METHOD FOR MOUNTING AN ELECTRONIC COMPONENT ONTO A SUBSTRATE BY MEANS OF SINTERING
20240170450 ยท 2024-05-23
Assignee
Inventors
- Jean-Christophe RIOU (Moissy-Cramayel, FR)
- Corinne PONS (Moissy-Cramayel, FR)
- Alain JAUSSENT (Moissy-Cramayel, FR)
Cpc classification
H01L2224/29294
ELECTRICITY
H01L2924/19105
ELECTRICITY
H01L2924/00015
ELECTRICITY
H01L2224/83203
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/83907
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00015
ELECTRICITY
H01L2224/75251
ELECTRICITY
H01L24/75
ELECTRICITY
H01L2224/29294
ELECTRICITY
H01L25/50
ELECTRICITY
H01L2224/7555
ELECTRICITY
H01L2224/83192
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/32227
ELECTRICITY
H01L2224/83191
ELECTRICITY
H01L2224/27848
ELECTRICITY
H01L2224/27848
ELECTRICITY
H01L2224/83101
ELECTRICITY
International classification
Abstract
The method comprises the following successive steps: depositing sintering material (26) onto one of an electronic component (28) and a substrate (30); heating the material (26) so as to bring a temperature of the material to a preliminary exothermic peak, which precedes an exothermic sintering peak, without the temperature of the material reaching a maximum of the preliminary exothermic peak; fastening the other of the component (28) and the substrate (30) to the material (26) so that the material is interposed between the component and the substrate; and pressing the material (26) while hot so as to cause it to creep.
Claims
1. A method for mounting an electronic component onto a substrate the method comprising the following successive steps: depositing a sintering material onto one of an electronic component and a sub strategy; heating the sintering material so as to bring a temperature of the sintering material to a preliminary exothermic peak which precedes an exothermic sintering peak without the temperature of the sintering material reaching a maximum of the preliminary exothermic peak, fastening another of the electronic component and the substrate to the sintering material so that the sintering material is interposed between the electronic component and the substrate, and pressing the sintering material while hot so as to cause the sintering materials to creep.
2. The method according to claim 1, wherein the depositing takes place so that a sintering material thickness is comprised between 60 ?m and 140 ?m.
3. The method according to claim 1, wherein the depositing takes place by disposing the sintering material in boustrophedon shape.
4. The method according to claim 1, wherein the depositing takes place by forming with the sintering material beads in mutual contact.
5. The method according to claim 1, wherein the depositing takes place by depositing the sintering material on the substrate so that, after the pressing, the sintering material protrudes from edges of the electronic component.
6. The method according to claim 1, wherein the depositing takes place by depositing the sintering material on the electronic component set back from edges of the electronic component.
7. The method according to claim 1, wherein the temperature of the sintering material is between 140? C. and 150? C.
8. The method according to claim 1, wherein the heating takes place for a duration between 10 and 40 minutes.
9. The method according to claim 1, wherein, the pressing of the sintering material takes place between the first substrate and a second substrate.
10. The method according to claim 1, wherein the method comprises during the pressing: measuring a pressure of an arm resting on the sintering material and determining whether the pressure varies over a first predetermined amplitude, for a first predetermined duration; and/or measuring a position of the arm resting on the material and determining whether the position varies over a second predetermined amplitude for a second predetermined duration.
11. The method according to claim 1, further comprising sintering the sintering material.
12. The method according to claim 1, wherein one of the electronic component and the substrate comprises a contact surface with the sintering material after pressing the sintering material, wherein a product of a greater diagonal of the contact surface multiplied by a maximum thickness of the one of the electronic component and the substrate comprising the contact surface is less than or equal to 2.3.10.sup.?2 mm.sup.2.
13. A method for mounting an electronic component onto a substrate, the method comprising the following successive steps: heating a test sample of a sintering material by exposing the test sampled to an increasing temperature and measuring a temperature of the sintering material and detecting a first heating temperature value corresponding to a start of a preliminary exothermic peak which precedes an exothermic sintering peak and a second heating temperature value corresponding to a maximum of the preliminary exothermic peak; depositing a portion of the sintering material onto one of an electronic component and a substrate; heating the portion by exposing the portions to a temperature higher than the first value and lower than the second value; fastening another of the electronic component and the substrate to the portion so that the portion is interposed between the electronic component and the substrate; and pressing the portion while hot so as to cause the portions to creep.
14. An assembly for mounting an electronic component onto a substrate, the assembly comprising: a support, member configured to exert a pressure, heating means, and means configured to control: a deposit of a sintering material onto one of an electronic component and a substrate; a heating of the sintering material so as to bring a temperature of the sintering material to a preliminary exothermic peak which precedes an exothermic sintering peak without the temperature of the sintering material reaching a maximum of the preliminary exothermic peak; a fastening of another of the electronic component and the substrate to the sintering material so that the sintering material is interposed between the electronic component and the substrate; and a pressing of the sintering material while hot so as to cause it to creep.
15. The method according to claim 4, wherein the beads are in mutual contact over a heigh less than or equal to 10 ?m.
16. The method according to claim 4, wherein a diameter of each bead of the plurality of beads is between 100 ?m and 300 ?m.
17. The method according to claim 10, wherein the first predetermined amplitude is between 5% and 15% of the pressure.
18. The method according to claim 10, wherein the first predetermined duration is less than 30 seconds.
19. The method according to claim 10, wherein the second predetermined amplitude is between 30% and 40% of the position.
20. The method according to claim 10, wherein the second predetermined duration is less than 30 seconds.
Description
DESCRIPTION OF THE FIGURES
[0063] Embodiments of the invention will now be presented by way of nonlimiting examples in support of the drawings in which:
[0064]
[0065]
[0066]
[0067]
[0068]
[0069]
[0070]
GENERAL PRESENTATION
[0071] In the method according to the invention, the following successive steps are carried out: [0072] depositing sintering material onto one of an electronic component and a substrate, [0073] heating the material so as to bring a temperature of the material to a preliminary exothermic peak which precedes an exothermic sintering peak without its temperature reaching a maximum of the preliminary exothermic peak, [0074] fastening the other of the component and the substrate to the material so that the material is interposed therebetween, and [0075] pressing the material while hot so as cause it to creep, before proceeding with its sintering.
[0076] The objective of the first heating step is to obtain a dried paste which can then be implemented under pressure to cause it to creep under a component to the chosen thickness. The activation of the material is obtained by drying the part coated with the material, alone, at a temperature comprised between 140 and 150? C. This drying can be done in air, under neutral gas or under vacuum with extraction.
[0077] This is a preliminary exothermic peak drying for a time not exceeding 40 minutes. Below this peak, it is not possible to apply pressure to the paste (because the paste pushes out under the action of pressure). Above this peak, in the subsequent creep step during sintering, the pressure or elevation of the arm serving to exert pressure are not able to vary by the desired amount and sintering is not effective. Most of the time in this case the chip is cracked.
[0078] Coupled analyzes by differential scanning calorimetry (DSC) and thermogravimetry (TGA) were carried out. They were carried out under air and under argon in order to determine what role the combustion of the solvents plays in their elimination.
[0079] Thus,
[0080] Whether the experiment is carried out under air or under argon, the TGA curve shows that the loss of mass of this paste n? 1 (and therefore the evacuation of the solvents) takes place in two stages: a first major loss of mass, begins at 130? C. in both cases (first bump 2 visible in the figure) and a second, minor loss of mass, is observed above 250? C.
[0081] The major loss of mass coincides from 130? C. with two small peaks on the DSC curve. The first 6 is rather endothermic, the other 8 is exothermic. The small size of the peaks 6, 8 can be explained by the fact that, thermally, the two phenomena, which are more or less simultaneous, compensate each other.
[0082] Concerning the first peak 6, the loss of mass which is initialized at 130? C. is representative of the evaporation of the solvents and this is a datum provided by the manufacturer. It continues in practice up to 170.8? C. In this zone, the solvent remains present and clearly blocks the formation of silver oxide (Ag.sub.2O.sub.3) which could otherwise take place below 150? C.
[0083] The first (and small) exothermic peak 8 which appears in
[0084] It is found on a similar analysis carried out under air on a sinter paste of another brand, which is also silver-based, and illustrated in
[0085] Beyond 130? C. and below 170? C., this results in nonoxidized silver flakes having a size comprised between a few hundred nanometers and a few tens of microns and traces of solvents.
[0086] DSC coupled with TGA clearly shows that, in air, during major loss of mass, there is competition between an exothermic phenomenon and an endothermic phenomenon (combustion and evaporation). On the other hand, under argon, the main loss of mass corresponds to an endothermic peak. This means that, under neutral gas, the main loss of mass occurs more by evaporation than by decomposition of solvents.
[0087] However, this competition of the phenomena which appear in this zone, but potentially at different temperatures according to the pastes, gives rise to the exothermic peak 8 of the DSC curve which is the marker of the activation of the silver flakes for a subsequent creep or sintering.
[0088] It is observed that this exothermic peak 8 immediately precedes the main exothermic peak 10 associated with sintering.
[0089] If a temperature of 170? C. is exceeded, beyond the first exothermic peak 8 therefore, sintering begins to occur (the paste is made solid but not yet sufficiently densified), so that the paste is no longer conformable at the surfaces in presence by an application of pressure and temperature, for a creep or by need of adhesion.
[0090] Conversely, if the first heating step is interrupted before the start of the exothermic peak 8 with a minimum at 151.2? C. but a beginning of appearance of the phenomenon around 140? C. in
[0091] During an experiment, the preliminary exothermic peak 8 must be determined in air because it does not appear in the DSC under neutral gas or under vacuum.
[0092] On the basis of these elements, the invention is implemented as follows by way of example.
FIRST EMBODIMENT
[0093] A first embodiment of the invention will be described.
[0094] The method is implemented in an installation 20 like that of
Material Deposition
[0100] In a first step, a sintering material 26 is deposited onto one of an electronic component 28 and a substrate 30, for example the substrate 30.
[0101] The deposition step takes place here by disposing the boustrophedon-shaped material following a continuous coil as illustrated in
[0102] The diameter of the paste coils depends on the final thickness to be reached at the end of sintering. It does not condition the steps of the method because, once dried in accordance with the preliminary exothermic peak 8, the paste 26 conforms to the need, allowing a total flattening of the coils (no cavity is observed under the components) to form a single rectangular parallelepiped of defined surface and thickness. It is thus possible to obtain variable bonding layer thicknesses comprised between 1 and 10 mm.
[0103] The paste is chosen from commercial references.
[0104] The sintering material is spread by automatic or manual dispensing at room temperature. It is in fact preferred to place it by distribution rather than by screen printing because its application by screen printing does not allow to limit the rises over several tens of microns in height during the demolding of the screen printing frame. Moreover, the distribution gives very good control of the rate of cavities at the end of sintering, in particular a rate of less than 1% on the surface of the component.
Activation of the Material by Prior Drying
[0105] Next, the material 26 is heated so as to place the temperature of the material in the increasing phase of the preliminary exothermic peak 8 which precedes the exothermic sintering peak 10 without the temperature of the material reaching the maximum of the preliminary exothermic peak 8 (170.8? C. in
[0106] This first heating step takes place in this case for a duration comprised between and 40 minutes at a temperature comprised between 140? C. and 150? C.
[0107] This heating takes place either in air or in an environment comprising at least 90% nitrogen, optionally under a pressure below atmospheric pressure.
Fastening
[0108] Then, the component 28 is fastened to the material 26 so that the material is interposed between the component 28 and the substrate 30.
[0109] If the substrate is intended for an assembly with a component and another substrate (which is the case of a 3D sandwich structure like that of
[0110] In other cases, the component 28 is simply contacted with the material 26 on the substrate and then the actual sintering step is carried out.
Creep
[0111] Then, indeed, in the installation 20 of
[0112] During this step, the pressure of the arm 24 resting on the material 26 is measured and it is determined whether the pressure varies over a predetermined amplitude, for example comprised between 5% and 15%, for a predetermined duration, for example less than 30 seconds. Creep is acceptable in this case when the measured pressure has varied between 5 to 15% of its original value then stabilizes in less than 30 seconds.
[0113] In addition, a position of the arm 24 resting on the material 26 is measured and it is determined whether its position varies over a predetermined amplitude for a predetermined duration. The position measured here is the distance from the plate 21 to the face of the substrate 30 receiving the material 26. The variation in position therefore corresponds to the variation in thickness of the paste. It is considered in this case that the creep is acceptable when this distance has varied between 30 and 40% of the distance before the start of sintering (for example it goes from 100 ?m to a value between 60 and 70 ?m) in a time which does not exceed 30 seconds. The variation in distance h has been illustrated in
[0114] These steps are carried out using conventional servo-control means.
[0115] Once this step is completed, the material is ready to be sintered in a subsequent heating step so that the component is firmly fastened to the substrate.
[0116] The invention is applicable in particular when the component 28 is called thin component, namely has a contact surface with the material, at the end of the method, such that
D*E=<2.3.Math.10.sup.?2 mm.sup.2
where: [0117] D designates a greater diagonal of the contact surface, and [0118] E indicates a maximum thickness of the element.
[0119] The invention is also applicable to the production of a sandwich or 3D structure like that of
[0120] To achieve the arrangement of
[0121] Then the two components 28 are installed and the other two layers of sintering material are applied thereon. A new drying step is then carried out.
[0122] The upper substrate 30 is then applied. For this purpose, the components are pressed between the two substrates, in particular at room temperature and in an environment under a gas pressure comprised between 0.4 and 2 MPa.
[0123] The simultaneous creep of all the layers of material 26 is then carried out. For this purpose, a silicone mattress is placed under the plate and all the components are pressed, for example under 250? C./10 MPa. During this last step, the pressure applied by the arm allows to maintain parallelism between the two faces of the substrates facing each other and therefore to compensate for the differences in height between the components 28.
[0124] The material is then sintered.
SECOND EMBODIMENT
[0125] In this second embodiment, a method for testing a sintering material is first implemented.
[0126] A test sample of the sintering material is heated by exposing it to an increasing temperature.
[0127] During heating, a temperature of the material is measured. A first heating temperature value corresponding to a start (151.2? C. in
[0128] Next, a method is implemented for mounting an electronic component onto a substrate in a manner similar to the first embodiment. The method this time comprises the following successive steps: [0129] depositing a portion of the material 26 onto one of an electronic component 28 and a substrate 30, [0130] heating the portion 26 by exposing it to a temperature higher than the first value and lower than the second value, [0131] fastening the other of the component and the substrate to the portion so that the portion is interposed between the component and the substrate, and [0132] pressing the portion while hot so as to cause it to creep.
[0133] The sintering is then carried out.
[0134] Many modifications may be made to the invention without departing from the scope thereof.