Systems and method for monitoring three-dimensional printing
10449721 ยท 2019-10-22
Assignee
Inventors
Cpc classification
B29C64/386
PERFORMING OPERATIONS; TRANSPORTING
B33Y30/00
PERFORMING OPERATIONS; TRANSPORTING
B33Y50/00
PERFORMING OPERATIONS; TRANSPORTING
C04B2235/6026
CHEMISTRY; METALLURGY
B22F10/18
PERFORMING OPERATIONS; TRANSPORTING
G05B19/4099
PHYSICS
B22F10/28
PERFORMING OPERATIONS; TRANSPORTING
B22F10/22
PERFORMING OPERATIONS; TRANSPORTING
B22F10/25
PERFORMING OPERATIONS; TRANSPORTING
B28B17/0072
PERFORMING OPERATIONS; TRANSPORTING
B28B1/001
PERFORMING OPERATIONS; TRANSPORTING
B22F12/90
PERFORMING OPERATIONS; TRANSPORTING
B33Y70/10
PERFORMING OPERATIONS; TRANSPORTING
Y02P10/25
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
H01L21/00
ELECTRICITY
B28B17/00
PERFORMING OPERATIONS; TRANSPORTING
B33Y30/00
PERFORMING OPERATIONS; TRANSPORTING
G05B19/4099
PHYSICS
B22F3/00
PERFORMING OPERATIONS; TRANSPORTING
B33Y50/00
PERFORMING OPERATIONS; TRANSPORTING
Abstract
This invention provides systems and method for monitoring three-dimensional printing of printing material. A system comprises two coplanar and electrically conductive electrodes and a substrate, which provides a printing surface. The proximate edges of the electrodes, which are on the surface, are separate by a distance ranging from 5 mm to 300 mm. Each electrode is smaller in area than the substrate. The system also comprises a plurality of layers, which are formed layer-by-layer by the printing, and are derived from the printing material. The electrodes are electrically oppositely charged, as enabled by an alternating electric current between the two electrodes. The current partly flows in the layers. The two electrodes exhibit between them a capacitance ranging from 0.1 pF to 10 nF.
Claims
1. A system for monitoring three-dimensional printing of printing material, said system comprising two coplanar electrodes, said electrodes being electrically conductive, said system also comprising substrate, said substrate providing a surface on which said printing occurs, said electrodes being positioned on said substrate, said electrodes exhibiting proximate edges, said edges being separate from one another by a distance, said distance ranging from 5 mm to 300 mm, each of said electrodes being smaller in area than said substrate, said system also comprising a plurality of layers, said layers being derived from said printing material, said layers being formed layer-by-layer on said substrate by said printing, said layers being positioned in a region, said region extending from the location of one said edge to the location of the other said edge, said two electrodes being electrically oppositely charged, said charge being enabled by an alternating electric current, said alternating electric current flowing between said two electrodes, said alternating electric current partly flowing in said layers, said two electrodes exhibiting a capacitance between them, said capacitance ranging from 0.1 pF to 10 nF.
2. The system of claim 1, wherein said layers comprise material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, ceramic, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, ceramic-based material, ceramic-matrix composite, cement-based material, cement paste, cement mortar, concrete, polymer, polymer-based material, polymer-matrix composite, thermosetting polymer, thermoplastic polymer, biopolymer, photopolymer, organic-based material, and combinations thereof.
3. The system of claim 1, wherein said substrate comprises material selected from the group consisting of: ceramic, ceramic-based material, ceramic-matrix composite, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, cement-based material, cement paste, cement mortar, concrete, polymer, polymer-based material, polymer-matrix composite, organic-based material, and combinations thereof.
4. The system of claim 1, wherein said electrodes comprise material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, electrically conductive polymer, and combinations thereof.
5. The system of claim 1, wherein said two electrodes are the same in composition.
6. The system of claim 1, wherein said two electrodes are electrically connected, said electrical connection being positioned on said substrate, and said electrical connection providing an exterior surface on which said printing occurs.
7. A system for monitoring three-dimensional printing of printing material, said system comprising two coplanar electrodes, said electrodes being electrically conductive, said system also comprising substrate, said substrate providing a surface on which said printing occurs, said electrodes being positioned on said substrate, said electrodes exhibiting proximate edges, said edges being separate from one another by a distance, each of said electrodes being smaller in area than said substrate, said system also comprising a plurality of layers, said layers being derived from said printing material, said layers being material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, and combinations thereof, said layers being formed layer-by-layer on said substrate by said printing, said layers being positioned in a region, said region extending from the location of one said edge to the location of the other said edge, said two electrodes being electrically oppositely charged, said charge being enabled by an alternating electric current, said alternating electric current flowing from one electrode to the other electrode, said alternating electric current partly flowing in said layers, said two electrodes exhibiting a capacitance between them, said capacitance ranging from 0.1 pF to 10 nF.
8. The system of claim 7, wherein said distance ranges from 5 mm to 300 mm.
9. The system of claim 7, wherein said two electrodes are electrically connected, said electrical connection being positioned on said substrate, said electrical connection providing an exterior surface on which said printing occurs, said electrical connection comprising material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, and combinations thereof, said electrical connection extending the distance between said two proximate edges.
10. The system of claim 7, wherein said two electrodes are electrically connected, said electrical connection comprising material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, and combinations thereof, said electrical connection extending the distance between said two proximate edges, a dielectric film being positioned between said electrical connection and at least one of said electrodes, said dielectric film exhibiting electrical resistance.
11. The system of claim 7, wherein said substrate comprises material selected from the group consisting of: ceramic, ceramic-based material, ceramic-matrix composite, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, and combinations thereof.
12. The system of claim 7, wherein said electrodes comprise material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, and combinations thereof.
13. The system of claim 7, wherein said two electrodes are the same in composition.
14. A method of monitoring the three-dimensional printing of printing material, said method comprising (a) positioning two coplanar electrodes on a substrate, said electrodes being electrically conductive, said electrodes exhibiting proximate edges, said edges being separate from one another by a distance, said electrodes being smaller in area than said substrate, said substrate providing a surface on which said printing occurs, said printing involving layer-by-layer formation of a plurality of layers on said substrate, said layers being derived from said printing material, said layers being positioned in a region, said region extending from the location of one said edge to the location of the other said edge, said electrodes being electrically oppositely charged, said charge being enabled by an alternating electric current, said alternating electric current flowing from one electrode to the other electrode, said alternating electric current partly flowing in said layers, and (b) measuring the capacitance between said two electrodes.
15. The method of claim 14, wherein said distance ranges from 5 mm to 300 mm.
16. The method of claim 14, wherein said two electrodes are the same in composition.
17. The method of claim 14, wherein each of said electrodes comprises material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, electrically conductive polymer, and combinations thereof.
18. The method of claim 14, wherein said substrate comprises material selected from the group consisting of: ceramic, ceramic-based material, ceramic-matrix composite, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, cement-based material, cement paste, cement mortar, concrete, polymer, polymer-based material, polymer-matrix composite, organic-based material, and combinations thereof.
19. The method of claim 14, wherein said layers comprise material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, ceramic, ceramic-based material, ceramic-matrix composite, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, cement-based material, cement paste, cement mortar, concrete, polymer, polymer-based material, polymer-matrix composite, thermosetting polymer, thermoplastic polymer, biopolymer, photopolymer, organic-based material, and combinations thereof.
20. The method of claim 14, wherein said two electrodes are electrically connected, said electrical connection being positioned on said substrate, and said electrical connection providing an exterior surface on which said printing occurs.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DETAILED DESCRIPTION OF THE INVENTION
(22) This invention provides systems for monitoring the three-dimensional printing, including a system for monitoring the three-dimensional printing of metal-based materials. The invention also provides a method of monitoring three-dimensional printing.
(23) This invention provides a system for monitoring the three-dimensional printing of printing material. This system (illustrated in
(24) The layers (15) are preferably selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, ceramic, ceramic-based material, ceramic-matrix composite, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, cement-based material, cement paste, cement mortar, concrete, polymer, polymer-based material, polymer-matrix composite, thermosetting polymer, thermoplastic polymer, biopolymer, photopolymer, organic-based material, and combinations thereof.
(25) The substrate (12) preferably comprises material selected from the group consisting of: ceramic, ceramic-based material, ceramic-matrix composite, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, polymer, polymer-based material, polymer-matrix composite, organic-based material, cement-based material, cement paste, cement mortar, concrete, and combinations thereof. The two electrodes (10 and 11) are preferably essentially the same in composition and preferably comprise material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, electrically conductive polymer, and combinations thereof. The electrodes (10 and 11) are preferably electrically connected, the electrical connection (16) being positioned on the substrate (12), being in the plane of said substrate (12), and providing an exterior surface on which said printing occurs; the electrical connection (16) is preferably more electrically conductive than the substrate.
(26) This invention also provides a system for monitoring three-dimensional printing of printing material. The system (as illustrated in
(27) The distance mentioned in the last paragraph preferably ranges from 5 mm to 300 mm. The electrical connection (16) preferably comprises material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, and combinations thereof. The electrical connection extends essentially the distance between said two proximate edges (18 and 19); a dielectric film (18 and/or 19), which exhibits substantial electrical resistance, is preferably positioned between the electrical connection and at least one of the electrodes (10 and 11). The substrate (12) preferably comprises material selected from the group consisting of: ceramic, ceramic-based material, ceramic-matrix composite, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, and combinations thereof. The two electrodes (10 and 11) preferably comprise material selected from the group consisting of: metal, metal-based material, metal alloy, metal-matrix composite, aluminum, copper, nickel, titanium, steel, and combinations thereof, and are preferably essentially the same in composition.
(28) The dielectric film (18 and/or 19) preferably has thickness less than 200 m. In case of printing that involves elevated temperatures (as in the case of typical metal printing), the dielectric film should be a material that can withstand the elevated temperatures. Examples of materials that can withstand the elevated temperatures are ceramic fiber mats, ceramic sheets, and ceramic fabric.
(29) This invention also provides a method of monitoring three-dimensional printing of printing material. This method comprises as the first step positioning two essentially coplanar electrodes (10 and 11) on a substrate (12). The electrodes (10 and 11) are electrically conductive. The proximate edges (18 and 19) of the electrodes (10 and 11) are essentially parallel and are separate from one another by a distance. Each of said electrodes (10 and 11) is substantially smaller in area than said substrate (12), which provides a surface on which the printing occurs. The substrate (12) is substantially electrically non-conductive. The printing involves layer-by-layer formation of a plurality of layers (15) on the substrate (12). The layers (15) are derived from the printing material, and are positioned in a region, which extends in the direction essentially perpendicular to said edges from the location of one said edge (18) to the location of the other said edge (19) essentially in the plane of the surface. The electrodes (10 and 11) are electrically oppositely charged, as enabled by an alternating electric current, which flows between said two electrodes (10 and 11). The alternating electric current partly flows in the layers (15). The method also comprises as the second step measuring the capacitance between the two electrodes (10 and 11).
(30) The distance mentioned in the last paragraph preferably ranges from 5 mm to 300 mm. The two electrodes (10 and 11) are preferably essentially the same in composition and preferably comprise material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, electrically conductive polymer, and combinations thereof. The substrate (12) preferably comprises material selected from the group consisting of: ceramic, ceramic-based material, ceramic-matrix composite, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, cement-based material, cement paste, cement mortar, concrete, polymer, polymer-based material, polymer-matrix composite, organic-based material, and combinations thereof. The layers (15) preferably comprise material selected from the group consisting of: metal, metal alloy, metal-based material, metal-matrix composite, aluminum, copper, nickel, titanium, steel, ceramic, ceramic-based material, ceramic-matrix composite, aluminum oxide, aluminum nitride, silicon carbide, silicon dioxide, cement-based material, cement paste, cement mortar, concrete, polymer, polymer-based material, polymer-matrix composite, thermosetting polymer, thermoplastic polymer, biopolymer, photopolymer, organic-based material, and combinations thereof. The two electrodes (10 and 11) are preferably electrically connected, with the electrical connection (16) being positioned on the substrate (12), being in the plane of the substrate (12), and providing an exterior surface on which the printing occurs; this electrical connection (16) is preferably more electrically conductive than the substrate.
(31) This invention provides a novel technique of 3D printing monitoring. The technique involves electrical measurement in the form of capacitance measurement. The installation of devices in the printer is not necessary. Only electrodes need to be placed on the substrate (also known as the build plate).
(32) The electric field extending from one electrode to the other electrode spreads to the regions beyond the region between the two electrodes, thus enabling the monitoring of printed layers in the region between the electrodes as well as the regions in the vicinity of the electrodes. As illustrated in
(33) Relevant to this invention are a wide variety of 3D printing methods, which include Material Jetting, 3D Inkjet Printing (3DP), Polyjet Printing (MJP), Material Extrusion, Directed Energy Deposition (DED), Laser Metal Deposition (LMD), metal-wire-based Electron Beam Melting (EBM), and Fused Deposition Modelling (FDM).
EXAMPLES
Example 1
(34) The 3D printing monitoring is shown by laboratory simulation for up to 20 layers (consolidated by a pressure of 2.71 kPa in the laboratory simulation) and for fractional layers down to of a layer. The method involves placing two copper electrodes on the substrate used for printing and measuring the capacitance between the two electrodes using an LCR meter at 2.000 kHz. The AC voltage between the two electrodes is 1.000 V.
(35) The capacitance increases with increasing pressure applied on the electrodes and levels off as the pressure increases. Therefore, a chosen adequate pressure is applied on each copper electrode in order to achieve a leveled-off high value of the capacitance. The pressure is 2.77 kPa and 30.12 kPa for polymer-based material printing and metal-based material (aluminum) printing, respectively. The capacitance is measured both for the bare substrate and for the substrate with the printed layer(s) on it.
(36) In case of the printing of a metal-based material, the demonstration involves aluminum layers (16 m thick for each layer) on an aluminum oxide substrate. The monitoring is effective for electrode spacing up to 76 mm.
(37) In case of the printing of a polymer-based material, the demonstration involves cellulosic paper layers (99 m thick for each layer) on a cellulosic paper substrate. The presence of slots in the cellulosic paper substrate reduces the contribution of the substrate to the measured capacitance.
(38) The fractional change in capacitance per layer is up to 0.41 and 0.0140 for polymer printing and aluminum printing, respectively. For polymer printing on a slotted cellulosic paper substrate, the capacitance of the region between the two electrodes is 1.65 and 9.48 pF for 0 and 10 layers, respectively. For aluminum printing on aluminum oxide, the capacitance of the region between the two electrodes is 15.55 and 25.65 pF for 0 and 10 layers, respectively.
(39) The capacitance method is also effective for the detection of defects in the printed layer, as shown for aluminum printing on aluminum oxide. The capacitance decreases monotonically with increasing amount of defects. The sensitivity for defect detection is enhanced by adhering the ends of the aluminum layer closest to the substrate to the copper electrodes, so as to promote the current through this aluminum layer, and hence also promoting the current through the layers above this aluminum layer.
Example 2
(40) The laboratory simulation of 3D printing involves layer-by-layer stacking of a material in the form of a thin sheet, with the stack being built on the surface of a substrate, and measuring the in-plane capacitance (i.e., the capacitance in the plane of the surface) of the stack using essentially coplanar copper electrodes that are on the substrate away from the stack.
(41) Four configurations are used. Configuration I (
(42) The stack consists of various numbers of layers that range from 1 to 20. In case of a single layer, various fractions of a layer are used, such that each fractional layer is rectangular, centered between the two electrodes, and parallel to the proximate edges of the electrodes.
(43) In configurations I and II, ordinary commercial writing paper (cellulose fiber paper) of thickness 98.70.3 m (as obtained by measuring the thickness of a stack of 10 sheets of the paper and dividing this thickness by 10) constitutes the thin sheet (layer) used to form the stack for the simulation of layer-by-layer printing of a polymer-based material. The paper is used both as the substrate and the layers in the layer-by-layer printing (
(44) In configurations I and II, the stack (area=27.0925.42 mm.sup.2=688.63 mm.sup.2) is positioned and centered between the two electrodes, each of size 25.4225.42 mm (
(45) In configuration III, aluminum foil of thickness 16.40.1 m constitutes the thin sheet (layer) used to form the stack for the simulation of layer-by-layer metal printing. Aluminum oxide is used as the substrate (
(46) In configuration III (33), the stack (area=25.50 mm25.50 mm=650.25 mm.sup.2) is positioned to cover the entirety of region A, B or C, each of size 25.4225.42 mm (
(47) Similarly, 55, 77 and 99 arrangements are made, as illustrated in
(48) In order to test the effectiveness of the monitoring method of this invention for the detection of defects in a 25 mm25 mm square specimen, an aluminum foil (a single layer) is punctured with through holes (made by manual penetration using a commercial thumbtack) placed at different selected locations on the specimen (
(49) Configuration IV, as illustrated in
(50) A known metal weight (electrically insulated) is placed on top of each copper electrode in order to provide an adequate electrical contact between the electrode and the specimen. This weight is determined by measuring the capacitance vs. pressure. The capacitance increases with increasing pressure, until it levels off, as shown in
(51) In all four configurations (I, II, III and IV), by using a known weight, a pressure of 2.71 kPa is applied to the stack in the direction perpendicular to the layers in the stack in order to consolidate the stack. Only the part of the substrate directly beneath the stack receives this pressure. The weight applied on a fractional layer is proportionally reduced, so that the pressure is kept the same, regardless of the area of the fractional layer.
(52) The capacitance is measured using a precision LCR meter (Instek LCR-816 High Precision LCR Meter, 100 Hz-2 kHz). The frequency used is 2.000 kHz. The voltage is 1.000 V. The capacitance is that for the equivalent electrical circuit of a capacitor and resistor in series. Measurement of the capacitance is conducted firstly on the bare substrate and then conducted in the order of increasing number of layers in the stack and in the order of decreasing fraction of a layer in case of a single layer.
Example 3
(53) Four configurations (I, II, III and IV) are used in the laboratory simulation of the layer-by-layer monitoring of 3D printing. The four configurations are described in Example 2.
(54) In case of configuration I (with the substrate in the form of cellulosic paper without slots, as described in Example 2) and configuration II (with the substrate in the form of cellulosic paper with slots, as described in Example 2), the capacitance increases monotonically with increasing number of layers, including fractional numbers of layers down to , thus indicating the effectiveness of the layer-by-layer monitoring (
(55) In case of whole numbers of layers,
(56) In case of configuration III (printing aluminum on aluminum oxide, 33 (i.e., a set-up with 3 squares by 3 squares, as described in Example 2), the layer-by-layer monitoring is also effective; including that of fractions of a single layer down to (
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(58) TABLE-US-00001 TABLE 1 Results of laboratory simulation of capacitance-based layer-by-layer 3D printing monitoring. Regions A, B and C are defined in FIG. 7(a). Fractional change in Capacitance (pF) capacitance.sup. Correlation Configuration Location 0 layer 10 layers 1 layer 10 layers coefficient I* A 1.91 9.33 0.96 3.91 0.989 II.sup. A 1.65 9.48 1.37 4.75 0.978 III.sup. A 15.55 25.65 0.18 0.65 0.977 III.sup. B 15.55 26.01 0.14 0.67 0.994 III.sup. C 15.55 18.21 0.04 0.17 0.910 *Paper on paper without slots. .sup.Paper on paper with slots. .sup.Aluminum on aluminum oxide (3 3) (i.e., a set-up with 3 squares by 3 squares). .sup.Relative to the case of 0 (zero) layer.
(59) The correlation coefficient in the plot of capacitance (y value) vs. the number of layers (x value) is obtained by using the equation
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where x and y are the averages of the x values and they values. The higher is the correlation coefficient, the less is the data scatter associated with the curve of capacitance vs. the number of layers.
(61) As shown in Table 1, the correlation coefficient is similarly high for location A of all three configurations (I, II and III). For configuration III, the coefficient is similarly high for locations A and B, but is lower for location C.
(62) Among configurations I, II and III, Table 1 shows that configuration II gives the highest fractional change in capacitance, whereas configuration III gives the lowest fractional change. On the other hand, configuration III gives the highest capacitance, whereas both configurations I and II give similarly low values of the capacitance. The high capacitance for configuration III is attributed to the conductivity of aluminum and the consequent substantial current that can flow through the aluminum. In contrast, the cellulosic paper in configurations I and II is essentially electrically non-conductive. The high fractional change in capacitance for configurations I and II is due to the low value of the capacitance for the bare substrate (0 layer). The low fractional change for configuration III is due to the high value of the capacitance for the bare substrate. In practice, both a high fractional change in capacitance and a high capacitance are desirable.
(63) Table 2 shows that the capacitance at 10 layers tends to be relatively low for location C of configuration II and III (substrate arrangement 33). For configuration III (substrate arrangement 55), the capacitance at 10 layers tends to decrease in the order from location A to location H. The fractional change in capacitance per layer, as obtained from the gradient of the best-fit straight line for the curve of fractional change in capacitance vs. the number of layers, is also shown in Table 2. This quantity shows the dependence on the location more clearly than the capacitance at 10 layers.
(64) TABLE-US-00002 TABLE 2 Results of testing conducted for the stack of layers positioned at different locations relative to the electrodes. The fractional change in capacitance per layer is obtained from the gradient of the best-fit line obtained for the specific set of data. Fractional Capacitance change in at 10 capacitance/ Correlation Configuration Location layers (pF) layer coefficient II A 4.750 0.3600 0.978 II B 9.090 0.4100 0.985 II C 2.630 0.0420 0.804 III (3 3) A 25.65 0.0590 0.977 III (3 3) B 26.01 0.0630 0.994 III (3 3) C 18.21 0.0160 0.910 III (5 5) A 9.190 0.0140 0.998 III (5 5) B 9.080 0.0130 0.998 III (5 5) C 8.640 0.0075 0.998 III (5 5) D 9.060 0.0130 0.999 III (5 5) E 8.920 0.0110 0.999 III (5 5) F 8.330 0.0036 0.958 III (5 5) G 8.240 0.0024 0.911 III (5 5) H 8.230 0.0022 0.919
(65) The correlation coefficient depends on the location, as shown in Table 2. For configurations II and III (substrate arrangement 33), the coefficient is high for locations A and B and is lower for location C. For configuration III (substrate arrangement 55), the coefficient is high for locations A, B, C, D and E, is lower for location F, and even lower for locations G and H. Nevertheless, the sensing is effective for all of the locations listed in Table 2.
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(67) TABLE-US-00003 TABLE 3 Results of testing conducted for location A for substrate arrangements 3 3, 5 5, 7 7 and 9 9 and configuration III. Fractional increase Substrate Capacitance (pF) in capacitance* Correlation arrangement 0 layer 10 layers 1 layer 10 layers coefficient 3 3 15.55 25.65 0.18 0.65 0.977 5 5 8.02 9.19 0.01 0.15 0.998 7 7 6.28 6.41 0.01 0.02 0.674 9 9 1.07 1.19 0.02 0.11 0.283 *Relative to the case of zero (0) layer.
(68) Concerning the detection of defects,
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(70) Although preferred embodiments have been depicted and described in detail herein, it will be apparent to those skilled in the relevant art that various additions, substitutions, modifications and the like can be made without departing from the spirit of the invention and these are therefore considered to be within the scope of the invention as defined in the claims which follow.