Method for producing an optoelectronic component and an optoelectronic component
10319789 · 2019-06-11
Assignee
Inventors
Cpc classification
H01L2933/00
ELECTRICITY
H10K59/351
ELECTRICITY
H01L33/06
ELECTRICITY
International classification
H01L33/00
ELECTRICITY
H01L33/06
ELECTRICITY
Abstract
An optoelectronic component and a method for producing an optoelectronic component are disclosed. In embodiments, the method includes A) providing an auxiliary carrier; B) applying a sacrificial layer on the auxiliary carrier; C) applying a converter layer on the sacrificial layer, which includes quantum dots embedded in a matrix material or a luminescent polymer; D) providing a semiconductor layer sequence; E) optionally applying an adhesive layer on the semiconductor layer sequence; F) optionally bonding the converter layer on the semiconductor layer sequence by means of an adhesive layer, wherein the semiconductor layer sequence is configured to emit radiation; and G) removing the auxiliary carrier by means of optical, mechanical and/or chemical treatment and at least partially destroying the sacrificial layer.
Claims
1. A method for producing an optoelectronic component, the method comprising: A) providing an auxiliary carrier; B) applying a sacrificial layer on the auxiliary carrier; C) applying a first converter layer on the sacrificial layer, the first converter layer comprises quantum dots embedded in a matrix material or a luminescent polymer; D) providing a semiconductor layer sequence, wherein the first converter layer is in direct contact with the semiconductor layer sequence; and E) removing the auxiliary carrier by optical, mechanical and/or chemical treatment and partially destroying the sacrificial layer such that the sacrificial layer partially remains at a side of the first converter layer facing away from the semiconductor layer sequence.
2. The method according to claim 1, wherein steps A) to E) are repeated once more, so that a white emitting optoelectronic component is produced which has a stack of two converter layers, wherein the semiconductor layer sequence is configured to emit radiation in a blue wavelength range, wherein the first converter layer is configured to emit radiation in a red wavelength range and a second converter layer is configured to emit radiation in a green wavelength range.
3. The method according to claim 1, wherein steps A) to E) are repeated at least twice, so that an optoelectronic component is produced which has a stack of at least three converter layers.
4. The method according to claim 3, wherein a white emitting optoelectronic component is produced, wherein the first converter layer is configured to emit radiation in a green wavelength range, wherein a second converter layer is configured to emit radiation in a red wavelength range, and wherein a third converter layer is configured to emit radiation in a yellow wavelength range.
5. The method according to claim 1, wherein the first converter layer is arranged downstream of the semiconductor layer sequence in a main emission direction and are configured to emit radiation in different wavelength ranges.
6. The method according to claim 1, wherein steps A) to E) are repeated at least twice, so that an optoelectronic component is produced wherein converter layers are arranged structured in a plane, when viewed in cross section, onto the optoelectronic component.
7. The method according to claim 1, wherein a maximum thickness of the first converter layer is 2 m.
8. The method according to claim 1, wherein the auxiliary carrier in step E) is removed by laser lift-off.
9. The method according to claim 1, wherein the auxiliary carrier in step E) is removed by etching or grinding.
10. The method according to claim 1, wherein the sacrificial layer is made of an organic or inorganic material.
11. The method according to claim 1, wherein the sacrificial layer comprises a material which is selected from the group consisting of GaN, CeO.sub.2, AlN, SiNx, HfO.sub.2 and Ga.sub.2O.sub.3.
12. The method according to claim 1, wherein the sacrificial layer is applied by one of the following methods: spin-coating, physical vapor deposition, chemical vapor deposition.
13. The method according to claim 1, wherein the quantum dots are selected from the group consisting of InP, CdS, CdSe, InGaAs, GaInP, CuInSe.sub.2, ZnSe, ZnS, CdTe, GaSe, AgGaSe.sub.2, CuGaS.sub.2, CuInS.sub.2, CuGaSe.sub.2 and ZnGeP.sub.2.
14. The method according to claim 1, wherein the matrix material or adhesive layer material is selected from the group consisting of silicone, epoxy, and wax.
15. The method according to claim 1, wherein the semiconductor layer sequence is an organic or inorganic light-emitting diode.
16. An optoelectronic component comprising: a first converter layer on a sacrificial layer, wherein the first converter layer comprises quantum dots embedded in one of a matrix material or a luminescent polymer; a semiconductor layer sequence, wherein the first converter layer is in direct contact with the semiconductor layer sequence; and the sacrificial layer which is arranged at a side of the first converter layer facing away from the semiconductor layer sequence.
17. The method according to claim 1, wherein a second converter layer is applied at the side of the first converter layer facing away from the semiconductor layer sequence; wherein the sacrificial layer is arranged between the first and the second converter layer, and wherein the sacrificial layer is in direct contact with the first and the second converter layer.
18. The optoelectronic component according to claim 16, wherein the sacrificial layer is selected from the group consisting of: GaN, CeO.sub.2, AN, SiN.sub.x, HfO.sub.2, Ga.sub.2O.sub.3.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) Embodiments and developments of the herein described method and component will become apparent from exemplary embodiments described below in association with the figures. In the figures:
(2)
(3) The elements illustrated in the figures and their mutual size ratio should not be regarded as true to scale. Rather, the individual elements may be represented with an exaggerated size for the sake of better representability and/or for the sake of better understanding
DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
(4)
(5)
(6)
(7)
(8)
(9) semiconductor layer sequence 4,
(10) first adhesive layer 51,
(11) first converter layer 31,
(12) first sacrificial layer 21,
(13) second converter layer 32,
(14) second sacrificial layer 22,
(15) third converter layer 33,
(16) third sacrificial layer 23.
(17) The first adhesive layer 51 can be optional if the matrix material in which quantum dots are embedded can used as an adhesive material too.
(18) Optionally, the sacrificial layers can be removed by dissolving or etching techniques. Optionally, further adhesive layers can be arranged between the converter layers.
(19)
(20)
(21) The second converter layer is bonded using a polymer adhesive followed by lift-off to have multilayer quantum dot converters with two different properties.
(22) The x converter layers are bonded using polymer adhesive followed by lift-off to have multilayer quantum dot converters with various different properties.
(23) The herein disclosed invention is not restricted to the exemplary embodiments of the description on the basis of the said exemplary embodiments. Rather, the invention encompasses any new feature and also any combination of features which in particular comprises any combination of features in the patent claims and any combination of the features in the exemplary embodiments even if this feature or this combination itself is not explicitly specified in the patent claims or the exemplary embodiments.