ACTUATOR-SENSOR SYSTEM AND FAST STEERING MIRROR (FSM) HAVING AN ACTUATOR-SENSOR SYSTEM OF THIS TYPE

Abstract

An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (9), with an actuator (5) for mechanically moving a deflecting element (10) and with a measuring element (2) for sensing the position of the deflecting element (10), where the measuring element (2) includes a flat substrate (3) having at least one sensor element (4). Furthermore, the present disclosure relates to a fast steering mirror (FSM).

Claims

1. An actuator-sensor system for controlled diverting or deflecting of electromagnetic radiation in at least one axis (9), with an actuator (5) for mechanically moving a deflecting element (10), comprising: a measuring element (2) for sensing the position of the deflecting element (10), wherein the measuring element (2) includes a flat substrate (3) having at least one sensor element (4).

2. The actuator-sensor system according to claim 1, wherein the deflecting element (10) is arranged on a movable element (8) or is designed as part of the movable element (8) and in that the measuring element (2) is arranged in a waistline (20) of the movable element (8).

3. The actuator-sensor system according to claim 2, wherein the movable element (8) is formed from two parts.

4. The actuator-sensor system according to claim 1, wherein the substrate (3) comprises two or more sensor elements (4, 4), and/or in that the substrate (3) consists of ceramic or a printed circuit board material.

5. The actuator-sensor system according to claim 4, wherein the substrate (3) is designed in one layer or in multiple layers, consisting of two or more layers.

6. The actuator-sensor system according to claim 1, wherein the sensor element (4) is designed either as a flat coil of an inductive sensor or an eddy current sensor or as an electrode of a capacitive sensor.

7. The actuator-sensor system according to claim 1, wherein the sensor element (4) is formed on a surface of the substrate (3).

8. The actuator-sensor system according to claim 4 wherein at least two sensor elements (4, 4) are provided in a differential arrangement, and/or in that at least two sensor elements (4, 4) are provided to record at leas movements, preferably independent of each other.

9. The actuator-sensor system according to claim 1, wherein the substrate (3) comprises electronics for the control of the at least one sensor element, and/or wherein the substrate (3) comprises a flexible conductor connection.

10. The actuator-sensor system according to claim 1, wherein the measuring element (2) comprises a connector to contact the at least one sensor element, wherein the connection is a plug arranged on the substrate (3) or solder points (17) arranged on the substrate (3) or a flexible conductor track integrated into the substrate (3).

11. The actuator-sensor system according to claim 1, wherein two axes (9) are provided which are rotated substantially by 90? to one another, and/or wherein the measuring element (2) comprises three sensor elements (4, 4, 4) rotated by 120? to each other.

12. The actuator-sensor system according to claim 1, wherein the measuring element (2) comprises four sensor elements (4, 4, 4, 4) rotated by 90? to each other.

13. The actuator-sensor system according to claim 1, wherein the measuring element (2) comprises an integrated temperature sensor (15).

14. A fast steering mirror (FSM) with an actuator-sensor system according to claim 1.

15. A fast steering mirror (FSM) according to claim 4, wherein the FSM contains a deflecting element for diverting or deflecting electromagnetic radiation, in particular optical signals, light signals in the visible range, infrared signals, UV signals or signals in the EUV range, images, laser beams, etc.

16. The actuator-sensor system according to claim 10, wherein the measuring element (2) comprises a single connector to contact the at least one sensor element (4).

Description

[0035] There are then various options for advantageously designing and refining the teaching of the present disclosure. For this purpose, reference is made on the one hand to the claims subordinate to claim 1 and on the other hand to the following explanation of exemplary embodiments of the present disclosure with reference to the drawing. In conjunction with the explanation of the exemplary embodiments of the present disclosure with reference to the drawing, designs and refinements of the teaching are also explained. The figures show:

[0036] FIG. 1 a schematic view of an embodiment of an FSM according to the present disclosure with a measuring element in the form of a flat substrate,

[0037] FIG. 2 a schematic view of a measuring element in the form of a flat substrate with two sensor elements in the form of a coil,

[0038] FIG. 3 a schematic view of a measuring element in the form of a flat substrate with two sensor elements which are designed as electrodes of capacitive sensors,

[0039] FIG. 4 a schematic view of a measuring element with four sensor elements in the form of coils,

[0040] FIG. 5 schematic views of two exemplary embodiments of measuring elements, each with four sensor elements in a differential arrangement,

[0041] FIG. 6 a schematic view of a measuring element with three sensor elements for detecting movements about two axes,

[0042] FIG. 7 a schematic view of a measuring element with additional temperature sensors in the form of meandering conductor loops,

[0043] FIG. 8 a schematic view a measuring element with electronic components in the form of an electronic circuit,

[0044] FIG. 9 in a schematic view of an embodiment of an FSM for the deflection of optical signals in two axes, comprising a measuring element with four sensor elements,

[0045] FIG. 10 a schematic sectional view of an exemplary embodiment of an actuator-sensor system, and

[0046] FIG. 11 a schematic exploded view of the actuator-sensor system according to FIG. 10.

[0047] FIG. 1 shows a fast steering mirror, abbreviated FSM 1, with a measuring element 2 in the form of a flat substrate 3. The figure shows the differential arrangement with two sensor elements 4, 4. The FSM contains two actuators 5, 5 in the form of coils 6, 6, which can move a moving element 8 in an axis 9 via magnets 7, 7. A deflecting element 10 is attached to the movable element 8, here in the form of a reflective coating. The movable element 8 is movably mounted via a fixed bearing in the form of a bending beam 11.

[0048] FIG. 2 shows a measuring element 2 in the form of a flat substrate 3 with two sensor elements 4, 4 in the form of a coil. The coil can be arranged either as a single-layer coil on the substrate or as a multi-layer coil in the layers of the substrate.

[0049] FIG. 3 shows a measuring element 2 in the form of a flat substrate 3 with two sensor elements 4, 4, which are formed as electrodes 12, 12 of capacitive sensors.

[0050] FIG. 4 shows a measuring element 2 with a total of four sensor elements 4, 4, 4, 4 in the form of coils. Two sensor elements are arranged opposite each other, so that the movement around two axes (which are offset by 90? to each other) can be measured. There is a passage 13 in the center of the measuring element, through which the movable element which serves as a holder for the deflecting element can be stored centrally (not shown).

[0051] FIG. 5 shows a measuring element 2 with three sensor elements 4, 4, 4 for the detection of movements around two axes. The sensor elements are arranged at 120? to each other. A mathematical function is required to record the movement around the two axes, which includes not only of the difference between two sensor signals.

[0052] FIG. 6 shows two examples of measuring elements 2, 2, each with four sensor elements in a differential arrangement and each with a passage 13, 13 in the center. Measuring elements 2, 2 have recesses 14, 14. These serve to enable the actuators (coil or magnet) to be brought closer to the movable element 8 in each case. This improves the power flow and reduces the design.

[0053] FIG. 7 shows a measuring element 2 with additional temperature sensors 15, 15, 15, 15 in the form of meandering conductor loops. The temperature can be measured via the ohmic resistance of the conductor loops.

[0054] FIG. 8 shows a measuring element 2 which additionally contains electronic components 16 in the form of an electronic circuit. This circuit can be used for signal preprocessing, or it can already contain the complete evaluation circuit, or also the control electronics for the actuators. The circuit is contacted via soldering pads 17. Alternatively, a flexible conductor could already be integrated into the substrate (not shown).

[0055] FIG. 9 shows a FSM 1 for the redirection of optical signals in two axes with a measuring element 2 with four sensor elements 4, 4 (only two visible), a deflecting element 10 as a flat mirror and four actuators 5, 5, 5 (one 5 not visible behind the other three). Two actuators each work together and can tilt the holder with the flat mirror about two axes. The measuring element has recesses 14, 14, 14 (one not visible), through which the magnets 7, 7, 7 (one 7 not visible behind the other three) of the actuators are immersed in the coils

[0056] FIGS. 10 and 11 show an actuator-sensor system in different representations. The movable element 8 has an upper part 18 and a lower part 19 which are rigidly connected to one anotherfor example by screwing, gluing or another suitable mechanical connection. The measuring element 2 is arranged in the waistline 20 of the movable element 8 and is connected to the housing 22 via a suitable holding structure 21. At the lower part 19 of the moving element 8, the magnets 7, 7 of the actuators 5, 5 are arranged, with the help of which the movable element 8 can be tilted specifically about the axis 9 (indicated by the arrow 9). The tilting of the movable element 8 takes place via a fixed bearing 11 in the form of a bending beam. Sensor elements 4, 4 are arranged in the axis direction above actuators 5, 5. The lower part 19 of the moving element 8 shields the sensor elements 4, 4 from the actuators 5, 5.

[0057] To avoid repetition with regard to further advantageous embodiments of the teaching according to the present disclosure, reference is made to the general part of the description and to the appended claims.

[0058] Finally, it should be expressly noted that the above-described exemplary embodiments of the teaching according to the present disclosure merely serve to discuss the claimed teaching, but do not restrict it to the exemplary embodiments.

LIST OF REFERENCE NUMERALS

[0059] 1 FSM [0060] 2 measuring element [0061] 3 flat substrate [0062] 4, 4, 4, 4 sensor elements [0063] 5, 5 actuators [0064] 6, 6 coils [0065] 7, 7, 7, 7 magnets [0066] 8 movable element [0067] 9 axis [0068] 10 deflecting element [0069] 11 fixed bearing in the form of a bending beam [0070] 12, 12 electrodes [0071] 13 passage [0072] 14, 14, 14 recesses [0073] 15, 15, 15, 15 temperature sensors [0074] 16 electronic components [0075] 17 soldering pads [0076] 18 upper part (movable element) [0077] 19 lower part (movable element) [0078] 20 waistline [0079] 21 holding structure [0080] 22 housing