Magnetic recording medium and magnetic recording and reproducing apparatus
10283155 ยท 2019-05-07
Assignee
Inventors
Cpc classification
International classification
Abstract
A magnetic recording medium includes a non-magnetic substrate on which at least a soft magnetic underlayer, an orientation control layer, a perpendicular magnetic layer, and a protective layer are disposed. The perpendicular magnetic layer includes first to fourth magnetic layers. A first exchange coupling control layer is disposed between the first magnetic layer and the second magnetic layer. A second exchange coupling control layer is disposed between the second magnetic layer and the third magnetic layer. Following relations are satisfied where Ku.sub.i is a magnetic anisotropic constant of an i-th magnetic layer, Ms.sub.i is a saturation magnetization of the i-th magnetic layer, and t.sub.i is a film thickness of the i-th magnetic layer, Ku.sub.1>Ku.sub.2, Ku.sub.2>Ku.sub.3, Ms.sub.1?t.sub.1>Ms.sub.2?t.sub.2, Ms.sub.2?t.sub.2>Ms.sub.3?t.sub.3, Ku.sub.3<Ku.sub.4, and Ms.sub.3?t.sub.3<Ms.sub.4?t.sub.4.
Claims
1. A magnetic recording medium comprising: a non-magnetic substrate on which at least a soft magnetic underlayer, an orientation control layer that controls an orientation of a layer that is located directly on the orientation control layer, a perpendicular magnetic layer having a magnetization easy axis that is mainly oriented perpendicular to the non-magnetic substrate, and a protective layer are disposed, wherein the perpendicular magnetic layer includes a first magnetic layer, a second magnetic layer, a third magnetic layer, and a fourth magnetic layer from a side of the substrate in this order, wherein the first magnetic layer, the second magnetic layer, the third magnetic layer, and the fourth magnetic layer are magnetic layers having a granular structure, wherein magnetic particles, which constitute the first magnetic layer, the second magnetic layer, the third magnetic layer, and the fourth magnetic layer, are continuous columnar crystals, wherein a first exchange coupling control layer is disposed between the first magnetic layer and the second magnetic layer, wherein a second exchange coupling control layer is disposed between the second magnetic layer and the third magnetic layer, wherein the third magnetic layer and the fourth magnetic layer are in contact with each other, wherein the first magnetic layer, the second magnetic layer, the third magnetic layer, and the fourth magnetic layer are coupled ferromagnetically, and wherein following relations are satisfied where Ku.sub.i is a magnetic anisotropic constant of an i-th magnetic layer, Ms.sub.i is a saturation magnetization of the i-th magnetic layer, and t.sub.i is a film thickness of the i-th magnetic layer,
Ku.sub.1>Ku.sub.2,
Ku.sub.2>Ku.sub.3,
Ms.sub.1?t.sub.1>Ms.sub.2?t.sub.2,
Ms.sub.2?t.sub.2>Ms.sub.3?t.sub.3,
Ku.sub.3<Ku.sub.4, and
Ms.sub.3?t.sub.3<Ms.sub.4?t.sub.4.
2. The magnetic recording medium according to claim 1, wherein Ms.sub.1 is in a range of from 1200 to 500 emu/cc, wherein Ku.sub.1 is in a range of from 12?10.sup.6 to 5?10.sup.6 erg/cc, wherein Ms.sub.2 is in a range of from 1100 to 400 emu/cc, wherein Ku.sub.2 is in a range of from 11 ?10.sup.6 to 4 ?10.sup.6 erg/cc, wherein Ms.sub.3 is in a range of from 1000 to 300 emu/cc, wherein Ku.sub.3 is greater than or equal to 4?10.sup.6 and less than 9 ?10.sup.6 erg/cc, wherein Ms.sub.4 is in a range of from 900 to 200 emu/cc, wherein Ku.sub.4 is greater than 4 ?10.sup.6 and less than or equal to 9 ?10.sup.6 erg/cc, and wherein t.sub.1, t.sub.2, t.sub.3, and t.sub.4 are in a range of from 1 to 10 nm.
3. The magnetic recording medium according to claim 1, further comprising: a fifth magnetic layer between the fourth magnetic layer and the protective layer, wherein the fifth magnetic layer is a magnetic layer having a non-granular structure, wherein magnetic particles, which constitute the first magnetic layer, the second magnetic layer, the third magnetic layer, the fourth magnetic layer, and the fifth magnetic layer, are continuous columnar crystals, wherein the fourth magnetic layer and the fifth magnetic layer are in contact with each other, wherein the first magnetic layer, the second magnetic layer, the third magnetic layer, the fourth magnetic layer, and the fifth magnetic layer are coupled ferromagnetically, and wherein following relations are satisfied where Ku.sub.5 is a magnetic anisotropic constant of the fifth magnetic layer, Ms.sub.5 is a saturation magnetization of the fifth magnetic layer, and t.sub.5 is a film thickness of the fifth magnetic layer,
Ku.sub.4>Ku.sub.5, and
Ms.sub.4?t.sub.4>Ms.sub.5?t.sub.5.
4. The magnetic recording medium according to claim 3, wherein following relations are satisfied,
Ku.sub.3>Ku.sub.5, and
Ms.sub.3?t.sub.3<Ms.sub.5?t.sub.5.
5. The magnetic recording medium according to claim 3, wherein Ms.sub.5 is in a range of from 950 to 250 emu/cc, wherein Ku.sub.5 is in a range of from 8 ?10.sup.6 to 1 ?10.sup.6 erg/cc, and wherein t.sub.5 is in a range of from 1 to 10 nm.
6. A magnetic recording and reproducing apparatus comprising: the magnetic recording medium according to claim 1; and a magnetic head configured to record and reproduce information in and from the magnetic recording medium.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1)
(2)
(3)
(4)
(5)
DESCRIPTION OF THE PREFERRED EMBODIMENTS
(6) In the following, embodiments of the present disclosure will be described with reference to the accompanying drawings. An object of the embodiment is to provide a magnetic recording medium having high thermal fluctuation characteristics and a high write-ability (easiness of recording) even when the number of magnetic recording layers increases.
(7) The present inventors have made earnest studies to solve the above problems. As a result, the present inventors have accomplished a magnetic recording medium that can realize high thermal fluctuation characteristics and a high write-ability (easiness of recording). Here, an embodiment of the present invention relates to a magnetic recording medium, in which at least an orientation control layer that controls an orientation of a layer that is located directly on the orientation control layer, a perpendicular magnetic layer having a magnetization easy axis that is mainly oriented perpendicular to a non-magnetic substrate, and a protective layer are disposed on the non-magnetic substrate, and relates to a magnetic recording and reproducing apparatus that records and reproduces information in and from the magnetic recording medium.
(8) In the following, a magnetic recording medium and a magnetic recording medium and reproducing apparatus according to the embodiment of the present invention will be described in detail.
(9)
(10) A metal substrate made of a metal material such as aluminum, an aluminum alloy, or the like may be used as the non-magnetic substrate 1. A non-metallic substrate made of a non-metallic material such as glass, ceramics, silicon, silicon carbide, carbon, or the like may be used as the non-magnetic substrate 1.
(11) Further, a metal substrate or a non-metal substrate having a NiP layer or a NiP alloy layer formed on a surface of the above metal substrate or the above non-metal substrate by using a plating method or a sputtering method may be used as the non-magnetic substrate 1.
(12) It is preferable to provide an adhesion layer between the non-magnetic substrate 1 and the soft magnetic underlayer 2. When the non-magnetic substrate 1 contacts the soft magnetic underfilm mainly composed of Co or Fe, corrosion is liable to advance due to an adsorption gas on the surface of the non-magnetic substrate 1, an influence of moisture, diffusion of a substrate component or the like. By providing the adhesion layer between the non-magnetic substrate 1 and the soft magnetic underlayer 2, the corrosion can be prevented (controlled). For example, Cr, a Cr alloy, Ti, a Ti alloy, or the like can be appropriately selected as a material of the adhesion layer. It is preferable that the thickness of the adhesion layer is equal to or thicker than 30 ?.
(13) The soft magnetic underlayer 2 is provided to increase a component of magnetic flux, generated from the magnetic head, perpendicular to the substrate, and also to more firmly fix a direction of magnetization of the perpendicular magnetic layer 4, in which information is recorded, in the direction perpendicular to the non-magnetic substrate 1. This action is preferable because it becomes more noticeable when a single magnetic pole head for the perpendicular recording is used as a magnetic head for recording and reproduction.
(14) The soft magnetic underlayer 2 is made of a soft magnetic material. For example, a soft magnetic material including Fe, Ni, and Co may be used as the soft magnetic underlayer 2.
(15) For example, a CoFe based alloy (CoFeTaZr, CoFeZrNb or the like), a FeCo based alloy (FeCo, FeCoV or the like), a FeNi based alloy (FeNi, FeNiMo, FeNiCr, FeNiCr, FeNiSi or the like), a FeAl based alloy (FeAl, FeAlSi, FeAlSiCr, FeAlSiTiRu, FeAlO or the like), a FeCr based alloy (FeCr, FeCrTi, FeCrCu or the like) a FeTa based alloy (FeTa, FeTaC, FeTaN or the like), a FeMg based alloy (FeMgO or the like), a FeZr based alloy (FeZrN or the like), a FeC based alloy, a FeN based alloy, a FeSi based alloy, a FeP based alloy, a FeNb based alloy, a FeHf based alloy, a FeB based alloy, or the like may be used as this material.
(16) It is preferable that a coercive force Hc of the soft magnetic underlayer 2 is made to be 100 (Oe) or lower (more preferably 20 (Oe) or lower). Here, 1 Oe is equal to 79 A/m.
(17) It is undesirable that the coercive force Hc of the soft magnetic underlayer 2 exceeds the above range. This is because if the coercive force Hc exceeds the above range, soft magnetic characteristics become insufficient and a reproduced waveform changes from a so-called rectangle wave into a waveform having a distortion.
(18) It is preferable that a saturation magnetic flux density Bs of the soft magnetic underlayer 2 is made to be 0.6 T or higher (more preferably 1 T or higher). It is undesirable that that the saturation magnetic flux density Bs of the soft magnetic underlayer 2 is lower than the above range. This is because if the saturation magnetic flux density Bs is lower than the above range, the reproduced waveform changes from a so-called rectangle wave into a waveform having a distortion.
(19) Further, it is preferable that the product Bs.Math.t (T.Math.nm) of the saturation magnetic flux density Bs (T) of the soft magnetic underlayer 2 and a film thickness t (nm) of the soft magnetic underlayer 2 is 15 (T.Math.nm) or higher (more preferably, 25 (T.Math.nm) or higher). It is undesirable that the product Bs.Math.t is less than the above range. This is because the reproduced waveform has a distortion and OW (Overwrite) characteristics (recording characteristics) get worse if the product Bs.Math.t is less than the above range.
(20) It is preferable that the soft magnetic underlayer 2 is constituted of two-layered soft magnetic films, and Ru is provided between the two-layered soft magnetic films. By adjusting the film thickness of Ru in a predetermined range of 0.4 nm to 1.0 nm, or 1.6 nm to 2.6 nm, the two-layered soft magnetic films become an AFC (AntiFerromagnetic Coupling) structure. When the soft magnetic underlayer 2 has the AFC structure, so-called spike noise can be prevented.
(21) The orientation control layer 3, formed on the soft magnetic underlayer 2, can improve recording and reproducing characteristics by micronizing crystal particles of the perpendicular magnetic layer 4. As the material of this orientation control layer 3, materials having an hcp structure, a fcc structure, or an amorphous structure are preferable, though no particular limitation is imposed on the material. In particular, a Ru based alloy, a Ni based alloy, a Co based alloy, a Pt based alloy, or a Cu based alloy is preferable. Also, these alloys may be multilayered. For example, it is preferable to adopt a multilayer structure having a Ni based alloy and a Ru based alloy in this order from the substrate side, a multilayer structure having a Co based alloy and a Ru based alloy, or a multilayer structure having a Pt based alloy and a Ru based alloy.
(22) Thus, in the magnetic recording medium according to the embodiment, it is preferable that the thickness of the orientation control layer 3 is made to be in a range of from 5 nm to 40 nm, and more preferably in a range of from 8 nm to 30 nm. In a case where the orientation control layer 3 has a plurality of layers, it is preferable that a total thickness of the layers is made to be in the range of from 5 nm to 40 nm, and more preferably in the range of from 8 nm to 30 nm. When the thickness of the orientation control layer 3 is in the range of 5 nm to 40 nm (8 nm to 30 nm preferably), a perpendicular orientation property of the perpendicular magnetic layer 4 becomes particularly higher and it becomes possible to reduce a distance between the magnetic head and the soft magnetic underlayer 2 during recording. Accordingly, it becomes possible to increase the recording and reproducing characteristics without decreasing the resolution of a reproducing signal.
(23) The magnetic recording medium according to the embodiment has the following features. The perpendicular magnetic layer 4 includes the first magnetic layer 4a, the second magnetic layer 4b, the third magnetic layer 4c, and the fourth magnetic layer 4d from the non-magnetic substrate 1 side. The first to fourth magnetic layers 4a to 4d are magnetic layers having a granular structure. Magnetic particles, which constitute the first to fourth magnetic layers 4a to 4d, are continuous columnar crystals. The perpendicular magnetic layer 4 includes the exchange coupling control layer 7a between the first magnetic layer 4a and the second magnetic layer 4b. The perpendicular magnetic layer 4 includes the exchange coupling control layer 7b between the second magnetic layer 4b and the third magnetic layer 4c. The third magnetic layer 4c and the fourth magnetic layer 4d are in contact with each other. The first to fourth magnetic layers 4a to 4d are coupled ferromagnetically. The following relations are satisfied where Ku.sub.i is a magnetic anisotropic constant of an i-th magnetic layer, Ms.sub.i is a saturation magnetization of the i-th magnetic layer, and t.sub.1 is a film thickness of the i-th magnetic layer,
Ku.sub.1>Ku.sub.2,
Ku.sub.2>Ku.sub.3,
Ms.sub.1?t.sub.1>Ms.sub.2?t.sub.2,
Ms.sub.2?t.sub.2>Ms.sub.3?t.sub.3,
Ku.sub.3<Ku.sub.4, and
Ms.sub.3?t.sub.3<Ms.sub.4?t.sub.4.
(24) In the related art, a perpendicular magnetic layer is structured with a plurality of magnetic layers, and exchange coupling control layers are disposed between the respective magnetic layers to control coupling between the respective magnetic layers. Then, the perpendicular magnetic layer has a structure in which a magnetic anisotropic constant Ku and a product MS.Math.t of a saturation magnetization Ms and a film thickness t of each magnetic layer decrease gradually from the non-magnetic substrate side toward the protective layer side. On the other hand, according to the embodiment, although the perpendicular magnetic layer 4 has such a structure from the first magnetic layer 4a to the third magnetic layer 4c, the third magnetic layer 4c and the fourth magnetic layer 4d are joined (coupled) without disposing the exchange coupling control layer. Further, according to the embodiment, the perpendicular magnetic layer 4 has a structure in which Ku and the product MS.Math.t of the fourth magnetic layer 4d are increased relative to Ku and the product MS.Math.t of the third magnetic layer 4c. In this way, it becomes possible to solve the problem points caused by heavy use of the exchange coupling control layers and to provide the magnetic recording medium having excellent ATI/FTI resistance (tolerability). The present inventors think that this is because the magnetization reversal of the multi-layered perpendicular magnetic layer proceeds smoothly by performing, on the third magnetic layer 4c directly, the magnetization reversal of the fourth magnetic layer 4d by use of the magnetic head, to sequentially advance the magnetization reversal of the third magnetic layer 4c, the magnetization reversal of the second magnetic layer 4b, and the first magnetic layer 4a that are weakly coupled using the exchange coupling control layers.
(25) The perpendicular magnetic layer 4 according to the embodiment is described with reference to
(26) According to the embodiment, the first to fourth magnetic layers 4a to 4d, constituting the perpendicular magnetic layer 4, may be made of materials containing CoCrPt based magnetic particles and oxides 41, for example. Here, the oxide 41 is preferably an oxide of Cr, Si, Ta, Al, Ti, Mg Co, B or Ru. Also, a composite oxide obtained by combining two or more oxides may be used.
(27) It is preferable that the magnetic particles 42 are dispersed in the first to fourth magnetic layers 4a to 4d. It is preferable that the magnetic particles 42 form a columnar structure penetrating through the magnetic layers 4a, the second magnetic layer 4b, the third magnetic layer 4c, and further the magnetic layer 4d vertically as illustrated in
(28) In order to obtain such a structure, the amount of the oxides 41 to be contained and film foutiing conditions of the first to fourth magnetic layers 4a to 4d are important.
(29) The content of the oxides 41 is preferably 3 mol % or more and 18 mol % or less relative to the total mol obtained by calculating the alloy of Co, Cr, Pt and the like, constituting the magnetic particles 42, as one compound, for example. The content of the oxides 41 is more preferably 6 mol % or more and 13 mol % or less.
(30) The above range is preferable as the content of the oxides in the first magnetic layer 4a because the oxides precipitate around the magnetic particles to allow the magnetic particles 42 to be isolated and micronized when the layer is formed as illustrated in
(31) In the embodiment, although it is required that the magnetic anisotropic constant Ku of the first to fourth magnetic layers 4a to 4d, the saturation magnetization Ms of the first to fourth magnetic layers 4a to 4d, and the film thickness t of the first to fourth magnetic layers 4a to 4d are made to be in predetermined ranges, it is possible to form the magnetic layers with reference to materials illustrated in
(32) In the first magnetic layer 4a according to the embodiment, it is preferable that Ms.sub.1 is in a range of from 1200 to 500 emu/cc and Ku.sub.1 is in a range of from 12?10.sup.6 to 5?10.sup.6 erg/cc. In the second magnetic layer 4b according to the embodiment, it is preferable that Ms.sub.2 is in a range of from 1100 to 400 emu/cc and Ku.sub.t is in a range of from 11?10.sup.6 to 4?10.sup.6 erg/cc. In the third magnetic layer 4c according to the embodiment, it is preferable that Ms.sub.3 is in a range of from 1000 to 300 emu/cc and Ku.sub.3 is in a range of from 10?10.sup.6 to 4?10.sup.6 erg/cc. In the fourth magnetic layer 4d according to the embodiment, it is preferable that Ms.sub.4 is in a range of from 900 to 200 emu/cc and Ku.sub.4 is in a range of from 9?10.sup.6 to 2?10.sup.6 erg/cc. It is preferable that the film thickness t.sub.1 in the first magnetic layer 4a, the film thickness t.sub.2 in the second magnetic layer 4b, the film thickness t.sub.3 in the third magnetic layer 4c, and the film thickness t.sub.4 in the fourth magnetic layer 4d are in a range of from 1 nm to 10 nm.
(33) By making the magnetic anisotropic constants Ku, the saturation magnetizations Ms, and the film thicknesses t of the first to fourth magnetic layers 4a to 4d to be in the above ranges, it becomes possible to realize the magnetic recording medium, in which the perpendicular magnetic layer is multilayered, having higher thermal fluctuation characteristics and higher write-ability (easiness of recording). It is undesirable that the value of Ku or Ms is equal to or less than the above range because this results in easy occurrence of a magnetization reversal, giving rise to problems concerning a reduction in Hn and deterioration in thermal fluctuation characteristics. If the value of Ku or Ms exceeds the above range, it is difficult to easily undergo the magnetization reversal against the magnetic field of the head, and the write-ability (easiness of recording) decreases. Further, if the film thickness t is thinner than the above range, a sufficient reproduction output cannot be obtained and the thermal fluctuation characteristics decrease. Also, it is undesirable that the film thickness t exceeds the above range. This is because if the film thickness t exceeds the above range, the magnetic particles in the perpendicular magnetic layer enlarge, noise during recording and reproducing increases, and recording and reproducing characteristics degrade.
(34) As the materials suitable for the first to fourth magnetic layers 4a to 4d, for example, (CoCrPt)(SiO.sub.2), (CoCrPtNb)(Cr.sub.2O.sub.3), (CoCrPt)(Ta.sub.2O.sub.5), (CoCrPt)(Cr.sub.2O.sub.3)(TiO.sub.2), (CoCrPt)(Cr.sub.2O.sub.3)(SiO.sub.2) (CoCrPt)(Cr.sub.2O.sub.3)(SiO.sub.2)(TiO.sub.2), (CoCrPtMo)(TiO.sub.2), (CoCrPtW)(TiO.sub.2), (CoCrPtB)(Al.sub.2O.sub.3), (CoCrPtTaNd)(MgO), (CoCrPtBCu)(Y.sub.2O.sub.3), (CoCrPtRu)(SiO.sub.2), or the like may be used.
(35) According to the embodiment, the exchange coupling control layer 7a is disposed between the first magnetic layer 4a and the second magnetic layer 4b, and the exchange coupling control layer 7b is disposed between the second magnetic layer 4b and the third magnetic layer 4c. By providing the exchange coupling control layers 7a and 7b, the magnetization reversal of the first magnetic layer 4a, the second magnetic layer 4b, and the third magnetic layer 4c can be facilitated and the dispersion of the magnetization reversal of the entire magnetic particles can be reduced. As a result, it becomes possible to further improve the S/N ratio.
(36) It is preferable to use materials having a hcp structure for the exchange coupling control layers 7a and 7b. For example, it is preferable to use Ru, an Ru alloy, RuCo, a CoCr alloy or a CoCrX1 alloy (X1: one or two or more types selected from Pt, Ta, Zr, Re, Ru, Cu, Nb, Ni, Mn, Ge, Si, O, N, W, Mo, Ti, V, Zr and B).
(37) It is required that a thickness of each of the exchange coupling control layers 7a and 7b is in a range so as not to completely cut the ferromagnetic coupling of the first magnetic layer 4a, the second magnetic layer 4b, and the third magnetic layer 4c. When the ferromagnetic coupling of the perpendicular magnetic layer is cut, the M-H loop is changed to a loop reversing in two steps, and therefore, this can be easily discriminated. When this two-stage loop arises, this means that the magnetic grains are not simultaneously reversed with respect to the magnetic field from the head, resulting in a significant deterioration in S/N ratio during reproducing and a reduction in resolution. It is preferable that the thickness of each of the exchange coupling control layers 7a and 7b is made to be 0.1 nm or more and 2 nm or less, and more preferably, 0.1 nm or more and 0.8 nm or less.
(38) According to the embodiment, the fifth magnetic layer 4e is disposed between the fourth magnetic layer 4d and the protective layer 5. The fifth magnetic layer 4e is a magnetic layer having a non-granular structure. The magnetic particles, which constitute the first to fifth magnetic layers 4a to 4e, are continuous columnar crystals. The fourth magnetic layer 4d and the fifth magnetic layer 4e are in contact with each other. The first to fifth magnetic layers 4a to 4e are coupled ferromagnetically. The following relations are satisfied where Ku.sub.5 is a magnetic anisotropic constant of the fifth magnetic layer 4e, Ms.sub.5 is a saturation magnetization of the fifth magnetic layer 4e, and t.sub.5 is a film thickness of the fifth magnetic layer 4e,
Ku.sub.4>Ku.sub.5, and
Ms.sub.4?t.sub.4>Ms.sub.5?t.sub.5.
Disposing the fifth magnetic layer 4e having the above features is preferable in terms of producing the magnetic recording medium that can realize the high thermal fluctuation characteristics and the high write-ability (easiness of recording). Further, when relations Ku.sub.3>Ku.sub.5 and Ms.sub.3?t.sub.3<Ms.sub.5?t.sub.5 are satisfied, it becomes possible to produce the magnetic recording medium that can realize the higher thermal fluctuation characteristics and the higher write-ability (easiness of recording).
(39) The fifth magnetic layer 4e is made to be a non-granular structure that does not contain the oxide or the like. As illustrated in
(40) Because the magnetic particles 42 of the fifth magnetic layer 4e are grown from the magnetic particles 42 in the first magnetic layer 4a by the epitaxial growth, the magnetic particles 42 of the fifth magnetic layer 4e can be micronized and the crystallinity and orientation can be further improved, which is desirable.
(41) In the embodiment, although it is required that the magnetic anisotropic constant Ku.sub.5, the saturation magnetization Ms.sub.5, and the film thickness t.sub.5 of the fifth magnetic layer 4e are made to be in predetermined ranges, it is possible to form the magnetic layer with reference to materials illustrated in
(42) As for the material suitable for the fifth magnetic layer 4e, other than the CoCrPt based material, a CoCrPtB based material, a CoCrPtBNd based material, a CoCrPtTaNd based material, a CoCrPtNb based material, a CoCrPtBW based material, a CoCrPtMo based material, a CoCrPtCuRu based material, a CoCrPtRe based material, or the like may be used.
(43) It is preferable that Ms.sub.5 of the fifth magnetic layer 4e is in a range of from 950 to 250 emu/cc and Ku.sub.5 of the fifth magnetic layer 4e is in a range of from 8?10.sup.6 to 1?10.sup.6 erg/cc. It is undesirable that the value of Ku.sub.5 or Ms.sub.5 is equal to or less than the above range because this results in easy occurrence of the magnetization reversal, giving rise to problems concerning a reduction in Hn and deterioration in the thermal fluctuation characteristics. Further, if the value of Ku.sub.5 or Ms.sub.5 exceeds the above range, it is difficult to easily undergo the magnetization reversal with respect to the magnetic field of the head, and the write-ability (easiness of recording) decreases.
(44) The protective layer 5 serves to prevent the perpendicular magnetic layer 4 from being corroded and also serves to prevent damages to the surface of the medium when the magnetic head contacts the medium. Conventionally known materials may be used as the material of the protective layer 5. For example, materials containing a hard carbon film may be used.
(45) It is preferable that the thickness of the protective layer 5 is made to be in a range of from 1 nm to 10 nm in view of high recording density because the distance between the head and the medium can be made small.
(46) It is preferable to use lubricants agents such as a perfluoropolyether, fluorinated alcohol and fluorinated carboxylic acid for the lubricant layer 6.
(47) When producing a magnetic recording medium having the above structure, the soft magnetic underlayer 2, the orientation control layer 3 and the perpendicular magnetic layer 4 are sequentially formed on the nonmagnetic substrate 1 by, for example, a sputtering method, a vacuum vapor deposition method, an ion plating method, or the like. Then, the protective layer 5 is formed by, for example, a plasma CVD method, an ion beam method or the sputtering method.
(48)
WORKING EXAMPLES
Working Examples 1 to 4 and Comparative Examples 1 to 6
(49) Magnetic recording media according to working examples 1 to 4 and comparative examples 1 to 6 were produced by a manufacturing method described below.
(50) A cleaned glass substrate (manufactured by HOYA Corporation, outer diameter: 2.5 inches) was put in a film forming chamber of a DC magnetron sputtering apparatus (trade name: C-3040, manufactured by Anelva Corporation), and the film forming chamber was evacuated until the ultimate vacuum reached 1?10.sup.?5 Pa. After that, an adhesion layer having a thickness of 10 nm was formed (deposited) on the glass substrate by using a Cr target. Using a target of Co-20Fe-5Zr-5Ta (content of Fe: 20 at. %, content of Zr: 5 at. %, content of Ta 5 at. %, and the rest: Co), a soft magnetic layer having a thickness of 25 nm was formed at a substrate temperature of 100? C. or lower. Then, a Ru layer having a thickness of 0.7 nm was formed on the soft magnetic layer and then, a soft magnetic layer having a thickness of 25 nm of Co-20Fe-5Zr-5Ta was formed on the Ru layer. Thereby, a soft magnetic underlayer 2 was made.
(51) Using a Ni-6W {content of W: 6 at. % and the rest: Ni} target and a Ru-target, films were formed in thicknesses of 5 nm and 20 nm respectively on the soft magnetic underlayer 2 in this order to make an orientation control layer 3.
(52) A perpendicular magnetic layer, formed by magnetic layers and the like illustrated in tables 1 to 3, was formed on the orientation control layer 3 by a sputtering method under an argon gas pressure of 2 Pa.
(53) TABLE-US-00001 TABLE 2 EXCHANGE EXCHANGE COUPLING COUPLING FIRST MAGNETIC LAYER CONTROL SECOND MAGNETIC LAYER CONTROL Ku.sub.1 Ms.sub.1 LAYER 1 Ku.sub.2 Ms.sub.2 LAYER 2 (X10.sup.6 (emu/ t.sub.1 COMPO- t (X10.sup.6 (emu/ t.sub.2 COMPO- t COMPOSITION erg/cc) cc) (nm) SITION (nm) COMPOSITION erg/cc) cc) (nm) SITION (nm) WORKING 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 1 8TiO.sub.2 8TiO.sub.2 WORKING 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 2 8TiO.sub.2 8TiO.sub.2 WORKING 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 3 8TiO.sub.2 8TiO.sub.2 WORKING 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 4 8TiO.sub.2 8TiO.sub.2 COMPARATIVE 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 1 8TiO.sub.2 8TiO.sub.2 COMPARATIVE 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 2 8TiO.sub.2 8TiO.sub.2 COMPARATIVE 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 3 8TiO.sub.2 8TiO.sub.2 COMPARATIVE 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 4 8TiO.sub.2 8TiO.sub.2 COMPARATIVE 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 5 8TiO.sub.2 8TiO.sub.2 COMPARATIVE 92(71Co7Cr22Pt)- 8.8 800 4 50Ru50Co 0.3 92(74Co10Cr16Pt)- 6.7 700 4 50Ru50Co 0.3 EXAMPLE 6 8TiO.sub.2 8TiO.sub.2
(54) TABLE-US-00002 TABLE 3 EXCHANGE EXCHANGE COUPLING COUPLING THIRD MAGNETIC LAYER CONTROL FOURTH MAGNETIC LAYER CONTROL Ku.sub.3 Ms.sub.3 LAYER 3 Ku.sub.4 Ms.sub.4 LAYER 2 (X10.sup.6 (emu/ t.sub.3 COMPO- t (X10.sup.6 (emu/ t.sub.4 COMPO- t COMPOSITION erg/cc) cc) (nm) SITION (nm) COMPOSITION erg/cc) cc) (nm) SITION (nm) WORKING 92(64Co15Cr21Pt)- 3.8 450 4 92(75Co7Cr18Pt)- 7.1 750 4 EXAMPLE 1 8TiO.sub.2 8TiO.sub.2 WORKING 92(64Co15Cr21Pt)- 3.8 450 4 92(77Co10Cr13Pt)- 5.5 650 4 EXAMPLE 2 8TiO.sub.2 8TiO.sub.2 WORKING 92(64Co15Cr21Pt)- 3.8 450 4 92(75Co7Cr18Pt)- 7.1 750 4 EXAMPLE 3 8TiO.sub.2 8TiO.sub.2 WORKING 92(64Co15Cr21Pt)- 3.8 450 4 92(75Co7Cr18Pt)- 7.1 750 4 EXAMPLE 4 8TiO.sub.2 8TiO.sub.2 COMPARATIVE 92(76Co12Cr12Pt)- 3.8 600 4 EXAMPLE 1 8TiO.sub.2 COMPARATIVE 92(77Co15Cr8Pt)- 3.8 400 4 EXAMPLE 2 8TiO.sub.2 COMPARATIVE 92(75Co7Cr18Pt)- 3.8 750 4 EXAMPLE 3 8TiO.sub.2 COMPARATIVE 92(64Co15Cr21Pt)- 3.8 450 4 92(77Co15Cr8Pt)- 2.0 400 4 EXAMPLE 4 8TiO.sub.2 8TiO.sub.2 COMPARATIVE 92(64Co15Cr21Pt)- 3.8 450 4 50Ru50Co 0.3 92(75Co7Cr18Pt)- 7.1 750 4 EXAMPLE 5 8TiO.sub.2 8TiO.sub.2 COMPARATIVE 92(64Co15Cr21Pt)- 3.8 450 4 50Ru50Co 0.3 92(75Co7Cr18Pt)- 7.1 750 4 50Ru50Co 0.3 EXAMPLE 6 8TiO.sub.2 8TiO.sub.2 FIFTH MAGNETIC LAYER Ku.sub.5 Ms.sub.5 THERMAL COMPRE- (X10.sup.6 (emu/ t.sub.5 OW FLUCTUATION ATI FTI HENSIVE COMPOSITION erg/cc) cc) (nm) (dB) (%) (order) (order) EVALUATION WORKING 62Co12Cr18Pt8B 3.3 500 4 32.5 8.4 1.51 0.82 ? EXAMPLE 1 WORKING 62Co12Cr18Pt8B 3.3 500 4 34.8 9.3 1.67 0.95 ? EXAMPLE 2 WORKING 58Co12Cr22Pt8B 3.8 500 4 32.7 8.2 1.48 0.80 ? EXAMPLE 3 WORKING 68Co8Cr18Pt8B 4.2 500 4 33.2 8.0 1.60 0.87 ? EXAMPLE 4 COMPARATIVE 62Co12Cr18Pt8B 3.3 500 4 32.7 10.6 1.98 1.34 ? EXAMPLE 1 COMPARATIVE 62Co12Cr18Pt8B 3.3 500 4 35.1 12.9 2.54 1.76 ? EXAMPLE 2 COMPARATIVE 62Co12Cr18Pt8B 3.3 500 4 28.9 8.5 1.54 0.88 ? EXAMPLE 3 COMPARATIVE 62Co12Cr18Pt8B 3.3 500 4 29.6 10.3 1.87 1.25 ? EXAMPLE 4 COMPARATIVE 62Co12Cr18Pt8B 3.3 500 4 33.7 9.8 1.89 1.13 ? EXAMPLE 5 COMPARATIVE 62Co12Cr18Pt8B 3.3 500 4 35.2 11.6 2.21 1.35 ? EXAMPLE 6
(55) Next, a protective layer 5 having a film thickness of 3.0 nm was formed by an ion beam method. Next, a lubricant layer 6 made of perfluorinated polyether was formed by a dipping method, and a magnetic recording medium was produced.
(56) Write-ability (OW) of obtained magnetic recording media were evaluated. Read Write Analyzer RWA-1632 and Spin Stand S1701MP manufactured by Guzik Technical Enterprises in the United States were used to measure and evaluate the overwrite characteristics. As the head, a head using a single-pole magnetic pole for writing and a TMR element in the reproducing section was used. First, 750 kFCI signals were written and then, 100 kFCI signals were overwritten. Then, high-frequency components were extracted by a frequency filter to evaluate the data writing ability based on its residual ratio.
(57) After information was written in a recording density of 50 kFCI under a condition at 70? C., an attenuation rate of an output with respect to a reproduced output one second after the information was written was calculated based on the equation of (So?S)?100/(So) to evaluate thermal fluctuation characteristics. In this equation, So represents a reproduced output of when one second passed after the information was written. S represents a reproduced output of when 10000 seconds passed after the information was written.
(58) Further, ATI and FTI were similarly measured using Read Write Analyzer RWA-1632 and Spin Stand S1701MP manufactured by Guzik Technical Enterprises in the United States. Table 3 illustrates results.
(59) Further, table 3 illustrates a comprehensive evaluation based on measurement results of OW, thermal fluctuation, ATI, and FTI for each example. Because there is a trade-off relationship between these measurement results, it is necessary to comprehensively evaluate the characteristics of the magnetic recording media based on these measurement results. A magnetic recording medium, whose OW is 32.5 dB or higher, thermal fluctuation is 9.3% or less, ATI is 1.67 order or less, and FTI is 0.95 order or less, is evaluated as an excellent magnetic recording medium (?) and others are disapproved (x).
(60) As illustrated in table 3, the magnetic recording media according to working examples 1 to 4 can improve ATI and FTI while maintaining OW. As illustrated by the results of the recording media of working examples 3 and 4, it is effective even when the magnetic anisotropic constant Ku.sub.5 and the saturation magnetization Ms.sub.5 of the fifth magnetic layer are changed. Comparative example 1 is a magnetic recording medium having a conventional structure serving as a benchmark. As illustrated by the result of the recording medium of comparative example 2, when the magnetic anisotropic constant Ku.sub.3 of the third magnetic layer is decreased simply, OW is improved but ATI and FTI get worse. As illustrated by the result of the recording medium of comparative example 3, when the magnetic anisotropic constant Ku.sub.3 of the third magnetic layer is increased simply, ATI and FTI are improved but OW gets worse. As illustrated by the result of the recording medium of comparative example 4, when the saturation magnetization Ms.sub.4 and the magnetic anisotropic constant Ku.sub.4 of the fourth magnetic layer are low, magnetization reversal does not occur smoothly and desired effects cannot be obtained. As illustrated by the result of the recording medium of comparative example 5, when the exchange coupling control layer is inserted between the third magnetic layer and the fourth magnetic layer, OW is improved but ATI and FTI get worse. As illustrated by the result of the recording medium of comparative example 6, when the exchange coupling control layer is inserted between the third magnetic layer and the fourth magnetic layer, and the exchange coupling control layer is inserted between the fourth magnetic layer and the fifth magnetic layer, OW is improved but ATI and FTI get worse.
(61) As described above, according to working examples 1 to 4 of the embodiment, a magnetic recording medium which has excellent electromagnetic conversion characteristics and can comply with high-density recording was obtained.
(62) Further, the present disclosure is not limited to these embodiments, but various variations and modifications may be made without departing from the scope of the present invention.