CORE-SHELL HETEROSTRUCTURES COMPOSED OF METAL NANOPARTICLE CORE AND TRANSITION METAL DICHALCOGENIDE SHELL
20190250101 ยท 2019-08-15
Inventors
Cpc classification
H01L31/032
ELECTRICITY
H01M4/583
ELECTRICITY
C23C16/4417
CHEMISTRY; METALLURGY
H01L31/0384
ELECTRICITY
H01M4/36
ELECTRICITY
G01N21/648
PHYSICS
Y02E60/10
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
International classification
H01L31/0384
ELECTRICITY
H01L31/032
ELECTRICITY
C23C16/30
CHEMISTRY; METALLURGY
Abstract
Provided herein are core-shell heterostructures design comprising a metal (e.g., noble metal) nanoparticle core and a transition metal dichalcogenide (TMD) shell, and methods of preparation and use thereof. In particular embodiments, the core-shell hetero structures described herein are synthesized by direct growth of a monolayer or multilayer fullerene-like TMD shell on a metal (e.g., noble metal) nanoparticle core, exhibit unique Raman scattering and photoluminescence characteristics, and are useful, for example, in plasmonic hot electron enhanced optics and optoelectronics.
Claims
1. A heterostructure composition composing a metal core encapsulated within a transition metal dichalcogenide (TMD) shell.
2. The composition of claim 1, wherein the metal core is a noble metal core.
3. The composition of claim 2, wherein the noble metal core comprises a single phase or alloy of gold (Au), silver (Ag), platinum (Pt), Palladium (Pd), Ruthenium (Ru), Rhodium (Rh), Iridium (Ir), and/or Osmium (Os).
4. The composition of claim 3, wherein the noble metal core comprises gold (Au).
5. The composition of claim 1, wherein the TMD shell is a monolayer or multilayer fullerene-like shell.
6. The composition of claim 1, wherein the TMD shell is a single or composite semiconductor of the type MX2, wherein M is a transition metal and X is a chalcogen.
7. The composition of claim 6, wherein the transition metal is selected from Mo and W.
8. The composition of claim 6, wherein the chalcogen is selected from S, Se, and Te.
9. The composition of claim 6, wherein the TMD shell comprises molybdenum disulfide (MoS2), tungsten disulfide (WS2), rhenium disulfide (ReS2), molybdenum diselenide (MoSe2), tungsten diselenide (WSe2), and/or Molybdenum ditelluride (MoTe2).
10. The composition of claim 6, wherein the TMD shell comprises 1-50 layers.
11. The composition of claim 1, wherein the metal core is 5-200 nm in diameter.
12. The composition of claim 1, wherein the TMD shell is 0.65-32.5 nm thick.
13. A method for preparing the composition of claim 1 comprising directly growing a monolayer or multilayer of the TMD shell on the metal core.
14. The method of claim 13, wherein the monolayer or multilayer TMD shell is grown by chemical vapor deposition.
15. The method of claim 13, wherein the metal core is formed by coating a metal film onto a Si substrate via galvanic deposition or physical evaporation followed by high-temperature annealing.
16. The method of claim 15, wherein the metal coated Si substrate is placed in a tube furnace and transition metal oxide and sulfur powder is carried over the substrate to form the TMD shell on the metal core.
17. A photodetector device comprising the composition of claim 1.
18. A composition comprising the composition of claim 1 patterned onto a substrate.
19-21. (canceled)
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0011]
[0012]
[0013] Au nanoparticles (1) and Au@MoS.sub.2 heterostructures (2) grown on Si substrate. (b) Experimental and simulated absorbance spectra of the Au@MoS.sub.2 heterostructures. (c) Simulated absorbance spectra of Au@MoS.sub.2 heterostructures, Au nanoparticles and imaginary MoS.sub.2 shell. (d-f) 3D images showing the three targets (partial) used for DDA modeling. (g-i) Normalized electric field maps on target of Au nanoparticles (g), Au@MoS.sub.2 heterostructure (h), and the imaginary MoS.sub.2 shell (i).
[0014]
[0015]
[0016]
[0017]
[0018]
[0019]
[0020]
[0021]
[0022] Here the bent structure refers a curve slab with 5 center angle. All numbers are in eV. The black dashed lines are Fermi levels.
DEFINITIONS
[0023] Although any methods and materials similar or equivalent to those described herein can be used in the practice or testing of embodiments described herein, some preferred methods, compositions, devices, and materials are described herein. However, before the present materials and methods are described, it is to be understood that this invention is not limited to the particular molecules, compositions, methodologies or protocols herein described, as these may vary in accordance with routine experimentation and optimization. It is also to be understood that the terminology used in the description is for the purpose of describing the particular versions or embodiments only, and is not intended to limit the scope of the embodiments described herein.
[0024] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. However, in case of conflict, the present specification, including definitions, will control. Accordingly, in the context of the embodiments described herein, the following definitions apply.
[0025] As used herein and in the appended claims, the singular forms a, an and the include plural reference unless the context clearly dictates otherwise. Thus, for example, reference to a nanoparticle is a reference to one or more nanoparticles and equivalents thereof known to those skilled in the art, and so forth.
[0026] Many embodiments herein are described using open comprising language. Such embodiments encompass multiple closed consisting of and/or consisting essentially of embodiments, which may alternatively be claimed or described using such language.
[0027] As used herein, the term plasmonic nanoparticles refers to metal particles (e.g., gold (Au), silver (Ag), platinum (Pt), palladium (Pd), ruthenium (Ru), rhodium (Rh), osmium (Os), iridium (Ir), alloys thereof, etc.) with electron density that can couple with electromagnetic radiation of wavelengths that are larger than the particle due to the nature of the dielectric-metal interface between the medium and the particle. Plasmonic nanoparticles differ from conventional surface plasmons in that their scattering, absorbance, and/or coupling properties are dependent upon their specific geometries and the media in which they reside. Plasmonic nanoparticles typically exhibit very strong absorption and scattering spectra that are tunable by altering the shape, the composition, or the medium around their nanoparticle surface.
DETAILED DESCRIPTION
[0028] Provided herein are core-shell heterostructures design comprising a metal (e.g., noble metal) nanoparticle core and a transition metal dichalcogenide (TMD) shell, and methods of preparation and use thereof. In particular embodiments, the core-shell heterostructures described herein are synthesized by direct growth of a monolayer or multilayer fullerene-like TMD shell on a metal (e.g., noble metal) nanoparticle core, exhibit unique Raman scattering and photoluminescence characteristics, and are useful, for example, in plasmonic hot electron enhanced optics and optoelectronics.
[0029] In some embodiments, the core-shell heterostructures described herein (e.g., noble-metal@TMD heterostructures described herein (e.g., Au@MoS.sub.2 heterostructures, etc.)) exhibit interesting optical properties and behavior. The material synthesis was realized by direct growth of monolayer or multilayer fullerene-like TMD shell on metal (e.g., noble metal) nanoparticle core. As an example of the broader class of metal@TMD (e.g., noble-metal@TMD) heterostructures, the Au@MoS.sub.2 heterostructures are found to exhibit strong light-matter interactions, for example, due to the structural curvature of MoS.sub.2 shell and the plasmonic effect from the underlying Au nanoparticle cores; although embodiments herein are not limited to any particular mechanism of action and an understanding of the mechanism of action is not necessary to practice such embodiments. Significantly enhanced Raman scattering and photoluminescence emission were observed on Au@MoS.sub.2 heterostructures. Such enhancement is attributed to the surface plasmon-induced electric filed, which mainly accumulates within the MoS.sub.2 shell. Experiments conducted during development of embodiments herein also indicated charge transfer-induced p-type doping of the MoS.sub.2 shell. DFT calculation further reveals that the structural curvature of MoS.sub.2 shell leads to a modification of its electronic structure, which facilitates the charge transfer from MoS.sub.2 to Au core. These experiments indicate that noble-metal@TMD heterostructures generally will exhibit similar optical properties and characteristics.
[0030] The noble-metal@TMD heterostructures (e.g., Au@MoS.sub.2 core-shell heterostructures) described herein find use, for example in optoelectronic devices, optical imaging, and other energy-environmental applications. In some embodiments, the noble-metal@TMD heterostructures (e.g., Au@MoS.sub.2 core-shell heterostructures) are plasmonic nanostructures.
EXPERIMENTAL
Example 1
Materials and methods
Reagents
[0031] Molybdenum trioxide and Sulfur powders were purchased from Alfa Aesar (ward Hill, Mass.). Galvanic deposition solution contains 1 mM KAuCl.sub.4 and 1% HF. Buffered oxide etch (BOE) was self-prepared by mixing 40% NH.sub.4F and 49% HF with a volume rate of 6:1. Chemical vapor deposition was conducted in a Lindberg Blue M tube furnace. Heidelberg PG 501 Maskless Aligner was used for the lithography preparation of Au@MoS.sub.2 patterns on Si substrate as well as the fabrication of photodetector devices. Raman spectra and photoluminescence spectra was collected on the HORIBA LabRAM HR Evolution Confocal Raman System. Electric test was conducted on the Signatone S-1160 Probe Station. X-ray photoelectron spectroscopy (XPS, Thermo Scientific ESCALAB 250Xi) was used for binding energy analysis. Hitachi SU8030 SEM and JEOL JEM-2100 Fas TEM were used for morphological and structural characterizations.
Chemical Vapor Deposition of Au@MoS.SUB.2 .Heterostructures
[0032] Si substrate was cleaned with BOE for 15 s to remove surface oxide layer. This was followed by putting the substrate in above galvanic deposition solution for 60 s to deposit Au film, which was further annealed at 850 C. for 15 min to form Au nanoparticles. The following fullerene-like MoS.sub.2 shell encapsulation on Au nanoparticles were conducted via a modified chemical vapor deposition process. The Au nanoparticle-coated substrate was put face down on an alumina boat containing 10 mg MoO.sub.3. Another boat containing 120 mg sulfur powders was put in the upstream side. N.sub.2 gas with a flow rate of 200 sccm was used as the carrier gas. The furnace was first heated up to 300 C. and kept for 30 min, and then ramped to the growth temperature (650 C.). The growth was continued for 15 min with a N.sub.2 flow rate of 10 sccm. The furnace was then slowly cooled down to ambient temperature.
Fabrication of NU Patterns of Au@MoS.SUB.2 .Heterostructures
[0033] Designed patterns of Au@MoS.sub.2 heterostructures were fabricated using a standard photolithography process. Photoresist (S1813) was first coated on Si substrate with a spin rate of 4000 rpm for 30 s. The substrate was baked at 110 C. for 1 min. UV light exposure was conducted for 26 ms with a defocus of 1. The sample was then developed in MF-319 for 30 s and further cleaned with O.sub.2/Ar plasma for 3 min. Subsequently, an Au film of 10 nm was evaporated on the substrate and the remaining photoresist was removed in acetone. The obtained Au film patterns was annealed at 850 C. for 15 min and subjected to the same chemical vapor deposition process as above to form Au@MoS.sub.2 patterns. The obtained patterns at various fabrication steps can be found in
Discrete Dipole Approximation (DDA) Modeling
[0034] The computation of absorbance and surface electric field distribution of isolated targets (Au nanoparticle, Au@MoS.sub.2 heterostructure, and imaginary MoS.sub.2 shell, see
here * represents complex conjugate,
is the wave number of the incident wave and E.sub.0 is its amplitude, E.sub.loc,i is the local field calculated from the sum of the incident radiation field of dipole i and the filed radiated by the other N-1 dipoles, and P.sub.i is the polarization induced in dipole i, expressed as
P.sub.i=.sub.iE.sub.loc,i(r.sub.i) (2)
The absorption efficiency (Q.sub.abs) of the simulated targets (
Q.sub.abs=C.sub.abs/(a.sub.eff.sup.2) (3)
where a.sub.eff is the effective radius of a sphere with volume
equal to the volume of the heterostructured targets.
[0035] As mentioned, the strong light-matter interaction at the visible region leads to the generation of SPR, which further forms a constant localized electric field on/near the surface of the targets. The intensity of electric filed was theoretically calculated from the sum of the incident radiation field of dipole i and the filed radiated by the other N-1 dipoles, as shown in the following equation,
E.sub.loc,i(r.sub.i)=E.sub.inc,i+E.sub.dip,i=E.sub.0exp(ikr.sub.i).sub.jiA.sub.ijP.sub.j. (4)
The interaction matrix A can be represented as
where |r.sub.ij|=|r.sub.ir.sub.j| and P is the polarization vector.
Density Functional Theory Calculation
[0036] Density functional theory (DFT) electronic structure calculations were performed in order to gain insights into the various band alignments in these materials. The calculations were performed using the generalized gradient approximation with PBE functional for the exchange correlation functional and projector augmented wave potentials as implemented in VASP (Vienna Ab-initio Simulation Package). All structures are fully relaxed with respect to cell vectors and cell-internal positions. The electronic DOS (density of states) is calculated from the relaxed structures using the tetrahedron method with Blchl corrections. To get the Fermi level relative to the vacuum level of Au, 6-layer slab of fcc Au in (111) direction with 15 Angstrom vacuum in the super cell was used to calculate work function. To assess the relative band alignments of MoS.sub.2 system, the findings of Van de Walleand and Neugebauer, who demonstrated a universal alignment of the electronic transition level of hydrogen in a wide range of materials including semiconductors, insulators and even aqueous solutions were utilized. Hence, to infer the band alignment, the energies of H defects in the rock salt compounds of interest were computed, alignment between these H energies was assumed, and the band alignment of the compounds was extracted. To align the valance band maximum position of each system, the defect formation energies of various charge states of interstitial Hq (q=1, 0, 1) was considered by placing H in the host material, calculating the total energy of this structure, and subtracting the energy of the corresponding pure host material, hydrogen chemical potential, and electron chemical potential: Error! Bookmark not defined.
E.sub.f(Hq)=E.sub.tot(Hq)E.sub.tot(bulk)0.5E.sub.tot(H.sub.2)+q(E.sub.v+E+E.sub.F),
where E.sub.V and E.sub.F are valence band maximum and Fermi level (relative to the VBM). To select the most favorable interstitial H binding sites in host materials, multiple binding configurations are calculated. The electrostatic potential correction term E is calculated by inspecting the potential in the supercell far from the impurity and aligning it with the electrostatic potential in bulk.
Example 2
Results
[0037] A modified chemical vapor deposition method was employed to realize the growth of a fullerene-like MoS.sub.2 shell on Au nanoparticles. An Au film with a thickness of 10 nm was first coated on fresh Si substrate via a galvanic deposition approach (
[0038] The Au@MoS.sub.2 core-shell heterostructures are shown in
[0039] X-ray photoelectron spectroscopy (XPS) was used to determine the chemical composition and chemical states of the Au@MoS.sub.2 heterostructures.
[0040] Raman spectroscopy allows for determination of the crystallinity and layer thickness of two-dimensional MoS.sub.2 by measuring the position and frequency difference of two characteristic vibration modes, E.sub.2g and A.sub.1g. The E.sub.2g mode is attributed to the in-plane vibration of Mo and S atoms, while the A.sub.1g mode is related to the out-of-plane vibration of S atoms.
[0041] Similar plasmonic enhancement was also observed in the photoluminescence emission. As shown in
[0042] Experimental and simulation investigations were conducted to study light-induced absorption and surface electric field distribution.
[0043] Simulated absorbance spectrum of a single Au@MoS.sub.2 heterostructure (Au core of 50 nm with a MoS.sub.2 shell of 10 atomic layers, see
[0044] The distribution of surface electric field on various targets in
Example 3
Au@MoS.SUB.2 .Patterns
[0045] In some embodiments, the Au@MoS.sub.2 heterostructures are fabricated on Si substrate with specific patterns, giving an additional level of control over the architecture and geometry. This this allows for the use of the heterostructures in light-driven applications such as SERS, imaging, and phototransistors. The fabrication steps were demonstrated in
[0046] Raman spectra (
[0047] Photoluminescence emission spectra were also collected from the same spots. The blue spot on Au@MoS.sub.2 heterostructures shows increased intensity as compared to these few-layer MoS.sub.2 flakes (the black and red spots) due to the field enhancement. It is also worth noting that the photoluminescence on the red spot is much weaker than that on the black spot, showing an obvious photoluminescence quenching effect. This phenomenon was further confirmed by the photoluminescence map shown in
[0048] To better understand such charge-transfer induced p-type doping, density functional theory (DFT) electronic structure calculations were conducted to reveal the band alignments due to the direct combination of Au and MoS.sub.2. A 6-layer MoS.sub.2 sheet with and without curvature were considered. The obtained band structure of the flat MoS.sub.2 is shown in