RECTIFYING METHOD AND RECTIFYING DEVICE
20190252998 ยท 2019-08-15
Inventors
Cpc classification
H02M7/2195
ELECTRICITY
H01L29/783
ELECTRICITY
H02M7/12
ELECTRICITY
International classification
Abstract
A rectifying device 100 includes: at least one MOSFET (PMOSFET 20) having a gate terminal 26a, a drain terminal 25a, and a well terminal 23a that are interconnected; an AC signal generation source 80 that generates an AC signal to cause the at least one MOSFET to operate in a voltage region including a weak inversion region, and supplies the AC signal to a source terminal 24a of the MOSFET; and a capacitative element C connected to the drain terminal 25a of the MOSFET. As a rectifying element, a MOSFET that is driven even in a weak inversion region by short-circuiting the gate, drain, and well, and so have low rectification loss, and small leakage current is used; therefore, rectifying devices that are highly efficient, have low leakage current, can cope with high frequency, and thus are suitable for energy harvesting technologies to collect very weak energy are constituted.
Claims
1. A rectifying method comprising: supplying an AC signal to cause a MOSFET having a gate terminal, a drain terminal, and a well terminal that are interconnected to operate in a voltage region including a weak inversion region to one of a source terminal and the drain terminal of the MOSFET; and obtaining a DC signal obtained through rectification of the AC signal by the MOSFET from the other one of the source terminal and the drain terminal.
2. The rectifying method according to claim 1, wherein reverse leakage current of the MOSFET is smaller than 1 nA.
3. The rectifying method according to claim 1, wherein the MOSFET is integrated on an energy harvesting IC.
4. A rectifying device comprising: at least one MOSFET having a gate terminal, a drain terminal, and a well terminal that are interconnected; an AC signal generation source that generates an AC signal to cause the at least one MOSFET to operate in a voltage region including a weak inversion region, and supplies the AC signal to one of a source terminal and the drain terminal of the MOSFET; and a capacitative element connected to the other one of the source terminal and the drain terminal.
5. The rectifying device according to claim 4, wherein reverse leakage current of the at least one MOSFET is smaller than 1 nA.
6. The rectifying device according to claim 4, wherein the at least one MOSFET is integrated on an energy harvesting IC.
7. The rectifying device according to claim 6, wherein the capacitative element is integrated on the energy harvesting IC.
8. The rectifying device according to claim 4, wherein the at least one MOSFET includes a MOSFET having a well which is connected to the well terminal, the well being isolated from a substrate.
9. The rectifying device according to claim 4, wherein the at least one MOSFET includes two NMOSFETs and two PMOSFETs between which diode bridge connections are established.
10. The rectifying device according to claim 4, wherein the at least one MOSFET includes four NMOSFETs between which diode bridge connections are established.
11. The rectifying device according to claim 10, wherein at least one of the four NMOSFETs has an isolation region that isolates a well connected to the well terminal from a substrate, and the isolation region is connected to one end of the capacitative element.
12. The rectifying device according to claim 4, wherein the at least one MOSFET includes four PMOSFETs between which diode bridge connections are established.
13. The rectifying device according to claim 5, wherein the at least one MOSFET includes two NMOSFETs and two PMOSFETs between which diode bridge connections are established.
14. The rectifying device according to claim 5, wherein the at least one MOSFET includes four NMOSFETs between which diode bridge connections are established.
15. The rectifying device according to claim 5, wherein the at least one MOSFET includes four PMOSFETs between which diode bridge connections are established.
16. The rectifying device according to claim 6, wherein the at least one MOSFET includes two NMOSFETs and two PMOSFETs between which diode bridge connections are established.
17. The rectifying device according to claim 6, wherein the at least one MOSFET includes four NMOSFETs between which diode bridge connections are established.
18. The rectifying device according to claim 6, wherein the at least one MOSFET includes four PMOSFETs between which diode bridge connections are established.
19. The rectifying device according to claim 8, wherein the at least one MOSFET includes two NMOSFETs and two PMOSFETs between which diode bridge connections are established.
20. The rectifying device according to claim 8, wherein the at least one MOSFET includes four NMOSFETs between which diode bridge connections are established.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
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DESCRIPTION OF EXEMPLARY EMBODIMENTS
[0059] Hereinafter, (some) embodiment(s) of the present invention will be described. The embodiment(s) do(es) not limit the invention according to the claims, and all the combinations of the features described in the embodiment(s) are not necessarily essential to means provided by aspects of the invention.
[0060]
[0061] The surface element structure of the NMOSFET 10 has an n type source region (source) 14, an n type drain region (drain) 15, a gate 16, a spacer 18, a source terminal 14a, a drain terminal 15a, a gate terminal 16a, an isolation terminal 12a, and a well terminal 13a. The source 14 and drain 15 are disposed on one side and the other side on a surface of the p type well 13 (that is, on the left side and the right side in the figure), respectively. The gate 16 is disposed on the middle of the p type well 13 with an insulating film 17 being interposed therebetween. The spacer 18 is formed to cover the side surface of the gate 16. The source terminal 14a, drain terminal 15a, and gate terminal 16a are connected to the upper surfaces of the source 14, drain 15, and gate 16, respectively. The isolation terminal 12a and well terminal 13a are connected to the n type isolation region 12 and p type well 13, respectively. Note that parasitic diodes (not illustrated) are present between the source 14 and the p type well 13, and between the drain 15 and the p type well 13.
[0062]
[0063] The surface element structure of the PMOSFET 20 has a p type source region (source) 24, a p type drain region (drain) 25, a gate 26, a spacer 28, a source terminal 24a, a drain terminal 25a, a gate terminal 26a, and a well terminal 23a. The source 24 and drain 25 are disposed on one side and the other side on a surface of the n type well 23 (that is, on the left side and the right side in the figure), respectively. The gate 26 is disposed on the middle of the n type well 23 with an insulating film 27 being interposed therebetween. The spacer 28 is formed to cover the side surface of the gate 26. The source terminal 24a, drain terminal 25a, and gate terminal 26a are connected to the upper surfaces of the source 24, drain 25, and gate 26, respectively. The well terminal 23a is connected to the n type well 23. Note that parasitic diodes (not illustrated) are present between the source 24 and the n type well 23, and between the drain 25 and the n type well 23.
[0064] Note that although planar gate MOSFETs are used in the rectifying device 100 according to the present embodiment, this is not the sole example, and trench gate MOSFETs may be used. In addition, the MOSFET formed on the p type semiconductor substrate 11 or 21 is not the only MOSFET that can be used, but a MOSFET formed on an N type semiconductor substrate may be used.
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[0069] Furthermore, since the MOSFETs are unipolar MOSFETs, the reverse recovery time of rectifying elements configured using diode connections is very short, and can also follow high frequency signals. Accordingly, the diode-connected MOSFETs in the present example can realize rectifying elements having low rising voltages (that is, steep rising characteristics), small leakage current, and short reverse recovery time. In addition, the rectifying elements in the present example can be driven even in a weak inversion region, and are useful in energy harvesting technologies that rectify A-level current, for example. Furthermore, since the MOSFETs are used as rectifying elements, integration with other circuits is easy.
[0070] Note that the diode connections of the MOSFETs in the present example employ a similar use method of MOSFET to that for so-called DTMOSs (Dynamic Threshold MOSFETs). Here, DTMOSs are often disadvantageous in that, since the MOSFETs are driven in a voltage region where a forward direction voltage is applied to the source and well typically, a high voltage cannot be applied across the source and gate (that is, the well). However, since an object to be achieved with the rectifying device 100 according to the present embodiment is to attain a low rising voltage Vf, a high voltage is not applied across the source and gate (that is, the well); thereby, favorable rising characteristics can be obtained.
[0071]
[0072] The AC signal generation source 80 is a voltage source that generates AC signals, and represents a generation source of environmental energy to be the subject of energy harvesting, or a converter that converts environmental energy into electrical power. The AC signal generation source 80 generates an AC signal to cause a diode-connected MOSFET (that is, the NMOSFET 10 shown in
[0073] The rectifying bridge circuit 90 includes at least one MOSFET, that is, the NMOSFET 10 shown in
[0074] The capacitative element C is an element to store environmental energy, and is connected to the other one of the source terminal and drain terminal of at least one MOSFET constituting the rectifying bridge circuit 90 (connected to the drain terminal in
[0075] Note that at least one of (at least one MOSFET constituting) the rectifying bridge circuit 90 and the capacitative element C may be integrated on an energy harvesting IC (not illustrated).
[0076]
[0077] In this manner, AC signals output from the AC signal generation source 80 are subjected to full-wave rectification by the rectifying device 100. Note that, in the rectifying device 100, full-wave rectification to output positive potential to the output terminal OUT1 becomes possible by connecting the output terminal OUT2 to the ground, and full-wave rectification to output negative potential to the output terminal OUT2 becomes possible by connecting the output terminal OUT1 to the ground.
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[0080] Note that, by using the NMOSFET 10 having a triple-well structure in the rectifying device 100, it becomes possible, for example, to connect the output terminal OUT1 to the ground, and perform full-wave rectification to output negative potential to the output terminal OUT2.
[0081] Note that although the NMOSFET 10 having a triple-well structure is used in the rectifying device 100, this is not the sole example, and for example if the output terminal OUT2 is connected to the ground, and full-wave rectification to output a positive voltage to the output terminal OUT1 is performed, the NMOSFET 10 may have a structure other than a triple-well structure.
[0082]
[0083] At Step S1, a diode connection is established in a MOSFET. That is, as shown in
[0084] At Step S2, an AC signal to cause the MOSFET to operate in a voltage region including a weak inversion region is generated by the AC signal generation source 80, and supplied to either the source terminal or drain terminal of the MOSFET (the source terminal of the MOSFET in the rectifying device 100).
[0085] At Step S3, a DC signal obtained through rectification of the AC signal with the MOSFET is obtained from the other one of the source terminal and the drain terminal (the drain terminal of the MOSFET in the rectifying device 100). Thereby, the DC signal flows into the capacitative element C, and stored therein.
[0086] Note that although the rectifying device 100 according to the present embodiment employs full-wave rectification, it may employ half-wave rectification.
[0087]
[0088] The rectifying bridge circuit 91 is configured to include one NMOSFET 10 and one PMOSFET 20. The rectifying bridge circuit 91 has two input terminals IN1 and IN2, and two output terminals OUT1 and OUT2. The NMOSFET 10 has a source terminal 14a connected to the AC signal generation source 80 via the input terminal IN1, and has a drain terminal 15a connected to the capacitative element C via the output terminal OUT2. In addition, the NMOSFETs 10 has an isolation terminal 12a (an n type isolation region 12) connected to the ground. The PMOSFETs 20 has a source terminal 24a connected to the AC signal generation source 80 via the input terminal IN1, and has a drain terminal 25a connected to the capacitative element C via the output terminal OUT1. Furthermore, the input terminal IN2 and output terminal OUT2 are connected to the ground.
[0089] Note that at least one of (at least one MOSFET constituting) the rectifying bridge circuit 91 and the capacitative element C may be integrated on an energy harvesting IC (not illustrated).
[0090] If, in the rectifying device 110 with the above-mentioned configuration, an AC signal with positive charges is input to the input terminal IN1, and an AC signal with negative charges is input to the input terminal IN2 by the AC signal generation source 80, the NMOSFET 10 is cut off, and the PMOSFET 20 becomes electrically conductive; thereby, the positive charges are input to the output terminal OUT1. Thereby, the AC output from the AC signal generation source 80 flows into the capacitative element C via the PMOSFET 20, and is stored in the capacitative element C. In addition, if AC signals of opposite phases, that is, an AC signal with negative charges is input to the input terminal IN1, and an AC signal with positive charges is input to the input terminal IN2 by the AC signal generation source 80, the NMOSFET 10 becomes electrically conductive, and the PMOSFET 20 is cut off; thereby, the input terminals IN1 and IN2 are short-circuited, and the AC signals do not flow into the capacitative element C, but loop. In this manner, AC signals output from the AC signal generation source 80 are subjected to half-wave rectification by the rectifying device 110.
[0091] Note that a rectifying bridge circuit included in a rectifying device may be constituted using only the NMOSFET 10.
[0092]
[0093] The rectifying bridge circuit 92 is configured to include four NMOSFETs 10. The rectifying bridge circuit 92 has two input terminals IN1 and IN2, and two output terminals OUT1 and OUT2, and between those terminals, diode bridge connections are established between the four NMOSFETs 10. The two NMOSFETs 10 located on the left side in the figure each have a drain terminal 15a connected to the AC signal generation source 80 via the input terminals IN1 and IN2, and have a source terminal 14a connected to the capacitative element C via the output terminal OUT1. In addition, these NMOSFETs 10 each have an isolation terminal 12a (that is, an n type isolation region 12) connected to the output terminal OUT1. The two NMOSFETs 10 located on the right side in the figure each have a source terminal 14a connected to the AC signal generation source 80 via the input terminals IN1 and IN2, and have a drain terminal 15a connected to the capacitative element C via the output terminal OUT2. In addition, the NMOSFETs 10 located at an upper right portion and a lower right portion in the figure each have an isolation terminal 12a (that is, an n type isolation region 12) connected to the ground or the output terminal OUT1 (in this case, connected to the ground, for example).
[0094] Note that at least one of (at least one MOSFET constituting) the rectifying bridge circuit 92 and the capacitative element C may be integrated on an energy harvesting IC (not illustrated).
[0095]
[0096] In this manner, AC signals output from the AC signal generation source 80 are subjected to full-wave rectification by the rectifying device 120. In particular, by using the NMOSFETs 10 having triple-well structures in the rectifying device 120, full-wave rectification to output positive potential to the output terminal OUT1 becomes possible by connecting the output terminal OUT2 to the ground, and full-wave rectification to output negative potential to the output terminal OUT2 becomes possible by connecting the output terminal OUT1 to the ground.
[0097] In the rectifying device 120 according to the present variant also, AC signals can be rectified to store power efficiently for the purpose of energy harvesting, similar to the above-mentioned rectifying device 100.
[0098] Note that although the rectifying device 120 according to the present variant employs full-wave rectification, it may employ half-wave rectification.
[0099]
[0100] The rectifying bridge circuit 93 is configured to include two NMOSFETs 10. The rectifying bridge circuit 93 has two input terminals IN1 and IN2, and two output terminals OUT1 and OUT2. The NMOSFET 10 located on the left side in the figure has a drain terminal 15a connected to the AC signal generation source 80 via the input terminal IN1, and has a source terminal 14a connected to the capacitative element C via the output terminal OUT1. In addition, the NMOSFET 10 has an isolation terminal 12a (that is, an n type isolation region 12) connected to the output terminal OUT1. The NMOSFET 10 located on the right side in the figure has a source terminal 14a connected to the AC signal generation source 80 via the input terminal IN1, and have a drain terminal 15a connected to the capacitative element C via the output terminal OUT2. In addition, the NMOSFETs 10 has an isolation terminal 12a (that is, an n type isolation region 12) connected to the ground. Furthermore, the input terminal IN2 and output terminal OUT2 are connected to the ground.
[0101] Note that at least one of (at least one MOSFET constituting) the rectifying bridge circuit 93 and the capacitative element C may be integrated on an energy harvesting IC (not illustrated).
[0102] If, in the rectifying device 130 with the above-mentioned configuration, an AC signal with positive charges is input to the input terminal IN1, and an AC signal with negative charges is input to the input terminal IN2 by the AC signal generation source 80, the NMOSFET 10 on the right side in the figure is cut off, and the NMOSFET 10 on the left side in the figure becomes electrically conductive; thereby, the positive charges are input to the output terminal OUT1. Thereby, the AC output from the AC signal generation source 80 flows into the capacitative element C via the NMOSFET 10 located on the left side, and is stored in the capacitative element C. In addition, if AC signals of opposite phases, that is, an AC signal with negative charges is input to the input terminal IN1, and an AC signal with positive charges is input to the input terminal IN2 by the AC signal generation source 80, the NMOSFET 10 on the right side in the figure becomes electrically conductive, and the NMOSFET 10 on the left side in the figure is cut off; thereby, the input terminals IN1 and IN2 are short-circuited, and the AC signals do not flow into the capacitative element C, but loop. In this manner, AC signals output from the AC signal generation source 80 are subjected to half-wave rectification by the rectifying device 130.
[0103] Note that a rectifying bridge circuit included in a rectifying device may be constituted using only the PMOSFET 20.
[0104]
[0105] The rectifying bridge circuit 94 is configured to include four PMOSFETs 20. The rectifying bridge circuit 94 has two input terminals IN1 and IN2, and two output terminals OUT1 and OUT2, and between those terminals, diode bridge connections are established between the four PMOSFETs 20. The two PMOSFETs 20 located on the left side in the figure each have a source terminal 24a connected to the AC signal generation source 80 via the input terminals IN1 and IN2, and has a drain terminal 25a connected to the capacitative element C via the output terminal OUT1. The two PMOSFETs 20 located on the right side in the figure each have a drain terminal 25a connected to the AC signal generation source 80 via the input terminals IN1 and IN2, and have a source terminal 24a connected to the capacitative element C via the output terminal OUT2. Furthermore, the output terminal OUT2 are connected to the ground.
[0106] Note that at least one of (at least one MOSFET constituting) the rectifying bridge circuit 94 and the capacitative element C may be integrated on an energy harvesting IC (not illustrated).
[0107]
[0108] Note that about the two PMOSFETs 20 located on the right side in the figure, the output terminal OUT2 needs to be at the ground potential such that the forward potential is not applied to the PN junction between the p type semiconductor substrate and the n type well 23; therefore, the rectifying device 140 has a configuration to output only positive potential. By using, instead of the PMOSFETs 20, a MOSFET in which a p type isolation region and an n type well are stacked on an n type semiconductor substrate, and the isolation region isolates the well from the substrate, or a MOSFET in which an n type region, a p type region, and an n type well are formed on a p type semiconductor substrate, and the n type region and p type region isolate the well from the substrate, it is possible to constitute a rectifying bridge circuit that outputs both positive potential and negative potential.
[0109] In the rectifying device 140 according to the present variant also, AC signals can be rectified to store power efficiently for the purpose of energy harvesting, similar to the above-mentioned rectifying device 100.
[0110] Note that although the rectifying device 140 according to the present variant employs full-wave rectification, it may employ half-wave rectification.
[0111]
[0112] The rectifying bridge circuit 95 is configured to include two PMOSFETs 20. The rectifying bridge circuit 95 has two input terminals IN1 and IN2, and two output terminals OUT1 and OUT2. The PMOSFETs 20 located on the left side in the figure has a source terminal 24a connected to the AC signal generation source 80 via the input terminal IN1, and has a drain terminal 25a connected to the capacitative element C via the output terminal OUT1. The PMOSFET 20 located on the right side in the figure has a drain terminal 25a connected to the AC signal generation source 80 via the input terminal IN1, and has a source terminal 24a connected to the capacitative element C via the output terminal OUT2. Furthermore, the input terminal IN2 and output terminal OUT2 are connected to the ground.
[0113] Note that at least one of (at least one MOSFET constituting) the rectifying bridge circuit 95 and the capacitative element C may be integrated on an energy harvesting IC (not illustrated).
[0114] If, in the rectifying device 150 with the above-mentioned configuration, an AC signal with positive charges is input to the input terminal IN1, and an AC signal with negative charges is input to the input terminal IN2 by the AC signal generation source 80, the PMOSFET 20 on the right side in the figure is cut off, and the PMOSFET 20 on the left side in the figure becomes electrically conductive; thereby, the positive charges are input to the output terminal OUT1. Thereby, the AC output from the AC signal generation source 80 flows into the capacitative element C via the PMOSFET 20 located on the left side, and is stored in the capacitative element C. In addition, if AC signals of opposite phases, that is, an AC signal with negative charges is input to the input terminal IN1, and an AC signal with positive charges is input to the input terminal IN2 by the AC signal generation source 80, the PMOSFET 20 located on the right side in the figure becomes electrically conductive, and the PMOSFET 20 located on the left side in the figure is cut off; thereby, the input terminals IN1 and IN2 are short-circuited, and the AC signals do not flow into the capacitative element C, but loop. In this manner, AC signals output from the AC signal generation source 80 are subjected to half-wave rectification by the rectifying device 150.
[0115] The rectifying bridge circuits 90 to 95 included in the rectifying device 100 according to the present embodiment and the rectifying devices 110 to 150 according to the variants use, as a rectifying element, a MOSFET that is driven even in a weak inversion region by short-circuiting the gate, drain, and well, and so have low rectification loss, and small leakage current; therefore, they can constitute rectifying devices that are highly efficient, have low leakage current, can cope with high frequency, and thus are suitable for energy harvesting technologies to collect very weak energy. In addition, using a planar gate MOSFET eliminates necessity for discrete components, and it becomes possible to integrate it with another integrated circuit such as a power supply IC.
[0116] While the embodiments of the present invention have been described, the technical scope of the invention is not limited to the above described embodiments. It is apparent to persons skilled in the art that various alterations and improvements can be added to the above-described embodiments. It is also apparent from the scope of the claims that the embodiments added with such alterations or improvements can be included in the technical scope of the invention.
[0117] The operations, procedures, steps, and stages of each process performed by an apparatus, system, program, and method shown in the claims, embodiments, or diagrams can be performed in any order as long as the order is not indicated by prior to, before, or the like and as long as the output from a previous process is not used in a later process. Even if the process flow is described using phrases such as first or next in the claims, embodiments, or diagrams, it does not necessarily mean that the process must be performed in this order.