MEMORY CELL AND ARRAY STRUCTURE OF NON-VOLATILE MEMORY AND ASSOCIATED CONTROL METHOD
20240161833 ยท 2024-05-16
Inventors
Cpc classification
H01L29/7887
ELECTRICITY
G11C11/4074
PHYSICS
G11C11/4096
PHYSICS
G11C11/4091
PHYSICS
G11C11/4093
PHYSICS
H01L29/42328
ELECTRICITY
G11C16/14
PHYSICS
International classification
H01L29/423
ELECTRICITY
G11C16/14
PHYSICS
Abstract
A memory cell is connected to a source line, a bit line, a word line, an assist gate line and an erase line. When a program action is performed, a weak programming procedure is first performed on the memory cell, and then a strong programming procedure is performed on the memory cell. When the weak programming procedure is performed, an on voltage is provided to the word line, a first program voltage is provided to the source line, a ground voltage is provided to the bit line, a first assist gate voltage is provided to the assist gate line, and a first erase line voltage is provided to the erase line. When the strong programming procedure is performed, a lower program voltage and a higher assist gate voltage are provided to the memory cell.
Claims
1. A control method for a memory cell of a non-volatile memory, the memory cell comprising a select transistor, a floating gate transistor, a first capacitor and a second capacitor, a first drain/source terminal of the select transistor being connected to a source line, a gate terminal of the select transistor being connected to a word line, a first drain/source terminal of the floating gate transistor being connected to a second drain/source terminal of the select transistor, a second drain/source terminal of the floating gate transistor being connected to a bit line, the first capacitor being connected between a floating gate of the floating gate transistor and an erase line, the second capacitor being connected between the floating gate of the floating gate transistor and an assist gate line, the control method comprising steps of: performing a weak programming procedure of a program action on the memory cell, wherein when the weak programming procedure is performed, the select transistor is turned on, a first program voltage is provided to the source line, a ground voltage is provided to the bit line, a first assist gate voltage is provided to the assist gate line, and a first erase line voltage is provided to the erase line; performing a strong programming procedure of the program action on the memory cell after the weak programming procedure is completed, wherein when the strong programming procedure is performed, the select transistor is turned on, a second program voltage is provided to the source line, the ground voltage is provided to the bit line, a second assist gate voltage is provided to the assist gate line, and a second erase line voltage is provided to the erase line, wherein the weak programming procedure is performed for a first programming time period, and the strong programming procedure is performed for a second programming time period, wherein the first program voltage is higher than the second program voltage, the first assist gate voltage is lower than the second assist gate voltage, and the first programming time period is shorter than the second programming time period.
2. The control method as claimed in claim 1, wherein the select transistor is turned on when an on voltage is provided to the word line, wherein the first assist gate voltage is lower than or equal to the ground voltage, the first erase line voltage is higher than or equal to the ground voltage, the first erase line voltage is lower than or equal to a half of the first program voltage, the second assist gate voltage is equal to the second program voltage, and the second erase line voltage is equal to a half of the second program voltage.
3. The control as claimed in claim 1, further comprising steps of: performing an erase action, wherein when the erase action is performed, the ground voltage is provided to the word line, the source line, and the bit line, a third assist gate voltage is provided to the assist gate line, and a third erase line voltage is provided to the erase line; and performing an erase inhibition, wherein when the erase inhibition is performed, the ground voltage is provided to the word line, the source line, and the bit line, a fourth assist gate voltage is provided to the assist gate line, and the third erase line voltage is provided to the erase line, wherein the third erase line voltage is equal to an erase voltage, and the third assist gate voltage is lower than the fourth assist gate voltage.
4. The control method as claimed in claim 3, wherein the third assist gate voltage is lower than or equal to the ground voltage and is higher than or equal to a negative value of the erase voltage, wherein the fourth assist gate voltage is lower than or equal to the erase voltage, and is higher than or equal to the ground voltage.
5. The control as claimed in claim 1, further comprising steps of: performing a read action, wherein when the read action is performed, the select transistor is turned on, a first read voltage is provided to the source line, a second read voltage is provided to the bit line, the ground voltage is provided to the assist gate line and the erase line; and receiving a read current from the bit line, and determining a storing state of the memory cell according to a magnitude of the read current, wherein the first read voltage is higher than the second read voltage, wherein if the read current is lower than a reference current, the memory cell is determined to be in an erase state, wherein if the read current is higher than the reference current, the memory cell is determined to be in a program state.
6. The control method as claimed in claim 1, wherein the select transistor is a p-type transistor, the floating gate transistor is a p-type floating gate transistor, the first capacitor is a metal-oxide-semiconductor capacitor, and the second capacitor is a plate capacitor.
7. A control method for an array structure of a non-volatile memory, the array structure comprising x memory cells, the x memory cells being divided into y groups, x and y being positive integers larger than 1, x being larger than or equal to y, the control method comprising steps of: (a) sequentially performing y weak programming procedures of a program action, wherein each of the y weak programming procedures is performed on the corresponding group; and (b) after the step (a) is completed, performing a strong programming procedure of the program action on the x memory cells, wherein a first memory of the x memory cells comprises a select transistor, a floating gate transistor, a first capacitor and a second capacitor, wherein a first drain/source terminal of the select transistor is connected to a source line, a gate terminal of the select transistor is connected to a first word line, a first drain/source terminal of the floating gate transistor is connected to a second drain/source terminal of the select transistor, a second drain/source terminal of the floating gate transistor is connected to a first bit line, the first capacitor is connected between a floating gate of the floating gate transistor and an erase line, and the second capacitor is connected between the floating gate of the floating gate transistor and a first assist gate line, wherein when the weak programming procedure is performed on the first memory cell, the select transistor is turned on, a first program voltage is provided to the source line, a ground voltage is provided to the first bit line, a first assist gate voltage is provided to the first assist gate line, and a first erase line voltage is provided to the erase line, wherein when the strong programming procedure is performed on the first memory cell, the select transistor is turned on, a second program voltage is provided to the source line, the ground voltage is provided to the first bit line, a second assist gate voltage is provided to the first assist gate line, and a second erase line voltage is provided to the erase line, wherein each of the y weak programming procedures is performed for a first programming time period, and the strong programming procedure is performed for a second programming time period, wherein the first program voltage is higher than the second program voltage, the first assist gate voltage is lower than the second assist gate voltage, and the first programming time period is shorter than the second programming time period.
8. The control as claimed in claim 7, wherein the step (a) comprises steps of: (a1) when the program action is started, setting i as 1; (a2) performing the weak programming procedure on the i-th group; (a3) if i is not equal to y, adding 1 to i, and performing the step (a2) again; and (a4) if i is equal to y, performing the step (b).
9. The control method as claimed in claim 7, wherein the select transistor is turned on when an on voltage is provided to the first word line, wherein the first assist gate voltage is lower than or equal to the ground voltage, the first erase line voltage is higher than or equal to the ground voltage, the first erase line voltage is lower than or equal to a half of the first program voltage, the second assist gate voltage is equal to the second program voltage, and the second erase line voltage is equal to a half of the second program voltage.
10. The control as claimed in claim 7, further comprising steps of: performing an erase action, wherein when the erase action is performed, the ground voltage is provided to the first word line, the source line, and the first bit line, a third assist gate voltage is provided to the first assist gate line, and a third erase line voltage is provided to the erase line; and performing an erase inhibition, wherein when the erase inhibition is performed, the ground voltage is provided to the first word line, the source line, and the first bit line, a fourth assist gate voltage is provided to the first assist gate line, and the third erase line voltage is provided to the erase line, wherein the third erase line voltage is equal to an erase voltage, and the third assist gate voltage is lower than the fourth assist gate voltage.
11. The control method as claimed in claim 10, wherein the third assist gate voltage is lower than or equal to the ground voltage and is higher than or equal to a negative value of the erase voltage, wherein the fourth assist gate voltage is lower than or equal to the erase voltage, and is higher than or equal to the ground voltage.
12. The control as claimed in claim 7, further comprising steps of: performing a read action, wherein when the read action is performed, the select transistor is turned on, a first read voltage is provided to the source line, a second read voltage is provided to the first bit line, the ground voltage is provided to the first assist gate line and the erase line; and receiving a read current from the first bit line, and determining a storing state of the memory cell according to a magnitude of the read current, wherein the first read voltage is higher than the second read voltage, wherein if the read current is lower than a reference current, the memory cell is determined to be in an erase state, wherein if the read current is higher than the reference current, the memory cell is determined to be in a program state.
13. The control method as claimed in claim 7, wherein the select transistor is a p-type transistor, the floating gate transistor is a p-type floating gate transistor, the first capacitor is a metal-oxide-semiconductor capacitor, and the second capacitor is a plate capacitor.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0013] The above objects and advantages of the present invention will become more readily apparent to those ordinarily skilled in the art after reviewing the following detailed description and accompanying drawings, in which:
[0014]
[0015]
[0016]
[0017]
[0018]
[0019]
[0020]
[0021]
[0022]
DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS
[0023] The present invention provides a memory cell and an array structure of a non-volatile memory and a control method of the non-volatile memory. The memory cell is a 2T2C memory cell with a novel structure. Furthermore, the present invention provides a multi-procedure programming control method for performing a program action on the 2T2C memory cell. Consequently, the state of the memory cell can be switched from an erase state to a program state.
[0024]
[0025] Firstly, an isolation structure forming step is performed. As shown in
[0026] Then, a well region forming step is performed. As shown in
[0027] Optionally, a p-type lightly doped region is formed in the P-well region PW. Consequently, the region B is located over the surface of the p-type lightly doped region. In addition, the p-type lightly doped region may be regarded as a part of the P-well region PW.
[0028] Then, a gate structure forming step is performed. As shown in
[0029] As shown in
[0030] Please refer to
[0031] Then, a doped region forming step is performed. As shown in
[0032] Furthermore, a doping process is performed on the surface of the surface of the P-well region PW by using the gate structures 212, 216, 222 and 226 as the masks. Consequently, the portion of the region B uncovered by the gate structures 212, 216, 222 and 226 is formed as an n-type doped region 270.
[0033] Please refer to
[0034] As shown in
[0035] The equivalent circuit of the array structure is shown in
[0036] As mentioned above, the memory cell is a 2T2C memory cell comprising two transistors and two capacitors. One of the two capacitors is an n-type MOS capacitor, and the other capacitor is a plate capacitor. It is noted that numerous modifications and alterations may be made while retaining the teachings of the invention. For example, in a variant example, the n-type MOS capacitor is replaced by a p-type MOS capacitor.
[0037] In another variant example, the plate capacitor of the memory cell is a combination of plural plate capacitors in parallel connection. For example, in the memory cell c11 shown in
[0038] In another variant example, a metal layer of the assist gate line AG.sub.1 and the gate layer of the gate structure 212 are collaboratively formed as a vertical-coupling plate capacitor. The vertical-coupling plate capacitor is a polysilicon/metal capacitor. That is, in the memory cell c11, the plate capacitor between the floating gate G.sub.F of the floating gate transistor M.sub.F and the assist gate line AG.sub.1 comprises plural plate capacitors in parallel connection.
[0039] Generally, when a memory cell comprising the p-type floating gate transistor M.sub.F is subjected to an erase action and the memory cell is switched to an erase state, an over-erase condition possibly occurs. That is, after the erase action is completed, excessive electrons are ejected from the floating gate G.sub.F of the p-type floating gate transistor M.sub.F. In the over-erase condition, it is difficult to turn on the p-type floating gate transistor M.sub.F. When the over-erased memory cell is subjected to a program action, the p-type floating gate transistor M.sub.F is possibly unable to be turned on. Under this circumstance, the memory cell cannot generate a program current. Since electrons are unable to be injected into the floating gate of the floating gate transistor M.sub.F, the program action fails. In other words, the memory cell cannot be switched to the program state successfully.
[0040] For overcoming the above drawbacks, the present invention provides a multi-procedure programming control method for the 2T2C memory cell. Consequently, the program action can be effectively performed on memory cell. Hereinafter, a two-procedure programming control method will be taken as an example of the multi-procedure programming control method for illustration.
[0041]
[0042]
[0043] In this embodiment, the first programming time period is shorter than the second programming time period. For example, the first programming time period is 3 ?s, and the second programming time period is 38 ?s. The first program voltage V.sub.PP1 is higher than the second program voltage V.sub.PP2. For example, the first program voltage V.sub.PP1 is 7.5V, and the second program voltage V.sub.PP2 is 6.25V. The first assist gate voltage V.sub.AG1 is lower than the second assist gate voltage V.sub.AG2. The select transistor M.sub.S in the memory cell is turned on in response to the on voltage V.sub.ON. For example, the on voltage V.sub.ON is equal to V.sub.PP1/2 or V.sub.PP2/2. In an embodiment, the on voltage V.sub.ON is equal to V.sub.PP1/2 when the weak programming procedure is performed, and the on voltage V.sub.ON is equal to V.sub.PP2/2 when the strong programming procedure is performed.
[0044] Please refer to
[0045] Please refer to
[0046] As mentioned above, when the program action is performed on the 2T2C, the weak programming procedure is first performed. In the shorter first programming time period, the higher first program voltage V.sub.PP1 and the lower first assist gate voltage V.sub.AG1 are provided to control the memory cell. Consequently, a small number of electrons are injected into the floating gate G.sub.F of the floating gate transistor M.sub.F. Then, the strong programming procedure is performed. In the longer second programming time period, the lower second program voltage V.sub.PP2 and the higher second assist gate voltage V.sub.AG2 are provided to control the memory cell. Consequently, a great number of electrons are injected into the floating gate G.sub.F of the floating gate transistor M.sub.F. Since the second program voltage V.sub.PP2 is lower, the power consumption during the program action is reduced.
[0047] In the above embodiment, the multi-procedure programming control method is a two-procedure programming control method. It is noted that the programming control method may include more than two programming procedures. For example, when the program action is performed, plural weak programming procedures are first performed to avoid the over-erase condition, and then a strong programming procedure is performed.
[0048] In the above embodiment, the programming control method is applied to a single memory cell. Of course, the programming control method of the present invention can be applied to the program action on plural memory cells of an array structure. For example, the programming control method is applied to a byte program action. That is, the programming control method can be used in the program action of programming eight memory cells simultaneously.
[0049]
[0050] Firstly, set i=1 (Step S401). Then, a weak programming procedure is performed on the selected memory cells of the i-th group (Step S403). In the steps S403, i is a positive integer.
[0051] Then, a step S405 is performed to judge whether i is equal to y. If the judging condition of the step S405 is not satisfied, it means that some memory cells have not be subjected to the weak programming procedure. Then, i is added by 1 (Step S407), and the step S403 is repeatedly done. Whereas, if the judging condition of the step S405 is satisfied, it means that the weak programming procedure has been performed y times. That is, all of the x memory cells have been subjected to the weak programming procedures. Then, the x memory cells are determined as selected memory cells, and a strong programming procedure is performed on the x selected memory cells (Step S409).
[0052] For understanding the concepts of the present invention, the programming control method of
[0053]
[0054] An exemplary process of performing the byte program action will be described as follows.
[0055] When the four weak programming procedures are performed, the source line SL receives the first program voltage V.sub.PP1, the erase line EL receives the first erase line voltage V.sub.EL1, the word line WL.sub.1 receives the on voltage V.sub.ON, the assist gate line AG receives the first assist gate voltage V.sub.AG1, and the word line W.sub.L2 receives an off voltage V.sub.OFF. Consequently, the first column of the array structure is a selected column, and the second column of the array structure is an unselected column. The memory cells c12?c82 in the second column are unselected memory cell. For example, the off voltage V.sub.OFF is equal to the first program voltage V.sub.PP1.
[0056] Please refer to
[0057] Similarly, when the weak programming procedure is performed for the second time, the bit lines BL.sub.3?BL.sub.4 receive the ground voltage (0V), and the other bit lines BL.sub.1?BL.sub.2 and BL.sub.5?BL.sub.8 are in the floating state. Consequently, in the first programming time period, the two selected memory cells c31 and c41 in the second group are subjected to the weak programming procedure, but the other memory cells c11?c21 and c51?c81 are not subjected to the weak programming procedure. Similarly, when the weak programming procedure is performed for the third time, the weak programming procedure is performed on the two selected memory cells c51 and c61 only. Similarly, when the weak programming procedure is performed for the fourth time, the weak programming procedure is performed on the two selected memory cells c71 and c81 only.
[0058] Please refer to
[0059] As mentioned above, when the byte program action is performed, four weak programming procedures are sequentially performed on four corresponding groups of memory cells, and then one strong programming procedure is performed on all of the eight memory cells. In other words, it takes four first programming time periods and one second programming time period to perform the byte program action. In case that the first programming time period is 3 ?s and the second programming time period is 38 ?s, the total programming time period of the byte program action is 50 ?s, i.e., 3?4+38=50 (?s).
[0060] Of course, the eight memory cells may be divided into more than or less than four groups. For example, in a variant example, eight memory cells are divided into eight groups (i.e., y=8), and each group contains one memory cell. In another variant example, eight memory cells are divided into two groups (i.e., y=2), and each group contains four memory cell. Moreover, the bias voltages provided to the array structure of the present invention are not restricted. That is, the bias voltages for performing the byte program action may be varied according to the practical requirements.
[0061] In addition, the weak programming procedure followed by the strong programming procedure in the program action of the present invention can effectively reduce the program disturbance on the unselected memory cells. The following is explained in detail.
[0062] As shown in
[0063] As shown in
[0064] Generally, when an erase action is performed on a non-volatile memory, the memory cells in a specific area of the array structure are all erased. For example, in case that the specific area is a block, the erase action is a block erase action. Whereas, in case that the specific area is a page, the erase action is a page erase action. In accordance with the present invention, a specified bias voltage is provided to the assist gate line when the erase action is performed. Consequently, the memory cells in the specified area of the array structure are subjected to erase inhibition.
[0065]
[0066] Please refer to
[0067] When the erase action is performed, the third assist gate voltage V.sub.AG3 is negative, and the third erase line voltage V.sub.EL3 is equal to the erase voltage V.sub.EE. Consequently, a Fowler-Nordheim tunneling effect (also referred as a FN tunneling effect) is generated. Due to the FN tunneling effect, electrons are injected from the floating gate G.sub.F of the floating gate transistor M.sub.F to the erase line EL through the MOS capacitor C.sub.MOS.
[0068] Please refer to
[0069] When the erase inhibition is performed, the FN tunneling effect cannot be generated. Consequently, electrons cannot be injected from the floating gate G.sub.F of the floating gate transistor M.sub.F to the erase line EL.
[0070] When a read action is performed on the 2T2C memory cell, the storing state of the memory cell can be determined according to the result of judging whether electrons are stored in the floating gate G.sub.F of the floating gate transistor M.sub.F.
[0071] When the read action is performed, the ground voltage (0V) is provided to the word line WL, a first read voltage V.sub.READ1 is provided to the source line SL, a second read voltage V.sub.READ2 is provided to the bit line BL, the ground voltage (0V) is provided to the erase line EL, and the ground voltage (0V) is provided to the assist gate line AG. In addition, the first read voltage V.sub.READ1 is provided to the N-well region NW, and the ground voltage (0V) is provided to the P-well region PW. The first read voltage V.sub.READ1 is higher than the second read voltage V.sub.READ2. For example, the first read voltage V.sub.READ1 is 2.4V, and the second read voltage V.sub.READ2 is 0.4V.
[0072] Since the word line WL receives the ground voltage (0V), the select transistor M.sub.S is turned on, and a read current IR flows from the source line SL to the bit line BL. In the situation of
[0073] For example, a sensing circuit (not shown) is provided to judge the storing state of the memory cell. The sensing circuit receives a reference current I.sub.REF and the read current I.sub.R. If the read current I.sub.R is lower than the reference current I.sub.REF, the sensing circuit judges that the memory cell is in the erase state. Whereas, if the read current I.sub.R is higher than the reference current I.sub.REF, the sensing circuit judges that the memory cell is in the program state.
[0074] It is noted that the voltage values of the first read voltage V.sub.READ1 and the second read voltage V.sub.READ2 are not restricted. For example, in another embodiment, the first read voltage V.sub.READ1 is 2.0V, and the second read voltage V.sub.READ2 is 0.V.
[0075] While the invention has been described in terms of what is presently considered to be the most practical and preferred embodiments, it is to be understood that the invention needs not be limited to the disclosed embodiment. On the contrary, it is intended to cover various modifications and similar arrangements included within the spirit and scope of the appended claims which are to be accorded with the broadest interpretation so as to encompass all such modifications and similar structures.