Organic electroluminescent display device and manufacturing method thereof

Abstract

The disclosure provides an organic electroluminescent display device, including a substrate, an organic electroluminescent device disposed on the substrate, and a thin film packaging structure disposed on the substrate and packaging the organic electroluminescent device. The thin film packaging structure has desiccant particles. The disclosure further provides a manufacturing method of the organic electroluminescent display device, which can reduce the influence of vapor attached on surfaces of multiple layers of packaging thin films or infiltrated in the multiple layers of packaging thin films on the packaged organic electroluminescent device, so as to prolong the service life of the organic electroluminescent device.

Claims

1. An organic electroluminescent display device, comprising: a substrate; an organic electroluminescent device, disposed on the substrate; and a thin film packaging structure, disposed on the substrate and packaging the organic electroluminescent device, the thin film packaging structure having desiccant particles, wherein the thin film packaging structure comprises: N layers of inorganic thin film packaging layers and N?1 layers of organic thin film packaging layers, N?2 and N is a positive integer; a first layer of the inorganic thin film packaging layers is disposed on the substrate, covers and packages the organic electroluminescent device, a second layer of the inorganic thin film packaging layers to an Nth layer of the inorganic thin film packaging layers are disposed on the first layer of the inorganic thin film packaging layers in sequence; each layer of the organic thin film packaging layers is disposed between two adjacent layers of the inorganic thin film packaging layers correspondingly, each layer of the organic thin film packaging layers is distributed with the desiccant particles; wherein a distribution density of the desiccant particles in each layer of the organic thin film packaging layers increases along a direction away from the organic electroluminescent device, or the distribution density of the desiccant particles in each layer of the organic thin film packaging layers is even.

2. The organic electroluminescent display device according to claim 1, wherein the distribution density of the desiccant particles in an ith layer of the organic thin film packaging layers is larger than the distribution density of the desiccant particles in an (i?1)th layer of the organic thin film packaging layers, 1?i?N?1.

3. The organic electroluminescent display device according to claim 1, wherein a surface of an Nth layer of the inorganic thin film packaging layers is processed by surface roughness and/or chemical modification.

4. A manufacturing method of an organic electroluminescent display device, wherein the manufacturing method comprising: providing a substrate; forming an organic electroluminescent device on the substrate; and forming a thin film packaging structure to package the organic electroluminescent device with desiccant particles on the substrate; wherein a method of forming the thin film packaging structure comprises: forming a first layer of inorganic thin film packaging layers on the substrate to cover and package the organic electroluminescent device; and forming N layers of inorganic thin film packaging layers and N?1 layers of organic thin film packaging layers on the first layer of the inorganic thin film packaging layers by a manner of alternate stack of organic thin film packaging layer/inorganic thin film packaging layer; each layer of the organic thin film packaging layers is distributed with the desiccant particles, N?2 and N is a positive integer; wherein during forming each layer of the organic thin film packaging layers, a distribution density of the desiccant particles in each layer of the organic thin film packaging layers is increased along a direction away from the organic electroluminescent device, or the distribution density of the desiccant particles in each layer of the organic thin film packaging layers is even.

5. The manufacturing method according to claim 4, wherein the distribution density of the desiccant particles in an ith layer of the organic thin film packaging layers is made to be larger than the distribution density of the desiccant particles in an (i?1)th layer of the organic thin film packaging layers, 1?i?N?1.

6. The manufacturing method according to claim 4, wherein the manufacturing method further comprises processing a surface of an Nth layer of the inorganic thin film packaging layers by surface roughness and/or chemical modification.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Aspects, features and advantages of embodiments of the disclosure will be clearer by illustration with reference to accompanying drawings.

(2) FIG. 1 is a structural schematic view of an organic electroluminescent display device according to an embodiment of the disclosure.

(3) FIG. 2 is a flowchart of a manufacturing method of an organic electroluminescent display device according to an embodiment of the disclosure.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

(4) Embodiments of the disclosure will be described in detail with reference to the accompanying drawings as follows. However, the disclosure can be implemented in various forms, and the disclosure should be explained beyond the concrete embodiments. On the contrary, the provided embodiments are for illustrating the principle and practical application of the disclosure, so that a person skilled in the art can understand various embodiments of the disclosure and modifications adapted to specific applications.

(5) In the figures, thicknesses of layers and regions are exaggerated to clarify devices. An identical label represents the same device in the embodiments and figures.

(6) It should further be known that when a layer, a film, a region or an element of a base is described to be on another element, the element can be on another element directly, or it can also exist a middle element. Optionally, when the element is described to be on another element directly, the middle element is absent.

(7) FIG. 1 is a structural schematic view of an organic electroluminescent display device according to an embodiment of the disclosure.

(8) Referring to FIG. 1, the organic electroluminescent display device according to the embodiment of the disclosure includes a substrate 100, an organic electroluminescent device 200 and a thin film packaging structure 300.

(9) Specifically, the substrate 100 can be a rigid substrate made by glass, ceramic or metal, or a flexible substrate made out of at least one of polyethylene terephthalate, polyethylene naphthalate, polyimide and so on.

(10) The organic electroluminescent device 200 is formed on the substrate 100. As an embodiment of the disclosure, the organic electroluminescent device 200 includes a bottom electrode, a hole injection layer (HIL), a hole transport layer (HTL), an emitting layer (EML), an electron transport layer (ETL), an electron injection layer (EIL) and a top electrode overlapped in a bottom-up sequence. But the organic electroluminescent device of the disclosure is not restricted to the disclosed structure, which can also be other proper structures.

(11) The thin film packaging structure 300 includes N layers of inorganic thin film packaging layers 310 and N?1 layers of organic thin film packaging layers 320. N?2 and N is a positive integer. A first layer of the inorganic thin film packaging layers 310 is disposed on the substrate 100, covers and packages the organic electroluminescent device 200. The other inorganic thin film packaging layers 310 and N?1 layers of the organic thin film packaging layers 320 are formed on the first layer of the inorganic thin film packaging layers 310 by a manner of alternate stack of organic thin film packaging layer/inorganic thin film packaging layer. Moreover, the inorganic thin film packaging layers 310 can be made out of silicon oxide, silicon nitride, aluminum oxide, titanium dioxide or graphene, and the thickness thereof is 100?2000 nm. The organic thin film packaging layers 320 can be made out of acrylic, epoxy resin or silicon resin, and the thickness thereof is 20?5000 nm.

(12) In the embodiment, in order to enhance the absorption of external vapor in the thin film packaging structure 300, the organic thin film packaging layers 320 are distributed with desiccant particles 321, and the distribution density of the desiccant particles 321 in each layer of the organic thin film packaging layers 320 is uneven. The distribution density of the desiccant particles 321 in each layer of the organic thin film packaging layers 320 increases along a direction away from the organic electroluminescent device 200. However, it should be understood that the distribution density of the desiccant particles 321 in each layer of the organic thin film packaging layers 320 can be even. The desiccant particles 321 can be actively metallic particles, actively metallic oxide particles, actively nonmetallic oxide particles (i.e. P.sub.2O.sub.5 particles) or hygroscopic salt particles whose particle size is 1?200 nm.

(13) Furthermore, in order to further enhance the absorption of external vapor in the thin film packaging structure 300, the distribution density of the desiccant particles 321 in an ith layer of the organic thin film packaging layers 320 is larger than the distribution density of the desiccant particles 321 in an (i?1)th layer of the organic thin film packaging layers 320. 1?i?N?1 and i is a positive integer.

(14) Furthermore, a surface of an Nth layer of the inorganic thin film packaging layers 310 is processed by surface roughness and/or chemical modification.

(15) The surface roughness process is a physical or chemical method of processing the surface of materials to form surface roughness. The specific processing method can be processing the surface of materials in a dry etching cavity by plasma treatment of argon gases.

(16) The chemical modification process is a process of substituting hydrophobic groups for some hydrophilic groups of the basal material by a method such as absorption, coating, polymerization, chemical reactions or so on to improve the hydrophobic property of the material, such as fluorination or silicification. The concentration of the superficially chemical modification (i.e. fluoride concentration after fluorination or silicon concentration after silicification) is inversely proportional to the surface tension. The specific method can be processing the surface of materials by fluorination of carbon tetrafluoride (CF.sub.4) in the dry etching cavity.

(17) FIG. 2 is a flowchart of a manufacturing method of an organic electroluminescent display device according to an embodiment of the disclosure.

(18) Referring to FIG. 2, along with FIG. 1, the manufacturing method of an organic electroluminescent display device according to the embodiment of the disclosure includes steps:

(19) S210, providing the substrate 100.

(20) S220, forming the organic electroluminescent device 200 on the substrate 100.

(21) As an embodiment of the disclosure, the method of forming the organic electroluminescent device 200 includes forming the bottom electrode, the hole injection layer (HIL), the hole transport layer (HTL), the emitting layer (EML), the electron transport layer (ETL), the electron injection layer (EIL) and the top electrode in a bottom-up sequence. But the formation method of the organic electroluminescent device of the disclosure is not restricted to the disclosed formation method, which can also be other proper formation methods.

(22) S230, forming the thin film packaging structure 300 to cover and package the organic electroluminescent device 200 on the substrate 100.

(23) The method of forming the thin film packaging structure 300 includes forming a first layer of the inorganic thin film packaging layers 310 on the substrate 100 to cover and package the organic electroluminescent device 200. Specifically, the first layer of the inorganic thin film packaging layers 310 can be produced by plasma enhanced chemical vapor deposition (PECVD) or atomic layer deposition (ALD).

(24) Subsequently, N?1 layers of the inorganic thin film packaging layers 310 and N?1 layers of the organic thin film packaging layers 320 on the first layer of the inorganic thin film packaging layers 310 by a manner of alternate stack of organic thin film packaging layer/inorganic thin film packaging layer. Each layer of the organic thin film packaging layers 320 is distributed with the desiccant particles 321. N?2 and N is a positive integer.

(25) Specifically, a second layer of the inorganic thin film packaging layers 310 to an Nth layer of the inorganic thin film packaging layers 310 can be produced by plasma enhanced chemical vapor deposition (PECVD) or atomic layer deposition (ALD). Moreover, each layer of the organic thin film packaging layers 320 is produced by a method such as ink-jet printing (IJP), nozzle printing or spin coating utilizing organic solution mixed with the desiccant particles 321.

(26) In the embodiment, as the distribution density of the desiccant particles 321 in each layer of the organic thin film packaging layers 320 increases along a direction away from the organic electroluminescent device 200, in forming each layer of the organic thin film packaging layers 320, each layer of the organic thin film packaging layers 320 can be formed by adopting the organic solution mixed with different numbers of desiccant particles 321.

(27) Furthermore, the number of the desiccant particles 321 mixed in the organic solution to form the ith layer of the organic thin film packaging layers 320 is larger than the number of the desiccant particles 321 mixed in the organic solution to form the (i?1)th layer of the organic thin film packaging layers 320.

(28) S240, processing a surface of an Nth layer of the inorganic thin film packaging layers 310 by surface roughness and/or chemical modification. It should be illustrated that as another embodiment of the disclosure, the step S240 can be skipped.

(29) Overall, the organic electroluminescent display device of the embodiments of the disclosure and the manufacturing method thereof can reduce the influence of vapor attached on surfaces of multiple layers of packaging thin films or infiltrated in the multiple layers of packaging thin films on the packaged organic electroluminescent device, so as to prolong the service life of the organic electroluminescent device.

(30) Although the disclosure is illustrated with reference to specific embodiments, a person skilled in the art should understand that various modifications on forms and details can be achieved within the spirit and scope of the disclosure limited by the claims and the counterpart.