Micromechanical device including a stop spring structure

Abstract

A micromechanical device including a substrate, a movable mass, and a stop spring structure, which includes a stop. The substrate includes a substrate surface in parallel to a main extension plane and the movable mass is situated movably above the substrate surface in relation to the substrate. The stop spring structure is connected to the movable mass. The stop is designed to strike against the substrate surface in the event of a deflection of the movable mass in a z direction, perpendicular to the main extension plane. The stop spring structure, at the location of the stop, includes a first spring constant, a second spring constant, in parallel to the main extension plane, and a third spring constant, in parallel to the main extension plane and perpendicular to the x direction. The first spring constant is greater than the second spring constant and/or is greater than the third spring constant.

Claims

1. A micromechanical device, comprising: a substrate including a substrate surface in parallel to a main extension plane; a movable mass situated movably above the substrate surface in relation to the substrate; and a stop spring structure which includes a stop, the stop spring structure being connected to the movable mass, and the stop is configured to strike against the substrate surface in the event of a deflection of the movable mass in a z direction, perpendicular to the main extension plane, the stop spring structure, at the location of the stop, includes a first spring constant in the z direction, includes a second spring constant in an x direction, in parallel to the main extension plane, and includes a third spring constant in a y direction, in parallel to the main extension plane and perpendicular to the x direction, the first spring constant being greater than the second spring constant and/or being greater than the third spring constant.

2. The micromechanical device as recited in claim 1, wherein the stop spring structure includes a first stop spring, which is connected in at least one first connecting area to the movable mass.

3. The micromechanical device as recited in claim 2, wherein the first stop spring is connected in a second connecting area to the movable mass and is a torsion spring and/or a meander spring.

4. The micromechanical device as recited in claim 2, wherein the first stop spring is a spiral spring.

5. The micromechanical device as recited in claim 2, wherein the stop spring structure includes a second stop spring, which is connected to the first stop spring.

6. The micromechanical device as recited in claim 1, wherein the second spring constant and/or the third spring constant is less than 60% of the first spring constant.

7. The micromechanical device as recited in claim 1, wherein the second spring constant and/or the third spring constant is less than 30% of the first spring constant.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIGS. 1a and 1b schematically show a z acceleration sensor in the related art.

(2) FIGS. 2a and 2b schematically show a micromechanical stop structure according to the present invention in a first exemplary embodiment.

(3) FIGS. 3a and 3b schematically show a micromechanical stop structure according to the present invention in a second and third exemplary embodiment.

(4) FIGS. 4a and 4b schematically show a micromechanical stop structure according to the present invention in a fourth exemplary embodiment.

(5) FIGS. 5a, 5b, and 5c schematically show a micromechanical stop structure according to the present invention in a fifth exemplary embodiment in three operating states.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

(6) The force acting on a spring is, in a first approximation, proportional to the deflection of the spring.

(7) F=K*L, where F is the force, K the spring constant, and L the deflection.

(8) The stop spring structure of the device according to the present invention enables deflections in all (Cartesian) spatial directions x, y, z. The stop spring structure includes different spring constants and thus different restoring forces as a function of the direction of the deflection.
F(x,y,z)=K(x,y,z)*L(x,y,z)

(9) In order that, if possible, no lateral movement results over the surface of the stop in the x or y direction, the spring constant, also referred to as the spring rigidity or spring stiffness, perpendicular to stop direction z is to be less than a certain percentage of the spring stiffness in the stop direction. This results from the coefficient of friction and from the maximum expectable force vector if one presumes that the external force vector during an impact does not significantly change the direction. The spring rigidity in directions perpendicular to stop direction z is particularly preferably to be less than 30% of the spring rigidity in the stop direction, but at least less than 60%.

(10) There are many options for designing the resilient stops in such a way that they correspond to the above requirements.

(11) FIGS. 1a and 1b schematically show a z acceleration sensor in the related art.

(12) FIG. 1a shows a substrate 10, the base of a sensor core here, including a substrate surface 12. FIG. 1b shows a micromechanical device, in the example a z acceleration sensor, including a substrate 10 and a movable mass 20, which is suspended asymmetrically with the aid of torsion springs 400 on an anchor 500. The anchor is fastened at the substrate and holds the movable mass above substrate surface 12. Substrate surface 12 extends in parallel to a main extension plane x, y. The movable mass is situated movably in relation to the substrate above the substrate surface. Electrodes 200, using which a distance of the movable mass to the substrate surface may be measured, are situated below the movable mass on the substrate surface. The movable mass includes fixed stops in the form of knobs 400 on a lower side opposite to the substrate surface. In the event of a deflection of the movable mass in the z direction, i.e., perpendicularly to main extension plane x, y, these knobs 400 strike at substrate surface 12. The schematic representation shows a z acceleration sensor according to the rocker principle in a transparent top view.

(13) To illustrate the present invention described hereinafter, an area 101 is marked in which a stop spring structure according to the present invention could be implemented. Of course, this is not the only possible area. For example, resilient stops would also be implemented on the opposite side of the sensor.

(14) FIGS. 2a and 2b schematically show a micromechanical stop structure according to the present invention in a first exemplary embodiment. It is situated in enlarged detail 101 of the micromechanical device.

(15) FIG. 2a shows partially seismic mass 20 including a recess 25. A stop spring structure 30 having a first stop spring 31 is situated in the recess. The first stop spring is connected in a first connecting area 23 and in a second connecting area 24 to movable mass 20. The first stop spring is made up of a combination of a torsion spring and a loop spring or a meander spring. The location of stop 40 is located in the center of the active spring length.

(16) FIG. 2b shows the location of the stop in section. Stop 40 is situated on first stop spring 31 and has the form of a knob in this example. In the event of a deflection of the movable mass in the z direction, stop 40 may strike against substrate surface 12. The knob protrudes for this purpose beyond the surface of the seismic mass and the stop spring structure opposite to the substrate. Stop spring structure 30 has, at the location of stop 40, a first spring constant Kz in the z direction, a second spring constant Kx in an x direction, in parallel to main extension plane x, y, and a third spring constant Ky in a y direction, in parallel to main extension plane x, y and perpendicular to the x direction. First spring constant Kz is greater than second spring constant Kx and also greater than third spring constant Ky.

(17) A spring construction is thus shown in FIGS. 2a and 2b which is soft in in-plane directions x, y due to the narrow and folded spring bars and has the desired higher spring rigidity in out-of-plane direction z, since the spring bars are significantly taller than they are wide.

(18) If stop 40 rests against substrate surface 12 due to a z acceleration and an acceleration in the x or y direction additionally occurs, stop spring structure 30 yields in the x or y direction. Therefore, the stop does not scrape over the substrate surface in parallel to the main extension plane. The stop remains at rest on the substrate surface.

(19) FIGS. 3a and 3b schematically show a micromechanical stop structure according to the present invention in a second and third exemplary embodiment.

(20) A stop spring structure 30 including a first stop spring 31 in a spiral construction is shown.

(21) FIG. 3a shows a spiral-shaped structure of the spring including linear, angled spring bars in sections.

(22) FIG. 3b shows a classic spiral spring including a curved spring bar. First stop spring 31 is situated in each case in a recess 25 in movable mass 20 and is connected to the movable mass in a first connecting area 23. Stop 40 is situated at the other end of the effective spring length.

(23) The constructions shown in FIGS. 2a, 2b, 3a and 3b may be implemented in a single micromechanical functional layer, with the exception of the stop knob itself.

(24) FIGS. 4a and 4b schematically show a micromechanical stop structure according to the present invention in a fourth exemplary embodiment.

(25) FIG. 4a shows a partially transparent top view from above of section 101 including movable mass 20 and recess 25, in which stop spring structure 30 is situated. A first stop spring 31 is schematically shown by spring symbols in directions x and y. It is connected at the location of the stop to a second stop spring 32, which includes stop 40 at a lower side.

(26) FIG. 4b shows the location of the stop in section. Stop spring structure 30 including first stop spring 31 is shown, partially in a symbolic illustration. Second stop spring 32, which is deflectable in z direction, is situated below the first stop spring and connected thereto. Stop 40 is situated in the form of a stop knob at the second stop spring. In the event of a deflection of the movable mass and with it stop spring structure 30 in the z direction, stop 40 may strike against substrate surface 12 of substrate 10.

(27) The movable mass and the first stop spring are situated in a first micromechanical functional layer. Situating the second stop spring below the first stop spring represents an additional degree of freedom in the design of the micromechanical device, which results due to the use of a second functional layer. Using the construction shown, the symbolically indicated spring elements of first stop spring 31 may be made very soft in the x and y direction, while they have a high rigidity perpendicular to the main plane, in the z direction. The rigidity of stop spring structure 30 at the location of stop 40 is essentially determined by second stop spring 32, which is formed in the second functional layer.

(28) FIGS. 5a, 5b, and 5c schematically show a micromechanical stop structure according to the present invention in a fifth exemplary embodiment in three operating states. One possible implementation of the embodiment from FIGS. 4a and 4b is shown in FIG. 5a. The construction of first stop spring 31 is made up of 2 U springs, which have a large distance of the legs from one another. This spring construction is thus soft in both directions x and y in parallel to main extension plane x, y. Second stop spring 32 is designed including a rectangular footprint and otherwise corresponds to the construction from FIGS. 4a and 4b. It is apparent that the unused area of recess 25, which is empty in the illustration, may be filled up with seismic mass 20 in such a way that the freedom of movement of the stop spring structure is not restricted.

(29) FIG. 5a shows the micromechanical device in a first operating state in an idle position. Movable mass 20 and stop spring structure 30 are not deflected. Stop 40 has no mechanical contact with the underlying substrate.

(30) FIG. 5b shows the micromechanical device in a second operating state. During a sustained deflection in the z direction, in the case of which stop 40 strikes against the substrate surface, a deflection of movable mass 20 in the y direction additionally occurs. First spring constant Kz is greater than third spring constant Ky. Stop 40, therefore, remains stationary on the substrate surface, and first stop spring 31 yields in the y direction.

(31) FIG. 5c shows the micromechanical device in a third operating state. During a sustained deflection in the z direction, in the case of which stop 40 strikes against the substrate surface, a deflection of movable mass 20 in the x direction additionally occurs. First spring constant Kz is greater than second spring constant Kx. Stop 40, therefore, remains stationary on the substrate surface, and first stop spring 31 yields in the x direction.

LIST OF REFERENCE NUMERALS

(32) 10 substrate 12 substrate surface 20 movable mass 23 first connecting area 24 second connecting area 25 recess 30 stop spring structure 31 first stop spring 32 second stop spring 40 stop 101 enlarged detail 200 electrode 300 fixed stop, knob 400 torsion spring 500 anchor