Cooling Member and Vacuum Coating Device

Abstract

The present disclosure relates to a field of semiconductor production device, and more particularly to a cooling member and a vacuum coating device. The cooling member includes a cooling plate and a rotating mechanism. The cooling plate includes at least one cooling strip communicated with a cooling liquid pipeline. The rotating mechanism includes a driving member and a rotating shaft, the driving member is connected with one end of the rotating shaft, and the other end of the rotating shaft is connected with the at least one cooling strip. The rotating mechanism drives the cooling strip in the cooling plate to rotate. In a cooling state, the cooling strip is parallel to a substrate in a chamber, the cooling area is increased, and the cooling efficiency is increased.

Claims

1. A cooling member, comprising a cooling plate and a rotating mechanism, wherein the cooling plate comprises at least one cooling strip communicated with a cooling liquid pipeline, the rotating mechanism comprises a driving member and a rotating shaft, the driving member is connected with one end of the rotating shaft, and the other end of the rotating shaft is connected with the at least one cooling strip.

2. The cooling member as claimed in claim 1, wherein the cooling plate further comprises a frame, the at least one cooling strip is provided in the frame, and the frame is provided with a through hole for the rotating shaft to pass through.

3. The cooling member as claimed in claim 1, wherein the at least one cooling strip is provided with a through hole adapting to the rotating shaft, and the at least one cooling strip and the corresponding rotating shaft rotate synchronously.

4. The cooling member as claimed in claim 1, wherein the driving member is a motor or a cylinder.

5. The cooling member as claimed in claim 2, wherein the frame and the rotating shaft are made of a stainless steel material.

6. A vacuum coating device, comprising a chamber, a heating lamp tube for heating a substrate, and a cooling member as claimed in claim 1, wherein a driving member is provided outside a side wall of the chamber, and a cooling plate is provided between the heating lamp tube and a bottom plate of the chamber.

7. The vacuum coating equipment as claimed in claim 6, wherein one end of the rotating shaft penetrates through a side wall of the chamber through a first sealed rotating device and is connected with the corresponding driving member, and the other end of the rotating shaft is rotatably provided on a symmetrical side wall of the chamber through a second sealed rotating device.

8. The vacuum coating equipment as claimed in claim 7, wherein the first sealed rotating device and the second sealed rotating device are magnetic fluid bearings.

9. The vacuum coating equipment as claimed in claim 6, wherein the frame is fixed to an upper side of the bottom plate of the chamber through a supporting member.

10. The vacuum coating equipment as claimed in claim 6, wherein the heating lamp tube is an infrared lamp tube, and the infrared lamp tube is provided on a lower side of the substrate.

11. A vacuum coating device, comprising a chamber, a heating lamp tube for heating a substrate, and a cooling member as claimed in claim 2, wherein a driving member is provided outside a side wall of the chamber, and a cooling plate is provided between the heating lamp tube and a bottom plate of the chamber.

12. A vacuum coating device, comprising a chamber, a heating lamp tube for heating a substrate, and a cooling member as claimed in claim 3, wherein a driving member is provided outside a side wall of the chamber, and a cooling plate is provided between the heating lamp tube and a bottom plate of the chamber.

13. A vacuum coating device, comprising a chamber, a heating lamp tube for heating a substrate, and a cooling member as claimed in claim 4, wherein a driving member is provided outside a side wall of the chamber, and a cooling plate is provided between the heating lamp tube and a bottom plate of the chamber.

14. A vacuum coating device, comprising a chamber, a heating lamp tube for heating a substrate, and a cooling member as claimed in claim 5, wherein a driving member is provided outside a side wall of the chamber, and a cooling plate is provided between the heating lamp tube and a bottom plate of the chamber.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0018] FIG. 1 is a schematic structure diagram of an embodiment of the present disclosure; and

[0019] FIG. 2 is a sectional view of FIG. 1 along an A-A direction.

[0020] In the drawings, 1: chamber; 2: substrate; 3: heating lamp tube; 4: cooling plate; 41: frame; 42: cooling strip; 5: driving member; 6: first sealed rotating device; 7: rotating shaft; 8: second sealed rotating device.

DETAILED DESCRIPTION OF THE EMBODIMENTS

[0021] The specific implementation manners of the present disclosure will be further described in detail below with reference to the accompanying drawings and embodiments. The following examples are used to illustrate the present disclosure but are not intended to limit the scope of the present disclosure.

[0022] In the descriptions of the present disclosure, unless otherwise specified and limited, it should be noted that terms mounting, mutual connection and connection should be generally understood. For example, the term may be fixed connection, or detachable connection or integrated connection, may be mechanical connection or electrical connection, may be direct connection, may be indirect connection through an intermediate, or may be internal communication between two elements. A person of ordinary skill in the art may understand specific meanings of the above terms in the present disclosure according to specific situations.

[0023] As shown in FIG. 2, a cooling member provided according to an embodiment of the present disclosure includes a cooling plate 4 and a rotating mechanism. The cooling plate 4 includes a frame 41 and a cooling strip 42 provided in the frame 41. The cooling strip 42 is communicated with a cooling liquid pipeline. The rotating mechanism includes a driving member 5 and a rotating shaft 7, the driving member 5 is connected with one end of the rotating shaft 7, the frame 41 is provided with a through hole, and the other end of the rotating shaft 7 penetrates through the through hole of the frame 41 and is connected with the cooling strip 42.

[0024] In an exemplary embodiment, the cooling plate 4 includes a frame 41 and at least one cooling strip 42 provided in the frame 41. In an exemplary embodiment, there are 10 cooling strips 42. The cooling strips 42 are communicated with the cooling liquid pipeline, thereby ensuring that cooling liquid circulates in the cooling strips 42, and improving the cooling efficiency. Meanwhile, the flow of cooling liquid in the cooling strips 42 is able to be controlled according to practical requirements so as to control the cooling effect of the cooling strips 42.

[0025] In an exemplary embodiment, each cooling strip 42 corresponds to an adaptive rotating mechanism, the rotating mechanism includes a driving member 5 and a rotating shaft 7, and the driving member 5 is a motor or a cylinder. In an exemplary embodiment, the driving member is a cylinder, which is lower in cost and easy to control.

[0026] Wherein, a driving end of the cylinder is connected with one end of the rotating shaft 7, the other end of the rotating shaft 7 is rotatably connected with a second sealed rotating device 8. In an exemplary embodiment, a first sealed rotating device 6 and the second sealed rotating device 8 are magnetic fluid bearings.

[0027] In an exemplary embodiment, the frame 41 is provided with a through hole, each of the cooling strips 42 is provided with a through hole, each of the rotating shafts 7 sequentially penetrates through the through hole at one end of the frame 41 and the through hole of the corresponding cooling strip 42, and finally penetrates out of the through hole at the other end of the frame 41, so as to ensure that the rotating shaft 7 can freely rotate in the through hole of the frame 41. Meanwhile, the rotating shaft 7 is sleeved by the through hole to achieve interference fit, so that the rotating shaft 7 drives the corresponding cooling strip 42 to rotate synchronously, and the frame 41 supports the rotating shaft 7 and the cooling strip 42 to ensure normal operation. When the cooling strip 42 is not provided with a through hole, the rotating shaft 7 and the cooling strip 42 may be welded integrally, so as to make the rotating shaft 7 drive the corresponding cooling strip 42 to rotate synchronously.

[0028] In an exemplary embodiment, the frame 41 and the rotating shaft 7 are made of a corrosion-resistant stainless steel material. In an exemplary embodiment, the stainless steel material is SST316L.

[0029] As shown in FIG. 1, some embodiments of the present disclosure provide a vacuum coating device, which includes a chamber 1, a heating lamp tube 3 for heating a substrate 2, and a cooling member. A driving member 5 is provided outside a side wall of the chamber 1, and a cooling plate 4 is provided between the heating lamp tube 3 and a bottom plate of the chamber 1.

[0030] In an exemplary embodiment, the heating lamp tube 3 is provided on a lower side of the substrate 2 and is used as a heating source to heat the substrate 2, the cooling plate 4 is provided between the heating lamp tube 3 and a bottom plate of the chamber and is used to cool the substrate 2.

[0031] In an exemplary embodiment, the heating lamp tube 3 is an infrared lamp tube, which is low in energy consumption and high in heating efficiency, and the frame 41 is fixed to an upper side of the bottom plate of the chamber 1 through a supporting member.

[0032] Wherein, one end of the rotating shaft 7 penetrates through a side wall of the chamber 1 through a first sealed rotating device 6 and is connected with the driving member 5, the driving end of a cylinder is provided outside the side wall of the chamber 1 through the first sealed rotating device 6, and the first sealed rotating device 6 is in sealing fit with the side wall of the chamber 1 to ensure an overall sealing property of the chamber 1. The other end of the rotating shaft 7 is rotatably provided on a symmetrical side wall of the chamber 1 through a second sealed rotating device 8, and the first sealed rotating device 6 and the second sealed rotating device 8 are both magnetic fluid bearings, so as to ensure sealed connection between the rotating shaft 7 and the side wall of the chamber 1, thereby improving the sealing performance of the device.

[0033] The operation steps of some embodiments of the present disclosure are as follows:

[0034] When the substrate needs to be cooled, the cooling strips are parallel to the substrate, cooling liquid circulates, and the flow of the cooling liquid can be increased as needed to improve the cooling efficiency.

[0035] When the substrate needs to be heated, the cylinder drives the rotating shaft to drive the corresponding cooling strip to rotate by 90 degrees, so that the cooling strip is perpendicular to the substrate, and the flow of the cooling liquid is reduced, so that the infrared heating tube fully heats the substrate, thereby improving the heating efficiency.

[0036] According to the cooling member provided in some embodiments of the present disclosure, the rotating mechanism drives the cooling strip in the cooling plate to rotate. In a cooling state, the cooling strip is parallel to the substrate in the chamber, the cooling area is increased, and the cooling efficiency is improved. In a non-cooling state, the driving member drives the cooling strip to rotate, so that the cooling strip is perpendicular to the substrate in the chamber, the cooling area is decreased, the heating efficiency is improved, rapid switching of the process temperature is realized, the process production time is shortened, the production capacity of the equipment is increased, and energy consumption is reduced.

[0037] The above descriptions are merely preferred embodiments of the present disclosure and are not intended to limit the present disclosure. Any modifications, equivalent replacements and improvements made within the spirit and principle of the present disclosure shall fall within the scope of protection of the present disclosure.