Dielectric Spectroscopic Measurement Device

Abstract

A dielectric spectrometer includes an apparatus main body including a dielectric and in which a flow channel is formed and a probe including a high frequency line. The probe measures a dielectric constant of an object substance as an electrical signal and penetrates the apparatus main body, one end that is an open end of the probe functions as a detection terminal that is exposed to inside the flow channel, and a fringe is formed at the detection terminal of the probe.

Claims

1-4. (canceled)

5. A dielectric spectrometer comprising: an apparatus main body including a flow channel and comprising a dielectric; a probe comprising a high frequency line having a guiding direction that is perpendicular to a flow of the flow channel, wherein the probe penetrates the apparatus main body, and wherein an open end of the probe is a detection terminal that is exposed to inside the flow channel; and a fringe disposed at the detection terminal in the probe.

6. The dielectric spectrometer according to claim 5, wherein a surface of the fringe in a direction perpendicular to the guiding direction of the high frequency line is wider than a region in which an electric field intensity of a leakage field from the detection terminal is equal to or lower than 1% of a maximum value.

7. The dielectric spectrometer according to claim 6, wherein a height of the flow channel in the guiding direction of the high frequency line and a width of the flow channel in the direction perpendicular to the guiding direction of the high frequency line are set within the region in which the electric field intensity of the leakage field from the detection terminal is equal to or lower than 1% of the maximum value.

8. The dielectric spectrometer according to claim 7, wherein: the probe comprises a coaxial line; and the fringe is disposed on an outer conductor of the coaxial line.

9. The dielectric spectrometer according to claim 5, wherein a height of the flow channel in the guiding direction of the high frequency line and a width of the flow channel in a direction perpendicular to the guiding direction of the high frequency line are set within a region in which an electric field intensity of a leakage field from the detection terminal is equal to or lower than 1% of a maximum value.

10. The dielectric spectrometer according to claim 5, wherein: the probe comprises a coaxial line; and the fringe is disposed on an outer conductor of the coaxial line.

11. A method of forming a dielectric spectrometer, the method comprising: forming an apparatus main body comprising a dielectric; forming a flow channel in the apparatus main body; forming a probe comprising a high frequency line, the high frequency line having a guiding direction that is perpendicular to a flow of the flow channel, wherein the probe penetrates the apparatus main body, and wherein an open end of the probe is a detection terminal that is exposed to inside the flow channel; and forming a fringe at the detection terminal in the probe.

12. The method according to claim ii, wherein a surface of the fringe in a direction perpendicular to the guiding direction of the high frequency line is wider than a region in which an electric field intensity of a leakage field from the detection terminal is equal to or lower than 1% of a maximum value.

13. The method according to claim 12, wherein a height of the flow channel in the guiding direction of the high frequency line and a width of the flow channel in the direction perpendicular to the guiding direction of the high frequency line are set within the region in which the electric field intensity of the leakage field from the detection terminal is equal to or lower than 1% of the maximum value.

14. The method according to claim 13, wherein: the probe comprises a coaxial line; and the fringe is formed on an outer conductor of the coaxial line.

15. The method according to claim ii, wherein a height of the flow channel in the guiding direction of the high frequency line and a width of the flow channel in a direction perpendicular to the guiding direction of the high frequency line are set within a region in which an electric field intensity of a leakage field from the detection terminal is equal to or lower than 1% of a maximum value.

16. The method according to claim 11, wherein: the probe comprises a coaxial line; and the fringe is disposed on an outer conductor of the coaxial line.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0015] FIG. 1A is a sectional view showing a configuration of a dielectric spectrometer according to an embodiment of the present invention.

[0016] FIG. 1B is a plan view showing a configuration of the dielectric spectrometer according to an embodiment of the present invention.

[0017] FIG. 2 is a configuration diagram showing a configuration of a measurement system using the dielectric spectrometer according to an embodiment of the present invention.

[0018] FIG. 3 is a characteristic diagram showing a result of a simulation of an attenuation rate of electric field intensity by a probe.

[0019] FIG. 4 is a characteristic diagram showing a result of a simulation of an attenuation rate in a guiding direction from a detection terminal of electric field intensity by a probe.

[0020] FIG. 5 is a characteristic diagram showing a result of analyzing an S parameter when air is an object substance of the dielectric spectrometer according to an embodiment.

[0021] FIG. 6 is a characteristic diagram showing a result of analyzing an S parameter when air is an object substance of a conventional dielectric spectrometer.

[0022] FIG. 7 is a configuration diagram showing a configuration of the dielectric spectrometer according to an embodiment of the present invention.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

[0023] Hereinafter, a dielectric spectrometer according to an embodiment of the present invention will be described with reference to FIGS. 1A and 1B. The dielectric spectrometer includes an apparatus main body 101 constituted of a dielectric and a probe 102 constituted of a high frequency line. A flow channel 103 is formed in the apparatus main body 101. An object substance to be a measurement object flows through the flow channel 103. An intake 104 and an outlet 105 are also formed in the apparatus main body 101 so as to connect to the flow channel 103. For example, the apparatus main body 101 can be constituted of a resin such as polydimethylsiloxane (PDMS) or polymethyl methacrylate (PMMA). For example, an external shape of the apparatus main body 101 is a cuboid.

[0024] In addition, the probe 102 measures a dielectric constant of the object substance as an electrical signal and penetrates the apparatus main body 101, and one end that is an open end of the probe 102 functions as the detection terminal 102a that is exposed to inside a flow channel 103. Furthermore, in the probe 102, a guiding direction of the high frequency line is perpendicular to a flow of the flow channel 103. Moreover, in the dielectric spectrometer according to the embodiment, a fringe 109 is formed at the detection terminal 102a of the probe 102. In this example, the fringe 109 with a disk shape is provided at an end of a main body of the probe 102 with a columnar shape. For example, the probe 102 is constituted of a coaxial line including an outer conductor 106 and an inner conductor 107 and the fringe 109 is formed on the outer conductor 106. A space between the outer conductor 106 and the inner conductor 107 is filled by a dielectric layer 108 constituted of a fluororesin or the like.

[0025] The probe 102 is used to measure an electric characteristic such as impedance, admittance, or a complex dielectric constant of a sample being a measurement object by utilizing a leakage electromagnetic field that is created between the outer conductor 106 and the inner conductor 107 which come into contact with the object substance (fluid) inside the flow channel 103 at the detection terminal 102a.

[0026] A dielectric spectroscopic system will now be described with reference to FIG. 2. The system includes a dielectric spectrometer 201 according to embodiments of the present invention, a high frequency measuring apparatus 202, a calculating apparatus 203, and a display apparatus 204. The dielectric spectrometer 201 includes the apparatus main body 101 and the probe 102 described above. The high frequency measuring apparatus 202 sweeps frequencies within an arbitrary range to generate an electromagnetic wave and supplies the probe 102 with the electromagnetic wave. In addition, the high frequency measuring apparatus 202 measures (observes) an amplitude and a phase of the electromagnetic wave in a state where the electromagnetic wave is absorbed by the object substance in the probe 102. The calculating apparatus 203 calculates a dielectric constant of the object substance from a result of a measurement performed by the high frequency measuring apparatus 202. The display apparatus displays a result of a calculation performed by the calculating apparatus 203.

[0027] For example, the high frequency measuring apparatus 202 is a vector network analyzer. In addition, a commercially available impedance analyzer, an LCR meter, or the like can be used as the high frequency measuring apparatus 202. Furthermore, a dielectric spectroscopic system can also be constructed based on an S parameter measurement system using an arbitrary waveform generator and a wideband measuring instrument or based on an impedance measurement system using a bridge method or an RF-IV method.

[0028] Next, the dielectric spectrometer according to an embodiment will be described in greater detail. A characteristic impedance of the probe 102 constituted of a coaxial line is expressed by Equation (1) below. In Equation (1), Z0 denotes a characteristic impedance (Ω) of a coaxial line, Ε.sub.r denotes a relative dielectric constant of the dielectric layer 108 in the coaxial line, a denotes a radius of an outer diameter of the inner conductor 107, and b denotes a radius of an inner diameter of the outer conductor 106. In addition, a cutoff frequency of the coaxial line is expressed by Equation (2) below. In Equation (2), f.sub.c denotes a cutoff frequency and v denotes the speed of light.

[00001]$\mathrm{Equations}\left(1\right)\mathrm{and}\left(2\right)$$\begin{array}{cc}Z0=\frac{138.061}{\sqrt{{\epsilon }_r}}\log \frac{b}{a}& \left(1\right)\end{array}$$\begin{array}{cc}\mathrm{fc}=\frac{v}{\pi \sqrt{{\epsilon }_r}\left(a+b\right)}& \left(2\right)\end{array}$

[0029] For example, the high frequency measuring apparatus 202 constituted of a vector network analyzer is generally designed so as to have a characteristic impedance of 50 Ω or 75 Ω. Therefore, the parameters a, b, and Ε.sub.r are designed so that an upper limit of measurement frequencies does not equal or fall below the cutoff frequency f.sub.c and, at the same time, the characteristic impedance satisfies the above. For example, when the upper limit of measurement frequencies is 50 GHz, the characteristic impedance is 50 Ω, and the dielectric layer 108 between the outer conductor 106 and the inner conductor 107 is fluororesin (Ε.sub.r≈2.2), a is set to 0.175 mm and b is set to 0.8 mm.

[0030] c denotes a radius in a plan view of the fringe 109 (a fringe radius) provided in a portion (the detection terminal 102a) that comes into contact with the object substance of the probe 102. The fringe radius c is formed so as to equal or exceed a region in which an electric field intensity of a leakage field from the detection terminal iota of the probe 102 is equal to or lower than 1% of a maximum value. In other words, a surface in a direction perpendicular to the guiding direction of the high frequency line (the coaxial line) of the fringe 109 is made wider than a region in which an electric field intensity of a leakage field from the detection terminal iota is equal to or lower than 1% of a maximum value. For example, c≥3 mm.

[0031] FIG. 3 shows a result of a simulation of an attenuation rate of electric field intensity in a planar direction (a horizontal direction) of the surface of the detection terminal 102a of the probe 102 from a center of the detection terminal 102a when c=9.5 mm. In FIG. 3, r denotes a distance in the horizontal direction from the center of the detection terminal 102a.

[0032] In this case, a state is created where there is no gap between a side surface adjacent to the detection terminal 102a of the fringe 109 and a wall surface of the flow channel 103 of the apparatus main body 101 so that the fluid flowing through the flow channel 103 does not leak out. The probe 102 including the fringe 109 is fixed to the apparatus main body 101 using screws, a double-faced tape, or the like. In addition, accuracy of positioning between the apparatus main body 101 and the probe 102 may be increased using a pattern, pins, or the like for positioning. Furthermore, the probe 102 can be configured to prevent leakage of the fluid using an O ring, packing, or the like when the probe 102 is attached to the apparatus main body 101.

[0033] A height h of the flow channel 103 in the guiding direction of the high frequency line (the coaxial line) and a width w of the flow channel 103 in a direction perpendicular to the guiding direction of the high frequency line are set within a region in which an electric field intensity of a leakage field from the detection terminal 102a of the probe 102 is equal to or lower than 1% of a maximum value.

[0034] FIG. 4 shows a result of a simulation of an attenuation rate with respect to a distance d in the guiding direction (a height direction of the flow channel 103) from the detection terminal 102a of electric field intensity by the probe 102. The width w and the height h are set equal to or lower than values where the attenuation rate of the electric field intensity is 1% such as h=2 mm and w=3 mm. In regard to the width w, in consideration of a margin for forming the fringe 109, w=fringe radius c-6 (mm) at a maximum.

[0035] FIG. 5 shows a comparison between cases where the flow channel 103 according to embodiments of the present invention is present and absent. FIG. 5 represents a result of an analysis of an S parameter (scattering parameter) S11 when using the respective parameters described above and when air (dielectric constant=1) is the object substance. A solid line represents a case where the flow channel is absent and a dotted line represents a case where the flow channel is present.

[0036] FIG. 6 shows a result of a simulation of an effect of a flow channel in a conventional dielectric spectrometer. In a similar manner to that described above, FIG. 6 represents a comparison between cases where the flow channel is present and absent as well as a result of an analysis of the S parameter S11 when air (dielectric constant=1) is the object substance. A solid line represents a case where the flow channel is absent and a dotted line represents a case where the flow channel is present. As shown in FIG. 7, in the conventional dielectric spectrometer, a wiring 302 that constitutes a coplanar-type high frequency line is formed on a substrate 301 constituted of a dielectric, and a flow channel substrate 303 is formed on the wiring 302. A flow channel is formed so as to be orthogonal to the guiding direction of the high frequency line on the flow channel substrate 303. In addition, as compared to the wiring 302, a high-frequency connector 304 is connected as a resistor.

[0037] As shown in FIG. 6, conventionally, since the flow channel substrate that forms a flow channel is installed on a coplanar waveguide which is a propagation path of electric waves, characteristics significantly vary depending on whether the flow channel is present or not. On the other hand, in the result of a simulation shown in FIG. 5, there is hardly any effect of the flow channel. As described above, according to embodiments of the present invention, a measurement of an object substance can be performed in a state where there is hardly any effect of the presence or absence of the flow channel (effect of the apparatus main body 101). In particular, a wide band dielectric constant measurement of an object substance in a minute amount using a microchannel with, for example, a flow channel height of 2 mm and a flow channel width 3 mm can be performed more accurately.

[0038] In the measurement of the object substance by the dielectric spectrometer according to the embodiment, a dielectric constant of the object substance is calculated from a measured impedance, admittance, a reflection coefficient, or the like. For example, using three reference substances including a first reference substance, a second reference substance, and a third reference substance of which dielectric constants are known in advance, a sample dielectric constant is calculated using equations (3) and (4) presented below.

[00002]$\mathrm{Equations}\left(3\right)\mathrm{and}\left(4\right)$$\begin{array}{cc}\frac{\left({\rho }_4-{\rho }_1\right)\left({\rho }_3-{\rho }_2\right)}{\left({\rho }_4-{\rho }_2\right)\left({\rho }_1-{\rho }_3\right)}=\frac{\left(y_4-y_1\right)\left(y_3-y_2\right)}{\left(y_4-y_2\right)\left(y_1-y_3\right)}& \left(3\right)\end{array}$$\begin{array}{cc}{y}_1={\epsilon }_i+\frac{G_0}{j\omega C_0}{\epsilon }_i^{5/2}& \left(4\right)\end{array}$

[0039] In this case, ρ.sub.1 denotes a reflection coefficient obtained as a result of measuring the first reference substance, ρ.sub.2 denotes a reflection coefficient obtained as a result of measuring the second reference substance, and ρ.sub.3 denotes a reflection coefficient obtained as a result of measuring the third reference. In addition, ρ.sub.4 denotes a reflection coefficient obtained as a result of measuring the object substance.

[0040] Furthermore, y.sub.1, denotes a linear map of admittance obtained as a result of measuring the first reference substance with a dielectric constant of Ε.sub.1,y.sub.2 denotes a linear map of admittance obtained as a result of measuring the first reference substance with a dielectric constant of Ε.sub.2, and y.sub.3 denotes a linear map of admittance obtained as a result of measuring the first reference substance with a dielectric constant of Ε.sub.3. In addition, y.sub.4 denotes a linear map of admittance obtained as a result of measuring the object substance with a dielectric constant of Ε.sub.4.

[0041] G.sub.0 indicates a characteristic impedance of a portion that is outside of the apparatus main body 101 in the transmission line of the probe 102.

[0042] The dielectric constant of the object substance is calculated by using the first reference substance, the second reference substance, and the third reference substance of which dielectric constants are known as calibration standards. As the calibration standards, air, a solid, liquid metal, water, an organic solvent such as alcohol, or the like is used. In the dielectric spectrometer according to the embodiment, since an effect of the flow channel 103 (the apparatus main body 101) with respect to impedance and admittance has been reduced, a conversion to a dielectric constant can be performed while reducing an effect of a reflection term derived from the flow channel during the calculation of Equation (3) or the like. In this manner, using the dielectric spectrometer according to the embodiment enables a dielectric constant of an object in a minute amount in the flow channel 103 to be accurately measured across a wide bandwidth.

[0043] As described above, according to embodiments of the present invention, since a fringe is formed at a detection terminal of a probe constituted of a high frequency line, wide band dielectric constant measurement can be performed in an accurate manner.

[0044] It is to be understood that the present invention is not limited to the embodiments described above and that many modifications and combinations will obviously occur to those with ordinary skill in the art without departing from the technical scope of the present invention.

Reference Signs List

[0045] 101 Apparatus main body

[0046] 102 Probe

[0047] 102a Detection terminal

[0048] 103 Flow channel

[0049] 104 Intake

[0050] 105 Outlet

[0051] 106 Outer conductor

[0052] 107 Inner conductor

[0053] 108 Dielectric layer

[0054] 109 Fringe