Abstract
An apparatus has a semiconductor wafer hosting rows and columns of chips, where the rows and columns of chips are separated by scribe lines. Voltage regulators are positioned within the scribe lines. Each voltage regulator is connected to one or more chips. Selection circuitry is positioned within the scribe lines. The selection circuitry governs access to a chip being tested.
Claims
1. An apparatus, comprising: a semiconductor wafer hosting rows and columns of chips, where the rows and columns of chips are separated by scribe lines; voltage regulators positioned within the scribe lines, each voltage regulator being connected to one or more chips; and selection circuitry positioned within the scribe lines, the selection circuitry governing access to a chip being tested.
2. The apparatus of claim 1 wherein the selection circuitry is connected to the voltage regulators.
3. The apparatus of claim 1 wherein the selection circuitry is connected to the chip being tested.
4. The apparatus of claim 1 wherein the voltage regulators have voltage divider networks.
5. The apparatus of claim 1 wherein current for the chip being tested is isolated from all other chips on the semiconductor wafer.
Description
BRIEF DESCRIPTION OF THE FIGURES
[0011] The invention is more fully appreciated in connection with the following detailed description taken in conjunction with the accompanying drawings, in which:
[0012] FIG. 1 illustrates a semiconductor wafer testing system known in the prior art.
[0013] FIG. 2 illustrates a prior art semiconductor wafer with a scribe line hosting test circuits.
[0014] FIG. 3 illustrates a prior art test circuit and associated probe card needle.
[0015] FIG. 4 illustrates a prior art resistance network associated with a test circuit.
[0016] FIG. 5 illustrates prior art force and sense resistance networks associated with a test circuit.
[0017] FIG. 6 illustrates prior art expanded force and sense resistance networks associated with a test circuit.
[0018] FIG. 7 illustrates another prior art force and sense resistance network.
[0019] FIG. 8 illustrates elements of the disclosed technology.
[0020] FIG. 9 illustrates a voltage regulator utilized in accordance with an embodiment of the invention.
[0021] FIG. 10 illustrates a voltage regulator used with a set of circuits in accordance with an embodiment of the invention.
[0022] FIG. 11 illustrates voltage regulators and associated selection circuitry utilized in accordance with an embodiment of the invention.
[0023] FIG. 12 illustrates voltage regulators and associated selection circuitry utilized in accordance with an embodiment of the invention.
[0024] FIG. 13 illustrates voltage regulators and circuit proximate selection circuitry utilized in accordance with an embodiment of the invention.
[0025] Like reference numerals refer to corresponding parts throughout the several views of the drawings.
DETAILED DESCRIPTION OF THE INVENTION
[0026] FIG. 8 illustrates components of an embodiment of the invention. A voltage regulator 800 is used in connection with a test circuit or Device Under Test (DUT) 802. Access to the voltage regulator 800 or DUT 802 is governed by selection circuitry 804, which is responsive to selection logic 806. The components of FIG. 8 are formed in scribe lines of a wafer, thus they are destroyed after testing.
[0027] FIG. 9 illustrates an embodiment of the voltage regulator 800 and its associated test circuit 802. In this embodiment, the intended Vdd supply voltage at node N4 is regulated or controlled by the feedback loop through the resistors Ri1 and Ri2 to the non-inverting input of a differential amplifier 900. Differential amplifier 900 adjusts the Mi1 pMOS gate voltage and thereby the output resistance of the pMOS so that the IR voltage drop from N3 to N4 will be the same as the reference voltage on Node N1. FIG. 9 is an example of a voltage regulator that may be used. Any voltage regulator used to maintain a steady voltage may be deployed. The circuit should be configured so that the resistance of the voltage regulator varies in accordance with both the input voltage and the load, resulting in a constant voltage output. The regulating device is made to act like a variable resistor, continuously adjusting a voltage divider network to maintain a constant output voltage and continually dissipate the difference between the input and regulated voltages as waste heat.
[0028] FIG. 10 illustrates voltage regulator 800 associated with a set of test circuits 802_1 through 802_N. The power supply to the feedback circuit and to circuit 802_1 (through nodes N2 and N3) can be combined into a single source. If one wants to measure the current and power going to circuit 802_1, supplies are separated so that one can measure the current flowing through node N3 alone. The current and power to the resistor feedback Ri1 and Ri2 is negligible in comparison to the current and power going to circuit 802_1. If node N4 supplies the power for a group of sensor circuits 802_1 through 802_N, then one cannot measure the current and power for each individual sensor circuit. Consequently, the invention utilizes selection circuitry 804.
[0029] FIG. 11 illustrates an embodiment of the selection circuitry 804. The figure illustrates test circuits 1 through j. The following discussion focuses on the first instance of selection circuit 804, voltage regulator 800 and test circuit 802. Three SMUs from the tester are connected to 3 pads (N1, N2 and N3). These three pads are routed to each circuit, each of which contains its own voltage regulator 800 and its own selection circuitry 804. In this example, the selection circuitry 804 is implemented with three pMOS transistors M1_1 M1_2 and M1_3 above the voltage regulator 800. Through another set of probe pads (not shown) control logic or selection logic 806 selects the enable state of the selection circuitry 804 (en1, en2, enj). When the enable pin switches “high” (i.e., en1=1 or high; en1 is enabled), pMOS transistors M1_1 and M1_3 turn on so that the voltage regulator 800 is powered by SMU2 (N2), which sets up the supply voltage on Out1 to follow the reference voltage from N1 (SMU1) and the circuit 802 is powered by only SMU3. The power and current as measured by SMU3 is the power and current in circuit 802. When en1 is enabled, the remaining enable pins are “low” or off, which means that the power to the voltage regulators is turned off and the power to the sensor circuits comes from N2 (SMU2).
[0030] FIG. 12 is a variation of the embodiment of FIG. 11. In FIG. 12, the power to the voltage regulator 800 has a fixed connection to SMU2 (N2) so that the voltage regulators are always running. In this case, however, a second reference voltage can be added to essentially power down the Vdd supplies for sensor circuits that are not enabled (e.g., Out2 . . . Outj are powered down to a low voltage if en1 is selected). This second reference voltage (on node N4) can be provided from another SMU in the tester or it could be a ground or Vss voltage from within the circuit (in which case the MOSFETs in M1_2, M2_2, Mj_2 could be converted to a transmission gate).
[0031] FIG. 13 illustrates an embodiment of the invention where the selection circuitry 804 is connected to the test circuit 802, not the voltage regulator 800. The embodiments of FIGS. 11 and 12 require a dedicated voltage regulator for each sensor circuit. The voltage regulators can occupy a relatively large area. In FIG. 13, the voltage regulator 800 is shared for all of the sensor circuits. The feedback amplifier in both regulators is powered by SMU2 (N2) and both of the regulator outputs, Out1 and Out2, follow the reference voltage from SMU1 (N1). When the enable is turned on for a particular sensor circuit, the power and current for that sensor circuit comes from SMU3 (N3), while the remaining sensor circuits are powered from SMU2 (N2). In this way, one can measure the power and current in SMU3 as the power and current of the intended sensor circuit.
[0032] The foregoing description, for purposes of explanation, used specific nomenclature to provide a thorough understanding of the invention. However, it will be apparent to one skilled in the art that specific details are not required in order to practice the invention. Thus, the foregoing descriptions of specific embodiments of the invention are presented for purposes of illustration and description. They are not intended to be exhaustive or to limit the invention to the precise forms disclosed; obviously, many modifications and variations are possible in view of the above teachings. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, they thereby enable others skilled in the art to best utilize the invention and various embodiments with various modifications as are suited to the particular use contemplated. It is intended that the following claims and their equivalents define the scope of the invention.
