FABRICATION OF SUPERHYDROPHOBIC AND ICEPHOBIC COATINGS BY NANOLAYERED COATING METHOD
20190127841 ยท 2019-05-02
Assignee
Inventors
- Francis M. Kustas (Rapid City, SD, US)
- Andrew Benjamin Kustas (Albuquerque, NM, US)
- Thomas Scott Williams (Long Beach, CA, US)
- Robert Hicks (Los Angeles, CA, US)
Cpc classification
C23C28/44
CHEMISTRY; METALLURGY
C23C16/4481
CHEMISTRY; METALLURGY
B82Y40/00
PERFORMING OPERATIONS; TRANSPORTING
C23C28/42
CHEMISTRY; METALLURGY
C23C14/3471
CHEMISTRY; METALLURGY
B82Y30/00
PERFORMING OPERATIONS; TRANSPORTING
C23C16/45595
CHEMISTRY; METALLURGY
C23C28/046
CHEMISTRY; METALLURGY
International classification
Abstract
Nano-multilayered coatings and fabrication methods are disclosed. By exemplary disclosure, a nano-multilayered coating fabricated from sequential depositions on a substrate from an atmospheric-plasma chemical vapor deposition (AP-CVD) source is disclosed. The coating includes a vapor precursor fed to the deposition source, an amorphous oxide layer deposited from the deposition source onto the substrate, and a nanoparticle layer deposited onto the substrate on top of the amorphous oxide layer. A nano-multilayered coating of the amorphous oxide and nanoparticle layers is fabricated from alternating deposition coatings of the amorphous oxide layer and the nanoparticle layer onto the substrate two or more times.
Claims
1. A method for fabricating nano-multilayered coatings by sequential deposition, comprising: providing an atmospheric-plasma chemical vapor deposition (AP-CVD) source and a substrate; feeding a vapor precursor to the source; depositing an amorphous oxide layer onto the substrate; depositing a nanoparticle layer onto the substrate on top of the amorphous oxide layer; and alternating deposition coatings of the amorphous oxide layer and the nanoparticle layer onto the substrate two or more times for fabricating a nano-multilayered coating of the amorphous oxide and nanoparticle layers.
2. The method of claim 1, wherein the amorphous oxide layer comprises at least one of silicon dioxide, silicon nitride, aluminum oxide, and zirconium oxide.
3. The method of claim 1, further comprising: ultrasonically agitating and atomizing the nanoparticle layer for depositing onto the substrate.
4. The method of claim 1, further comprising: functionalizing a surface of the substrate with a plasma from the source comprising at least one of Helium or Argon or Silicon and Oxygen or Nitrogen gas.
5. The method of claim 4, further comprising: injecting the vapor precursor into the plasma.
6. The method of claim 1, wherein the vapor precursor has at least vapor pressure at room temperate greater than 20 mm Hg (torr).
7. The method of claim 1, wherein the nano-multilayered coating has a water droplet contact angle at least greater than 90 for hydrophobic behavior and at least greater than 150 for superhydrophobic behavior based on the number of alternating deposition coatings.
8. The method of claim 1, wherein the nanoparticles are at least smaller than 50 nm.
9. The method of claim 1, wherein the nanoparticles comprise nanoparticles from one or more carbide groups or one or more oxide groups.
10. A nano-multilayered coating fabricated from sequential depositions on a substrate from an atmospheric-plasma chemical vapor deposition (AP-CVD) source, comprising: a vapor precursor fed to the deposition source, the vapor precursor having at least a vapor pressure at room temperate greater than 20 mm Hg (torr); an amorphous oxide layer deposited from the deposition source onto the substrate; a nanoparticle layer deposited onto the substrate on top of the amorphous oxide layer; and a nano-multilayered coating of the amorphous oxide and nanoparticle layers fabricated from alternating deposition coatings of the amorphous oxide layer and the nanoparticle layer onto the substrate two or more times.
11. The nano-multilayered coating of claim 10, wherein a surface of the substrate is prepared for deposition etching or functionalizing with an AP-CVD plasma consisting of Argon or Helium and Oxygen or Nitrogen gas.
12. The nano-multilayered coating of claim 10, wherein the vapor precursor comprises silicon-dioxide derived from a family of liquid reagents, including hexamethyldisiloxane (C.sub.6H.sub.18OSi.sub.2) (HMDSO) or hexamethyldisilazane (C.sub.6H.sub.19NSi.sub.2) (HMDS).
13. The nano-multilayered coating of claim 10, wherein the nanoparticle layer comprises nanoparticles from one or more carbide groups, or one or more oxide groups.
14. The nano-multilayered coating of claim 10, wherein the amorphous oxide layer comprises at least one of silicon dioxide, silicon nitride, aluminum oxide, and zirconium oxide.
15. The nano-multilayered coating of claim 10, wherein the nanoparticle layer is ultrasonically agitated and atomized prior to deposition onto the substrate.
16. The nano-multilayered coating of claim 10, wherein the nano-multilayered coating has a water droplet contact angle at least greater than 90 for hydrophobic behavior and at least greater than 150 for superhydrophobic behavior based on the number of alternating deposition coatings.
17. The nano-multilayered coating of claim 10, wherein the nanoparticle layer comprises nanoparticles of at least 50 nm or smaller.
18. The nano-multilayered coating of claim 10, wherein the substrate comprises an electronic component having one or more electrical components and the coating comprises an anti-tamper layer on the electronic component.
19. The nano-multilayered coating of claim 10, wherein the substrate comprises an engineered layer having one or more engineered components and the coating comprises a water-repellent (superhydrophobic) coating or an ice-repellent (icephobic) coating on a surface of the engineered layer.
Description
BRIEF DESCRIPTION OF DRAWINGS
[0014] Illustrated embodiments are described in detail below with reference to the attached drawing figures, which are incorporated by reference herein, and where:
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DETAILED DESCRIPTION
[0025] Throughout the disclosure, the terms coating, nanolayer, nanolayered coating, multilayered coating, and nano-multilayered coating(s) are used in reference to the coatings of the present invention. In accordance with an exemplary embodiment of the present invention and prior to fabrication of the a-oxide/hard nanoparticle multilayered coating, an engineering material substrate can be cleaned using, for example, but not limited to the following chemical procedure: 1) ultrasonic agitation in acetone solvent for 5-10 minutes, 2) rinse with methanol solvent, 3) blow-dry in hot air, 4) ultrasonic agitation in hot (100 C.) degreaser solution (1 part/7 parts deionized (DI) water) for 5-10 minutes, 5) rinse in DI water, 6) rinse in methanol solvent, 7) blow dry in hot air. Although a method for preparing an engineering material of interest is set forth, the present invention contemplates additional/other steps whether proprietary or conventional for chemically preparing the surface of an engineering material to receive a nanolayered coating of the present invention.
[0026] After chemical cleaning, an etch or functionalization of the upper surface of substrate 1 shown in
[0027] Although the proceeding and proceeding processes provide for functionalization of the substrate 1 surface, the present invention contemplates other functionalization steps, processes and plasma agents. Process parameters that can be employed, for example, during the AP-CVD functionalization include, but are not limited to, configuring: 1) AP-CVD shower-head to substrate 1 surface separation distance generally between a range of 5-10 mm, 2) radio frequency (RF) power to AP-CVD shower head generally between 60-100 W, 3) He or Ar gas flow rate generally between 15-30 standard liters per minute (SLM), 4) O.sub.2 gas flow rate generally between 0.3-0.6 SLM, 5) AP-CVD shower head translation rate generally between 10-20 millimeters (mm)/second (s) using a robot, 6) robot program horizontal translation step change generally between 0.5-1.0 mm, and 2) number of AP-CVD passes generally between 1-2.
[0028] The AP-CVD fabrication method can be used to deposit amorphous oxides 2 shown by way of example in
[0039] Suitable precursors can have a relatively high (e.g., 20 mm Hg (torr)) vapor pressure at room temperature, which enables the easy formation of a vapor which can be carried into the AP shower head plasma by an inert gas (e.g., He or Ar) stream. Of the listed precursors above, precursors 1, 2, 4, 6, and 7 all have by way of example acceptable vapor pressures, suggesting their use to form silicon-dioxide. The elements (e.g., silicon (Si)) of the precursor vapor, can react with the O.sub.2 gas in the plasma to form silicon dioxide (or silica; SiO.sub.2). The silica coating can be amorphous, not exhibiting a long-range crystalline structure.
[0040] Other amorphous material coatings formed by the AP-CVD method can include, for example, silicon nitride (Si.sub.3N.sub.4) by injection of the HMDSO or HMDS precursor vapors into a He and N.sub.2 or Ar and N.sub.2 plasma. Similarly, amorphous aluminum oxide (Al.sub.2O.sub.3) can be formed by the AP-CVD method by injection of an aluminum (Al) containing vapor precursor, (e.g., Alumatrane; C.sub.6H.sub.12NO.sub.4Al) into the He and O.sub.2 or Ar and O.sub.2 plasma.
[0041] The present invention contemplates varying process parameters that can be used to deposit the amorphous oxide material 2 shown in
[0042] After the AP-CVD process is used to deposit the first amorphous oxide layer, then a ultrasonically-agitated, atomized spray system UAS system shown in
[0043] A bilayer of amorphous oxide and nanoparticles 3 shown in
EXAMPLES
[0044] The present invention is described below by way of examples. However the present invention is not limited thereto the examples described below.
Example 1
[0045] An aluminum alloy (6061 Al) coupon of selected size 50.8 mm (2 in) wide101.6 mm (4 in) long6.35 mm (0.25 in) thick was cleaned according to the chemical-cleaning and He & O.sub.2 ionized-gas plasma-etch/functionalization procedure described below.
[0046] In at least one of the examples of the present invention, a chemical cleaning procedure can consist of, but is not limited to: 1) ultrasonic agitation in acetone solvent for 5-minutes, 2) rinse with methanol solvent, 3) blow-dry in hot air, 4) ultrasonic agitation in hot (generally 100 C.) degreaser solution (1 part/7 parts deionized (DI) water) for 5-minutes, 5) rinse in DI water, 6) rinse in methanol solvent, 7) blow dry in hot air.
[0047] After chemical cleaning and before AP-CVD etch/functionalization, SS substrates are mechanically-attached to a hot-plate to heat the substrate material to a temperature of 100 C., to remove or otherwise evaporate water from the surface.
[0048] Stainless steel coupons mounted on the hot-plate can be plasma-etched/functionalized by treating the substrate surface with the AP-CVD plasma, consisting of, for example, He (99.5% purity) and O.sub.2 (99.995% purity) or Ar (99.5% purity) and O.sub.2 ions, in a raster-scanning method to ensure complete processing of the substrate surface. Process parameters that can be employed during the AP-CVD functionalization include, but are to limited to, configuring: 1) AP-CVD shower-head to substrate surface separation distance of 5 mm, 2) radio frequency (RF) power to AP-CVD shower head of 100 W, 3) He gas flow rate of 25 standard liters per minute (SLM), 4) O.sub.2 gas flow rate of 0.3 SLM, 5) AP-CVD shower head translation rate of 20 millimeters (mm)/second (s) using robot, 6) robot program horizontal translation step change of 0.5 mm, and 2) number of AP-CVD passes of 2.
[0049] In accordance with at least one exemplary aspect of the present invention, the AP-CVD fabrication method was used to deposit amorphous oxides by introduction of a vapor from a hexamethyldisilazane (C.sub.6H.sub.19NSi.sub.2) (or HMDS) liquid precursor heated to 30 C., while contained in a SS container housed in a heated-water bath. The vapor from the HMDS precursor was swept by He gas, maintained at a flow rate of 0.4 SLM, into the AP shower head which emits a He and O.sub.2 plasma. The element (e.g., silicon (Si)) of the HMDS precursor vapor reacted with the O.sub.2 gas ions in the plasma to form silicon dioxide (or silica; SiO.sub.2). The silica coating is amorphous, as confirmed by x-ray diffraction (XRD), and therefore does not exhibit a long-range crystalline structure.
[0050] At least some specific process parameters used to deposit the amorphous oxide material by AP-CVD can include, but are not limited to, configuring: 1) AP-CVD shower-head to substrate surface separation distance of 5 mm, 2) radio frequency (RF) power to AP-CVD shower head of 100 W, 3) He or Ar gas flow rate of 25 standard liters per minute (SLM), 4) O.sub.2 gas flow rate of 0.3 SLM, 5) HMDS liquid precursor held in a stainless steel (SS) container inside a DI-water bath which can be heated to a temperature of 30 C. by a heating-rod immersed in the DI water bath, 6) He gas sweep-flow to the SS container with the precursor liquid at a rate of 0.4 SLM, 7) AP-CVD shower head translation rate of 20 millimeters (mm)/second (s) using robot, and 8) robot program horizontal translation step change of 0.5 mm.
[0051] In accordance with at least one method of the present invention, ultrasonic atomized spray (UAS) is used to spray-deposit a layer of nanoparticles in a solvent carrier. Process parameters used to deposit the nanoparticle layer UAS can include, but are not limited to, configuring: 1) RF power to the ultrasonic transducer in the syringe pump plunger and spray nozzle of 3 W, 2) number of turns on the focus mechanism for the spray nozzle of 4, 3) a weight percent loading of 0.1% of nanoparticles (e.g., 35 nm boron carbide (B.sub.4C)) in a suitable solvent (isopropanol (IPA)), 4) a syringe pump flow rate of 0.8 millimeter (ml)/minute (m) to inject the nanoparticle/solvent mixture into the tubing that feeds the ultrasonic spray nozzle, 5) number of opening turns on the air-nozzle in the nozzle to promote atomization of the spray mixture of 6.25, 6) robot translation speed for the spray nozzle translation of 10 mm/s, 7) number of passes for the spray nozzle of 1, 8) spray-nozzle to substrate surface separation distance of 18 mm (0.71 in), 9) robot program horizontal translation step change of 6.25 mm (0.25 in.).
[0052] The above two (2) deposition processes were performed sequentially to produce a bilayer of material: 1) AP-CVD of a-silica and 2) UAS of B.sub.4C nanoparticles. This sequence was performed a total of six (6) times with a final cap layer of a-silica by AP-CVD, resulting in a total number of 7 individual layers.
[0053] Scanning electron microscope (SEM) images of the surface of the fabricated nanolayered material showed the uniform distribution of the B.sub.4C nanoparticles, as shown in both images of
[0054] Water contact angles were measured using a conventional digital camera and the software program (i.e., Simages).
Example 2
[0055] Another exemplary aspect of the present invention includes fabricating one or more nano-multilayered coatings. For example, a second a-SiO.sub.2/B.sub.4C nano-multilayered coating, fabricated with a greater number of bilayers (e.g., 11 a-silica and 11 B.sub.4C nanoparticles) capped with a final a-silica layer (total of 23 layers) exhibited a larger WCA as shown in
[0056] The same nano-multilayered coating as above while on 6061-Al was subjected to an icing exposure using the following test conditions: 1) impact angle of air/water stream: 30, 2) air flow rate: 151.2 gm/second (20 lbs/min), 3) inlet temperature: 20 C., 4) inlet pressure: 137.9 kPa (20 psia), and 5) water flow rate: 0.166 gm/second (0.022 lbs/min).
Example 3
[0057] It is desirable to protect electronic components from intrusion and tampering which can be used to remove program sensitive information. Contextually speaking, anti-tamper resistant generally refers to a surface that either: 1) cannot be easily removed by conventional removal methods (e.g., hot acid etch or hard-particle abrasion that occurs during sanding) or 2) one that if removed would result in the underlying electronic components being damaged beyond use/repair. The nano-multilayered coating described in
[0058] The same nano-multilayered coating described above can provide resistance to hot (e.g., 260 C.) sulfuric-acid jet-etch for a 15-minute duration, without coating damage or removal (
[0059] The illustrative embodiments are not to be limited to the particular embodiments described herein. In particular, the illustrative embodiments contemplate numerous variations in the type of ways in which embodiments may be applied. The foregoing description has been presented for purposes of illustration and description. It is not intended to be an exhaustive list or limit any of the disclosure to the precise forms disclosed. It is contemplated that other alternatives or exemplary aspects are considered included in the disclosure. The description is merely examples of embodiments, processes or methods of the invention. It is understood that any other modifications, substitutions, and/or additions may be made, which are within the intended spirit and scope of the disclosure. For the foregoing, it can be seen that the disclosure accomplishes at least all of the intended objectives.
[0060] The previous detailed description is of a small number of embodiments for implementing the invention and is not intended to be limiting in scope. The following claims set forth a number of the embodiments of the invention disclosed with greater particularity.