GASEOUS SEALING MANIFOLD ASSEMBLY FOR SURGICAL GAS DELIVERY SYSTEM

Abstract

A manifold assembly for a surgical gas delivery system is disclosed, which includes a manifold body including an inlet port for receiving gas from an outlet side of a compressor and an outlet port for recirculating gas to an inlet side of the compressor, a bypass valve communicating with the inlet port and the outlet port of the manifold body, an air ventilation valve for dynamically controlling the ingress of air from atmosphere, a smoke evacuation valve for dynamically controlling the egress of gas from the manifold assembly when the gas delivery system is operating in a smoke evacuation mode, and a gas fill for dynamically controlling the receipt of gas from a source of surgical gas.

Claims

1-25. (canceled)

26. A manifold assembly for a surgical gas delivery system comprising: a) a three-dimensional manifold body configured for recirculating gas received gas from an outlet side of a compressor to an inlet side of the compressor through internal passageways defined within the manifold body; b) a gas quality sensor located on the manifold body for monitoring a level of CO.sub.2 in the gas recirculating through the internal passageways of the manifold body so that the surgical gas delivery system can make adjustments to the gas; c) a first pressure sensor port on the manifold body communicating with the inlet side of the compressor through the internal passageways of the manifold body and with a first pressure sensor of the surgical gas delivery system; and d) a second pressure sensor port on the manifold body communicating with the outlet side of the compressor through the internal passageways of the manifold body and with a second pressure sensor of the surgical gas delivery system.

27. The manifold assembly recited in claim 26, wherein the manifold body is configured to deliver the gas from the outlet side of the compressor to a gas sealed access port and to recirculate the gas from the gas sealed access port through the internal passageways of the manifold body to the inlet side of the compressor.

28. The manifold assembly recited in claim 26, wherein the manifold body includes a bypass valve having a motorized rotary valve actuator for dynamically controlling the gas recirculating through the internal passageways of the manifold body manifold body.

29. The manifold assembly recited in claim 26, wherein the manifold body includes a smoke evacuation valve having a motorized rotary valve actuator for dynamically controlling the egress of gas from the internal passageways of the manifold body when the gas delivery system is operating in a smoke evacuation mode.

30. The manifold assembly recited in claim 26, wherein the manifold body includes an air ventilation valve having a motorized rotary valve actuator for dynamically controlling the ingress of air into the internal passageways of the manifold body manifold body from an atmosphere.

31. The manifold assembly recited in claim 26, wherein the manifold body includes a gas fill valve having a motorized rotary valve actuator for dynamically controlling the receipt of the gas into the internal passageways of the manifold body manifold body from a gas source.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0018] So that those skilled in the art will readily understand how to make and use the gas delivery system and method of the subject invention without undue experimentation, preferred embodiments thereof will be described in detail herein below with reference to the figures wherein:

[0019] FIG. 1 is a schematic diagram of the multi-modal gas delivery system of the subject invention, which includes a gaseous sealing manifold for communicating with a gas sealed access port and an insufflation manifold for communicating with the gas sealed access port and with a valve sealed access port;

[0020] FIG. 2 is a perspective view of a gaseous sealing manifold assembly for use in the gas delivery system shown in FIG. 1, which includes a plurality of motorized linear valve actuators;

[0021] FIG. 3 is a right side elevational view of the gaseous sealing manifold assembly shown in FIG. 2;

[0022] FIG. 4 is a left side elevational view of the gaseous sealing manifold assembly shown in FIG. 2;

[0023] FIG. 5 is a front elevational view of the gaseous sealing manifold assembly shown in FIG. 2;

[0024] FIG. 6 is a rear elevational view of the gaseous sealing manifold assembly shown in FIG. 2;

[0025] FIG. 7 is a cross-sectional view taken along line 7-7 of FIG. 3;

[0026] FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 3;

[0027] FIG. 9 is a cross-sectional view taken along line 9-9 of FIG. 5;

[0028] FIG. 10 is a cross-sectional view taken along line 10-10 of FIG. 5;

[0029] FIG. 11 is a perspective view of another gaseous sealing manifold assembly for use in the gas delivery system of FIG. 1, which includes a plurality of motorized rotary valve actuators;

[0030] FIGS. 12-14 are related views of an exemplary motorized rotary valve actuator shown in FIG. 11, which includes a stepper motor and an axial drive screw, wherein FIG. 12 is an elevational view of the rotary actuator, FIG. 13 is a cross-sectional view of the rotary actuator taken along line 13-13 of FIG. 12, and FIG. 14 is a perspective view of the rotary actuator; and

[0031] FIGS. 15-17 are related views of another motorized rotary valve actuator that includes a stepper motor and a reduction gear assembly, wherein FIG. 15 is an elevational view of the rotary actuator, FIG. 16 is a cross-sectional view of the rotary actuator taken along line 16-16 of FIG. 15, and FIG. 17 is a perspective view of the rotary actuator.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0032] Referring now to the drawings wherein like reference numerals identify similar structural elements and features of the subject invention, there is illustrated in FIG. 1 a new and useful multi-modal surgical gas delivery system 10 that is adapted and configured for gas sealed insufflation, recirculation and smoke evacuation during an endoscopic or laparoscopic surgical procedure. The multi-modal surgical gas delivery system 10 of the subject invention includes a gaseous sealing manifold 110 for communicating with a gas sealed access port 20 and an insufflation manifold 210 for communicating with the gas sealed access port 20 and with a valve sealed access port 30.

[0033] The gas sealed access port 20 is of the type disclosed in commonly assigned U.S. Pat. No. 8,795,223, which is incorporated herein by reference. The gas sealed access port 20 is adapted and configured to provide gas sealed instrument access to a body cavity, while maintaining a stable pressure within the body cavity (e.g., a stable pneumoperitoneum in the peritoneal or abdominal cavity). In contrast, the valve sealed access port 30 is a conventional or standard trocar, for providing access to a body cavity through a mechanical valve seal, such as, for example, a duckbill seal, septum seal or the like. Depending upon the requirements of a particular surgical procedure, the multi-modal gas delivery system 10 can be utilized with either the gas sealed access port 20, the valve sealed access port 30 or with both access ports 20, 30 at the same time.

[0034] The gas delivery system 10 further includes a compressor or positive pressure pump 40 for recirculating surgical gas through the gas sealed access port 20 by way of the gaseous sealing manifold 110. The compressor 40 is preferably driven by a brushless DC (direct-current) motor, which can be advantageously controlled to adjust gas pressure and flow rates within the gas delivery system 10, as disclosed for example in commonly assigned U.S. Pat. No. 10,702,306, which is incorporated herein by reference. Alternatively, the compressor 40 can be driven by an AC motor, but a DC motor will be relatively smaller and lighter, and therefore more advantageous from a manufacturing standpoint.

[0035] An intercooler and/or condenser 50 is operatively associated with the compressor 40 for cooling or otherwise conditioning gas recirculating through the gaseous sealing manifold 110. A UVC irradiator 52 is operatively associated with the intercooler or condenser 50 for sterilizing gas recirculating through the internal flow passages 54 formed therein by way of the compressor 40. In addition, the UVC irradiator 52 is intended to sterilize the interior surfaces of the gas conduits or flow passages 54 through which the gas flows within the intercooler/condenser 50.

[0036] The UVC irradiator preferably includes at least one LED light source or a florescent light source that is adapted and configured to generate UVC radiation at a wavelength of about between 240-350 nm, and preferably about 265 nm. This ultraviolet light at such a wavelength can sterilize viral, bacterial and microbial bodies within the gas conduits of the system, and can reduce coronavirus including SARS-COV-2.

[0037] Preferably, compressor 40, intercooler/condenser 50, gaseous sealing manifold 110 and insufflation manifold 210 are all enclosed within a common housing, which includes a graphical user interface and control electronics, as disclosed for example in commonly assigned U.S. Pat. No. 9,199,047, which is incorporated herein by reference.

[0038] The gas delivery system 10 further includes a surgical gas source 60 that communicates with the gaseous sealing manifold 110 and the insufflation manifold 210. The gas source 60 can be a local pressure vessel or a remote supply tank associated with a hospital or healthcare facility. Preferably, gas from the surgical gas source 60 flows through a high pressure regulator 65 and a gas heater 70 before it is delivered to the gaseous sealing manifold 110 and the insufflation manifold 210. Preferably, the high pressure regulator 65 and the gas heater 70 are also enclosed with the compressor 40, intercooler 50, gaseous sealing manifold 110 and insufflation manifold 210 in the common housing.

[0039] The gas delivery system 10 further includes a first outlet line valve (OLV1) 212 that is operatively associated with the insufflation manifold 210 for controlling a flow of insufflation gas to the valve sealed access port 30 and a second outlet line valve (OLV2) 214 that is operatively associated with the insufflation manifold 210 for controlling a flow of insufflation gas to the gas sealed access port 20.

[0040] In accordance with a preferred embodiment of the subject invention, the first and second outlet line valves 212, 214 of insufflation manifold 210 are proportional valves that are configured to dynamically alter or otherwise control the outflow of insufflation gas to the access ports 20, 30 to match volume fluctuations that may arise in a patient's body cavity as they occur. The first and second proportional outlet line valves 212, 214 provide the gas delivery system 10 with fine control of insufflation gas flow rate to achieve stable flow rates at lower pressure, reduce pressure oscillation and eliminate pneumatic hammer. Because the first and second proportional outlet line valves 212, 214 are proximal to the patient where flow friction losses are relatively low, the gas delivery system 10 is able to measure peritoneal pressures accurately. Moreover, the use of proportional outlet line valves for this purpose is uniquely possible here, because there is constant gas recirculation throughout the gas delivery system 10, either by way of closed loop smoke evacuation or by way of the gas sealed access port 20.

[0041] Proportional valves allow for infinitely variable gas flow adjustment between a minimum flow state and a maximum flow state. Given that some volume changes in a patient's body cavity, such as breathing, are expected and consistent, by employing proportional outlet line valves, the insufflation manifold 210 is able to dynamically alter the gas flow to the body cavity to inverse the expected volume changes, resulting in a neutral effect on the pressure inside the cavity.

[0042] An additional benefit of using proportional valves for controlling the outflow of insufflation gas from manifold 210 is a reduction in response time, as compared to that of a solenoid valve. A solenoid valve operates by applying energy to coils, which produces an electromagnetic force that moves a piston. However, the energizing of the coils takes some amount of time, introducing a delay between a commanded action and the physical movement of the piston. In contrast, proportional valves, as employed in the gas delivery system 10 of the subject invention, do not have an energization delay in general, and so they have an improved response time as compared to solenoid valves.

[0043] The insufflation manifold 210 further includes a first patient pressure sensor (PWS1) 222 downstream from the first outlet line valve 212 and a second patient pressure sensor (PWS1) 224 downstream from the second outlet line valve 214. These two patient pressure sensors are used to measure abdominal pressure to control outlet line valves 212, 214, respectively. Two other pressure sensors are located upstream from the outlet line valves 212, 214, and are labeled as DPS1 and DPS2. These two pressure sensors are situated within a venturi to measure a pressure differential that is used to infer a total gas flow rate from the insufflation manifold 210 to the patient's body cavity.

[0044] A primary proportional valve (PRV) 216 is also operatively associated with insufflation manifold 210 and it is located upstream from the first and second outlet line valves 212, 214 to control the flow of insufflation gas to the first and second outlet line valves 212, 214. Proportional valve 216 functions to maintain an intermediate pressure within the insufflation manifold 210 (as the central node in the LPU) at a constant pressure between 1 and 80 mmHg, dependent on the system operating mode. The opening of PRV 216 can be indirectly initiated by any of the following actions: patient respiration, gas leakage downstream of PRV 216, or the opening of the safety valve LSV 227 or ventilation valve VEV 228, i.e. any event that causes an intermediate pressure to drop. In the system. LSV 227 and VEV 228 are described in more detail below.

[0045] The gaseous sealing manifold 110 also includes a high pressure gas fill valve (GFV) 112 that is operatively associated with an outlet side of the compressor 40. GFV 112 is adapted and configured to control gas delivered into the gaseous sealing manifold 110 from the source of surgical gas 60. Preferably, the gas fill valve 112 is a proportional valve that is able to dynamically control surgical gas delivered into the gaseous sealing manifold 110.

[0046] The gaseous sealing manifold 110 also includes a smoke evacuation valve (SEV) 114 that is operatively associated with an outlet side of the compressor 40 for dynamically controlling gas flow between the gaseous sealing manifold 110 and the insufflation manifold 210 under certain operating conditions, such as, for example, when the gas delivery device 10 is operating in a smoke evacuation mode. Preferably, the smoke evacuation valve 114 is a proportional valve.

[0047] A bypass valve (SPV) 116 is positioned between an outlet side of the compressor 40 and an inlet side of the compressor 40 for controlling gas flow within the gaseous sealing manifold 110 under certain operating conditions. Preferably, the bypass valve 116 is a proportional valve, which is variably opened to establish and control the gaseous seal generated within gas sealed access port 20. Moreover, bypass valve 116 controls gas flow rate to the gaseous seal using feedback from pressure sensors 122, 124, described in further detail below.

[0048] The gaseous sealing manifold 110 also includes an air ventilation valve (AVV) 118, which is operatively associated with an inlet side of the compressor 40 for controlling the entrainment of atmospheric air into the system 10 under certain operating conditions. For example, AVV 118 will permit the introduction of atmospheric air into the gaseous sealing circuit to increase the air mass (i.e., the standard volume) within the circuit. The thermodynamics of clinical use conditions can cause a loss of standard volume within the gas circuit. The ventilation valve 118 permits the gas delivery system 10 to make up for this lost volume, in order to ensure that pump pressure and flow rates are sufficient to maintain the gaseous seal within the gas sealed access port 20. The ventilation valve 118 can also be opened to reduce the vacuum side pressure in the gas seal circuit.

[0049] An overpressure relief valve (ORV) 120 is operatively associated with an outlet side of the compressor 40 for controlling a release of gas from the system 10 to atmosphere under certain operating conditions. Preferably, the overpressure relief valve 120 is a proportional valve that is opened to reduce the positively pressurized side of the gas seal circuit, especially in the event of an emergency, such as a loss of power to the gas delivery system 10. The normally open configuration of relief valve 120 reduces the risk of over-pressurization of the patient cavity upon loss of power to that valve.

[0050] A first pressure sensor (RLS) 122 is operatively associated with an inlet side of the compressor 40 and a second pressure sensor (PLS) 124 is operatively associated with an outlet side of the compressor 40. These pressure sensors 122, 124 are situated to have unobstructed and minimally restricted commutation with the patient's abdominal cavity in order to continuously and accurately measure cavity pressure. The signals from these two pressure sensors 122, 124 are employed by a controller of the gas delivery system 10 to modulate the opening of the two outlet line valves 212 and 214, to control the patient cavity pressure.

[0051] In addition, the gaseous sealing manifold 110 includes a gas quality sensor 126 that is operatively associated with an outlet side of the compressor 40. The gas quality sensor monitors the level of oxygen in the recirculation circuit, which corresponds to a concentration of CO.sub.2 in the body cavity of a patient, as disclosed in U.S. Pat. No. 9,199,047.

[0052] A first blocking valve (BV1) 132 is operatively associated with an outlet flow path of the gaseous sealing manifold 110 and a second blocking valve (BV2) 134 is operatively associated with an inlet flow path to the gaseous sealing manifold 110. The blocking valves 132, 134 are employed during a self-test prior to a surgical procedure, as disclosed in U.S. Pat. No. 9,199,047. It is envisioned that the first and second blocking valves 132, 134 could be are mechanically actuated or pneumatically actuated.

[0053] A first filter element 142 is positioned downstream from the first blocking valve 132 for filtering pressurized gas flowing from the compressor 40 to the gas sealed access port 20, and a second filter element 144 is positioned upstream from the second first blocking valve 134 for filtering gas returning to the compressor 40 from the gas sealed access port 20. Preferably, the filter elements 142, 144 are housed within a common filter cartridge, as disclosed for example in U.S. Pat. No. 9,199,047.

[0054] The first and second blocking valves 132, 134 communicate with a blocking valve pilot (BVP) 226 that is included within with the insufflation manifold 210. Preferably, the blocking valve pilot 226 is a solenoid valve. It is envisioned that BVP 226 could be fed from the compressor outlet as shown or from a gas source such of surgical gas or air. The insufflation manifold 110 further includes a pressure sensor (PMS) 225 located downstream from the primary proportional valve 216 and upstream from the outlet line valves 212, 214. The two outlet line valves are opened to introduce insufflation gas to the patient's body cavity by way of the access ports 23, 30. This introduction of gas has the effect of increasing pressure within the body cavity. Additionally, the outlet line valves 212, 214 can be opened in conjunction with air ventilation valve 228 to release gas from the body cavity, having the effect of desufflation and reduction of cavity pressure.

[0055] The insufflation manifold 210 further includes a low pressure safety valve (LSV) 227 downstream from the primary proportional valve 216 and upstream from the first and second outlet line valves 212, 214 for controlling a release of gas from the system 10 to atmosphere under certain operating conditions. LSV 227 is a purely mechanical valve that functions to limit the maximum intermediate pressure within the manifold 210 or LPU (Low Pressure Unit) in the event of a power interruption, a pressure controller malfunction or if a valve located upstream from the LSV sticks in an open position.

[0056] In addition, a ventilation exhaust valve (VEV) 228 is positioned downstream from the primary proportional valve 216 and upstream from the outlet line valves 212, 214 for controlling a release of gas from the system 10 to atmosphere under certain operating conditions. The ventilation exhaust valve 228 is a preferably a proportional valve that is opened to de-sufflate or otherwise reduce patient cavity pressure. Additionally, VEV 228 can be opened to reduce intermediate pressure within the LPU.

[0057] A filter element 242 is positioned downstream from the first outlet line valve 212 for filtering insufflation gas flowing from the insufflation manifold 210 to the valve sealed access port 30. Another filter element 244 is positioned downstream from the second outlet line valve 224 for filtering insulation gas flowing from the insufflation manifold 210 to the gas sealed access port 20. Preferably, filter element 244 is housed with filter elements 142 and 144 in a common filter cartridge, while filter element 242 is separately located.

[0058] Referring now to FIG. 2, there is illustrated a gaseous sealing manifold assembly constructed in accordance with a preferred embodiment of the subject invention and designated generally by reference numeral 310 which is adapted and configured for use in the gas delivery system 10 illustrated in FIG. 1. The gaseous sealing manifold assembly 310 is designed as a compact, readily serviceable and replaceable modular unit. It includes a manifold body 315 having an inlet port 330 for receiving gas from an outlet side of a compressor (e.g., compressor 40 in FIG. 1) and an outlet port 340 for recirculating gas to an inlet side of the compressor 40. Alternatively, port 440 in manifold body 315 could be utilized for routing gas back to the inlet side of the compressor. As shown in FIGS. 3 and 4, the manifold body 315 also includes a delivery port 350 for delivering gas to a gas sealed access port 20 and a reception port 360 for receiving gas from the gas sealed access port 20 (see also FIG. 1).

[0059] As best seen in FIGS. 8 through 10, the manifold body 315 defines a series of interconnected internal drilled passageways that facilitate the flow of surgical gas and air between and among the various control valves and sensors of the gaseous sealing manifold assembly 310. Those skilled in the art will readily appreciate that the arrangement and location of these passageways within the manifold body 315 could vary by design and therefore should not be considered as a limitation on the scope of the subject invention.

[0060] With continuing reference to FIG. 2 in conjunction with FIGS. 3 through 6, a bypass valve (SPV) 116 communicates with the inlet port 330 and the outlet port 340 of the manifold body 315. As noted above, bypass valve 116 controls gas flow rate to the gaseous seal using feedback from pressure sensors 122 (RLS), 124 (PLS). The bypass valve 116 includes a motorized linear actuator 316 for dynamically controlling gas flow. The manifold body 315 includes a first pressure sensor port 322 communicating with sensor 122 (RLS) and a second pressure sensor port 324 communicating with pressure sensor 124 (PLS).

[0061] An air ventilation valve (AVV) 118 is operatively associated with the inlet side of the compressor 40, upstream from the bypass valve 116. The air ventilation valve 114 includes a motorized linear actuator 318 for dynamically controlling the ingress of air from atmosphere. An air ventilation port 418 is provided in the manifold body 315 for entraining atmospheric air into the air ventilation valve 118 (see FIGS. 5 and 10).

[0062] A smoke evacuation valve (SEV) 114 is operatively associated with the outlet side of the compressor 40, upstream from the bypass valve 116. A port 414 on manifold body 315 communicates with the smoke evacuation valve 114. The smoke evacuation valve 114 includes a motorized linear actuator 314 for dynamically controlling the egress of gas from the manifold assembly 310 when the gas delivery system 10 is operating in a smoke evacuation mode.

[0063] A gas fill valve 112 (GFV) is operatively associated with the outlet side of the compressor 40, upstream from the bypass valve 116. A port 412 on manifold body 315 communicates with the gas fill valve 112. The gas fill valve 112 includes a motorized linear actuator 312 for dynamically controlling the receipt of gas from the source of surgical gas.

[0064] An over pressure relief valve (ORV) 120 is operatively associated with the outlet side of the compressor 40, downstream from the bypass valve 116, for controlling the release of gas from the manifold assembly 310. The over pressure relief valve 120 includes a solenoid actuator 320 with a spring loaded valve stem 323 located within a side housing 327 supported on an upstanding bracket 329. Because this valve must be able to open in the event of a power loss, it is the only valve in the manifold assembly that is not driven by a motorized liner actuator.

[0065] The manifold body 315 also includes a gas quality sensor 326 that is operatively associated with the outlet side of the compressor 40, downstream from the bypass valve 116. The gas quality sensor monitors a level of CO.sub.2 in gas recirculating through the manifold assembly 310 so that the gas delivery system 10 can make adjustments to gas quality if necessary.

[0066] Referring now to FIGS. 7 through 10, each motorized linear actuator (312, 314, 316, 318) includes a respective rack and pinion mechanism to effectuate precise dynamic control of a respective valve. Each rack and pinion mechanism includes a respective horizontal actuation shaft (352, 354, 356, 358) and a respective corresponding horizontal drive rack gear (362, 364, 366, 368). In addition, each motorized linear actuator (312, 314, 316, 318) includes a rotatable drive pinion gear (372, 374, 376, 378) that is driven by the horizontal drive rack gear (362, 364, 366, 368), and a vertical driven rack gear (382, 384, 386, 388) that is driven by the driven pinon gear (372, 374, 376, 378) and operatively associated with a spring-loaded vertical valve stem (392, 394, 396, 398). Each horizontal drive rack gear (362, 364, 366, 368) is mounted to translate along a first horizontal axis, and each rotatable driven pinion gear (372, 374, 376, 378) is mounted to rotate about a second horizontal axis that extends perpendicular to the first horizontal axis.

[0067] In use, upon receiving a command from a controller of gas delivery system 10, linear movement of a horizontal actuation shaft (right or left) will cause corresponding liner movement of an associated horizontal gear rack (right or left), which will rotate a corresponding pinion gear (clockwise or counter-clockwise). That pinon gear will then move an associated vertical drive rack (up or down), which in turn will control the upward or downward movement of a corresponding valve stem (392, 394, 396, 398) of a control valve (112, 114, 116, 118).

[0068] The four motorized linear actuators (312, 314, 316, 318) are grouped together in two oppositely oriented pairs on manifold body 315. More particularly, the linear actuator 312 of the gas fill valve 112 and the linear actuator 314 of the smoke evacuation valve 114 are grouped together within a first housing 325. And, the linear actuator 316 of the bypass valve 116 and the linear actuator 318 of the air ventilation valve 118 are ganged together within a second housing 335. Front and rear upper transverse spacer rods 345 and 355 provide structural rigidity to the first housing 325, while front and rear upper transverse spacer rods 365 and 375 provide structural rigidity to the second housing 335. A lower transverse spacer rod 385 provides further structural rigidity to the first housing 325, and a lower transverse spacer rod 395 does the same for the second housing 335. Those skilled in the art will appreciate from the figures that the flat ribbon cables associated with each of the linear actuators (312, 314, 316, 318) extend to a controller of the gas delivery system 10 which delivers power and control signals to the four actuators.

[0069] Referring now to FIG. 11, there illustrated another gaseous sealing manifold assembly constructed in accordance with a preferred embodiment of the subject invention and designated generally by reference numeral 510 which is adapted and configured for use in the gas delivery system 10 illustrated in FIG. 1. Manifold assembly 510 is substantially similar to manifold assembly 310 shown in FIG. 2, in that it includes the same proportional control valves for dynamically controlling gas flow (i.e., GFV, SEV, SPV and AVV), but in this embodiment of the subject invention, these proportional control valves have respective motorized rotary actuators 500, rather the than motorized linear actuators (312, 314, 316, 318) described above.

[0070] More particularly, as shown in FIGS. 12 through 14, each motorized rotary actuator 500 includes an axial drive screw 520 that is supported for vertical translation within a housing 522 driven by a DC rotary stepper motor 524. In each rotary actuator, the axial drive screw 520 is operatively associated with a spring-loaded vertical valve stem 526 associated with a respective one of the four control valves 112, 114, 116, 118 depicted in FIG. 1. In use, rotation of the drive screw 520 causes corresponding vertical movement of the valve stem 526 to dynamically adjust the amount of gas flowing through the associated control valve.

[0071] Alternatively, as shown in FIGS. 15 through 17 a motorized rotary actuator 600 may be employed in gaseous sealing manifold assembly 510 for dynamically controlling gas flow, each of which includes a reduction gear assembly 625 that is supported within a housing 622 driven by a DC rotary stepper motor 624. The reduction gear assembly reduces the torque generated by the stepper motor. In each rotary actuator, the reduction gear assembly 625 is operatively associated with a drive screw 620 and a spring-loaded vertical valve stem 626 connected thereto. In use, actuation of the reduction gear assembly causes corresponding vertical movement of the drive screw 620 and attached valve stem 626 to dynamically adjust the amount of gas flowing through the associated control valve (i.e., 112, 114, 116, 118).

[0072] While the gas delivery system and gaseous sealing manifold assembly of the subject disclosure has been shown and described with reference to preferred embodiments, those skilled in the art will readily appreciate that changes and/or modifications may be made thereto without departing from the scope of the subject disclosure.