VACUUM VALVE WITH A WIRELESS ASSEMBLY

Abstract

Disclosed is a valve for regulating a volume or mass flow and/or for closing and opening a valve opening, having a valve seat, a valve closure and a drive unit which is coupled to the valve closure and is set up to provide a movement of the valve closure in such a way that the valve closure can be adjusted from an open position to a closed position and back. The vacuum valve includes a radio arrangement having at least one coupling element and a memory element, and information relating to a valve state can be provided by means of the memory element.

Claims

1. A vacuum valve for regulating a volume or mass flow and/or for closing and opening a valve opening, comprising a valve seat having the valve opening defining an opening axis and a first sealing surface surrounding the valve opening, a valve closure, in particular a valve disk, for regulating the volume or mass flow and/or for substantially gas-tight closure of the valve opening with a second sealing surface corresponding to the first sealing surface, and a drive unit coupled to the valve closure and adapted to provide movement of the valve closure such that the valve closure is adjustable from an open position, in which the valve closure at least partially releases the valve opening to a closing position in which there is sealing contact of the first sealing surface and the second sealing surface with a sealing material present therebetween and the valve opening is thereby closed in a gas-tight manner, and back again, wherein the vacuum valve comprises a radio arrangement having at least one coupling element and a memory element, and information relating to a valve state can be provided by means of the memory element.

2. The vacuum valve according to claim 1, wherein the radio arrangement is designed as an RFID transponder or NFC transponder.

3. The vacuum valve according to claim 1, wherein the radio arrangement is arranged on the valve closure or is integrated in the valve closure.

4. The vacuum valve according to claim 1, wherein the valve closure, the valve seat, a valve housing and/or the drive unit has a transmission window which is designed to provide, in particular bidirectional, wireless communication of the radio arrangement through the transmission window.

5. The vacuum valve according to claim 1, wherein the vacuum valve has a communication arrangement designed to establish a coupling with the coupling element of the radio arrangement, which communication arrangement is arranged and designed in such a manner that at least in the open position and/or the closed position a wireless communication can be provided between the communication arrangement and the coupling element, in particular wherein the communication arrangement comprises at least one antenna.

6. The vacuum valve according to claim 1, wherein the communication arrangement is arranged on the valve seat, on the drive unit or on a valve housing, or is integrated into the valve seat, the drive unit or the valve housing.

7. The vacuum valve according to claim 1, wherein the vacuum valve has a read/write arrangement or an interface for communication with a read/write arrangement, wherein the read/write arrangement is configured such that communication can be provided between the read/write arrangement and the memory element.

8. The vacuum valve according to claim 4, wherein the communication comprises reading out the information regarding the valve state from the memory element and/or storing the information regarding the valve state in the memory element.

9. The vacuum valve according to claim 1, wherein the information relating to the valve state comprises at least one of the following: a condition and/or a state of the valve closure, a condition and/or a state of the sealing material, a vacuum valve operating time, a period of use of the valve closure, a number of closing and/or opening cycles performed, identification information, in particular a valve closure type or part and/or serial number of the valve closure, production information, in particular the date and/or place of production, a calibration parameter.

10. The vacuum valve according to claim 1, wherein the vacuum valve comprises a control and processing unit with a control functionality and a monitoring functionality, wherein the control functionality is arranged to control the movement of the valve closure, and the monitoring functionality is configured such that, when it is executed, the information relating to the valve state is acquired and compared with a setpoint and an output dependent on the comparison is generated.

11. The vacuum valve according to claim 10, wherein the monitoring functionality is configured such that depending on the output, the control functionality is adaptable, in particular the control of the movement of the valve closure is adaptable or the movement of the valve closure is adapted, restricted or suspended.

12. The vacuum valve according to claim 10, wherein the monitoring functionality is configured in such a way that, depending on the output, information relating to an opening or closing state of the vacuum valve can be provided.

13. The vacuum valve according to claim 10, wherein the monitoring functionality is configured such that, depending on the output, information relating to maintenance of at least one valve component can be provided.

14. The vacuum valve according to claim 10, wherein the control and processing unit comprises a memory functionality configured such that, when executed, the information relating to the valve state is stored or updated on the memory element.

15. A valve closure, for a vacuum valve, wherein the valve closure is designed to regulate a volume or mass flow and/or to close and open in a gas-tight manner a valve opening defined by a valve seat of the vacuum valve by means of interaction with the valve opening, and comprises a second sealing surface corresponding to a first sealing surface of the valve seat surrounding the valve opening, and a sealing material arranged on the second sealing surface, in particular vulcanized thereon, wherein the valve closure has a radio arrangement, in particular an RFID transponder, having at least one coupling element and a memory element, and the memory element provides information relating to a valve state.

16. The valve closure according to claim 15, wherein the memory element provides information relating to the valve closure as a valve state, in particular at least one of the following information: a condition and/or a state of the valve closure, a condition and/or a state of the sealing material, identification information, in particular a valve closure type or a part and/or serial number of the valve closure, production information, in particular the date and/or place of production, a calibration parameter.

17. A method for controlling a vacuum valve according to claim 1, comprising reading out the information relating to the valve state from the memory element of the radio arrangement, comparing the information regarding the valve state with a target state for the vacuum valve, generating output based on the comparison, processing the output and defining or updating a movement profile for the valve closure.

18. A computer program product having program code stored on a non-transitory machine-readable medium, comprising: code to perform the steps of the method according to claim 17.

Description

[0106] The figures show in detail:

[0107] FIGS. 1a-c show a first embodiment of a valve according to the invention with RFID transponder;

[0108] FIGS. 2a-b show a further embodiment of a valve according to the invention as a pendulum valve;

[0109] FIGS. 3a-b show a further embodiment of a valve according to the invention as a monovalve;

[0110] FIG. 4 shows an embodiment of an RFID arrangement of a valve according to the invention; and

[0111] FIG. 5 shows another embodiment of an RFID arrangement of a valve according to the invention.

[0112] FIGS. 1a-1c show an embodiment of a valve 1 according to the invention, which is designed as a vacuum transfer valve 1, shown in different closing positions.

[0113] The vacuum valve 1 has a rectangular, plate-shaped valve closure 4 (valve disk), which has a sealing surface 6 (second sealing surface) for the gas-tight closure of an opening 2. The opening 2 has a cross-section corresponding to the valve closure 4 and is formed in a wall 12. The wall 12 may, for example, be the wall of a vacuum process chamber. The opening 2 is surrounded by a valve seat, which in turn also provides a sealing surface 3 (first sealing surface) corresponding to the sealing surface 6 of the valve closure 4. The sealing surface 6 of the valve closure 4 surrounds the valve closure 4 and comprises a sealing material (seal). In a closed position S (FIG. 1c), the seal is compressed between the sealing surfaces 6 and 3.

[0114] The opening 2 connects a first gas region L, which is located to the left of the wall 12, to a second gas region R to the right of the wall 12. The wall 12 is formed, for example, by a chamber wall of a vacuum chamber. The vacuum valve 1 is then formed by an interaction of the chamber wall 12 with the valve closure 4.

[0115] It will be understood that the valve seat together with the first sealing surface 3 may alternatively be formed as a valve component structurally fixed to the valve 1 and may for example be arranged, for example screwed, to a chamber opening.

[0116] The valve closure 4 may, as shown here, be arranged on an adjustment arm 5, which is here for example rod-shaped, and extends along a geometrical adjustment axis V. The adjustment arm 5 is mechanically coupled to a drive unit 7, by means of which the closure member 4 can be adjusted in the first gas region L to the left of the wall 12 by adjusting the adjustment arm 5 by means of the drive unit 7 between an open position O (FIG. 1a) via an intermediate position Z (FIG. 1b) into a closed position S (FIG. 1c).

[0117] In the open position O, the valve closure 4 is outside a projection area of the opening 2, fully exposing it, as shown in FIG. 1a.

[0118] By linearly moving the valve closure 4 in an axial direction in a plane parallel to or coaxial with the adjustment axis V and parallel to the wall 12, the valve closure 4 can be moved from the open position O to the intermediate position Z by means of the drive unit 7.

[0119] In this intermediate position Z (FIG. 1b), the sealing surface 6 of the valve closure 4 is at a distance opposite the sealing surface 3 of the valve seat surrounding the opening 2.

[0120] By adjusting in the direction of the opening axis A defined by the opening 2 (here: transverse to the adjustment axis V), i.e. e.g. perpendicular to the wall 12 and the valve seat, the valve closure 4 can be adjusted from the intermediate position Z to the closed position S (FIG. 1c).

[0121] In the closed position S, the valve disk 4 closes the opening 2 in a gas-tight manner and separates the first gas region L from the second gas region R in a gas-tight manner.

[0122] The vacuum valve is opened and closed by means of the drive unit 7, in this case by an L-shaped movement in two directions H and A of the valve closure 4, which are perpendicular to each other, for example. The valve shown is therefore also called an L-type valve.

[0123] A transfer valve 1 as shown is typically provided for sealing a process volume (vacuum chamber) and for loading and unloading the volume. Frequent changes between the open position O and the closed position S are the rule in such an application. This can lead to increased wear of the sealing surfaces 6 and 3, the interposed seal and the mechanically moved components.

[0124] The vacuum valve 1 further comprises a radio arrangement 10 comprising a coupling element, for example an antenna, and a memory element. The radio arrangement 10 is arranged on the valve closure 4. On the memory element, for example, information may be stored which allows identification of an embodiment (type) of the valve closure 4 and/or allow a position to be determined.

[0125] In particular, the radio arrangement 10 may be in the form of an RFID transponder (RFID tag).

[0126] Furthermore, the valve 1 has a communication arrangement cooperating with the radio arrangement 10 here in the form of an antenna 11. The antenna 11 is here arranged on the drive unit 7. The antenna 11 is also coupled to a read/write unit. The read/write unit may also be arranged on the side of the valve 1 or may alternatively be designed separately therefrom, in particular as part of a control unit. In particular, the antenna 11 may form a single unit with the read/write unit. The coupling of the antenna 11 with the read/write unit can be implemented, for example, by cable or inductively.

[0127] The radio arrangement 10 and the antenna 11 are arranged and designed in such a way that, at least in the open position O, information transmission or communication between the radio arrangement 10 and the antenna 11 can be carried out. In the open position O, there is a constructionally minimal distance between the radio arrangement 10 and the antenna 11, whereby communication is best possible in this position.

[0128] In particular, the radio arrangement 10 and the antenna 11 (or the downstream read/write unit) can be designed in such a way that, due to the transmission and reception ranges of these components, this is only possible in the open position O. In this embodiment, it is advantageous that interactions with the communication radiation used for this purpose can be avoided.

[0129] In one embodiment, the read/write unit can be triggered to attempt to establish a connection with the transponder 10 only when the open position O is reached or close to the open position O. A corresponding signal to activate the read/write unit can be triggered, for example, by the drive unit 7, for example by triggering a limit switch when the open position O is reached.

[0130] The communication between the radio arrangement 10 and the read/write unit can, for example, confirm that the open position O has been reached. In addition, by reading a type identification, it can be verified whether a valve closure suitable for the valve 1 is mounted. In a case where, for example, it cannot be confirmed that the valve disk 4 has reached the correct open position or that the appropriate disk 4 is mounted, an appropriate signal can be generated and output. Based on the signal, a user can be warned or the control system (control and processing unit) can be caused to adjust its functionality. In particular, in the event of a corresponding warning signal, the control unit can prevent further operation of the drive unit in order to avoid potential damage to the valve 1 in the event of further operation.

[0131] In one embodiment, the memory of the radio arrangement 10 can contain calibration data determined in the course of a preliminary calibration of the valve closure 4 on a similar valve 1 for precisely this valve closure 4, i.e. data relating, for example, to a specific target positioning and/or relating to a specific contact pressure for providing a desired seal. This data can be read out, for example after a replacement of the valve disk 4, and can be adopted and/or further processed by a control and processing unit controlling the drive 7 of the valve 1. For example, the closing movement can thus be individually adapted and thus optimized for the valve closure 4 installed in each case.

[0132] Alternatively or additionally, information may be stored on the radio arrangement 10 by the read/write unit. For example, continuously at each operating cycle, a current number of closing operations already performed with the mounted valve disk 4 can be updated on the memory. Thus, in case of a planned maintenance of the valve disk 4, an actual operating time for the disk 4 can be read out and the maintenance work can be adapted to the operating time. For example, depending on this, a decision can be made as to whether a complete replacement of the disk 4 is required or whether a replacement of the seal (at the sealing surface 6) appears to be sufficient.

[0133] In another variant, the RFID tag 10 of the valve disk 4 may include programming data embodying programming of a valve-side control and processing unit. In other words, the tag 10 may provide firmware or an update of firmware configured to operate the valve. This provided programming may be read via the antenna 11 and further processed such that the programming is stored (installed) as current control and provided and/or executed for operation of the valve on the valve-side control and processing unit.

[0134] FIG. 2a and FIG. 2b schematically show a further possible embodiment of the vacuum valve according to the invention in the form of a pendulum valve 20. The valve 20 is designed in particular for regulating a mass flow and comprises a valve housing which has an opening 22. The opening 22 has here, for example, a circular cross-section. The opening 22 is enclosed by a valve seat. This valve seat is formed by a (first) sealing surface 23 which faces axially in the direction of a valve disk 24 (valve closure), extends transversely with respect to the opening axis A and has the shape of a circular ring, and is formed in the valve housing. The valve disk 24 is pivotable about a rotation axis R and adjustable substantially parallel to the opening axis A. In a closed position S (FIG. 2b) of the valve disk 24 (valve closure), the opening 22 is closed in a gas-tight manner by means of the valve disk 24, which has a second sealing surface 26 with sealing material. An open position of the valve disk 24 is illustrated in FIG. 2a.

[0135] The valve disk 24 is connected to a drive unit 27 via an adjustment element 25 (arm) arranged laterally on the disk and extending perpendicularly to the opening axis A. This arm 25 is located in the closed position of the valve disk 24 outside the opening cross-section of the opening 22 geometrically projected along the opening axis A.

[0136] The drive 27 is designed by using a motor and a corresponding gear in such a way that the valve disk 24as is usual in a pendulum valvecan be pivoted between an open position and an intermediate position by means of a transverse movement x of the drive 27 transversely to the opening axis A and essentially parallel across the cross-section of the opening 22 and perpendicular to the opening axis A in the form of a pivoting movement about the pivot axis R and can be displaced linearly by means of a longitudinal movement of the drive 27 parallel to the opening axis A. In the open position, the valve disk 24 is positioned in a dwell section arranged laterally adjacent to the opening 222 so that the opening 22 and the flow path are unobstructed. In the intermediate position, the valve disk 24 is positioned spaced above the opening 22 and covers the opening cross-section of the opening 22. In the closed position S, the opening 22 is closed in a gas-tight manner and the flow path is interrupted by a gas-tight contact between the sealing surface 26 of the valve closure 24 (valve disk) and the sealing surface 23 of the valve seat by means of a sealing material.

[0137] To enable automated and regulated opening and closing of the valve 20, the valve 20 provides, for example, an electronic regulation and control unit (control and processing unit) (not shown), which is designed and connected to the drive 27 in such a way that the valve disk 24 can be adjusted accordingly to close off a process volume or to regulate an internal pressure of this volume.

[0138] In the present exemplary embodiment, the drive 27 is designed as an electric motor, wherein the transmission is switchable in such a way that driving the drive 27 causes either the transverse movement x or the longitudinal movement. The drive together with the gear is controlled electronically by the control system. Such gears, in particular with gate-type gear shift, are known from the prior art. Furthermore, it is possible to use several drives to effect the rotational movement and the linear movement, wherein the control unit takes over the control of the drives.

[0139] Precise regulation or adjustment of the flow with the described pendulum valve 20 is possible not only by pivoting adjustment of the valve disk 24 between the open position O and the intermediate position by means of the transverse movement, but above all by linear adjustment of the valve disk 24 along the opening axis A or P between the intermediate position and the closed position S by means of the longitudinal movement. The described pendulum valve can be used for precise regulation tasks.

[0140] Both the valve disk 24 and the valve seat each have a sealing surfacea first and a second sealing surface 23 and 26. The second sealing surface 26 of the valve disk 24 also has the seal 28. This seal 28 may, for example, be vulcanized onto the valve disk 24 as a polymer by means of vulcanization. Alternatively, the seal 28 may be in the form of an O-ring in a groove of the valve seat, for example. Also, a sealing material may be bonded to the valve disk 24 or the valve seat, thereby embodying the seal 28. In an alternative embodiment, the seal 28 may be arranged on the side of the valve seat, in particular on the first sealing surface 23. Combinations of these embodiments are also conceivable. Such seals 28 are of course not limited to the valve 20 described in the example, but are also applicable to the further valve embodiments described.

[0141] For example, the valve disk 24 is variably adjusted based on control variables and an output control signal. For example, information about a current pressure condition in a process volume connected to the valve 20 is received as an input signal. In addition, a further input variable, for example a mass inflow into the volume, may be provided to the controller. Based on these variables and based on a predetermined target pressure to be set or achieved for the volume, a controlled adjustment of the valve 20 is then performed over the time of a control cycle, so that a mass outflow from the volume can be controlled over time by means of the valve 20. For this purpose, a vacuum pump may be provided downstream of the valve 20, i.e. the valve 20 is arranged between the process chamber and the pump. Thus, a desired pressure curve can be adjusted.

[0142] By adjusting the valve closure 24, a respective opening cross-section for the valve opening 22 is set and thus the possible gas quantity which can be evacuated from the process volume per unit of time is set. For this purpose, the valve closure 24 can have a shape deviating from a circular shape, in particular in order to achieve the most laminar media flow possible.

[0143] The valve 20 also includes two RFID transponders 10 and 10 forming a respective radio arrangement. A first of the RFID transponders 10 is arranged on the valve disk 24 in the region of the second sealing surface 26. A second of the RFID transponders 10 is arranged on the adjustment arm 25. In the embodiment shown, the RFID transponders 10 and 10 are integrated into the respective components.

[0144] Accordingly, the valve 20 comprises two communication arrangements 11 and 11. A first of the communication arrangements 11 is arranged on the valve seat in the region of the first sealing surface 23. A second of the communication arrangements 11 is arranged on the valve housing. In the embodiment shown, the communication arrangements 11 and 11 are integrated into the respective components. The communication arrangements 11 and 11 each comprise an antenna, a read/write unit and optionally an integrated power source or a connection to a power supply.

[0145] The RFID transponder 10 and the communication arrangement 11 are designed and arranged to enable corresponding communication in the intermediate position and/or in the closed position S. In contrast, an exchange of information is not possible in the open position O. The components are thus coordinated with each other with a small range. With this combination of RFID transponder 10 and communication arrangement 11, it is possible, for example, to determine whether the valve disk 24 is in the closed position S and to generate a corresponding feedback.

[0146] The RFID transponder 10 and the communication arrangement 11 are constructed and arranged in such a way that a counterposition of these components is only present in the open position O and a corresponding communication is only possible in the open position O. The communication arrangement 11 is arranged in such a way that it is covered by the arm 25 in FIG. 2a. This combination also makes it possible to determine when a certain position (open position O) has been reached. In addition, closing and opening cycles of the valve 20 are counted and a corresponding number is continuously stored directly on the RFID transponder 10 (RFID tag).

[0147] With such an arrangement, for example, a respective reaching of an end position with respect to a pivoting of the valve disk 24 about the axis of rotation P can be determined. A signal that can be generated accordingly can then be further processed in connection with the control of the drive 27 and thus, for example, a continuous calibration of the drive 27 can take place.

[0148] The transponder 10 may alternatively or additionally contain identification information. Here, for example, a disk type or a part and/or serial number of the valve disk 24 may be stored. The same also applies to the transponder 10 with respect to information about the adjustment arm 25.

[0149] In particular, the transponder 10 may further provide information about a condition and/or a state of the valve closure 24 and/or the sealing material 28 present. Here, for example, geometric information describing a size of the valve disk 24, such as a thickness of the disk 24, may be stored and a sealing material used may be designated. After this information has been read out, the control of the valve 20 can be adapted on the basis of this information in such a way that a desired contact pressure is generated when the valve 20 closes.

[0150] Alternatively or additionally, at least one of the RFID transponders 10 and 10 can provide manufacturing information, in particular a production date and/or a production location. In this way, in the event of a malfunction, it can be determined quickly, reliably and efficiently where and under what conditions the component in question was manufactured. Troubleshooting in the production process is thus significantly simplified.

[0151] FIGS. 3a and 3b schematically show a further embodiment of a vacuum valve 30 according to the invention. In the example, the valve 30 is designed as a so-called monovalve and shown in cross-section in an open position O (FIG. 3a) and a closed position S (FIG. 3b).

[0152] The valve 30 for closing a flow path in a gas-tight manner by means of a linear movement comprises a valve housing 39 with an opening 32 for the flow path, wherein the opening 32 has a geometric opening axis A along the flow path. The opening 32 connects a first gas region L, which in the drawing is located to the left of the valve 30 or a partition (not shown), to a second gas region R to the right thereof. Such a partition wall is formed, for example, by a chamber wall of a vacuum chamber.

[0153] The closure element 34 (valve disk) is linearly displaceable along a geometrical adjustment axis V extending transversely to the opening axis H in a closure element plane from an open position O uncovering the opening 32 into a closed position S linearly pushed over the opening 32 in a closing direction and vice versa back into an opening direction by means of a drive unit 37 with a movable adjusting element 35, in the example an adjustment arm.

[0154] For example, a (curved) first sealing surface 33 surrounds the opening 32 of the valve housing 39 along a first section 33a in a first plane 38a and along a second section 33b in a second plane 38b. The first plane 38a and the second plane 38b are spaced apart, extend parallel to each other and parallel to the closure element plane. Thus, the first section 33a and the opposing second section 33b have a geometric offset with respect to each other transversely to the adjustment axis V and in the direction of the opening axis A. The opening 32 is arranged between the two opposing sections 33a and 33b in the region extending along the adjustment axis V.

[0155] The closure element 34 comprises a second sealing surface 36 corresponding to the first sealing surface 33 and extends along sections corresponding to the first and second sections 33a, 33b.

[0156] In the example shown, a seal-forming material is provided on the first sealing surface 33 of the valve seat. Alternatively or additionally, the seal may be disposed on the second sealing surface 36 of the valve closure.

[0157] The seal may, for example, be vulcanized onto the valve seat as a polymer by means of vulcanization. Alternatively, the seal may be, for example, an O-ring in a groove of the valve seat. Also, a sealing material may be bonded to the valve seat and thereby embody the seal. Such seals are of course not limited to the valve 1 described in the example, but are also applicable to the further valve embodiments described.

[0158] Monovalves, i.e. vacuum valves that can be closed by means of a single linear movement, for example, have the advantage of a comparatively simple closing mechanism, e.g. compared with transfer valves that can be closed by means of two movements, which require a drive designed in a relatively complex manner. Moreover, since the closing element can be formed in one piece, it can be subjected to high acceleration forces, so that this valve can also be used for quick and emergency closures. Closing and sealing can be performed by means of a single linear movement, so that very fast closing and opening of the valve 30 is possible.

[0159] In particular, an advantage of monovalves is, for example, that the seal is not subject to any transverse load in the transverse direction to the longitudinal extension of the seal due to its course during closing. On the other hand, due to its transverse extension with respect to the opening axis A, the seal is hardly able to absorb forces occurring on the closure element 34 along the opening axis H, which can act on the closure element 34 in particular in the case of a large differential pressure, which requires a robust design of the closure element 34, its drive and its bearing.

[0160] The vacuum valve 30 further comprises a bellows 31. The bellows 31 is connected on the one hand to the valve closure 34 and on the other hand to the valve housing 39. This can provide atmospheric separation of the drive unit 37 and the adjustment arm 35 from a process volume. In the open valve state (FIG. 3a) the bellows is compressed, in the closed valve state 30 (FIG. 3b) the bellows is expanded.

[0161] In accordance with the invention, the vacuum valve 30 shown in FIGS. 3a and 3b comprises a radio arrangement 10 and a communication arrangement 11 cooperating with the radio arrangement 10. The two arrangements are capable of being moved closer and further away from each other along a direct axis by means of the drive unit 37.

[0162] This constellation may make a distance determination between the radio arrangement 10 and the communication arrangement 11 accessible. The distance determination may be performed, for example, by means of a measurement of the signal strength or by means of a superposition of the normal radio signal of the communication arrangement 11 with an additional localization signal.

[0163] In the latter case, the localization signal can be designed in such a way that it is repeated periodically. The signal is selected to be so weak that it remains undetected by the RFID transponder. As a result, a response of the tag to the actual radio signal remains unaffected, so the read-out data is transmitted as usual. Nevertheless, the RFID tag reflects back parts of the localization signal. By specifically adding up the time-recurring signals, the reflected response in the reader can be reliably distinguished from random noise, and thus the propagation time of the signal and thus also the distance can be calculated.

[0164] The distance determination, in turn, may provide the control and processing unit with positional information for the valve closure 34, and thus corresponding control feedback. In addition, the radio arrangement 10 may include identification information for the valve disk 34 and the communication arrangement 11 may be configured to read this information.

[0165] FIG. 4 shows a radio arrangement 10 and a communication arrangement 11 of a valve according to the invention.

[0166] The radio arrangement 10 is designed as an RFID transponder (RFID tag) and comprises a coupling element 42 and a memory element 41. The coupling element 42 may, for example, be designed in the form of an antenna. The communication arrangement 11 also has a coupling element, in this case in the form of an antenna 43, and a read/write arrangement 44. According to another embodiment not shown, the communication arrangement 11 may have only an antenna 43 or be designed as an antenna.

[0167] In particular, the RFID tag 10 also includes a microchip that provides data management for the memory element 41.

[0168] As shown, the coupling element 42 of the RFID tag 10 and the antenna 43 of the communication arrangement 11 are in a coupled communication state, i.e. the two components are coupled and information is exchanged. The coupling is realized by means of an (electro)magnetic field. In particular, the coupling can be established when the distance between the two coupling elements falls below a certain minimum distance. Such a minimum distance depends, for example, on a signal strength that can be generated and/or on a transmission frequency used.

[0169] FIG. 5 shows a further embodiment of a radio arrangement 10 and a communication arrangement 11 of a vacuum valve according to the invention. In contrast to the embodiment according to FIG. 4, the communication arrangement 11 here has, in addition to the antenna 43, a circuit 44 designed for internal coupling with the antenna 43 and a reading chip 45. The circuit 44 and the reading chip 45 thus form a reading unit for reading the tag 10. In addition, a microprocessor 46 is provided for controlling and data processing with the reading unit.

[0170] It is understood that these figures shown are only schematic of possible exemplary embodiments. The various approaches can also be combined with each other and with prior art devices and methods.