PIEZORESISTIVE FORCE SENSOR

Abstract

A piezoresistive force sensor which is designed in particular as a pressure sensor and can generate a sensor signal which is dependent on an amount of a force which acts on the force sensor in a force measuring direction. The force sensor has a first electrode, a second electrode and an elastically deformable resistance layer which electrically connects the two electrodes. A resistance value of a total resistance of an electrically conductive path between the first electrode to the second electrode via the resistance layer changes according to the amount of the acting force. By measuring a voltage between the electrodes or a current which flows along the electrically conductive path, for example, a sensor signal can be detected which describes the amount of the acting force. The resistance layer contains electrically conductive first staple fibers and electrically non-conductive second staple fibers. A proportion of the first staple fibers relative to the total quantity of staple fibers can be varied in order to adapt the force-resistance characteristic of the force sensor to the particular task.

Claims

1. A piezo-resistive force sensor, comprising: an elastically deformable resistance layer that comprises a first outer surface and a second outer surface opposite the first outer surface and that comprises a mixture of distributed electrically conductive first staple fibers and electrically non-conductive second staple fibers, an electrically conductive first electrode and an electrically conductive second electrode, wherein the first electrode and the second electrode are either arranged on the first outer surface or the second outer surface such that an electrically conductive path is created from the first electrode via the resistance layer to the second electrode, wherein a resistance value of a resistance of the electrically conductive path depends on an amount of an external force that is effective between the first outer surface and the second outer surface.

2. The piezo-resistive force sensor according to claim 1, wherein the first staple fibers and the second staple fibers are substantially homogeneously distributed in the resistance layer.

3. The piezo-resistive force sensor according to claim 1, wherein a portion of the first staple fibers of a total amount of the first staple fibers and the second staple fibers amounts to a minimum of 5%.

4. The piezo-resistive force sensor according to claim 3, wherein the portion of the first staple fibers of the total amount of the first staple fibers and the second staple fibers is higher than 20%.

5. The piezo-resistive force sensor according to claim 1, wherein the first staple fibers and/or the second staple fibers comprise a fiber length of 20-100 mm.

6. The piezo-resistive force sensor according to claim 1, wherein the resistance layer comprises a volume resistance depending from the external force that is created by individual contact resistances connected in parallel and/or in series to one another that are established at each contact site between two first staple fibers being in contact to one another.

7. The piezo-resistive force sensor according to claim 6, wherein a total resistance of the electrically conductive path is created by a series connection of a first contact resistance between the first electrode and the resistance layer, a volume resistance of the electrically conductive path within the resistance layer and a second contact resistance between the resistance layer and the second electrode.

8. The piezo-resistive force sensor according to claim 1, wherein the resistance value of a total resistance of the electrically conductive path amounts to maximum 1000 MΩ, if no external force is applied on the force sensor.

9. The piezo-resistive force sensor according to claim 1, wherein the resistance value of a total resistance of the electrically conductive path amounts to minimum 1 kΩ, if the external force is applied on the force sensor.

10. The piezo-resistive force sensor according to claim 1, wherein a correlation is defined by means of a portion of the first staple fibers of a total amount of the first staple fibers and the second staple fibers and/or a fiber type of the first staple fibers and/or a conductivity of the first staple fibers, the correlation characterizing a change of the resistance value of a total resistance of the electrically conductive path depending on an amount of the external force acting on the force sensor.

11. The piezo-resistive force sensor according to claim 10, wherein the correlation is non-linear.

12. The piezo-resistive force sensor according to claim 10, wherein starting from a maximum resistance value the resistance value decreases and approaches asymptotically to a minimum resistance value with an increasing amount of the external force.

13. The piezo-resistive force sensor according to claim 1, wherein the first staple fibers are bi-component fibers.

14. The piezo-resistive force sensor according to claim 1, wherein the resistance layer comprises at least one staple fiber yarn comprising the first staple fibers and the second staple fibers that form a scrim and/or a woven fabric and/or a warp-knitted fabric.

15. The piezo-resistive force sensor according to claim 1, wherein the resistance layer comprises a non-woven fabric comprising the first staple fibers and the second staple fibers.

16. A method for manufacturing a force sensor comprising the following steps: providing electrically conductive first staple fibers and electrically non-conductive second staple fibers, mixing the first staple fibers and the second staple fibers to a mixture in which the first staple fibers and the second staple fibers are distributed, forming from the mixture of an elastically deformable resistance layer comprising a first outer surface and a second outer surface that is opposite to the first outer surface, attaching an electrically conductive first electrode on the first outer surface or on the second outer surface and attaching an electrically conductive second electrode on the first outer surface or the second outer surface, such that an electrically conductive path is created from the first electrode via the resistance layer to the second electrode, wherein a resistance value of a electrical total resistance of the electrically conductive path depends on an external force applied between the first outer surface and the second outer surface.

17. The piezo-resistive force sensor according to claim 1, wherein a portion of the first staple fibers of a total amount of the first staple fibers and the second staple fibers amounts to a minimum of 10%.

18. The piezo-resistive force sensor according to claim 2, wherein a portion of the first staple fibers of a total amount of the first staple fibers and the second staple fibers amounts to a minimum of 5%.

19. The piezo-resistive force sensor according to claim 18, wherein the portion of the first staple fibers of the total amount of the first staple fibers and the second staple fibers is higher than 20%.

20. The piezo-resistive force sensor according to claim 19, wherein the first staple fibers and/or the second staple fibers comprise a fiber length of 20-100 mm.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0043] Advantageous embodiments of the invention are derived from the dependent claims, the description and the drawings. In the following preferred embodiments of the invention are explained in detail based on the attached drawings. The drawings show:

[0044] FIGS. 1 and 2 a schematic block-diagram-like illustration of a force sensor having a first electrode, a second electrode and an elastically deformable resistance layer as well as an equivalent circuit of the ohmic resistance of an electrical path,

[0045] FIGS. 3-5 a schematic basic illustration of the construction of the resistance layer of first staple fibers and second staple fibers respectively as well as an assigned electrical equivalent circuit,

[0046] FIG. 6 a schematic illustration in part of an embodiment of a first staple fiber in the form of an exemplary bi-component fiber,

[0047] FIG. 7 a schematic basic illustration of the force sensor without force application,

[0048] FIG. 8 the force sensor of FIG. 7 during application of an external force,

[0049] FIG. 9 a diagram that illustrates the correlation between an electrical conductivity and the portion of first staple fibers in the resistance layer and

[0050] FIG. 10 a diagram that illustrates the correlation between the resistance value of the electrically conductive path through the force sensor depending on the applied external force for different portions of first staple fibers.

DETAILED DESCRIPTION

[0051] In FIG. 1 a block diagram of a force sensor 15 and its connection into a circuit 16 is illustrated. The force sensor 15 comprises an elastically deformable resistance layer 17. The resistance layer 17 has a first outer surface 18 and an opposite second outer surface 19 facing away from the first outer surface 18. The two outer surfaces 18, 19 are arranged with distance opposite to each other in a force measuring direction M. According to the example, the force measuring direction M is substantially orientated orthogonal to a plane that is in turn orientated parallel to the outer surfaces 18, 19. Alternatively or additionally, the force sensor 10 can also detect forces of force components that are orientated parallel to this plane. The force sensor 10 can be a pressure sensor and/or tension sensor and/or strain sensor. Basically forces or force components can be measured that elastically deform the resistance layer 17 and particularly change the distance between the outer surfaces 18, 19.

[0052] The force sensor 15 has in addition a first electrode 20 and a second electrode 21. The two electrodes 20, 21 are indirectly mechanically and electrically connected with one another via the resistance layer 17 of the force sensor. A direct electrical connection between the two electrodes 20, 21 does not exist. Thus, a current can flow between electrodes 20, 21 only via the resistance layer 17.

[0053] In the embodiment according to FIG. 1 the first electrode 20 is attached to the first outer surface 18 and the second electrode 21 is attached to the second outer surface 19. The size of electrodes 20, 21 in a plane orthogonal to the force measuring direction M can be adapted to the size of the outer surfaces 18 or 19 of the resistance layer 17. The electrodes 20, 21 can also be smaller than the outer surfaces 18 or 19 of the resistance layer 17 to which they are attached respectively in at least one direction orthogonal to the force measuring direction M (FIG. 2).

[0054] It is further apparent from the embodiment illustrated in FIG. 2 that the electrodes 20, 21 do not necessarily have to be arranged on opposite sides of the resistance layer 17. Rather the electrodes 20, 21 can also be attached commonly to the first outer surface 18 or—as illustrated—to the second outer surface 19 of the resistance layer 17.

[0055] The resistance layer 17 is electrically conductive and comprises a conductivity that is smaller than the conductivity of the two electrodes 20, 21. The electrodes 20, 21 can be made of a material comprising metal, for example. The electrodes 20, 21 can be attached to the resistance layer 17 by means of an electrically conductive adhesive bond, for example, for the attachment thereof.

[0056] With reference to FIGS. 3-5 the construction of the resistance layer 17 is explained. The resistance layer 17 comprises a mixture from electrically conductive first staple fibers 25 and electrically non-conductive second staple fibers 26. In FIGS. 3-5 the electrically conductive first staple fibers 25 are illustrated in black, whereas the electrically non-conductive second staple fibers 26 are illustrated in white. The first staple fibers 25 and the second staple fibers 26 are substantially homogeneously distributed within the resistance layer 17. According to the example, this means that in each observed volume portion having a specific minimum size that extends, for example, in force measuring direction M from the first outer surface 18 up to the second outer surface 19 and that has a cross-section orthogonal to the force measuring direction M that is smaller than the first outer surface 18 and smaller than the second outer surface 19, the ratio of the number of first staple fibers 25 compared with the number of second staple fibers 26 is substantially equal. The deviation in the number of first staple fibers 25 and/or second staple fibers 26 or the ratio between two observed volume portions amounts preferably maximum 5% or maximum 10%. The volume portions have a constant cross-section in force measuring direction M. The cross-section area can be particularly about the factor 5 or 7 or 10 smaller than the first outer surface 18 and the second outer surface 19.

[0057] In the resistance layer 17 a number of first staple fibers 25 always abuts against one or multiple further first staple fibers 25, such that an electrically conductive contact between these first abutting staple fibers 25 is established. The arrangement or density of first staple fibers 25 is such that one or multiple parallel conductive connections are created between the first outer surface 18 and the second outer surface 18 or can be at least created during application of an external force. Thus, an electrically conductive connection exists between the two outer surfaces 18, 19 via the first staple fibers 25 having a variable volume resistance 37. The volume resistance 37 of the resistance layer 17 is defined in the equivalent circuit (FIGS. 3-5) by individual contact resistances connected in parallel and/or in series to one another that are established due to the first staple fibers 25 being in contact with each other. FIGS. 3-5 are only schematic in order to explain the principle of different portions of first staple fibers 25 and do not explicitly illustrate the electrically conductive connection between the two outer surfaces 18, 19.

[0058] For mixing first staple fibers 25 and second staple fibers 26 in order to achieve a homogeneous distribution within the resistance layer 17, the staple fibers 25, 26 can be distributed and orientated by means of carding, for example. The main extension direction of staple fibers 25, 26 according to the example is orthogonal to the force measuring direction M and preferably not parallel thereto. This means that more than 50% or more than 75% or more than 90% of first and second staple fibers have an extension component parallel to the force measuring direction M that is less than orthogonal to the force measuring direction M.

[0059] The resistance layer 17 is illustrated very schematically in the drawings. It can be configured as non-woven fabric and/or woven fabric and/or knitted fabric and/or warp-knitted fabric or the like. For example, the resistance layer 17 can comprise one or multiple staple fiber yarns and/or staple fiber twisted yarns that are connected with one another by means of weaving, knitting or warp knitting or that form a laid fabric. A staple fiber yarn can be realized as ring yarn, rotor yarn, friction yarn, wrapped yarn or air jet yarn.

[0060] In the embodiment the second staple fibers 26 consist of a plastic, preferably a polymer.

[0061] The first staple fibers 25 comprise electrically conductive material, particularly electrically conductive carbon, such as so-called “carbon black”. The first staple fibers 25 can comprise in addition one or more non-electrically conductive components and can be configured as bi-component fibers 27, for example (FIG. 6). According to the example, the bi-component fiber 27 has a core 28 on which an outer layer 29 is applied entirely or partly. The core 28 is electrically non-conductive and can consist of a material that can be elastically deformed or that is elastically non-deformable for the occurring forces F, for example plastic, such as a polymer. The outer layer 29 comprises electrically conductive components, e.g. electrically conductive carbon. Also other configurations of the first staple fibers 25 are possible in which they comprise multiple components, at least one of which is an electrically conductive component. For example, the first staple fiber can comprise a polymer having an electrically conductive filler or can consist thereof.

[0062] The first staple fibers 25 and the second staple fibers 26 have a fiber length in the range of 20-100 mm in the embodiment.

[0063] In FIG. 7 the force sensor 15 is illustrated in its initial position or rest position in which it is not subject to an external force F. Due to the electrically conductive first staple fibers 25 in the resistance layer 17 that are in contact with one another, an electrically conductive path is created between the first electrode 20 via resistance layer 17 to the second electrode 21 or vice versa, such that a current is able to flow. If a force F is applied on the force sensor 15 (FIG. 8), the resistance value R of this electrically conductive path changes. If the force F is a force that compresses the force sensor 15 such that the first outer surface 18 and the second outer surface 19 are moved toward each other compared with the initial condition, the resistance value R of the electrically conductive path is reduced. Vice versa the resistance value R of the electrically conductive path would increase, if instead of a compressing force, a tensile force would be effective between the two outer surfaces 18, 19.

[0064] For measuring an external force F, e.g. a compressive force, a voltage or current source 33 can be electrically connected with the electrodes 20, 21 via a series resistor 34, as the circuits 16 illustrate in FIGS. 1 and 2. In doing so, a voltage U is applied between first electrode 20 and second electrode 21 that can be measured and that changes proportionally to the resistance value of the total resistance 35 of the electrically conductive path. The total resistance 35 of the electrically conductive path is composed in the embodiment of a series connection of multiple resistances: a first contact resistance 36 between first electrode 20 and resistance layer 17, the volume resistance 37 inside the resistance layer 17 along the created electrically conductive path as well as a second contact resistance 38 between the resistance layer 17 and second electrode 21. The resistance value R of the total resistance 35 therefore corresponds to the sum of the individual resistance values of this series connection. As schematically illustrated in the equivalent circuit in FIGS. 1 and 2, all of the resistances 36, 37, 38 of the series connection can be variable depending on the amount of the applied force F. At least the thickness or height of the elastically deformable resistance layer 17 changes in force measuring direction M during application of a force and thus the volume resistance 37 thereof.

[0065] The resistance value R of total resistance 35 of the electrically conductive path amounts in the initial condition of the force sensor 15, if no external force F is applied (FIG. 7) at most 1000 MΩ, for example. If a maximum external force F is applied on the force sensor 15 (FIG. 8) for which the force sensor 15 is configured or approved, the resistance value R of total resistance 35 of the electrically conductive path preferably amounts minimum 1 kΩ.

[0066] It is schematically apparent from FIGS. 3-5 and 9 that the portion A of first staple fibers 25 of the total amount of first staple fibers 25 and second staple fibers 26 can vary. The larger this portion A of first staple fibers 25 of the total amount of staple fibers 25, 26, the higher the conductivity δ of resistance layer 17 in force measuring direction M, that is preferably orthogonal to the outer surfaces 18, 19. By varying this portion A of first staple fibers 25, a desired conductivity δ of resistance layer 17 can be achieved. Thereby force sensor 15 can be adapted to different applications, e.g. in order to adjust a sufficient sensitivity depending from the range in which the amount of an external force F to be measured can be. If the range of the amount of the applied force F is very small, it can be reasonable to increase the conductivity δ of resistance layer 17 in the initial condition of the sensor by increasing a portion A of first staple fibers 25, which improves sensitivity for changes in case of smaller forces F. If forces F with high amounts shall be measured, the portion A of first staple fibers 25 can be selected to be smaller.

[0067] In FIGS. 3-5 resistance layers 17 having different portions A of first staple fibers 25 are schematically illustrated. The portion A is highest in FIG. 3 and lowest in FIG. 5. The higher the portion A of first staple fibers 25, the more parallel connected individual resistances exist in the equivalent circuit that form the volume resistance 37 within the resistance layer 17 along the electrically conductive path. This means that the volume resistance 37 within the resistance layer 17 is the lower in the initial condition of the force sensor 15 without application of an external force F, the higher the portion A of first staple fibers 25. This correlation is schematically illustrated only by exemplary illustrating equivalent circuits of the volume resistance 37 inside the resistance layer 17.

[0068] A correlation between the amount of an applied force F, e.g. a compression force, and the resistance value R of the total resistance 35 of the electrically conductive path is illustrated in FIG. 10 based on a first curve K1 and a second curve K2. The correlation is non-linear. If the applied force F is equal to zero, the force sensor 15 has a maximum value R.sub.max in its initial condition that in turn depends on the portion A of first staple fibers 25. The gradients of curves K1, K2 are higher in the range of smaller forces than in the range of greater forces. The curves K1, K2 can have an exponential progress and can approach asymptotically with increasing compressing force to a minimum value R.sub.min of resistance value R.

[0069] First curve K1 in FIG. 10 shows the correlation between an applied compressing force (force F) and the resistance value R in case of a first portion A1 of first staple fibers 25 and curve K2 shows this correlation in case of a second portion A2 of first staple fibers 25. Second portion A2 is greater than first portion A1. Without application of an external force F, the resistance value R has a maximum value R.sub.max, the amount of which depends on portion A of first staple fibers 25. Thus, a suitable force-resistance-characteristic of the force sensor 15 adapted to the application can be achieved by varying the portion A of first staple fibers 25.

[0070] In general the correlation between amount of an applied force F and the resistance value R of the total resistance 35 of the electrically conductive path can be specifically influenced or adjusted by means of the following parameters: [0071] The portion (A) of first staple fibers (25) of the total amount of first and second staple fibers (26) and/or [0072] the fiber type of first staple fibers (25) and/or [0073] the conductivity of first staple fibers (25).

[0074] By means of one or more of the indicated parameters, the measurement range for the force F and/or the minimum resistance value R.sub.min and/or the maximum resistance value R.sub.max and/or the difference amount between the minimum resistance value R.sub.min and the maximum resistance value R.sub.max can be influenced or adjusted, for example.

[0075] The invention refers to a piezo-resistive force sensor 15 that is particularly configured as pressure sensor and that can create a sensor signal that depends on the amount of a force F that is applied on the force sensor 15 in a force measuring direction M. The force sensor 15 has a first electrode 20, a second electrode 21 and an elastically deformable resistance layer 17 that electrically connects the two electrodes 20, 21. A resistance value R of a total resistance 35 of an electrically conductive path between first electrode 20 via resistance layer 17 to the second electrode 21 changes dependent on the amount of the applied force F. Thus, a sensor signal can be detected that characterizes the amount of the applied force F, e.g. by measuring a voltage U between the electrodes 20, 21 or a current that flows along the electrically conductive path. The resistance layer 17 comprises electrically conductive first staple fibers 25 and electrically non-conductive second staple fibers 26. A portion A of first staple fibers 25 of the total amount of staple fibers 25, 26 can be varied in order to adapt the force-resistance-characteristic of the force sensor 15 to the respective application.

LIST OF REFERENCE SIGNS:

[0076] 15 force sensor [0077] 16 circuit [0078] 17 resistance layer [0079] 18 first outer surface [0080] 19 second outer surface [0081] 20 first electrode [0082] 21 second electrode [0083] 25 first staple fibers [0084] 26 second staple fibers [0085] 27 bi-component fiber [0086] 28 core [0087] 29 outer layer [0088] 33 voltage or current source [0089] 34 series resistor [0090] 35 total resistance of electrically conductive path [0091] 36 first contact resistance [0092] 37 volume resistance of electrically conductive path within the resistance layer [0093] 38 second contact resistance [0094] A portion [0095] F force [0096] K1 first curve [0097] K2 second curve [0098] M force measuring direction [0099] R resistance value of total resistance [0100] R.sub.max maximum resistance value of total resistance [0101] R.sub.min minimum resistance value of total resistance [0102] U Voltage