ZnO PHOTODETECTOR
20190319142 ยท 2019-10-17
Assignee
Inventors
- Jong-in Hahm (Washington, DC, US)
- Daniel S. Choi (Ellicott City, MD, US)
- Matthew Hansen (Waterford, VA, US)
- Edward Van Keuren (Washington, DC, US)
Cpc classification
H01L31/0296
ELECTRICITY
H01L31/09
ELECTRICITY
H01L31/035227
ELECTRICITY
H01L31/0232
ELECTRICITY
B82Y30/00
PERFORMING OPERATIONS; TRANSPORTING
B82Y40/00
PERFORMING OPERATIONS; TRANSPORTING
B82Y15/00
PERFORMING OPERATIONS; TRANSPORTING
H01L31/1836
ELECTRICITY
International classification
H01L31/0384
ELECTRICITY
H01L31/0296
ELECTRICITY
H01L31/18
ELECTRICITY
H01L31/09
ELECTRICITY
Abstract
A device comprising: a plurality of gold nanoparticles coupled with an intertwined ZnO nanorods network, wherein the device is configured for detecting light in the visible wavelength.
Claims
1. A device comprising: a plurality of gold nanoparticles coupled with an intertwined ZnO nanorods network, wherein the device is configured for detecting light in the visible wavelength.
2. The device of claim 1, wherein the nanorods have a diameter of 305 to 395 nm.
3. The device of claim 1, wherein the nanorods have an aspect ratio of greater than 15:1.
4. The device of claim 1, wherein the nanorods have a length greater than 5 m.
5. The device of claim 1, wherein the gold nanoparticles have an average diameter of 10 nm.
6. The device of claim 1, wherein the gold nanoparticles are applied onto the intertwined ZnO nanorods network.
7. The device of claim 1, wherein the gold nanoparticles are embedded in the intertwined ZnO nanorods network.
8. The device of claim 1, further comprising a support on which the intertwined ZnO nanorods network is disposed, and at least one electrical contact coupled to the intertwined ZnO nanorods network.
9. The device of claim 8, wherein the support comprises Si.
10. The device of claim 8, wherein the contact comprises Ag.
11. The device of claim 1, wherein the ZnO is the form of wurtzite ZnO crystals.
12. The device of claim 1, wherein the gold nanoparticles have a coverage density of 210.sup.11 nanoparticles/cm.sup.2 to 710.sup.11 nanoparticles/cm.sup.2.
13. The device of claim 1, wherein the gold nanoparticles have an average diameter of 2 nm to 50 nm.
14. A device comprising: a plurality of gold nanoparticles deposited on a ZnO nanorods network, wherein the nanorods have an aspect ratio of greater than 15:1, and the gold nanoparticles have an average diameter of 10 nm.
15. A method for making a visible light photodetector, comprising: depositing a plurality of gold nanoparticles onto an intertwined ZnO nanorods network via solution processing.
16. The method of claim 15, further comprising growing the ZnO nanorods network on a silicon wafer via chemical vapor deposition.
17. The method of claim 16, further comprising placing at least one electrical contact onto the ZnO nanorods network.
18. The method of claim 15, wherein the ZnO nanorods have an aspect ratio of greater than 15:1.
19. A method for photodetecting light in the visible region of electromagnetic spectrum, comprising illuminating a photodetector comprising a plurality of gold nanoparticles coupled with an intertwined ZnO nanorods network, and measuring at least one of a resulting photovoltage or a resulting photocurrent.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0010]
[0011]
[0012]
[0013]
[0014]
[0015]
[0016]
DETAILED DESCRIPTION
[0017] Disclosed herein is a visible light photodetector operating via a photothermoelectrical mechanism. In certain embodiments, the photodetector disclosed herein does not include any electrolyte. In certain embodiments, the photodetector disclosed herein does not include any reference and/or counter electrodes. The photodetector can function, for example, as a position-dependent sensor for visible light.
[0018] In particular, disclosed herein are significantly enhanced, photoresponse behaviors of AuNP-coupled ZnO nanorod (NR) network devices in the visible wavelength range. The resulting AuNP-coupled ZnO NR devices can produce a substantial photovoltage (voltage responsivity) 11 mV (7.57 V/W) and a photocurrent (current responsivity) of 16 mA (0.104 A/W) at a 10 V bias under 543 nm wavelength illumination with a AuNP coverage density of 4.810.sup.11/cm.sup.2. These values are comparable to, if not far exceeding, the photoresponse capacity of most commercial PDs as well as recently reported, AuNP-coupled ZnO devices functioning at visible wavelengths. In addition, the nature and degree of the photoresponsivity enhancement are systematically elucidated by investigating their light-triggered electrical signals under varying incident wavelengths, AuNP amounts, and illumination positions. We discuss a possible photoconduction mechanism of our AuNP-coupled ZnO NR PDs and the origins of the high photoresponsivity. Specifically related to the AuNP amount-dependent photoresponse behaviors, the nanoparticle density yielding photoresponse maxima are explained as the interplay between localized surface plasmon resonance, plasmonic heating, and scattering in our photothermoelectric effect-driven device. We show that the AuNP-coupled ZnO NR PDs can be constructed via a straightforward method without the need for ultrahigh vacuum, sputtering procedures, or photo/electron-beam lithographic tools. Hence, the approach demonstrated herein may serve as a convenient and viable means to advance the current state of ZnO-based PDs for operation in the visible spectral range with greatly increased photoresponsivity. By taking advantage of the well-defined plasmon characteristics specific to the chemical make-ups, sizes, and shapes of metallic NPs, the demonstrated strategy can be further applied to effectively amplify or tune the visible photoresponsivity of other similar NR-based PDs whose photodetection capability has so far been explored largely for application in the UV region.
[0019] In certain embodiments, the nanorods have an aspect ratio of greater than 15:1. In certain embodiments, the nanorods have an aspect ratio of up to 100:1. In certain embodiments, the nanorods have a length greater than 5 m. In certain embodiments, the nanorods have a length up to 40 m. In certain embodiments, the nanorods have a diameter of 305 to 395 nm, more particularly 350 nm. As thin nanorods grow longer, they can tilt and lie toward the substrate, forming an intertwined network structure of nanorods. This lying tendency will be greater for longer and thinner rods. The resulting structure resembles a mesh structure due to the intertwined long thin nanorods. These mesh-like images can be best seen in
[0020] Various approaches have been taken to enhance the responsivity of ZnO-based devices in the visible wavelength region. A particularly promising modification scheme involves incorporating gold nanoparticles (AuNPs). Table 1 lists examples of AuNP-coupled ZnO systems in the literature, regardless of the ZnO material type and detection wavelength range used. As discussed earlier, UV is the dominant detection window even for those ZnO devices used in conjunction with AuNPs.
[0021] In addition, intricate multistep processes were often required for material preparation as well as device fabrication, including the use of high vacuum, sputtering apparatus, and photo/electron-beam lithographic tools.
TABLE-US-00001 TABLE 1 Various AuNP-coupled ZnO systems in the literature are summarized for their detection wavelength range, material type/synthetic need, fabrication requirement, and photo-induced signal. Device Fabrication i) ZnO synthesis: sputtering/ pulsed laser deposition PD Output Operation Material Type ii) Au incorporation: sputtering Correlated with Wavelength i) ZnO iii) Contact definition: i) AuNP amounts range ii) Au photolithography/e-beam lithography ii) Beam position Other Ref. UV i) single i) No i) No I.sub.light = 1 A at 5 V, [11] nanowire ii) No ii) No 350 nm ii) 30 nm iii) Yes AuNP UV i) thin film i) Yes i) No I.sub.light = 1.2 A at 5 V, [19] ii) ~20 nm ii) ii) No 365 nm thin layer iii) Yes UV i) thin film i) Yes i) No predominant enhancement [20] ii) ~10 nm ii) Yes ii) No mechanism explained by thin layer iii) No, thermal welding surface states and interface states, not by surface plasmon UV i) NR arrays i) No i) No photovoltaic cell with [21] VIS ii) 20-30 nm ii) No ii) not applicable the use of a N719 dye AuNP iii) not applicable along with Au UV i) thin film i) Yes i) Yes, with photoluminescence study [22] ii) 10-120 nm ii) Yes increasing Au film under 385 nm thin layer iii) not applicable thickness up to 120 No enhancement was nm observed with Au. ii) No Enhancement with Ag. UV i) thin film i) No i) No Photocurrent [23] VIS ii) 10-50 nm ii) No ii) No responsivity = 0.35 AuNP iii) Yes mA/W at 5 V, 550 nm UV i & ii) ~15 i) Yes i) No I.sub.light = 2.3 mA at 6 V [24] nm thick co- ii) Yes ii) No with 30 W Jenalux20 sputtered iii) Yes light source AuZnO thin film UV i) thin film i) No i) No I.sub.light = 2.9 A at 5 V, [25] ii) 30-40 nm ii) No ii) No 365 nm AuNP iii) Yes VIS i) thin film i) Yes i) No Photocurrent [13] ii) 10-20 nm ii) Yes ii) No responsivity = ~4 A/W AuNP iii) Yes at 10 V, 550 nm VIS i) NR mesh i) No i) Yes Photocurrent Disclosed ii) ~10 nm ii) No ii) Yes responsivity = 104 mA/W herein AuNP iii) No at 10 V, 543 nm
[0022] Disclosed herein is a ZnO NR network-based PD interfaced with AuNP, capable of producing a significant enhancement in the PV and photocurrent (PC) outputs which are comparable to, if not far exceeding, the photoresponse capacity of most commercial PDs as well as recently reported ZnO NR-based devices functioning at visible wavelengths. We also investigate the degree of the photoresponsivity enhancement under varying incident wavelengths, AuNP amounts, and illumination positions in order to provide insight into the basis for the different degrees of photoresponsivity enhancement and the optimization of the PDs to show the largest photoresponsivity. Our overall strategy for the PD device assembly is based on a straightforward and highly scalable approach utilizing as-synthesized AuNPs and ZnO NRs. The scheme bypasses the need for complicated processing steps, highly specialized instrumentation, and lithographic tools, which can be beneficial to attaining cost effectiveness and scalability. Coupled with the well-known wavelength tunability and versatility of plasmonic nanostructures, our AuNPZnO NRs architecture may offer a simple and viable means to achieve low-cost, high-performing PDs with spectral tunability in the visible range.
[0023] Illustrative embodiments are described below with reference to the following numbered clauses:
[0024] 1. A device comprising:
[0025] a plurality of gold nanoparticles coupled with an intertwined ZnO nanorods network, wherein the device is configured for detecting light in the visible wavelength.
[0026] 2. The device of clause 1, wherein the nanorods have a diameter of 305 to 395 nm.
[0027] 3. The device of clause 1 or 2, wherein the nanorods have an aspect ratio of greater than 15:1.
[0028] 4. The device of any one of clauses 1 to 3, wherein the nanorods have a length greater than 5 m.
[0029] 5. The device of any one of clauses 1 to 4, wherein gold nanoparticles have an average diameter of 10 nm.
[0030] 6. The device of any one of clauses 1 to 5, wherein the gold nanoparticles are applied onto the intertwined ZnO nanorods network.
[0031] 7. The device of any one of clauses 1 to 5, wherein the gold nanoparticles are embedded in the intertwined ZnO nanorods network.
[0032] 8. The device of any one of clauses 1 to 7, further comprising a support on which the intertwined ZnO nanorods network is disposed, and at least one electrical contact coupled to the intertwined ZnO nanorods network.
[0033] 9. A method for making a visible light photodetector, comprising:
[0034] depositing a plurality of gold nanoparticles onto an intertwined ZnO nanorods network via solution processing.
[0035] Experimental
[0036] ZnO NRs were grown on a Si wafer (Silicon Quest International Inc., Santa Clara, Calif.) via chemical vapor deposition (CVD) using a similar procedure as previously described. In brief, they were generated by using a 2:1 mixture of graphite and ZnO heated to 900 C. for 1 h under a constant flow of 100 standard cubic centimeters per minute of Ar. In certain embodiments, the ZnO NRs are substantially pure n-type ZnO. As-grown ZnO nanostructures form a thin layer of densely networked NRs on the Si support. In certain embodiments, the layer of NRs is 10 to 30 m deep. In certain embodiments, the NR network density is 10.sup.7 NRs/mm.sup.2. In other embodiments, Al.sub.2O.sub.3 could be used as a support substrate for direct growth of ZnO NRs used CVD. Alternatively, the NRs can be synthesized first on a Si wafer, sonicated off from the growth substrate, dispersed in ethanol, and then deposited onto any other substrate (e.g., flexible polymers, paper).
[0037] AuNPs were synthesized from the precursor solutions of 0.4 M cetyltrimethylammonium bromide (CTAB), 0.5886 mM chloroauric acid (HAuCl.sub.4), 1 M silver nitrate (AgNO.sub.3), 0.1 M ascorbic acid, and 0.01 M sodium borohydride (NaBH.sub.4). Under constant stirring at 1600 revolutions per minute (rpm), 5 mL of 0.4 M CTAB was added to 4.771 mL of DI water before introducing 17 L of 0.5886 M HAuCl.sub.4. Subsequent addition of 2 L of 1 M AgNO.sub.3 was followed by 200 L of 0.1 M ascorbic acid. Next, 10 L of 0.01 M NaBH.sub.4 was added and the combined solution was stirred for 2 h at 4 C. The resulting AuNP solution was centrifuged for 20 min at 8000 rpm and the supernatant was removed. Then, the residual precipitate was reconstituted in DI water. In certain embodiments, the AuNPs are substantially pure Au with a CTAB capping layer around each AuNP.
[0038] As-grown ZnO NRs and AuNPs as well as AuNP-deposited ZnO NRs were characterized by X-ray diffraction (XRD), UV-Vis spectrometry, attenuated total reflectance (ATR) Fourier transform infrared (FTIR) spectroscopy, and Raman spectroscopy. The XRD spectra of as-synthesized ZnO NRs were acquired with a Rigaku Ultima IV X-ray diffractometer (The Woodlands, Tex.), operated with an accelerating voltage of 45 kV, under Cu K radiation scanned in the range of 2=30-80 at a rate of 2 deg/min. The AuNP solution was characterized using an Agilent 8453 UV-Vis spectrometer. FTIR data were taken using an Agilent Technologies Cary 670 Spectrometer (Santa Clara, Calif.) with a home-built ATR attachment. Raman scattering data were acquired using a Horiba LabRam HR Evolution spectrometer (Edison, N.J.) with 532 nm incident laser excitation at 25 mW power. The incident light was introduced through a 100 objective with a numerical aperture value of 0.9. Raman signals were scanned in the wavenumber range of 50-600 cm.sup.1. The size and morphology of as-synthesized ZnO NRs were examined using a FEI/Philips XL 20 scanning electron microscope (SEM) operated at 20 kV.
[0039] AuNP-coupled ZnO NR PDs were fabricated by attaching two conductive Ag (EMS, Inc. Hatfield, Pa.) contacts directly on top of the as-grown ZnO NR network layer which served as electrodes for subsequent PV and PC measurements. In other embodiments, Pt, Ni, Ru, Pd, graphite or graphene could be used for the contacts. A predetermined volume and concentration of AuNP solution was added to the surface of the ZnO NRs network device. The deposition was done in aliquots sequentially after each cycle of photoresponse measurements. Four different lasers were used as monochromatic illumination sources. They were a 543 nm HeNe laser (Newport Corp., Santa Clara, Calif.), 635 nm and 785 nm diode lasers (Thorlabs, Inc., Newton, N.J.), and a 1520 nm HeNe laser (Newport Corp., Santa Clara, Calif.) with powers of 1.46, 2.16, 2.13, and 1 mW, respectively. The incident light was sent through an optical chopper (Thorlabs, Inc., Newton, N.J.) rotating with a frequency of 515 Hz to generate light-on and -off conditions at periodic time intervals. For electrical measurements, the device was placed in a dark housing with a small front aperture to introduce the incident light source while eliminating external optical and electrical noise. At the bottom center of the enclosure, a sample holder connected the two electrodes on the sample to a Rigol DS4022 200 MHz digital oscilloscope (Beaverton, Oreg.) through a BNC connector for PV measurements. PC measurements were performed by characterizing the current-voltage (I-V) responses while sweeping the bias voltage from 10 to +10 V. The measurements were carried out using a Keithley 2634B System SourceMeter (Cleveland, Ohio) coupled with Keithley TSP Express I-V Test software.
Results and Discussion
[0040]
[0041] The ATR FTIR spectra of ZnO NRs and AuNP-coupled ZnO NRs (AuNPZnO NRs) are displayed in
[0042]
[0043]
[0044] The photoresponse measurements of the AuNP-coupled ZnO NR PD were further extended to employ other incident wavelengths. In order to rule out any potential source of errors due to device variations, the PV responses were repeatedly measured on the same device under each incident wavelength, while gradually increasing the total AuNP amounts being loaded on the ZnO NR device.
[0045] To compare the PV values between the four laser lines after accounting for the differences in the laser power and beam size, the results in
[0046] Subsequently, the laser position dependence of the AuNP-coupled ZnO NR PDs was evaluated under the different illumination wavelengths. The PV responses of the AuNP-coupled ZnO NR PD were measured as a function of the laser position varying from the left (1) to the right (5) end of the device, as shown in the device schematic of
[0047] Similar observations have previously been made in the PV responses from PDs constructed from other single and ensemble forms of nanomaterials such as ITO NRs, MoS.sub.2, single-walled carbon nanotubes (SWCNTs), and graphene. In these systems, the position-dependent photoresponse mechanism was explained by light-induced temperature gradients which, in turn, produce a PV through photothermoelectric effect (PTE). Upon illumination, a net electrical current can flow from the hot side to the cold side of the locally heated device channel until the build-up of the electric field balances this current. When the laser spot is positioned close to a contact, the PV is expected to be largest since the highest net current is expected to flow from the hot side contact close to the laser spot to the other, cold side contact. As the laser spot is moved close to the center of the device, the current caused by the temperature gradient will flow from the hot middle region equally in both directions towards the two equivalently colder contacts, resulting in a smaller net PV. Therefore, for a symmetric device, PV should be zero when the laser is positioned in the middle. Our results shown in
[0048] Photocurrent (PC) measurements were carried out by sweeping the L-R voltage from 10 to 10 V, while keeping the laser beam maintained at the highest PV-yielding position of the device.
[0049] In our AuNP-coupled ZnO NR PD device, the maximum PC responsivity and EQE values (0.104 A/W, >25% at the bias voltage of 10 Vat 543 nm) were obtained as is without any attempts to vary contact choices or to align the NRs within the network, which makes this a highly promising system for achieving even higher sensitivity. These responsivity values are already at a level comparable to commercially available visible PDs (0.1-0.5 A/W at a similar bias and wavelength) and show a much improved response compared to that reported for AuNP-modified ZnO thin film structures built through elaborate fabrication procedures (0.004 mA/W at a 10V bias under 550 nm). In addition, the performance of our AuNP-coupled ZnO NR PD devices is highly effective (11 mV PV and 16 mA PC at a 10V bias under 543 nm with a very low laser power of 1.46 mW) relative to other visible ZnO PDs utilizing different chemical dopants and ZnO nanostructures. For instance, a Co-doped ZnO nanobelt PD was reported to produce a PV of less than 0.5 V under 550 nm and a PC of less than 2 A under 630 nm. An In.sub.2O.sub.3-sensitized ZnO nanoflower device was shown to yield a PC of 0.09 mA under 460 nm from a 500 W Xeon lamp at a bias of 10 V. For a ZnO nanowire-reduced graphene oxide hybrid film PD, a PV of 30 V was measured upon irradiation with 532 nm light at a power of 100 W.
[0050] As for the possible origin of the PC signal increase in our AuNP-coupled ZnO NR PD devices, both plasmonically generated carriers and plasmon heating may play a role. In previous studies examining increased PC signals in the presence of metal clusters under sub-bandgap illumination, the mechanism was explained by increased generation of electron-hole pairs via the presence of surface plasmon or interband transitions in metal, injection of photoexcited carriers formed within AuNPs into the semiconductor much like a conventional metal-semiconductor PD, and injection of plasmon-triggered carriers in AuNPs to the adjacent Schottky contact layer. Among these, most of the reported literature has attributed the enhanced visible light photoresponse of metal-semiconductor PDs to plasmon-aided electron carrier generation and its injection to the semiconductor channel. This explanation is consistent with our observation of the AuNP-coupled ZnO NR photoresponse which displayed the largest sensitivity for the incident wavelength closest to the LSPR of the AuNPs. We believe that another important factor, that of plasmonic heating, may also contribute to the photoconduction seen in our devices although this has not been widely explored yet as a part of the PD mechanisms. Localized plasmonic heating from the metal NPs may significantly influence the Schottky contact barrier height and carrier mobility. The temperature change due to plasmonic heating of AuNPs can be estimated by T=I.sub.0K.sub.absr.sub.0/4k.sub.inf where his the laser power density, K.sub.abs is the efficiency absorption factor for a particle of radius r.sub.0 calculated from Mie scattering theory, k.sub.inf is the coefficient of thermal conductivity of the surrounding medium at the macroscopic equilibrium temperature. Even at lower laser intensities of 10.sup.5 W/m.sup.2, very sharp rises in local temperature are expected for AuNPs. This plasmonic heating mechanism is also consistent with the photoresponse of our AuNP-coupled ZnO NR PDs measured as a function of the AuNP amount. At low levels of AuNP incorporation, the photoresponse signal is anticipated to rise due to faster carrier mobility and a larger photothermal gradient enabled by locally elevated temperature. As subsequent addition of AuNPs leads to continuously increasing particle size, the photothermal efficiency is expected to decline.sup.57 which, in turn, will yield a signal drop in PV and PC. The maximum photoresponse output will, therefore, be expected at an optimal loading level of AuNP which balances these two opposing trends arising from plasmon heating.
[0051] The incorporation of AuNPs onto the ZnO NR-based PDs led to a large increase in the PV and PC values, and this enhancement was found to be higher at an illumination wavelength closest to the SPR of the AuNPs and for laser beam positions away from the center of the active channel and nearer to a contact. In addition, the photoresponse increased with the amount of incorporated AuNPs up to a certain loading level beyond which subsequent AuNP addition led to a downward trend in photoresponse instead. A substantial PV output of 11 mV (PV responsivity of 7.57 V/W) was readily attained from the AuNP-coupled ZnO NR PD under 543 nm illumination. Without any attempts to vary contact choices or to align the ZnO NRs within the network, the PC responsivity of the AuNP-coupled ZnO NR PD was measured to be 0.104 A/W at a 10V bias under 543 nm. This response is comparable to or much greater than those from commercially available Si-based, and other plasmonically enhanced, ZnO-based architectures.
[0052] In view of the many possible embodiments to which the principles of the disclosed invention may be applied, it should be recognized that the illustrated embodiments are only preferred examples of the invention and should not be taken as limiting the scope of the invention.