fourth sides s.sub.3, s.sub.4, in the same way as the first actuator 18.

[0178] Also in the same way as the first actuator 18, the connection features 7 (and associated connection points 15) corresponding to the first side s.sub.1 are offset towards the first (static) corner joining the first and second sides s.sub.1, s.sub.2.

[0179] However, in contrast to the first actuator 18, the connection features 7 (and associated connection points 15) corresponding to the second side s.sub.2 are offset towards a second (moving) corner joining the second and third sides s.sub.2, s.sub.3.

[0180] The offsetting of the connection features 7 (and associated connection points 15) corresponding to the second side s.sub.2 defines a corresponding volume 21 which is within a footprint of the static part 3. In this example, the volume 21 is over the base 5 of the static part 3, whilst being outside the loop formed by the SMA wires 4.sub.1, . . . , 4.sub.8 so that even in use the moving part 2 will not intersect the volume 21. In general, the footprint of the static part 3 represents a projected area of the static part 3 on a plane perpendicular to the primary axis z.

[0181] The additional volume 21 may be utilised for positioning components of the second actuator 20 and/or of a device incorporating the second actuator 20 (for example a camera) (such components are also referred to as additional components). For example, the volume may at least partly receive a portion of the static part 3 and/or one or more terminal connections which are used for making electrical connections to the SMA wires 4.sub.1, . . . , 4.sub.8, in particular when the volume 21 is adjacent or proximate to elements of the static part 3 such as the posts 6.sub.a, 6.sub.b or similar structure.

[0182] In this way, the second actuator 20 may have reduced height (along the primary axis z) and also reduced lateral size (perpendicular to the primary axis z) compared to the known actuator 1.

[0183] Alternative configurations (not shown) are possible, corresponding to cyclic permutations of the offsets illustrated for the second actuator 20.

[0184] Balancing Tilt Movements for Foreshortened SMA Wires

[0185] When SMA wires 4.sub.1, . . . , 4.sub.8 foreshortened to allow increased inclination angles are disposed centrally on the corresponding sides s.sub.1, . . . , s.sub.4, the SMA wires 4.sub.1, . . . , 4.sub.8 remain balanced for tilts about the y=x and y=x axes.

[0186] However, for the first and second actuators 18, 20, the SMA wires 4.sub.1, . . . , 4.sub.8 are not central on the sides s.sub.1, . . . , s.sub.4 of the actuator 18, 20, and the crossing points of the SMA wires 4.sub.1, . . . , 4.sub.8 are offset from the centre of the actuator 18, 20 in the x/y direction.

[0187] Referring also to FIGS. 6A and 6B, the first actuator 18 is illustrated to highlight the offset of wire crossing points. FIG. 6A is a side view of the first actuator 18 along the y-axis as shown, and FIG. 6B is a plan view. For visual clarity, the axes are shown displaced from the centre of the first actuator 18 in FIG. 6B.

[0188] For each side s.sub.1, . . . , s.sub.4, projections of the two corresponding wires 4.sub.1, . . . , 4.sub.8 onto a plane (for example the support plane S.sub.1, . . . , S.sub.4) parallel to that side s.sub.1, . . . , s.sub.4 intersect at a crossing point C.sub.1, . . . , C.sub.4. FIG. 6A illustrates a side view showing the fourth side s.sub.4, and the crossing point C.sub.4 is offset by a distance d.sub.4 from an intersection 22 of the diagonals of a shape formed by sides s.sub.1, . . . , s.sub.4. Respective offsets d.sub.1, d.sub.2, d.sub.3 may be similarly defined for the first, second and third sides s.sub.1, s.sub.2, s.sub.3.

[0189] A line 23.sub.1, . . . , 23.sub.4 may be drawn perpendicular to each side s.sub.1, . . . , s.sub.4 and passing through the respective crossing point C.sub.1, . . . , C.sub.4. Referring in particular to FIG. 6B, the offsets d.sub.1, . . . , d.sub.4 of the lines 23.sub.1, . . . , 23.sub.4 corresponding to the crossing points C.sub.1, . . . , C.sub.4 from the intersection 22 of the diagonals may be observed.

[0190] A consequence of the offsets d.sub.1, . . . , d.sub.4 is that the tilt to wire length gain about the diagonal containing the second and fourth (moving) corners will be higher than the tilt to wire length gain about the first and third (static) corners. The term tilt to wire length gain refers to the ratio between tilt angle about a particular axis and the corresponding length change of SMA wires 4.sub.1, . . . , 4.sub.8 needed to provide that tilt angle.

[0191] Although illustrated in FIGS. 6A and 6B for the first actuator 18, similar considerations of offsets d.sub.1, . . . , d.sub.4 apply to the second actuator 20, or indeed any actuator utilising SMA wires 4.sub.1, . . . , 4.sub.8 which are foreshortened relative to the sides s.sub.1, . . . , s.sub.4 without being centrally positioned on the sides s.sub.1, . . . , s.sub.4.

[0192] Disparities in tilt to wire length gains about different tilting axes may be reduced, or even eliminated, by shifting each crossing point C.sub.1, . . . , C.sub.4 towards alignment with the projection of the intersection 22 of the diagonals onto the respective side s.sub.1, . . . , s.sub.4.

[0193] For example, referring also to FIGS. 7A and 7B, a third modified actuator 24 (hereinafter third actuator) is shown. FIG. 7A is a side view of the third actuator 24 along the y-axis, and FIG. 7B is a plan view. For visual clarity, the axes are shown displaced from the centre of the third actuator 24 in FIG. 7B.

[0194] The third actuator 24 is the same as the first actuator 18, except that the connection points 15 for attaching the SMA wires 4.sub.1, . . . , 4.sub.8 to the moving part 2 are shifted towards the centre of the moving part 2 along the primary axis z.

[0195] This also shifts the crossing points C.sub.1, . . . , C.sub.4 towards alignment with the intersection 22. Preferably, the connection points 15 for attaching the SMA wires 4.sub.1, . . . , 4.sub.8 to the static part 3 are not moved further apart, to avoid increasing the height of the third actuator 24 along the primary axis z. This may slightly reduce the inclination angles of the SMA wires 4.sub.1, . . . , 4.sub.8, although this may be compensated by further shortening of the overall lengths of the SMA wires 4.sub.1, . . . , 4.sub.8 if needed.

[0196] In general, the connection points 15 may be arranged in order to minimise the offsets d.sub.1, . . . , d.sub.4 of the lines 23.sub.1, . . . , 23.sub.4 passing through the respective crossing points C.sub.1, . . . , C.sub.4 from the intersection 22 of the diagonals. Ideally, the lines 23.sub.1, . . . , 23.sub.4 will substantially intersect the intersection 22 of the diagonals, as illustrated in FIGS. 7A and 7B, although perfect coincidence may not always be possible given the need to avoid excessively reducing the SMA wire 4.sub.1, . . . , 4.sub.8 inclination angles. The language substantially intersect may correspond to there being a minimum distance, i.e. the offsets d.sub.1, . . . , d.sub.4 between a line 23.sub.1, . . . , 23.sub.4 and the intersection 22 being less than or equal to 15% of a length of the respective side s.sub.1, . . . , s.sub.4. For example, less than or equal to 10%, or less than or equal to 5%.

[0197] In this way, foreshortened and offset SMA wire 4.sub.1, . . . , 4.sub.8 configurations may be obtained which retain similar or identical sensitivity, i.e. tilt to wire length gains, around the different tilt axes in the x-y plane.

[0198] Whilst it may be possible to simply shift the connection points 15 to the moving part 2 by simply translating the corresponding connection features 7.sub.1b, . . . , 7.sub.8b closer towards the centre of the moving part 2 along the primary axis, it may be simpler to integrate the pairs of (moving) connection features 7 on each side s.sub.1, . . . , s.sub.4. For example, in the third actuator 24, the first and second SMA wires 4.sub.1, 4.sub.2 are connected to the moving part 2 via a first integrated connection feature 25.sub.1, the third and fourth SMA wires 4.sub.3, 4.sub.4 are connected to the moving part 2 via a second integrated connection feature 25.sub.2, the fifth and sixth SMA wires 4.sub.5, 4.sub.6 are connected to the moving part 2 via a third integrated connection feature 25.sub.3, and the seventh and eighth SMA wires 4.sub.7, 4.sub.8 are connected to the moving part 2 via a fourth integrated connection feature 25.sub.4. Each integrated connection feature 25.sub.1, . . . , 25.sub.4 includes an inner portion 26, an intermediate portion 27 and an outer portion 28. Each inner portion 26 is attached to the moving part 2 substantially in the respective support plane S.sub.1, . . . , S.sub.4, and also provides a connection point 15 for the respective inner SMA wire 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8.

[0199] Each intermediate portion 27 is angled/folded to provide an offset of the connected outer portion 28 from the respective support plane S.sub.1, . . . , S.sub.4 in a direction away from the primary axis z. Each outer portion 28 provides a connection point for the respective outer SMA wire 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7.

[0200] The integrated connection features 25 may be formed of the same materials and using the same methods as the connection feature 7. If the integrated connection features 25 are made of metal or other conductive materials, then the integrated connection features 25 may be used as a common return for currents in the pair of connected SMA wires 4.sub.1, . . . , 4.sub.8, as described hereinbefore.

[0201] Although the third actuator 24 has been described as a modification of the first actuator 18, the same principles are applicable to the second actuator 20, or any other SMA actuator utilising SMA wires 4.sub.1, . . . , 4.sub.8 which are foreshortened relative to the sides s.sub.1, . . . , s.sub.4 without being centrally positioned on the sides s.sub.1, . . . , s.sub.4.

[0202] The examples of the first and third actuators 18, 24 have sides s.sub.1, . . . , s.sub.4 forming a square shape, however, similar principle are applicable to sides s.sub.1, . . . , s.sub.4 which, projected onto a plane perpendicular to the primary axis form any other regular or irregular quadrilateral such as, for example, a rectangle, a parallelogram, a kite, and so forth. In the general case, a diagonal of the four sides s.sub.1, . . . , s.sub.4 corresponds to a line joining a pair of corners of the four sides which do not have a side in common. In other words, a diagonal connects the first and third corners and another diagonal connected the second and fourth corners (corners as defined hereinbefore), and the crossing points C.sub.1, . . . , C.sub.4 may be adjusted to align with the intersection 22 of these diagonals.

[0203] Offsetting connection points to generate additional free volumes Foreshortening the SMA wires 4.sub.1, . . . , 4.sub.8 relative to the side s.sub.1, . . . , s.sub.4 lengths l.sub.1, . . . , l.sub.4 is not the only approach to generating additional, usable, free volume within the footprint of an SMA actuator.

[0204] In general, one or more connection points 15 (for example provided by connection features 7) corresponding to at least one (but not all) of the sides s.sub.1, . . . , s.sub.4 may be displaced relative to corresponding connection points 15 of a reference actuator, so as to define an additional volume 29 (FIG. 8) relative to that reference actuator.

[0205] The known actuator 1 is an example of a suitable reference actuator. In general the reference actuator is the same as the known actuator 1, except that the specific configurations of connection points 15 for the SMA wires 4.sub.1, . . . , 4.sub.8 may vary from the known actuator 1 whilst providing for the same degrees of freedom of movement of the moving part 2 relative to the static part 3.

[0206] Additionally, in a suitable reference actuator, the relative positioning of the connection points 15 on the first and third sides s.sub.1, s.sub.3 substantially correspond, and the relative positioning of the connection points 15 on the second and fourth sides s.sub.2, s.sub.4 also substantially correspond.

[0207] In other words, without specifying displacements relative to a reference actuator, the one or more connection points 15 on one side, for example the first side s.sub.1 may be offset differently relative to the first side s.sub.1 (or the corresponding support plane S.sub.1) compared to the offsets of equivalent connection points 15 corresponding to at least one of the other sides s.sub.2, s.sub.3, s.sub.4 relative to that other side s.sub.2, s.sub.3, s.sub.4. Such different relative offset(s) of the one or more connection points on the first side s.sub.1 may define the additional volume 29 (FIG. 8).

[0208] A projected area of the additional volume 29 (FIG. 8) on a plane perpendicular to the primary axis z may be at least partly (and more preferably wholly) within a projected area of the static part 3 on the same plane. In other words, the additional volume 29 (FIG. 8) is within lateral footprint/area of the actuator.

[0209] In other examples, the projected area of the additional volume 29 on a plane perpendicular to the primary axis may be wholly or partly within a projected boundary, on the same plane, of the loop formed by the SMA wires 4.sub.1, . . . , 4.sub.8.

[0210] For example, referring also to FIGS. 8A to 8E, a fourth modified actuator 30 (hereinafter the fourth actuator) is shown.

[0211] FIGS. 8B to 8E have the same geometric relationships to FIG. 8A as FIGS. 1B to 1E to FIG. 1A.

[0212] The fourth actuator 30 is the same as the known actuator 1 (in the alternative configuration with the first group of SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 configured as the outer wires), except that the connection features 7.sub.3a, 7.sub.3b, 7.sub.4a, 7.sub.4b on the second side s.sub.2 and the connection features 7.sub.7a, 7.sub.7b, 7.sub.8a, 7.sub.8b on the fourth side s.sub.4 have all been displaced parallel to the primary axis z by an amount z. In this way, a first additional volume 29.sub.a is defined on the second side s.sub.2, adjacent to the first post 6.sub.a and below (relative to the primary axis z) the displaced connection feature 7.sub.4a. Similarly, a second additional volume 29.sub.b is defined on the fourth side s.sub.4, adjacent to the second post 6.sub.b and below the displaced connection feature 7.sub.8a.

[0213] The additional volumes 29.sub.a, 29.sub.b are free volumes in the sense that the moving part 2 will not intersect them in use, so that the additional volumes 29.sub.a, 29.sub.b may be utilised for positioning additional components. The locations of the additional volumes 29.sub.a, 29.sub.b next to the posts 6.sub.a, 6.sub.b of the static part 3 may be particularly well suited for receiving one or more terminals coupled to the SMA wires 4.sub.1, . . . , 4.sub.8, and used for making electrical connection to the fourth actuator 30. In this way, the fourth actuator 30 may have reduced lateral size (perpendicular to the primary axis z) compared to the known actuator 1, by fitting more components within the existing area of the static part 3 (in this example over the base 5).

[0214] Although illustrated with the connection points 15 (provided by connection features 7) of the second and fourth sides s.sub.2, s.sub.4 displaced by z along the primary axis z relative to the known actuator 1, in alternative configurations (not illustrated), the connection points 15 of any pair of the first to fourth sides s.sub.1, . . . , s.sub.4 may be displaced by z along the primary axis z relative to the known actuator 1.

[0215] Referring also to FIGS. 9A to 9E, a fifth modified actuator 31 (hereinafter the fifth actuator) is shown.

[0216] FIGS. 9B to 9E have the same geometric relationships to FIG. 9A as FIGS. 1B to 1E to FIG. 1A.

[0217] The fifth actuator 31 is the same as the fourth actuator 30, except that only the connection features 7.sub.3a, 7.sub.3b, 7.sub.4a, 7.sub.4b on the second side s.sub.2 are displaced parallel to the primary axis z by an amount z, so that only the first additional volume 29.sub.a is defined.

[0218] Although illustrated with the connection points 15 (provided by connection features 7) of the second side s.sub.2 displaced by z along the primary axis z relative to the known actuator 1, in alternative configurations (not illustrated), the connection points 15 of any one of the first to fourth sides s.sub.1, . . . , s.sub.4 may be displaced by z along the primary axis z relative to the known actuator 1.

[0219] Although the fourth and fifth actuators 30, 31 have been illustrated with the displacements z in a positive sense along the primary axis z, in other implementations (not illustrated) the displacements z may be made in a negative sense along the primary axis z, so as to define additional volumes 29.sub.a, 29.sub.b above the SMA wires 4.sub.1, . . . , 4.sub.8. Such additional volumes 29.sub.a, 29.sub.b may be useful for positioning additional components, in the same way as additional volumes 29.sub.a, 29.sub.b defined below the SMA wires 4.sub.1, . . . , 4.sub.8.

[0220] Displacements of one or more connection points to define additional volumes 29.sub.a, 29.sub.b are not limited to offsets along the primary axis z.

[0221] Referring also to FIGS. 10A to 10E, a sixth modified actuator 32 (hereinafter the sixth actuator) is shown.

[0222] FIGS. 10B to 10E have the same geometric relationships to FIG. 10A as FIGS. 1B to 1E to FIG. 1A.

[0223] The sixth actuator 32 is the same as the known actuator 1 (in the alternative configuration with the first group of SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 configured as the outer wires), except that the connection points 15 at which the third and fourth wires 4.sub.3, 4.sub.4 are attached to the static part 3 (via the first post 6.sub.a) have been displaced perpendicularly away (relative to the primary axis z) from the respective support plane S.sub.2 by an amount ay, in this case parallel to the y-axis as illustrated. In the example shown in FIG. 10, this is accomplished by angling/folding the intermediate portions 17 of the connection features 7.sub.3a, 7.sub.4a to increase the offset between the respective support portions 16 and connection points 15 by y. Alternatively, the shape of the post 6.sub.a could be modified, or a protrusion (not shown) extending along the y-axis could be added to the post 6.sub.a.

[0224] The connection points 15 at which the third and fourth wires 4.sub.3, 4.sub.4 are attached to the moving part 2 are the same as in the known actuator 1, causing the third and fourth SMA wires 4.sub.3, 4.sub.4 to be inclined relative to the support plane S.sub.2. The shape of the loop formed by the SMA wires 4.sub.1, . . . , 4.sub.8, when viewed from above or otherwise projected onto a plane perpendicular to the primary axis z, is an irregular quadrilateral.

[0225] In this way, a first additional volume 29.sub.a is defined on the second side s.sub.2, between the third and fourth SMA wires 4.sub.3, 4.sub.4 and the first post 6.sub.a (equivalently, between the third and fourth SMA wires 4.sub.3, 4.sub.4 and the primary axis z). The additional volume 29.sub.a may be utilised for positioning additional components of the sixth actuator 32 and/or of a device incorporating the sixth actuator 32 (for example a camera). The locations of the additional volume 29.sub.a next to the post 6.sub.a of the static part 3 may be particularly well suited for accommodating one or more terminals coupled to the SMA wires 4.sub.1, . . . , 4.sub.8, and used for making electrical connection to the sixth actuator 32. In this way, the sixth actuator 32 may have reduced lateral size (perpendicular to the primary axis z) compared to the known actuator 1, by fitting more components within the existing area of the static part 3 (in this example over the base 5).

[0226] The size of the first additional volume 29.sub.a in the sixth actuator 32 may be further increased by switching the third SMA wire 4.sub.3 to be the inner wire and the fourth SMA wire 4.sub.4 to be the outer wire in the second side s.sub.2.

[0227] Although illustrated with one end of each of the SMA wires 4.sub.3, 4.sub.4 of the second side s.sub.2 away from the support plane S.sub.2 the connection points 15 of any one of the first to fourth sides s.sub.1, . . . , s.sub.4 may be displaced analogously. In further configurations (not illustrated), the connection points 15 of any pair of the first to fourth sides s.sub.1, . . . , s.sub.4 may be displaced analogously. In some configurations, both ends of each of the SMA wires 4.sub.3, 4.sub.4 may be displaced in a direction perpendicular to the primary axis z (i.e. along the y axis as illustrated in FIG. 10A) relative to the reference actuator. In such configurations, each of the SMA wires 4.sub.3, 4.sub.4 are parallel to the x axis.

[0228] In the reference actuator, the pair of SMA wires 4.sub.1, . . . , 4.sub.8 on each side s.sub.1, . . . , s.sub.4 are substantially parallel (e.g. within t 5 degrees) to each other when projected onto a plane perpendicular to the primary axis z (i.e. when viewed from above/below). The known actuator 1 satisfies this condition. In the fourth, fifth and sixth actuators 30, 31, 32, the displacements z, y of the connection points 15 on at least one side s.sub.1, . . . , s.sub.4, relative to the known actuator, have preserved this relationship, such that the SMA wires 4.sub.1, . . . , 4.sub.8 on each side remain parallel when projected onto a plane perpendicular to the primary axis z. However, displacements of connection points 15 relative to the reference actuator do not need to maintain this relationship.

[0229] For example, referring also to FIGS. 11A to 11E, a seventh modified actuator 33 (hereinafter the seventh actuator) is shown.

[0230] FIGS. 11B to 11E have the same geometric relationships to FIG. 11A as FIGS. 1B to 1E to FIG. 1A.

[0231] The seventh actuator 33 is the same as the known actuator 1 (in the alternative configuration with the first group of SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 configured as the outer wires), except that the connection features 7.sub.3a, 7.sub.4a and 7.sub.4b on the second side are displaced. In the reference actuator in the form of the alternative configuration of the known actuator 1, the first group of SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 provide the outer wires, and the corresponding connection points 15 are offset by a distance A perpendicular from the respective support planes S.sub.1, . . . , S.sub.4. The distance A is shown in FIG. 11C for connection feature 7.sub.1a, which is providing a connection point 15 not displaced relative to the reference actuator. In the same reference actuator, the second group of SMA wires 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 provide the outer wires, and the corresponding connection points 15 are disposed substantially on the respective support planes S.sub.1, . . . , S.sub.4.

[0232] In the seventh actuator 33, the connection point 15 of the third SMA wire 4.sub.3 to the moving part 2, provided by the connection feature 7.sub.3b, is displaced perpendicularly away from the support plane S.sub.2 by an amount y=2, whilst the connection point of the third SMA wire 4.sub.3 to the first part 3 (first post 6.sub.a), provided by the connection feature 7.sub.3a, is substantially on the support plane S.sub.2.

[0233] The connection point 15 of the fourth SMA wire 4.sub.4 to the moving part 2, provided by the connection feature 74, is displaced perpendicularly away from the support plane S.sub.2 by an amount y=, whilst the connection point of the fourth SMA wire 4.sub.4 to the static part 3 (first post 6.sub.a), provided by the connection feature 7.sub.4a, is displaced perpendicularly away from the support plane S.sub.2 by an amount y=2.

[0234] In this way, the third and fourth SMA wires 4.sub.3, 4.sub.4 are not parallel when projected onto a plane perpendicular to the primary axis z, and the third and fourth SMA wires 4.sub.3, 4.sub.4 lie close to a plane (also referred to as the wire plane) that is angled relative to the primary axis z (and the support plane S.sub.2). In this example, the wire plane is further from the support plane S.sub.2 towards the lower end of the actuator (i.e. towards the first part 3). Accordingly, a first additional volume 29.sub.a is defined between the wire plane and the moving part 2. Put another way, from the top of the actuator 33, the third and fourth SMA wires 4.sub.3, 4.sub.4 are angled away from the primary axis z.

[0235] The additional volume 29.sub.a may be utilised for positioning additional components.

[0236] The location of the additional volume 29.sub.a next to the static part 3 may be particularly well suited for receiving, at least partly, one or more terminals coupled to the SMA wires 4.sub.1, . . . , 4.sub.8, and used for making electrical connection to the seventh actuator 33. In this way, the seventh actuator 33 may have reduced lateral size (perpendicular to the primary axis z) compared to the known actuator 1, by fitting more components within the existing area of the static part 3 (in this example over the base 5).

[0237] Although illustrated with displacements of the SMA wires 4.sub.3, 4.sub.4 of the second side s.sub.2 compared to the known actuator 1, in alternative configurations (not illustrated), the connection points 15 of any one of the first to fourth sides s.sub.1, . . . , s.sub.4 may be displaced analogously. In still further configurations (not illustrated), the connection points 15 of any pair of the first to fourth sides s.sub.1, . . . , s.sub.4 may be displaced analogously.

[0238] Although illustrated with the displacements ay having magnitudes equal to an offset A of the outer wires in the known actuator 1, or multiples thereof, this is not essential, and the displacements ay may have arbitrary magnitude (within practical limits imposed by the overall size of the seventh actuator 33.

[0239] The fourth to seventh actuators 30, 31, 32, 33 are examples of SMA actuators in which one or more connection points 15 (for example provided by connection features 7) corresponding to at least one of the sides s.sub.1, . . . , s.sub.4 may be displaced relative to corresponding connection points 15 of a reference actuator, so as to define an additional volume 29 relative to that reference actuator. In general, the one or more connection points 15 corresponding to at least one of the sides s.sub.1, . . . , s.sub.4 may be displaced by vectors (x, y, z). In other words, combinations of the types of displacement illustrated by the fourth to seventh actuators 30, 31, 32, 33 are possible. The connection points 15 on up to three of the sides s.sub.1, . . . , s.sub.4 may be displaced relative to the reference actuator, in order to define a first volume 29.sub.a, optionally a second volume 29.sub.b and, in further examples (not illustrated), a third additional volume and so forth.

[0240] Improved Fabrication Methods for SMA Actuators

[0241] As described hereinbefore, the connection features 7 of the known actuator 1 are generally provided by at least two types of couponsa first type for the first and third sides s.sub.1, s.sub.3, and a second type for the second and fourth sides s.sub.2, s.sub.4.

[0242] This is because the two configurations of connection features 7 are mirror images of each other and hence cannot be brought into coincidence with one another by rotations or translations.

[0243] Using two distinct types of coupons adds to the manufacturing complexity of producing the known actuator 1. Additionally, working with two types of coupons may make it harder to minimise variations in SMA wire diameters and/or compositions within an actuator. SMA wires may be drawn or otherwise produced, however, nearly all wire drawing/extrusion techniques result in a degree of variability along the length of the wire. Variances could lead to imbalances in SMA movements. Variability may be reduced if an SMA actuator could be assembled using lengths of SMA wire which were contiguous in an original spool to form the SMA wires 4.sub.1, . . . , 4.sub.8.

[0244] Referring also to FIGS. 12A and 12B, an improved method for forming coupons supporting connection features 7 and SMA wires 4.sub.1, . . . , 4.sub.8 is described which may provide reduced variability in SMA wire properties within an SMA actuator.

[0245] In some implementations, the method may also facilitate using identical coupons to assemble an actuator.

[0246] Referring in particular to FIG. 12A, a plan view of a first etched sheet 34 is shown.

[0247] The first etched sheet 34 is formed by etching a sheet of metal, for example, a steel sheet. The first etched sheet 34 includes a support 35 extending along a length of the first etched sheet 34 (parallel to the y-axis as shown). A number of first sets 36 of planar features and second sets 37 of planar features extend from, and are supported by, the support 35. The first and second sets 36, 37 alternate along the length of the support 35.

[0248] The first set 36 of planar features includes first and second support portions 38.sub.1, 38.sub.2. The first and second support portions 38.sub.1, 38.sub.2 are connected to the support 35 by pairs of sprues 39. The first support portion 38.sub.1 is closer to the support 35 (along the x-axis as illustrated). A pair of first extensions 40.sub.1, 40.sub.2 extend from the first support portion 381 back towards the support 35 (in the positive x-direction as illustrated), and are separated by a waist portion 4.sub.1 formed in the first support portion 381 by a notch 42. The support 35 includes a corresponding notch 42 (at a corresponding position along the y-axis as illustrated). A pair of second extensions 43.sub.1, 43.sub.2 extend from the second support portion 38.sub.2 away from the support 35 (opposite to the first extensions 40.sub.1, 40.sub.2, in the negative x-direction as illustrated), and are separated by a waist portion 4.sub.1 formed in the second support portion 38.sub.2 by a notch 42. The waist portions 4.sub.1 of the first and second support portions 38.sub.1, 38.sub.2 are aligned (along the y-axis as illustrated). The first extensions 40.sub.1, 40.sub.2 are longer than the second extensions 43.sub.1, 43.sub.2.

[0249] The second set 37 of planar features is the same as the first set, except that the respective first extensions 40.sub.1, 40.sub.2 extend from the second support portion 38.sub.2 in a direction away from the support 35, whilst the second extensions 43.sub.1, 43.sub.2 extend from the first support portion 38.sub.1 back towards the support 35. In other words, between the first and second sets 36, 37, the positions of first and second extensions 40, 4.sub.3 are mirrored about a point midway between the support portions 38.sub.1, 38.sub.2.

[0250] Referring in particular to FIG. 12B, a plan view of a first frame 44 is shown.

[0251] The first frame 44 is formed by bending the first etched sheet 34 as follows. The first etched sheet 34 is planar in a support plane S (corresponding to the plane of FIG. 12). Each first extension 40.sub.1, 40.sub.2 is bent along three lines (dashed in FIG. 12A) which separate, in order, the respective support portion 38.sub.1 or 38.sub.2, an intermediate portion 4.sub.5, a connection portion 46 and a fold-over portion 4.sub.7. Each first extension 40.sub.1, 40.sub.2 is folded as the first fold (dashed) line so that the respective intermediate portion 4.sub.5 is inclined above the support plane S at an angle . At the other end of the intermediate portion 4.sub.5, at the second fold line, the first extension 40.sub.1, 40.sub.2 is folded back by an angle , such that the respective connection portion 46 is parallel to the support plane S, but offset above it (in the positive z-direction as illustrated). Finally, the fold-over portion 37 is bent back in a U-shape to lie over the respective connection portion 46. A gap for receiving an SMA wire 4 is left between the connection portion 46 and the fold-over portion 37.

[0252] Each second extension 43.sub.1, 43.sub.2 is bent along a single fold (dashed) line separating a connection portion 4.sub.8 from a fold-over portion 49. The fold-over portion 49 is bent back in a U-shape to lie over the respective connection portion 4.sub.8 of each second extension 44.sub.3, 43.sub.2. A gap for receiving an SMA wire 4 is left between the connection portion 4.sub.8 and the fold-over portion 49.

[0253] In this way, the first frame 44 supports a number of first 50 and second 51 connection features arranged (when projected onto the x-y plane) in a pattern along a first line 52, and a number of third 53 and fourth 54 connection features arranged (when projected onto the x-y plane) in a pattern along a second line 55 parallel to the first line 52. Each first connection feature 50 includes first and second sub-features 56.sub.1, 56.sub.2 formed from corresponding first extensions 40.sub.1, 40.sub.2 of one of the first sets 36. Each second connection feature 51 includes first and second sub-features 57.sub.1, 57.sub.2 formed from corresponding second extensions 43.sub.1, 43.sub.2 of one of the second sets 37.

[0254] Similarly, each third connection feature 53 includes first and second sub-features 58.sub.1, 58.sub.2 formed from corresponding second extensions 43.sub.1, 43.sub.2 of one of the first sets 36, and each fourth connection feature 54 includes first and second sub-features 59.sub.1, 59.sub.2 formed from corresponding first extensions 40.sub.1, 40.sub.2 of one of the second sets 37.

[0255] In this way, the first and fourth connection features 50, 54 are offset above the support plane S, whilst the second and third connection features 51, 53 remain substantially within the support plane S (the fold-over portions 47, 49 being slightly above the support plane S).

[0256] A first length of shape memory alloy, SMA, wire 60 is attached to each of the first and fourth connection features 50, 54, such that the first and fourth connection features 50, 54 alternate along the first length of SMA wire 60.

[0257] Similarly, a second length of SMA wire 61 is attached to each of the second and third connection features 51, 53 such that the third and second connection features 51, 53 alternate along the second length of SMA wire 61.

[0258] When projected onto the x-y plane, the first and second lengths of SMA wire 60, 61 will cross at crossing points C spaced along a mid-line 62 equidistant between the first and second lines 52, 55.

[0259] In this example, the first and fourth connection features 50, 54 are offset above the support plane S relative to the second and third connection features 51, 53, so in practice it is easier to connect the second length of SMA wire 61 first. The second length of SMA wire 60 is received between the connection portions 4.sub.8 and fold-over portions 49 of the second and third connection features 51, 53, followed by crimping to press respective connection portions 48 and fold-over portions 49 together to secure the second length of SMA wire 61. Subsequently, the first length of SMA wire 60 is received between the connection portions 46 and fold-over portions 47 of the first and fourth connection features 50, 54, followed by crimping to press respective connection portions 46 and fold-over portions 4.sub.7 together to secure the first length of SMA wire 60.

[0260] The frame 44 is then cut to form a number of coupons, each coupon supporting (or equivalently including) at least part of each of the first to fourth connection features 50, 51, 53, 54. Coupons which were adjacent in the frame 44 may be used to assemble SMA actuators, minimising any variability in diameter, composition and so forth between sections of the lengths of SMA wire 60, 61 which form the wires 4.sub.1, . . . , 4.sub.8 in an actuator.

[0261] The frame 44 may be cut to form coupons at some, or all, of the cut/fold lines 63.sub.1, . . . , 63.sub.8 illustrated in FIG. 12B. Each cut/fold line 63 coincides with the notches 42 and waists of the support portions 38.sub.1, 38.sub.2 (and also notches 42 in the support 35), which facilitates cutting the frame 44, or in some examples, folding the frame 44, at the cut/fold lines 63. When cutting along cut/fold lines 63, the lengths of SMA wire 60, 61 are also cut (e.g. before cutting the frame 44). When folding along cut/fold lines 63, the lengths of SMA wire 60, 61 may be cut (e.g. before folding the frame 44), but this is not essential.

[0262] Referring again to FIG. 1, coupons for fabricating the known actuator 1 may be obtained by cutting a first coupon between lines 63.sub.2 and 63.sub.3 corresponding to the first side s.sub.1, a second coupon between lines 63.sub.3 and 63.sub.4 corresponding to the second side s.sub.2, a third coupon between lines 63.sub.4 and 63.sub.5 corresponding to the third side s.sub.3, and a fourth coupon between lines 63.sub.5 and 63.sub.6 corresponding to the fourth side s.sub.4. The first to fourth coupons defined in this way are then attached to the static 3 and moving 2 parts, with the supports 35 orientated at the bottom (relative to the primary axis z).

[0263] For example, in the first coupon cut between lines 63.sub.2 and 63.sub.3, the sub-feature 5.sub.61 provides the connection feature 7.sub.2a, the sub-feature 59.sub.2 provides the connection feature 7.sub.2b and the connected section of second length of SMA wire 60 provides the second wire 4.sub.2. Similarly, the sub-feature 58.sub.1 provides the connection feature 7.sub.1a, the sub-feature 57.sub.2 provides the connection feature 7.sub.1b and the connected section of the second length of SMA wire 61 provides the first wire 4.sub.1. Similar mappings exist between the second to fourth coupons and the second to fourth sides s.sub.2, s.sub.3, s.sub.4 of the known actuator 1.

[0264] Once all of the connection features 7 are secured to the static 3 or moving 2 part as required, the sprues 39 are severed to detach the sections of the support 35 included in each of the coupons. The sprues 39 may be severed close to the support 35, leaving sections of the sprues 39 extending down towards the bottom of the known actuator 1, which may be utilised for making electrical connections to the SMA wires 4.sub.1, . . . , 4.sub.8.

[0265] In this way, fabrication of the known actuator 1 may be simplified, by allowing forming of the connection features 7 and attachment (in this example by crimping) of the SMA wires in a single process prior to assembly. As mentioned hereinbefore, using sequential coupons may also help to reduce variability in the properties of the SMA wires 4.sub.1, . . . , 4.sub.8. However, even if sequential coupons are not used, the process of producing the two types of coupons needed for the known actuator may nonetheless be simplified using this method.

[0266] The alternative configuration of the known actuator 1, in which the first group of SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 are configured as the outer wires, can also be fabricated using the method. In this case, by cutting a first coupon between lines 63.sub.1 and 63.sub.2 corresponding to the first side s.sub.1, a second coupon between lines 63.sub.2 and 63.sub.3 corresponding to the second side s.sub.2, a third coupon between lines 63.sub.3 and 63.sub.4 corresponding to the third side s.sub.3, and a fourth coupon between lines 63.sub.4 and 63.sub.5 corresponding to the fourth side s.sub.4. In effect, by shifting along by one cut/fold line 63 (in either direction along the support 35) relative to the coupons for the known actuator 1 as illustrated in FIG. 1.

[0267] In a modification of the method and the known actuator 1, a pair of identical coupons can be produced by cutting a first coupon between lines 63.sub.2 and 63.sub.4 corresponding to the first and fourth sides s.sub.1, s.sub.4, and cutting a second coupon between lines 63.sub.4 and 63.sub.6 corresponding to the third and second sides s.sub.3, s.sub.2. The first coupon defined this way is folded through 90 degrees about the cut/fold line 63.sub.3, and then attached to the static 3 and moving 2 parts on the first and fourth sides s.sub.1, s.sub.4 with the supports 35 orientated at the bottom (relative to the primary axis z). This direction of wrapping is needed because the first and fourth connection features 50, 54 of the frame 44 are offset in the positive z direction above the support plane Sif the offset were instead in the negative direction below the support plane S, then the first coupon could instead be wrapped from the first side s.sub.1 round to the second side s.sub.2. The notches 42 and waists 4.sub.1 assist in folding the coupon in the correct location. Similarly, the second coupon defined this way is folded through 90 degrees about the cut/fold line 63.sub.5, and then attached to the static 3 and moving 2 parts on the third and second sides s.sub.3, s.sub.2 with the supports 35 orientated at the bottom (relative to the primary axis z).

[0268] For example, in the first coupon cut between lines 63.sub.2 and 63.sub.4, the sub-feature 58.sub.1 provides the connection feature 7.sub.1a, the sub-feature 58.sub.2 provides the connection feature 7.sub.7a, and the second length of SMA wire 61 provides the first and seventh SMA wires 4.sub.1, 4.sub.7. The connection features 7.sub.1b and 7.sub.7b are replaced by the second connection feature 51, with the second sub-feature 57.sub.2 in place of the connection feature 7.sub.1b and the first sub-feature 57.sub.1 replacing the connection feature 7.sub.7b. The waist portion 4.sub.1 of the second connection feature 51 is folded around the fourth corner between the fourth and first sides s.sub.4, s.sub.1 (connection features folded around a corner are illustration in FIG. 13). Due to the waist portion, the first and seventh wires 4.sub.1, 4.sub.7 are generally (e.g. unless somehow insulated from the second connection feature 51) electrically connected to one another, so the shared connection feature 51 can be used as a common return path to allow independent control of drive currents in the first and seventh wires 4.sub.1, 4.sub.7 (as described hereinbefore). This is advantageous as the number of electrical connections which need to be made to the moving part 3 can be reduced.

[0269] Similarly, in the first coupon cut between lines 63.sub.2 and 63.sub.4, the sub-feature 56.sub.1 provides the connection feature 7.sub.2a, the sub-feature 56.sub.2 provides the connection feature 7.sub.8a, and the first length of SMA wire 60 provides the second and eighth SMA wires 4.sub.2, 4.sub.8. The connection features 7.sub.2b and 7.sub.8b are replaced by the fourth connection feature 54, with the second sub-feature 59.sub.2 in place of the connection feature 7.sub.2b and the first sub-feature 59.sub.1 replacing the connection feature 7.sub.8b. The waist portion 4.sub.1 of the fourth connection feature 54 is folded around the fourth corner between the fourth and first sides s.sub.4, s.sub.1 (connection features folded around a corner are illustration in FIG. 13).

[0270] Similar mappings exist between the second coupon cut between the lines 63.sub.4 and 63.sub.6 and the third and second sides s.sub.3, s.sub.2 of the known actuator 1.

[0271] Once all of the connection features 7 are secured to the static 3 or moving 2 part as required, the sprues 39 are severed to detach the sections of the support 35 included in both of the coupons. The sprues 39 may be severed close to the support 35, leaving sections of the sprues 39 extending down towards the bottom of the known actuator 1, which may be utilised for making electrical connections to the SMA wires 4.sub.1, . . . , 4.sub.8. Only one section of sprue need be maintained for the connection features 51, 54 folded about the corners.

[0272] In this way, an SMA actuator may be fabricated which is identical to the known actuator 1, except that a pair of identical coupons may be used and that the connection features are folded around the posts right-angled corners of the moving part 2. In this way, manufacturing complexity may be reduced.

[0273] In both the method of making the known actuator 1 using four coupons cut from the frame 44, and the modified method using two coupons which fold around an adjacent sides s.sub.1, . . . , s.sub.4, the SMA wires 4.sub.2, 4.sub.4, 4.sub.6, 4.sub.8 of the second group (pulling the moving part 2 in the negative z-direction) correspond to the first length of SMA wire 60, whilst SMA wires 4.sub.1, 4.sub.3, 4.sub.5, 4.sub.7 of the first group (pulling the moving part 2 in the positive z-direction) correspond to the second length of SMA wire 61. This may reduce the effects of any variability within these groups, however, variability between the first and second lengths of SMA wire 60, 61 may cause an imbalance in the motions of the moving part 2 along the primary axis z. This possibility may be mitigated by cutting out coupons such that half the wires in each of the first and second groups are provided by the first length of SMA wire 60, whilst the other half are provided by the second length of SMA wire 61.

[0274] For example, referring also to FIGS. 13A to 13E, an eighth modified actuator 64 (hereinafter the eighth actuator) is shown.

[0275] FIGS. 13B to 13E have the same geometric relationships to FIG. 13A as FIGS. 1B to 1E to FIG. 1A.

[0276] The eighth actuator 64 is formed using the improved method, using a first coupon cut between lines 63.sub.1 and 63.sub.3 corresponding to the first and fourth sides s.sub.1, s.sub.4, and cutting a second coupon between lines 63.sub.4 and 63.sub.6 corresponding to the third and second sides s.sub.3, s.sub.2. In other words, the section of frame between cut/fold lines 63.sub.3 and 63.sub.4 is omitted or discarded.

[0277] The first coupon defined this way is folded through 90 degrees about the cut/fold line 63.sub.2, and then attached to the static 3 and moving 2 parts on the first and fourth sides s.sub.1, s.sub.4 with the supports 35 orientated at the bottom (relative to the primary axis z). This direction of wrapping is needed because the first and fourth connection features 50, 54 of the frame 44 are offset in the positive z direction above the support plane Sif the offset were instead in the negative direction below the support plane S, then the first coupon could instead be wrapped from the first side s.sub.1 round to the second side s.sub.2. The notches 42 and waists 4.sub.1 assist in folding the coupon in the correct location. Similarly, the second coupon defined this way is folded through 90 degrees about the cut/fold line 63.sub.5, and then attached to the static 3 and moving 2 parts on the third and second sides s.sub.3, s.sub.2 with the supports 35 orientated at the bottom (relative to the primary axis z).

[0278] For example, in the first coupon cut between lines 63.sub.1 and 63.sub.3, the sub-features 59.sub.1, 56.sub.2, 56.sub.1 and 59.sub.2 respectively provide the connection features 7.sub.1a, 7.sub.1b, 7.sub.7b and 7.sub.7a, and the first length of SMA wire 60 provides the first and seventh SMA wires 4.sub.1, 4.sub.7. Sub-features 56.sub.1 and 56.sub.2 remain connected by the corresponding first support portion 38.sub.1, which is folded around the fourth corner between the fourth and first sides s.sub.4, s.sub.1. Similarly, in the first coupon cut between lines 63.sub.1 and 63.sub.3, the sub-features 57.sub.1, 58.sub.2, 58.sub.1 and 57.sub.2 respectively provide the connection features 7.sub.2a, 7.sub.2b, 7.sub.8b and 7.sub.8a, and the second length of SMA wire 61 provides the second and eighth SMA wires 4.sub.2, 4.sub.8. Sub-features 58.sub.1 and 58.sub.2 remain connected by the corresponding first support portion 38.sub.2, which is folded around the fourth corner between the fourth and first sides s.sub.4, s.sub.1.

[0279] In the second coupon cut between lines 63.sub.4 and 63.sub.6, the sub-features 58.sub.1, 57.sub.2, 55.sub.1 and 58.sub.2 respectively provide the connection features 7.sub.5a, 7.sub.5b, 7.sub.3b and 7.sub.3a, and the second length of SMA wire 61 provides the third and fifth SMA wires 4.sub.3, 4.sub.5. Sub-features 57.sub.1 and 57.sub.2 remain connected by the corresponding first support portion 38.sub.1, which is folded around the second corner between the third and second sides s.sub.3, s.sub.2. Similarly, in the second coupon cut between lines 63.sub.4 and 63.sub.6, the sub-features 56.sub.1, 59.sub.2, 59.sub.1 and 59.sub.2 respectively provide the connection features 7.sub.6a, 7.sub.6b, 7.sub.4b and 7.sub.4a, and the first length of SMA wire 60 provides the fourth and sixth SMA wires 4.sub.4, 4.sub.6. Sub-features 58.sub.1 and 58.sub.2 remain connected by the corresponding first support portion 38.sub.2, which is folded around the fourth corner between the fourth and first sides s.sub.4, s.sub.1.

[0280] SMA wires 4.sub.1 and 4.sub.7 are electrically connected by the support portion 38.sub.1 around the fourth corner, and the shared connection feature can be used as a common return path to allow independent control of drive currents in the first and seventh SMA wires 4.sub.1, 4.sub.7 (as described hereinbefore). This is advantageous as the number of electrical connections which need to be made to the moving part 3 can be reduced. Similar connections can be used for the pairings of second and eight SMA wires 4.sub.2, 4.sub.8, third and fifth SMA wires 4.sub.3, 4.sub.5, and fourth and sixth SMA wires 4.sub.4, 4.sub.6.

[0281] Once all of the connection features 7 are secured to the static 3 or moving 2 part as required, the sprues 39 are severed to detach the sections of the support 35 included in both of the coupons. The sprues 39 may be severed close to the support 35, leaving sections of the sprues 39 extending down towards the bottom of the known actuator 1, which may be utilised for making electrical connections to the SMA wires 4.sub.1, . . . , 4.sub.8. Only one section of sprue need be maintained for the connection features folded about the corners.

[0282] In the eighth actuator 64, the first group of SMA wires includes two SMA wires 4.sub.1, 4.sub.7 corresponding to the first length of SMA wire 60, and two SMA wires 4.sub.3, 4.sub.5 corresponding to the second length of SMA wire 61. Similarly, the second group of SMA wires includes two SMA wires 4.sub.2, 4.sub.8 corresponding to the second length of SMA wire 61 and two SMA wires 4.sub.4, 4.sub.6 corresponding to the first length of SMA wire 60.

[0283] In this way, it may be possible to reduce the impact on vertical (along the primary axis z) movements of the moving part 2 resulting from any variability between the first length of SMA wire 60 and the second length of SMA wire 61.

[0284] Although the illustrated frame 44 includes four each of the first, second, third and fourth connection features 50, 51, 53, 54, in general the frame 44 may be of any length it is practical to fabricate, and hence may be longer or shorter and may correspondingly include more or fewer cut/fold lines 63.

[0285] Although in these examples the first length of SMA wire 60 is crimped to the first and fourth connection features 50, 54 and the second length of SMA wire 61 is crimped to the second and third connection features 51, 53, in other examples the fold-over portions 47, 49 may be omitted, and the lengths of SMA wire 60, 61 may be connected to the connection features 50, 51, 53, 54 by welding, adhesives, or in any other suitable way.

[0286] The specific shapes of the connection features 50, 51, 53, 54 may vary from those shown in FIGS. 12A and 12B. However, if a coupon is to be folded, then connection features of that coupon are preferably configured to facilitate folding, for example by including notches 42 and waists 4.sub.1, or equivalent features providing a line of relative weakness against folding deformations.

[0287] Although the specific shapes of the connection features 50, 51, 53, 54 may vary from those shown in FIGS. 12A and 12B, there are features of the geometry which are common to any possible alternative to the frame 44.

[0288] In particular, in SMA actuators as described herein, each side s.sub.1, . . . , s.sub.4 has an inner SMA wire substantially on or close to the respective support plane S.sub.1, . . . , S.sub.4, for example in the eighth actuator 64 the inner wires are (moving clockwise about the primary axis z) 4.sub.2, 4.sub.3, 4.sub.5, and 4.sub.8. Similarly, each side s.sub.1, . . . , s.sub.4 has an outer SMA wire which is offset from the respective support plane S.sub.1, . . . , S.sub.4 in a direction away from the primary axis z of the actuator, for example in the eighth actuator 64 the outer wires are (moving clockwise about the primary axis z) 4.sub.1, 4.sub.4, 4.sub.6, and 4.sub.7.

[0289] Additionally, when moving clockwise about the primary axis z, and viewing each side s.sub.1, . . . , s.sub.4 along a radial direction perpendicular to the primary axis z and that side s.sub.1, . . . , s.sub.4, the corresponding pair of SMA wires adopt either: [0290] 1. A first wire configuration, herein WA, in which the inner SMA wire slopes upwards in a direction tangential to the loop (clockwise about the primary axis z) whilst the outer SMA wire slopes downwards; or [0291] 2. A second wire configuration, herein WB, in which the inner SMA wire slopes downwards in the direction tangential to the loop whilst the outer SMA wire slopes upwards.

[0292] For example, the first side s.sub.1 of the known actuator 1 has wire configuration WB, the second side s.sub.2 has wire configuration WA, the third side s.sub.3 has wire configuration WB, and the fourth side s.sub.4 has wire configuration WA. In other words, in the known actuator 1, each side s.sub.1, . . . , s.sub.4 has a different wire configuration to both adjacent sides s.sub.1, . . . , s.sub.4.

[0293] When coupons for making SMA actuators are formed using the method described herein, namely by cutting the coupons out from frames in which first 50 and second 51 connection features are arranged (when projected onto the x-y plane) in a pattern along a first line 52, and third 53 and fourth 54 connection features are arranged (when projected onto the x-y plane) in a pattern along a second line 55 parallel to the first line 52, it is apparent that the wire configurations alternate between WA and WB along the length.

[0294] Thus, an SMA actuator formed according to the method described herein will have an SMA wire 4.sub.1, . . . , 4.sub.8 configuration substantially corresponding to the known actuator 1 if the coupons are cut out in the pattern WA-WB-WA-WB (or equivalent cyclic patterns starting at a different corner).

[0295] However, if coupons are cut out such that each side s.sub.1, . . . , s.sub.4 has the same configuration of the first and second wire configurations WA, WB as at least one adjacent side s.sub.1, . . . , s.sub.4, the resulting configuration of SMA wires 4.sub.1, . . . , 4.sub.8 does not map to the known actuator 1 (or its alternative configuration). The eighth actuator 64 is an example of one such configuration, having the pattern WA-WB-WB-WA (or equivalent cyclic patterns starting at a different corner).

[0296] There is a further pattern possible in which all of the sides s.sub.1, . . . , s.sub.4 have the same wire configuration, all WA or all WB.

[0297] For example, referring also FIGS. 14A to 15E, a ninth modified actuator 65 (hereinafter the ninth actuator) is illustrated in which all of the sides s.sub.1, . . . , s.sub.4 have the first wire configuration WA.

[0298] Referring in particular to FIG. 14A, a plan view of a second etched sheet 66 is shown.

[0299] The second etched sheet 66 is the same as the first etched sheet 44, except that only one extension 40, 43 extends from each support portion 38.sub.1, 38.sub.2, and the support portions 38.sub.1, 38.sub.2 and support 35 include no notches 42. Additionally, the first and second sets 36, 37 of planar features are not evenly spaced along the length of the support 35. Moving along the support 35 parallel to the positive y-axis as illustrated, each first set 36 is separated from the next second set 37 by a relatively short distance, whereas each second set 37 is separated from the next first set 36 by a relatively short distance.

[0300] Referring in particular to FIG. 14B, a plan view of a second frame 67 is shown.

[0301] The second frame 67 is formed from the second etched sheet 66 by bending each extension 40, 43 in the same way described for forming the first frame 44 from the first etched sheet 34. Similarly to the first frame 44, the first and fourth connection features 50, 54 are offset above the support plane S, whilst the second and third connection features 51, 53 remain substantially within the support plane S (the fold-over portions 47, 49 being slightly above the support plane S).

[0302] In this way, the second frame 67 supports a number of first 50 and second 51 connection features arranged (when projected onto the x-y plane) in a pattern along the first line 52, and a number of third 53 and fourth 54 connection features arranged (when projected onto the x-y plane) in a pattern along the second line 55 parallel to the first line 52.

[0303] In the same way as for the first frame 44, a first length of shape memory alloy, SMA, wire 60 is attached to each of the first and fourth connection features 50, 54, such that the first and fourth connection features 50, 54 alternate along the first length of SMA wire 60. Similarly, a second length of SMA wire 61 is attached to each of the second and third connection features 51, 53 such that the third and second connection features 51, 53 alternate along the second length of SMA wire 61.

[0304] When projected onto the x-y plane, the first and second lengths of SMA wire 60, 61 will cross at crossing points C spaced along a mid-line 62 equidistant between the first and second lines 52, 55. This is not essential, and in other examples the connection features 50, 51, 53, 54 may be configured such that crossing points C are offset from the mid-line 62.

[0305] The second frame 67 is then cut to form a number of identical coupons, by cutting along each of the indicated cut lines 60. As hereinbefore, each coupon supports (or equivalently includes) at least one each of the first to fourth connection features 50, 51, 53, 54. Coupons which were adjacent in the second frame 67 may be used to assemble the ninth SMA actuator 65, minimising any variability in diameter, composition and so forth between sections of the lengths of SMA wire 60, 61 which form the wires 4.sub.1, . . . , 4.sub.8 in the ninth SMA actuator 65.

[0306] Four identical coupons defined in this way (preferably sequential along the support 35) are then attached to the static 3 and moving 2 parts, with the supports 35 orientated at the bottom (relative to the primary axis z). Once all of the connection features 7 are secured to the static 3 or moving 2 part as required, the sprues 39 are severed to detach the sections of the support 35 included in each of the coupons. The sprues 39 may be severed close to the support 35, leaving sections of the sprues 39 extending down towards the bottom of the known actuator 1, which may be utilised for making electrical connections to the SMA wires 4.sub.1, . . . , 4.sub.8.

[0307] Referring in particular to FIGS. 15A to 15E, the resulting ninth actuator 65 is shown. FIGS. 15B to 15E have the same geometric relationships to FIG. 15A as FIGS. 1B to 1E to FIG. 1A.

[0308] In some embodiments, each of two SMA wires on a first side of the primary axis may be angled differently to each other. With reference to FIG. 16, an angle between a first SMA wire 4.sub.1 and a plane 100 perpendicular to the primary axis (i.e. the x-y plane) is different to an angle between a second SMA wire 4.sub.2 and the plane 100. In this way, an asymmetry in e.g. the gearing (the ratio of the distance moved by the moving part 2 in a certain direction to the change in length of the SMA wire 4) can be introduced, which may be advantageous in certain applications. This configuration may also be applied to any of the embodiments disclosed herein.

[0309] It will be appreciated that there may be many other variations of the above-described embodiments.

[0310] Any of the first to ninth actuators 18, 20, 24, 30, 31, 32, 33, 64, 65 may be incorporated into a camera module 8, in the same way as the known actuator 1.

[0311] Any of the first to ninth actuators 18, 20, 24, 30, 31, 32, 33, 64, 65 may be used to implement an autofocus function and/or an optical image stabilisation function. Any of the first to ninth actuators 18, 20, 24, 30, 31, 32, 33, 64, 65 may be incorporated into any type of assembly that comprises a moving (second) part which is movable with respect to a static (first) part.

[0312] The above-described SMA actuator assemblies comprise an SMA wire. The term shape memory alloy (SMA) wire may refer to any element comprising SMA. The SMA wire may have any shape that is suitable for the purposes described herein. The SMA wire may be elongate and may have a round cross section or any other shape cross section. The cross section may vary along the length of the SMA wire. It is also possible that the length of the SMA wire (however defined) may be similar to one or more of its other dimensions. The SMA wire may be pliant or, in other words, flexible. In some examples, when connected in a straight line between two elements, the SMA wire can apply only a tensile force which urges the two elements together. In other examples, the SMA wire may be bent around an element and can apply a force to the element as the SMA wire tends to straighten under tension. The SMA wire may be beam-like or rigid and may be able to apply different (e.g. non-tensile) forces to elements. The SMA wire may or may not include material(s) and/or component(s) that are not SMA. For example, the SMA wire may comprise a core of SMA and a coating of non-SMA material. Unless the context requires otherwise, the term SMA wire may refer to any configuration of SMA wire acting as a single actuating element which, for example, can be individually controlled to produce a force on an element. For example, the SMA wire may comprise two or more portions of SMA wire that are arranged mechanically in parallel and/or in series. In some arrangements, the SMA wire may be part of a larger piece of SMA wire. Such a larger piece of SMA wire might comprise two or more parts that are individually controllable, thereby forming two or more SMA wires.

[0313] Specific Example of an Actuator

[0314] Understanding of the example described hereinbefore may be improved by a non-limiting example of some specific dimensions and angles for an actuator.

[0315] In particular, an implementation of the first actuator may be configured such that: [0316] Each SMA wire 4.sub.1, . . . , 4.sub.8 makes an angle of 14 degrees to a plane perpendicular to the primary axis z (i.e. to the x-y plane); [0317] The side s.sub.1, . . . , s.sub.4 form a substantially square shape, with side lengths l.sub.1=l.sub.2=l.sub.3=l.sub.4=15 mm. [0318] The distance perpendicular to the primary axis z for each SMA wire 4.sub.1, . . . , 4.sub.8 is 12 mm. In this way, the component of each SMA wire 4.sub.1, . . . , 4.sub.8 extending perpendicular to the primary axis z is 80%. [0319] The distance parallel to the primary axis z for each SMA wire 4.sub.1, . . . , 4.sub.8 is 3 mm.