Holder device for electron microscope

Abstract

Disclosed is a holder device for an electron microscope, which efficiently collects light emitted when electrons collide with a sample inside the electron microscope and is selectively usable in various electron microscopes since it can be easily attached to and detached from the electron microscopes. The holder device includes a frame; a sample support block configured to be supported on the frame and comprising a sample mounting portion to support an edge of a sample; a mirror unit configured to comprise an upper mirror and a lower mirror respectively arranged above and below the sample and reflect light radiating from the sample, which is mounted to the sample mounting portion and to which an electron beam is emitted, in a predetermined direction; a condensing lens configured to condense light from the mirror unit on a predetermined target; and an optical fiber configured to collect light from the condensing lens.

Claims

1. A holder device for an electron microscope adapted to collect cathodoluminescence from a sample, the device comprising: a frame; a sample support block coupled to the frame and comprising a sample mounting portion to have a sample mounted to the sample support block; and a mirror unit comprising a mirror adapted to reflect cathodoluminescence light radiating from the sample, which is mounted to the sample mounting portion and to which an electron beam is emitted, in a predetermined direction; a condensing lens mounted to the mirror unit and configured to condense the cathodoluminescence light from the mirror unit on an optical fiber configured to collect the cathodoluminescence light from the condensing lens.

2. The holder device for an electron microscope according to claim 1, wherein the mirror unit comprises an upper mirror and a lower mirror respectively arranged above and below the sample, and a sample approach slit provided in between the upper mirror and the lower mirror for allowing the sample mounting portion to move in and out along a surface of the sample.

3. The holder device for an electron microscope according to claim 2, wherein the mirror unit comprises an electron through hole via which the electron beam emitted to the sample passes.

4. The holder device for an electron microscope according to claim 1, further comprising: an optical fiber holder configured to hold the optical fiber; and a coupler configured to couple the optical fiber holder and the mirror unit.

5. The holder device for an electron microscope according to claim 4, wherein the coupler is movably supported on the frame so that the mirror unit can reciprocate between an inspection position where the sample mounting portion is placed within the mirror unit and an idle position where the sample mounting portion is separated from the mirror unit.

6. The holder device for an electron microscope according to claim 1, wherein a slide pin extended in parallel with a lengthwise direction of the frame is coupled to the mirror unit and the sample support block to guide the mirror unit to slidably move relative to the sample support block.

7. The holder device for an electron microscope according to claim 6, further comprising: a support rod having one end portion to which the frame is detachably coupled and an axial hole through which the optical fiber passes; and a grip portion provided at the other end portion of the support rod.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) FIG. 1 is a perspective view showing a holder device for an electron microscope according to an exemplary embodiment,

(2) FIGS. 2 to 4 are assembled views and a partial exploded perspective view of a head, which are to explain a head portion of a holder device for an electron microscope according to an exemplary embodiment,

(3) FIGS. 5 and 6 are perspective views for explaining a sample support block and an assembly relationship between the sample support block and a mirror unit according to an exemplary embodiment,

(4) FIG. 7 is a perspective view showing a coupling relationship among the mirror unit, a lens and a coupler according to an exemplary embodiment,

(5) FIG. 8 is a rear view of the mirror unit according to an exemplary embodiment, and

(6) FIG. 9 is an optical concept view for explaining a light condensing mechanism of the holder device for the electron microscope according to an exemplary embodiment.

(7) For reference, numerals in drawings are as follows.

(8) TABLE-US-00001 1: Head 10: Support Rod 11: Grip 20: Frame 21: Fixture 22: Frame Arm 23: Mounting Screw 24: Adjustment Screw 30: Sample Support Block 31: Holding Block 32: Protrusion 33: Fastening Hole 34: Bridge 35: Sample Mounting Portion 36: Slide Insertion Hole 37: Mounting Raised Portion 38: Copper Tube Hold Portion 39: Mounting Hole 40: Optical Fiber 41: Copper Tube 50: Coupler 51: Optical Fiber Holder 53: Optical Fiber Insertion Hole 60: Lens 70: Mirror Unit 71: Electron Through Hole 72: Guide Insertion Portion 73: Sample Approach Slit 74: Lens Mounting Portion 75: Upper Mirror Portion 76: Upper Mirror Surface 77: Lower Mirror Portion 78: Lower Mirror Surface 79: Extended Portion 80: Slide Guide 81: Slide Guide Hole 90: Sample 91: Sample Arrangement Pin

DETAILED DESCRIPTION OF THE INVENTION

(9) FIG. 1 is a perspective view showing a holder device for an electron microscope according to an exemplary embodiment. As shown in FIG. 1, the holder device is provided in the form of a long rod, and includes a support rod 10 to be inserted in the electron microscope, and a holder grip 11 coupled to one end portion of the support rod 10 and fixed to a main body of the electron microscope so as to be gripped by a worker. Further, a head 1 is mounted to the other end portion of the support rod 10 so as to support a sample 90 to be analyzed and collect cathodoluminescence generated in the sample 90.

(10) FIGS. 2 to 4 are assembled views and a partial exploded perspective view of the head 1, which are to explain the head 1 of the holder device for an electron microscope according to an exemplary embodiment. As shown therein, the head 1 includes a frame 20 coupled to the support rod 10. The frame 20 is coupled to an end of the support rod 10 and includes a pair of frame arms 22 extended in parallel with each other in a lengthwise direction of the support rod 10. The support rod 10 is shaped like a tube and accommodates a copper tube 41 in its axial direction, and an optical fiber 40 penetrates the copper tube 41 in the axial direction.

(11) The copper tube 41 is exposed at the end of the support rod 10 and extended to a region of the frame arms 22. A fixture 21 for fixing the position of the copper tube 41 is installed to the frame arms 22 by a mounting screw 23. The fixture 21 includes a through hole formed in the axial direction of the support rod 10, and the copper tube 41 is coaxially accommodated in the through hole of the fixture 21. Further, adjustment screws 24 opposite to each other are inserted in the fixture 21 in a radial direction, and thus stably fix the copper tube 41 on to a central axis in which a light beam travels.

(12) One end of the optical fiber 40 accommodated in the copper tube 41 is inserted in and coupled to an optical fiber holder 51 shaped like a tube. The optical fiber holder 51 is coaxially and integrally coupled to a coupler 50 shaped like a tube having a relatively large diameter. The other end of the optical fiber 40 is connected to an external device of the electron microscope.

(13) A sample support block 30 is installed in between both the frame arms 22. Referring to the enlarged perspective views of FIGS. 5 and 6 together with FIGS. 2 to 4, the sample support block 30 includes a sample mounting portion 35 for supporting an edge of the sample 90, and a copper tube hold portion 38 for accommodating about half of the exterior of the copper tube 41. The sample mounting portion 35 and the copper tube hold portion 38 are connected by a pair of bridges 34 extended in parallel in the longitudinal direction of the sample support block 30. There is an opened area in between the pair of bridges 34.

(14) The sample mounting portion 35 has a semicircular shape and supports an edge of a sample. There is a hole in a center portion of the sample mounting portion 35 so that an electron beam can pass through the center portion. The sample mounting portion 35 is formed with a mounting raised portion 37 having a height corresponding to a thickness of a sample 90 so that the sample 90 can be stably mounted thereto. If a sample 90 is stably mounted to the sample mounting portion 35, the sample 90 is fixed by the sample arrangement pin 91.

(15) The copper tube hold portion 38 has a curved shape to receive the copper tube 41. A hold block 31 including a copper tube hold portion 38 having a curved shape corresponding to the copper tube hold portion 38 is coupled to the sample support block 30 by screws inserted into a pair of fastening holes 33, leaving the copper tube 41 between the hold block 31 and the sample support block 30.

(16) Mounting holes 39 are formed by penetrating end portions of the sample support block 30 and the frame arms 22 in a traverse direction to the axial direction. By inserting an arrangement fin to the mounting holes 39, the pair of frame arms 22 and the sample support block 30 are coupled.

(17) A pair of protrusions 32 is formed in a region of bridges 34 contacting the copper tube hold portion 38 and protrudes by a predetermined height in a height direction. Each protrusion 32 is formed with a slide insertion hole 36 in the axial direction so that a slide guide 80 can be inserted in the slide insertion hole 36. The slide guide 80 inserted in and coupled to the slide insertion hole 36 in the axial direction is accommodated in a mirror unit 70 and guides movement of the mirror unit 70.

(18) The mirror unit 70 includes a sample approach slit 73 allowing the sample mounting portion 35 to move in and out along a surface of a sample 90, and an upper mirror portion 75 and a lower mirror portion 77 divided with the sample approach slit 73 therebetween. On the top surface of the upper mirror portion 75 is formed an electron through hole 71 to which an electron beam is emitted. The electron through hole 71 is formed by straightly penetrating the upper mirror portion 75 and the lower mirror portion 77 in the height direction. An extended portion 79 is provided at an axial opposite side of the upper mirror portion 75 and the lower mirror portion 77 and extended to have a predetermined length in the state that the upper portion is opened. A region, where the extended portion 79 starts being extended from the upper mirror portion 75 and the lower mirror portion 77, serves as a lens mounting portion 74 to which a lens 60 is mounted.

(19) A guide insertion portion 72 is provided at the lateral sides of the mirror unit 70 and protrudes in lateral directions. The guide insertion portion 72 is formed with a slide guide hole 81 penetrated in the axial direction so as to receive a slide guide 80.

(20) As shown in FIG. 6, in the state that the slide guide 80 is inserted in the slide guide hole 81, the mirror unit 70 moves down in the height direction of the sample support block 30 and is then inserted in the opened area between the bridges 34. Thus, a lower portion of the lower mirror portion 77 is inserted in the opened area between the bridge 34, and the pair of guide insertion portions 72 are supported on the pair of bridges 34.

(21) In such a state that the guide insertion portions 72 are supported on the sample support block 30, the slide guide 80 is inserted and fixed in the slide insertion hole 36. Therefore, the mirror unit 70 can lengthwise reciprocate along the slide guide 80.

(22) FIG. 7 is a perspective view showing a coupling relationship among the mirror unit 70, the lens 60 and a coupler 50 according to an exemplary embodiment. As shown in FIG. 7, the lens 60 is supported on the lens mounting portion 74. The lens 60 serves to condense light reflected from an upper mirror surface 76 and a lower mirror surface 78 on an end surface of the optical fiber 40.

(23) Further, the coupler 50 may be fitted into or adhered to the extended portion 79. The coupler 50 may be provided integrally with the optical fiber holder 51. An optical fiber insertion hole 53 penetrates the optical fiber holder 51 in the axial direction. The optical fiber 40 is inserted in the optical fiber insertion hole 53 and coupled to the optical fiber holder 51. At this time, the end of the optical fiber 40 is positioned at a point on which the light from the lens 60 is converged. When the position of the optical fiber 40 is set, the optical fiber holder 51 and the optical fiber 40 are fixed to each other.

(24) FIG. 8 is a rear view of the mirror unit according to an exemplary embodiment. The upper mirror portion 75 and the lower mirror portion 77 are formed with the upper mirror surface 76 and the lower mirror surface 78 having parabolic shapes, respectively. The upper mirror surface 76 and the lower mirror surface 78 are provided to reflect light from a sample 90 toward the lens mounting portion 74. There is a through space in between the upper and lower mirror surfaces 76 and 78 and the lens mounting portion 74.

(25) With the foregoing structure, the holder device for an electron microscope according to an exemplary embodiment has a function of condensing light.

(26) A process of collecting cathodoluminescence caused by collision between an electron beam and a sample 90 is as follows. First, in an idle position where the sample mounting portion 35 is separated from the mirror unit 70, a sample 90 to be analyzed is mounted to the sample mounting portion 35 and fixed by the sample arrangement pin 91 as shown in FIG. 2. Then, as shown in FIG. 3, the mirror unit 70 is moved to an inspection position so that the sample mounting portion 35 can be positioned inside the mirror unit 70 so that the sample 90 can be placed on the same line as the electron through hole 71 in the height direction. To move the mirror unit 70, the optical fiber 40 extended to the exterior of the electron microscope is controlled in the holder grip 11 so that the coupler 50 coupled to the optical fiber 40 can move with respect to the frame 20 in the axial direction.

(27) Then, the electron microscope is controlled to emit the electron beam toward the electron through hole 71. The electron beam passes through the electron through hole 71 and then collides with the sample 90. Thus, light is emitted while electrons move between energy band gaps of the sample 90.

(28) FIG. 9 is an optical concept view for explaining a light condensing mechanism of the holder device for the electron microscope according to an exemplary embodiment. As shown in FIG. 9, cathodoluminescence emitted from a sample 90 is reflected from the upper and lower mirror surfaces 76 and 78 surrounding the sample 90 toward the lens 60. Then, the lens 60 condenses the cathodoluminescence on the end surface of the optical fiber 40. Thus, the cathodoluminescence emitted from the sample 90 is collected in the optical fiber 40. The optical fiber 40 transmits the collected cathodoluminescence to an external analysis device.

(29) Further, if various experiments for an X-ray analysis, an analysis using secondary electrons and back electrons 2, etc. are additionally needed, the mirror unit 70 is moved to the position separated from the sample mounting portion 35 as shown in FIG. 2 and then the experiments are carried out.