PVD REACTOR WITH A FUNCTION OF ALIGNMENT IN COVERING AN UPPER COVER OF THE REACTOR

Abstract

A PVD reactor with a function of alignment in covering an upper cover includes a cavity having a first contact surface; an interior of the cavity having a metal isolation plate; an upper cover pivotally installed to the cavity; the upper cover having a second contact surface which is positioned corresponding to the first contact surface of the cavity; the upper cover being capable of being combined with a target; a plurality of semi-spherical recesses in the first contact surface of the cavity; and a plurality of semi-spherical protrusions in the second contact surface; when the upper cover covers upon the cavity, the plurality of semi-spherical protrusions will embed into the plurality of semi-spherical recesses.

Claims

1. A PVD reactor with a function of alignment in covering an upper cover, comprising: a cavity having a first contact surface; an interior of the cavity having a metal isolation plate; an upper cover pivotally installed to the cavity; the upper cover having a second contact surface which is positioned corresponding to the first contact surface of the cavity; and the upper cover being combinable with a target; a plurality of semi-spherical recesses in the first contact surface of the cavity; and a plurality of semi-spherical protrusions in the second contact surface; when the upper cover covers upon the cavity, the plurality of semi-spherical protrusions will embed into the plurality of semi-spherical recesses.

2. The PVD reactor with a function of alignment in covering an upper cover as claimed in claim 1, wherein an opening of each semi-spherical recess has an enlarge cambered guide angle for guiding the semi-spherical protrusion into the semi-spherical recess.

3. The PVD reactor with a function of alignment in covering an upper cover as claimed in claim 1, wherein there are three positioning groove units and three positioning blocks; the three positioning groove units are at three corners of the first contact surface and the three positioning blocks are at three corners of the second contact surface at positions corresponding to those of the positioning groove units.

4. The PVD reactor with a function of alignment in covering an upper cover as claimed in claim 1, wherein there are two positioning groove units and two positioning blocks; the two positioning groove units are at two corners of the first contact surface and the two positioning blocks are at two corners of the second contact surface at positions corresponding to those of the positioning groove units.

5. The PVD reactor with a function of alignment in covering an upper cover as claimed in claim 1, wherein there are four positioning groove units and four positioning blocks; the four positioning groove units are at four corners of the first contact surface and the four positioning blocks are at four corners of the second contact surface at positions corresponding to those of the positioning groove units.

6. The PVD reactor with a function of alignment in covering an upper cover as claimed in claim 1, wherein the upper cover is pivotally installed to the cavity by using a pivotal shaft so that the upper cover is openable and coverable with respect to the cavity.

7. The PVD reactor with a function of alignment in covering an upper cover as claimed in claim 1, wherein a plurality of positioning groove units are combined in the first contact surface of the cavity; each positioning groove unit having one of the semi-spherical recesses; a plurality of positioning blocks combined to the second contact surface of the upper cover; each positioning block having one of the semi-spherical protrusions; when the upper cover covers upon the cavity, the plurality of semi-spherical protrusions will embed into the plurality of semi-spherical recesses.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0011] FIG. 1 is a schematic view showing a prior art PVD reactor.

[0012] FIG. 2 is a schematic view showing the alignment operation of the upper cover to the cavity in the prior art.

[0013] FIG. 3 is a perspective schematic view showing that the upper cover is opened in the present invention.

[0014] FIG. 4 is a lateral and partial cross sectional schematic view showing the state that the upper cover is opened in the present invention.

[0015] FIG. 5 is a lateral and partial cross sectional schematic view showing the state that the upper cover is closed in the present invention.

[0016] FIG. 6 is an enlarged schematic view showing the auto alignment operation in the present invention.

DETAILED DESCRIPTION OF THE INVENTION

[0017] In order that those skilled in the art can further understand the present invention, a description will be provided in the following in details. However, these descriptions and the appended drawings are only used to cause those skilled in the art to understand the objects, features, and characteristics of the present invention, but not to be used to confine the scope and spirit of the present invention defined in the appended claims.

[0018] With reference to FIGS. 3 to 6, the structure of the present invention is illustrated. The present invention includes the following elements.

[0019] A cavity 20 has a first contact surface 21. An interior of the cavity 20 has a metal isolation plate 22 for preventing metal atoms to sputter to metal inner wall of the cavity 20 in sputtering process.

[0020] An upper cover 30 is pivotally installed to the cavity 20 by using a pivotal shaft 31 so that the upper cover 30 is openable and coverable with respect to the cavity 20. The upper cover 30 has a second contact surface 32 which is positioned corresponding to the first contact surface 21 of the cavity 20. The upper cover 30 serves to be combined with a target 33.

[0021] A plurality of positioning groove units 40 are combined in the first contact surface 21 of the cavity 20. Each positioning groove unit 40 has a semi-spherical recess 41.

[0022] A plurality of positioning blocks 50 are combined to the second contact surface 32 of the upper cover 30. Each positioning block 50 has a semi-spherical protrusion 51. When the upper cover 30 covers upon the cavity 20, the plurality of semi-spherical protrusions 51 will embed into the plurality of semi-spherical recesses 41.

[0023] With reference to FIG. 6, it is illustrated that an opening of each semi-spherical recess 41 is formed with a large cambered guide angle 42 for guiding a respective semi-spherical protrusion 51 to embed thereinto.

[0024] In this embodiment, there are three positioning groove units 40 and three positioning blocks 50. The three positioning groove units 40 are at three corners of the first contact surface 21 and the three positioning blocks 50 are at three corners of the second contact surface 32 at positions corresponding to those of the positioning groove units 40.

[0025] However, in another case, there are two positioning groove units 40 and two positioning blocks 50. The two positioning groove units 40 are at two corners of the first contact surface 21 and the two positioning blocks 50 are at two corners of the second contact surface 32 at positions corresponding to those of the positioning groove units 40.

[0026] In a further case, there are four positioning groove units 40 and four positioning blocks 50. The four positioning groove units 40 are at four corners of the first contact surface 21 and the four positioning blocks 50 are at four corners of the second contact surface 32 at positions corresponding to those of the positioning groove units 40.

[0027] The present invention provides an auto aligning structure for combining an upper cover 30 to the cavity 20 in a physical vapor deposition reactor. When the upper cover 30 covers upon the cavity 20, by contact of the first contact surface 21 of the cavity 20 with the second contact surface 32 of the upper cover 30, the plurality of positioning blocks 50 can be embedded into the plurality of positioning groove units 40 precisely. The process of alignment becomes easily so that the time and labor hour is greatly reduced. Furthermore through many times of opening and covering of the upper cover 30, a reliable gap is still existed between the target 33 and the isolation plate 22.

[0028] The present invention is thus described, it will be obvious that the same may be varied in many ways. Such variations are not to be regarded as a departure from the spirit and scope of the present invention, and all such modifications as would be obvious to one skilled in the art are intended to be included within the scope of the following claims.