Method and Fourier Transformation spectrometer with double beam interferometer for Single Shot Imaging Fourier Spectroscopy
11530982 · 2022-12-20
Assignee
Inventors
Cpc classification
G01N21/31
PHYSICS
G01J3/0229
PHYSICS
A61B5/0075
HUMAN NECESSITIES
International classification
Abstract
Fourier Transformation Spectrometer, FT Spectrometer, comprising: A double beam interferometer, comprising: At least one beam splitter unit (622; 623; 624, 625, 626, 627; 636; 673, 674, 675) for splitting an incident light beam (EB) of a spatially expanded object into a first partial beam (TB1) and a second partial beam (TB2); at least a first beam deflection unit (630; 641; 651; 661; 697) designed to deflect the first partial beam (TB1) at least a first and a second time, wherein the second beam deflection unit (630) is designed to also deflect the second partial beam (TB2) at least at first and a second time; or the double beam interferometer comprises a second beam deflection unit (642; 652; 662) designed to deflect the second partial beam (TB2) at least a first and a second time, wherein the beam deflection unit is also designed to at least partially spatially overlay the first partial beam (TB1) and the second partial beam (TB2), and the respectively first and second deflection of the first partial beam (TB1) and of the second partial beam (TB2) generates a lateral shear (s); at least a first field of view discriminator unit (BFD1; 631; 645; 653; 656; 666; 677; 976) arranged such that the first partial beam (TB1) is spatially selected after the splitting and prior to the second deflection; at least a second field of view discriminator unit (BFD2; 632; 646; 654; 657; 667; 678; 977) arranged such that the second partial beam (TB2) is spatially selected after the splitting and prior to the second deflection.
Claims
1. A Fourier Transformation Spectrometer (FT spectrometer), comprising: a double beam interferometer, comprising: at least one beam splitter unit for splitting an incident light beam of a spatially expanded object into a first partial beam and a second partial beam; at least one first beam deflection unit designed to deflect the first partial beam at least a first and a second time, wherein the first beam deflection unit is designed to also deflect the second partial beam at least a first and a second time; or the double beam interferometer comprises a second beam deflection unit designed to deflect the second partial beam at least a first and a second time, wherein the beam splitter unit is also designed to spatially at least partially overlay the first partial beam and the second partial beam, and wherein the respectively first and second deflection of the first partial beam and the second partial beam generates the lateral shear(s); at least one first field of view discriminator unit arranged such that the first partial beam is spatially selected after the splitting and before the second deflection; at least one second field of view discriminator unit arranged such that the second partial beam is spatially selected after the splitting and before the second deflection; wherein the FT spectrometer additionally comprises: at least one lens arranged opposite the beam splitter unit such that the incident light beam passes the lens at least partially before said light beam is split on the beam splitter unit and the first partial beam and the second partial beam respectively generate a plurality of coherent image points of the spatially expanded object in an image plane between the beam splitter unit and a detector; the detector to record a plurality of spatial interferograms on the basis of the spatial overlay of the first partial beam and the second partial beam, which corresponds to the at least partial imaging of the plurality of coherent image points; and at least one computing unit for the Fourier transformation of the plurality of spatial interferograms to generate a plurality of spectrums, and based thereon, to generate a hyperspectral image of the spatially expanded object.
2. The FT spectrometer according to claim 1, wherein the beam splitter unit comprises a single beam splitter, in order to split the incident light beam of a spatially expanded object into the first partial beam and the second partial beam; and to at least partially spatially overlay the first partial beam and the second partial beam.
3. The FT spectrometer according to claim 1, wherein the first field of view discriminator unit and the second field of view discriminator unit are arranged in relation to each other such that at least approximate conjugation is created between the first field of view discriminator unit and the second field of view discriminator unit.
4. The FT spectrometer according to claim 1, wherein the double beam interferometer corresponds to a Michelson-Type Interferometer, comprising the second beam deflection unit, wherein the first beam deflection unit has a double mirror periscope reflector that hereinafter comprises: a first mirror designed to reflect the first partial beam for at least a first time; and a second mirror that is arranged at an angle Θ.sub.1 in relation to the first mirror, and that is designed to reflect the first partial beam for at least a second time; and/or the second beam deflection unit has a further double mirror periscope reflector that hereinafter comprises: a first mirror designed to reflect the second partial beam for at least a first time; and a second mirror that is arranged at an angle Θ.sub.2 in relation to the first mirror, and that is designed to reflect the second partial beam for at least a second time.
5. The FT spectrometer according to claim 1, wherein the double beam interferometer corresponds to a Michelson-Type Interferometer, comprising the second beam deflection unit, wherein the first beam deflection unit comprises a triple mirror periscope reflector that hereinafter comprises: a first mirror designed to reflect the first partial beam for at least a first time; and a second mirror that is arranged at an angle Θ.sub.1 in relation to the first mirror, and that is designed to reflect the first partial beam for at least a second time; and a third mirror that is arranged at an angle Θ.sub.1 in relation to the first mirror and at an angle Θ.sub.b1 in relation to the second mirror, and that is designed to reflect the first partial beam for at least a third time; and/or the second beam deflection unit has a further triple mirror periscope reflector that hereinafter comprises: a first mirror designed to reflect the second partial beam for at least a first time; and a second mirror that is arranged at an angle Θ.sub.2 in relation to the first mirror, and that is designed to reflect the second partial beam for at least a second time; and a third mirror that is arranged at an angle Θ.sub.a2 in relation to the first mirror and at an angle Θ.sub.b2 in relation to the second mirror, and that is designed to reflect the second partial beam for at least a third time, wherein the first field of view discriminator unit has an opening designed to spatially select the first partial beam after the first reflection using the first mirror of the first beam deflection unit and prior to the second reflection using the second mirror of the first beam deflection unit; and/or the second field of view discriminator unit has a further opening designed to spatially select the second partial beam after the first reflection using the first mirror of the second beam deflection unit and prior to the second reflection using the second mirror of the second beam deflection unit.
6. The FT spectrometer according to claim 1, wherein the double beam interferometer corresponds to a Michelson-Type Interferometer, comprising the second beam deflection unit, wherein the first beam deflection unit further comprises: a first prism having: a first reflection surface designed to reflect the first partial beam at least a first time; and a second reflection surface designed to reflect the first partial beam at least a second time; and/or the second beam deflection unit further comprises: a second prism having a first reflection surface designed to reflect the second partial beam at least a first time; and a second reflection surface designed to reflect the second partial beam at least a second time.
7. The FT spectrometer according to claim 6, wherein the first field of view discriminator unit has an opening designed to spatially select the first partial beam after the splitting of the incident light beam using the beam splitter unit and prior to the first reflection of the first partial beam using the first reflection surface of the first prism; and/or the second field of view discriminator unit has an opening designed to spatially select the second partial beam after the splitting of the incident light beam using the beam splitter unit and prior to the first reflection of the second partial beam using the first reflection surface of the second prism.
8. The FT spectrometer according to claim 1, wherein the double beam interferometer corresponds to a Mach-Zehnder Interferometer, comprising the second beam deflection unit, and wherein the beam splitter unit further comprises: a first single beam splitter for splitting the incident light beam into the first partial beam and the second partial beam; and a second single beam splitter to at least partially spatially overlay the first partial beam and the second partial beam, wherein the first beam deflection unit further comprises: a first mirror designed to reflect the first partial beam for at least a first time; and a second mirror that is arranged at an angle Θ.sub.3 in relation to the first mirror, and that is designed to reflect the first partial beam for at least a second time; and/or wherein the second beam deflection unit further comprises: a first mirror designed to reflect the second partial beam for at least a first time; and a second mirror that is arranged at an angle Θ.sub.4 in relation to the first mirror, and that is designed to reflect the second partial beam for at least a second time.
9. The FT spectrometer according to claim 8, wherein the first field of view discriminator unit has an opening designed to spatially select the first partial beam after the first reflection using the first mirror of the first beam deflection unit and prior to the second reflection using the second mirror of the first beam deflection unit; and/or the second field of view discriminator unit has a further opening designed to spatially select the second partial beam after the first reflection using the first mirror of the second beam deflection unit and prior to the second reflection using the second mirror of the second beam deflection unit.
10. The FT spectrometer according to claim 1, wherein the double beam interferometer corresponds to a cyclical double beam interferometer, wherein the first beam deflection unit is designed to also deflect the second partial beam at least a first and a second time, the first field of view discriminator unit has an opening designed to spatially select the first partial beam after the first deflection and prior to the second deflection; and the second field of view discriminator unit has a further opening designed to spatially select the second partial beam after the first deflection and prior to the second deflection.
11. The FT spectrometer according to claim 10, wherein the beam deflection unit has a double mirror periscope reflector that hereinafter comprises: a first mirror designed to reflect the first partial beam at least a first time, and to reflect the second partial beam at least a second time; and a second mirror that is arranged at an angle epsilon in relation to the first mirror, and that is designed to reflect the second partial beam at least a first time and to reflect the first partial beam at least a second time.
12. The FT spectrometer according to claim 10, wherein the beam deflection unit has a double-prism arrangement that hereinafter comprises the following a first prism having at least one reflection surface designed to reflect the first partial beam at least a first time, and to reflect the second partial beam at least a second time; and a second prism having at least one reflection surface designed to reflect the second partial beam at least a first time, and to reflect the first partial beam at least a second time.
13. The FT spectrometer according to claim 10, wherein the first field of view discriminator unit has an opening designed to spatially select the first partial beam after the first reflection using the first mirror or the reflection surface of the first prism and prior to the second reflection using the second mirror or the reflection surface of the second prism; and the second field of view discriminator unit has a further opening designed to spatially select the second partial beam after the first reflection using the first mirror or the reflection surface of the second prism and prior to the second reflection using the first mirror or the reflection surface of the first prism.
14. A method for interferometric measurement using an FT spectrometer with a double beam interferometer, the method comprising: splitting an incident light beam transmitted from a spatially expanded object into a first partial beam and a second partial beam using a beam splitter unit; a first and second deflection of the first partial beam using a first beam deflection unit; a first and second deflection of the second partial beam using the first beam deflection unit or using a second beam deflection unit, wherein the first and second deflection of the first partial beam and the second partial beam generates a lateral shear(s); spatially selecting at least a part of the first partial beam after the splitting using a first field of view discriminator unit in the double beam interferometer; and spatially selecting at least a part of the second partial beam after the splitting using a second field of view discriminator unit in the double beam interferometer; sending the incident light beam through a lens prior to the splitting to generate a plurality of coherent image points of the spatially expanded object in an image plane between the beam splitter unit and a detector; at least partially spatially overlaying the first partial beam and the second partial beam using the beam splitter unit; at least partially rendering the plurality of coherent image points while at the same time generating a plurality of spatial interferograms on a detector field of the detector on the basis of the spatial overlay; recording the plurality of interferograms using the detector; Fourier transforming the plurality of spatial interferograms to generate a plurality of spectrums, and based thereon, generating a hyperspectral image of at least a section of the spatially expanded object.
15. The method for interferometric measurement according to claim 14, further comprising the steps initiated by at least one computer unit: multiple simultaneous recording of the plurality of spatial interferograms at respectively different points in time; and Fourier transforming the plurality of spatial interferograms recorded at respectively different points in time to generate a plurality of spectrums; and generating a hyperspectral image of the spatially expanded object.
16. The method for interferometric measurement according to claim 14, wherein the spatial selecting of the at least a part of the first partial beam occurs prior to the second deflection.
17. The method for interferometric measurement according to claim 14, wherein the spatial selecting of the at least a part of the first partial beam occurs after the second deflection.
18. The method for interferometric measurement according to claim 14, wherein the spatial selecting of the at least a part of the second partial beam occurs prior to the second deflection.
19. The method for interferometric measurement according to claim 14, wherein the spatial selecting of the at least a part of the second partial beam occurs after the second deflection.
Description
(1) A description of the drawing follows, and the exemplary embodiments show:
(2)
(3)
(4)
(5)
(6)
(7)
(8)
(9)
(10)
(11)
(12)
(13)
(14)
(15)
(16)
(17)
(18)
(19)
(20)
(21)
(22)
(23)
(24)
(25)
(26)
(27)
(28)
(29)
(30)
(31)
(32)
(33)
(34)
(35)
(36)
(37)
(38)
(39)
(40)
(41)
(42) A description is provided by means of
(43) In the description to follow, the term ‘light’ is essentially used as a synonym for electromagnetic radiation, in particular from the UV up to the terahertz range, including infrared radiation, in particular thermal radiation. Herein, the term “Spectrometer System” in particular refers to a Single Shot Fourier Transformation Spectrometer with a double beam interferometer, which is designed to generate a lateral shear s. This can either be based on an active illumination of the measured object, which preferably can also represent a structured illumination, and/or the measured object can be self-luminescent; external light can in particularly be scattered from the surface of the measured object. The term “Single Shot” essentially refers to obtaining or generating or capturing spatial interferograms by means of double beam interferometry with a single recording of a raster detector, generally an image recording in a comparatively short time. This is generally the integration time of a camera in the UV, in the VIS, in the NIR, or in the MIR range. Depending on the camera type and depending on the recording conditions, this integration time can comprise a range from the single-digit microsecond range up to the single digit second range.
(44)
(45) For purposes of the examination, the dermatologist can for skin screening make use of an essentially mobile measurement head 30 in single shot mode, which is formed as a handheld device for scanning over a measured object, in this case the region of a back 1. This device can be mapped to a pulsed NIR light source 40 for active illumination in stripe shape and/or for a fine structured illumination of the back 1 and an optics unit 50 with an integrated double beam interferometer 601.
(46) This mobile measurement head 30 is essentially slowly guided by hand, e.g. with a speed of approximately v=1 cm/s over the back 1 of the patient, here from bottom to top, or essentially in +y direction.
(47) Although not shown here, a camera, in particular a VIS monitoring camera, is integrated in this case in the mobile measurement head 30 for diagnostic purposes of the skin surface on the back 1. The imaging data recorded with this monitoring camera can—where appropriate—additionally be used to support the construction of a hyperspectral image, in particular when the scan movement of the mobile measurement head 30 by hand is essentially not performed at a constant speed. Two position markers not shown here are for this purpose applied on the back 1. The spatial interferograms rl incrementally collected during a moderate movement of the mobile measurement head 30, and which can generally be obtained in single shot mode using an InGaAs camera 54 for the near infrared spectral range, in this case along a line in horizontal direction, can be converted into spectrums SP and can be assembled into a hyperspectral image set. The camera, which can in particular be an InGaAs camera 54, can preferably in this exemplary embodiment—as also the pulsed light source, which in particular is formed as, or comprises, an NIR light source 40—be formed essentially controllable by the computer 21. These two components can preferably also be synchronized.
(48) The spatial interferograms rl are generally recorded in a single shot using a double beam interferometer 601 and can therefore be computationally processed into spectrums along the line in horizontal direction using a computing program to execute fast Fourier transformation (FFT). This can be accomplished line by line for the selected skin area on the back 1 for the spatial interferograms rl that are recorded by the optics unit 50 of the mobile measurement head 30. After the recording of spatial interferograms rl is completed in an upward motion that covers the skin region of medical interest, the calculated spectrums can be mapped point by point to an image map of the examined skin region. It is in this case seen as admissible when potentially not perfectly or not optimally uniform, and essentially not perfectly laterally guided hand motions of the dermatologist while using the mobile measurement head 30 causes the image point raster to have certain elongated and compressed areas, but is essentially without gaps. Using an analysis program 22 for analyzing the spectrums SP, where appropriate, executed on a high-performance computer 21 and/or a computing system, in particular risk and high-risk regions can be identified based on the spectral signatures of the spectrums SP. In this case, algorithms for spectrum analysis, for example based on the Principal Component Analysis approach, can be used and/or approaches with artificial intelligence can be candidates. The algorithms for evaluating and analyzing the spectrums SP for purposes of assessing a tumor risk are not an area of focus for purposes of this invention, because the present invention in particular relates to the fast provisioning of optical primary data, or spatial interferograms rl. The results of the evaluation and analysis of the spectrums SP can be shown on a monitor 23.
(49) Different than shown in
(50)
(51) The spectrometer system can alternatively or additionally also be used to examine a tissue region during a surgical procedure for purposes of tissue differentiation.
(52)
(53) In this case, telecentricity applies at least approximately for the object rendering on the side of the upstream lens 70 facing the double beam interferometer 601 with the optical axis OAI, however, a telecentricity aperture is not shown here. The upstream lens 70 or the lens 70 arranged in front thereof further comprises an autofocus function. The object distance determined with the latter is handed over to the analysis program as information during the recording, in particular at least intermittently constantly or permanently and/or in chronological intervals because a distance change changes the imaging scale during in the imaging, which can be taken into account during the analysis and rendering of the hyperspectral image.
(54) The double beam interferometer 601 generates a lateral shear s and in each of the two interferometer arms has a field of view discriminator BFD1 and BFD2 of essentially equal construction, which is shown in the detailed
(55) At least one point each of one of these apparent images BFD1's and BFD2's of the field of view discriminators is conjugated with respectively one apparent image point O′1s and O′2s of the object point O, wherein the image points O′1s and O′2s are optically conjugated in the double beam interferometer 601 by beam splitting, and given that the double beam interferometer 601 is accurately adjusted essentially lie together in the apparent image plane SBE12 and also represent coherent image points. For the downstream anamorphic lens 51, the apparent image plane SBE12 in turn represents the object plane.
(56) Consequently, pairs of essentially coherent partial beams are preferably created at the output of the double beam interferometer 601 that are shown here as examples in the figures as two partial beams TB1 and TB2, which are however generally representative for a plurality partial beams.
(57) The two field of view discriminators BFD1 and BFD2 are preferably arranged in the double beam interferometer 601 such that an optical conjugation is created for these. The field of view discriminators BFD1 and BFD2 are in this case expanded essentially laterally such that in spite of discrimination, several beams of several object points can nevertheless pass these. It is implied that one point is always mapped to one beam. An image 80′1 is created on the field of view discriminator BFD1 by imaging, and an image 80′2 of the stripe 80 is generated on the field of few discriminator BFD2 by imaging. In each interferometer arm, a part of the light from each of these two images 80′1 and 80′2 can pass the discriminators BFD1 and BFD2 with a field of width b and length L. Light outside of this field is preferably excluded from the further imaging, and is therefore preferably lost. The reverse imaging of the two field of view discriminators BFD1 and BFD2 determines the width of the measurement field b′ and their length L′ on the back 1 with the imaging scale of the upstream lens 70, as shown in the detail
(58) The measurement field 81 recorded on the back 1 is solely determined by reverse imaging the two field of view discriminators BFD1 and BFD2 using the upstream lens 70. As representatives for many, the detailed
(59) The illuminated field of view discriminators BFD1 and BFD2, which represent two coherent light sources, are rendered on the output of an anamorphic lens 51 arranged downstream of the double beam interferometer 601, wherein the lens 51 is also chromatically corrected. The imaging of the object 51, which is formed with a rotational component 511 and also with a cylindrical component 512, generates from an object point respectively two cylindrical waves essentially tilted toward each other, which here are projected onto a camera as a raster detector, in particular an InGaAs camera 54, wherein each pair of cylindrical waves respectively forms one spatial interferogram rl that is mapped to an object element OE. An object element OE can in this case be so small that it is perceived as a point because it is no longer laterally resolved by the downstream optics, or with its image extent in x direction approaches the order of magnitude of a pixel of the raster detector when imaged on the raster detector, shown here as an InGaAs camera 54.
(60) The cylindrical wave fronts 385 tilted toward each other are shown in the detail
(61) The somewhat varying optical path differences of the field of view in the spatial interferograms rl caused by a not entirely perfect adjustment of the double beam interferometer 601 do not typically represent a significant problem for the numerical analysis of the spatial interferograms rl, given the prior art.
(62) A high signal-to-noise ratio can only be achieved in the spectrum when the contrast of the spatial interferograms rl is sufficiently good or large. Is therefore important that the interferometer hardware ensures or achieves a highest possible or relatively high contrast of the spatial interferograms rl, because the search for spectral signatures, in particular in biological measured objects, are not significantly pronounced or do not exhibit significantly high identifying characteristics.
(63) The field of view discriminators BFD1 and BFD2 in the exemplary embodiment in
(64) The detail
(65) In a further exemplary embodiment 2 (not shown schematically based on a drawing), a multi-axis robot arm is used to move the mobile measurement head 30. The latter permits reaching a particularly high degree of flexibility, in particular in comparison to a linearly operating transport carriage 90. During a surgical procedure, such an exemplary embodiment 2 is particularly advantageous due its flexible local positioning.
(66)
(67) The shift of the 90-degree rooftop reflector 641 specified here is performed or created in the present figure or embodiment in a horizontal lateral direction “to the left”. The detail
(68) In general terms, a beam splitter cube specified in this description can also be replaced by another beam splitter, for example a beam splitter in foil form or formed with a membrane (Pellicle beam splitter)
(69) The partial beam TB2 reflected on the beam splitter layer 62 also impacts a double mirror periscope reflector in the arm IA2 of the Michelson-Type Interferometer 602, in particular a 90-degree rooftop reflector 642, which is preferably and essentially of equal construction as the rooftop reflector 641. The 90-degree rooftop reflector 642 is likewise shifted laterally, upward in this case, that is to say essentially parallel in relation to the optical axis OAI of the upstream lens 71, and essentially vertically in relation to the optical axis OA2 of the InGaAs camera 54, and from this optical axis OA2 by a distance. The shift of the 90-degree rooftop reflector 642 specified here is in other words performed or created in the present figure or embodiment in a vertical lateral direction “upward”. The resulting lateral shear s2 in particular and essentially corresponds to the shift vertically in relation to the optical axis OA2 or parallel to the optical axis OAI. But this is contrarian with respect to the symmetry to the beam splitter layer 62, so that the lateral shear s2 resulting in the arm IA2 is added to the sum of s1 and s2 equal s. This addition due to the geometrical arrangement represents an opportunity to achieve a comparatively large resulting lateral shear s.
(70) After reflecting on the beam splitter layer 62 in the arm IA1 respectively after passing the former in the arm IA2, the two partial beams TB1 and TB2 at least partially enter the anamorphic and largely achromatic lens 51 at the output of the Michelson-Type Interferometer 602, the former consisting of an essentially rotationally symmetrical component 511 and a cylindrical component 512. For a detailed understanding of the anamorphic lens 51, reference is made to
(71) After exiting the anamorphic lens 51, cylindrical waves are formed that are indicated in the detail
(72) The maximum achievable optical distance difference OPDr in the double beam interferometer, given an essentially symmetrical location of the spatial interferogram rl, can be approximately calculated based on the illustration in detail
(73) In an exemplary embodiment 3 (not shown schematically based on a drawing), such an arrangement—with corresponding modifications—can also be used to measure spectrums of fluorescent light, in particular when an excitation light source in the ultraviolet spectral range and a dichroic beam splitter are used.
(74) In an exemplary embodiment 4 with at least one derivative of the embodiment from
(75) However, it is also in particular possible in a further exemplary embodiment 5 according to
(76)
(77)
(78)
(79) In an exemplary embodiment 6 (not shown schematically based on a drawing), a rooftop reflector 641 can also be inserted or arranged in a Michelson-Type Interferometer, given the use of a plate beam splitter for the optical MIR wavelength range, in particular with substrates that can comprise or be CaF2 and/or KBr.
(80)
(81)
(82)
(83) The drawing plane in
(84)
(85)
(86) In
(87) Given this arrangement, in particular a relatively focused image can be generated after the beam splitting on the beam splitter layer 625 in the periscope 662 in the second interferometer arm IA2. The upstream lens 73 does not necessarily need to have an opening error correction, because a tilted plate is preferably not located in the beam path upstream of the periscope 662 with the gap aperture 667 However, a relatively unfocused image of the measured object 14 is generated in the first interferometer arm IA1, because an opening error is generated therein upstream of the gap aperture 666 by the essentially tilted plates 624 and 93 located in the beam path. A gap aperture 666 slightly coarser compared to the gap aperture 667 is therefore preferably located at the point of the smallest beam constriction, the former having for example the fourfold gap width of the gap aperture 667, or 0.5 mm for the midinfrared range in the example shown here. For this reason, this interferometer arrangement is in particular suited for a comparatively coarse image resolution, which then ultimately results in a hyperspectral image that in x direction, see
(88) The partial beams TB1 and TB2 are then united on the beam splitter layer 626. A lateral shear s is created between the partial beams TB1 and TB2; in other words, the partial beams TB1 and TB2 are shifted in relation to each other by the value of the lateral shear s. The opening error caused by the plane parallel plates 625, 627, 93, 94 in the Mach-Zehnder Interferometer 604 is in particular at least partially corrected in the anamorphic lens 52, so that largely undisturbed cylindrical waves are formed at the output of the lens 52 that are brought to interference in the Fourier plane. In order to improve the clarity of the illustration, an illustration of the unfolded apparent image points O′1s and O′2s was omitted in
(89) The detail
(90) In an exemplary embodiment 8 (not shown schematically based on a drawing) on the basis of the arrangement in
(91)
(92) This cyclical double beam interferometer 605 is in particular also known as a Sagnac Interferometer and/or as a cyclical triangle interferometer. The arrows drawn in detail
(93) The cyclical double beam interferometer 605 as a beam splitter plane ET that is schematically shown by the beam splitter preferably with a mylar foil 623, on which in particular also the at least partial beam reunification occurs subject to the influence of the lateral shears. The straight lines g1 and g2 extended by the plane mirrors 628 and 629 intersect at the intersection SP in the reference plane RE, which in this case essentially corresponds to the drawing plane. This intersection SP, which is essentially located in the symmetry plane E_S, has a distance d_ST to the beam splitter plane ET, which in this case for example can range between approximately 0.1 mm to 7 mm and in particular between approximately 1.5 mm and 3 mm and is preferably 2.5 mm. Here, the value of 2.5 mm corresponds to about 100 wavelengths of the largest wavelength in the exemplary spectrum of 25 μm, which corresponds to a wave number of 400 cm.sup.−1.
(94) As shown here, two comparatively coarse field of view discriminators can be arranged at least partially between the plane mirrors 628 and 629, the field of view discriminators shown here as examples with the gap apertures 631 and 632, and which have the exemplary width of approximately b=1 mm. The width can for example also range between approximately 0.1 mm and 10 mm, and in particular between approximately 0.5 mm and 3 mm. The gap apertures 631 and 632 each contain an image O′1 respectively O′2 of the measurement point O and, as indicated in the drawing by the shift in the perspective view, are shifted slightly in the depth axis of the image This depth axis shift is in this case in particular determined from the location of the upstream lens 73, which has a certain location error in particular in the depth axis. This location error is tolerable within certain limits. It is in particular desirable that each of the images O′1 respectively O′2 of the measurement point O lie in a common plane, and that the gap apertures 631 and 632 therefore preferably also lie in a common plane This is shown in
(95) The reverse extensions of the beams of the partial beams TB1 and TB2 form the largely unfolded and optically coherent apparent image points O′ 1s and O′2s in the apparent image plane SBE12, which in particular also essentially corresponds to the focal plane of the lens 531 with its focal point F531.
(96) Because there is no opening error due to the beam splitter 623, which preferably comprises a thin mylar foil, the half opening angle alpha can in this case be made comparatively large, or in particular also larger than shown here in
(97) Detail
(98) The detail
(99) Given a calculation example with an exemplary numerical aperture A=sin(alpha) of approximately 0.1, see detail
(100) Given a comparatively small opening angle alpha, for example of less than approximately 5 degrees, in particular for example of 2 degrees to 4 degrees, and a compact construction of a cyclical interferometer 606 appropriately essentially constructed asymmetrically, it is however also possible in an exemplary embodiment 9 (not shown schematically based on a drawing) on the basis of an arrangement shown in
(101)
(102) An exemplary biological measured object 16 in particular comprises fluorescent markers and is at least partially illuminated by a projected light stripe 80, at least partially in the UV spectrum, wherein the light stripe 80 is generated by a computer-controllable, raster UV light source 49. A dichroic coupling beam splitter cube 571 with a reflection surface for at least a part of the UV light couples the corresponding UV light at least partially into the illumination beam path. The raster UV light source 49 is rendered by the collimator lens 491, and the microscope lens 573 is rendered on the exemplary biological measured object 16. A luminescent pixel Xuv is then rendered onto the biological measured object 16 at least approximately focused, and shown here reduced in scale as the image Xuv′ of the luminescent pixel Xuv. The width of an image Xuv′ for example ranges between 6 μm and 600 μm, in particular between approximately 20 μm and 100 μm, and is preferably about 60 μm and therefore also the width of a light stripe 80, given completely or at the least partially switched on and therefore luminescent pixels. In order to reduce interference by stray light between the individual measurement points, for example the even numbered and the odd-numbered pixels can however be alternatingly illuminated, in particular for each image recorded by a camera, in particular a CMOS camera 55.
(103) A scanner, in particular a one-dimensional, computer controllable galvano mirror scanner 572 can be used to surface-scan the measured object 16. A UV fluorescence generates light in the VIS range on the measured object 16. This fluorescent light in the VIS range can pass the coupling beam splitter cube 571 with transmissive properties of the splitter layer for fluorescent light. The remaining UV light that could at least partially still pass the coupling beam splitter cube 571 can additionally be blocked using a UV blocking filter 576, for example above approximately 700 nm. Essentially visible light then enters the cyclical interferometer 606 through the upstream lens 74. The microscope lens 573 and the upstream lens 74 in particular form a microscopic beam path with a two-fold enlargement, wherein the upstream lens 74 is in particular formed with an opening error correction for the polarizing beam splitter cube 636.
(104) The light entering the cyclical double beam interferometer 606 therein renders at least partially in the two revolving beam paths according to the detail
(105) The computer-controllable raster UV light source 49 is in pulse mode preferably essentially chronologically synchronized with the display, in particular the transmissive liquid crystal display 655, and is formed to control luminescent pixels that—as already discussed—are optically conjugated to a transmissive liquid crystal display 655.
(106) The light discriminated on the pass-through areas 656 and 657 at least partially reaches the camera through the polarization beam splitter cube 636 as essentially parallel propagating partial beams TB1 and TB2 through the anamorphic lens 58, wherein the camera is in particular a CMOS camera 55, for interference in form of cylindrical waves essentially tilted toward each other, with the indicated peak lines 686 This anamorphic lens 58 is also formed with a cylindrical component, and in terms of the overall optical function principally essentially corresponds to the lens 51. The intensity graphs of the spatial interferograms rl are shown in the detail
(107) The detail
(108) The detail
(109) The distance d_ST in this case is for example about 1 mm, and corresponds essentially to about 1429 wavelengths of the largest wavelength of approximately 700 nm in the spectrum.
(110)
(111)
(112) A beam splitter that in this case preferably comprises a plate beam splitter with the plates 673 and 675 and the beam splitter layer 674, can generate an astigmatism and coma. These aberrations are in particular compensated with regard to an opening area by a plate 92 preferably having a thickness that corresponds to the sum of the thickness of the plates 673 and 674 (of equal thickness), wherein the opening area can preferably already be corrected in the upstream lens 74. An essentially focused image of the measured object 15 can then be generated in the image plane E_BF, where the double gap aperture 676 is located and each gap opening 677 and 678 forms a field of view discriminator.
(113) Imaging errors, in particular such as astigmatism and coma of the plates 673 and 675 are compensated with regard to an opening area preferably at the output of the interferometer 608, in particular by a plate 95 with a thickness that corresponds to the sum of the thicknesses of the plate 673 and 675 of equal thickness, wherein the opening area can already be corrected in the downstream anamorphic lens 59, wherein the downstream anamorphic lens can preferably in addition to the opening error correction also have a field correction. An illustration of the unfolded apparent image points O′1s and O′2s was omitted in
(114) The arrangement in
(115) The plane plate group 668 for adjusting and/or influencing the optical distance difference OPD_zykaP can be used to generate asymmetrical spatial interferograms rl on a detector, in particular a microbolometer array 634. This is for example also shown in the detail
(116) OPD_zykaP in particular represents an additional optical distance difference that is created in particular by inserting at least one plane parallel plate each into every partial beam TB1 and TB2 in the region Z in a cyclical double beam interferometer, where the spaces of the partial beams essentially do not overlap.
(117)
(118) The optical distance difference OPD_zykaP is in particular calculated with the equation (9):
OPD_zykaP=value[n1*(h1−h2)] Equation (9)
(119) The respective thicknesses of the plane parallel plates 765 and 766 are in this case in particular approximately 0.2 mm to 5 mm, in particular approximately 0.7 mm to 2 mm, and the thickness of a plane parallel plate 765 is preferably h1=1 mm, and the thickness of the plane parallel plate 766 is preferably h2=0.9 mm, and the refractive index n1 of ZnSe is specified at approximately n1=2.43 at a wavelength of approximately 5 μm, based on which a value for OPD_zykaP of approximately 243 μm is determined by equation (9). This results in a preferred lateral shear of the spatial interferograms rl on the chip of the spatial detector, for example on the microbolometer array 634. The image location difference in the depth axis d is in this case in particular determined with the equation (10)
delta_v=(h1−h2)*(n1−1)/n1 Equation (10)
(120) or an approximate value of 59 μm. Given a spectrum above approximately 5 μm and a numerical aperture of a downstream anamorphic imaging stage that is in particularly less than approximately 1, preferably less than approximately 0.5, and particularly preferably approximately 0.2, and that does not yet exhibit noticeable nonlinearities in the spatial interferograms rl, this value generates [ . . . .]. The arrangement in
(121) No complete compensation of the image shifts in the depth axis can be achieved with the two plane parallel plates 765 and 766 in
(122) By contrast,
(123) The plane plate group 669 in
h2=h1*[(n1−1)*n2]/[(n2−1)*n1] Equation (11)
(124) Given a plate thickness of approximately h1=1 mm and the specified refractive indexes n1 and n2, this equation (11) results in a plate thickness of approximately h2=0.4846 mm, and a value for OPD_zykaP of approximately 220 μm based on Equation (3). The coherent image points O′1s and O′2s generated from a measurement point O can then ultimately be brought into a common apparent image plane SBE12 by a corresponding focus location variation of an upstream lens that is not shown here. This is shown in
(125)
(126)
(127) For each of the four prisms 687, 688, 690 and 691, the beam entrance for the main beam is preferably at least approximately vertical. The arrangement is in this case based on a relatively acute half angle psi of approximately 26 degrees, from which all the relevant angles of the four prisms 690, 691, 687 and 688 are determined when an essentially vertical beam entry and beam exit of the main beams is to be achieved on all surfaces.
(128) During assembly subject to optical observation, the mirror prism 687 can preferably be arranged or cemented as the last mirror prism. The lateral shear s is then adjustable once in particular with a precision shift of the mirror prism 687 and can also be adjusted in relation to the double gap aperture 676 which is then also fixed once, in this regard also refer
(129) In a preferred precision fabrication, a person skilled in the art can calculate the preferred or suited and/or required center distance of the gap openings of a double gap aperture 676 after cementing the four prisms 687, 688, 690, and 691 of the cyclical double beam interferometer 609 with the angle psi of 26 degrees from the spatial frequency of the interference pattern, given a reference wavelength that can be measured on a chip in the focal plane of a downstream measured object. The precision fabrication can be executed by computer-control using 3-D printing.
(130)
(131)
(132)
(133)
(134)
(135)
(136)
(137) The distance d_ST between the intersection SP from the beam splitter plane ET generates a lateral shear s and is for example approximately 2 mm. The distance d_ST can generally range between approximately 0.1 mm and approximately 5 mm, in particular between approximately 1 mm and approximately 3 mm, and preferably between approximately 1.5 mm and approximately 2.5 mm. A plane plate group 670a is arranged or embedded in the gap that is filled with air, in particular representing an air gap, for the purpose of adjusting the optical distance difference OPD_zykaP with an essentially complete compensation of the image shift in the depth axis. This is in particular intended to obtain spatial interferograms rl shifted in the detection plane DE (see detail
(138)
(139) The respective arrangement in the
(140) A complete compensation of the image shifts delta_v in the depth axis can be achieved with the three plane parallel plates 971, 972 and 973 from
(141)
(142)
(143) A spatial interferogram rl is then essentially respectively formed in the detection plane DE with a lateral shear and comprises an essentially asymmetrical location on the raster detector that is not shown here. In this case, this results in a maximum achievable optical distance difference OPDru at the edge of the raster detector in the order of magnitude of approximately 1 mm, for example between approximately 0.1 mm and 5 mm, in particular between approximately 0.8 mm and approximately 1.2 mm. Such an arrangement can in particular also be used to examine an essentially expanded self-luminescent object, for example a fluorescing light source, because in this case, an optical interference between the two partial beam paths in the interferometer 615 is reduced or even avoided by the geometric embodiment, in particular also by the arrangement of an upstream aperture 861 in combination with the gap apertures 631 and 632. An optical interference can be caused by an expanding luminescent object whose coherent images are likewise laterally expanded after the beam splitting such that image points from the first partial beam TB1 enter the beam path of the partial beam TB2 in the region of the double mirrored staircase 85, and vice versa. The upstream aperture 861 reduces the lateral expansion of the incident beam EB.
(144) A cyclical interferometer 615 with an essentially acute half angle of for example approximately 25 degrees and with a double mirrored staircase 85, comprising a center web 84, permits a particularly large aperture angle in comparison to two separate mirrored staircases of typically up to approximately 5 degrees, in particular up to approximately 7 degrees, and preferably up to approximately 10 degrees, because the two plane mirrors 822 and 832 can be arranged spatially particularly close to each other on the center web 84. The detail
(145) Two essentially separate and intrinsically rigid mirrored staircases 82 and 83 that are at least partially shifted in the depth axis are arranged in
(146)
(147)
(148)
(149)
(150)
(151)
(152) After passing the free-form surface 874, the rays enter the cyclical double beam interferometer 615. The interfering partial beams enter the downstream anamorphic lens, which is in this case formed with the reflective free-form surfaces 875, 876 and 877. The reflective free-form surfaces 875, 876 and 877 form an anamorphic lens 595 that is arranged downstream of the cyclical double beam interferometer 615 and arranged upstream of the microbolometer array 634. The spatial interferograms rl are then ultimately formed on the microbolometer array 634 after the beam formation of partial beams TB1 and TB2 using the second free-form surface 875, formed on the mirror block 871, and using the fourth free-form surface 876, which is formed as a saddle surface on the mirror block 871, and using the third free-form surface 877 of the mirror block 871, which represents in total the fifth free-form surface. These spatial interferograms rl are shown in the detail
(153) In this case, the image information about the exhaust cloud 16 plays a rather subordinated role for the measurement and analysis, because the object shape of the latter is of only minor interest for the analysis of air pollutants. Instead, the objective is to approximately determine the spectral composition based on the spatial resolution, which permits conclusions about hazardous components in particular for humans, animals, and the environment. However, under no circumstances must significant spectral information that for example signifies toxic components be overlooked or not recorded. It is initially not of uppermost interest where these toxic components are exactly localized in the exhaust cloud. It is already sufficient when the spectral information that signifies hazardous substances can at least be mapped to a single exhaust stack, for example based on knowledge of the current wind direction.
(154) The detail figure A, which in this case shows this cyclical double beam interferometer 615 in the detail
(155) The following is a detailed discussion, description, and/or definition of the employed terminology.
(156) The term lateral shear is based on the phenomenon of interference between two reflecting light beams with lateral shift, that is to say transversal shift. In conventional arrangements, this typically involves reflecting a light beam under test on an outer surface and a light beam on an inner surface of a shear plate such that they are reflected spatially (and chronologically) shifted in relation to each other. A lateral shear can in particular be typically generated with a shear interferometer, wherein the shear interferometer is an optically comparatively simple device in the form of a plate for the purpose of conducting a wave front analysis. It can be used to test the collimation of light beams, in particular of laser sources, whose coherence length is generally significantly greater than twice the optical thickness of the shear plate. The shear interferometer, which is formed as a plate, typically comprises an essentially high-value optical glass, such as N-BK7 or also quartz glass with particularly planar and smooth optical surfaces, that are normally arranged at a very small angle in relation to each other, and are therefore arranged essentially not parallel in relation to each other, and therefore have a very weak wedge-shaped character. During the test, a properly collimated beam, is incident on the shear interferometer in the form of a plate at an angle of approximately 45°, and is reflected twice. Due to the weak wedge-shaped character, the two reflected light beams are slightly tilted toward each other after passing the plate, and given perfect collimation of the input beam (planar wavefront), exhibit interference stripes downstream of the shear plate that are typically oriented in parallel to the lateral shear, given perfect collimation. This separation or lateral shift of the beams generated by the shear plate is referred to as shear, in particular as lateral shear. The lateral shear can also be generated by lattices or, as in the present case, by a suitable mirror element, in particular by a double mirror periscope reflector with a field of view discriminator unit according to the invention. Lateral shear is indicated in the respective drawings with the referenced symbol “s”.
(157) The term “double beam interferometer” in particular comprises double beam interferometer types, such as a Michelson-Type Interferometer, a Mach-Zehnder Interferometer, or a cyclical double beam interferometer.
(158) In this document, the term “light” is used as a synonym for electromagnetic radiation, that is to say in particular for the UV range up to the terahertz range.
(159) The acronym FIR in particular refers to the far infrared spectral range, wherein the latter in particular lies approximately between 50 μm and 1000 μm.
(160) On a Michelson-Type Interferometer, the outbound and the return beam in particular at least approximately propagate in parallel to each other in each interferometer arm, and the beam splitting and beam unification in particular occur on the same beam splitter surface. The term “Michelson-Type Interferometer” is herein predominately used in lieu of “Michelson Interferometer” because the arrangements described herein in particular have more than one plane mirror in the interferometer arms IA1 and IA2, thus not referring to a pure “Michelson Interferometer” in the strict sense.
(161) The acronym MIR in particular refers to the midinfrared range, which in particular lies between approximately 3 μm and 50 μm.
(162) The acronym NIR in particular refers to the near infrared range, which in particular lies between approximately 0.78 μm and 3 μm, and is split into the IR-A range between approximately 0.78 μm and 1.4 μm, and the IR-B range between approximately 1.4 μm and 3 μm.
(163) The acronym SEF in particular refers to an apparent end mirror surface that results after the unfolding of mirrored surfaces.
(164) The acronym VEIS in particular refers to the visual spectral range, or to the spectral range visible to the human eye, between approximately 380 nm and 780 nm, in particular between approximately 400 nm to 700 nm.
(165) A double mirror periscope reflector can in particular be formed as a 90-degree rooftop reflector, but also as a periscope reflector with 45-degree beam deflection. Angular beam deflection values between approximately 40 degrees and approximately 150 degrees, in particular between approximately 60 degrees and approximately 120 degrees are preferably possible.
(166) A field of view discriminator is in particular an opening in an aperture, wherein the opening preferably is a gap aperture 645, a pinhole, a pinhole array that comprises a plurality of pinholes, and/or a pass-through area 656, 657 of a liquid crystal display 655.
(167) A nondiscriminating area of a field of view discriminator for example comprises the pass-through area on a gap-shaped field of view discriminator, that is to say in the simplest case the gap opening and/or the reflecting area, for example in a very narrow plane mirror as a field of view discriminator. The nondiscriminating area can also be represented by a spatial light modulator in transmission (liquid crystal display) or in reflection (digital micro-mirror array). The nondiscriminating area can also exhibit a fine structuring.
(168) A field of view discriminator can in particular also have a narrow reflective area on a plane mirror and/or on a micro-mirror array, and/or also a narrow plane mirror.
(169) The specified forms of a field of view discriminator are in particular designed to allow at least a part of a light beam to pass on a well-defined beam path into the further section of the beam path, most preferably in the form of a narrow stripe that preferably can correspond to a tenth up to a thousandth of the extent of the image, for example one tenth up to one thousandths of the height of the image of the measured object in the double beam interferometer. The de facto “one-dimensionality” of the narrow stripe—with image elements preferably in only a single line—ultimately permits generating respectively exactly one spatial interferogram from each of the image elements still remaining after selection. In other words, in particular those parts of a light beam are hidden or blocked by the field of view discriminators that are not intended to follow the predetermined beam path. The field of view discriminator can for example also be used to hide or block scattered light. This means that scattered light is prevented from passing the field of view discriminator in the further section of the beam path. The term “spatial selection” refers to the selection or to the passing of the light that can pass or fall through the field of view discriminator, for example the gap, and is ultimately detected. In other words, not only the field of view is selected, but the stray light undesired in this case is minimized.
(170) A mirror prism, which is herein alternatively also called prism, in particular has a refractive material, such as CaF.sub.2, Si, BK7, quartz glass, crystalline quartz, and/or other commonly used optical materials for the desired spectral ranges. The mirror prism can be at least partially coated or can also be completely uncoated. The mirror prism in particular has at least one entrance and/or exit surface suited for the entrance and/or exit of a light beam. The mirror prism in particular also has at least one reflection surface or a mirror surface that under suitable conditions is designed to reflect or mirror at least a part of the light beam entering the prism. An essentially complete reflection can occur in particular at angles of total reflection. The mirror prism can in particular also have a second reflection surface or a mirror surface that under suitable conditions is designed to reflect or mirror at least a part of the light beam entering the prism a second time.
(171) The mirror prism can have a mirror surface on at least a section of a reflection surface. The surface area of a reflection surface can for example be at least partially coated with gold and/or silver.
(172) The terms reflection surface and mirror surface generally correspond to each other. A mirroring or a reflection can occur on an at least partially mirrored surface or in particular also under certain angles on a transition between media of different refractive indexes, for example when a light beam that passes through an optically dense medium is incident on a boundary surface to a medium of low optical density. A total reflection can occur under special angles, wherein the entire share of the light beam is reflected in full.
(173) A mirror prism that uses two reflection surfaces can in particular be a prism on which the two reflection surfaces describe a right angle and wherein the entrance and exit surface of the prism is positioned opposite said angle.
(174) A beam splitter of a beam splitter unit in particular corresponds to a beam splitter cube or two individual plane parallel plates, that preferably respectively comprise CaF2 and a beam splitter layer or a polarizing beam splitter cube or a plate beam splitter with two plates and a beam splitter layer. A beam splitter is in particular designed to transmit at least a part of the incident light beam on an exit surface in order to generate the first partial beam and to reflect at least a further portion of the incident light beam in order to generate the second partial beam. A beam splitter is furthermore in particular designed to reflect at least a part of the first partial beam on the incidence surface and to transmit at least a part of the second partial beam.
(175) A beam splitter unit has at least one planar beam splitter layer in particular in a beam splitter cube or in a system comprised of plane parallel plates. The beam splitter layer has a first side facing the incident light beam that represents a beam splitter surface and a side facing away from the incident light beam that represents an overlay surface. The beam splitter surface is designed to transmit incident light in parts in order to generate and partially reflect a first partial beam in order to generate a second partial beam. Two partial beams that project essentially vertically in relation to each other are then in particular generated.
(176) A mirror prism on which only one reflection surface is to be used can for example be a 90° deflection prism. Deviations from the 90° angle are possible in +/−30° ranges. 1° is the 360th part of a full circle.
(177) An optical conjugation between the first field of view discriminator unit (BFD1; 631; 645; 653; 656; 666) and the second field of view discriminator unit (BFD2; 632; 646; 654; 657; 667) is in particular created when these optically coincide—as seen from the entrance of the double beam interferometer in direction of the double beam interferometer—and can therefore no longer be optically differentiated.
(178) A narrow IR light source can be a dark red glowing, elongated silicon-carbide rod, that is for example 20 mm in length and has a diameter of 1 mm.
(179) A focused image is in particular characterized in that it is nearly diffraction-limited.
(180) An unfocused image is in particular characterized in that its image spots formed by an object point exceed the size of an Airy disk several times.
(181) A coma in particular comprises asymmetry errors, in particular those created by an overlay of two imaging errors, given beams incident at a tilt to the optical axis. In particular an image point with a “tail” directed toward the edge of the optics can be created in place of a focused diffraction disk. A coma can in particular occur both on lens optics and also on mirror optics.
(182) An astigmatism in particular comprises the phenomenon that in two intersection planes arranged vertically in relation to each other, two image points that are respectively formed by the beams of the respective intersection plane are significantly separated in their position along the depth axis, that is to say significantly separated in the propagation direction of the light. In relation to the invention, during detection, one of the image points is essentially preferably located in infinity, and the other image point preferably lies in the near range, preferably on the raster detector.
(183) The term “depth axis” refers to the dimension in the propagation direction of the light.
(184) The term “wave-optical depth of field focal range” is defined by the relation of the light wavelength divided by the square of the sine of the aperture angle of the associated light beam.
(185) A mirrored surface is in particular designed to reflect at least approximately 80%, in particular at least approximately 93%, and preferably at least approximately 97% to approximately 99.9% of the incident light in at least a part of the wavelength spectrum of electromagnetic radiation.
(186) An unreflective or non-reflective surface is in particular designed to reflect less than approximately 60%, in particular less than approximately 30%, and preferably less than approximately 10% of the incident light in at least a part of the wavelength spectrum of electromagnetic radiation.
(187) The term “acute half angle” comprises the following values: having a value greater than 15 degrees and having a value less than 35 degrees.
(188) An optical interference can be created during measurements of biological tissue by stray light that is distributed to several detector elements on a raster detector. This stray light is largely blocked by a confocal discrimination that reduces the optical interference. An optical interference can also be understood to mean that rays from an imperfect and/or slightly unfocused light beam that generate an image point for example on a detector element of a raster detector also reach one or several adjacent detector elements of the raster detector.
(189) Cylindrical waves are in particular light waves that at least approximately and partially have the shape of a cylindrical surface, or a section thereof.
(190) A double mirror periscope reflector can either be formed as a rooftop reflector in metal and/or also as a rooftop prism, as a pentaprism and/or as an angle reflector in air and/or vacuum with a preferred beam deflection between 60 degrees and 120 degrees. Both plane mirrors of the double mirror periscope reflector are in the double beam interferometer arranged vertically to the reference plane RE, in relation to which the beam splitter surface is also arranged vertically.
(191) Respectively two double mirror periscope reflectors are arranged in a Mach-Zehnder Interferometer.
(192) Respectively two double mirror periscope reflectors are likewise preferably arranged in a Michelson-Type Interferometer. However, two triple mirror periscope reflectors can also be arranged therein, which then represent the beam deflection unit.
(193) Generally only a single double mirror periscope reflector is arranged in a cyclical double beam interferometer. However, the double mirror periscope reflector in the cyclical double beam interferometer can preferably be mapped to a comparatively small double mirrored staircase (85, 85w), or two individual mirrored staircases (82, 82w, 83, 83w) can preferably be mapped to this double mirror periscope reflector.
(194) The following describes special embodiments and examples that can be combined with each other and in particular with the aspects of the invention, provided they do not exclude each other:
(195) Fourier transformation spectrometer with at least partial hyperspectral single shot imaging of a measured object as a product of a calculation using a computer system with a computing program to obtain spectrums by means of Fourier transformation
(196) and having an upstream lens as imaging system for the measured object
(197) and with a double beam interferometer positioned downstream of the upstream lens, the lens comprising:
(198) firstly either a beam splitter with a planar beam splitter surface and wherein the beam splitter is used for both beam splitting in the beam splitter plane, thus forming two partial beams TB1, TB2, and also for at least partial beam unification in the beam splitter plane using a lateral shear s between the two partial beams.
(199) or secondly, two beam splitters, each with a planar beam splitter surface, wherein the first beam splitter is used for beam splitting in the beam splitter plane, thus forming two partial beams TB1, TB2, and a second beam splitter for at least partial beam unification using a lateral shear s between the two partial beams
(200) and a reference plane exists on the double beam interferometer, wherein the reference plane is spanned by the normal of the planar beam splitter surface and by the optical axis of the upstream lens on the input of the double beam interferometer,
(201) and a raster detector at the output of the double beam interferometer
(202) and the upstream lens arranged upstream of the cyclical double beam interferometer—taking into account the position of the measured object—generates an image or at least a partial image of the measured object in the light direction, generally downstream of the beam splitter, but generally upstream of the raster detector
(203) and with the involvement of an anamorphic imaging stage arranged downstream of the double beam interferometer generates a plurality, but at least two, spatial interferograms, wherein these spatial interferograms are rendered on the two-dimensional receiver raster receiver, and wherein an object point on the measured object is mapped to every spatial interferogram,
(204) wherein
(205) the double beam interferometer 601 is either formed with two interferometer arms IA1, IA2 as a non-cyclical interferometer 602, 603, 604 and respectively one double mirror periscope reflector or a prism 640, 641, 642, 651, 652, 661, 662 are arranged in each interferometer arm IA1, IA2, or respectively one triple mirror reflector or respectively one triple mirror prism is respectively arranged in each interferometer arm at least approximately in room corner shape and the difference of the mirrors or mirror surfaces in the two interferometer arms is zero and a field of view discriminator BFD1, BFD2 is arranged in each interferometer arm in a position between one third and two thirds of the optical distance OPD in the beam path between beam splitting and beam reunification, and these two fields of view discriminators BFD1, BFD2 are generally at least approximately optically conjugated in relation to each other
(206) or the double beam interferometer 601 can be configured as a cyclical double beam interferometer 605, 606, 608, 615, either with two plane mirrors 628, 629, 671, 672 that form a periscope arrangement 630 on which the two plane mirrors 628, 629, 671, 672 are spaced at unequal distances from the beam splitter plane ET that contains the horizontal beam splitting surface, and wherein the two plane mirrors are at least approximately aligned vertically in relation to the reference plane RE
(207) or the double beam Interferometer 601 is formed as a cyclical double beam interferometer 607, 609, 610, 611, 612, 613, 614
(208) having two plane mirror surfaces 681, 682, 762, 674, 687s, 688s, 689s, 888, 890, 696s, of which respectively exactly one is formed of a refractive material on respectively one mirror prism 679, 680, 687, 688, 689, 696, 761, 763, 887, 889
(209) thus creating a double mirror prism arrangement 697 that is formed with respectively exactly two mirror prisms 679, 680, 687, 688, 689, 689, 696, 761, 763, 887.
(210) and either the two plane mirrors 628, 629, 671, 672, which are formed as a periscope arrangement 630,
(211) or the two-plane mirror surfaces 681, 682, 762, 674, 687s, 688s, 689s, 888, 890, 689s, 696s of the double mirror prism arrangement 697 are positioned at a predetermined unequal distance from the beam splitter plane ET that contains the beam splitter surface, and are at least approximately aligned vertically in relation to the reference plane RE
(212) and an angle epsilon with twice the value of the half angle psi is formed between the two plane mirrors 628, 629, 671, 672 or the plane mirror surfaces 681, 682, 687s, 688s, 696s, 689s, 696s, 762, 764, 888, 890
(213) and this angle epsilon is formed by two straight lines g1, g2 projecting from the plane mirrors 628, 629, 671, 672 or from the plane mirror surfaces 681, 682, 687s, 688s, 689s, 696s, 762, 764 and 888, 890 in the reference plane RE
(214) and the half angle psi is formed with a value greater than 20 degrees and with a value less than 30 degrees
(215) and a first image plane BEI1 and a second image plane BEI2 are formed in the double beam interferometer 601, 602, 603, 604, 605, 605, 607, 608, 609, 610, 611, 612, 613, 614, 615 that are respectively determined by the upstream lens 70, 71, 73, 74, 75, the position of the measured object 1, 10, 14, 15, 16, and by the double beam interferometer 601, 602, 603, 604, 605, 605, 607, 608, 609, 610, 611, 612, 613, 614, 615,
(216) and the first image plane BEI1 is mapped to a first field of view discriminator BFD1, and the second image plane BEI2 is mapped to a second field of view discriminator BFD2 in the double beam interferometer 601, 602, 603, 604, 605, 605, 607, 608, 609, 610, 611, 612, 613, 614, 615
(217) and these field of view discriminators BFD1, BFD2 are formed respectively with at least one nondiscriminating region in transmission or reflection
(218) and said two field of view discriminators BFD1, BFD2 are arranged in the double beam interferometer such that an optical conjugation exists at least approximately between these field of view discriminators.
(219) Fourier transformation spectrometer,
(220) wherein in a double beam interferometer 601, 602, 603, 604, 605, 605, 607, 608, 609, 610, 611, 612, 613, 614, 615 each field of view discriminator BFD1, BFD2 is mapped to a double mirror periscope reflector or a prism 630, 640, 641, 642, 651, 652, 661, 662 or to a triple mirror reflector in corner cube form.
(221) Fourier transformation spectrometer,
(222) wherein at least one image plane BEI1, BEI2 is at least partially brought to coincide at least approximately with respectively one field of view discriminator BFD1, BFD2 when the measured object 1, 10, 14, 15, 16 is imaged in a double beam interferometer 601, 602, 603, 604, 605, 605, 607, 608, 609, 610, 611, 612, 613, 614, 615.
(223) Fourier transformation spectrometer,
(224) wherein the two field of view discriminators BFD1, BFD2 are formed as a gap in a double beam interferometer 601, 602, 603, 604, 605, 605, 607, 608, 609, 610, 611, 612, 613, 614, 615.
(225) Fourier transformation spectrometer,
(226) wherein at least one field of view discriminator BFD in a double-beam interferometer 601, 602, 606 is formed as a computer controllable, spatial light modulator 649, 656.
(227) Fourier transformation spectrometer,
(228) wherein the two field of view discriminators BFD1, BFD2 in a Michelson-Type Interferometer 602, 603 are formed and arranged as a gap aperture 645, 646, 653, 654, and respectively exactly one gap aperture 645, 646, 653, 654 is positioned in each arm IA1, IA2 of the Michelson-Type Interferometer 602, 603.
(229) Fourier transformation spectrometer, wherein the first field of view discriminator unit 653 has an opening designed to spatially select the first partial beam TB1 after the splitting of the incident light beam EB using the beam splitter unit 622 and after the second reflection of the first partial beam TB1 using the second reflection surface 651b of the first prism 651; and/or the second field of view discriminator unit 654 has an opening designed to spatially select the second partial beam TB2 after the splitting of the incident light beam EB using the beam splitter unit 622 and after the second reflection of the second partial beam TB2 using the first reflection surface 652b of the second prism 652.
(230) Fourier transformation spectrometer, wherein the first field of view discriminator unit 653 has an opening designed to spatially select the first partial beam TB1 after the splitting of the incident light beam EB using the beam splitter unit 622 and prior to the second reflection of the first partial beam TB1 using the second reflection surface 651b of the first prism 651; and/or the second field of view discriminator unit 654 has an opening designed to spatially select the second partial beam TB2 after the splitting of the incident light beam EB using the beam splitter unit 622 and prior to the second reflection of the second partial beam TB2 using the first reflection surface 652b of the second prism 652.
(231) Fourier transformation spectrometer,
(232) wherein in a Michelson-Type Interferometer 602, every gap aperture 645, 646 is arranged in optical conjugation to the apparent end mirror surface SEF1, SEF2 of the respective interferometer arm IA1, IA2.
(233) Fourier transformation spectrometer,
(234) wherein in a Michelson-Type Interferometer 602, 603, the field of view discriminators BFD1, BFD2 are each arranged in a position at least approximately at half the distance of the optical distance in the beam path between the beam splitting and beam reunification.
(235) Fourier transformation spectrometer,
(236) wherein every double mirror periscope reflector or a prism 640, 641, 642, 651, 652 in a Michelson-Type Interferometer 602, 603 is formed with a beam deflection of at least approximately 180 degrees.
(237) Fourier transformation spectrometer,
(238) wherein at least one field of view discriminator BFD1, BFD2 in a Michelson-Type Interferometer 602, 603 is formed with a liquid crystal display 649-1, 649-2.
(239) Fourier transformation spectrometer,
(240) wherein the field of view discriminators BFD1, BFD2 are arranged in a Mach-Zehnder Interferometer 604, and in this case, respectively exactly one gap aperture 666, 667 is positioned in each arm IA1, IA2 of the Mach-Zehnder Interferometer 604 as a field of view discriminator.
(241) Fourier transformation spectrometer,
(242) wherein in a double beam interferometer 601, 602, 603, 604, 605, 605, 607, 608, 609, 610, 611, 612, 613, 614, 615, the field of view discriminators BFD1, BFD2 are each arranged in a position at least approximately at half the distance of the optical distance in the beam path between the beam splitting and beam reunification.
(243) Fourier transformation spectrometer,
(244) wherein the double mirror periscope reflectors 661, 662 in a Mach-Zehnder Interferometer 604 are formed with a beam deflection between 45 degrees and 135 degrees.
(245) Fourier transformation spectrometer,
(246) wherein at least one field of view discriminator BFD1, BFD2 in a Mach-Zehnder Interferometer is formed as a digital micro-mirror array.
(247) Fourier transformation spectrometer,
(248) wherein in a cyclical double beam interferometer 605, 605, 607, 608, 609, 610, 611, 612, 613, 614, 615 with two plane mirrors 628, 629, 671, 672 or two planar mirror surfaces 681, 682, 687s, 688s, 689s, 696s, 762, 764, 888, 890 respectively one gap opening 677, 678, 976, 977 is arranged in the two opposingly revolving partial beams TB1, TB2 of the cyclical double beam interferometer in respectively one gap aperture 631, 632, 976, 977 as field of view discriminator BFD1, BFD2 in an image plane of the measured object 1, 10, 14, 15, 16.
(249) Fourier transformation spectrometer,
(250) wherein in a cyclical double beam interferometer 607, 613, 614 with two plane mirrors 628, 629, 671, 672 or two plane mirror surfaces 681, 682, 687s, 688s, 689s, 696s, 762, 764, 888, 890, a double gap aperture 676, 694, 975 with respectively two gap openings 677, 678, 977, 977 is arranged in the two opposingly revolving partial beams TB1, TB2 in a plane vertical to the main beams of the partial beams TB1, TB2 that represents the common image plane BEI12.
(251) Fourier transformation spectrometer,
(252) wherein in a cyclical double beam interferometer 606 with two plane mirrors 671, 672, a computer-controlled, transmissive liquid crystal display 655 is preferably arranged between said plane mirrors 628, 629, 671, 672 or planar mirror surfaces with at least two pass-through areas 656, 657.
(253) Fourier transformation spectrometer,
(254) wherein two gap-shaped pass-through areas 656 and 657 are embedded in the transmissive liquid crystal display 655.
(255) Fourier transformation spectrometer,
(256) wherein in a cyclical double beam interferometer 605, 605, 607, 608, 609, 610, 611, 612, 613, 614, the beam splitter plane ET and the intersection SP of the straight lines g1 and g2 are separated from each other by the distance d_ST, and this distance d_ST is at least ten wavelengths of the largest wavelength in the spectrum of the detected light.
(257) Fourier transformation spectrometer,
(258) wherein in a cyclical double beam interferometer 615, at least one mirrored staircase with two mirrors each is arranged in the region Z, where no spatial overlap occurs between the two partial beams TB1 and TB2.
(259) Fourier transformation spectrometer,
(260) wherein in a cyclical double beam interferometer 615, two mirrored staircases 82, 83 with two mirrors each are arranged in the region Z, where no spatial overlap occurs between the two partial beams TB1 and TB2.
(261) Fourier transformation spectrometer,
(262) wherein in a cyclical double beam interferometer 615, the two mirrors of a first mirrored staircase 82 are formed as plane mirrors 821, 822, and the two mirrors of the second mirrored staircase 83 are formed as plane mirrors 831, 832.
(263) Fourier transformation spectrometer,
(264) wherein in a cyclical double beam interferometer 615, in region Z where no spatial overlap occurs between the two partial beams TB1 and TB2, the two plane mirrors 821, 822 are respectively arranged in parallel to each other on the first miniaturized mirrored staircase 82, and the two plane mirrors 831, 832 are respectively arranged in parallel to each other on the second miniaturized mirrored staircase 83.
(265) Fourier transformation spectrometer,
(266) wherein the two parallel plane mirrors 821, 822 of a first mirrored staircase 82 and the parallel plane mirrors 831, 832 of a second mirrored staircase 83 in a cyclical double beam interferometer 615 preferably have a slightly different distance dm_1 and dm_2.
(267) Fourier transformation spectrometer,
(268) wherein in a cyclical double beam interferometer 615, in region Z where no spatial overlap occurs between the two partial beams TB1 and TB2, the first mirrored staircase 82 and the second mirrored staircase 83 are combined into a double mirrored staircase 85 using a center web 84, and the two inner plane mirrors 822, 832 are respectively arranged in parallel to each other on a side of the center web 84 of the double mirrored staircase 85.
(269) Fourier transformation spectrometer,
(270) wherein in a cyclical double beam interferometer 615, a field of view discriminator BFD is mapped to at least one mirrored staircase 82, 83.
(271) Fourier transformation spectrometer,
(272) wherein the field of view discriminator BFD is either formed as a gap aperture 631, 632, as a narrow pinhole array, or as a raster, computer-controllable, micro-mechanical pinhole array.
(273) Fourier transformation spectrometer,
(274) wherein a field of view discriminator BFD is formed as a narrow plane mirror 821s, 831s that forms one of the two plane mirrors of a mirrored staircase 82, 83.
(275) Fourier transformation spectrometer,
(276) wherein a field of view discriminator BFD is formed as a computer-controllable digital micro-mirror array DMD in at least one mirrored staircase 82, 83.
(277) Fourier transformation spectrometer,
(278) wherein in a cyclical double beam interferometer 615, a comparatively small angle tau_1 from up to 10 degrees between the two plane mirrors 821, 822 of a first mirrored staircase 82w, and also a comparatively small angle tau_2 from up to 10 degrees exists between the two plane mirrors 831, 832 of a second mirrored staircase 82w, and the values of the angles tau_1, tau_2 in both mirrored staircases 82w, 83w are made at least approximately the same, and the angle kappa between the main beam HTB1a that projects from the first mirrored staircase 82 and the main beam HTB2a that projects from the second mirrored staircase 83 is formed as less than 180 degrees, but not less than 140 degrees, on the side facing the interferometer 615.
(279) Fourier transformation spectrometer,
(280) wherein in a cyclical double beam interferometer 615, at least one miniaturized mirrored staircase is arranged in the region Z, on which at least one mirror is formed with a weak curvature.
(281) Fourier transformation spectrometer,
(282) wherein two mirror prisms 679, 680, 687, 688, 761, 763, 887, 889, 696, 689 of equal construction and each made of the same refractive material are arranged in the revolving beam path in a cyclical double beam interferometer 607, 609, 610, 612, 613, 614 for Fourier transformation spectroscopy
(283) and the mirror prisms 679, 680, 687, 688, 761, 763, 887, 889 are each formed with a single mirror surface, and said mirror prisms 679, 680, 687, 688, 761, 763, 887, 889 each have the same acute angle psi between the mirror surface and respectively one nonreflective surface and two field of view discriminators BFD1, BFD2 are positioned between these two mirror prisms of equal construction.
(284) Fourier transformation spectrometer,
(285) wherein two mirror prisms 687, 696, 689 with the same angle and each made of the same refractive material are arranged in the revolving beam path in a cyclical double beam interferometer 611, 614 for Fourier transformation spectroscopy
(286) and the mirror prisms 687, 696, 689 are each formed with a single mirror surface 687s, 689s, 696s and said mirror prisms 687, 689, 696, 689 each have the same acute angle psi between the mirror surface 687s, 689s, 696s, and respectively one nonreflective surface and two field of view discriminators BFD1, BFD2 are positioned between these two mirror prisms 687, 696, 689 of equal angles.
(287) Fourier transformation spectrometer,
(288) wherein two mirror prisms 696, 689 made of the same refractive material are arranged in a cyclical double beam interferometer 614, the mirror prisms each having only a single mirror surface 696s, 689s
(289) and the two mirror prisms 696, 689 each have a first acute angle psi, a second acute angle 2 psi, and a third angle with the value 180 degrees minus 3 psi, and thus at least three angles on the two mirror prisms 696, 689 then respectively match
(290) and furthermore, a plane parallel plate 698 made of refractive material is arranged between these two mirror prisms 696, 689, and the plane parallel plate 698 is fixed between these two mirror prisms 696, 689 by two optically transparent cement layers 695, 699, and
(291) either a beam splitter layer 62 is applied on the side of the plane parallel plate 698 facing the mirror prism 689,
(292) or alternatively, the beam splitter layer 62 is applied on the mirror prism 689 on the side of the plane parallel plate 698 facing the plane parallel plate 698.
(293) Fourier transformation spectrometer with at least partial hyperspectral single shot imaging of a measured object as a product of a calculation using a computer system for obtaining spectrums by means of Fourier transformation
(294) and having an upstream lens as imaging system for the measured object and with a cyclical double beam interferometer positioned downstream of the upstream lens, the lens comprising:
(295) a beam splitter with a planar beam splitter surface and wherein the beam splitter is used for both beam splitting in the beam splitter plane, thus forming two partial beams TB1, TB2, and also for at least partial beam unification in the beam splitter plane using a lateral shear s between the two partial beams.
(296) and a reference plane exists on the cyclical double beam interferometer, wherein the reference plane is spanned by the normal of the planar beam splitter surface and by the optical axis of the upstream lens on the input of the interferometer,
(297) and a raster detector at the output of the cyclical double beam interferometer
(298) and the upstream lens arranged upstream of the cyclical double beam interferometer—taking into account the position of the measured object—generates an image or at least a partial image of the measured object in the direction of the light, generally downstream of the beam splitter, but generally upstream of the raster detector
(299) and with the involvement of an anamorphic imaging stage arranged downstream of the cyclical double beam interferometer generates a plurality, but at least two, spatial interferograms, wherein these spatial interferograms are rendered on the two-dimensional receiver raster receiver, and wherein an object point on the measured object is mapped to every spatial interferogram,
(300) wherein the cyclical double beam interferometer 616
(301) is formed with two plane mirrors 628, 629 that form a periscope arrangement 630, wherein the two plane mirrors 628, 629 are equidistant from the beam splitter plane ET that contains the planar beam splitter surface and are at least approximately arranged vertically in relation to the reference plane RE
(302) and an angle epsilon with double the value of the half angle psi exists between the two plane mirrors that form the periscope arrangement 630
(303) and said angle epsilon is represented by two straight lines g1, g2 projecting from the plane mirrors or from the planar mirror surfaces in the reference plane RE, and the half angle line of the angle epsilon in half lies in the beam splitter plane ET
(304) and the half angle psi is formed with a value greater than 20 degrees and with a value less than 30 degrees
(305) and the symmetrically constructed cyclical double beam interferometer 616 has a first image plane BEI1 and a second image plane BEI2 that are each determined by the upstream lens, the location of the measured object, and the double beam interferometer 616,
(306) and the first image plane BEI1 is mapped to a first field of view discriminator BFD1, and the second image plane BEI2 is mapped to a second field of view discriminator BFD2 in the double beam interferometer 616
(307) and said two field of view discriminators BFD1, BFD2 are arranged in the symmetrically constructed cyclical double beam interferometer 616 such that an optical conjugation exists at least approximately between these field of view discriminators BFD1, BFD2,
(308) and in the cyclical double-beam interferometer 616, one optical functional assembly each to generate a beam shear is mapped to one field of view discriminator BFD each between the plane mirrors 628, 629 in the revolving beam path, which form a periscope arrangement 630, and the optical functional assemblies generate a beam shear in a respectively opposing direction, thus generating a lateral shear s at the output of the cyclical double beam interferometer.
(309) Fourier transformation spectrometer, wherein the optical functional assemblies are formed as two mirrored staircases 82, 83 in air or as two at least rhomboid-like mirror prisms to generate a beam shear in a cyclical double beam interferometer.
(310) Fourier transformation spectrometer, wherein the field of view discriminators BFD1, BFD2 are formed as gap apertures 831, 832.
(311) The term “Double Beam Interferometer” herein describes three double beam interferometer types (Michelson-Type Interferometer, Mach-Zehnder Interferometer, cyclical double beam interferometer). The logical parentheses consist of the fact that the field of view discrimination on all three double beam interferometer types generally occurs by means of two field of view discriminators, and generally directly in the double beam interferometer on the two coherent images of the measured object generated in the double beam interferometer. In this case, generally only respectively a rather narrow partial image for detection remains of one image respectively after the field of view discrimination (e.g. by two gap apertures, (645-646, 652-653, 666-667). However, a spatial interferogram (rI) can be obtained in single shot mode from these two coherent partial images from all measurement spots of the latter, so that a plurality of spatial interferograms (rI) can be detected at the same time. A hyperspectral partial image can then be generated. The hyperspectral composite image can be generated from partial images obtained in a timeseries.
(312) A logical parentheses furthermore consist of the fact that a pair of shifted periscopes (double mirror periscope reflectors) are respectively arranged as air-type (641-642) or (661-662) or as prism type (651-652) in a Michelson-Type Interferometer (
(313) According to the invention, respectively one field of view discriminator (typically a gap aperture 645, 646) is maps to a double angle periscope reflector (640) (arranged upstream, downstream, or between the two mirrors of a double mirror periscope reflector 640). The lateral shear s is caused by the lateral shift of a double mirror periscope reflector 640 in the double beam interferometer. According to the invention, the discrimination occurs in or on the double mirror periscope reflector 640.
(314) A triple mirror can be used alternatively to each double mirror periscope reflector or to each double mirror prism.
(315) In particular only exactly one double mirror periscope reflector (630) or one double mirror prism arrangement (683) exists in the revolving beam path of a cyclical double beam interferometer (
(316) In particular two options apply for a cyclical double beam interferometer:
(317) 1. The lateral shear can be created by an asymmetry in the cyclical double beam interferometer with a shift of the double mirror periscope reflector (630) or the double mirror prism arrangement (683) in relation to the beam splitter plane ET. This shift is described by d_ST, the distance of the intersection SP from the beam splitter plane ET. This distance d_ST is firstly unequal to zero. The intersection SP lies in the symmetry plane E_S of a double mirror periscope reflector (630) or a double mirror prism arrangement (683).
(318) 2. The lateral shear s results in the second case d_ST equal to zero, which causes a symmetry in a cyclical double beam interferometer, due to the mapping of two mirrored staircases as air-type (
(319) 3. But two mirrored staircases can also be mapped in the case of d_ST unequal to zero. The resulting lateral shear s is then based on both, the asymmetry (d_ST unequal to zero) and the presence of two mirrored staircases. The case of the arrangement with only one mirrored staircase is not a preferred version, because this case generally creates a relatively large optical distance difference between the interfering partial beams.
(320) The FT spectrometer according to the invention is advantageously used in particular when a field of view discrimination is necessary on laterally expanded measurement objects and the measurement spots in the hyperspectral image are predetermined rather coarsely to achieve a high signal-to-noise ratio, and the tilt invariance of the double mirror periscope reflectors or the cyclical interferometer thus do not permit any out-of-adjustment condition of the interferometer under standard conditions.
(321) In summary, a double beam interferometer with a raster detector is used for a method and a double beam interferometer for single shot imaging for Fourier spectroscopy, in particular for measuring chaotically moving measured objects and turbulent scenes, with at least partial hyperspectral imaging of the measured object and/or the scene in the spectrometer. The double beam interferometer can in this case be formed as a Michelson-Type Interferometer, as a Mach-Zehnder Interferometer, or as a cyclical double beam interferometer. Two partial beams TB1 and TB2 are formed with a lateral shear s at the output of the interferometer. For this purpose, the plane mirrors arranged in pairs in the interferometer are at least formed as a double mirror periscope reflector that is arranged laterally shifted in relation to the first light beam or the second light beam, or a mirrored staircase is additionally mapped to this double mirror periscope reflector. A pair of coherent partial images of the measured object are created in the interferometer by means of an upstream lens and the interferometer. Therein, these partial images are subject to a field of view discrimination using two gap apertures. After these discriminated images and/or partial images are rendered with a lateral shear s through an anamorphic lens, the image elements of the partial images of the measured object are used to form spatial interferograms on the detector, from which spectrums are calculated for a hyperspectral image.
(322) TABLE-US-00001 Reference symbol list with explanations Reference symbols Identifier 1 Back of an older patient subject to diagnosis as a measured object 10 Biological measured object 11 Skin feature that from a medical point of view must be carefully examined as it can either be a birthmark and/or a melanoma. 12 High-risk region, highlighted in color on the monitor Following analysis of the spectral data, the risk level can be determined by artificial intelligence. 13 Image of the region on the back 1 recorded by means of a spectrometer scan 14 Measured object for incident light measurement 15 Moving, partially transparent measured object for a transmitted light measurement 16 Biological measured object with fluorescent markers 20 Fourier transformation spectrometer system 21 Computer system for controlling the components, such as the light source and raster detector, and with a computer program for analyzing the spatial interferograms rl and for calculating spectrums 22 Analysis program for the calculated spectrums SP, also in order to localize high-risk regions for skin cancer with colored highlighting for the identified risk on a monitor 23 23 Monitor for rendering the analyzed data 25 Control and synchronization mean 28 Datalink to databases 30 Mobile measurement head 31 Handle of the mobile measurement head 30 32 Start button for recording data 40 Pulsed striped light source in the NIR range 41 Light source driver, controllable by the computer 21 42 Datalink 43 Pulsed striped light source, controllable by the computer 21, whose light is coaxially coupled into the illumination beam path by a coupling beam splitter cube 57 44 pulsed NIR light source, controllable by the computer 21, with integrated beamforming optics 45 for projecting a light stripe 80 onto a biological measured object 10 in a coaxial arrangement 45 Beamforming optics in mirror form 45 for projecting a light stripe 80 onto a biological measured object 10 46 Pentaprism 47 Narrow IR light source for short-duration stripe-shaped illumination of a partially transparent moving measured object 15 48 Lens for rendering an IR light source onto a partially transparent measured object 15 49 Narrow raster UV light source, controllable by the computer 21, that is chronologically synchronized with the liquid crystal display 655, and formed with a control mechanism for luminescent pixels that are optically conjugated into a transmissive liquid crystal display 655. 491 Collimator lens for a UV light source 49 50 Optics unit of the mobile measurement head 30 with a double beam interferometer 601 with a lens 51 arranged downstream thereof at the output thereof and a raster detector 54 used for detecting spatial interferograms rl. 51 Anamorphic and largely achromatic lens arranged downstream of the double beam interferometer at the output thereof in order to use coherent image points of a measured object 1 to generate interfering cylindrical waves tilted toward each other on a raster detector 54. 511 Rotationally symmetric component of the anamorphic lens 51 512 Cylindrical component of the anamorphic lens 51 52 Anamorphic lens also formed with the cylindrical component 522 for the MIR-CaF2 spectral range, which principally corresponds to the optical overall function of the lens 51, and corrected for a chromatic opening error in the interferometer. 521 Rotationally symmetric component of the anamorphic lens 52 522 Cylindrical component of the anamorphic lens 52 53 Anamorphic mirror-lens also formed with the cylindrical component 532 for the MIR spectral range, which principally corresponds to the optical overall function of the lens 51, and formed without opening error correction. 531 Rotationally symmetric component of the anamorphic lens 53 532 Cylindrical component of the anamorphic lens 53 54 InGaAs camera for the near infrared spectral range that is formed controllable by the computer 21 55 CMOS camera for the visible spectral range that is formed controllable by the computer 21 56 Control link and datalink 57 Coupling beam splitter cube for light to illuminate a measured object 571 Dichroic coupling beam splitter cube with a reflective splitter layer for UV light and with transmission properties of the spider layer for florescent light in the VIS spectral range 572 One-dimensional galvano mirror scanner, controllable by the computer 21 573 Microscope lens 574 Deflection mirror 575 Telecentric aperture 576 UV blocking filter 58 Anamorphic lens with chromatic opening error correction for the polarizing beam splitter cube 636 581 Rotationally symmetric component of the anamorphic lens 58 582 Cylindrical component of the anamorphic lens 58 59 Anamorphic lens for the MIR range, also with mirror optics 591 Rotationally symmetric component of the anamorphic lens 59 592 Cylindrical component of the anamorphic lens 59 595 Anamorphic lens for the MIR range with three reflective free-form surfaces 875, 876, and 877 601 Double beam interferometer that generates a lateral shear s 602 Michelson-Type Interferometer with lateral shear s, and that is in this case formed with a splitter cube and a rooftop reflector, in particular with metal 603 Michelson-Type Interferometer with lateral shear s, and that is in this case formed with a splitter cube and a 90° rooftop reflector 604 Mach-Zehnder Interferometer with a lateral shear s 605 Cyclical double beam interferometer with lateral shear s with two plane mirrors 628 and 629 and a foil beam splitter 623 606 Cyclical double beam interferometer for the visible spectral range with two plane mirrors 671 and 672 and a polarizing beam splitter cube 636 607 Cyclical double beam interferometer for the visible spectral range with two mirror prisms 679 and 680 and a polarizing beam splitter cube 622 608 Cyclical double beam interferometer with two plane mirrors 628 and 629 and a plate beam splitter 609 Cyclical double beam interferometer with two prisms 690 and 691 of equal construction and two mirror prisms 687 and 688 of equal construction, and with an air gap in the throat 610 Cyclical double beam interferometer with two prisms 690 and 691 of equal construction and two mirror prisms 687 and 688 of equal construction, and without airgap 611 Cyclical double beam interferometer with a triangle prism 690 and two mirror prisms 687 and 689, and without airgap 612 Cyclical double beam interferometer with two mirror prisms 761 and 763, in particular made of CaF2, that form the double mirror prism arrangement 683, and the tilted plane parallel plates 92 and 95, in particular made of CaF2 613 Cyclical double beam interferometer for the infrared spectral range with a beam splitter 623, in particular with mylar foil and two mirror prisms 687 and 689, in particular with ZnSe 614 Cyclical double beam interferometer for the VIS and NIR spectral range as a cemented block with cemented-in plane parallel plate 698 615 Cyclical double beam interferometer for the far-infrared spectral range, in particular with a mylar foil 86 for beam splitting and two plane mirrors 628 and 629 616 Symmetrically constructed cyclical double beam interferometer d_ST = 0 applies. 62 Beam splitter layer The latter also represents the planar beam splitter surface. 620 Beam splitter unit that comprises the plane parallel plates 624 and 627, and the beam splitter layers 625 and 626. 622 Beam splitter cube 623 Beam splitter, in particular with mylar foil 624 Plane parallel plate, in particular with CaF2, with a beam splitter layer 625 625 Beam splitter layer for the wave number range 4000 cm.sup.−1 to 1200 cm.sup.−1 The latter also represents the planar beam splitter surface. 626 Beam splitter layer for beam unification for the wave number range 4000 cm.sup.−1 to 1200 cm.sup.−1 The latter also represents the planar beam splitter surface. 627 Plane parallel plate, in particular with CaF2, as a substrate for the beam splitter layer 626 628 First plane mirror in a cyclical interferometer for the MIR and FIR spectral range, that is a constituent element of the double mirror periscope reflector 630 629 Second plane mirror in a cyclical interferometer for the MIR and FIR spectral range, that is a constituent element of the double mirror periscope reflector 630 630 Periscope arrangement, in particular a periscope reflector, preferably a double mirror periscope reflector (630) that is formed by the plane mirrors 628 and 629 for the infrared spectral range and/or by the plane mirrors 671 and 672 for the visible spectral range. The beam deflection unit is in this case formed as a double mirror periscope reflector 630. 631 Gap aperture for the partial beam TB1 with a gap opening in the sense of a shading aperture, that represents a field of view discriminator in the image plane BEI1. The width of a gap opening should not exceed the value d_ST, or the distance between the symmetry plane E_S and the beam splitter plane ET and beam unification. 632 Gap aperture for the partial beam TB2 with a gap opening in the sense of a shading aperture, that represents a field of view discriminator in the image plane BEI2. 633 Auxiliary shading aperture to avoid optical interference 634 Microbolometer array, controllable by the computer 21 636 Polarizing beam splitter cube 637 Polarizing beam splitter layer The latter also represents the planar beam splitter surface. 638 Polarization analyzer 641 Double mirror periscope reflector, in particular formed as a 90-degree rooftop reflector in particular with metal, that is to say a hollow body, manufactured by single point diamond machining for a 180-degree deflection in the first arm IA1 of the Michelson-Type Interferometer 602, shown in the FIGS. 4 to 8. A beam deflection unit is in this case formed as a double mirror periscope reflector 641. 641a First minor, shown in the FIGS. 4 to 8. 641b Second minor, shown in the FIGS. 4 to 8. 642 Double mirror periscope reflector, in particular formed as a 90-degree rooftop reflector and in particular with metal, that is to say a hollow body, manufactured by single point diamond machining for a 180- degree deflection in the second arm IA2 of the Michelson-Type Interferometer 602, shown in the FIGS. 4 to 8. A beam deflection unit is in this case formed as a double mirror periscope reflector 641. 642a First minor, shown in the FIGS. 4 to 8. 642b Second mirror, shown in the FIGS. 4 to 8. 643 Metal base body in the first arm IA1 of the Michelson-Type Interferometer 602, shown in the FIGS. 5 to 8 644 Metal base body in the second arm IA2 of the Michelson-Type Interferometer 602, shown in the FIGS. 5 to 8 645 Gap aperture with the width b in the FIGS. 5 and 6 in the first arm IA1 of a Michelson-Type Interferometer 602, which represents a field of view discriminator 646 Gap aperture with the width b in the FIGS. 5 and 6 in the second arm IA2 of a Michelson-Type Interferometer 602, which represents a field of view discriminator 647-1 Piezo actuator, shown in FIG.6, in the first interferometer on IA1 of a Michelson-Type Interferometer 602, controllable by the computer 21, that is mapped to the gap aperture 645 647-2 Piezo actuator, shown in FIG. 6, in the second interferometer on IA2 of a Michelson-Type Interferometer 602, controllable by the computer 21, that is mapped to the gap aperture 646 648-1 Elongated pinhole array with the width b, shown in FIG. 7, in the first interferometer arm IAL that represents a plurality of field of view discriminators 648-2 Elongated pinhole array with the width b, shown in FIG. 7, in the second interferometer arm IA2, that represents a plurality of field of view discriminators 649-1 First transmissive liquid crystal display (LCD), shown in FIG. 8, in the first interferometer arm IAL controllable by the computer 21 649-2 Second transmissive liquid crystal display (LCD), shown in FIG. 8, in the second interferometer arm IA2, controllable by the computer 21 650-1 Elongated light-permeable region of width b, shown in FIG. 8, embedded in the transmissive liquid crystal display in the first interferometer arm IA1 650-2 Elongated light-permeable region of width b, shown in FIG. 8, embedded in the transmissive liquid crystal display in the second interferometer arm IA2 651 Prism, preferably formed as a 90° rooftop prism, in particular for 180° deflection in the first interferometer arm IA1, with two reflection surfaces or mirror surfaces, shown in FIG. 11 The prism 651 represents a double mirror periscope reflector and is a beam deflection unit 651a First mirror surface on prism 651, shown in FIG. 11 651b Second mirror surface on prism 651, shown in FIG. 11 652 Prism, preferably formed as a 90° rooftop prism, in particular for a 180° beam deflection in the second interferometer arm IA2, with two reflection surfaces or mirror surfaces, shown in FIG. 11 The prism 652 represents a double mirror periscope reflector and is a beam deflection unit 652a First mirror surface on prism 652, shown in FIG. 11 652b Second mirror surface on prism 652, shown in FIG. 11 653 Long, gap-shaped gap aperture of width b, shown in FIG. 11, in the first interferometer arm IA1 The gap aperture 653 represents a field of view discriminator. 654 Long, gap-shaped gap aperture of width b, shown in FIG. 11, in the second interferometer arm IA2 The gap aperture 654 represents a field of view discriminator. 655 Transmissive liquid crystal display in a cyclical interferometer, controllable by the computer 21 656 First pass-through area in a transmissive liquid crystal display 655 in a cyclical interferometer, represents the field of view discriminator BFD1 657 Second pass-through area in a transmissive liquid crystal display 655 in a cyclical interferometer, represents the field of view discriminator BFD2 661 Double mirror periscope reflector in the first interferometer arm IA1 of a Mach-Zehnder Interferometer 604 A beam deflection unit is in this case shown as a double mirror periscope reflector 661 661a Plane mirror 661b Plane mirror 662 Double mirror periscope reflector in the second interferometer arm IA2 of a Mach-Zehnder Interferometer 604 A beam deflection unit is in this case shown as a double mirror periscope reflector 661 662a Plane mirror 662b Plane mirror 666 Gap aperture in the Mach-Zehnder Interferometer 604, arranged at the smallest beam constriction and formed with a gap opening having at least double the width as on the fine gap aperture 667, represents a field of view discriminator 667 Fine gap aperture in the Mach-Zehnder Interferometer 604 in the image plane, represents a field of view discriminator 668 Plane plate group for adjusting and/or influencing the optical distance difference OPD_zykaP, shown in FIG. 18a, that is preferably formed for the MIR spectral range 669 Plane plate group for adjusting and/or influencing the optical distance difference OPD_zykaP, for complete compensation of the image shift in the depth axis, shown in FIG. 19a, that is preferably formed for the MIR range 670a, Plane plate group for adjusting and/or influencing the optical distance 670b difference OPD_zykaP, for complete compensation of the image shift in the depth axis, preferably formed for the VIS and NIR range, and shown in FIG. 28a and FIG. 29 671 First plane mirror in a cyclical interferometer for the VIS spectral range that is a constituent element of the double mirror periscope reflector 630 672 Second plane mirror in a cyclical interferometer for the VIS spectral range that is a constituent element of the double mirror periscope reflector 630 673 CaF2 beam splitter plate 674 Beam splitter layer 675 CaF2 compensation plate 676 Double gap aperture in a cyclical double beam interferometer with the gap openings 677 and 678 677 First gap opening, represents a field of view discriminator BFD1 678 Second gap opening, represents a field of view discriminator BFD2 679 Mirror prism in arm IA1 of a cyclical double beam interferometer 607 680 Mirror prism in arm IA2 of a cyclical double beam interferometer 607 681 Minor surface in arm IA1 of a cyclical double beam interferometer on a mirror prism 682 Minor surface in arm IA2 of a cyclical double beam interferometer on a mirror prism 683 Double minor prism arrangement for the midinfrared spectral range with the two minor prisms 761 and 763 The double mirror prism arrangement 683 represents a double minor periscope reflector. 685 Cylindrical wave fronts 686 Peak lines of cylindrical wave fronts tilted toward each other 687 Mirror prism in arm IA1 of a cyclical double beam interferometer, manufactured in one operation together with the mirror prism 688, and therefore of equal construction, and also made of the same material 687F Front face of the minor prism 687, here only polished for the purpose of creating an optical adjustment option 687s Minor surface of the mirror prism 687 687u Nonreflective surface of the mirror prism 687, used for beam entry and also for beam exit 688 Mirror prism in arm IA2 of a cyclical double beam interferometer The latter is also manufactured in one operation together with the mirror prism 687 and is therefore of equal construction and also made of the same material. 688F Front face of the minor prism 688, here only polished for the purpose of creating an optical adjustment option 688s Minor surface of the mirror prism 688 689 Mirror prism 689s Minor surface of the mirror prism 689 689u Nonreflective surface of the mirror prism 689, used for beam entry and also for beam exit 690 Acute and also isosceles triangle prism with an angle of 2psi in a cemented beam splitter, of equal construction as the triangle prism 691 691 Acute and also isosceles triangle prism with an angle of 2psi in a cemented beam splitter, of equal construction as the triangle prism 690 692 Cemented beam splitter with two triangle prisms 690 and 691 of equal construction 693 Cemented beam splitter, in particular with mirror prism 689 and triangle prism 690 that are not of equal construction 694 Printed double gap aperture in a cemented group in a cyclical double beam interferometer 610 with two gap openings 695 Thin transparent cement layer between the mirror prism 689 and the beam splitter layer 62, which is positioned on the plane parallel plate 698 696 Mirror prism of equal construction as 689, arranged mirrored 696s Mirrored layer on the mirror prism, like 689 697 Double mirror prism arrangement This double mirror prism arrangement 697 is respectively formed with the two mirror prisms: 679 and 680 (VIS range) or 687 and 688 or 687 and 689 or 689 and 696 or 887 and 889. The double mirror prism arrangement 697 represents a double mirror periscope reflector. The double mirror periscope reflector is a beam deflection unit. 698 Plane parallel plate with beam splitter layer 62 between the mirror prisms 689 and 696 699 Thin transparent cement layer between the mirror prism 696 and the plane parallel plate 698 70 Upstream lens It is arranged upstream of the cyclical double beam interferometer 601 and represents an imaging system. 71 Upstream lens with upstream tele-centric aperture 72 It is arranged upstream of the cyclical double beam interferometer 602 and represents an imaging system. 72 Telecentric aperture 73 Upstream lens for the MIR spectral range without opening error correction It is respectively arranged upstream of the cyclical double beam interferometer 604 and 605 and represents an imaging system. 74 Upstream lens for the VIS spectral range with correction of the sphero- chromatic aberration for refractive components that represent unfolded plane parallel plates It is respectively arranged upstream of the cyclical double beam interferometer 606 and 607 and represents an imaging system. 75 Upstream lens for the MIR spectral range, in particular with correction of the sphero-chromatic aberration for the CaF2 plates 673, 675, and 92 It is arranged upstream of the cyclical double beam interferometer 608 and represents an imaging system. 751 Upstream mirror lens for the MIR spectral range, formed with the free- form surface 872 on the mirror block 871 and the first free-form surface 874 on the mirror block 873 It is arranged upstream of the cyclical double beam interferometer 615 and represents an imaging system. 761 Mirror prism in particular made of calcium fluoride 762 Mirror surface on mirror prism 761 763 Mirror prism in particular made of calcium fluoride 764 Mirror surface on mirror prism 763 765 First plane parallel plate, in particular with ZnSe of the geometric thickness h1 for the MIR spectral range, with the refractive index n1 and with gap aperture 766 Second plane parallel plate, in particular with ZnSe of the geometric thickness h2 for the MIR spectral range, with the refractive index n1 and with gap aperture 767 First plane parallel plate, in particular with CaF2 of the geometric thickness h1 for the MIR spectral range, with the refractive index n1 and with gap aperture 768 Second plane parallel plate, in particular with ZnSe of the geometric thickness h2 for the MIR spectral range, with the refractive index n2 and with gap aperture 781 Thin transparent cement layer 782 Thin transparent cement layer 80 Light stripe that is projected and slightly over-sized in the height and length so that the measurement field 81 is generally fully illuminated. The measurement field 81 is determined by a reverse imaging of the field of view discriminators BFD onto the measured object. 81 Measurement field recorded at a time t1 82 First mirrored staircase for the partial beam TB1 with two plane minors 821 and 822 in a parallel arrangement with the minor distance dm_1 82w First mirrored staircase in a periscope arrangement for the partial beam TB1 with two plane mirrors 821 and 822 821 First plane mirror of the first mirrored staircase 82 for the partial beam TB1, manufactured with single point diamond machining and gold- plated 821s First plane mirror of the first mirrored staircase 82 for the partial beam TB1 This plane mirror is formed narrow and is gold-plated, and in this case acts as a field of view discriminator. It is manufactured by means of single point diamond machining. 822 Second plane mirror of the first mirrored staircase 82 for the partial beam TB1 This plane mirror is manufactured by means of single point diamond machining and is gold-plated. 822s Second plane mirror of the first mirrored staircase 82 for the first partial beam TB1 This plane mirror is formed narrow and is gold-plated, and in this case acts as a field of view discriminator. It is manufactured by means of single point diamond machining. 83 Second mirrored staircase for the second partial beam TB2 with two plane mirrors 831 and 832 in a parallel arrangement with the mirror distance dm_2 and the following applies: dm_2 is less than dm_1. 83w Second mirrored staircase in a periscope arrangement for the partial beam TB2 with two plane mirrors 831 and 832 831 First plane mirror of the first mirrored staircase 83 for the partial beam TB2, manufactured with single point diamond machining and gold- plated 831s First plane mirror of the first mirrored staircase 83 for the partial beam TB2 This plane mirror is formed narrow and is gold-plated, and in this case acts as a field of view discriminator. It is manufactured by means of single point diamond machining. 832 Second plane mirror of the second mirrored staircase 83 for the partial beam TB2, manufactured with single point diamond machining and gold-plated 832s Second plane mirror of the second mirrored staircase 83 for the partial beam TB2 This plane mirror is formed narrow and is gold-plated, and in this case acts as a field of view discriminator. It is manufactured by means of single point diamond machining. 84 Center web, in particular with metal, with the two plane mirrors 822 and 832, manufactured by means of single point diamond machining 85 Double mirrored staircase with four plane mirrors 821, 822, 831, 832 that are arranged in parallel in relation to each other, formed as a metallic monolith and manufactured by means of single point diamond machining 85w Double mirrored staircase with four plane minors 821, 822, 831, 832 that are arranged in pairs tilted toward each other, formed as a metallic monolith and manufactured by means of single point diamond machining 86 Mylar foil for beam splitting for the far infrared spectral range, for example for the wave number range around 200 cm.sup.−1 861 Upstream aperture for beam limiting that however does not represent a field of view aperture. 870 Arrangement with mirror optics and with a cyclical double beam interferometer 615 for measurement in the far FIR range 871 First minor block for focusing the arriving electromagnetic FIR radiation by means of the free-form surface 872 872 First reflective free-form surface on the mirror block 871 873 Second minor block 874 First reflective free-form surface on the mirror block 873, and in this case in total the second free-form surface 875 Second reflective free-form surface on the mirror block 873, and in this case in total the third reflective free-form surface 876 Second reflective free-form surface on the mirror block 871, formed as a saddle shape, and in this case in total the fourth reflective free-form surface 877 Third reflective free-form surface on the mirror block 873, and in this case in total the fifth reflective free-form surface The latter is used to couple out the partial beam TB1 and TB2 for the purpose of detecting spatial interferograms rl. The reflective free-form surfaces 875, 876, and 877 form a downstream anamorphic lens. 887 Mirror prism, in particular with ZnSe in the arm IA1 of a cyclical double beam interferometer 888 Minor surface on the minor prism 887 889 Mirror prism, in particular with ZnSe in the arm IA2 of a cyclical double beam interferometer 890 Minor surface on the minor prism 889 891 Nonreflective entrance surface on the minor prism 887 892 Nonreflective exit surface on the mirror prism 887 893 Nonreflective entrance surface on the minor prism 889 894 Nonreflective exit surface on the mirror prism 889 92 Tilted plane parallel plate, in particular with CaF2, upstream of a cyclical double beam interferometer for compensating astigmatism and coma 93 Tilted plane parallel plate, in particular with CaF2, in a first arm of a Mach-Zehnder Interferometer for compensating astigmatism and coma 94 Tilted plane parallel plate, in particular with CaF2, in a second arm of a Mach-Zehnder Interferometer for compensating astigmatism and coma 95 Tilted plane parallel plate, in particular with CaF2, downstream of a cyclical double beam interferometer for compensating astigmatism 971 First plane parallel plate, in particular with glass, of height h1, and in particular with optical material having the refractive index n1 and preferably with n1 < n2 972 Second plane parallel plate, in particular with glass, of height h2, and in particular with optical material having the refractive index n2 and preferably with n1 < n2 973 Carrier plate, in particular with glass, of height h1, and in particular with optical material having the refractive index n1 and preferably with n1 < n2 974 Carrier plate, in particular with glass, of height h2, and in particular with optical material having the refractive index n2 and preferably with n1 < n2 975 Double gap aperture on carrier plate 973 or 974 976 First gap opening in the double gap aperture at 975, represents a field of view discriminator. 977 Second gap opening in the double gap aperture at 975, represents a field of view discriminator. A Point a Center distance of the gap openings, preferably corresponds to half the lateral shear s alpha Aperture angle, equivalent to half the opening angle b Width of the two field of view discriminators BFD1 and BFD2, which is preferably at least approximately equal. In the cyclical double beam interferometer (605, 606, 607), b is the overall width of the nondiscriminating region, that is to say for example the opening of the latter, of a field of view discriminator in the revolving beam path. The width b can be the gap width of a simple gap-shaped shading aperture 631 or 632 and/or the overall width of a finely-structured shading aperture. But the width b can also be the maximum width of the pass-through area of a liquid crystal display, even when the latter has a finely-structured pass-through area. But the width b can also be the width of a narrow plane mirror that is used as a field of view discriminator and/or the overall width of reflecting micro-mirrors of a digital micro-mirror array. The width b can also be the gap width of the gap aperture 645 (646) in the rooftop reflector 641a (641b), which can preferably be mapped to a computer-controllable piezo actuator 647. b′ Width of the lateral measured object increment by an imagined reverse imaging of a gap-shaped opening of the two exactly adjusted field of view discriminators of equal construction, which are optically conjugated in relation to each other bk Width of the camera chip or the width of the surface of the raster detector b_S Width of the light source b_S′ Width of the light stripe in a plane of the measured object vertically to the optical axis in the geometrical-optical image of the light source, On non-scattering objects, the width of the light stripe b_S′ from the image of the light source is at least approximately equal to the width b_80 of the light stripe on the measured object. b_S″ Width of the light stripe in the plane of the gap aperture b_80′1 Width of the image of the light stripe 80, formed by the partial beam TB1 with mathematically positive directionality in the cyclical double beam interferometer 605, 606, 607 b_80′2 Width of the image of the light stripe 80, formed by the partial beam TB2 with mathematically positive directionality in the cyclical double beam interferometer 605, 606, 607 B Point BEI12 Common image plane in which the image planes BEI1 and BEI2 of the two revolving beam paths coincide in the cyclical double beam interferometer and are therefore optically conjugated, given perfect adjustment of the latter The field of view discriminators BFD1 and BFD2 are also at least approximately physically located in the common image plane BEI12. BEI1 Image plane in the interferometer arm IA1 in which the field of view discriminator BFD1 is also located The image plane BEI1 and the image plane BEI2 are preferably at least approximately optically conjugated. The difference of the positions of the two image planes BEI1 and BEI2 in the depth axis is preferably less than the wave-optical depth of field focal range, which the person skilled in the art determines from the numerical aperture of the partial beams TB1 and TB2, which is at least approximately equal, and the associated wavelength. Both image planes BEI1 and BEI2 are preferably optically conjugated with the apparent end mirror surface SEF in a Michelson-Type Interferometer. This can present an advantage for the size of the aperture angle alpha. BEI2 Image plane in the interferometer arm IA2 in which the field of view discriminator BFD2 is also located BFD1′s Apparent image of the first field of view discriminator BFD1 in the apparent image plane SBE12 BFD1 First field of view discriminator The field of view discriminator BFD1 is mapped to the image plane BEI1. A field of view discriminator can for example be a gap aperture 645, a pinhole array, a pass-through area 656, 657 of a liquid crystal display 655 and/or a narrow reflective region on a plane mirror and/or on a micro-mirror array and/or also a narrow plane mirror. A field of view discriminator then has a non-discriminating region, for example formed as a relative fine opening for allowing light to pass through and/or a relatively narrow reflective region. BFD2′s Apparent image of the second field of view discriminator BFD2 in the apparent image plane SBE12 BFD2 Second field of view discriminator, also refer to BFD1 The field of view discriminator BFD2 is mapped to the image plane BEI2. BFD1′r Real reverse-imaged of the first field of view discriminator BFD1 on the measured object In the adjusted state of the double beam interferometer, the images BFD1′r and BFD2′r coincide and are then optically conjugated. BFD2′r Real reverse-imaged image of the second field of view discriminator BFD2 on the measured object C Point d1, d2 Thicknesses and/or heights of the mirror prisms 887 and 889 An advantage for synchronizing the double beam interferometer is when d1 = d2 is approximated, which is possible by manufacturing together d_ST Distance of the intersection SP from the beam splitter plane ET The distance d ST describes the asymmetry in a cyclical interferometer. delta_a Shifting of the image point O′1 caused by the adjustment movement delta_y delta_beta Angle between interfering wavefronts DE Detection plane of the interferograms delta_sigma Spectral resolution in the spectrum calculated by FFT, and that is approximately determined from the reciprocal value of the maximum optical distance difference OPD given a triangular apodization of the interferogram values, and stated in the unit of measure 1/cm (here: cm.sup.−1) delta_v Image position difference in the depth axis in a cyclical double beam interferometer dm_1 Mirror distance of the plane mirrors 821 and 822 in the mirrored staircase 82 dm_1 > dm_2 applies. dm_2 Mirror distance of the plane mirrors 831 and 832 in the mirrored staircase 83 dm_1 > dm_2 applies. E Point EB Input beam epsilon Angle between the straight lines g1 and g2 in the reference plane RE in a cyclical double beam interferometer 605 to 615 The extended straight lines gl and g2 are located in the plane mirrors (628, 629) or (671, 672) and/or in the plane mirror surfaces (681, 682), (687s, 688s), (689s, 696s) or (762, 764) and in the reference plane RE. epsilon = 2psi applies. E_S Symmetry plane between the two plane mirrors and/or the plane mirror surfaces of a cyclical double beam interferometer, which also contains the half angle line between the two plane mirrors and/or plane mirror surfaces and the intersection SP ET Beam splitter plane F511 Front focal point of the lens 511 in the downstream anamorphic lens 51 (F521, F531, (52, 53, 58, 59) in they plane, which represents the reference plane RE F581, F591) F′511 Rear focal point of the lens 511 in the downstream anamorphic lens 51 (F′521, (52, 53, 58, 59) in the yz plane, which represents the reference plane RE F′531, F′581, F′591) f′511 Rear focal length of the lens 511 (521, 531, 581, 591) in downstream (f′521, f′531, anamorphic lens 51(52, 53, 58, 59) f′581, f′591) The following applies: f′511 = f′51yz (f′521 = f′52yz, f′531 = f′53yz, f′581 = f′58yz, f′591 = f′59yz) F51xz Front focal point of the anamorphic lens 51(52, 53, 58, 59) in the xz (F52xz, plane F53xz, F58xz, F59xz) F′51xz Rear focal point of the anamorphic lens 51(52, 53, 58, 59) in the xz (F′52xz, plane F′53xz, The following applies: F′511 = F′51yz F′58xz, (F′521 = F′52yz, F′531 = F′53yz, F′581 = F′58yz, F′591 = F′59yz) F′59xz) F51yz Front focal point of the anamorphic lens 51(52, 53, 58, 59) in the yz (F52yz, plane, which represents the reference plane RE F53yz, The following applies: F511 = F51yz F58yz, (F521 = F52yz, F531 = F53yz, F581 = F58yz, F591 = F59yz) F59yz) F′51yz Rear focal point of the anamorphic lens 51(52, 53, 58, 59) in the yz (F′52yz, plane, which represents the reference plane RE F′53yz, F′58yz, F′59yz) FFT (Fast) Fourier Transformation, which is in particular used for calculating a spectrum from an interferogram G Point go Plumb line onto the mirror surface of a mirror prism 687 and/or 688 g1 Extended straight line in the reference plane RE in a cyclical interferometer 605 to 615 in the surface of the plane mirror 628 and/or the plane mirror 671 or of the mirror surface 681 and/or the mirror surface 762 or of the mirror surface 687s and/or the mirror surface 689s or of the mirror surface 888 g2 Extended straight line in a cyclical interferometer 605 to 615 in the surface of the plane mirror 629 and/or the plane mirror 672 or of the mirror surface 682 and/or the mirror surface 764 or of the mirror surface 688s and/or the mirror surface 696s or of the mirror surface 890 h1 Thickness of a first plane parallel plate with the refractive index n1 h2 Thickness of a second plane parallel plate with the refractive index n1 and/or n2 HTB1, HTB2 Main beams of the partial beams TB1 and TB2 HEB Main beam of the input beam I Intensity IA1 First arm of a double beam interferometer IA2 Second arm of a double beam interferometer kappa Angle in a cyclical double beam interferometer between the main beam HTB1a, which projects from the first mirrored staircase (82), and the main beam HTB2a, which projects from the second mirrored staircase (83). L Length of a field of view discriminator, for example in a gap opening L′ Length of the image of a field of view discriminator, for example in a gap opening n1 Refractive index, e.g. nd = 1.517 for the glass N-BK7 n2 Refractive index, e.g. nd = 1.613 for the glass N-5K4 O Illuminated or self-luminescent object point on the measured object (1, 10, 14, 15, 16) on the axis of an upstream lens 70, 71, 73, 74, 75, 751 The image points O′1, O′1e, O′1s, O′2, O′2e, O′2s are optically conjugated to this image point O. O′1 Focused real image of the object point O in the interferometer O′1e Focused unfolded image of the image point O after partial geometric unfolding of the beam path of the first interferometer arm IA1 O′1s Completely unfolded apparent image point of the object point O upstream of the anamorphic lens, also by taking into account refractive materials in the beam path The completely unfolded apparent image point O′1s originates from the arm of the double beam interferometer arm IA1. O′1_unfocused Out of focus image spot of the object point O in the first interferometer arm IA1, caused by spherical aberration of plane parallel plates in the beam path O′2 Focused real image of the object point O in the interferometer O′2e Focused unfolded image of the image point O after partial geometric unfolding of the beam path of the second interferometer arm IA2 O′2s Completely unfolded apparent image point of the object point O upstream of the anamorphic lens, also by taking into account refractive materials in the beam path The completely unfolded apparent image point O′2s originates from the arm of the double beam interferometer arm IA2. O″1_xz Focused apparent image of the object point O on the output of the anamorphic lens 51, formed by a beam OAI Optical axis of the upstream lens 70, 71, 73, 74, 75 and/or also 751, which generally faces the double beam interferometer This optical axis coincides with the z axis. OA2 Optical axis of the camera, in particular an InGaAs camera OE_1, OE_2, The object elements OE_1, OE_2 OE_3, OE_4 are arranged in x OE_3, OE_4 direction, which then form a stripe-shaped measurement field. OE Object element OPD Optical distance difference, also the optical distance difference in the double beam interferometer (OPD) OPDr Optical distance difference, also the optical distance difference in the double beam interferometer (OPD), here the maximum achievable optical distance difference in the spatial interferogram on the edge of the raster detector, given a symmetric position of the spatial interferogram on the raster detector OPDru Maximum achievable optical distance difference on the edge of the raster detector, given an asymmetric position of the spatial interferogram The following can apply in a boundary case: OPDru = 2*OPDr. But in many cases, the achievable optimum is OPDru = 1.5*OPDr because the standard case requires a left-side interferogram for the phase correction when calculating the spectrum by FFT. OPD_left Maximum optical distance difference on the left side of the spatial interferogram rl, for an interferogram rl rendered with the optical distance difference OPD, as is commonly done in the industry OPD_right Maximum optical distance difference on the right side of the spatial interferogram rl, for an interferogram rl rendered with the optical distance difference OPD, as is commonly done in the industry The maximum optical distance difference OPD_right can correspond to the maximum achievable optical distance difference at the edge of the raster detector OPDru, given an asymmetric position of the spatial interferogram. P Point on a light source that is optically conjugated with the object point O P′ Image of the point P after the latter is rendered through the lens 48 onto the measured object 14 and/or 15 P″1 Image of the point P′ after the latter is rendered with an upstream lens 73 into the double beam interferometer The point P-1 coincides with the point O′1 in FIG. 13. P″2 Image of the point P′after the latter is rendered with an upstream lens 73 into the double beam interferometer The point P″2 coincides with the point O′2, which is shown in FIG. 12 and also in FIG. 13. P′′1s Image of the point P′ in the apparent image plane SBE12, mapped to the first interferometer arm IA1 P″2s Image of the point P′in the apparent image plane SBE12, mapped to the second interferometer arm IA2 psi The half angle of the cyclical double beam interferometer, and generally an acute angle, and psi is half the value of the angle epsilon In a cyclical double beam interferometer 605 to 615, the angle psi is half the value of the angle between the straight lines g1 and g2 in the reference plane RE. RE Reference plane The reference plane RE is spanned by the normal of the planar beam splitter surface and by the optical axis OAI of the upstream lens on the input of a double beam interferometer. The reference plane is then generally vertical in relation to the beam splitter surface. In a Mach- Zehnder Interferometer, the normal of the first beam splitter surface determines the reference plane RE. The raster detector is in a standard case vertical in relation to the reference plane RE. rho Angle rI Spatial interferogram RZ Radius of a cylindrical wave, which becomes very small or approaches zero on the raster detector s Lateral shear of the coherent image points O′1s, O′2s upstream of the anamorphic lens 51, 52, 53, 58, 59 and therefore also upstream of the partial beams TB1 and TB2 Depending on the arrangement, the lateral shear can also be formed as the sum and/or difference of s1 and s2. s1 Lateral shear after passing a first rooftop reflector shifted laterally to the partial beam TB1 s2 Lateral shear after passing a second rooftop reflector shifted laterally to the partial beam TB2 S82 Penetration point of the intersecting line through the reference plane RE of the extended mirror surfaces 821 and 822 of the mirrored staircase 82 S83 Penetration point of the intersecting line through the reference plane RE of the extended mirror surfaces 831 and 832 of the mirrored staircase 83 SP Intersection of the straight lines g1 and g2 in a cyclical double beam interferometer 605 to 615 in the reference plane RE, which here represents the drawing plane sigma Wave number in the unit of measure 1/cm (cm.sup.−1), where 1 is divided by the wavelength in cm Sp1, Sp2, Spectrums SP3, SP4 Each spectrum Sp1, Sp2, SP3, SP4 is respectively calculated from a spatial interferogram rI1, rI2, rI3, rI4 by FFT. t Time t1, t2, t3, t4, Points in time t5, t6 tau_1 Wedge angle between the two plane mirrors of the first mirrored staircase The aim is to at least approximately achieve tau_1 = tau_2. tau_2 Wedge angle between the two plane mirrors of the second mirrored staircase T Point TB1 First partial beam after beam splitting However, there are simultaneously a plurality of partial beams that each originate from an object point. The partial beam TB1 shown in the figures is therefore only representative for a plurality of such partial beams. The partial beams TB1 and TB2 represent coherent beams. TB2 Second partial beam after beam splitting va Step between the surfaces of two mirror prisms v1 Image shift in the depth axis on a plane parallel plate of thickness h1 and with the refractive index n1 v2 Image shift in the depth axis on a plane parallel plate of thickness h2 and refractive index n1 and/or the refractive index n2 SBE12 Apparent image plane that is arranged upstream of every anamorphic lens 51, 52, 53, 58, 59 and which in turn represents the object plane for this lens 51, 52, 53, 58, 59. This apparent image plane SBE12 is determined by the geometric unfolding of the optical arrangement with all its optical components, and also by taking into account the refraction. The apparent image plane SBE12 only exists on the adjusted interferometer on which the image planes are also optically conjugated. In this case, the individual image planes SBE1 and SBE2 coincide to form a common apparent image plane SBE12 within the wave-optical depth of field focal range, which is the standard case in this document. SEF1 Apparent end mirror surface in the first arm IA1 of the double beam interferometer SEF2 Apparent end mirror surface in the second arm IA2 of the double beam interferometer Xuv Luminescent pixel in the UV range activated by a control computer Xuv′ Image of the luminescent pixel Xuv in the UV range Xvis″1 Image of the luminescent pixel Xvis″1 in the VIS range in the first arm IA1 of the double beam interferometer Xvis″2 Image of the luminescent pixel Xvis″2 in the VIS range in the second arm IA2 of the double beam interferometer x (direction) Length direction of stripes, or length direction of a stripe light source and/or also a gap opening, generally vertically in relation to the reference plane RE y (direction) Direction of the lateral shear or the lateral direction in relation to a stripe in the unfolded state Z Region in a cyclical double beam interferometer (605 to 615) where there is no spatial overlap of any kind between the partial beams TB1 and TB2 z (direction) Propagation direction of the interference light in the detection direction In the unfolded state of the optical arrangement, the z axis is vertical in relation to the raster detector. The z axis always coincides with the optical axis OAI of the upstream lens. Θ.sub.1, Θ.sub.2 Angle between the first mirror 661a, 662a and the second mirror 661b, Θ.sub.3, Θ.sub.4 662b of the first and the second beam deflection unit in the Mach- Zehnder Interferometer