Vertically die-stacked bonder and method using the same
10438917 ยท 2019-10-08
Assignee
Inventors
Cpc classification
H01L24/94
ELECTRICITY
H01L24/741
ELECTRICITY
H01L2224/75745
ELECTRICITY
H01L24/75
ELECTRICITY
H01L24/80
ELECTRICITY
International classification
Abstract
A vertically die-stacked bonder able to stack laterally dies one by one includes a self-elevating unit, a retrieval unit neighbored to the self-elevating unit, and a receiving unit neighbored to the retrieval unit. At least one die is located at the self-elevating unit. The self-elevating unit elevates one die by 90 degrees, so as to form a vertical state. The retrieval unit hands over the die in the vertical state to the receiving unit. The self-elevating unit then elevates another die by 90 degrees once again. The retrieval unit stacks laterally the another die in the vertical state to the previous die at the receiving unit. Thereupon, by stacking laterally the dies in the vertical state orderly, the speed of die stacking can be increased, the production costs can be reduced, and the productivity can be increased.
Claims
1. A vertically die-stacked bonder, comprising: a self-elevating unit; a retrieval unit, neighbored to the self-elevating unit; and a receiving unit, neighbored to the retrieval unit; wherein at least one die is located at the self-elevating unit, the self-elevating unit elevates one of the at least one die by 90 degrees so as to have the die into a vertical state, the retrieval unit moves the die in the vertical state to the receiving unit, the self-elevating unit elevates again another one of the at least one die by 90 degrees so as to have this another one die into the vertical state, and the retrieval unit stacks laterally this another one die in the vertical state to the die already in the vertical state at the receiving unit.
2. The vertically die-stacked bonder of claim 1, wherein the self-elevating unit has a self-elevating carrier and a self-elevating displacement module coupling the self-elevating carrier.
3. The vertically die-stacked bonder of claim 1, wherein the retrieval unit has at least two sucking modules and a rotational retrieval module, the at least two sucking modules being mounted at the rotational retrieval module.
4. The vertically die-stacked bonder of claim 1, wherein the receiving unit has a receiving carrier and a receiving displacement module, the receiving carrier being located at the receiving displacement module.
5. The vertically die-stacked bonder of claim 4, further including a first vision unit, the first vision unit being located under the retrieval unit and respective to the receiving carrier.
6. The vertically die-stacked bonder of claim 5, wherein the first vision unit aligns dies on the receiving carrier and on the retrieval unit.
7. The vertically die-stacked bonder of claim 4, further including a first vision unit, the first vision unit has an image-capturing module and a lens module, the lens module being located under the retrieval unit and respective to the receiving carrier, the image-capturing module being located above the retrieval unit and respective to the lens module.
8. The vertically die-stacked bonder of claim 7, wherein the first vision unit aligns dies on the receiving carrier and on the retrieval unit.
9. The vertically die-stacked bonder of claim 1, further including a second vision unit, the second vision unit being located above the self-elevating unit.
10. The vertically die-stacked bonder of claim 1, further including a supply unit and a third vision unit, the supply unit being neighbored to the self-elevating unit, the third vision unit being located above the supply unit.
11. The vertically die-stacked bonder of claim 10, wherein the supply unit has a carrier, at least one ejection pin and at least one supply-suck module, the carrier being neighbored to the self-elevating unit, the ejection pin being located in the carrier, the supply-suck module being located above the carrier.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The present invention will now be specified with reference to its preferred embodiment illustrated in the drawings, in which:
(2)
(3)
(4)
(5)
DESCRIPTION OF THE PREFERRED EMBODIMENT
(6) The invention disclosed herein is directed to a vertically die-stacked bonder and a method using the same. In the following description, numerous details are set forth in order to provide a thorough understanding of the present invention. It will be appreciated by one skilled in the art that variations of these specific details are possible while still achieving the results of the present invention. In other instance, well-known components are not described in detail in order not to unnecessarily obscure the present invention.
(7) Referring now to
(8) The self-elevating unit 10 has a self-elevating carrier 100 and a self-elevating displacement module 101, in which the self-elevating displacement module 101 is coupled with the self-elevating carrier 100.
(9) The retrieval unit 11 neighbored to the self-elevating unit 10 has at least two sucking modules 110 and a rotational retrieval module 111, in which the sucking modules 110 are individually mounted to the rotational retrieval module 111.
(10) The receiving unit 12 neighbors to the retrieval unit 11 has a receiving carrier 120 and a receiving displacement module 121, in which the receiving carrier 120 is located on the receiving displacement module 121.
(11) The first vision unit 13 is located under the retrieval unit 11 at a position respective to the receiving carrier 120.
(12) The second vision unit 14 is located above the self-elevating unit 10.
(13) The supply unit 16 neighbored to the self-elevating unit 10 has at least one supply-suck module 160, a carrier 161 and at least one ejection pin 162, in which the carrier 161 is to mount thereon at least one die 15, the ejection pin 162 is mounted inside the carrier 161 so as to eject the die 15 placed on the carrier 161, and the supply-suck module 160 is located above the carrier 161 so as to suck the die 15 on the carrier 161 and then displace the die 15 to the self-elevating unit 10.
(14) The third vision unit 17 is located above the carrier 161.
(15) Referring now to
(16) In this second embodiment, the self-elevating unit 20, the retrieval unit 21, the receiving unit 22, the second vision unit 24, the supply unit 26 and the third vision unit 27 are the same to those in the first embodiment, and thus details thereabout are omitted herein.
(17) The first vision unit 23 has a lens module 230 and an image-capturing module 231, in which the lens module 230 is located under the retrieval unit 21 at a position facing the receiving carrier 220, and the image-capturing module 231 is located above the retrieval unit 21 at a place opposing to the lens module 230 with respect to the retrieval unit 21.
(18) Referring now to
(19) Step S1: Provide a die, as shown in
(20) Step S2: Elevate the die into a vertical state. As shown in
(21) Step S3: Suck the die in the vertical state by the retrieval unit. The second vision unit 14 captures image information of the dies 15 on the self-elevating carrier 100, and then the image information is transmitted to the self-elevating displacement module 101 for compensating the position, such that the retrieval unit 11 can accurately fetch, by sucking, the die 15 that has been compensated in positioning and elevated into the vertical state. Then, the rotational retrieval module 111 rotates the sucking module 110 (having the die 15 already) to a position of the receiving unit 12.
(22) As shown in
(23) In addition, the first vision unit 13 can simultaneously or individually align the receiving carrier 120 and the die 15 at the retrieval unit 11.
(24) Referring now to
(25) Step S4: Place the die to the receiving unit. As shown in
(26) As shown in
(27) Step S5: Elevate another die into the vertical state. The self-elevating carrier 100 elevates this another die 15 and turns this die 15 into the vertical state. Similar to Step S1, the supply unit 16 provides this die 15 to the self-elevating carrier 100 again. Also, similar to Step S2, the second vision unit 14 captures the image information of the another die 15, and then transmits the image information to the retrieval unit 11.
(28) Step S6: Suck this another die in the vertical state by the retrieval unit. Similar to Step S3, the self-elevating unit 10 compensates the position with respect to the retrieval unit 11 so as to allow the retrieval unit 11 to fetch this another die 15 in the vertical state precisely. The retrieval unit 11 receives the image information from the second vision unit 14, and allows the sucking module 110 to fetch, by sucking, this another die 15 on the self-elevating carrier 100. The sucking module 110 having this another die 15 is then rotated by the rotational retrieval module 111 to match the position of the receiving unit 12.
(29) As shown in
(30) Further, the first vision unit 13 captures the image information from the receiving carrier 120 or the existing image information of the die 15, and then provides the image information top the retrieval unit 11 and the receiving unit 12.
(31) In addition, the first vision unit 13 can align the die 15 of the receiving carrier 120 and the die 15 of the retrieval unit 11 simultaneously.
(32) As shown in
(33) Step S7: Stack laterally this another die in the vertical state to the die already at the receiving unit. As shown in
(34) If the image information received by the receiving unit 12 from the first vision unit 13 matches the precise position for stacking the die 15 onto the receiving unit 12, then the receiving unit 12 would not need any position adjustment. The receiving displacement module 121 moves laterally so as to have the another die 15 to be placed or adhered to the die 15 already at the receiving unit 12.
(35) If the number of the dies 15 stacked at the receiving carrier 120 has reached a predetermined amount, then the method is stopped.
(36) If the number of the dies 15 stacked at the receiving carrier 120 has not yet reached the predetermined amount, then go back to perform Step S5.
(37) In summary, the vertically die-stacked bonder and the method using the same of the present invention are to elevate the die by 90 degrees so as to set the die in the vertical state, and then to stack laterally the dies in the vertical state orderly, such that the stacking speed of the dies can be increased, the production cost can be reduced, and the productivity can be enhanced.
(38) In addition, the self-elevating unit can adjust the position with respect to the retrieval unit, so that the self-elevating unit can be accurately aligned with the retrieval unit, and thus the die can be placed to the predetermined position at the retrieval unit.
(39) While the present invention has been particularly shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and detail may be without departing from the spirit and scope of the present invention.