PUMP APPARATUS AND SYSTEM

Abstract

The present discloses a pump apparatus having a first pump and at least one controller. The at least one controller is suitable for generating a first control signal for controlling the first pump. The at least one controller is suitable for generating a second control signal for controlling operation of a second pump. The second pump is external to the pump apparatus. One or more pump connection port is provided in the pump apparatus for outputting the second control signal to the second pump. The present disclosure also relates to a vacuum system comprising a pump apparatus of the type described herein.

Claims

1. A pump apparatus comprising: a first pump; at least one controller for generating: a first control signal for controlling the first pump; and a second control signal for controlling a second pump; wherein the second pump is external to the pump apparatus and the pump apparatus comprises one or more pump connection port for outputting the second control signal to the second pump.

2. The pump apparatus as claimed in claim 1, wherein the at least one controller comprises at least one electronic processor and a memory device, the at least one electronic processor having: at least one electrical input for receiving an input signal; and at least one electrical output for outputting the first control signal to the first pump and/or the second control signal to the second pump.

3. The pump apparatus as claimed in claim 1, wherein the at least one controller is configured to receive an operating signal indicating one or more operating parameter of the second pump.

4. The pump apparatus as claimed in claim 3, wherein the at least one controller is configured to control operation of the first pump and/or the second pump in dependence on the operating signal.

5. The pump apparatus as claimed in claim 1, wherein the at least one controller is configured to receive a pressure request signal indicating a target operating pressure for a process chamber.

6. The pump apparatus as claimed in claim 5 comprising at least one input device configured to generate the pressure request signal in dependence on a user input, wherein the user input identifies one of a plurality of operating processes, the at least one controller being configured to generate the pressure request signal in dependence on the identified one of the plurality of operating processes.

7. The pump apparatus as claimed in claim 1, comprising a first pressure sensor for measuring an inlet pressure or an outlet pressure of the first pump.

8. The pump apparatus as claimed in claim 7, wherein the at least one controller is configured to control operation of the second pump in dependence on the measured inlet pressure or outlet pressure of the first pump.

9. The pump apparatus as claimed in claim 1, wherein the at least one controller comprises an input for receiving an operating pressure signal indicating an operating pressure in a process chamber; the at least one controller being configured to control operation of the first pump and/or the second pump in dependence on the operating pressure signal.

10. The pump apparatus as claimed in claim 1 comprising: a first power supply for supplying electric power to the first pump; and a second power supply for supplying electric power to the second pump.

11. The pump apparatus as claimed in claim 1 comprising a power outlet for supplying electric power to the second pump.

12. The pump apparatus as claimed in claim 1, wherein the first pump comprises a primary pump for a vacuum system.

13. A vacuum system comprising: a pump apparatus as claimed in claim 1, the pump apparatus comprising a first pump and at least one controller; and a second pump disposed externally of the pump apparatus; the at least one controller being disposed in the pump apparatus and being configured to control operation of the first pump and the second pump.

14. The vacuum system as claimed in claim 13, wherein the second pump is a secondary pump for a vacuum system.

15. A controller for controlling a first pump and a second pump, the controller being configured to receive a first pressure signal indicating an operating pressure of a first pump and a second pressure signal indicating an operating pressure of a second pump; the controller being configured to generate: a first control signal for controlling the first pump; and a second control signal for controlling the second pump; wherein the first and second control signals are generated in dependence on the first and second pressure signals.

16. The controller as claimed in claim 15 comprising at least one electronic processor and a memory device, the at least one electronic processor having: at least one electrical input for receiving the first pressure signal and the second pressure signal; and at least one electrical pump connection port for outputting the first control signal to the first pump and the second control signal to the second pump.

17. A pump apparatus comprising a controller as claimed in claim 15 or claim 16.

18. The pump apparatus as claimed in claim 17, wherein the first pump is disposed in the pump apparatus; and the pump apparatus comprises one or more pump connection port for electrical connection to the second pump which is external of the pump apparatus.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0070] One or more embodiments of the present invention will now be described, by way of example only, with reference to the accompanying figures, in which:

[0071] FIG. 1 shows a vacuum system comprising a pump apparatus in accordance with an embodiment of the present invention;

[0072] FIG. 2 shows a schematic representation of the pump apparatus shown in FIG. 1;

[0073] FIG. 3 shows a block diagram illustrating operation of the vacuum system in accordance with an embodiment of the present invention.

DETAILED DESCRIPTION

[0074] A vacuum system 1 comprising a pump apparatus 3 in accordance with an embodiment of the present invention will now be described with reference to the accompanying figures. The vacuum system 1 in the present embodiment is a vacuum system. In particular, the vacuum system 1 is operable to generate a high vacuum in a process chamber 5 for performing an industrial process.

[0075] The pump apparatus 3 comprises a first housing 7, a first pump 9, a first control unit 11, a first power supply 13 and a second power supply 15. The pump apparatus 3 is a standalone pump unit. The first housing 7 forms an enclosure for the pump apparatus 3. The first pump 9, the first control unit 11 and the first and second power supplies 13, 15 are disposed in the first housing 7. The first housing 7 may be dismantled, for example to perform servicing of the first pump 9. However, during normal operation, the first housing 7 encloses the first pump 9 and the first control unit 11. The first control unit 11 comprises at least one first controller 17 and, as described herein, may function as a master control unit. The or each controller has at least one first electronic processor 19 and a memory device 21. A set of computational instructions is stored on the memory device 21. When executed, the instructions cause the first electronic processor 19 to perform the method(s) described herein. The first electronic processor 19 comprises at least one input 23 and at least one output 25. As described herein, the first electronic processor 19 is configured to control operation of the first pump 9 disposed in the pump apparatus 3; and a second pump 27 which is external to the pump apparatus 3.

[0076] The first control unit 11 is connected to input means for receiving one or more user inputs. The input means comprises one or more input device 29. The input device 29 is configured to output a user request signal SIN1 to the at least one input 23 of the first electronic processor 19. The first control unit 11 is configured to control operation of the pump apparatus 3 in dependence on a user input. The input device 29 in the present embodiment comprises a touch screen 31 for displaying a graphical user interface. The touch screen 31 may, for example, be integrated into a front panel of the first housing 7. The touch screen 31 detects user inputs and outputs the user request signal SIN1. The touch screen 31 may, for example, comprise a capacitive screen or a resistive screen. Alternatively, or in addition, the input device 29 may comprise one or more buttons or switches. In the present embodiment, the input device 29 is integrated into the pump apparatus 3. In particular, the input device 29 is mounted to the first housing 7 and connected to the first control unit 11 via a wired (physical) connection. In a variant, the input device 29 could be connected to the first control unit 11 over a wireless connection, for example comprising a radio frequency (RF) communication. Any suitable communication protocol may be used to establish communication between the first control unit 11 and the input device 29.

[0077] The first pump 9 is a primary pump and is configured to evacuate a low-vacuum chamber. The first pump 9 may, for example, comprise a scroll pump. The vacuum system 1 comprises a second pump 27 which is separate from the pump apparatus 3. The second pump 27 is a secondary pump and is configured to evacuate a high-vacuum chamber. The second pump 27 may, for example, comprise a turbomolecular pump. The first pump 9 is configured to operate as a backing pump for the second pump 27. The second pump 27 is separate from the pump apparatus 3, i.e. is independent of the pump apparatus 3. The second pump 27 in the present embodiment comprises a second housing 32 which is separate from the first housing 7. The second pump 27 comprises a second control unit 33. The second control unit 33 may comprise one or more electronic processor (not shown) and a memory device. The second control unit 33 is configured to control the second pump 27 in dependence on control signals received from the first control unit 11. The second control unit 33 may be considered as functioning as a slave control unit under the direct control of the first control unit 11. The first pump 9 and the second pump 27 are configured to operate together within the vacuum system 1 to establish the desired working pressure in the process chamber 5.

[0078] The first control unit 11 is integrated into the pump apparatus 3 and is configured to control operation of the first pump 9 and the second pump 27. The first control unit 11 in the pumping apparatus 3 is configured to implement a first pump controller 35 for controlling the first pump 9; and a second pump controller 37 for controlling the second pump 27. The first pump controller 35 outputs a first control signal SOUT1 to control operation of the first pump 9; and the second pump controller 37 outputs a second control signal SOUT2 to control operation of the second pump 27. A first one of the outputs 25 provided on the first electronic processor 19 is configured to output the first control signal SOUT1 to control the first pump 9. The first pump 9 may be selectively activated in dependence on the first control signal SOUT1. The operating speed of the first pump 9 may be controlled in dependence on the first control signal SOUT1. The first control signal SOUT1 may, for example, set a target operating speed for the first pump 9. A second one of the outputs 25 provided on the first electronic processor 19 is configured to output the second control signal SOUT2 to control the second pump 27. The second pump 27 may be selectively activated in dependence on the second control signal SOUT2. The operating speed of the second pump 27 may be controlled in dependence on the second control signal SOUT2. The second control signal SOUT2 may, for example, set a target operating speed for the second pump 27.

[0079] The pump apparatus 3 comprises a first pump connection port 39 for connection to the second pump 27. The first control unit 11 is configured to output the second control signal SOUT2 to the second pump 27 via the first pump connection port 39. The pump connection port 39 provides a hardware interface between the pump apparatus 3 and the second pump 27. A communication protocol is implemented to control communication between the pump apparatus 3 and the second pump 27. The first pump connection port 39 may, for example, comprise a serial port or a parallel port. The first pump connection port 39 is mounted to the housing 7 of the pump apparatus 3, for example on a back panel (not shown). A connecting lead C1 is provided to establish an electrical connection between the pump connection port 39 and the second pump 27. The connecting lead C1 may, for example, comprise or consist of a cable or a wire having one or more communication channel. The connecting lead C1 has a first connector for connection to the pump connection port 39. The connecting lead C1 may have a second connector for connection to the second pump 27.

[0080] In the present embodiment, the first control unit 11 provides two-way communication with the second pump 27. The first control unit 11 may output one or more signals to the second pump 27; and may receive one or more signals from the second pump 27. The second pump 27 is connected to the first pump connection port 39 and, in use, receives the second control signal SOUT2 generated by the first electronic processor 19. The second pump 27 is controlled in dependence on the second control signal SOUT2. The second pump 27 may optionally transmit an operating signal to the first electronic processor 19, for example comprising one or more operating parameters of the second pump 27. The operating parameter(s) of the second pump 27 may comprise one or more of the following: an operating speed, a power consumption and an operating load. The operating signal may be communicated to the first control unit 11 via the first pump connection port 39.

[0081] As outlined above, the first power supply 13 and the second power supply 15 are provided in the pump apparatus 3. The control unit 11 is configured to control operation of the first pump 9 and the second pump 27. In particular, the control unit 11 may selectively activate and de-activate the first pump 9 and/or the second pump 27. The pump apparatus 3 comprises a power output port 41 for supplying electrical power to the second pump 27. The power output port 41 may comprise a suitable electrical power connector. The power output port 41 is mounted to the housing 7 of the pump apparatus 3, for example on a back panel (not shown). In a variant, the second power supply 15 may be omitted from the pump apparatus 3. The first power supply 13 may be configured to supply electrical power to the first pump 9 and the second pump 27. The first power supply 13 may have a power specification suitable for powering the first pump 9 and the second pump 27. In a further variant, the second power supply 15 may be a standalone unit which is separate from the pump apparatus 3 and the second pump 27.

[0082] The at least one input 23 of the first electronic processor 19 is configured to receive one or more input signal SIN2-n. The one or more input signal SIN2-n comprise a sensor input signal SIN2-n. In the present embodiment, the first electronic processor 19 is configured to receive first and second sensor input signals SIN2-1, SIN2-2 from first and second pressure sensors 43, 45 respectively. The first and second pressure sensors 43, 45 are in the form of first and second vacuum gauges. The first and second pressure sensors 43, 45 output analogue signals indicative of the vacuum generated by the first and second pumps 9, 27. Alternatively, the first and second pressure sensors 43, 45 may be digital gauges for communicating pressure signals over a communication interface, such as RS485. The first pressure sensor 43 in the present embodiment is provided in the pump apparatus 3 and is configured to measure an inlet pressure of the first pump 9. In a variant, the pressure sensor 43 may be an external sensor, for example provided to measure an inlet pressure of the second pump 27. The first pressure sensor 43 outputs the first sensor input signal SIN2-1 to the first electronic processor 19. The second pressure sensor 45 is configured to measure an inlet pressure of the second pump 27. In a variant, the second pressure sensor 45 may be configured to measure a chamber pressure of the second pump 27. The second pressure sensor 45 outputs the second sensor input signal SIN2-2 to the first electronic processor 19 (via the first pump connection port 39). The pump apparatus 3 comprises a sensor communication port 47 for wired connection to the second pressure sensor 45. The sensor communication port 47 is mounted to the housing 7 of the pump apparatus 3, for example on a back panel (not shown).

[0083] The pump apparatus 3 comprises a network port 49 for communication over a network, for example a local area network (LAN) or a wide area network (WAN). The network port 49 in the present embodiment enables communication between the pump apparatus 3 and a base station BS1. The network port 49 may also allow communication between a plurality of the pump apparatus 3 described herein. The first control unit 11 may, for example, output one or more operating signal SOUT3-n to the base station BS1. A first operating signal SOUT3-1 may indicate one or more operating parameter of the first pump 9; and/or a second operating signal SOUT3-2 may indicate one or more operating parameter of the second pump 27. The one or more operating parameter (in respect of the first pump 9 and/or the second pump 27) may comprise one or more of the following: power consumption; operating speed; inlet pressure; outlet pressure; operating temperature. The one or more operating parameter may also be output to the touch screen 31, for example to enable an operator to monitor operation of the first pump 9 and/or the second pump 27. In certain embodiments, the first control unit 11 may receive control instructions from the base station BS1. The first control unit 11 may control the first pump 9 and/or the second pump 27 in dependence on the control instructions received from the base station BS1. Alternatively, or in addition, the pump apparatus 3 may comprise a wireless transceiver for transmitting and receiving communications.

[0084] The first control unit 11 is configured to control operation of the first pump 9 and the second pump 27. In use, a target operating pressure is set for the process chamber 5. The first control unit 11 controls the first pump 9 and the second pump 27 to achieve the target operating pressure. The first control unit 11 may control the first pump 9 and the second pump 27 during a start-up procedure. For example, the first pump 9 and the second pump 27 may be activated in a predetermined sequence or at predetermined intervals. The first control unit 11 may activate the first pump 9 and subsequently activate the second pump 27 when a suitable vacuum pressure has been achieved at the inlet of the first pump 9 or the inlet of the second pump 27. The target operating pressure of the process chamber 5 may be specified by the user. Alternatively, the target operating pressure may be derived from a predetermined operating process, for example defining the operating parameters for the process chamber 5.

[0085] The first control unit 11 may be configured to implement a start-up procedure, for example to stagger or sequence activation of the first pump 9 and the second pump 27. The first and second control signals SOUT1, SOUT2 may, for example, activate the first and second pumps 9, 27 concurrently, consecutively, in a predetermined sequence or at a predetermined interval. Alternatively, the start-up procedure may be controlled dynamically in dependence on a measured operating pressure of the first pump 9 and/or the second pump 27. The first control unit 11 may be configured to implement a shut-down procedure, for example to control de-activation of the first pump 9 and the second pump 27. The first and second control signals SOUT1, SOUT2 may, for example, de-activate the first and second pumps 9, 27 concurrently, consecutively, in a predetermined sequence or at a predetermined interval.

[0086] As described herein, the vacuum system 1 comprises a first pump 9 disposed internally within the pump apparatus 3; and a second pump 27 disposed externally of the pump apparatus 3. The operation of the vacuum system 1 will now be described with reference to a first block diagram 100. The pump apparatus 3 is activated (BLOCK 105). A user input is detected by the input device 29 (BLOCK 110). The input device 29 outputs a user request signal SIN1 to the first control unit 11 (BLOCK 115). The first control unit 11 determines target operating parameters for the first pump 9 and the second pump 27 (BLOCK 120). The first control unit 11 implements a start-up procedure (BLOCK 125). The first control unit 11 generates a first control signal SOUT1 which is transmitted to the first pump 9 disposed internally within the pump apparatus 3 (BLOCK 130). The first pump 9 is activated in dependence on the first control signal SOUT1. The first control unit 11 generates a second control signal SOUT2 which is output to the second pump 27 disposed externally of the pump apparatus 3 (BLOCK 135). The second pump 27 is activated in dependence on the second control signal SOUT2. The first control unit 11 may optionally receive a first sensor input signal SIN2-1 indicating an operating pressure associated with the first pump 9, for example an inlet pressure or an outlet pressure of the first pump 9 (BLOCK 140). The first control unit 11 may optionally receive a second sensor input signal SIN2-2 indicating an operating pressure associated with the second pump 27, for example an inlet pressure or an outlet pressure of the second pump 27 (BLOCK 145). Optionally, the first control unit 11 may dynamically control operation of the first pump 9 in dependence on the first sensor input signal SIN2-1 (BLOCK 150). Optionally, the first control unit 11 may dynamically control operation of the second pump 27 in dependence on the second sensor input signal SIN2-2 (BLOCK 155). The first control unit 11 controls the first pump 9 and the second pump 27 to achieve target operating pressure in the process chamber 5 (BLOCK 160). The first control unit 11 continues to control operation of the first pump 9 and the second pump 27 to maintain the target operating pressure (BLOCK 165). The first control unit 11 implements a shut-down procedure (BLOCK 170). The first control unit 11 may optionally output a shut-down signal to the second pump 27. The pump apparatus 3 is deactivated to finish the process.

[0087] The pump apparatus 3 has been described herein as comprising an input device 29 to provide a human machine interface. The key components of the vacuum system 1, such as the first pump 7 and the second pump 9, can be configured, controlled, and monitored using the input device 29. It will be understood that the pump apparatus 3 may comprise more than one input device 29. At least in certain embodiments, the pump apparatus 3 may support one or more interfaces which may be disposed locally (optionally integrated into the pump apparatus 3); or disposed remotely, for example connected over a network. The first control unit 11 can be configured to enable access over the internet, for example to enable remote (cloud-based) functions, including one or more of configuring, controlling and monitoring the pump apparatus 3. The other input devices 29 may provide one or more of the functions provided by the input device 29, for example to enable the pump system 1 to be monitored and/or controlled.

[0088] The pump apparatus 3 may optionally comprise a wireless communication module, such as Bluetooth (RTM). The wireless communication module may, for example, enable an external computational device (not shown) to communicate with the first control unit 11 over a wireless connection. The computational device may, for example, comprise one or more of the following: a cellular telephone, a tablet computer, a personal computer, or a laptop computer. A compatible application may be pre-installed on the computational device. Alternatively, or in addition, communication may be implemented via a web-browser, for example to establish communication with a web server associated with the first control unit 11. The computational device may communicate with the first control unit 11 using appropriate software, for example to communicate with the first pump 9 and/or the second pump 27 via protocols such as Modbus/TCP or MQTT.

[0089] The pump apparatus 3 may optionally comprise a network port to establish a wired connection to one or more other computational devices. For example, the network port may comprise an Ethernet port. The external computational device may be connected to the pump apparatus 3 to communicate with the first control unit 11 using a protocol such as Modbus/TCP; MQTT or OPCUA or a proprietary protocol. The first control unit 11 may be configured to be connected to an external Fieldbus connected device. The Fieldbus device may communicate with the first control unit 11 via protocols such as EtherCAT, Ethernet/IP and Profinet. Other protocols are also contemplated. The first control unit 11 may optionally be configured to connect to an external RS232/485 connected device for communication with the first control unit 11. The communication may be established using any suitable protocol, such as Modbus/RTU or a proprietary protocol. The pump apparatus 3 may optionally comprise a Universal Serial Bus (USB) port for connection to an external USB connected device.

[0090] It will be appreciated that various modifications may be made to the embodiment(s) described herein without departing from the scope of the appended claims.

[0091] Although elements have been shown or described as separate embodiments above, portions of each embodiment may be combined with all or part of other embodiments described above.

[0092] Although the subject matter has been described in language specific to structural features and/or methodological acts, it is to be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are described as example forms of implementing the claims.