Movable work piece carrier device for holding work pieces to be treated

Abstract

Work piece carrier device to be installed in a vacuum chamber of a vacuum treatment system, comprising: one carousel X with a diameter d.sub.X, one or multiple carousels Y.sub.m with a diameter d.sub.Ym<d.sub.X, which are mountable on carousel X one or multiple work piece supports Z.sub.n with diameters d.sub.Zn?d.sub.Ym, which are mountable on the one or multiple carousels Y.sub.m, two actuators A1 and A2.

Claims

1. A work piece carrier device for holding treatable work pieces to be installed in a vacuum chamber of a vacuum treatment system, comprising: one carousel X with a diameter d.sub.X, one or multiple carousels Y.sub.m with a diameter d.sub.Ym<d.sub.X, which are mountable on the carousel X one or multiple work piece supports Z.sub.n with diameters d.sub.Zn?d.sub.Ym, which are mountable on the one or multiple carousels Y.sub.m, a first actuator and a second actuator, wherein forced connections between the first actuator and the second actuator, and the carousel X and Y.sub.m are installed using gearing mechanisms in a way, which enables at least two operating modes of the system, whereas in Mode 1, the first actuator is powered and the second actuator is not powered, leading to a rotation of the carousel X around its central rotation axis R.sub.x, and in Mode 2, the first actuator is not powered and the second actuator is powered, leading to a rotation of the one or multiple carousels Y.sub.m around their central rotation axis R.sub.Ym, while the carousel X stays in place, wherein the one or multiple carousels Y.sub.m are arranged completely within the area of the carousel X and/or the one or multiple work piece supports Z.sub.n are arranged completely within the area of the one or multiple carousels Y.sub.m, wherein the one or multiple carousels Y.sub.m are mounted at a periphery of the carousel X, such that the edges of the one or multiple carousel Y.sub.m and X are overlapping.

2. The work piece carrier device according to claim 1, wherein the carousel X is substantially circle-shaped, so that the area of the surface of the carousel X is defined by A.sub.X=?(d.sub.X/2).sup.2.

3. The work piece carrier device according to claim 1, wherein, the carousel X and the one or multiple carousels Y.sub.m are connected via a third gearing mechanism in such a manner that, when the work piece carrier device is operated in Mode 1, the one or multiple carousels Y.sub.m are set in rotation motion via the third gearing mechanism.

4. The work piece carrier device according to claim 1, wherein the first actuator is connected to the carousel X via a first gearing mechanism and the second actuator is connected to the one or multiple carousels Y.sub.m via a second gearing mechanism.

5. The work piece carrier device according to claim 1, wherein at least the first actuator or the second actuator are designed as electromechanical actuators.

6. The work piece carrier device according to claim 1, wherein the device can be used at pressure conditions below 1 mbar.

7. The work piece carrier device according to claim 1, wherein at least the carousel X or the one or multiple carousels Y.sub.m or the one or multiple work piece supports Z.sub.n are substantially planar-shaped.

8. The work piece carrier device according to claim 1, wherein at least the first or second actuator is arranged below the carousel X, opposite to the arrangement area for the work pieces.

9. The work piece carrier device according to claim 1, wherein the axes of rotation R.sub.x and R.sub.Ym are aligned parallel to each other.

10. The work piece carrier device according to claim 1, wherein the carousel X, the one or multiple carousels Ym and the one or more multiple work piece supports Z.sub.n being aligned parallel to one another.

11. The work piece carrier device according to claim 1, wherein the carousel X and the one or multiple carousels Y.sub.m can be rotated around its rotation axis R.sub.X, R.sub.Ym either in clockwise or anti-clockwise direction, wherein a rotation angle can be set to arbitrary values.

12. The work piece carrier device according to claim 1, wherein the one or multiple carousels Y.sub.m exhibiting at least a diameter d.sub.Ym or the diameter of the work piece supports is between 10% d.sub.Ym?d.sub.Zn?50% d.sub.Ym.

13. The work piece carrier device according to claim 1, wherein the carousel X is built in the way of a carousel sled, wherein the carousel X is mounted on a base frame with wheels.

14. The work piece carrier device according to claim 1, wherein walls are arranged next to the one or between the multiple carousels Y.sub.m, wherein the walls are mounted in a vertical manner next to the one or between the multiple carousels Y.sub.m which is in particular sufficient to completely separate each section in which one of the one or multiple carousels Y.sub.m is mounted from the neighboring sections.

15. The work piece carrier device according to claim 5, wherein a rotary movement is generated at least around the axes R.sub.x or R.sub.Ym by applying a control voltage to one of the actuator.

16. The work piece carrier device according to claim 9, wherein the one or multiple second carousels being simultaneously aligned perpendicular to the axes of rotation R.sub.X and R.sub.Ym.

17. The work piece carrier device according to claim 11, wherein the one or multiple carousels exhibit exhibiting a diameter 10% d.sub.X?dYm?50% d.sub.X.

18. A surface treatment system for treating workpieces, comprising: a work piece carrier device for carrying work pieces during treatment to be installed in a vacuum chamber of a vacuum treatment system, comprising: a first carousel with a diameter, one or multiple second carousels with a diameter, which are mountable on the first carousel one or multiple work piece supports Z.sub.n with diameters, which are mountable on the one or multiple second carousels, a first actuator and a second actuator, wherein forced connections between the actuators, and first carousel and are installed using gearing mechanisms in a way, which enables at least two operating modes of the system, whereas in Mode 1, the first actuator is powered and the second actuator is not powered, leading to a rotation of the first carousel around its central rotation axis, and in Mode 2, the first actuator is not powered and the second actuator is powered, leading to a rotation of one or multiple second carousels around their central rotation axis, while the first carousel stays in place, wherein the one or multiple second carousels are arranged completely within the area of the first carousel and/or the one or multiple work piece supports Z.sub.n are arranged completely within the area of the one or multiple second carousels, wherein the one or multiple second carousels are mounted at a periphery of first carousel, such that the edges of the one or multiple second carousel and the first carousel are overlapping, a chamber for the introduction of said work piece carrier device, at least one treating device for treating the work pieces which can be arranged within the work piece carrier device.

Description

(1) TABLE-US-00001 Description of figures FIG. 1 Schematic illustration of m = 8 carousels (Y.sub.m) mounted decentralized on a carousel (X). The work piece supports are not shown in this figure. FIG. 2 Schematic illustration of m = 1 carousel (Y.sub.m) mounted decentralized on a carousel (X). The carousel (Y.sub.m) is equipped with n = 4 work piece holders (Z.sub.n) FIG. 3 Schematic illustration of a vertical cut through the merged platform in one embodiment FIG. 4 Schematic illustration of a vertical cut through the merged platform and operating mode referred to as Carousel Mode Actuator A1 is ON (turning), Actuator A2 is OFF (on hold) FIG. 5 Schematic illustration of a vertical cut through the merged platform and operating mode referred to as Spindle Mode Actuator A1 is OFF (on hold), Actuator A2 is ON (turning) FIG. 6 Schematic illustration of one embodiment of the present invention where (Y.sub.m) is placed in front of a pre-treatment module T.sub.k. FIG. 7 Schematic illustration of one embodiment of the present invention, where carousel (X) is rotated around an angle ?.sub.1 = 45? in clockwise direction. Thereby carousel (Y.sub.m) is moved to treatment module T.sub.k+1. FIG. 8 Schematic illustration of one embodiment of the present invention, where carousel (X) is rotated around an angle ?.sub.1 = 90? in anti-clockwise direction. Thereby carousel (Y.sub.m) is moved to treatment module T.sub.k?1. FIG. 9 Schematic illustration of one embodiment where m = 3 carousels (Y.sub.m) are mounted decentralised on a carousel (X) and separated by vertical walls. In this illustration n = 4 work piece supports (Z.sub.n) are mounted on the carousel (Y.sub.1), (Y.sub.2), (Y.sub.3). The carousel (Y.sub.m) is moved about ?.sub.1 = 120? in anti-clockwise direction and positioned in front of treatment source T.sub.k. FIG. 10 Schematic illustration of n = 8 work piece supports mounted directly on carousel (X).

DESCRIPTION OF SPECIFIC EMBODIMENTS OF THE INVENTION

(2) The present invention discloses a merged platform offering a high flexibility regarding the loading capacities, but also the treatment methods, thereby leading to a decrease of TCO. Said merged platform contains a carousel (X) with a diameter d.sub.X=100%, which is powered by an actuator (A1), and can be rotated to either side, either clockwise or anti-clockwise. The rotation angle (?.sub.1) can be set to arbitrary values. Either one or multiple carousels (Y.sub.m) exhibiting a diameter d.sub.Ym<d.sub.X are mounted on carousel (X). The number of carousels (Y.sub.m) mounted on carousel (X) will be referred to as m. The one or multiple carousels (Y.sub.m) can be rotated around its m rotation axis (R.sub.Ym) either in clockwise or anti-clockwise direction. The rotation of the carousels (Y.sub.m) is generated by linking the carousels (Y.sub.mn) to one self-contained actuator (A2) by using a forced connection. Each of the carousels (Y.sub.m) can be equipped with a number n of work piece supports Z.sub.n. The work piece supports are rotatably mounted on the carousels (Y.sub.m), and can be rotated around their rotation axis (R.sub.Zp), with 1?p?n. The work piece supports (Z.sub.n) exhibit a diameter d.sub.Zn?d.sub.Ym. The work piece supports are forced to rotate using a forced connection.

(3) An embodiment of the invention will be described by way of example, which is meant to be merely illustrative and therefore non limiting.

(4) The figures, which are referred to in the text, are not true-to-scale drawings, and therefore non-limiting. E.g. the size or number of the carousels could also be chosen to be different.

(5) According to one aspect of the present invention, which is shown in FIG. 1, the m carousels (Y.sub.m) are mounted decentralized on the one carousel (X). In the example shown in FIG. 1, m is chosen to be m=8, but could also be chosen to be a different number. The carousel (X) can be rotated around a rotation angle (?.sub.1). The carousels (Y.sub.m) can be rotated around their m rotation angles (?.sub.m).

(6) According to a preferred embodiment of the present invention, the carousels (Y.sub.m) are mounted at the periphery of carousel (X), such that the edges of the carousel (Y.sub.m) and (X) are overlapping, when looked at it from above. Examples of this preferred embodiment are shown in FIGS. 6-9.

(7) According to one embodiment of the present invention, shown in FIG. 2, m=1 carousel (Y.sub.m), exhibiting a diameter d.sub.Ym, preferably 10% d.sub.X?d.sub.Ym?50% d.sub.X, most preferably d.sub.Ym=50% d.sub.X, is rotatably mounted on carousel (X). A vertical cut through the setup of the merged platform in this embodiment is shown in FIG. 3. Carousel (X) is powered by a centralized actuator (A1), which is linked to the carousel (X) via an approximately vertical axle, functioning as a rotation axis (R.sub.X). Carousel (X) can be rotated clockwise and anti-clockwise, whereas the rotation angle (?.sub.1) can be set to arbitrary values. Carousel (Y.sub.m) is mounted decentralized on Carousel (X), and is powered by a second, self-contained actuator (A2). Carousel (Y.sub.m) is rotatable around its rotation axis (R.sub.Ym) about an angle (?.sub.m). Actuator (A2) powers a system of gears, which form a forced connection. Since carousel (Y.sub.m) is mounted rotatably on carousel (X) via an approximately vertical axis, functioning as rotation axis (R.sub.Ym), a second rotation movement can be exhibited. The actuator (A2) allows the carousel (Y.sub.m) to be rotated clockwise and anti-clockwise, whereas the rotation angle (?.sub.m) can be set to arbitrary values. The combination of two self-contained actuators leads to different operating modes. The carousel (Y.sub.m) is equipped with n=4 work piece supports (Z.sub.n). The diameter of the work piece supports (Z.sub.n) is chosen to be between 10% d.sub.Ym?d.sub.Zn?50% d.sub.Ym. In this embodiment the diameter d.sub.Zp is the same for all n the work piece supports (Z.sub.n), with 1?p?n. The rotation of the n work piece supports (Z.sub.n) is achieved by putting carousel (X) an hold, say the actuator (A1) is stopped. Each of the work piece supports rotatable around a rotation axis (R.sub.Zn) in clockwise or anti-clockwise direction, whereas the rotation angle is denoted as (?.sub.p).

(8) The number n of work piece supports which are mounted on the carousels (Y.sub.m) can vary with varying m. The carousels (Y.sub.m) are preferably equipped with a number n of work piece supports (Z.sub.n), where 1?n?10.

(9) The inventive platform can be operated in two different modes. The first mode is shown in FIG. 4 and in this text referred to as Carousel Mode. In this operating mode the actuator (A1) is powered, and thus turned around either clockwise or anti-clockwise. The actuator (A2) is fixed, and not powered. The carousel plate of carousel (X) is thus rotated in either clockwise or anti-clockwise direction around its rotation axis (R.sub.x). This leads to a forced rotation of the gear spindle and thus the carousel plate of carousel (Y.sub.m), more exactly the spindles (Z.sub.p), where the substrates are mounted, around (R.sub.Zp).

(10) The second mode is shown in FIG. 5 and in this text referred to as Spindle Mode. In this operating mode the actuator (A1) is not powered and thus stays in the same location. This means that the carousel plate of carousel (X) is also fixed and shows no rotation around rotation axis (R.sub.X). The rotation angle (?.sub.1) is set to a fixed value and remains unchanged during this operating mode. The actuator (A2) is powered and leads to a rotation of the carousel plate of carousel (Y.sub.m) around rotation axis (R.sub.Ym), either in clockwise or in anti-clockwise direction, meaning the rotation angle (?.sub.m) changes depending on time. The gears, gear strator, gear spindle, and the spindles (Z.sub.p), where the substrates are mounted, are thus rotated around a rotation axis R.sub.Zp and a rotation angle (?.sub.p).

(11) The variant using just one carousel (Y.sub.1) is however not limiting, it is also possible to mount m carousels (Y.sub.m) to carousel X, whereas m?1, in the same way as described for the variant with just one carousel (Y.sub.1). The amount of carousels Y.sub.m mounted to carousel X is preferably chosen to be between 1?m?3.

(12) The number n of work piece supports which are mounted on the carousels (Y.sub.m) can vary with varying m. According to one embodiment of the present invention, the carousels (Y.sub.m) are equipped with a number n of work piece supports (Z.sub.n), where 1?n?10.

(13) According to a preferred embodiment the carousels (Y.sub.m) all exhibit the same diameter d.sub.Ym, meaning d.sub.Yi=d.sub.Yj for 1?i,j?m. However, according to another aspect of the present invention, the diameters of the carousels (Y.sub.m) can also differ from each other, say d.sub.Yi?d.sub.Yj for 1?i,j?m.

(14) Considering the embodiment, in which m=1 carousel (Y.sub.m) is mounted on carousel (X), and n=4 work piece holders (Z.sub.n) are mounted on (Y.sub.m), the described platform can e.g. be used in order to perform different treatments (pre- and post-treatments) and apply different coating layers to a substrate. According to one embodiment, shown in FIG. 6, the carousel (Y.sub.m) can e.g. be placed in front of a module T.sub.k to pre-treat the substrate (such as e.g. heating, etching) in the first place, then it can be moved around an angle (?.sub.1). As can be seen in FIG. 7 the carousel (X) is rotated around rotation axis (R.sub.X) and about an angle ?.sub.1=45? in clockwise direction, to another module T.sub.k+1, e.g. in order to apply a first coating layer. Then it can be moved further, e.g. about ?.sub.1=90? in anti-clockwise direction, as shown in FIG. 8, in order to treat the substrates in front of treatment source T.sub.k?1, e.g. to deposit a second coating layer. This is possible since carousel (Y.sub.m) is autonomously rotatably mounted on carousel (X). Therefore the substrates on carousel (Y.sub.m) can be placed in front of one module until one of the process steps is completed. The carousel (Y.sub.m) can then be rotated with a constant angular velocity around (?.sub.m), in order to achieve a uniform treatment or coating of all substrates. After a process step, carousel (Y.sub.m) can be moved to another module, and thus process step, by rotating carousel (X) around a certain angle (?.sub.1).

(15) According to one aspect of the present invention the self-contained actuators are mounted decentralized. They can e.g. be mounted in a wall of the vacuum chamber, such as in or neighboring the wall opposite the opening, through which the workpieces are inserted into the chamber. Each actuator is then linked to a rack-wheel mounted in the carousels periphery, which gears into another rack-wheel mounted on the merged platform.

(16) According to one aspect of the present invention, the carousel is built in the way of a carousel sled. Therefore the carousel is mounted on a base frame with wheels. It can then be transported to the vacuum treatment system and inserted into the chamber by pushing the carousel into the vacuum chamber.

(17) According to another aspect of the present invention, the inventive platform is used to coat planar substrates with a coating of varying thickness regarding one dimension. This can be done, e.g. using only m=1 carousel (Y.sub.m). Therefore carousel (Y.sub.1) is stopped in front of a coating source, and thus (?.sub.1) is kept fixed. Carousel (Y.sub.1) is luffed in front of a coating source, e.g. an arc or sputter target. Say (?.sub.1) is changed depending on time, in a controlled manner. Using this method, convex coatings can be applied. Furthermore dye distributions can be generated using this method, e.g. for decorative applications.

(18) According to one aspect of the invention, the inventive merged platform is inserted into a vacuum chamber exhibiting a large height in order to coat wide-stretched, rod-shaped work pieces, which could not be treated in a vacuum chamber of smaller height.

(19) According to one embodiment of the present invention, which is shown in FIG. 9, m=3 carousels Y.sub.m are mounted decentralized on a carousel X. Three walls are mounted in a vertical manner between the m carousels Yi, with 1?i?m, and at approximately right angles on top of carousel X. These walls exhibit a height and width, which is sufficient to completely separate each section in which one carousel Y.sub.i is mounted from the neighboring sections. Said merged platform is mounted in a vacuum chamber with a number k of treatment sources T.sub.k, which is chosen in order to allow different treatments on the substrates, which are mounted on different carousels Y.sub.i. The number of treatment sources can e.g. be chosen to be k=3. This allows to insert three different substrate batches, which can be treated in different ways and orders, since they are shielded from the treatment, which is applied to the neighboring section and thus batch of substrates. According to one aspect of the present invention the etching procedure applied to the substrate batch on carousel Y.sub.1 differs from the etching procedure applied to the substrate batch on carousel Y.sub.2 and Y.sub.1 by varying the treatment time, although the substrates are treated using the same treatment source T.sub.k.

(20) According to one embodiment, which is shown in FIG. 10, a machine with a coating chamber exhibiting a coating height of h=400 mm is equipped with an inventive merged platform. Said merged platform comprises a carousel (X) upon which m further carousels (Y.sub.m), e.g. m=8 are mounted. If the platform is operated in the Carousel Mode, n work piece supports (Z.sub.p), with 1?p?n, are mounted on the carousel (Y.sub.m) in such a way, that n?m, preferably n=m, so in this example n=8. The rotation axis (R.sub.Zm) und (R.sub.Zp) are overlapping. Thereby the work piece supports are mounted on the axles where the carousels (Y.sub.i) are mounted, if the carousel is operated in the Spindle Mode. In the embodiment shown in FIG. 10, d.sub.Ym=d.sub.Zn holds. The carousel (X) exhibits a diameter of d.sub.X=1000 mm. The work piece supports (Z.sub.n) are located at the outer edge of carousel (X). Using this configuration the loading capacity of the described machine in this embodiment is 100%. If operated in the said Carousel Mode the vacuum chamber is equipped with four treatment sources. The same machine, with a height of h=400 mm, can be equipped with an inventive merged platform, whereas carousel (X) is the same carousel with diameter d.sub.X=1000 mm. In contrast to the case with a loading capacity of 100%, m=1 carousel (Y.sub.m) is mounted on the carousel (X). On this carousel (Y.sub.1), n=4 work piece supports Z.sub.n are mounted. This leads to a loading capacity of 50%. The number of treatment sources is changed accordingly to two treatment sources used for a loading capacity of 50%. Comparing the two situations, the recipient remains the same and the carousel (X) also remains unchanged. The number m of carousels (Y.sub.m), the number n of work piece supports (Z.sub.n), and the number k of targets T.sub.k is changed according to the loading capacity. The carousels (Y.sub.m) keep the required distance between target and substrates and turn around the rotation axis (R.sub.Ym), with a constant angular velocity. The gear transmission ratio is adapted to the coating, which is applied. Carousel (X) can be rotated about a certain angle (?.sub.1), in order to move carousel (Y.sub.i) with 0?i?m from one position (one process step) to the next position (second process step), and move another carousel (Y.sub.j) with 0?j?m, j?l, into the position previously occupied by carousel (Y.sub.i).

LABELLING OF FIGURES

(21) TABLE-US-00002 A1 Actuator 1 A2 Actuator 2 d.sub.X Diameter of carousel X d.sub.Ym Diameter of Carousel Y.sub.m d.sub.Zp Diameter of Work piece support Z.sub.p R.sub.X Rotation axis of carousel X R.sub.Ym Rotation axis of carousel Y.sub.m R.sub.Zp Rotation axis of work piece holder Z.sub.p T.sub.k Treatment source X Carousel Y.sub.m Carousel Y.sub.1, Y.sub.2, Y.sub.3 Carousel Z.sub.p Work piece support ?.sub.1 Rotation angle of carousel X around its central axis ?.sub.m Rotation angle of carousel Y.sub.m around its central axis ?.sub.p Rotation angle of work piece support Z.sub.p