DEVICE FOR PRODUCING A PLASMA COMPRISING A PLASMA IGNITION UNIT

Abstract

A device for producing a plasma, configured to generate a plasma from a reaction gas, wherein the device for producing a plasma comprises a microwave generator operating at a given source frequency comprised within a microwave frequency range and a waveguide coupled to the microwave generator and configured to guide an excitation wave. The device also includes a dielectric tube extending longitudinally along an axis of extension, the dielectric tube being configured to receive the plasma, such as the dielectric tube passes right through the waveguide; and a reaction gas injection unit configured to introduce the reaction gas into the dielectric tube.

Claims

1. A device for producing a plasma, configured to generate a plasma from a reaction gas, wherein the device for producing a plasma comprises: a microwave generator operating a source wave at a given source frequency comprised within a microwave frequency range; a waveguide coupled to the microwave generator and configured to guide an excitation wave; a dielectric tube extending longitudinally along an axis of extension, the dielectric tube being configured to receive the plasma, such that the dielectric tube passes right through the waveguide; a duct, configured to envelop the dielectric tube so as to hold said dielectric tube in position; and a reaction gas injection unit configured to introduce the reaction gas into the dielectric tube; the device for producing a plasma further comprises a plasma ignition unit comprising: an ignition electrode extending longitudinally along the axis of extension and comprising a proximal body portion and a distal body portion, wherein the distal body portion comprises a securing member; a securing unit made of dielectric material configured to receive the securing member of the ignition electrode; and a moving unit configured to receive the securing unit and to move both said securing unit and the ignition electrode together from a first position in which the ignition electrode is outside the waveguide to a second position in which at least one part of the proximal body portion of the ignition electrode is disposed in the dielectric tube and in the waveguide; wherein the ignition electrode is configured to generate an electric field from the excitation wave and allow ignition of the plasma when said ignition electrode is in the second position; and wherein the ignition electrode has an overall length along the axis of extension which is comprised between 35% and 65% of a source wavelength corresponding to a celerity of the source wave divided by the source frequency.

2. The device for producing a plasma according to claim 1, wherein the overall length of the ignition electrode is comprised between 37% and 50% of the source wavelength.

3. The device for producing a plasma according to claim 1, wherein the ignition electrode has a conformation such as the proximal body portion has a proximal transverse dimension lower than a distal transverse dimension of the distal body portion.

4. The device for producing a plasma according to claim 3, wherein the proximal body portion has a proximal length along the axis of extension and the distal body portion has a distal length along the axis of extension, and wherein the proximal length is greater than or equal to the distal length.

5. The device for producing a plasma according to claim 4, wherein the distal length is greater than or equal to a quarter of the overall length of the ignition electrode, and the proximal length is greater than or equal to half of the overall length of the ignition electrode.

6. The device for producing a plasma according to claim 4, wherein the proximal transverse dimension is constant over at least 90% of the proximal length, and the distal transverse dimension is constant over at least 90% of the distal length.

7. The device for producing a plasma according to claim 1, wherein the moving unit is configured so that in the first position, the ignition electrode is outside the dielectric tube.

8. The device for producing a plasma according to claim 1, wherein the securing unit has a cylindrical shape along the axis of extension and has a given diameter.

9. The device for producing a plasma according to claim 8, wherein a diameter of the securing unit is substantially equal to a distal diameter of the distal body portion of the ignition electrode.

10. The device for producing a plasma according to claim 1, wherein the securing unit has a length, along the axis of extension, substantially equal to or greater than 1.3 D and preferably substantially equal to or greater than 1.5 D, D being an outer diameter of the dielectric tube.

11. The device for producing a plasma according to claim 1, wherein at least one part of the proximal body portion of the ignition electrode is located substantially at a central axis of the waveguide when the ignition electrode is in the second position.

12. The device for producing a plasma according to claim 1, wherein the waveguide is coupled to a reflector plane configured to generate a standing wave from the excitation wave.

13. The device for producing a plasma according to claim 12, wherein the reflector plane is movable.

14. The device for producing a plasma according to claim 12, wherein the reflector plane is located at a distance substantially equal to n?e/2+k?e/2 from at least one part of the ignition electrode when the ignition electrode is in the second position, ?e being the wavelength of the excitation wave guided in the waveguide, n being a natural integer and k being a coefficient comprised between 0.7 and 1.3.

15. The device for producing a plasma according to claim 1, wherein the ignition electrode has a given electrical length such as the proximal body portion of the ignition electrode extends over an electrical length at least equal to an electrical length of the distal body portion of the ignition electrode.

16. The device for producing a plasma according to claim 2, wherein the ignition electrode has a conformation such as the proximal body portion has a proximal transverse dimension lower than a distal transverse dimension of the distal body portion.

17. The device for producing a plasma according to claim 16, wherein the proximal body portion has a proximal length along the axis of extension and the distal body portion has a distal length along the axis of extension, and wherein the proximal length is greater than or equal to the distal length.

18. The device for producing a plasma according to claim 17, wherein the distal length is greater than or equal to a quarter of the overall length of the ignition electrode, and the proximal length is greater than or equal to half of the overall length of the ignition electrode.

19. The device for producing a plasma according to claim 18, wherein the proximal transverse dimension is constant over at least 90% of the proximal length, and the distal transverse dimension is constant over at least 90% of the distal length.

20. The device for producing a plasma according to claim 19, wherein the moving unit is configured so that in the first position, the ignition electrode is outside the dielectric tube.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0091] The present disclosure will be better understood with the aid of the detailed description which is given hereinbelow with regard to the appended drawings in which:

[0092] FIG. 1 represents a schematic view of a plasma producing device, in a position allowing the ignition of the plasma, in accordance with the present disclosure;

[0093] FIG. 2 represents a view of a plasma producing device in a position allowing the ignition of the plasma, in accordance with the present disclosure;

[0094] FIG. 3 represents a view of a plasma producing device in which an ignition device is in a first position; and

[0095] FIG. 4 represents a view of a plasma producing device in which an ignition device is in a second position.

DETAILED DESCRIPTION

[0096] The figures illustrate a device for producing a plasma capable of operating at low pressure, atmospheric pressure or high pressure and configured to generate a plasma from a reaction gas. Within the meaning of the present disclosure, a low pressure is a pressure comprised between one tenth of the atmospheric pressure and the atmospheric pressure. Within the meaning of the present disclosure, a high pressure is a pressure comprised between the atmospheric pressure and five times the atmospheric pressure.

[0097] According to a preferred embodiment, the device for producing a plasma is used at atmospheric pressure.

[0098] The plasma producing device comprises a microwave generator 10 operating at a given source frequency comprised in a microwave frequency range. Within the meaning of the present disclosure, the microwave frequency range comprises all the frequencies between 300 MHz and 30 GHz. According to a preferred embodiment, the frequency of the excitation wave is substantially equal to one of the following frequencies: 896 MHz, 915 MHz and 2.45 GHz.

[0099] The plasma producing device comprises a waveguide 12 coupled to the microwave generator 10 and configured to guide an excitation wave. According to one embodiment, the waveguide 12 comprises two receiving orifices facing each other, the receiving orifices being intended to receive a dielectric tube 14 passing right through said waveguide 12 by the receiving orifices. According to one embodiment, the waveguide 12 comprises an input orifice configured to receive an excitation wave.

[0100] The device also comprises the dielectric tube 14 extending longitudinally along an axis of extension 60 passing through the center of the dielectric tube. The dielectric tube 14 is configured to receive the plasma, such that the dielectric tube 14 passes right through the waveguide 12.

[0101] The device comprises a reaction gas injection unit 31 configured to introduce the reaction gas into the dielectric tube 14.

[0102] The plasma producing device further comprises a plasma ignition unit comprising an ignition electrode 22 made of tungsten extending longitudinally along the axis of extension 60. The ignition electrode 22 comprises a proximal body portion 221 and a distal body portion 222, wherein the distal body portion 222 comprises a securing member 223. The ignition electrode 22 is configured to generate an electric field from the excitation wave and thus allows the ignition of the plasma. According to one embodiment, the proximal body portion 221 extends from the distal body portion 222.

[0103] According to one embodiment, the proximal body portion 221 of ignition electrode 22 has a cross-sectional area lower than the cross-sectional area of the distal body portion 222 of the ignition electrode 22. In other words, the proximal body portion 221 has a proximal transverse dimension, which corresponds to a proximal diameter D21, which is less than a distal transverse dimension D22 of the distal body portion 222, which corresponds to a distal diameter D22.

[0104] Such an arrangement makes it possible to obtain a maximum electric field at the end of the proximal body portion 221 opposite to the distal body portion 222. Indeed, the cross section of the proximal body portion 221 being smaller than the cross-section of the distal body portion 222, this will create a point effect and thus locally concentrate the electric field. Such an arrangement facilitates the ignition of the plasma. Such an arrangement also makes it possible to obtain an ignition electrode 22 with a better mechanical resistance.

[0105] According to one embodiment, the ignition electrode 22 has an overall length L2 along the axis of extension 60 which is substantially equal to half of a source wavelength corresponding to the celerity divided by the source frequency.

[0106] Within the meaning of the present disclosure, the overall length L2 of the ignition electrode 22 corresponds to the resonance length, as described in more detail hereinbelow.

[0107] As an example, if the ignition electrode 22 is fully inserted into a securing unit 24 having a permittivity of 1, i.e. equal to the permittivity of vacuum or of air, then the resonance length of the ignition electrode 22 is equal to the half-wavelength of the excitation wave in the waveguide 12, i.e. the half-length in vacuum if the waveguide 12 forms a coaxial guide. Indeed, the wavelength in a material is inversely proportional to the root of the permittivity of said material. Thus, as an example, fora permittivity equal to 9 the wavelength is 3 times less. If the overall length L2 of the ignition electrode 22 is equal to 41 mm including 10 mm in the securing unit such that said securing unit has a permittivity equal to 9, this represents an vacuum resonance equivalent length of: 31+10?9{circumflex over ()}?=61 mm i.e. exactly the half-wavelength in vacuum of a wave having a frequency of 2.45 GHz. Such an arrangement makes it possible to obtain an electric field having a sufficient intensity to allow the breakdown of the gas while limiting the intensity of the excitation wave, which makes it possible both to be energy efficient and to protect the plasma producing device.

[0108] According to an advantageous embodiment, the overall length L2 of the ignition electrode 22 is comprised between 37% and 50% of the wavelength of the source wave in vacuum. Thus, if the source wave has a frequency of 2.45 GHz, then the ignition electrode has a length comprised between 45 and 61 mm.

[0109] If the ignition electrode encloses the securing unit, as represented in FIGS. 3 and 4, then the overall length L2 of the ignition electrode 22 is comprised between 37% and 50% of the wavelength of the source wave in vacuum. Thus, if the source wave has a frequency of 2.45 GHz, then the ignition electrode has a length comprised between 45 and 61 mm, depending on the shape of the ignition electrode as well as the material and the shape of the securing unit. Thus, if the securing unit 24 is made of alumina, the length will be shorter (for example 47 mm) than if the securing unit 24 is made of loaded PTFE (for example 49 mm) or of PTFE (for example 51 mm) to maintain the resonance. Indeed, the more the material of the securing unit 24 has a higher permittivity, and/or the more the securing unit has a larger contact surface area with the ignition electrode 22, and the more the resonance length of the ignition electrode 22 is reduced. The resonance length of the ignition electrode 22 is reduced near a dielectric material having a permittivity greater than that of vacuum.

[0110] The ignition electrode 22 has the overall length L2 given such that the proximal body portion 221 of the ignition electrode 22 extends over a proximal length L21 at least equal to a distal length L22 of the distal body portion 222 of the ignition electrode 22. In other words, the proximal body portion 221 has the proximal length L21 along the axis of extension 60 and the distal body portion 222 has the distal length L22 along the axis of extension 60, and this proximal length L21 is greater than or equal to the distal length L22.

[0111] More specifically, the proximal body portion 221 of the ignition electrode 22 extends over the proximal length L21 which is equal to ? of the overall length L2 of the ignition electrode 22. More broadly, the distal length L22 is greater than or equal to a quarter of the overall length L2, and the proximal length L21 is greater than or equal to one half of the overall length L2.

[0112] According to one embodiment, the ignition electrode 22 and a duct 27 configured to envelop the dielectric tube 14 form a coaxial guide. The wavelength of the excitation wave guided in the coaxial guide is substantially equal to the wavelength of the excitation wave in vacuum.

[0113] The duct 27 is at least partially made of metal. Such an arrangement allows the duct 27 to play a shielding role that is to say to prevent microwave leaks.

[0114] According to one embodiment, the duct 27 comprises an annular retaining seal 28 at least partially surrounding the dielectric tube 14. The annular retaining seal 28 being configured to maintain the dielectric tube 14 in position and also to provide a seal between atmosphere and that inside the tube.

[0115] According to one embodiment, the annular retaining seal 28 is transparent to microwaves. Such an arrangement makes it possible to obtain an annular retaining seal 28 having less degradation over time.

[0116] According to one embodiment, the duct 27 comprises an annular cooling groove 30 configured to receive a cooling fluid. According to one embodiment, the annular cooling groove 30 is configured to provide cooling of the retaining seal 28.

[0117] According to an advantageous embodiment, the proximal body portion 221 of the ignition electrode 22 comprises a tapered end opposite the distal body portion 222. Such an arrangement makes it possible to obtain a maximum field at the level of the proximal body portion 221 of the ignition electrode.

[0118] As illustrated in FIG. 3, at least one part of the proximal body portion 221 of the ignition electrode 22 is located substantially at the level of a central axis 70 of the waveguide 12 when the ignition electrode 22 is in the second position. Such an arrangement makes it possible to obtain an electric field having a high intensity.

[0119] The ignition unit comprises a securing unit 24 made of dielectric material configured to receive the securing member 223 of the ignition electrode 22. This securing unit 24 made of dielectric material is thus configured to receive the ignition electrode 22 and it makes it possible not to transmit the excitation wave and thus to cut-off the microwaves, which makes it possible to protect a moving unit 26, described hereinbelow, from said excitation wave. In other words, the securing unit 24 is interposed between the ignition electrode 22 and the moving unit 26 and therefore prevents overheating and damage to said moving unit 26.

[0120] The securing unit 24 has a length L4, along the axis of extension 60, substantially equal to or greater than 1.3 D and preferably substantially equal to or greater than 1.5 D, D being the outer diameter of the dielectric tube 14. Within the meaning of the present disclosure, substantially equal means perfectly equal or equal to within 15%, or even within 10%. Such an arrangement makes it possible to obtain a securing unit 24 of a sufficient length to allow the metal duct 27 to be a guide when the microwaves are cut off. This makes it possible to more effectively protect the moving unit 26 from said microwaves.

[0121] According to one embodiment, the securing unit 24 is made of technical ceramics having a permittivity of less than 10 such as alumina or preferably less than 5, which makes it possible to obtain a securing unit 24 which cuts off the microwaves more effectively, and thus effectively protecting the moving unit 26 from said microwaves. Indeed, the lower the permittivity, the more effectively the securing unit 24 cuts off the microwaves.

[0122] According to an advantageous embodiment, the securing unit 24 is made of PTFE or loaded PTFE having a respective permittivity of approximately 2.1 and 3. Such an arrangement makes it possible to obtain a securing unit 24 having good thermal resistance.

[0123] The moving unit 26 is configured to receive the securing unit 24 and move both said securing unit 24 and the ignition electrode 22 together from a first position represented in FIG. 2 in which the ignition electrode 22 is outside the waveguide 12 at a second position represented in FIG. 3 in which at least one of the proximal body portion 221 of the ignition electrode 22 is disposed within the dielectric tube 14 and in the waveguide 12. In this manner, when said ignition electrode 22 is in the second position, the ignition of the plasma is facilitated.

[0124] Once the plasma has been ignited, it becomes conductive, the moving unit 26 then moves the securing unit 24 and the ignition electrode 22 together into an intermediate position in which the ignition electrode is not in contact with the plasma. The reflector plane is also moved to maximize coupling.

[0125] According to one embodiment, the moving unit 26 is configured so that in the first position, the ignition electrode 22 is outside the dielectric tube 14. Such an arrangement makes it possible to protect the moving unit 26 from said microwaves more effectively.

[0126] According to one embodiment, in the second position, the ignition electrode 22 is inserted via an insertion end in the dielectric tube 14 up to the waveguide 22. Such an arrangement allows the ignition electrode 22 to enter into resonance with the excitation wave and thus create a high intensity electric field. According to one embodiment, the electric field generated by the ignition electrode in order to allow the ignition of the plasma is at least equal to the breakdown electric field of the reaction gas. According to one embodiment, the moving unit 26 is a cylinder, such as a pneumatic cylinder for example.

[0127] According to one embodiment, the moving unit 26 is configured to move along a moving axis substantially coincident with the axis of extension 60. Within the meaning of the present disclosure, substantially coincident means exactly coincident or coincident at with 10%.

[0128] According to one embodiment, the securing unit 24 has an oblong shape along the axis of extension 60 and has a solid circular cross-section, having a diameter D4 which is substantially equal to the distal diameter D22 of the distal body portion 222 of the ignition electrode 22.

[0129] The waveguide 12 is coupled to a movable reflector plane 16 configured to generate a standing wave from the excitation wave, thus forming a short-circuit piston. The dielectric tube 14 is arranged between the reflector plane 16 and the inlet orifice. Such an arrangement makes it possible to artificially modify the size of the waveguide 12 and to maximize the electric field at the position of the ignition electrode 22 in order to facilitate the ignition of the plasma by reflecting at least a part of the excitation wave. Once the plasma has been ignited, the position of the reflector plane 16 is modified in order to adapt the impedance. Such an arrangement makes it possible to maximize the power deposited in the plasma.

[0130] Before the ignition of the plasma, the reflector plane 16 is located at a distance substantially equal to n.?e/2+k.?e/2 from at least one part of the ignition electrode 22 when the ignition electrode 22 is in the second position, ?e being the wavelength of the excitation wave guided in the waveguide 14, n being a natural integer and k being a coefficient comprised between 0.7 and 1.3, or even comprised between 0.8 and 1.2. Such an arrangement makes it possible to maximize the electric field on the end of the proximal body portion 221 of the ignition electrode 22 and thus facilitate the ignition.