IMPROVED MASK ROM DEVICE
20230223055 · 2023-07-13
Inventors
Cpc classification
G11C11/5692
PHYSICS
G11C7/12
PHYSICS
G11C8/08
PHYSICS
International classification
G11C7/10
PHYSICS
G11C7/12
PHYSICS
Abstract
A mask read only memory device is provided. Single-transistor memory cells are arranged in rows and columns. Each word line is associated with a corresponding row. Each bit line is associated with a corresponding column. Each first reference line selectively provides a first potential in a first phase and a second potential in a second phase. Each second reference line selectively provides the second potential in the first read phase and the first potential in the second phase. Each memory cell has a gate coupled to a word line, a drain coupled to a bit line and a source terminal either floating, grounded or coupled to one among a first reference line and a second reference line. One of first to fourth logic values is read during the memory cell.
Claims
1. A mask read only memory device comprising: a plurality of single-transistor memory cells arranged in rows of memory cells and columns of memory cells; a plurality of word lines each one associated with a corresponding row of memory cells of the plurality of memory cells; a plurality of bit lines each one associated with a corresponding column of memory cells of the plurality of memory cells; a ground line fixedly providing a ground electric potential; a plurality of first reference lines each one selectively providing a first reference electric potential in a first read phase of a read operation, and a second reference electric potential higher than the first reference electric potential in a second read phase of the read operation; and a plurality of second reference lines each one selectively providing the second reference electric potential in the first read phase and the first reference electric potential in the second read phase, wherein each memory cell comprises a metal-oxide semiconductor (MOS) transistor having a gate terminal electrically coupled to a respective word line, a drain terminal electrically coupled to a respective bit line, and a source terminal, the source terminal being either electrically floating or electrically coupled to one among a respective first reference line, a respective second reference line and the ground line, whereby a first logic value, a second logic value, a third logic value or a fourth logic value is respectively read during the read operation of that memory cell.
2. The mask read only memory device of claim 1, wherein at least one reference line among the plurality of first reference lines and the plurality of second reference lines is shared by adjacent columns of memory cells.
3. The mask read only memory device of claim 1, wherein each first reference line is shared by a respective first pair of adjacent columns of memory cells, and each second reference line is shared by a respective second pair of adjacent columns of memory cells different from and adjacent to the first pair of adjacent columns of memory cells.
4. The mask read only memory device of claim 2, further comprising a bit line selection circuit for selecting bit lines associated with memory cells to be read during the read operation, the bit line selection circuit being configured to make each unselected bit line electrically floating during the read operation.
5. The mask read only memory device of claim 1, wherein the plurality of first reference lines and the plurality of second reference lines comprise a pair of a first reference line and a second reference line for each column of memory cells.
6. The mask read only memory device of claim 1, further comprising a driving arrangement for driving the plurality of first reference lines and the plurality of second reference lines with the first and second reference electric potentials, the driving arrangement comprising a complementary metal-oxide semiconductor (CMOS) inverter or a N-type metal-oxide semiconductor (NMOS) inverter.
7. The mask read only memory device of claim 1, wherein the first reference electric potential is the ground electric potential.
8. A memory system including a mask read only memory device, the mask read only device comprising: a plurality of single-transistor memory cells arranged in rows of memory cells and columns of memory cells; a plurality of word lines each one associated with a corresponding row of memory cells of the plurality of memory cells; a plurality of bit lines each one associated with a corresponding column of memory cells of the plurality of memory cells; a ground line fixedly providing a ground electric potential; a plurality of first reference lines each one selectively providing a first reference electric potential in a first read phase of a read operation, and a second reference electric potential higher than the first reference electric potential in a second read phase of the read operation; and a plurality of second reference lines each one selectively providing the second reference electric potential in the first read phase and the first reference electric potential in the second read phase, wherein each memory cell comprises a metal-oxide semiconductor (MOS) transistor having a gate terminal electrically coupled to a respective word line, a drain terminal electrically coupled to a respective bit line, and a source terminal, the source terminal being either electrically floating or electrically coupled to one among a respective first reference line, a respective second reference line and the ground line, whereby a first logic value, a second logic value, a third logic value or a fourth logic value is respectively read during the read operation of that memory cell.
9. The memory system of claim 8, wherein the memory system comprises a tridimensional NAND flash memory device, the plurality of memory cells of the mask read only memory device forming a periphery under cell structure of the tridimensional NAND flash memory device.
10. The memory system of claim 8, wherein at least one of the first and second reference lines is formed from an uppermost metal layer of the memory system.
11. The memory system of claim 10, wherein the source terminal of each MOS transistor is electrically coupled to one among the first reference line, the second reference line and the ground line by means of a respective electric coupling formed from the uppermost metal layer of the memory system.
12. An electronic system including a mask read only memory device, the mask read only device comprising: a plurality of single-transistor memory cells arranged in rows of memory cells and columns of memory cells; a plurality of word lines each one associated with a corresponding row of memory cells of the plurality of memory cells; a plurality of bit lines each one associated with a corresponding column of memory cells of the plurality of memory cells; a ground line fixedly providing a ground electric potential; a plurality of first reference lines each one selectively providing a first reference electric potential in a first read phase of a read operation, and a second reference electric potential higher than the first reference electric potential in a second read phase of the read operation; and a plurality of second reference lines each one selectively providing the second reference electric potential in the first read phase and the first reference electric potential in the second read phase, wherein each memory cell comprises a metal-oxide semiconductor (MOS) transistor having a gate terminal electrically coupled to a respective word line, a drain terminal electrically coupled to a respective bit line, and a source terminal, the source terminal being either electrically floating or electrically coupled to one among a respective first reference line, a respective second reference line and the ground line, whereby a first logic value, a second logic value, a third logic value or a fourth logic value is respectively read during the read operation of that memory cell.
13. A mask read only memory device comprising: an array of single-transistor memory cells each having a gate coupled to a word line and a drain coupled to a bit line, wherein the array is configured by at least one of first to fourth memory cells respectively having first to fourth sources and respectively representing first to fourth data, the first and second sources being coupled respectively to first and second reference lines, the third source being floated and the fourth source being grounded; and a control circuit configured to perform a read operation of reading data from the array, the read operation including: applying operating voltages to the word line and the bit line, and applying first and second voltages, in a first phase, and then vice versa, in a second phase, to the respective first and second reference lines to check whether a current flows on the bit line in each of the first and second phases thereby identifying one of the first to fourth data.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0035] These and other features and advantages of the present invention will be made apparent by the following description of some non-limitative embodiments thereof; for better intelligibility, the following description should be read making reference to the attached drawings, wherein:
[0036]
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DETAILED DESCRIPTION
[0045]
[0046] In the following, when one or more features are introduced by the wording “according to an embodiment”, the features are to be construed as features additional or alternative to any features previously introduced, unless otherwise indicated and/or unless there is evident incompatibility among feature combinations.
[0047] In the following, only elements and operations deemed relevant for the understanding of the present invention will be shown and discussed, with other well-known elements and operations intentionally omitted for the sake of conciseness.
[0048] According to an embodiment, the mask ROM device 100 comprises a plurality of memory cells 105.sub.m,n (m = 1, 2, ..., M, n = 1, 2, ..., N), According to an embodiment, the memory cells 105.sub.m,n are programmable during manufacturing to store in each one a logic value among a plurality of logic values.
[0049] According to an embodiment, the memory cells 105.sub.m,n are arranged in rows of memory cells and columns of memory cells, the row and column arrangement of the memory cells 105.sub.m,n defining a memory matrix or memory array. According to an embodiment, the memory cells 105.sub.m,n are arranged in M rows of memory cells and N columns of memory cells.
[0050] According to an embodiment, the mask ROM device 100 comprises a plurality of word lines WL.sub.m each one associated with a corresponding row of memory cells, and a plurality of bit lines BL.sub.n each one associated with a corresponding column of memory cells, the memory cells 105.sub.m,n being for example arranged at intersections between the world lines WL.sub.m and the bit lines BL.sub.n, just as an example, the memory cell 105.sub.1,1 is associated with i.e., it is arranged at the intersection of the word line WL.sub.1 and the bit line BL.sub.1, the memory cell 105.sub.1,2 is associated with i.e., it is arranged at the intersection of the word line WL.sub.1 and the bit line BL.sub.2, the memory cell 105.sub.1,3 is associated with i.e., it is arranged at the intersection of the word line WL.sub.1 and the bit line BL.sub.3, the memory cell 105.sub.1,4 is associated with i.e., it is arranged at the intersection of the word line WL.sub.1 and the bit line BL.sub.4, and the memory cell 105.sub.1,N is associated with i.e., it is arranged at the intersection of the word line WL.sub.1 and the bit line BL.sub.N.
[0051] According to an embodiment, the mask ROM device 100 comprises a word line selection circuit 110 for selecting one or more word lines among the plurality of word lines WL.sub.m according to a row address.
[0052] According to an embodiment, the mask ROM device 100 comprises a bit line selection circuit 115 for selecting one or more bit lines among the plurality of bit lines BL.sub.n according to a column address.
[0053] According to an embodiment, each pair of selected word line and bit line identifies a corresponding selected memory cell of the plurality of memory cells 105.sub.m,n.
[0054] According to an embodiment, the mask ROM device 100 comprises a reading circuit 120 for reading the logic value of, i.e., stored in, the selected memory cell 105.sub.m,n.
[0055] According to an embodiment, the reading circuit 120 is configured to read the logic value of the selected memory cell 105.sub.m,n according to an electric current flowing through the bit line BL.sub.n associated with the selected memory cell 105.sub.m,n.
[0056] According to an embodiment, the mask ROM device 100 comprises a control logic unit 125 configured to control an overall operation of the mask ROM device 100. As conceptually represented in the figure by respective arrow connections, the control logic unit 125 may be configured to provide the row address to the word line selection circuit 110, to provide the column address to the bit line selection circuit 115, to receive the logic value being read by the reading circuit 120, and to control a driving arrangement (discussed in the following).
[0057] According to an embodiment, the mask ROM device 100 comprises a ground line GL fixedly providing a ground (or earth) electric potential. According to an embodiment, as usual in electronic circuits, the ground electric potential may be set at 0 V.
[0058] According to an embodiment, the mask ROM device 100 comprises a plurality of reference lines RL.sub.A,n. According to an embodiment, each reference line RL.sub.A,n is associated with a respective (n-th) column of memory cells. In this embodiment, the reference line RL.sub.A,1 is associated with the column of memory cells 105.sub.1,1-105.sub.M,1 (i.e., n=1), the reference line RL.sub.A,2 is associated with the column of memory cells 105.sub.1,2-105.sub.M,2 (i.e., n=2), the reference line RL.sub.A,3 is associated with the column of memory cells 105.sub.1,3-105.sub.M,3 (i.e., n=3), the reference line RL.sub.A,4 is associated with the column of memory cells 105.sub.1,4-105.sub.M,4 (i.e., n=4), and the reference line RL.sub.A,N is associated with the column of memory cells 105.sub.1,N-105.sub.M,N (i.e., n = N).
[0059] According to an embodiment, each reference line RL.sub.A,n selectively provides a first reference electric potential V.sub.x or a second reference electric potential V.sub.y. According to an embodiment, the second reference electric potential V.sub.y is higher than the first reference electric potential V.sub.x, which is a reason why the first V.sub.x and second V.sub.y reference electric potentials will be referred to as low V.sub.x and high V.sub.x electric potentials, respectively.
[0060] According to an embodiment, the low electric potential V.sub.x is equal or almost or substantially equal to the ground electric potential, as detailed in the following when discussing a driving arrangement of the mask ROM device 100.
[0061] According to an embodiment, the high electric potential V.sub.y is equal or almost equal to a power supply electric potential V.sub.DD supplying power to the mask ROM device 100, as detailed in the following when discussing the driving arrangement of the mask ROM device 100.
[0062] According to an embodiment, the mask ROM device 100 comprises a plurality of further reference lines RL.sub.B,n. According to an embodiment, each reference line RL.sub.B,N is associated with a respective (n-th) column of memory cells. In this embodiment, the reference line RL.sub.B,1 is associated with the column of memory cells 105.sub.1,1-105.sub.M,1 (i.e., n=1), the reference line RL.sub.B,2 is associated with the column of memory cells 105.sub.1,2-105.sub.M,2 (i.e., n=2), the reference line RL.sub.B,3 is associated with the column of memory cells 105.sub.1,3-105.sub.M,3 (i.e., n=3), the reference line RL.sub.B,4 is associated with the column of memory cells 105.sub.1,4-105.sub.M,4 (i.e., n=4), and the reference line RL.sub.B,N is associated with the column of memory cells 105.sub.1,N-105.sub.M,N (i.e., n= N) .
[0063] According to an embodiment, each reference line RL.sub.B,N selectively provides the low electric potential V.sub.x or the high electric potential V.sub.y.
[0064] According to an embodiment, the mask ROM device 100 comprises a driving arrangement 130 for driving the reference lines RL.sub.A,n, RL.sub.B,n with the low V.sub.x and high V.sub.y electric potentials.
[0065] According to an embodiment, the driving arrangement 130 is operated under the control of the control logic unit 125 as conceptually illustrated in the figure by arrow connection between the control logic unit 125 and the driving arrangement 130,
[0066] The driving arrangement 130 is conceptually represented in the figures as a switching arrangement selectively coupling each reference line RL.sub.A,n, RL.sub.B,n to a reference electric terminal providing the low electric potential V.sub.x or to a reference electric terminal providing the high electric potential V.sub.y. However, the practical implementation of the driving arrangement 130 is not limiting for the present invention.
[0067] Just as an example of a practical implementation, the driving arrangement 130 may comprise, for each reference line RL.sub.A,n, RL.sub.B,n, or for each group of reference lines RL.sub.A,n, RL.sub.B,n, a CMOS inverter PN1 and a CMOS buffer PN2 (shown in the left drawing of
[0068] Just as another example of a practical implementation, the driving arrangement 130 may comprise, for each reference line RL.sub.A,.sub.n, RL.sub.B,n, or for each group of reference lines RL.sub.A,n, RL.sub.B,n, a NMOS-NMOS inverter NN1 and a NMOS-NMOS buffer NN2 (shown in the right drawing of
[0069] In addition, each NMOS-NMOS buffer NN2 comprises a NMOS transistor electrically coupled to the ground electric potential and acting as pull-down transistor enabled by the control signal
[0070] In this practical implementation, the low electric potential V.sub.x is equal to the ground electric potential and the high electric potential V.sub.y is substantially equal to the power supply electric potential V.sub.DD i.e., the power supply electric potential minus the threshold electric potential. With respect to the CMOS inverter and the CMOS buffer implementation of the driving arrangement 130, the NMOS-NMOS inverter and the NMOS-NMOS buffer implementation of the driving arrangement 130 allows achieving a significant reduction in power consumption without impairing the read operation of the selected memory cell 105.sub.m,n. Also, compared to CMOS inverter and the CMOS buffer implementation of the driving arrangement 130, the NMOS-NMOS inverter and the NMOS-NMOS buffer implementation is more efficient in terms of area occupation in that no separated n-well is needed.
[0071] As better discussed in the following, during a read operation of a selected memory cell 105.sub.m,n, the corresponding reference line RL.sub.A,n provides the low electric potential V.sub.x in a first read phase of the read operation, and the high electric potential V.sub.y in a second read phase of the read operation, and the corresponding reference line RL.sub.B,n provides the high electric potential V.sub.y in the first read phase of the read operation and the low electric potential V.sub.x in the second read phase of the read operation. That is, considering the low electric potential V.sub.x as a low logic level (“0”) and the high electric potential V.sub.y as a high logic level (“1”), during the read operation of the selected memory cell 105.sub.m,n the corresponding reference lines RL.sub.A,n, RL.sub.B,n are respectively set at the low and high logic levels in the first read phase, and at the high and low logic levels in the second read phase.
[0072] With reference also to
[0073] According to an embodiment, each memory cell 105.sub.m,n is a single-transistor memory cell.
[0074] According to an embodiment, each memory cell 105.sub.m,n comprises a MOS transistor, e.g., a NMOS transistor, having a gate terminal electrically coupled with, e.g., electrically connected to, a respective word line WL.sub.m, a drain terminal electrically coupled with, e.g., electrically connected to, a respective bit line BL.sub.n, and a source terminal. As discussed here below, a (mask-programmed) coupling condition or coupling state of the source terminal of the MOS transistor of each memory cell 105.sub.m,n determines the logic value stored in the memory cell 105.sub.m,n or, equivalently, the logic value at which the memory cell 105.sub.m,n is programmed. References (i) to (iv) in
[0075] According to an embodiment, the source terminal of the MOS transistor of the memory cell 105.sub.m,n may be either electrically floating (coupling state (i)), or electrically coupled to one among the respective reference line RL.sub.A,n (coupling state (ii)), the respective reference line RL.sub.B,n (coupling state (iii)) and the ground line GL (coupling state (iv)), whereby a respective logic value is read during the read operation of that memory cell105.sub.m,n. A selected MOS transistor may essentially experience a first conductive condition in which no electric current is allowed to flow through it such as, when the source terminal of the MOS transistor is electrically floating or when the source terminal of the MOS transistor receives the high electrical potential V.sub.y, or a second conductive condition in which an electric current is allowed to flow through it such as, when the source terminal of the MOS transistor is electrically coupled to the ground line GL or when the source terminal of the MOS transistor receives the low electrical potential V.sub.x. For the purposes of the present disclosure, the first and second conductive conditions of the selected MOS transistor are conventionally associated with the low and high logic levels, respectively, stored in the selected MOS transistor.
[0076] According to an embodiment, when the source terminal of the MOS transistor of the memory cell 105.sub.m,n is electrically floating (coupling state (i)), the low logic level is read in both the first and second read phases, whereby the logic value “00” is read during the read operation of the memory cell 105.sub.m,n.
[0077] According to an embodiment, when the source terminal of the MOS transistor of the memory cell 105.sub.m,.sub.n is electrically coupled to the reference line RL.sub.A,n (coupling state (ii)), in the example herein considered in which the low electric potential V.sub.x is provided in the first read phase to the reference line RL.sub.A,n (
[0078] According to an embodiment, when the source terminal of the MOS transistor of the memory cell 105.sub.m,n is electrically coupled to the reference line RL.sub.B,n (coupling state (iii)), in the example herein considered in which the high electric potential V.sub.y is provided in the first read phase to the reference line RL.sub.B,n (
[0079] According to an embodiment, when the source terminal of the MOS transistor of the memory cell 105.sub.m,n is electrically coupled to the ground line GL (coupling state (iv)), the high logic level is read in both the first and second read phases, whereby the logic value “11” is read during the read operation of that memory cell 105.sub.m,n.
[0080] Therefore, according to the present invention, each memory cell 105.sub.m,n may store a 2-bit logic value namely, a logic value among the logic values “00”, “01”, “10” and “11”, i.e. a logic value having a double number of bits with respect to the conventional mask ROM devices. This allows significantly reducing the size of the mask ROM device 100: indeed, for a same overall amount of data to be stored in the mask ROM device 100, a lower number particularly, a half of the memory cells 105.sub.m,n is required, which decrees a reduction in the size of the memory array and in the number of word lines and/or bit lines as can be easily verified. The presence of the reference lines RL.sub.A,n, RL.sub.B,n and of the driving arrangement 130 does not significantly affect the size reduction of the mask ROM device 100 provided by the reduction in the size of the memory array and in the number of word lines and/or bit lines.
[0081] This can be appreciated in
[0082] As can also be appreciated in
[0083]
[0084] The mask ROM device 200 is analogous in structure to the mask ROM device 100, i.e. it comprises the plurality of memory cells 105.sub.m,n arranged in M rows of memory cells (m= 1, 2, ..., M) and N columns of memory cells (n= 1, 2, ..., N), the plurality of word lines WL.sub.m each one associated with a corresponding row of memory cells, the plurality of bit lines BL.sub.n each one associated with a corresponding column of memory cells, the word line selection circuit 110 for selecting one or more word lines among the plurality of word lines WL.sub.m according to the row address, the bit line selection circuit 115 for selecting one or more bit lines among the plurality of bit lines BL.sub.n according to the column address, the reading circuit 120 for reading the logic value of the selected memory cell 105.sub.m,n, the control logic unit 125, and the ground lines GL fixedly providing the ground electric potential.
[0085] Similarly to the mask ROM device 100, the mask ROM device 200 comprises a plurality of reference lines RL.sub.A,p (p=1,2, ... P) each one selectively providing the low electric potential V.sub.x, i.e., the low logic level, in the first read phase of the read operation and the high electric potential V.sub.y, i.e., the high logic level, in the second read phase of the read operation, and a plurality of further reference lines RL.sub.B,r (r=1,2, ... R) each one selectively providing the high electric potential V.sub.y, i.e., the high logic level, in the first read phase of the read operation and the low electric potential V.sub.x, i.e., the low logic level, in the second read phase of the read operation.
[0086] Differently from the previous embodiment, in which a pair of reference lines RL.sub.A,n, RL.sub.B,n is provided for each column of memory cells, in the embodiment of
[0087] According to an embodiment, as illustrated in
[0088] In the illustrated embodiment, the column of memory cells 105.sub.1,1-105.sub.M,1 and the column of memory cells 105.sub.1,2-105.sub.M,2 represent an example of first pair of adjacent columns of memory cells, the column of memory cells 105.sub.1,3-105.sub.M,3 and the column of memory cells 105.sub.1,4-105.sub.M,4 represent another example of the first pair of adjacent columns of memory cells, and the column of memory cells 105.sub.1,2-105.sub.M,2 and the column of memory cells 105.sub.1,3-105.sub.M,3, represent an example of a second pair of adjacent columns of memory cells being adjacent to the first pairs of adjacent columns of memory cells.
[0089] Therefore, in the example at issue, the reference line RL.sub.A,1 (p=1) is provided between (i.e., shared by) the column of memory cells 105.sub.1,1-105.sub.M,1, and the reference line RL.sub.B,1 (r=1) is provided between (i.e., shared by) the column of memory cells 105.sub.1,1-105.sub.M,1 and the column of memory cells 105.sub.1,2-105.sub.M,2. According to an embodiment, the reference line RL.sub.B,2 (r=2) is provided between (i.e., shared by) the column of memory cells 105.sub.1,3-105.sub.M,3 and the column of memory cells 105.sub.1,4-105.sub.M,4, and the reference line RL.sub.A,2 (p=2) is provided between (i.e., shared by) the column of memory cells 105.sub.1,2-105.sub.M,2 and the column of memory cells 105.sub.1,3-105.sub.M,3.
[0090] Due to such reference line sharing, a lower number of reference lines is provided, compared to the previously described embodiment, which reduces complexity and costs of the mask ROM device 200. In the considered example in which each column of memory cells shares the reference line RL.sub.A,p or the reference line RL.sub.B,r with an adjacent column of memory cells and, respectively, the reference line RL.sub.B,r or the reference line RL.sub.A,p with the other adjacent column of memory cells, when another adjacent column of memory cells is provided a number P = N/2+1 of reference lines RL.sub.A,.sub.p and a number R = N/2+1 of reference lines RL.sub.A,r may be provided.
[0091] Similarly to the mask ROM device 100, the mask ROM device 200 comprises a driving arrangement 230 for driving the reference lines RL.sub.A,P, RL.sub.B,s with the low V.sub.x and high V.sub.y electric potentials.
[0092] The driving arrangement 230 is similar in structure to the driving arrangement 130.
[0093] Similarly to the driving arrangement 130, according to practical implementations, the driving arrangement 230 may comprise, for each reference line RL.sub.A,P, RL.sub.B,s, or for each group of reference lines RL.sub.A,p, RL.sub.B,s, a CMOS inverter (not shown), or other type of driver, powered between the power supply electric potential and the ground electric potential, and having an output terminal electrically coupled to the reference line RL.sub.A,P, RL.sub.B,s, or a NMOS-NMOS inverter (not shown), or other type of driver, powered between the power supply electric potential and the ground electric potential, and having an output terminal electrically coupled to the reference line RL.sub.A,P, RL.sub.B,s.
[0094] Due to the lower number of reference lines compared to the previous embodiment, the driving arrangement 230 may have, compared to the driving arrangement 130, a smaller size, practically, a lower number of drivers, which concurs to reduction in complexity, costs and power consumption of the mask ROM device 200.
[0095] This can be appreciated in
[0096] As can also be appreciated in
[0097] With reference now to
[0098] According to an embodiment, the memory system 300 is a semiconductor integrated system such as, a “Large Scale Integration” (LSI) system or a “Very Large Scale Integration” system, formed on a single semiconductor chip.
[0099] According to an embodiment, the memory system 300 comprises the mask ROM device 100 or the mask ROM device 200 hereinafter concisely referred to as mask ROM device 100,200,
[0100] According to an embodiment, the memory system 300 comprises a tridimensional NAND flash memory device. According to an embodiment, the memory cells of the mask ROM device 100, 200 form a “Periphery Under Cell” (PUC) structure of the tridimensional NAND flash memory device, i.e. with tridimensional NAND flash memory cells 305 of the tridimensional NAND flash memory device that are formed above the memory cells 105.sub.m,n of the mask ROM device 100,200,
[0101] According to an embodiment, as typical in modern semiconductor integrated systems, the memory system 300 comprises multiple levels of metal interconnects (metal layers) mutually separated from each other by respective dielectric layers.
[0102] According to an embodiment, the metal layers comprise metal layers formed above the NAND flash memory cells 305 hereinafter, upper metal layers, mutually separated from each other by respective dielectric layers hereinafter, upper dielectric layers.
[0103] Three upper metal layers 310.sub.1U, 310.sub.2U, 310.sub.3U and three upper dielectric layers 315.sub.1U, 315.sub.2U, 315.sub.3U are by way of example shown in
[0104] According to an embodiment, the metal layers comprise metal layers formed (above the memory cells 105.sub.m,n, below the NAND flash memory cells 305 hereinafter, lower metal layers, mutually separated from each other by respective dielectric layers hereinafter, lower dielectric layers.
[0105] Three lower metal layers 310.sub.1L, 310.sub.2L, 310.sub.3L and three lower dielectric layers 315.sub.1L, 315.sub.2L, 315.sub.3L are by way of example shown in
[0106] According to an embodiment, the lower metal layers 310.sub.1L, 310.sub.2L, 310.sub.3L or at least a subset thereof, are the layers from which disturb-sensitive lines are formed. According to an embodiment, the lower metal layers 310.sub.1L, 310.sub.2L, 310.sub.3L or at least a subset thereof, are the layers from which the bit lines of the memory system including the bit lines BL.sub.n of the mask ROM device 100, 200, and/or the ground lines of the memory system including the ground lines GL of the mask ROM device 100,200, and/or the word lines of the memory system including the word lines WL.sub.m of the mask ROM device 100, 200 are formed,
[0107] According to an embodiment, the upper metal layers 310.sub.1U, 310.sub.2U, 310.sub.3U or at least a subset thereof, are the layers from which disturbing lines are formed, e.g., so as to separate them from the disturb-sensitive lines provided in the lower metal layers 310.sub.1L, 310.sub.2L, 310.sub.3L. According to an embodiment, the upper metal layers 310.sub.1U, 310.sub.2U, 310.sub.3U or at least a subset thereof, are the layers from which power supply lines and clock distribution lines are formed.
[0108] According to an embodiment, the upper metal layers 310.sub.1U, 310.sub.2U, 310.sub.3U or at least a subset thereof, are the layers from which the reference lines of the mask ROM device 100,200 (i.e., the reference lines RL.sub.A,n, RL.sub.B,n of the mask ROM device 100, or the reference lines RL.sub.A,p, RL.sub.B,s of the mask ROM device 200, or a subset thereof), are formed. According to an embodiment, the reference lines of the mask ROM device 100,200, i.e., the reference lines RL.sub.A,n, RL.sub.B,n of the mask ROM device 100, or the reference lines RL.sub.A,p, RL.sub.B,s of the mask ROM device 200, or a subset thereof, are formed from the uppermost metal layer of the memory system 300, i.e., the uppermost metal layer of the upper metal layers, namely the metal layer 310.sub.1U in the example at issue.
[0109] Forming the reference lines of the mask ROM device 100,200 from the upper metal layers and, particularly, from the uppermost metal layer of the memory system 300 does not significantly affect power consumption: indeed, upper metal layers exhibit low or relatively low resistances, which results in narrow or relatively narrow, and low or relatively low capacitance lines.
[0110] Just as an example, for the mask ROM device 200, the additional electric charge required to charge the reference lines RL.sub.A,p, RL.sub.B,s at the power supply electric potential V.sub.DD is comparable to the electric charge saved by bit line length reduction.
[0111] According to an embodiment, as is typical in modern semiconductor integrated systems, the memory system 300 comprises plurality of electrical connects, e.g., contacts and/or vias, to make vertical connects between interconnects on different levels. Two contacts are shown in
[0112] As visible in
[0113] Forming the electric couplings 330-340 and, hence, the programming of the memory cells 105.sub.m,n in the uppermost metal layer allows changing the programming of the mask ROM device 100,200 in the later second half of the manufacturing process of the memory system 300: this provides an increased degree of design choice, which is effective in cost reduction. Moreover, forming the electric couplings 330-340 and, hence, the programming of the memory cells 105.sub.m,n by means of the uppermost metal layer avoids manufacturing additional, dedicated electrical connects throughout the memory system which could otherwise pose limiting layout constraints.
[0114]
[0115] According to an embodiment, the electronic apparatus 400 comprises a memory. The memory may comprise the mask ROM device 100 or more thereof, the mask ROM device 200 or more thereof, or the memory system 300.
[0116] According to an embodiment, the electronic apparatus 400 may comprise a controller 405 for example, one or more microprocessors and/or one or more microcontrollers.
[0117] According to an embodiment, the electronic apparatus 400 may comprise an input/output device 410, such as a screen and/or a keyboard.
[0118] According to an embodiment, the electronic apparatus 400 may comprise a wireless interface 415, e.g., one or more antennas and/or one or more wireless transceivers for wirelessly exchanging messages with a wireless communication network (not shown).
[0119] According to an embodiment, the electronic apparatus 400 may comprise a power supply device 420 for example, a battery, for powering the electronic apparatus 400.
[0120] According to an embodiment, the electronic apparatus 400 may comprise one or more communication channels (bus) 425 to allow the exchange of data between the memory, the controller 405 (when provided), the input/output device 410 (when provided), the wireless interface 415 (when provided), and the power supply device 420 (when provided).
[0121] In order to satisfy local and specific requirements, a person skilled in the art may apply to the invention described above many logical and/or physical modifications and alterations. More specifically, although the present invention has been described with a certain degree of particularity with reference to preferred embodiments thereof, it should be understood that various omissions, substitutions and changes in the form and details as well as other embodiments are possible. In particular, different embodiments of the invention may even be practiced without the specific details set forth in the preceding description for providing a more thorough understanding thereof; on the contrary, well-known features may have been omitted or simplified in order not to encumber the description with unnecessary details. Moreover, it is expressly intended that specific elements and/or method steps described in connection with any disclosed embodiment of the invention may be incorporated in any other embodiment.
[0122] In particular, similar considerations apply if the mask ROM device has a different structure or comprises equivalent components. In any case, any component thereof may be separated into several elements, or two or more components may be combined into a single element; furthermore, each component can be replicated to support the execution of the corresponding operations in parallel. It should also be noted that, unless otherwise indicated, any interaction between different components generally does not need to be continuous, and may be either direct or indirect through one or more intermediaries.
[0123] Although specific terminologies are used herein, they are used only to describe the embodiments of the present disclosure. The present invention is not restricted by any such terminology nor any particular details, as many variations are possible within the spirit and scope of the present disclosure. It should be apparent to those skilled in the art that various modifications can be made on the basis of the technological scope of the present disclosure in addition to the embodiments disclosed herein and the following claims. Furthermore, the embodiments may be combined to form additional embodiments.