Bragg grating, and spectroscopy device including the Bragg grating

Abstract

Provided are a Bragg grating and a spectroscopy device including the same. The Bragg grating is disposed at each of opposite ends of a resonator for reflecting light of a certain wavelength band and includes a core member extending from a waveguide of the resonator in a lengthwise direction of the waveguide; a plurality of first refractive members protruding from the core member and spaced apart from each other along the lengthwise direction; and a second refractive member filling spaces between the first refractive members and having a refractive index different from a refractive index of the first refractive members.

Claims

1. A Bragg grating disposed at each of opposite ends of a resonator for reflecting light of a certain wavelength band, the Bragg grating comprising: a core member extending from a waveguide of the resonator in a lengthwise direction of the waveguide; a plurality of first refractive members protruding from the core member in a width direction of the core member, the width direction being perpendicular to the lengthwise direction of the waveguide; and a second refractive member filling spaces between the first refractive members, wherein pitches between the plurality of first refractive members vary along the lengthwise direction, wherein a protruding length of each of the plurality of first refractive members protruding in the width direction gradually increases along the lengthwise direction toward a center of the core member, wherein a protruding length of a first refractive member protruding from the center of the core member has a maximum value in comparison with all other of the plurality of first refractive members, wherein a width of the core member in the width direction gradually reduces along the lengthwise direction of the core member toward the center of the core member, and wherein the width of the core member at the center of the core member has a minimum value in comparison with all other widths of the core member.

2. The Bragg grating of claim 1, wherein the plurality of first refractive members protrude from opposite sides of the core member in the width direction of the core member.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The above and/or other aspects will be more apparent by describing certain exemplary embodiments, with reference to the accompanying drawings in which:

(2) FIG. 1 is a perspective view of a Fabry-Perot interferometer having a general structure;

(3) FIG. 2 is a cross-sectional view of the Fabry-Perot interferometer of FIG. 1;

(4) FIG. 3 is a perspective view of a Bragg grating shown in FIG. 1;

(5) FIG. 4 is a diagram showing reflectivity of the Bragg grating of FIG. 3;

(6) FIG. 5 is a plan view of a spectroscopy device according to an exemplary embodiment;

(7) FIG. 6 is a perspective view of a spectroscopy unit shown in FIG. 5;

(8) FIG. 7 is an internal plan view of a Bragg grating shown in FIG. 6;

(9) FIG. 8 is a diagram showing reflectivity of the Bragg grating of FIG. 7;

(10) FIG. 9 is an internal plan view of a Bragg grating according to another exemplary embodiment;

(11) FIG. 10 is a graph of a reflectivity of the Bragg grating of FIG. 7 with respect to reflectivity of the Bragg grating of FIG. 9;

(12) FIG. 11 is an internal plan view of a Bragg grating according to another exemplary embodiment;

(13) FIG. 12 is a graph of reflectivity of the Bragg grating of FIG. 9 with respect to reflectivity of the Bragg grating of FIG. 11; and

(14) FIG. 13 is a graph of reflectivity of the Bragg grating of FIG. 4 with respect to reflectivity of the Bragg grating of FIG. 11.

DETAILED DESCRIPTION

(15) Exemplary embodiments are described in greater detail below with reference to the accompanying drawings.

(16) In the following description, like drawing reference numerals are used for like elements, even in different drawings. The matters defined in the description, such as detailed construction and elements, are provided to assist in a comprehensive understanding of the exemplary embodiments. However, it is apparent that the exemplary embodiments can be practiced without those specifically defined matters. Also, well-known functions or constructions are not described in detail since they would obscure the description with unnecessary detail.

(17) It will be understood that when a component, such as a layer, a film, a region, or a plate, is referred to as being on another component, the component may be directly on the other component or intervening components may be present thereon. In addition, materials forming each layer in exemplary embodiments are examples, and thus, other materials than the examples below may be used. As used herein, the term and/or includes any and all combinations of one or more of the associated listed items. Expressions such as at least one of, when preceding a list of elements, modify the entire list of elements and do not modify the individual elements of the list.

(18) FIG. 1 is a perspective view of a Fabry-Perot interferometer 100 having a general structure, FIG. 2 is a cross-sectional view of the Fabry-Perot interferometer 100 of FIG. 1, and FIG. 3 is a perspective view of a Bragg grating 120 shown in FIG. 1.

(19) Referring to FIGS. 1 to 3, the Fabry-Perot interferometer 100 may include a resonator 110 having a waveguide 111 of a predetermined length, and Bragg gratings 120 at opposite ends of the resonator 110. The waveguide 111 of the resonator 110 may include, for example, silicon nitride.

(20) The Bragg grating 120 may reflect light of a predetermined wavelength band. The Bragg grating 120 may include a plurality of first refractive members 121 arranged in a lengthwise direction (e.g., x-direction in FIG. 1) of the resonator 110, and a second refractive member 122 filling spaces between the first refractive members 121. A width W of the Bragg grating 120 in a y-direction may be equal to a width D of the waveguide 111 in the y-direction of the resonator 110.

(21) The first refractive members 121 may have a refractive index different from a refractive index of the second refractive member 122. For example, the first refractive members 121 may include silicon nitride, and the second refractive member 122 may include silicon oxide. The second refractive member 122 may cover the waveguide 111 of the resonator 110 and the Bragg gratings 120. The first refractive members 121 are spaced apart from each other along the lengthwise direction of the resonator 110. Intervals between the first refractive members 121, that is, pitches P between the first refractive members 121, may be constant along the lengthwise direction of the Bragg grating 120.

(22) In the Bragg grating 120 having the above structure, materials having different refractive indexes, for example, the first refractive members 121 including the silicon nitride and the second refractive member 122 including silicon oxide are disposed, and the first and second refractive members are formed and arranged to create an interference pattern between waves. The Bragg grating 120 having the above structure may reflect particular wavelengths of light and have a high reflectivity at the particular wavelengths. However, the Bragg grating 120 may not have a high reflectivity with respect to a wide wavelength band.

(23) FIG. 4 is a graph of reflectivity of the Bragg grating 120 of FIG. 3 with respect to a wavelength band of 800 nm to 900 nm. The first refractive members 121 and the second refractive member 122 forming the Bragg grating 120 respectively include silicon nitride and silicon oxide, and pitches P between the first refractive members 121 are 290 nm. Referring to FIG. 4, within a wavelength band of 800 nm to 830 nm, reflectivity is very low, that is, 20% or less. Therefore, it is difficult to obtain high reflectivity with respect to the wavelength band of 800 nm to 830 nm by using the Bragg grating 120 of FIG. 3. In particular, an ultra-small size spectroscopy device that is to be implemented as a wearable device has to use a wavelength band having a width of 100 nm or greater, and thus, the Bragg grating 120 having the above described structure may not be suitable for the ultra-small size spectroscopy device.

(24) FIG. 5 is a plan view of a spectroscopy device according to an exemplary embodiment.

(25) Referring to FIG. 5, the spectroscopy device includes a plurality of spectroscopy units 200 provided on a substrate 201. Here, the substrate 201 may be, for example, a silicon substrate, but is not limited thereto. In the exemplary embodiment, each of the spectroscopy units 200 may include a Fabry-Perot interferometer, but the exemplary embodiment is not limited thereto.

(26) Each of the spectroscopy units 200 may include a resonator 210, and Bragg gratings (e.g., reflector) 220 provided at opposite ends of the resonator 210. The Bragg grating 220 provided at a first end of the resonator 210 may be connected to an input coupler 231, through which light is incident, and the Bragg grating 210 provided at a second end of the resonator 210 may be connected to an output coupler 232 through which light is emitted. The first end of the resonator 210 may oppose the second end of the resonator 210.

(27) At least some of the spectroscopy units 200 may include resonators 210 having different lengths from each other. In FIG. 5, a sequence of the spectroscopy units 200 are arranged in a y-direction, and the lengths of the resonators 210 of the spectroscopy units 200 gradually increase along the y-direction. The spectroscopy device having the above structure may be integrated on, for example, a silicon substrate, to be manufactured as a fine chip.

(28) FIG. 6 is a perspective view of the spectroscopy unit 200 of FIG. 5.

(29) Referring to FIG. 6, the spectroscopy unit 200 includes the resonator 210 having a predetermined length and the Bragg gratings 220 at opposite ends of the resonator 210. The resonator 210 may include a waveguide 211 including a predetermined medium for making light proceed therein. The waveguide 211 may have a thickness of about 100 nm to 200 nm and a width D of about 200 nm to about 900 nm, for example. However, the exemplary embodiment is not limited thereto, that is, the thickness and the width of the waveguide 211 may vary. The waveguide 211 may include, for example, silicon nitride, but is not limited thereto, that is, the waveguide 211 may include other various materials.

(30) FIG. 7 is an internal plan view of the Bragg grating 220 of FIG. 6.

(31) Referring to FIG. 7, the Bragg grating 220 includes a core member 223, a plurality of first refractive members 221, and a second refractive member 222. The core member 223 may extend from the waveguide 211 of the resonator 210 in a lengthwise direction (i.e., x-direction of FIG. 7). The core member 223 may be integrally formed with the waveguide 211 of the resonator 210. The core member 223 may include the same material as that included in the waveguide 211 of the resonator 210. For example, the core member 223 may include silicon nitride, but is not limited thereto. Otherwise, the core member 223 may include a different material from that of the waveguide 211 of the resonator 210.

(32) The first refractive members 221 may protrude from the core member 223. The first refractive members 221 may include a plurality of pairs of arms. Each pair of arms extends outwardly from the core member 223 to be in parallel to each other and perpendicular to the core member 223. The core member 223 may hold the plurality of pairs of arms in fixed positions on the core member 223. In greater detail, the first refractive members 221 may protrude from opposite sides of the core member 223 in a width direction of the core member 223 (i.e., y-direction in FIG. 7). The first refractive members 221 may be spaced apart from each other in the lengthwise direction of the core member 223. Here, the first refractive members 221 may face each other across the core member 223 when viewed from the top of the spectroscopy unit 200, but are not limited thereto.

(33) Intervals between the first refractive members 221, that is, pitches P between the first refractive members 221, in the lengthwise direction of the core member 223 may be constant. The first refractive members 221 may be integrally formed with the core member 223. The first refractive members 221 may include the same material as that of the core member 223. For example, the first refractive members 221 may include silicon nitride, but are not limited thereto.

(34) The second refractive member 222 is provided to fill spaces between the first refractive members 221. The second refractive member 222 may include a material having a refractive index that is different from those of the first refractive members 221. For example, the second refractive member 222 may include silicon oxide, but is not limited thereto. The second refractive member 222 may be provided to cover the waveguide 211 of the resonator 210 and the first refractive members 221.

(35) A width W1 of the Bragg grating 220 may be greater than the width D of the waveguide 211 of the resonator 210. The width W1 may be also referred to as a span of the Bragg grating 220. In addition, a width W2 of the core member 223 may be less than the width D of the waveguide 211 of the resonator 210. Here, the width W1 of the Bragg grating 220 may correspond to a sum of protruding lengths L of the two first refractive members 221 that protrude toward opposite directions and the width W2 of the core member 223. In the exemplary embodiment, the width W1 of the Bragg grating 220 and the width W2 of the core member 223 may be constant along the lengthwise direction of the core member 223. Accordingly, the protruding lengths L of the first refractive members 221 may be constant along the lengthwise direction of the core member 223.

(36) FIG. 8 is a graph of reflectivity of the Bragg grating 220 of FIG. 7 with respect to a wavelength band of 800 nm to 900 nm. Here, the first refractive members 221 and the second refractive member 222 included in the Bragg grating 220 respectively include silicon nitride and silicon oxide, and pitches P between the first refractive members 221 are 290 nm. In addition, the width D of the waveguide 211, the width W1 of the Bragg grating 220, and the width W2 of the core member 223 are respectively 510 nm, 1000 nm, and 200 nm.

(37) When comparing the graph of FIG. 4 with the graph of FIG. 8, the Bragg grating 220 of FIG. 7 may achieve higher reflectivity than the Bragg grating 120 of FIG. 3. In detail, referring to FIG. 3, the Bragg grating 120 exhibits low reflectivity with respect to the wavelength band of 800 nm to 830 nm. However, referring to FIG. 8, the Bragg grating 220 of FIG. 7 exhibits high reflectivity with respect to the wavelength band of 800 nm to 830 nm, as well. As described above, the Bragg grating 220 according to the exemplary embodiment may achieve high reflectivity with respect to a wider wavelength band than that of the Bragg grating 120 of FIG. 3.

(38) FIG. 9 is an internal plan view of a Bragg grating 320 according to another exemplary embodiment.

(39) Referring to FIG. 9, the Bragg grating 320 includes a core member 232, a plurality of first refractive members 321, and a second refractive member 322. The core member 323 may extend from the waveguide 211 of the resonator 210 (see FIG. 6) in a lengthwise direction of the resonator 210. The core member 323 may be integrally formed with the waveguide 211 of the resonator 210. The core member 323 may include the same material as that of the waveguide 211 of the resonator 210, but is not limited thereto.

(40) The first refractive members 321 may protrude from the core member 323. The first refractive members 321 may protrude from opposite sides of the core member 323 in a width direction of the core member 323, and may be spaced apart from each other along a lengthwise direction of the core member 323. The first refractive members 321 may be integrally formed with the core member 323. The second refractive member 322 may be provided to fill spaces between the first refractive members 321. The second refractive member 323 may include a material having a refractive index that is different from that of the first refractive members 321. The second refractive member 322 may be provided to cover the waveguide 211 of the resonator 210 and the first refractive devices 321.

(41) A width W1 of the Bragg grating 320 may be greater than the width D of the waveguide 211 of the resonator 210. In addition, a width W2 of the core member 323 may be less than the width D of the waveguide 211 of the resonator 210. The width W1 of the Bragg grating 320 and the width D2 of the core member 323 may be constant along the lengthwise direction of the core member 323. Therefore, protruding lengths L of the first refractive members 321 may be constant along the lengthwise direction of the core member 323.

(42) Unlike the previous exemplary embodiment, intervals between the first refractive members 321, that is, pitches P between the first refractive members 321, may vary along the lengthwise direction of the core member 323. That is, at least some of the pitches P between the first refractive members 321 may vary along the lengthwise direction of the core member 323. FIG. 9 exemplarily shows a case in which the pitches P between the first refractive members 321 are gradually reduced toward a center portion of the core member 323. However, the exemplary embodiment is not limited thereto, that is, the pitches P between the first refractive members 321 may vary in various manners along the lengthwise direction of the core member 323.

(43) FIG. 10 is a graph of the reflectivity of the Bragg grating 220 of FIG. 7 versus a reflectivity of the Bragg grating 320 of FIG. 9 with respect to the wavelength band of 800 nm to 900 nm. Here, a curve C1 denotes the reflectivity of the Bragg grating 220 of FIG. 7, in which the pitches P between the first refractive members 221 are constant, and a curve C2 denotes the reflectivity of the Bragg grating 320 of FIG. 9, in which the pitches P between the first refractive members 321 vary.

(44) The first refractive members 221 and 321 and the second refractive members 222 and 322 in the Bragg gratings 220 and 320 respectively include silicon nitride and silicon oxide. In addition, the width D of the waveguide 211, the widths W1 of the Bragg gratings 220 and 320, and the widths W2 of the core members 223 and 323 are respectively 510 nm, 1000 nm, and 200 nm. In the Bragg grating 220 of FIG. 7, the pitches P between the first refractive members 221 are 290 nm. In addition, in the Bragg grating 320 of FIG. 9, a minimum pitch between the first refractive members 321 is 250 nm, and the pitch varies by 2 nm.

(45) Referring to FIG. 10, the Bragg grating 320 of FIG. 9, in which the pitches P between the first refractive members 321 vary, exhibits high reflectivity with respect to a wider wavelength band than in the Bragg grating 220 of FIG. 7, in which the pitches P between the first refractive members 221 are constant. Therefore, high reflectivity may be obtained with respect to wide wavelength band by varying the pitches P between the first refractive members 321.

(46) FIG. 11 is an internal plan view of a Bragg grating 420 according to another exemplary embodiment.

(47) Referring to FIG. 11, the Bragg grating 420 includes a core member 423, a plurality of first refractive members 421, and a second refractive member 422. The core member 423 may extend from the waveguide 211 of the resonator 210 (see FIG. 6) in a lengthwise direction (i.e., x-direction in FIG. 11). The core member 423 may be integrally formed with the waveguide 211 of the resonator 210. The core member 423 may include the same material as that of the waveguide 211 of the resonator 210. For example, the core member 423 may include silicon nitride, but is not limited thereto. Otherwise, the core member 423 may include a material different from that of the waveguide 211 of the resonator 210.

(48) The first refractive members 421 may protrude from the core member 423. Here, the first refractive members 421 may protrude from opposite sides of the core member 423 in a width direction of the core member 423 (i.e., y-direction in FIG. 11). The first refractive members 421 may be spaced apart from each other along the lengthwise direction of the core member 423. Here, the first refractive members 421 may be arranged facing each other based on the core member 423, but are not limited thereto. The first refractive members 421 may be integrally formed with the core member 423. The first refractive members 421 may include the same material as that of the core member 423. For example, the first refractive members 421 may include silicon nitride, but is not limited thereto.

(49) The second refractive member 422 may be provided to fill spaces between the first refractive members 421. The second refractive member 422 may include a material having a different refractive index from that of the first refractive members 421. For example, the second refractive member 422 may include silicon oxide, but is not limited thereto. The second refractive member 422 may be provided to cover the waveguide 211 of the resonator 210 and the first refractive members 421.

(50) The width W1 of the Bragg grating 420 may be greater than the width D of the waveguide 211 of the resonator 210. In addition, the width W2 of the core member 423 may be less than the width D of the waveguide 211 of the resonator 210. Here, the width W1 of the Bragg grating 420 may correspond to a sum of the protruding lengths L of the two first refractive members 421 that protrude in opposite directions to each other and the width W2 of the core members 423, as described above.

(51) At least one of the width W2 of the core member 423 and the protruding lengths L of the first refractive member 421 may vary along the lengthwise direction of the core member 423. In more detail, the width W2 of the core member 423 may be gradually reduced from opposite ends thereof toward a center portion thereof. In addition, the width W1 of the Bragg grating 420 may be gradually increased from the opposite ends of the core member 423 toward the center portion of the core member 423. The width W2 of the core member 423 has a maximum value W2.sub.max at the ends of the core member 423 and has a minimum value W2.sub.min at the center of the core member 423 in the lengthwise direction (i.e., x-direction). The width W1 of the core member 423 has a maximum value W1.sub.max at the center of the core member 423 and has a minimum value W1.sub.min at the center of the core member 423 in the lengthwise direction. Accordingly, the protruding lengths L of the first refractive members 421 gradually increase from the opposite ends of the core member 423 toward the center portion of the core member 423.

(52) The intervals between the first refractive members 421, that is, the pitches P between the first refractive members 421, may vary along the lengthwise direction of the core member 423. That is, at least some of the pitches P between the first refractive members 421 may vary along the lengthwise direction of the core member 423. FIG. 11 exemplarily shows that the pitches P between the first refractive members 421 are gradually reduced toward the center portion of the core member 423. However, the exemplary embodiment is not limited to the above example, that is, the pitches P between the first refractive members 421 may vary in various manners along the lengthwise direction of the core member 423.

(53) FIG. 12 is a graph of the reflectivity of the Bragg grating 320 shown in FIG. 9 versus a reflectivity of the Bragg grating 420 of FIG. 11 with respect to a wavelength band of 800 nm to 900 nm. Here, the curve C2 denotes the reflectivity of the Bragg grating 320 of FIG. 9, and a curve C3 denotes the reflectivity of the Bragg grating 420 of FIG. 11. In FIG. 12, the reflectivity is expressed in units of decibels dB.

(54) The first refractive members 321 and 421 and the second refractive members 322 and 422 in the Bragg gratings 320 and 420 respectively include silicon nitride and silicon oxide. In the Bragg grating 320 of FIG. 9, the width D of the waveguide 211, the width W1 of the Bragg grating W1, and the width W2 of the core member 323 are respectively 510 nm, 1000 nm, and 200 nm. In addition, the minimum pitch between the first refractive members 321 is 250 nm, and the pitch varies by 2 nm. In the Bragg grating 420 of FIG. 11, the width D of the waveguide 211 is 510 nm, and a maximum width W1.sub.max and a minimum width W1.sub.min of the Bragg grating 420 are respectively 1100 nm, and 670 nm. In addition, a maximum width W2.sub.max and a minimum width W2.sub.min of the core member 423 are respectively 430 nm and 130 nm. The minimum pitch between the first refractive members 421 is 250 nm, and the pitch varies by 2 nm.

(55) Referring to FIG. 12, the Bragg grating 420 of FIG. 11, in which the width W1 of the Bragg grating 420 varies, exhibits higher reflectivity than the Bragg grating 320 of FIG. 9 having the constant width. Therefore, high reflectivity may be implemented by increasing the width W1 of the Bragg grating 420 toward the center portion of the Bragg grating 420 and reducing the width W2 of the core member 423 toward the center portion of the Bragg grating 420.

(56) FIG. 13 is a graph of the reflectivity of the Bragg grating 120 of FIG. 3 and the Bragg grating 420 of FIG. 11 with respect to the wavelength band of 800 nm to 900 nm. Here, a curve C denotes the reflectivity of the Bragg grating 120 of FIG. 3, and the curve C3 denotes the reflectivity of the Bragg grating 420 of FIG. 11. In FIG. 13, the reflectivity is expressed in the unit of decibel (dB). Referring to FIG. 13, the Bragg grating 420 of FIG. 11 exhibits higher reflectivity with respect to a wider wavelength band than in the Bragg grating 12 of FIG. 4.

(57) In the Bragg grating 420 of FIG. 11, the width of the core member 423 is gradually reduced toward the center portion of the Bragg grating 420, and the protruding lengths L of the first refractive members 421 gradually increase toward the center portion of the Bragg grating 420 so that the width W1 of the Bragg grating 420 gradually increases toward the center portion of the Bragg grating 420. Alternatively, the width W1 of the Bragg grating 420 may vary by changing the protruding lengths L of the first refractive members 421 while maintaining the width W2 of the core member 423 constantly, or by changing the width W2 of the core member 423 while maintaining the protruding lengths L of the first refractive members 421 constantly. In addition, the pitches P between the first refractive members 421 may be constant.

(58) As described above, when the Bragg grating includes the core member, the plurality of first refractive members protruding from the core member to be spaced apart from each other, and the second refractive member filling the spaces between the first refractive members, the high reflectivity may be obtained with respect to a wavelength band of a desired width. Here, the higher reflectivity with respect to the wider wavelength band may be obtained by varying the pitches between the first refractive members or varying the width of the Bragg grating. Also, the materials included in the first refractive members and the second refractive member may be variously selected in order to obtain higher reflectivity with respect to the visible ray band or other infrared-ray band, and the pitches between the first refractive members or the width of the Bragg grating may be set variously. Accordingly, the spectroscopy device that is manufactured by integrating the spectroscopy units including the above Bragg gratings on a substrate may have improved performance. In addition, the spectroscopy device may be manufactured as a small-sized chip that may be loaded in, for example, a non-invasive blood glucose sensor, and may be implemented as a wearable device.

(59) The foregoing exemplary embodiments are merely exemplary and are not to be construed as limiting. For example, the spectroscopy unit 200 may be implemented with any type of reflectors rather than being limited to a Bragg grating.

(60) The present teaching can be readily applied to other types of apparatuses. Also, the description of the exemplary embodiments is intended to be illustrative, and not to limit the scope of the claims, and many alternatives, modifications, and variations will be apparent to those skilled in the art.