Organoaminosilanes and methods for making same

Abstract

Organoaminosilanes, such as without limitation di-iso-propylaminosilane (DIPAS), are precursors for the deposition of silicon containing films such as silicon-oxide and silicon-nitride films. Described herein are methods to make organoaminosilane compounds, or other compounds such as organoaminodisilanes and organoaminocarbosilanes, via the catalytic hydrosilylation of an imine by a silicon source comprising a hydridosilane.

Claims

1. A method for preparing a compound selected from the group consisting of an organoaminosilane, an organoaminodisilane, and an organoaminocarbosilane, in the presence of a catalyst comprising at least one member selected from the group consisting of transition metals, lanthanides and actinides, the method comprising the steps of: reacting at least one imine having a formula RNCRR wherein R, R and R are each independently selected from the group consisting of hydrogen, a C.sub.1-10 linear alkyl group, a C.sub.3-10 branched alkyl, a C.sub.3-10 cyclic alkyl group, a C.sub.2-10 alkenyl group, a C.sub.4-10 aromatic group, a C.sub.4-10 heterocyclic group, a C.sub.3-10 linear organoamino group, a C.sub.2-10 branched organoamino group, a silyl group, a C.sub.1-10 linear carbosilyl group, and a C.sub.2-10 branched carbosilyl group, wherein at least one of R and R or R and R, or none of R and R or R and R are be linked to form a substituted or unsubstituted cyclic ring and a silicon source comprising at least one hydridosilane wherein the hydridosilane has a formula R.sup.1R.sup.2R.sup.3SiH wherein R.sup.1 is selected from the group consisting of hydrogen, a C.sub.1-10 linear alkyl group, a C.sub.3-10 branched alkyl group, a C.sub.4-10 cyclic alkyl group, a C.sub.2-10 alkenyl group, a C.sub.4-10 aromatic group, a C.sub.4-10 heterocyclic group, a C.sub.1-10 linear organoamino group, a C.sub.2-10 branched organoamino group, a silyl group, a C.sub.1-10 linear carbosilyl group, and a C.sub.2-10 branched carbosilyl group; and R.sup.2 and R.sup.3 are each hydrogen.

2. The method of claim 1 wherein the imine comprises at least one member selected from the group consisting of N-iso-propyl-iso-propylidenimine, N-iso-propyl-sec-butylidenimine, N-sec-butyl-sec-butylidenimine, and N-tert-butyl-iso-propylidineimine.

3. The method of claim 1 wherein the reaction is conducted in the presence of at least one solvent.

4. The method of claim 1 wherein the catalyst comprises at least one member selected from the group consisting of Ru, Ni, Rh, and Ca.

5. The method of claim 1 wherein the catalyst is selected from the group consisting of [(dipp-nacnac)CaX(THF)].sub.2 (dipp-nacnacCH[(CMe)(2,6-iPr.sub.2C.sub.6H.sub.3N)].sub.2; XH, halide, alkyl, organosilyl, amino), Ca[N(SiMe.sub.3).sub.2].sub.2, Ca(CH.sub.2Ph).sub.2, Ca(C.sub.3H.sub.5).sub.2, Ca(-Me.sub.3Si-2-(Me.sub.2N)-benzyl).sub.2(THF).sub.2, Ca(9-(Me.sub.3Si)-fluorenyl)(-Me.sub.3Si-2-(Me.sub.2N)-benzyl) (THF), [(Me.sub.3TACD).sub.3Ca.sub.3(3-H).sub.2]+(Me.sub.3TACD=Me.sub.3[12]aneN.sub.4), group 2 metal-amide, -alkyl, and -hydride complexes.

6. The method of claim 1 wherein the organoaminocarbosilane compound is formed and is selected from the group consisting of ##STR00580## ##STR00581## ##STR00582##

7. The method of claim 1 wherein the organoaminocarbosilane compound is formed and is selected from the group consisting of ##STR00583## ##STR00584## ##STR00585## ##STR00586##

Description

DETAILED DESCRIPTION OF THE INVENTION

(1) Methods for preparing compounds such as organoaminosilanes, organoaminodisilanes, organoaminocarbosilanes, and organoamines are described herein using an imine having a formula RNCRR wherein R, R and R are each independently selected from hydrogen, a C.sub.1-10 linear alkyl group, a C.sub.3-10 branched alkyl group, a C.sub.3-10 cyclic alkyl group, a C.sub.2-10 alkenyl group, a C.sub.4-10 aromatic group, a C.sub.4-10 heterocyclic group, a C.sub.1-10 linear organoamino group, a .sub.2-10 branched organoamino group, a silyl group, a C.sub.1-10 linear carbosilyl group, and a C.sub.2-10 branched carbosilyl group and wherein R and R or R and R can be linked to form a substituted or an unsubstituted cyclic ring. In certain embodiments of the imine having formula RNCRR, R and R or R and R in the formula are linked to form the substituted or unsubstituted cyclic ring. In these embodiments, the imine can be synthesized by condensing a primary amine having the formula RNH.sub.2, with a ketone or aldehyde having the formula RRCO. In alternative embodiments of the imine having formula RNCRR, R and R or R and R in the formula are not linked to form the substituted or unsubstituted cyclic ring.

(2) In the formulas above and throughout the description, the term alkyl denotes a linear or branched functional group having from 1 to 10 or from 3 to 10 carbon atoms, respectively. Exemplary linear alkyl groups include, but are not limited to, methyl, ethyl, n-propyl, n-butyl, n-pentyl, and hexyl. Exemplary branched alkyl groups include, but are not limited to, isopropyl, isobutyl, sec-butyl, tert-butyl, iso-pentyl, tert-pentyl, isohexyl, and neohexyl. In certain embodiments, the alkyl group may have one or more functional groups such as, but not limited to, an alkoxy group, a dialkylamino group, an carbosilyl group, or combinations thereof, attached thereto. In other embodiments, the alkyl group does not have one or more functional groups attached thereto.

(3) In the formulas above and throughout the description, the term cyclic alkyl denotes a cyclic functional group having from 3 to 10 or from 4 to 10 carbon atoms. Exemplary cyclic alkyl groups include, but are not limited to, cyclobutyl, cyclopentyl, cyclohexyl, and cyclooctyl groups.

(4) In the formulas above and throughout the description, the term aryl denotes an aromatic cyclic functional group having from 5 to 10 carbon atoms. Exemplary aryl groups include, but are not limited to, phenyl, benzyl, chlorobenzyl, tolyl, and o-xylyl. In some embodiments, the aromatic cyclic group can have other elements such as oxygen, or nitrogen. Exemplary such groups include, but not limited to, pyrollyl, furanyl, pyridinyl, pyridazinyl.

(5) In the formulas above and throughout the description, the term alkenyl group denotes a group which has one or more carbon-carbon double bonds and has from 2 to 10 or from 2 to 6 carbon atoms. Exemplary alkenyl groups include, but are not limited to, vinyl or allyl groups.

(6) In the formulas above and throughout the description, the term alkynyl group denotes a group which has one or more carbon-carbon triple bonds and has from 2 to 10 or from 2 to 6 carbon atoms.

(7) In the formulas above and throughout the description, the term carbosilane denotes an organosilane comprising carbon, hydrogen, and silicon having from 1 to 10 carbon atoms and from 1 to 10 silicon atoms, and which contains at least one SiC bond. Examples of carbosilanes include, without limitation, methylsilane, ethylsilane, diethylsilane, dimethylsilane, triethylsilane, 1,2-dimethyldisilane,1,4-disilabutane, 2-methyl-1,3-disilapropane, 1,3-disilapropane, 1-silacyclopentane, 1-methyl-1-silacyclopentane, 1-silacyclobutane, 1,3-disilacyclobutane, and phenylsilane.

(8) In the formulas above and throughout the description, the term carbosilyl denotes an organosilyl group comprising carbon, hydrogen, and silicon having from 1 to 10 carbon atoms and from 1 to 10 silicon atoms, and which contains at least one SiC bond. Examples of carbosilyl groups include, without limitation, methylsilyl (SiMeH.sub.2), ethylsilyl (SiEtH.sub.2), diethylsilyl (SiEt.sub.2H), dimethylsilyl (SiMe.sub.2H), triethylsilyl (SiEt.sub.3), trimethylsilyl (SiMe.sub.3), 1,2-dimethyldisilyl (SiMeHSiMeH.sub.2),1,4-disilabutyl (SiH.sub.2CH.sub.2CH.sub.2SiH.sub.3), dimethylvinylsilyl (SiMe2CHCH.sub.2), and phenylsilyl (SiPhH.sub.2).

(9) In the formulas above and throughout the description, the term silyl denotes the unsubstituted silyl group (SiH.sub.3).

(10) In formulas above and throughout the description, the term organoamino denotes a dialkylamino, alkylamino, or arylalkylamino group which may have from 1 to 10, or from 1 to 4 carbon atoms. Exemplary organoamino groups include, but are not limited to, dimethylamino (Me.sub.2N), diethylamino (Et.sub.2N), di-iso-propylamino (.sup.iPr.sub.2N), iso-propyl-sec-butylamino, N-sec-butyl-N-iso-propylamino, 1-(N-ethyl-N-cyclohexylamino, N-phenyl-N-iso-propylamino, tert-butylamino (tBuNH), tert-pentylamino (tAmNH), n-propylamino (nPrNH), and iso-propylamino (.sup.iPrNH).

(11) In certain embodiments of the formulas described herein, a substituent such as a cyclic ring may be substituted or have one or more atoms or group of atoms substituted in place of, for example, a hydrogen atom. Exemplary substituents include, but are not limited to, oxygen, sulfur, halogen atoms (e.g., F, Cl, I, or Br), nitrogen, and phosphorous. In alternative embodiments, the substitutent is not unsubstituted.

(12) The method described herein involves the catalytic hydrosilylation of imines as an alternative route to the synthesis of compounds such as organoaminosilane, organoaminodisilane, and organoaminocarbosilane which can be used, without limitation, as precursors in the deposition of silicon-containing films. For example, in one embodiment, the organoaminosilane .sup.iPr.sub.2NSiH.sub.3 could be conveniently synthesized by reacting the imine N-iso-propyl-iso-propylidenimine with a silicon source of silane gas SiH.sub.4. In another embodiment, the organoaminodisilane .sup.iPr.sub.2N-SiH.sub.2SiH.sub.3 could be obtained in a similar fashion by reacting the imine N-iso-propyl-iso-propylidenimine with a silicon source of disilane gas Si.sub.2H.sub.6. The method described herein can be used, for example, to prepare other organoaminosilane, organoaminodisilane, or organoaminocarbosilane compounds such as, without limitation, (organoamino)SiH.sub.3, (organoamino)SiH.sub.2SiH.sub.3, (organoamino)SiH.sub.2SiH.sub.2(organoamino), (organoamino)SiH.sub.2CH.sub.2CH.sub.2SiH.sub.3, (organoamino)SiH.sub.2CH.sub.2CH.sub.2SiH.sub.2(organoamino), (organoamino)SiHEt.sub.2, (organoamino)SiH(CH.sub.2CH.sub.2CH.sub.2CH.sub.2), (organoamino)SiMe(CH.sub.2CH.sub.2CH.sub.2CH.sub.2), (organoamino)SiH(CH.sub.2CH.sub.2CH.sub.2), (organoamino)SiH(CH.sub.2SiH.sub.2CH.sub.2), (organoamino)SiH(CH.sub.2)2SiH(organoamino), (organoamino)SiH.sub.2Me, or (organoamino)SiH.sub.2Ph. In certain embodiments, asymmetric imines could be used as a reagent in a reaction mixture comprising a silicon source in the presence of a catalyst to provide organoaminosilanes, organoaminodisilanes, or organoaminocarbosilanes having asymmetric organoamino groups. In this regard, these asymmetric organoamino precursors would otherwise have been unfeasible to synthesize using prior art methods due to scarcity of the corresponding amine [e.g. (.sup.5Bu)(.sup.iPr)NH, (.sup.tBu)(.sup.iPr)NH].

(13) The methods described herein provide a means to synthesize desirable compounds such as but not limited to organoaminosilanes (e.g., DIPAS), organoaminodisilanes (e.g., DIPADS), organoaminocarbosilanes, at relatively high yields. In this regard, exemplary yields obtainable for the compounds using the synthesis method described herein are 50 mol % or greater, 55 mol % or greater, 60 mol % or greater, 65 mol % or greater, 70 mol % or greater, 75 mol % or greater, 80 mol % or greater, or 90 mol % or greater based on the imine usage. In synthesis processes wherein the silicon source comprises a hydridosilane reagent having at least two SiH groups, once one hydrosilylation has taken place at a single silicon atom, the rate for a second, third, or fourth hydrosilylation to take place at the same silicon atom becomes significantly and successively slower. In contrast, in synthesis processes involving reacting lithium-amides with SiX.sub.n (X=halide or H, n=2,3,4) compounds, or when reacting primary or secondary amines with said compounds, preventing over-amination is difficult. Therefore, there is a kinetic selectivity for preparing compounds such as organoaminosilanes in a more subtle, less harsh hydrosilylation method such as the method described herein.

(14) As previously discussed, an imine is reacted with a silicon source to form a reaction mixture comprising a compound such as without limitation, an organoaminosilane (e.g., DIPAS), an organoaminodisilanes (e.g., DIPADS), and organoaminocarbosilanes. In these embodiments, the silicon source reagent may include a hydridosilane having the formula of R.sup.1R.sup.2R.sup.3SiH wherein R.sup.1, R.sup.2 and R.sup.3 are each independently selected from hydrogen, a C.sub.1-10 linear alkyl group, a C.sub.3-10 branched alkyl group, a C.sub.4-10 cyclic alkyl group, a C.sub.2-10 alkenyl group, a C.sub.4-10 aromatic group, a C.sub.4-10 heterocyclic group, a C.sub.1-10 linear organoamino group, a C.sub.2-10 branched organoamino groups, a silyl group, a C.sub.1-10 linear carbosilyl group, and a C.sub.2-10 branched carbosilyl group and wherein at least one of R.sup.1 and R.sup.2, R.sup.1 and R.sup.3, or R.sup.2 and R.sup.3 or none of R.sup.1 and R.sup.2, R.sup.1 and R.sup.3, or R.sup.2 and R.sup.3 are linked to form a substituted or unsubstituted cyclic ring.

(15) The imine reagents may include secondary aldimines, RNCHR, or secondary ketimines, RNCRR, containing linear or branched organic R, R and R functionalities and wherein R, R and R are as described herein, though it is preferable that alkyl functionalities be sufficiently large to afford stability during purification processes and storage of the final organoaminosilane product. Exemplary imines include, but are not limited to, N-iso-propyl-iso-propylidenimine, N-iso-propyl-sec-butylidenimine, N-sec-butyl-sec-butylidenimine, and N-tert-butyl-iso-propylidineimine.

(16) The molar ratio of imine to the hydridosilane in the reaction mixture ranges from 1 to 0.5, 1 to 1, 2 to 1, 3 to 1, 5 to 1, or from 10 to 1. In embodiments wherein the hydridosilane reagent comprises only one or two SiH bonds per silicon atom, the reaction may yield solely the singly substituted amine derivative and be insensitive to higher imine ratios, especially if the imine has large substituents. In embodiments wherein the hydridosilane reagent in the reaction mixture comprises three or more SiH bonds per silicon atom, an excess of hydridosilane is used to avoid bis(amino)silane products. In some embodiments, the hydridosilane has only one SiH.sub.z group, wherein x is a number ranging from 1 to 4, such as silane, methylsilane, diethylsilane, or trimethylsilane. In other embodiments, wherein the hydridosilane has more than one SiHz groups, wherein x is a number ranging from 1 to 3, such as disilane, 1,4-disilabutane, or polysilanes, an excess of hydridosilane is used if the desired organoaminodisilane or organoaminocarbosilane product is to have only one organoamino group. In one particular embodiment, the reaction mixture has a 1:2.2 to 1:2.3 molar ratio of imine to hydridosilane to ensure the reaction proceeds quickly to completion and to prevent more than one hydrosilylation reaction per hydridosilane molecule.

(17) The molar ratio of catalyst to imine in the reaction mixture ranges from 0.1 to 1, 0.05 to 1, 0.01 to 1, 0.005 to 1, 0.001 to 1, 0.0005 to 1, 0.0001 to 1, 0.00005 to 1, or 0.00001 to 1. In one particular embodiment 0.05 to 0.07 equivalents of catalyst is used per equivalent of imine. In another particular embodiment 0.00008 equivalents of catalyst is used per equivalent of imine.

(18) In certain embodiments, the reaction mixture comprising the hydridosilane reagent(s), imine reagent(s), and catalyst(s) further comprises an anhydrous solvent. Exemplary solvents may include, but are not limited to linear-, branched-, cyclic- or poly-ethers (e.g., tetrahydrofuran (THF), diethyl ether, diglyme, and/or tetraglyme); linear-, branched-, or cyclic-alkanes, alkenes, aromatics and halocarbons (e.g. pentane, hexanes, toluene and dichloromethane). The selection of one or more solvent, if added, may be influenced by its compatibility with reagents contained within the reaction mixture, the solubility of the catalyst, and/or the separation process for the intermediate product and/or the end product chosen. In other embodiments, the reaction mixture does not comprise a solvent. In these or other embodiments, the mixture of imine and hydridosilane reagents may be used as the liquid medium for the reaction in the reaction mixture. In alternative embodiments, however, the reaction mixture does not contain any solvent.

(19) In the method described herein, the reaction between the hydridosilane reagent(s) and the imine reagent(s) occurs at one or more temperatures ranging from about 0 C. to about 100 C. Exemplary temperatures for the reaction include ranges having any one or more of the following endpoints: 0, 10, 20, 30, 40, 50, 60, 70, 80, 90, or 100 C. The suitable temperature range for this reaction may be dictated by the physical properties of the hydridosilane reagent(s), imine reagent(s), catalyst(s), and optional solvent. Examples of particular reactor temperature ranges include but are not limited to, 0 C. to 80 C. or from 0 C. to 30 C.

(20) In certain embodiments of the method described herein, the pressure of the reaction may range from about 1 to about 115 psia or from about 15 to about 45 psia. In some embodiments where the hydridosilane reagent is a liquid under ambient conditions, the reaction is run at atmospheric pressure. In some embodiments where the hydridosilane reagent is a gas under ambient conditions, the reaction is run under above 15 psia.

(21) In certain embodiments, one or more reagents may be introduced to the reaction mixture as a liquid or a vapor. In embodiments where one or more of the reagents is added as a vapor, a non-reactive gas such as nitrogen or an inert gas may be employed as a carrier gas to deliver the vapor to the reaction mixture. In embodiments where one or more of the reagents is added as a liquid, the regent may be added neat, or alternatively diluted with a solvent. The reagent is fed to the reaction mixture until the desired conversion to the crude mixture containing the organoaminosilane product, or crude liquid, has been achieved. In certain embodiments, the reaction may be run in a continuous manner by replenishing the hydridosilane and/or imine reagents and removing the reaction products and the crude liquid from the reactor.

(22) An example of the catalytic hydrosiliation method described herein comprises a combining hydridosilane and imine to provide a reaction mixture in the presence of 0.1-10 mol % catalyst under ambient conditions to produce an organoaminosilane, organoaminodisilane, or organoaminocarbosilane compound as shown below in the following reaction scheme (1). The hydridosilane reagent having the following formula R.sup.1R.sup.2R.sup.3SiH wherein R.sup.1, R.sup.2 and R.sup.3 are each independently selected from hydrogen, C.sub.1-10 linear alkyl group, a C.sub.3-10 branched alkyl group, a C.sub.4-10 cyclic alkyl group, a C.sub.2-10 alkenyl group, a C.sub.4-10 aromatic group, a C.sub.4-10 heterocyclic group, a C.sub.1-10 linear organoamino group, a C.sub.2-10 branched organoamino groups, a silyl group, a C.sub.1-10 linear carbosilyl group, and a C.sub.2-10 branched carbosilyl group and wherein at least one of, or none of, R.sup.1 and R.sup.2, R.sup.1 and R.sup.3, or R.sup.2 and R.sup.3 in the hydridosilane reagent are linked to form a substituted or unsubstituted cyclic ring.

(23) ##STR00002##

(24) The reaction may require an excess of either hydridosilane reagent or imine to regulate the extent of hydrosilylation, and solvents such as tetrahydrofuran (THF) or hexanes may be used to facilitate the reaction progress. The hydridosilane reagents that are volatile liquids or gases [e.g. SiH.sub.4 (silane), Si.sub.2H.sub.6 (disilane), MeSiH.sub.3 (methylsilane), EtSiH.sub.3 (ethylsilane), Et.sub.2SiH.sub.2 (diethylsilane), PhSiH.sub.3 (phenylsilane), H.sub.3SiCH.sub.2CH.sub.2SiH.sub.3 (1,4-disilabutane), H.sub.3SiCH.sub.2SiH.sub.3 (1,3-disilapropane), H.sub.3SiCH.sub.2(CH.sub.3)SiH.sub.3 (2-methyl-1,4-disilapropane), (CH.sub.2CH.sub.2CH.sub.2CH.sub.2)SiH.sub.2 (1-silacyclopentane), (CH.sub.2CH.sub.2CH.sub.2CH.sub.2)SiHMe (1-methyl-1-silacyclopentane), (CH.sub.2CH.sub.2CH.sub.2)SiH.sub.2 (1-silacyclobutane), (CH.sub.2SiH.sub.2CH.sub.2)SiH.sub.2 (1,3-disilacyclobutane)], pressures greater than 1 atmospheres (atm) may be required to maintain sufficient levels of these reagents in the liquid phase. Once the reaction is complete or has reached equilibrium, the organoaminosilane, organoaminodisilane, or organoaminocarbosilane product can be purified by distillation. Referring to the above reaction scheme (1), the final organoaminosilane, organoaminodisilane, or organoaminocarbosilane product is formed by the reaction of the imine and hydridosilane. A >50% stoichiometric excess of hydridosilane is generally used to ensure complete reaction, though smaller excesses may be used if the mixing period is adequately long

(25) The crude mixture comprising the desired organoaminosilane, organoaminodisilane, or organoaminocarbosilane product, catalyst(s), and potentially residual imine, residual hydridosilane, solvent(s), or undesired organoaminosilane product(s) may require separation process(es). Examples of suitable separation processes include, but are not limited to, distillation, evaporation, membrane separation, filtration, vapor phase transfer, extraction, fractional distillation using an inverted column, and combinations thereof. In particular embodiments, the crude fluid is first separated from the residual catalyst by vacuum transfer or distillation at lower temperatures prior to isolation of the desired product by fractional distillation in order to prevent the catalyzation of undesired reactions during the purification process. In these embodiments, the pressure can vary considerably from atmospheric to full vacuum. In this embodiment or other embodiments, the reaction occurs at one or more temperatures ranging from about 20 C. to about 200 C. Exemplary temperatures for the reaction include ranges having any one or more of the following endpoints: 20, 30, 40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 140, 150, 160, 170, 180, 190, or 200 C. Examples of particular reactor temperature ranges include but are not limited to, 20 C. to 200 C. or from 70 C. to 160 C.

(26) In certain embodiments of the method described herein, the pressure of the reaction may range from about 0.1 to about 115 psia or from about 10 to about 45 psia. In one particular embodiment, the reaction is run at a pressure of about 100 psia.

(27) In certain preferred embodiments, the reagents in the reaction mixture are gaseous. In these embodiments, the contact of the catalyst with reaction mixture may be defined in terms of defined by the bulk reactor volume displaced by the catalystreactant (e.g., silane and/or silica source gas) gas flow rate. The gas-catalyst contact time may range from about 5 to about 200 seconds. Exemplary times for the contact of the reactive mixture with the catalyst include ranges having any one or more of the following endpoints: 5, 10, 20, 30, 40, 50, 60, 70, 80, 90, 100, 110, 120, 130, 140, 150, 160, 170, 180, 190, or 200 seconds. Examples of particular contact time ranges include but are not limited to, 20 to 100 or from 10 to 40 seconds.

(28) Exemplary catalysts that can be used with the method described herein include, but are not limited to the following: alkaline earth metal catalysts; halide-free main group, transition metal, lanthanide, and actinide catalysts; and halide-containing main group, transition metal, lanthanide, and actinide catalysts.

(29) Exemplary alkaline earth metal catalysts include but are not limited to the following: Mg[N(SiMe.sub.3).sub.2].sub.2, To.sup.MMgMe [To.sup.M=tris(4,4-dimethyl-2-oxazolinyl)phenylborate], To.sup.MMgH, To.sup.MMgNR.sub.2 (RH, alkyl, aryl) Ca[N(SiMe.sub.3).sub.2].sub.2, [(dipp-nacnac)CaX(THF)].sub.2 (dipp-nacnacCH[(CMe)(2,6-.sup.jPr.sub.2C.sub.6H.sub.3N)].sub.2; XH, alkyl, carbosilyl, organoamino), Ca(CH.sub.2Ph(.sub.2, Ca(C.sub.3H.sub.5(.sub.2, Ca(-Me.sub.3Si-2-(Me.sub.2N)-benzyl).sub.2(THF(.sub.2, Ca(9-(Me.sub.3Si)-fluorenyl)(-Me.sub.3Si-2-(Me.sub.2N)-benzyl)(THF), [(Me.sub.3TACD).sub.3Ca.sub.3(.sup.3-H).sub.2].sup.+(Me.sub.3TACD=Me.sub.3[12]aneN.sub.4), Ca(.sup.2-Ph.sub.2CNPh)(hmpa).sub.3 (hmpa=hexamethylphosphoramide), Sr[N(SiMe.sub.3).sub.2].sub.2, and other M.sup.2+alkaline earth metal-amide, -imine, -alkyl, -hydride, and -carbosilyl complexes (M=Ca, Mg, Sr, Ba).

(30) Exemplary halide-free, main group, transition metal, lanthanide, and actinide catalysts include but are not limited to the following: 1,3-diisopropyl-4,5-dimethylimidazol-2-ylidene, 2,2-bipyridyl, phenanthroline, B(C.sub.6F.sub.5).sub.3, BR.sub.3 (R=linear, branched, or cyclic C.sub.1 to C.sub.10 alkyl group, a C.sub.5 to C.sub.10 aryl group, or a C.sub.1 to C.sub.10 alkoxy group), AIR.sub.3 (R=linear, branched, or cyclic C.sub.1 to C.sub.10 alkyl group, a C.sub.5 to C.sub.10 aryl group, or a C.sub.1 to C.sub.10 alkoxy group), (C.sub.5H.sub.5).sub.2TiR.sub.2 (R=alkyl, H, alkoxy, organoamino, carbosilyl), (C.sub.5H.sub.5).sub.2Ti(OAr).sub.2 [Ar=(2,6-(.sup.iPr).sub.2C.sub.6H.sub.3)], (C.sub.5H.sub.5).sub.2Ti(SiHRR)PMe.sub.3 (wherein R, R are each independently selected from H, Me, Ph), TiMe.sub.2(dmpe).sub.2 (dmpe=1,2-bis(dimethylphosphino)ethane), bis(benzene)chromium(0), Cr(CO).sub.6, Mn.sub.2(CO).sub.12, Fe.sub.3(CO).sub.5, Fe.sub.3(CO).sub.12, (C.sub.5H.sub.5)Fe(CO).sub.2Me, CO.sub.2(CO).sub.8, Ni(II) acetate, Nickel(II) acetylacetonate, Ni(cyclooctadiene).sub.2, [(dippe)Ni(-H)].sub.2 (dippe=1,2-bis(diisopropylphosphino)ethane), (R-indenyl)Ni(PR.sub.3)Me (R=1-.sup.iPr, 1-SiMe.sub.3, 1,3-(SiMe.sub.3).sub.2; R=Me,Ph), [{Ni(-CH.sub.2:CHSiMe.sub.2).sub.2O}.sub.2{-(-CH.sub.2:CHSiMe.sub.2).sub.2O}], Cu(I) acetate, CuH, [tris(4,4-dimethyl-2-oxazolinyl)phenylborate]ZnH, (C.sub.5H.sub.5).sub.2ZrR.sub.2 (R=alkyl, H, alkoxy, organoamino, carbosilyl), Ru.sub.3(CO).sub.12, [(Et.sub.3P)Ru(2,6-dimesitylthiophenolate)][B[3,5-(CF.sub.3).sub.2C.sub.6H.sub.3].sub.4], [(C.sub.5Me.sub.5)Ru(R.sub.3P).sub.x(NCMe).sub.3-x].sup.+ (wherein R is selected from a linear, branched, or cyclic C.sub.1 to C.sub.10 alkyl group and a C.sub.5 to C.sub.10 aryl group; x=0, 1, 2, 3), Rh.sub.6(CO).sub.16, tris(triphenylphosphine) rhodium(I)carbonyl hydride, Rh.sub.2H.sub.2(CO).sub.2(dppm)2 (dppm=bis(diphenylphosphino)methane, Rh.sub.2(-SiRH).sub.2(CO).sub.2(dppm).sub.2 (R=Ph, Et, C.sub.6H.sub.13), Pd/C, tris(dibenzylideneacetone) dipalladium(0), tetrakis(triphenylphosphine)palladium(0), Pd(II) acetate, (C.sub.5H.sub.5).sub.2SmH, (C.sub.5Me.sub.5).sub.2SmH, (THF).sub.2Yb[N(SiMe.sub.3).sub.2].sub.2, (NHC)Yb(N(SiMe.sub.3).sub.2).sub.2 [NHC=1,3-bis(2,4,6-trimethylphenyl)imidazol-2-ylidene)], Yb(.sup.2-Ph.sub.2CNPh)(hmpa).sub.3 (hmpa=hexamethylphosphoramide), W(CO).sub.6, Re.sub.2(CO).sub.10, Os.sub.3(CO).sub.12, Ir.sub.4(CO).sub.12, (acetylacetonato) dicarbonyliridium(I), Ir(Me).sub.2(C.sub.5Me.sub.5)L (L=PMe.sub.3, PPh.sub.3), [Ir(cyclooctadiene)OMe].sub.2, PtO.sub.2 (Adams's catalyst), Pt/C, Platinum(0)-1,3-divinyl-1,1,3,3-tetramethyldisiloxane (Karstedt's catalyst), bis(tri-tert-butylphosphine)platinum(0), Pt(cyclooctadiene).sub.2, [(Me.sub.3Si).sub.2N].sub.3U][BPh.sub.4], [(Et.sub.2N).sub.3U][BPh.sub.4], and other halide-free M.sup.n+ complexes (M=Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Y, Zr, Nb, Mo, Ru, Rh, Pd, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Hf, Ta, W, Re, Os, Ir, Pt, U; n=0, 1, 2, 3, 4, 5, 6).

(31) Exemplary halide-containing, main group, transition metal, lanthanide, and actinide catalysts include but are not limited to the following: BX.sub.3 (XF, Cl, Br, I), BF.sub.3.OEt.sub.2, AlX.sub.3 (XF, Cl, Br, I), (C.sub.5H.sub.5).sub.2TiX.sub.2 (XF, Cl), [Mn(CO).sub.4Br].sub.2, NiCl.sub.2, (C.sub.5H.sub.5).sub.2ZrX.sub.2 (XF, Cl), PdCl.sub.2, Pdl.sub.2, CuCl, Cul, CuF.sub.2, CuCl.sub.2, CuBr.sub.2, Cu(PPh.sub.3).sub.3Cl, ZnCl.sub.2, [(C.sub.6H.sub.6)RuX.sub.2].sub.2 (XCl, Br, I), (Ph.sub.3P).sub.3RhCl (Wilkinson's catalyst), [RhCl(cyclooctadiene)].sub.2, di--chloro-tetracarbonyldirhodium(I), bis(triphenylphosphine)rhodium(I) carbonyl chloride, Ndl.sub.2, Sml.sub.2, Dyl.sub.2, (POCOP)IrHCl (POCOP=2,6-(R.sub.2PO).sub.2C.sub.6H.sub.3; R.sup.iPr, .sup.nBu, Me), H.sub.2PtCl.sub.6.nH.sub.2O (Speier's catalyst), PtCl.sub.2, Pt(PPh.sub.3).sub.2Cl.sub.2, and other halide-containing M.sup.n+ complexes (M=Sc, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Y, Zr, Nb, Mo, Ru, Rh, Pd, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Hf, Ta, W, Re, Os, Ir, Pt, U; n=0, 1, 2, 3, 4, 5, 6).

(32) In certain embodiments, the compounds, or organoaminosilanes, organoaminodisilanes, and organoaminocarbosilanes, prepared using the methods described herein and compositions comprising the compounds are preferably substantially free of halide ions. As used herein, the term substantially free as it relates to halide ions (or halides) such as, for example, chlorides and fluorides, bromides, and iodides, means less than 5 ppm (by weight), preferably less than 3 ppm, and more preferably less than 1 ppm, and most preferably 0 ppm. Compositions according to the present invention that are substantially free of halides can be achieved by (1) reducing or eliminating chloride sources during chemical synthesis, and/or (2) implementing an effective purification process to remove chloride from the crude product such that the final purified product is substantially free of halides. Halide sources may be reduced during synthesis by using reagents that do not contain halides such as the halide-free catalysts described herein. In a similar manner, the synthesis should not use halide based solvents, catalysts, or solvents which contain unacceptably high levels of halide contamination. Alternatively, or additionally, the crude product may also be treated by various purification methods to render the final product substantially free of halides such as chlorides. Such methods are well described in the prior art and, may include, but are not limited to, purification processes such as distillation, or adsorption. Distillation is commonly used to separate impurities from the desire product by exploiting differences in boiling point. Adsorption may also be used to take advantage of the differential adsorptive properties of the components to effect separation such that the final product is substantially free of halide. Adsorbents such as, for example, commercially available solid bases can be used to remove halides such as chloride.

(33) The following Table 1 lists imines that can be used as reagents in the method described herein to provide exemplary organoaminosilanes, organoaminodisilanes, organoaminocarbosilanes, and organoamines compounds defined herein.

(34) TABLE-US-00001 TABLE 1 Exemplary imines N-iso-propylidene- methylamine N-sec-butylidene- methylamine N-cyclohexylidene methylamine N-cyclopentylidene methylamine N-iso-propylidene-ethylamine N-sec-butylidene-ethylamine N-cyclohexylidene-ethylamine 0 N-cyclopentylidene-ethylamine N-iso-propylidene-n- propylamine N-sec-butylidene-n- propylamine N-cyclohexylidene-n- propylamine N-cyclopentylidene-n- propylamine N-iso-propylidene-iso- propylamine N-sec-butylidene-iso- propylamine N-cyclohexylidene-iso- propylamine N-cyclopentylidene-iso- propylamine N-iso-propylidene-sec- butylamine 0 N-sec-butylidene-sec- butylamine N-cyclohexylidene-sec- butylamine N-cyclopentylidene-sec- butylamine N-iso-propylidene-tert- butylamine N-sec-butylidene-tert- butylamine N-cyclohexylidene-tert- butylamine N-cyclopentylidene-tert- butylamine N-iso-propylidene- cyclohexylamine N-sec-butylidene- cyclohexylamine N-cyclohexylidene- cyclohexylamine 0 N-cyclopentylidene- cyclohexylamine N-iso-propylidene- phenylamine N-sec-butylidene- phenylamine N-cyclohexylidene- phenylamine N-cyclopentylidene- phenylamine N-ethylidene-phenylamine N-methylidene-methylamine N-ethylidene-ethylamine N-n-propylidene-n-propylamine

(35) TABLE-US-00002 TABLE 2 Exemplary Organoaminosilane Compounds N-methyl-N-iso- propylaminosilane 0 N-sec-butyl-N- methylaminosilane N-cyclohexyl-N- methylaminosilane N-methyl-N- cyclopentylaminosilane N-ethyl-N-iso- propylaminosilane N-sec-butyl-N- ethylaminosilane N-ethyl-N- cyclohexylaminosilane N-ethyl-N- cyclopentylaminosilane N-n-propyl-N-iso- propylaminosilane N-sec-butyl-N-n- propylaminosilane N-cyclohexyl-N-n- propylaminosilane 0 N-cyclopentyl-N-n- propylaminosilane N,N-di-iso-propylaminosilane N-sec-butyl-N-iso- propylaminosilane N-cyclohexyl-N-iso- propylaminosilane N-cyclopentyl-N-iso- propylaminosilane N,N-di-sec-butylaminosilane N-sec-butyl-N- cyclohexylaminosilane N-sec-butyl-N- cyclopentylaminosilane N-tertbutyl-N-iso- propylaminosilane N-sec-butyl-N-tert- butylaminosilane 0 N-tert-butyl-N- cyclohexylaminosilane N-tert-butyl-N- cyclopentylaminosilane N,N-dicyclohexylaminosilane N-cyclohexyl-N- cyclopentylaminosilane N-phenyl-N-iso- propylaminosilane N-sec-butyl-N- phenylaminosilane N-cyclohexyl-N- phenylaminosilane N-cyclopentyl-N- phenylaminosilane N-ethyl-N-phenylaminosilane N,N-dimethylaminosilane 0 N,N-diethylaminosilane N,N-di-n-propylaminosilane

(36) TABLE-US-00003 TABLE 3 Exemplary Organoaminodisilane Compounds N-methyl-N-iso- propylaminodisilane N-sec-butyl-N- methylaminodisilane N-cyclohexyl-N- methylaminodisilane N-methyl-N- cyclopentylaminodisilane N-ethyl-N-iso- propylaminodisilane N-sec-butyl-N- ethylaminodisilane N-ethyl-N- cyclohexylaminodisilane N-ethyl-N- cyclopentylaminodisilane 0 N-n-propyl-N-iso- propylaminodisilane N-sec-butyl-N-n- propylaminodisilane N-cyclohexyl-N-n- propylaminodisilane N-cyclopentyl-N-n- propylaminodisilane N,N-di-iso-propylaminodisilane N-sec-butyl-N-iso- propylaminodisilane N-cyclohexyl-N-iso- propylaminodisilane N-cyclopentyl-N-iso- propylaminodisilane N,N-di-sec-butylaminodisilane N-sec-butyl-N- cyclohexylaminodisilane 0 N-sec-butyl-N- cyclopentylaminodisilane N-tert-butyl-N-iso- propylaminodisilane N-sec-butyl-N-tert- butylaminodisilane N-tert-butyl-N- cyclohexylaminodisilane N-tert-butyl-N- cyclopentylaminodisilane N,N-dicyclohexylaminodisilane N-cyclohexyl-N- cyclopentylaminodisilane N-phenyl-N-iso- propylaminodisilane N-sec-butyl-N- phenylaminodisilane N-cyclohexyl-N- phenylaminodisilane 00 N-cyclopentyl-N- phenylaminodisilane 01 N-ethyl-N- phenylaminodisilane 02 N,N-dimethylaminodisilane 03 N,N-diethylaminodisilane 04 N,N-di-n-propylaminodisilane

(37) TABLE-US-00004 TABLE 4 Exemplary Organoaminodisilane (more specifically 1,2-bis (organoamino)disilane) Compounds 05 1,2-bis(N-methyl-N-iso- propylamino)disilane 06 1,2-bis(N-sec-butyl-N- methylamino)disilane 07 1,2-bis(N-cyclohexyl-N- methylamino)disilane 08 1,2-bis(N-methyl-N- cyclopentylamino)disilane 09 1,2-bis(N-ethyl-N-iso- propylamino)disilane 0 1,2-bis(N-sec-butyl-N- ethylamino)disilane 1,2-bis(N-ethyl-N- cyclohexylamino)disilane 1,2-bis(N-ethyl-N- cyclopentylamino)disilane 1,2-bis(N-n-propyl-N-iso- propylamino)disilane 1,2-bis(N-sec-butyl-N-n- propylamino)disilane 1,2-bis(N-cyclohexyl-N-n- propylamino)disilane 1,2-bis(N-cyclopentyl-N-n- propylamino)disilane 1,2-bis(N,N-di-iso- propylamino)disilane 1,2-bis(N-sec-butyl-N-iso- propylamino)disilane 1,2-bis(N-cyclohexyl-N-iso- propylamino)disilane 0 1,2-bis(N-cyclopentyl-N-iso- propylamino)disilane 1,2-bis(N,N-di-sec- butylamino)disilane 1,2-bis(N-sec-butyl-N- cyclohexylamino)disilane 1,2-bis(N-sec-butyl-N- cyclopentylamino)disilane 1,2-bis(N-tert-butyl-N-iso- propylamino)disilane 1,2-bis(N-sec-butyl-N-tert- butylamino)disilane 1,2-bis(N-tert-butyl-N- cyclohexylamino)disilane 1,2-bis(N-tert-butyl-N- cyclopentylamino)disilane 1,2-bis(N,N- dicyclohexylamino)disilane 1,2-bis(N-cyclohexyl-N- cyclopentylamino)disilane 0 1,2-bis(N-phenyl-N-iso- propylamino)disilane 1,2-bis(N-sec-butyl-N- phenylamino)disilane 1,2-bis(N-cyclohexyl-N- phenylamino)disilane 1,2-bis(N-cyclopentyl-N- phenylamino)disilane 1,2-bis(N-ethyl-N- phenylamino)disilane 1,2-bis(N,N- dimethylamino)disilane 1,2-bis(N,N- dieethylamino)disilane 1,2-bis(N,N-di-n- propylamino)disilane

(38) TABLE-US-00005 TABLE 5 Exemplary Organoaminocarbosilane (more specifically organoamino-1,4- disilabutane) Compounds 1-(N-methyl-N-iso- propylamino)-1,4-disilabutane 1-(N-sec-butyl-N- methylamino)-1,4- disilabutane 0 1-(N-cyclohexyl-N- methylamino)-1,4-disilabutane 1-(N-methyl-N- cyclopentylamino)-1,4- disilabutane 1-(N-ethyl-N-iso-propylamino)- 1,4-disilabutane 1-(N-sec-butyl-N- ethylamino)-1,4-disilabutane 1-(N-ethyl-N-cyclohexylamino)- 1,4-disilabutane 1-(N-ethyl-N-cyclopentylamino)- 1,4-disilabutane 1-(N-n-propyl-N-iso- propylamino)-1,4-disilabutane 1-(N-sec-butyl-N-n- propylamino)-1,4- disilabutane 1-(N-cyclohexyl-N-n- propylamino)-1,4-disilabutane 1-(N-cyclopentyl-N-n- propylamino)-1,4-disilabutane 0 1-(N,N-di-iso-propylamino)- 1,4-disilabutane 1-(N-sec-butyl-N-iso- propylamino)-1,4- disilabutane 1-(N-cyclohexyl-N-iso- propylamino)-1,4-disilabutane 1-(N-cyclopentyl-N-iso- propylamino)-1,4-disilabutane 1-(N,N-di-sec-butylamino)-1,4- disilabutane 1-(N-sec-butyl-N- cyclohexylamino)-1,4- disilabutane 1-(N-sec-butyl-N- cyclopentylamino)-1,4- disilabutane 1-(N-tert-butyl-N-iso- propylamino)-1,4-disilabutane 1-(N-sec-butyl-N-tert- butylamino)-1,4-disilabutane 1-(N-tert-butyl-N- cyclohexylamino)-1,4- disilabutane 0 1-(N-tert-butyl-N- cyclopentylamino)-1,4- disilabutane 1-(N,N-dicyclohexylamino)-1,4- disilabutane 1-(N-cyclohexyl-N- cyclopentylamino)-1,4- disilabutane 1-(N-phenyl-N-iso- propylamino)-1,4- disilabutane 1-(N-sec-butyl-N- phenylamino)-1,4-disilabutane 1-(N-cyclohexyl-N- phenylamino)-1,4-disilabutane 1-(N-cyclopentyl-N- phenylamino)-1,4-disilabutane 1-(N-ethyl-N-phenylamino)- 1,4-disilabutane 1-(N,N-dimethylamino)-1,4- disilabutane 1-(N,N-diethylamino)-1,4- disilabutane 0 1-(N,N-di-n-propylamino)-1,4- disilabutane

(39) TABLE-US-00006 TABLE 6 Exemplary Organoaminocarbosilane (more specifically 1,4-bis (organoamino)-1,4-disilabutane) Compounds 1,4-bis(N-methyl-N-iso- propylamino)-1,4-disilabutane 1,4-bis(N-sec-butyl-N- methylamino)-1,4- disilabutane 1,4-bis(N-cyclohexyl-N- methylamino)-1,4-disilabutane 1,4-bis(N-methyl-N- cyclopentylamino)-1,4- disilabutane 1,4-bis(N-ethyl-N-iso- propylamino)-1,4-disilabutane 1,4-bis(N-sec-butyl-N- ethylamino)-1,4-disilabutane 1,4-bis(N-ethyl-N- cyclohexylamino)-1,4- disilabutane 1,4-bis(N-ethyl-N- cyclopentylamino)-1,4- disilabutane 1,4-bis(N-n-propyl-N-iso- propylamino)-1,4-disilabutane 0 1,4-bis(N-sec-butyl-N-n- propylamino)-1,4- disilabutane 1,4-bis(N-cyclohexyl-N-n- propylamino)-1,4-disilabutane 1,4-bis(N-cyclopentyl-N-n- propylamino)-1,4-disilabutane 1,4-bis(N,N-di-iso- propylamino)-1,4-disilabutane 1,4-bis(N-sec-butyl-N-iso- propylamino)-1,4- disilabutane 1,4-bis(N-cyclohexyl-N-iso- propylamino)-1,4-disilabutane 1,4-bis(N-cyclopentyl-N-iso- propylamino)-1,4-disilabutane 1,4-bis(N,N-di-sec- butylamino)-1,4-disilabutane 1,4-bis(N-sec-butyl-N- cyclohexylamino)-1,4- disilabutane 1,4-bis(N-sec-butyl-N- cyclopentylamino)-1,4- disilabutane 0 1,4-bis(N-tert-butyl-N-iso- propylamino)-1,4-disilabutane 1,4-bis(N-sec-butyl-N-tert- butylamino)-1,4-disilabutane 1,4-bis(N-tert-butyl-N- cyclohexylamino)-1,4- disilabutane 1,4-bis(N-tert-butyl-N- cyclopentylamino)-1,4- disilabutane 1,4-bis(N,N-dicyclohexylamino)- 1,4-disilabutane 1,4-bis(N-cyclohexyl-N- cyclopentylamino)-1,4- disilabutane 1,4-bis(N-phenyl-N-iso- propylamino)-1,4- disilabutane 1,4-bis(N-sec-butyl-N- phenylamino)-1,4-disilabutane 1,4-bis(N-cyclohexyl-N- phenylamino)-1,4-disilabutane 1,4-bis(N-cyclopentyl-N- phenylamino)-1,4-disilabutane 00 1,4-bis(N-ethyl-N- phenylamino)-1,4- disilabutane 01 1,4-bis(N,N-dimethylamino)- 1,4-disilabutane 02 1,4-bis(N,N-diethylamino)-1,4- disilabutane 03 1,4-bis(N,N-di-n-propylamino)- 1,4-disilabutane

(40) TABLE-US-00007 TABLE 7 Exemplary Organoaminocarbosilane (more specifically organoamino-1,3- disilapropane) Compounds 04 1-(N-methyl-N-iso- propylamino)-1,3- disilapropane 05 1-(N-sec-butyl-N- methylamino)-1,3- disilapropane 06 1-(N-cyclohexyl-N- methylamino)-1,3- disilapropane 07 1-(N-methyl-N- cyclopentylamino)-1,3- disilapropane 08 1-(N-ethyl-N-iso-propylamino)- 1,3-disilapropane 09 1-(N-sec-butyl-N- ethylamino)-1,3- disilapropane 0 1-(N-ethyl-N-cyclohexylamino)- 1,3-disilapropane 1-(N-ethyl-N-cyclopentylamino)- 1,3-disilapropane 1-(N-n-propyl-N-iso- propylamino)-1,3- disilapropane 1-(N-sec-butyl-N-n- propylamino)-1,3- disilapropane 1-(N-cyclohexyl-N-n- propylamino)-1,3-disilapropane 1-(N-cyclopentyl-N-n- propylamino)-1,3-disilapropane 1-(N,N-di-iso-propylamino)- 1,3-disilapropane 1-(N-sec-butyl-N-iso- propylamino)-1,3- disilapropane 1-(N-cyclohexyl-N-iso- propylamino)-1,3-disilapropane 1-(N-cyclopentyl-N-iso- propylamino)-1,3-disilapropane 0 1-(N,N-di-sec-butylamino)-1,3- disilapropane 1-(N-sec-butyl-N- cyclohexylamino)-1,3- disilapropane 1-(N-sec-butyl-N- cyclopentylamino)-1,3- disilapropane 1-(N-tert-butyl-N- isopropylamino)-1,3- disilapropane 1-(N-sec-butyl-N- tertbutylamino)-1,3- disilapropane 1-(N-tert-butyl-N- cyclohexylamino)-1,3- disilapropane 1-(N-tert-butyl-N- cyclopentylamino)-1,3- disilapropane 1-(N,N-dicyclohexylamino)-1,3- disilapropane 1-(N-cyclohexyl-N- cyclopentylamino)-1,3- disilapropane 1-(N-phenyl-N-iso- propylamino)-1,3- disilapropane 0 1-(N-sec-butyl-N- phenylamino)-1,3- disilapropane 1-(N-cyclohexyl-N- phenylamino)-1,3-disilapropane 1-(N-cyclopentyl-N- phenylamino)-1,3- disilapropane 1-(N-ethyl-N-phenylamino)- 1,3-disilapropane 1-(N,N-dimethylamino)-1,3- disilapropane 1-(N,N-dimethylamino)-1,3- disilapropane 1-(N,N-di-n-propylamino)-1,3- disilapropane

(41) TABLE-US-00008 TABLE 8 Exemplary Organoaminocarbosilane (more specifically 1,3-bis (organoamino)-1,3-disilapropane) Compounds 1,3-bis(N-methyl-N-iso- propylamino)-1,3- disilapropane 1,3-bis(N-sec-butyl-N- methylamino)-1,3- disilapropane 1,3-bis(N-cyclohexyl-N- methylamino)-1,3- disilapropane 0 1,3-bis(N-methyl-N- cyclopentylamino)-1,3- disilapropane 1,3-bis(N-ethyl-N-iso- propylamino)-1,3- disilapropane 1,3-bis(N-sec-butyl-N- ethylamino)-1,3- disilapropane 1,3-bis(N-ethyl-N- cyclohexylamino)-1,3- disilapropane 1,3-bis(N-ethyl-N- cyclopentylamino)-1,3- disilapropane 1,3-bis(N-n-propyl-N-iso- propylamino)-1,3- disilapropane 1,3-bis(N-sec-butyl-N-n- propylamino)-1,3- disilapropane 1,3-bis(N-cyclohexyl-N-n- propylamino)-1,3-disilapropane 1,3-bis(N-cyclopentyl-N-n- propylamino)-1,3-disilapropane 1,3-bis(N,N-di-iso- propylamino)-1,3- disilapropane 0 1,3-bis(N-sec-butyl-N-iso- propylamino)-1,3- disilapropane 1,3-bis(N-cyclohexyl-N-iso- propylamino)-1,3-disilapropane 1,3-bis(N-cyclopentyl-N-iso- propylamino)-1,3-disilapropane 1,3-bis(N,N-di-sec- butylamino)-1,3-disilapropane 1,3-bis(N-sec-butyl-N- cyclohexylamino)-1,3- disilapropane 1,3-bis(N-sec-butyl-N- cyclopentylamino)-1,3- disilapropane 1,3-bis(N-tert-butyl-N-iso- propylamino)-1,3-disilapropane 1,3-bis(N-sec-butyl-N-tert- butylamino)-1,3-disilapropane 1,3-bis(N-tert-butyl-N- cyclohexylamino)-1,3- disilapropane 1,3-bis(N-tert-butyl-N- cyclopentylamino)-1,3- disilapropane 0 1,3-bis(N,N-dicyclohexylamino)- 1,3-disilapropane 1,3-bis(N-cyclohexyl-N- cyclopentylamino)-1,3- disilapropane 1,3-bis(N-phenyl-N-iso- propylamino)-1,3- disilapropane 1,3-bis(N-sec-butyl-N- phenylamino)-1,3- disilapropane 1,3-bis(N-cyclohexyl-N- phenylamino)-1,3-disilapropane 1,3-bis(N-cyclopentyl-N- phenylamino)-1,3- disilapropane 1,3-bis(N-ethyl-N- phenylamino)-1,3- disilapropane 1,3-bis(N,N-dimethylamino)- 1,3-disilapropane 1,3-bis(N,N-diethylamino)-1,3- disilapropane 1,3-bis(N,N-di-n-propylamino)- 1,3-disilapropane

(42) TABLE-US-00009 TABLE 9 Exemplary Organoaminocarbosilane (more specifically 1-organoamino- 2-methyl-1,3-disilapropane) Compounds 0 1-(N-methyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1-(N-sec-butyl-N- methylamino)-2-methyl-1,3- disilapropane 1-(N-cyclohexyl-N- methylamino)-2-methyl-1,3- disilapropane 1-(N-methyl-N- cyclopentylamino)-2-methyl-1,3- disilapropane 1-(N-ethyl-N-iso-propylamino)- 2-methyl-1,3-disilapropane 1-(N-sec-butyl-N- ethylamino)-2-methyl-1,3- disilapropane 1-(N-ethyl-N-cyclohexylamino)- 2-methyl-1,3-disilapropane 1-(N-ethyl-N-cyclopentylamino)- 2-methyl-1,3-disilapropane 1-(N-n-propyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1-(N-sec-butyl-N-n- propylamino)-2-methyl-1,3- disilapropane 0 1-(N-cyclohexyl-N-n- propylamino)-2-methyl-1,3- disilapropane 1-(N-cyclopentyl-N-n- propylamino)-2-methyl-1,3- disilapropane 1-(N,N-di-iso-propylamino)-2- methyl-1,3-disilapropane 1-(N-sec-butyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1-(N-cyclohexyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1-(N-cyclopentyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1-(N,N-di-sec-butylamino)-2- methyl-1,3-disilapropane 1-(N-sec-butyl-N- cyclohexylamino)-2-methyl- 1,3-disilapropane 1-(N-sec-butyl-N- cyclopentylamino)-2-methyl- 1,3-disilapropane 1-(N-tert-butyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 0 1-(N-sec-butyl-N-tert- butylamino)-2-methyl-1,3- disilapropane 1-(N-tert-butyl-N- cyclohexylamino)-2-methyl- 1,3-disilapropane 1-(N-tert-butyl-N- cyclopentylamino)-2-methyl- 1,3-disilapropane 1-(N,N-dicyclohexylamino)-2- methyl-1,3-disilapropane 1-(N-cyclohexyl-N- cyclopentylamino)-2-methyl- 1,3-disilapropane 1-(N-phenyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1-(N-sec-butyl-N- phenylamino)-2-methyl-1,3- disilapropane 1-(N-cyclohexyl-N- phenylamino)-2-methyl-1,3- disilapropane 1-(N-cyclopentyl-N- phenylamino)-2-methyl-1,3- disilapropane 1-(N-ethyl-N-phenylamino)- 2-methyl-1,3-disilapropane 00 1-(N,N-dimethylamino)-2- methyl-1,3-disilapropane 01 1-(N,N-dimethylamino)-2- methyl-1,3-disilapropane 02 1-(N,N-di-n-propylamino)-2- methyl-1,3-disilapropane

(43) TABLE-US-00010 TABLE 10 Exemplary Organoaminocarbosilane (more specifically 1,3-bis(organoamino)-2-methyl-1,3-disilapropane) Compounds 03 1,3-bis(N-methyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 04 1,3-bis(N-sec-butyl-N- methylamino)-2-methyl-1,3- disilapropane 05 1,3-bis(N-cyclohexyl-N- methylamino)-2-methyl-1,3- disilapropane 06 1,3-bis(N-methyl-N- cyclopentylamino)-2-methyl- 1,3-disilapropane 07 1,3-bis(N-ethyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 08 1,3-bis(N-sec-butyl-N- ethylamino)-2-methyl-1,3- disilapropane 09 1,3-bis(N-ethyl-N- cyclohexylamino)-2-methyl- 1,3-disilapropane 0 1,3-bis(N-ethyl-N- cyclopentylamino)-2-methyl- 1,3-disilapropane 1,3-bis(N-n-propyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-sec-butyl-N-n- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-cyclohexyl-N-n- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-cyclopentyl-N-n- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N,N-di-iso- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-sec-butyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-cyclohexyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-cyclopentyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N,N-di-sec- butylamino)-2-methyl-1,3- disilapropane 0 1,3-bis(N-sec-butyl-N- cyclohexylamino)-2-methyl- 1,3-disilapropane 1,3-bis(N-sec-butyl-N- cyclopentylamino)-2-methyl- 1,3-disilapropane 1,3-bis(N-tert-butyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-sec-butyl-N-tert- butylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-tert-butyl-N- cyclohexylamino)-2-methyl- 1,3-disilapropane 1,3-bis(N-tert-butyl-N- cyclopentylamino)-2-methyl- 1,3-disilapropane 1,3-bis(N,N-dicyclohexylamino)- 2-methyl-1,3-disilapropane 1,3-bis(N-cyclohexyl-N- cyclopentylamino)-2-methyl- 1,3-disilapropane 1,3-bis(N-phenyl-N-iso- propylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-sec-butyl-N- phenylamino)-2-methyl-1,3- disilapropane 0 1,3-bis(N-cyclohexyl-N- phenylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-cyclopentyl-N- phenylamino)-2-methyl-1,3- disilapropane 1,3-bis(N-ethyl-N- phenylamino)-2-methyl-1,3- disilapropane 1,3-bis(N,N-dimethylamino)-2- methyl-1,3-disilapropane 1,3-bis(N,N-diethylamino)-2- methyl-1,3-disilapropane 1,3-bis(N,N-di-n-propylamino)- 2-methyl-1,3-disilapropane

(44) TABLE-US-00011 TABLE 11 Exemplary Organoaminocarbosilane (more specifically organoamino-silacyclopentane) Compounds 1-(N-methyl-N-iso- propylamino)-silacyclopentane 1-(N-sec-butyl-N- methylamino)- silacyclopentane 1-(N-cyclohexyl-N- methylamino)-silacyclopentane 1-(N-methyl-N- cyclopentylamino)- silacyclopentane 0 1-(N-ethyl-N-iso-propylamino)- silacyclopentane 1-(N-sec-butyl-N- ethylamino)- silacyclopentane 1-(N-ethyl-N-cyclohexylamino)- silacyclopentane 1-(N-ethyl-N-cyclopentylamino)- silacyclopentane 1-(N-n-propyl-N-iso- propylamino)-silacyclopentane 1-(N-sec-butyl-N-n- propylamino)- silacyclopentane 1-(N-cyclohexyl-N-n- propylamino)-silacyclopentane 1-(N-cyclopentyl-N-n- propylamino)-silacyclopentane 1-(N,N-di-iso-propylamino)- silacyclopentane 1-(N-sec-butyl-N-iso- propylamino)- silacyclopentane 0 1-(N-cyclohexyl-N-iso- propylamino)-silacyclopentane 1-(N-cyclopentyl-N-iso- propylamino)-silacyclopentane 1-(N,N-di-sec-butylamino)- silacyclopentane 1-(N-sec-butyl-N- cyclohexylamino)- silacyclopentane 1-(N-sec-butyl-N- cyclopentylamino)- silacyclopentane 1-(N-tert-butyl-N-iso- propylamino)-silacyclopentane 1-(N-sec-butyl-N-tert- butylamino)-silacyclopentane 1-(N-tert-butyl-N- cyclohexylamino)- silacyclopentane 1-(N-tert-butyl-N- cyclopentylamino)- silacyclopentane 1-(N,N-dicyclohexylamino)- silacyclopentane 0 1-(N-cyclohexyl-N- cyclopentylamino)- silacyclopentane 1-(N-phenyl-N-iso- propylamino)- silacyclopentane 1-(N-sec-butyl-N- phenylamino)-silacyclopentane 1-(N-cyclohexyl-N- phenylamino)-silacyclopentane 1-(N-cyclopentyl-N- phenylamino)-silacyclopentane 1-(N-ethyl-N-phenylamino)- silacyclopentane 1-(N,N-dimethylamino)- silacyclopentane 1-(N,N-diethylamino)- silacyclopentane 1-(N,N-di-n-propylamino)- silacyclopentane

(45) TABLE-US-00012 TABLE 12 Exemplary Organoaminocarbosilane (more specifically organoamino-methylsilacyclopentane) Compounds 1-(N-methyl-N-iso- propylamino)-1-methyl- silacyclopentane 0 1-(N-sec-butyl-N- methylamino)-1-methyl- silacyclopentane 1-(N-cyclohexyl-N- methylamino)-1-methyl- silacyclopentane 1-(N-methyl-N- cyclopentylamino)-1-methyl- silacyclopentane 1-(N-ethyl-N-iso-propylamino)- 1-methyl-silacyclopentane 1-(N-sec-butyl-N- ethylamino)-1-methyl- silacyclopentane 1-(N-ethyl-N-cyclohexylamino)- 1-methyl-silacyclopentane 1-(N-ethyl-N-cyclopentylamino)- 1-methyl-silacyclopentane 1-(N-n-propyl-N-iso- propylamino)-1-methyl- silacyclopentane 1-(N-sec-butyl-N-n- propylamino)-1-methyl- silacyclopentane 1-(N-cyclohexyl-N-n- propylamino)-1-methyl- silacyclopentane 0 1-(N-cyclopentyl-N-n- propylamino)-1-methyl- silacyclopentane 1-(N,N-di-iso-propylamino)-1- methyl-silacyclopentane 1-(N-sec-butyl-N-iso- propylamino)-1-methyl- silacyclopentane 1-(N-cyclohexyl-N-iso- propylamino)-1-methyl- silacyclopentane 1-(N-cyclopentyl-N-iso- propylamino)-1-methyl- silacyclopentane 1-(N,N-di-sec-butylamino)-1- methyl-silacyclopentane 1-(N-sec-butyl-N- cyclohexylamino)-1-methyl- silacyclopentane 1-(N-sec-butyl-N- cyclopentylamino)-1-methyl- silacyclopentane 1-(N-tert-butyl-N-iso- propylamino)-1-methyl- silacyclopentane 1-(N-sec-butyl-N-tert-- butylamino)-1-methyl- silacyclopentane 0 1-(N-tert-butyl-N- cyclohexylamino)-1-methyl- silacyclopentane 1-(N-tert-butyl-N- cyclopentylamino)-1-methyl- silacyclopentane 1-(N,N-dicyclohexylamino)-1- methyl-silacyclopentane 1-(N-cyclohexyl-N- cyclopentylamino)-1-methyl- silacyclopentane 1-(N-phenyl-N-iso- propylamino)-1-methyl- silacyclopentane 1-(N-sec-butyl-N- phenylamino)-1-methyl- silacyclopentane 1-(N-cyclohexyl-N- phenylamino)-1-methyl- silacyclopentane 1-(N-cyclopentyl-N- phenylamino)-1-methyl- silacyclopentane 1-(N-ethyl-N-phenylamino)- 1-methyl-silacyclopentane 1-(N,N-dimethylamino)-1- methyl-silacyclopentane 00 1-(N,N-dimethylamino)-1- methyl-silacyclopentane 01 1-(N,N-di-n-propylamino)-1- methyl-silacyclopentane

(46) TABLE-US-00013 TABLE 13 Exemplary Organoaminocarbosilane (more specifically organoamino-silacyclobutane having cyclic four-membered ring) Compounds 02 1-(N-methyl-N-iso- propylamino)-silacyclobutane 03 1-(N-sec-butyl-N- methylamino)- silacyclobutane 04 1-(N-cyclohexyl-N- methylamino)-silacyclobutane 05 1-(N-methyl-N- cyclopentylamino)- silacyclobutane 06 1-(N-ethyl-N-iso-propylamino)- silacyclobutane 07 1-(N-sec-butyl-N- ethylamino)-silacyclobutane 08 1-(N-ethyl-N-cyclohexylamino)- silacyclobutane 09 1-(N-ethyl-N-cyclopentylamino)- silacyclobutane 0 1-(N-n-propyl-N-iso- propylamino)-silacyclobutane 1-(N-sec-butyl-N-n- propylamino)- silacyclobutane 1-(N-cyclohexyl-N-n- propylamino)-silacyclobutane 1-(N-cyclopentyl-N-n- propylamino)-silacyclobutane 1-(N,N-di-iso-propylamino)- silacyclobutane 1-(N-sec-butyl-N-iso- propylamino)- silacyclobutane 1-(N-cyclohexyl-N-iso- propylamino)-silacyclobutane 1-(N-cyclopentyl-N-iso- propylamino)-silacyclobutane 1-(N,N-di-sec-butylamino)- silacyclobutane 1-(N-sec-butyl-N- cyclohexylamino)- silacyclobutane 0 1-(N-sec-butyl-N- cyclopentylamino)- silacyclobutane 1-(N-tert-butyl-N-iso- propylamino)-silacyclobutane 1-(N-sec-butyl-N-tert- butylamino)-silacyclobutane 1-(N-tert-butyl-N- cyclohexylamino)- silacyclobutane 1-(N-tert-butyl-N- cyclopentylamino)- silacyclobutane 1-(N,N-dicyclohexylamino)- silacyclobutane 1-(N cyclohexyl-N- cyclopentylamino)- silacyclobutane 1-(N-phenyl-N-iso- propylamino)- silacyclobutane 1-(N-sec-butyl-N- phenylamino)-silacyclobutane 1-(N-cyclohexyl-N- phenylamino)-silacyclobutane 0 1-(N-cyclopentyl-N- phenylamino)-silacyclobutane 1-(N-ethyl-N-phenylamino)- silacyclobutane 1-(N,N-dimethylamino)- silacyclobutane 1-(N,N-diethylamino)- silacyclobutane 1-(N,N-di-n-propylamino)- silacyclobutane

(47) TABLE-US-00014 TABLE 14 Exemplary Organoaminocarbosilane (more specifically organoamino-1,3-disilacyclobutane having cyclic four-membered ring) Compounds 1-(N-methyl-N-iso- propylamino)-1,3- disilacyclobutane 1-(N-sec-butyl-N- methylamino)-1,3- disilacyclobutane 1-(N-cyclohexyl-N- methylamino)-1,3- disilacyclobutane 1-(N-methyl-N- cyclopentylamino)-1,3- disilacyclobutane 1-(N-ethyl-N-iso-propylamino)- 1,3-disilacyclobutane 0 1-(N-sec-butyl-N- ethylamino)-1,3- disilacyclobutane 1-(N-ethyl-N-cyclohexylamino)- 1,3-disilacyclobutane 1-(N-ethyl-N-cyclopentylamino)- 1,3-disilacyclobutane 1-(N-n-propyl-N-iso- propylamino)-1,3- disilacyclobutane 1-(N-sec-butyl-N-n- propylamino)-1,3- disilacyclobutane 1-(N-cyclohexyl-N-n- propylamino)-1,3- disilacyclobutane 1-(N-cyclopentyl-N-n- propylamino)-1,3- disilacyclobutane 1-(N,N-di-iso-propylamino)- 1,3-disilacyclobutane 1-(N-sec-butyl-N-iso- propylamino)-1,3- disilacyclobutane 1-(N-cyclohexyl-N-iso- propylamino)-1,3- disilacyclobutane 0 1-(N-cyclopentyl-N-iso- propylamino)-1,3- disilacyclobutane 1-(N,N-di-sec-butylamino)-1,3- disilacyclobutane 1-(N-sec-butyl-N- cyclohexylamino)-1,3- disilacyclobutane 1-(N-sec-butyl-N- cyclopentylamino)-1,3- disilacyclobutane 1-(N-tert-butyl-N-iso- propylamino)-1,3- disilacyclobutane 1-(N-sec-butyl-N-tert- butylamino)-1,3- disilacyclobutane 1-(N-tert-butyl-N- cyclohexylamino)-1,3- disilacyclobutane 1-(N-tert-butyl-N- cyclopentylamino)-1,3- disilacyclobutane 1-(N,N-dicyclohexylamino)-1,3- disilacyclobutane 1-(N-cyclohexyl-N- cyclopentylamino)-1,3- disilacyclobutane 0 1-(N-phenyl-N-iso- propylamino)-1,3- disilacyclobutane 1-(N-sec-butyl-N- phenylamino)-1,3- disilacyclobutane 1-(N-cyclohexyl-N- phenylamino)-1,3- disilacyclobutane 1-(N-cyclopentyl-N- phenylamino)-1,3- disilacyclobutane 1-(N-ethyl-N-phenylamino)- 1,3-disilacyclobutane 1-(N,N-dimethylamino)-1,3- disilacyclobutane 1-(N,N-diethylamino)-1,3- disilacyclobutane 1-(N,N-di-n-propylamino)-1,3- disilacyclobutane

(48) TABLE-US-00015 TABLE 15 Exemplary Organoaminocarbosilane (more specifically 1,3-bis(organoamino)-1,3-disilacyclobutane having cyclic four-membered ring) Compounds 1,3-bis(N-methyl-N-iso- propylamino)-1,3- disilacyclobutane 1,3-bis(N-sec-butyl-N- methylamino)-1,3- disilacyclobutane 0 1,3-bis(N-cyclohexyl-N- methylamino)-1,3- disilacyclobutane 1,3-bis(N-methyl-N- cyclopentylamino)-1,3- disilacyclobutane 1,3-bis(N-ethyl-N-iso- propylamino)-1,3- disilacyclobutane 1,3-bis(N-sec-butyl-N- ethylamino)-1,3- disilacyclobutane 1,3-bis(N-ethyl-N- cyclohexylamino)-1,3- disilacyclobutane 1,3-bis(N-ethyl-N- cyclopentylamino)-1,3- disilacyclobutane 1,3-bis(N-n-propyl-N-iso- propylamino)-1,3- disilacyclobutane 1,3-bis(N-sec-butyl-N-n- propylamino)-1,3- disilacyclobutane 1,3-bis(N-cyclohexyl-N-n- propylamino)-1,3- disilacyclobutane 1,3-bis(N-cyclopentyl-N-n- propylamino)-1,3- disilacyclobutane 0 1,3-bis(N,N-di-iso- propylamino)-1,3- disilacyclobutane 1,3-bis(N-sec-butyl-N-iso- propylamino)-1,3- disilacyclobutane 1,3-bis(N-cyclohexyl-N-iso- propylamino)-1,3- disilacyclobutane 1,3-bis(N-cyclopentyl-N-iso- propylamino)-1,3- disilacyclobutane 1,3-bis(N,N-di-sec- butylamino)-1,3- disilacyclobutane 1,3-bis(N-sec-butyl-N- cyclohexylamino)-1,3- disilacyclobutane 1,3-bis(N-sec-butyl-N- cyclopentylamino)-1,3- disilacyclobutane 1,3-bis(N-tert-butyl-N-iso- propylamino)-1,3- disilacyclobutane 1,3-bis(N-sec-butyl-N-tert- butylamino)-1,3- disilacyclobutane 1,3-bis(N-tert-butyl-N- cyclohexylamino)-1,3- disilacyclobutane 0 1,3-bis(N-tert-butyl-N- cyclopentylamino)-1,3- disilacyclobutane 1,3-bis(N,N-dicyclohexylamino)- 1,3-disilacyclobutane 1,3-bis(N-cyclohexyl-N- cyclopentylamino)-1,3- disilacyclobutane 1,3-bis(N-phenyl-N-iso- propylamino)-1,3- disilacyclobutane 1,3-bis(N-sec-butyl-N- phenylamino)-1,3- disilacyclobutane 1,3-bis(N-cyclohexyl-N- phenylamino)-1,3- disilacyclobutane 1,3-bis(N-cyclopentyl-N- phenylamino)-1,3- disilacyclobutane 1,3-bis(N-ethyl-N- phenylamino)-1,3- disilacyclobutane 1,3-bis(N,N-dimethylamino)- 1,3-disilacyclobutane 1,3-bis(N,N-diethylamino)-1,3- disilacyclobutane 00 1,3-bis(N,N-di-n-propylamino)- 1,3-disilacyclobutane

(49) TABLE-US-00016 TABLE 16 Exemplary Organoaminocarbosilane (more specifically organoamino-methylsilane) Compounds 01 N-methyl-N-iso-propylamino- methylsilane 02 N-sec-butyl-N-methylamino- methylsilane 03 N-cyclohexyl-N-methylamino- methylsilane 04 N-methyl-N-cyclopentylamino- methylsilane 05 N-ethyl-N-iso-propylamino- methylsilane 06 N-sec-butyl-N-ethylamino- methylsilane 07 N-ethyl-N-cyclohexylamino- methylsilane 08 N-ethyl-N-cyclopentylamino- methylsilane 09 N-n-propyl-N-iso-propylamino- methylsilane 0 N-sec-butyl-N-n- propylamino-methylsilane N-cyclohexyl-N-n-propylamino- methylsilane N-cyclopentyl-N-n-propylamino- methylsilane N,N-di-iso-propylamino- methylsilane N-sec-butyl-N-iso- propylamino-methylsilane N-cyclohexyl-N-iso- propylamino-methylsilane N-cyclopentyl-N-iso- propylamino-methylsilane N,N-di-sec-butylamino- methylsilane N-sec-butyl-N- cyclohexylamino- methylsilane N-sec-butyl-N- cyclopentylamino-methylsilane 0 N-tert-butyl-N-iso-propylamino- methylsilane N-sec-butyl-N-tert-butylamino- methylsilane N-tert-butyl-N- cyclohexylamino- methylsilane N-tert-butyl-N- cyclopentylamino-methylsilane N,N-dicyclohexylamino- methylsilane N-cyclohexyl-N- cyclopentylamino-methylsilane N-phenyl-N-iso-propylamino- methylsilane N-sec-butyl-N-phenylamino- methylsilane N-cyclohexyl-N-phenylamino- methylsilane N-cyclopentyl-N-phenylamino- methylsilane 0 N-ethyl-N-phenylamino- methylsilane N,N-dimethylamino- methylsilane N,N-diethylamino- methylsilane N,N-di-n-propylamino- methylsilane

(50) TABLE-US-00017 TABLE 17 Exemplary Organoaminocarbosilane (more specifically organoaminophenylsilane) Compounds N-methyl-N-iso-propylamino- phenylsilane N-sec-butyl-N-methylamino- phenylsilane N-cyclohexyl-N-methylamino- phenylsilane N-methyl-N-cyclopentylamino- phenylsilane N-ethyl-N-iso-propylamino- phenylsilane N-sec-butyl-N-ethylamino- phenylsilane 0 N-ethyl-N-cyclohexylamino- phenylsilane N-ethyl-N-cyclopentylamino- phenylsilane N-n-propyl-N-iso-propylamino- phenylsilane N-sec-butyl-N-n- propylamino-phenylsilane N-cyclohexyl-N-n-propylamino- phenylsilane N-cyclopentyl-N-n-propylamino- phenylsilane N,N-di-iso-propylamino- phenylsilane N-sec-butyl-N-iso- propylamino-phenylsilane N-cyclohexyl-N-iso- propylamino-phenylsilane N-cyclopentyl-N-iso- propylamino-phenylsilane 0 N,N-di-sec-butylamino- phenylsilane N-sec-butyl-N- cyclohexylamino- phenylsilane N-sec-butyl-N- cyclopentylamino-phenylsilane N-tert-butyl-N-iso-propylamino- phenylsilane N-sec-butyl-N-tert-butylamino- phenylsilane N-tert-butyl-N- cyclohexylamino- phenylsilane N-tert-butyl-N- cyclopentylamino-phenylsilane N,N-dicyclohexylamino- phenylsilane N-cyclohexyl-N- cyclopentylamino-phenylsilane N-phenyl-N-iso-propylamino- phenylsilane 0 N-sec-butyl-N-phenylamino- phenylsilane N-cyclohexyl-N-phenylamino- phenylsilane N-cyclopentyl-N-phenylamino- phenylsilane N-ethyl-N-phenylamino- phenylsilane N,N-dimethylamino- phenylsilane N,N-diethylamino-phenylsilane N,N-di-n-propylamino- phenylsilane

(51) In another embodiment of the method described herein, the compound selected from orgnoaminosilane, organoaminodisilane, or organoaminocarbosilane is reacted with a proton source to provide an organoamine. In this embodiment, the step, of reacting the compound with a proton source, could be performed prior to or after the purification of the compound. The reagents could be combined neat or, alternatively in the presence of a solvent (e.g., at least one of the proton source or the compound is dissolved in solvent). An excess of proton source can be used to drive the reaction to completion, aid in the purification process, or both. Alternatively, a slight deficiency of the proton source can be used to eliminate the need of separating unreacted proton source from the organoamine product. In one particular embodiment, the proton source is delivered as a vapor into the reaction solution comprising the organoaminosilane. The protonation step (e.g., reaction of the proton source with the compound) could be performed in the temperature range between 50 C. to 150 C. for the addition of reagents and/or for the extent of the reaction. In some embodiments, the protonation step may be carried out at lower temperature (below 0 C.) in order to help remove heat and prevent side reactions. In other embodiments, higher temperatures (above 30 C.) may be preferred to drive the intended protonation reaction to completion. Reaction times could range from 5 minutes to 30 minutes, to 1 h, to 6 h, to 12 h, to 24 hr or more. The protonation reaction mixture may likely yield more than one phase (liquid-liquid or liquid-solid) which can be separated by filtration, decantation, separator funnel, distillation, adsorption, centrifugation, or other means. Purification of the end organoamine product may be accomplished by distillation, column chromatography, gas chromatography, sublimation, crystallization, or other purification processes.

(52) The following examples illustrate the method described herein for preparing compounds such as, without limitation organoaminosilanes, organoaminodisilanes, organoaminocarbosilanes, and is not intended to limit it in any way.

EXAMPLES

(53) For the following examples, gas chromatography (GC-TCD), mass spectrometry (GC-MS), and .sup.1H NMR spectroscopy were used to identify and quantify the solution compositions as appropriate. Gas chromatographic analyses were carried out on the product effluent using a TCD equipped HP-5890 Series II GC and a 0.53 mm diameter30 m Supleco column containing 3 m thick SPB-5 media. Chloride analyses were performed by hydrolyzing the sample with water at 85 C. and injecting the liquid phase into a Metrohm Ion Chromatography instrument equipped with a conductivity detector.

Example 1

Synthesis of N,N-di-iso-propylaminosilane (cf. Table 2)

(54) The catalyst Ru.sub.3(CO).sub.12 (0.10 g, 0.16 mmol) was dissolved in the imine N-iso-propylidene-iso-propylamine (7.0 g, 71 mmol) and the resulting solution was exposed to a silica source SiH.sub.4 gas at 82 psia for 6 hours at 40 C. The resulting reaction solution was determined by GC-MS to contain N,N-di-iso-propylaminosilane. GC-MS showed the following peaks: 131 (M+), 126 (M15), 116, 110, 98, 88, 74.

Example 2

Synthesis of N,N-di-iso-propylaminodisilane (cf. Table 3)

(55) The catalyst Ru.sub.3(CO)12 (0.10 g, 0.16 mmol) was dissolved in the imine N-iso-propylidene-sec-butylamine (7.0 g, 71 mmol) and the resulting solution was exposed to a disilane Si.sub.2H.sub.6 gas at 102 psia for 6 hours at 40 C. The reaction solution was determined by GC-MS to contain N,N-di-iso-propylaminodisilane. GC-MS showed the following peaks: 161 (M+), 146 (M15), 128, 114, 104, 88, 72.

Example 3

Synthesis of 1-(N,N-di-iso-propylamino)-1,4-disilabutane (cf. Table 5)

(56) A mixture of a silica source 1,4-disilabutane (0.48 g, 5.3 mmol) and the imine N-iso-propylidene-iso-propylamine (0.25 g, 2.5 mmol) was added to a stirred suspension of the catalyst, anhydrous NiCl.sub.2 (0.02 g, 0.15 mmol) in tetrahyrdofuran (THF) (1 mL), in a nitrogen-filled glovebox. After 2 days of stirring at room temperature, the resulting brown mixture was filtered to remove catalyst sediments and was determined by GC and GC-MS to contain the end product 1-(N,N-di-iso-propylamino)-1,4-disilabutane. GC-MS showed the following peaks: 189 (M+), 188 (M1), 174 (M15), 159, 144, 130, 102.

Example 4

Synthesis of 1-(N,N-di-sec-butylamino)-1,4-disilabutane (cf. Table 5)

(57) A mixture of a silica source 1,4-disilabutane (0.50 g, 5.54 mmol) and the imine N-sec-butylidene-sec-butylamine (0.35 g, 2.75 mmol) was added to a stirred solution of the catalyst (Ph.sub.3P).sub.3RhCl (0.02 g, 0.02 mmol) in THF (0.5 mL). After 1 day of stirring, the imine was completely consumed, and the resulting orange solution was determined by GC and GC-MS to contain the end product 1-(N,N-di-sec-butylamino)-1,4-disilabutane. GC-MS showed the following peaks: 217 (M+), 202 (M15), 189, 172, 158, 144, 132, 114, 102.

Example 5

Synthesis of 1-(N-sec-butyl-N-iso-propylamino)-1,4-disilabutane (cf. Table 5)

(58) A mixture of a silica source 1,4-disilabutane (0.50 g, 5.54 mmol) and the imine N-sec-butylidene-iso-propylamine (0.32 g, 2.83 mmol) was added to a stirred solution of the catalyst (Ph.sub.3P).sub.3RhCl (0.02 g, 0.02 mmol) in THF (0.5 mL). After 1 day of stirring, the imine was completely consumed, and the resulting orange solution was determined by GC and GC-MS to contain the end product 1-(N-sec-butyl-N-iso-propylamino)-1,4-disilabutane. GC-MS showed the following peaks: 203 (M+), 188 (M15), 174, 158, 144, 130, 119, 102.

Example 6

Synthesis of 1-(N,N-di-iso-propylamino)-1-methyl-silacyclopentane (cf. Table 12)

(59) The solid catalyst Ca[N(SiMe.sub.3).sub.2].sub.2 (0.01 g, 0.03 mmol) was added to a mixture of a silica source 1-methyl-1-silacyclopentane (0.15 g, 1.5 mmol) and the imine N-iso-propylidene-iso-propylamine (0.15 g, 1.5 mmol). After 2 weeks, the pale yellow reaction solution was determined by GC and GC-MS to contain 1-(N,N-di-iso-propylamino)-1-methyl-1-silacyclopentane as the major product. GC-MS showed the following peaks: 199 (M+), 179, 164, 148, 134, 122, 107, 91, 81, 77.

Example 7

Synthesis of N,N-di-iso-propylamino-phenylsilane (cf. Table 17)

(60) A solution of the catalyst (Ph.sub.3P).sub.3RhCl (0.01 g, 0.01 mmol) in THF (1 mL) was added to a stirred solution of a silica source phenylsilane (0.30 g, 2.77 mmol) and the imine N-iso-propylidene-iso-propylamine (0.12 g, 1.21 mmol). After 1 day of stirring, the imine was almost completely consumed, and the resulting orange solution was determined by GC and GC-MS to contain N,N-di-iso-propylamino-phenylsilane as the major product. GC-MS showed the following corresponding peaks: 207 (M+), 192 (M15), 177, 164, 150, 134, 121, 107, 86, 72. Minor products observed include N,N-di-iso-propylaminosilane, bis(N,N-di-iso-propylamino)silane, and diphenylsilane.

Comparative Example 8

Synthesis of N,N-di-n-propylaminodiethylsilane using Chlorosilane

(61) Traditional method to make organoaminocarbosilane: Chlorodiethysilane (18.5 g, 151 mmol) was added dropwise to a stirred solution of di-n-propylamine (32.1 g, 317 mmol) in hexanes (250 mL) at 15 C. The resulting white slurry was allowed to warm to room temperature while stirring. The white solids were removed by filtration and the colorless filtrate was purified by vacuum distillation to obtain 22.2 g of N,N-di-n-propylaminodiethylsilane. GC-MS showed the following peaks: 187 (M+), 172 (M15), 158, 144, 130, 116, 100, 87, 72. This product was determined after hydrolysis to contain 537 ppm chloride.

Example 8

Synthesis of N,N-di-n-propylaminodiethylsilane

(62) Claimed method to make organoaminocarbosilane: A solution of the catalyst (Ph.sub.3P).sub.3RhCl (0.40 mL, 0.029 M, 0.012 mmol) in THF was added to a stirred solution of a silica source diethylsilane (14.6 g, 165 mmol) and the imine N-n-propylidene-n-propylamine (14.4 g, 145 mmol). After 3 days of stirring, the reaction solution was purified by vacuum distillation to obtain 21.4 g of N,N-di-n-propylaminodiethylsilane. This product was determined after hydrolysis to contain 22 ppm chloride, demonstrating the hydrosilylation route provides much less chloride contamination than the route employing chlorosilanes as starting material. Furthermore, the chloride (or other halide) content can be reduced to non-detectable if halide-free catalysts are being employed in the hydrosilylation.

Examples 9-21

Synthesis of Additional Organoaminosilane, Organoaminodisilane, or Organoaminocarbosilane Compounds.

(63) Additional organoaminosilanes, organoaminodisilanes, and organoaminocarbosilanes were made via similar fashion as Examples 1 to 8 and were characterized by GC-MS. The molecular weight (MW), the structure, and corresponding major MS fragmentation peaks of each compound are provided in Table 18 to confirm their identification.

(64) TABLE-US-00018 TABLE 18 Organoaminosilane, organoaminodisilane, or organoaminocarbosilane compounds synthesized via hydrosilylation of imines. Ex. Precursor Name MW Structure MS Peaks 9 N-sec-butyl-N-iso- propylaminosilane (cf. Table 2) 145.32 145, 130, 116, 100, 88, 74 10 N,N-di-sec-butylaminosilane (cf. Table 2) 159.35 159, 144, 130, 114, 100, 88, 74, 11 N-sec-butyl-N-iso- propylaminodisilane (cf. Table 3) 175.42 175, 160, 146, 128, 114, 104, 86,72 12 N,N-di-sec-butylaminosilane (cf. Table 3) 189.45 0 189, 174, 160, 142, 128, 118, 104, 86, 72 13 1,2-bis(N,N-di-iso- propylamino)disilane (cf. Table 4) 260.57 260, 245, 229, 215, 187, 173, 158, 144,128, 116, 100,86 14 1,2-bis(N-sec-butyl-N-iso- propylamino)disilane (cf. Table 4) 288.63 288, 273, 259, 172, 158, 144, 130, 116, 100, 15 1-(N-n-propyl-N-iso- propylamino)-1,4-disilabutane (cf. Table 5) 189.45 189, 174, 160, 144, 130, 116, 102, 86 16 1,4-bis(N-n-propyl-N-iso- propylamino)-1,4-disilabutane (cf. Table 6) 288.63 288, 274, 260, 244, 230, 216, 201, 188, 173, 160, 144, 128 17 1,4-bis(N,N-di-iso-propylamino)- 1,4-disilabutane (cf. Table 6) 288.63 288, 287, 243, 229, 207, 188, 144, 130 18 1,4-bis(N-sec-butyl-N-iso- propylamino)-1,4-disilabutane (cf. Table 6) 316.68 316, 301, 281, 257, 243, 229, 215, 202, 186, 172, 158 19 1-(N,N-di-iso-propylamino)- silacyclopentane (cf. Table 11) 185.39 185, 170, 154, 142, 128, 112, 99,85, 70 20 1-(N,N-di-iso-propylamino)-1,3- disilacyclobutane (cf. Table 14) 187.43 187, 172, 159, 143, 130, 115, 101, 86, 73 21 1,3-bis(N,N-di-iso-propylamino)- 1,3-disilacyclobutane (cf. Table 15) 286.61 286, 271, 243, 229, 213, 186, 172, 144, 128, 101, 87, 70