Ion generator apparatus

Abstract

An ion generator including a vacuum chamber; an anode in the chamber, and two movable cathodes in the chamber whereby the distance of the cathodes relative to the anode can be varied. A servo actuated motor can be operably connected to each movable cathode to move the cathodes in the chamber and modify the plasma generated.

Claims

1. An ion generator comprising: a vacuum chamber; an anode in the vacuum chamber, wherein the anode is a hollow anode formed by a metallic matrix and adapted to be positively charged and pressurized by a gas whereby electrons of the gas can be stripped off and diffused through the metallic matrix, whereby a purer reactive ionized gas can be supplied to interact enhancing the potential of high energy plasma double layers; two movable cathodes in the vacuum chamber; and a servo actuated motor operably connected to each movable cathode to move the two movable cathodes; whereby the position of the two movable cathodes relative to the anode can be varied.

2. The ion generator of claim 1, said each movable cathode further comprising a cathode disk and a cone shaped winding.

3. The ion generator of claim 2, further comprising a cone housing the cone shaped winding.

4. The ion generator of claim 1, wherein the vacuum chamber is capable of containing a gas under pressure, the gas selected from the group consisting of helium, hydrogen, deuterium, tritium, argon, water, nitrogen, oxygen, neon, and mixtures thereof.

5. The ion generator of claim 1, wherein the vacuum chamber is capable of containing a gas at a pressure up to and including 10-9 torr.

6. The ion generator of claim 1, further comprising a direct current regulated power supply for supplying radio and microwave frequencies, whereby plasma regimes in the ion generator may be enhanced.

7. The ion generator of claim 1, wherein the two movable cathodes comprising a material conducive to good electron emission.

8. The ion generator of claim 7, wherein the material selected from the group consisting of copper, stainless steel, aluminum, and tungsten.

9. The ion generator of claim 7, wherein the geometry of the electromagnetic field generators is selected from the group consisting of a spherical shape, a conical shape and geometric variants thereof, whereby the electromagnetic field providing the capability to either push ions away from the anode or coalesce toward the anode having the effect of enhancing natural formation of plasma double layers.

10. The ion generator of claim 1, wherein the servo actuated motors are capable of providing at least <0.01 mm of positional movement at a rate of 0.01 m to 1 m/second.

11. The ion generator of claim 1, further comprising electromagnetic field generators to further guide and tune high energy the plasma double layers.

12. The ion generator of claim 11, wherein the electromagnetic field generators comprise a coil geometry whereby an induced field can be even or uniform or adjusted to be stronger at one end of the vacuum chamber than at another end of the vacuum chamber.

13. The ion generator of claim 11, wherein the electromagnetic field generators are powered by an AC or DC power supply, whereby current being a primary factor affecting plasma manipulation.

14. The ion generator of claim 1, further comprising an anti-chamber which is adapted to enable the anode to be retracted without the need to pressurize the vacuum chamber from an experimental vacuum setting, separated by a butterfly valve capable of maintaining a desired pressure differential.

15. The ion generator of claim 14, wherein the anti-chamber comprising a lower section composed of a screw-driven base that feeds a driver with an anode mount, and an upper section that can be opened to enable change-out of the anode that is under a constant flow of inert gas to prevent atmospheric water adsorption.

Description

BRIEF DESCRIPTION OF THE DRAWING

(1) For the purpose of illustrating the invention, the drawings show aspects of one or more embodiments of the invention. However, it should be understood that the present invention is not limited to the precise arrangements and instrumentalities shown in the drawings, wherein:

(2) FIG. 1 is front elevation view of a vacuum chamber assembly for functional plasma generation according to an embodiment of the present invention;

(3) FIG. 1A is side elevation view thereof;

(4) FIG. 1B is section view through FIG. 1;

(5) FIG. 1C is a section view along line B-B of FIG. 1;

(6) FIG. 2 is an isometric view of one of the cathode and electromagnetic (E.M.) cone assemblies of FIG. 1B;

(7) FIG. 3 is an image of a typical discharge on a spherical anode in hydrogen gas in a chamber according to an embodiment of the present invention;

(8) FIG. 4 is a graph depicting the Paschen curve for cathodes at various distances from an anode in a chamber according to an embodiment of the present invention;

(9) FIG. 5A-5E is a collection of plasma regimes created at 5 torr hydrogen and from FIG. 5A through to 5E, increasing the anode current from 0.2 amps to 10 amps; and,

(10) FIG. 6 is an isometric view of the electromagnetic cone of FIG. 2.

DETAILED DESCRIPTION

(11) Referring initially to FIG. 1, the present invention according to one aspect relates to a chamber assembly indicated generally at 1 for generating plasma. The chamber 1 is a construction capable of maintaining a vacuum greater than 10.sup.5 torr, while hosting all required sub-assemblies for plasma, measurement and observation thereof. Chamber doors 7 are dual-sealed with o-rings to further maintain vacuum pressure in the chamber 1. Further capabilities of the vacuum chamber include safety systems 4 to mitigate the chance of explosion or similar under extreme conditions, such as, a power-failure.

(12) Two moveable cathode assemblies indicated generally at 2 driven by servo motors can be moved independently or together, with a positional accuracy greater than, for example, 0.001 inches (0.0254 mm). The cathode assemblies 2 are computer numerically controlled (CNC), enabling programming of the positions of the cathode and electromagnetic assemblies such as stationary or moving to any required distance at any time and with variable velocities.

(13) An anode isolation chamber indicated generally at 3 or anti-chamber, provides the functionality to change and maintenance an anode electrode 10 at any given time without compromising the environment within the chamber 1. The anode isolation chamber 3 includes a tube 12 fitted to a port 14 in the wall of the chamber 1 for receiving the anode 10. The anode 10 is attached to a ball screw 8 and ball nut 9. The anode 10 can be moved into or out of the chamber 1 by rotating the ball screw 8, either manually or by a motor such as a servo motor. The anode 10 can also be withdrawn from the chamber 1 into the isolation chamber 3, When the anode 10 is completely withdrawn into the isolation chamber 3, a gate-valve 6 can be closed to seal off the chamber 1 and enabling the isolation chamber 3 to be opened to access the anode 10, for replacement or maintenance for example.

(14) The cathode assemblies 2 include a cathode disk indicated generally at 20. The cathode disk 20 includes an outer ring 22, outer disk 24, inner ring 26 and inner disk 28. In one embodiment, the cathode disk 20 is made of copper.

(15) Fins 30 are provided on the outer ring 24. Each fin 30 is connected with a support rib 32 to a fin 34. The fins 34 radiate from a sleeve 36 on a rod 38. Rod 38 passed through a port 50 (shown in isolation without the chamber) in the chamber 1 and connects to a ball screw 52 and ball nut 54. The ball screw 52 is driven by a servo motor 56 to move the cathode assembly 2 toward or away from the anode 10 in either direction indicated by the arrows of line 58.

(16) E.M. (electro-magnetic) cones 5 are installed on the fins 34 behind the cathode disks 20. Wire windings 40 are located on the inside of the cones 5 and conform to the inside of the cone 5. The wire windings 40 are connected to and can be energized by an electrical source 42 which can be an AC or DC power supply for example. The conical shape (or a frusto-conical shape as in the present embodiment), winding and charge-direction (positive vs. negative) of the E.M. cones 5 provide functionality to create a controllable (shape and force) magnetic field in two directions, thus providing the capability to either push and/or pull and/or contain plasma in the desired direction and containment and or dispersion. In one embodiment of the present invention, the windings 40, when energized, can create a mono-polar electromagnetic force, such that a fero-magnetic material can also be suspended at the narrow end indicated generally at 44 the cone 5.

(17) In one embodiment, the cones 5 are hollow and include an inlet 46 connected via a cooling fluid inlet line 48 to a fluid source 50 and an outlet 52 connected to an outlet line 54 to the fluid source 50. A cooling fluid, such as water, can be circulated from the fluid source 50, through inlet line 48, through the hollow interior of the cone 5 and out the outlet 52 and back to the fluid source 50 in order to cool the cone 5 when in operation.

EXAMPLES

Example 1

(18) FIG. 3 is an image of a typical discharge on a spherical anode in hydrogen gas in a chamber according to an embodiment of the present invention.

Example 2

(19) FIG. 4 is a graph depicting the Paschen curve for cathodes at various distances (.circle-solid.3.81 cm, X7.62 cm and 15 cm) from an anode in a chamber according to an embodiment of the present invention. All of the distances were adjusted while the experiment was underway, which shows the utility and advantage of using the adjustable cathodes, as the cathodes are moved away from the anode during the discharge. In a planar electrode configuration, the distance-gas pressure factor (x-axis) generates a single u-shaped curve. However, with the present configuration of two cathodes and spherical anode, a departure from the single curve is encountered as a function of cathode distance.

Example 3

(20) FIG. 5 shows the stable various regimes of plasma produced by a discharge in hydrogen gas at 5 torr while increasing the current (from top to bottom, from 0.2 amps to 8 amps). Of note are the numerous double layers which are reproducible.

(21) Embodiments of the present invention are useful for obtaining a steady plasma in a variety of gas, pressure, and anode configurations. While the present embodiment was used as an example, it is inherent that other alternate designs, sizes, and configurations would fall within the scope of this invention. Accordingly, the present disclosure should only be limited by the scope of the claims that follow.