Hall current plasma source having a center-mounted cathode or a surface-mounted cathode
10269526 ยท 2019-04-23
Assignee
Inventors
- Rafael A. Martinez (Redmond, WA, US)
- John D. Williams (Fort Collins, CO, US)
- Joel A. Moritz, Jr. (Fort Collins, CO, US)
- Casey C. Farnell (Fort Collins, CO, US)
Cpc classification
F03H1/0075
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
International classification
Abstract
A miniature Hall current plasma source apparatus having magnetic shielding of the walls from ionized plasma, an integrated discharge channel and gas distributor, an instant-start hollow cathode mounted to the plasma source, and an externally mounted keeper, is described. The apparatus offers advantages over existing other Hall current plasma sources having similar power levels, including: lower mass, longer lifetime, lower part count including fewer power supplies, and the ability to be continuously adjustable to lower average power levels using pulsed operation and adjustment of the pulse duty cycle. The Hall current plasma source can provide propulsion for small spacecraft that either do not have sufficient power to accommodate a propulsion system or do not have available volume to incorporate the larger propulsion systems currently available. The present low-power Hall current plasma source can be used to provide energetic ions to assist the deposition of thin films in plasma processing applications.
Claims
1. A Hall current plasma source, comprising: a cylindrical magnetizable core having a first end, a second end, and a first axis, said cylindrical magnetizable core having an outer surface and a channel therethrough between the first end and the second end along the first axis; a conducting wire coil wound around the outer surface of said cylindrical magnetizable core; a first cylindrical magnetic screen having a second axis collinear with the first axis enclosing said conducting wire coil, said first cylindrical magnetic screen having an outer diameter; a hollow cathode discharge apparatus adapted to ionize a first chosen gas, comprising: a tube disposed in the channel of said cylindrical magnetizable core and electrically insulated from the cylindrical magnetizable core, the tube having a first end and a second end and an inside surface having an insert of low-work-function material attached to the inside surface of said tube, the first end of said tube adapted to receive the first chosen gas; and a keeper element having a hole therethrough for permitting the first chosen gas from said tube to pass therethrough, said keeper element being electrically isolated from said tube; a second cylindrical magnetic screen having a third axis collinear with the first axis, and an inner diameter which is larger than the outer diameter of said first cylindrical magnetic screen, forming an annular region therebetween; at least one cylindrical anode band disposed in the annular region; an annular ion channel having an open end and a closed end formed in the annular region adapted to electrically isolate said first cylindrical magnetic screen and said second cylindrical magnetic screen from said at least one cylindrical anode band; and a gas plenum adapted to receive a second chosen gas and for distributing the second chosen gas into said annular ion channel.
2. The Hall current plasma source of claim 1, further comprising a flat end plate having a first side and an opposing second side, the first end of the cylindrical magnetizable core being attached to the second side of the flat end plate, wherein said flat end plate comprises magnetizable material.
3. The Hall current plasma source of claim 1, wherein said annular ion channel is fabricated from materials chosen from polycarbonate, polyether ether ketone, PEEK, graphite, boron nitride, and petalite ceramic.
4. The Hall current plasma source of claim 1, wherein said low-work-function material comprises 12CaO-7Al.sub.2O.sub.3.
5. The Hall current plasma source of claim 1, wherein the first chosen gas and the second chosen gas comprise the same gas.
6. The Hall current plasma source of claim 1, wherein the annular ion channel is tapered such that it is wider toward the open end thereof.
7. A Hall current plasma source, comprising: a cylindrical magnetizable core having a first end and a second end and a first axis, said cylindrical magnetizable core having an outer surface; a conducting wire coil wound around the outer surface of said cylindrical magnetizable core; a first cylindrical magnetic screen having a second axis collinear with the first axis enclosing said conducting wire coil, said first cylindrical magnetic screen having an outer diameter; a second cylindrical magnetic screen having a third axis collinear with the first axis, and an inner diameter which is larger than the outer diameter of said first cylindrical magnetic screen, forming an annular region therebetween; at least one cylindrical anode band disposed in the annular region; an annular ion channel having an open end and a closed end formed in the annular region adapted to electrically isolate said first cylindrical magnetic screen and said second cylindrical magnetic screen from said at least one cylindrical anode band; a gas plenum adapted to receive a first chosen gas and for distributing the first chosen gas into said annular ion channel; and a hollow cathode discharge apparatus for ionizing a second chosen gas disposed on or above the second end of said cylindrical magnetizable core.
8. The Hall current plasma source of claim 7, wherein the annular ion channel is tapered such that it is wider toward the open end thereof.
9. The Hall current plasma source of claim 7, wherein said hollow cathode discharge apparatus comprises: a base member having an outside surface and an inside surface, and an inlet therethrough for permitting the second chosen gas to flow; a low-work function material or cathode instant start material; an electrical insulator positioned between the inside surface of said base member and said low-work function material and through which the second chosen gas flows around said low-work function material; a keeper having a hole therethrough through which the second chosen gas flows, and having an outer surface; second electrical insulator positioned adjacent to at least a portion of the outer surface of said keeper; and a cover member forming a chamber with said base member and having an opening therein facing said low-work function material, said second electrical insulator, said low-work function material, and at least a portion of said keeper positioned in said chamber; wherein the second chosen gas is flowed around said low-work function material and between said low-work function material and said keeper, and through the hole in said keeper to the outside of said chamber.
10. The Hall current plasma source of claim 9, further comprising radiation shielding surrounding said low-work function material.
11. The Hall current plasma source of claim 9, wherein said low-work function material comprises 12CaO-7Al.sub.2O.sub.3.
12. The Hall current plasma source of claim 7, wherein said hollow cathode discharge apparatus comprises: a base member having an outside surface and an inside surface; a low-work function material or cathode instant start material; an electrical insulator positioned between the inside surface of said base member and said low-work function material; a keeper having a hole therethrough; second electrically insulating material covering at least a portion of the outer surface of said keeper; and a cover member having an inlet therethrough for permitting the second chosen gas to flow, forming a chamber with said base member, and having an opening therein facing said low-work function material, said second electrical insulator, said low-work function material, and at least a portion of said keeper positioned in said chamber; wherein the second chosen gas is flowed around said low-work function material and between said low-work function material and said keeper, and through the hole in said keeper to the outside of said chamber.
13. The Hall current plasma source of claim 12, further comprising radiation shielding surrounding said low-work function material.
14. The Hall current plasma source of claim 12, wherein the low-work function material comprises 12CaO-7Al.sub.2O.sub.3.
15. A Hall current plasma source, comprising: a cylindrical magnetizable core having an outer surface and a first axis; a conducting wire coil wound around the outer surface of said cylindrical magnetizable core; a first cylindrical magnetic screen having a second axis collinear with the first axis enclosing said conducting wire coil, said first cylindrical magnetic screen having an outer diameter; a second cylindrical magnetic screen having a third axis collinear with the first axis, and an inner diameter which is larger than the outer diameter of said first cylindrical magnetic screen, forming an annular region therebetween; at least one cylindrical anode band disposed in the annular region, and in series electrical connection with said conducting wire coil; a keeper; a solenoid operated gas valve; a single electrical power supply having a positive terminal and a negative terminal; an electrical switch in series electrical connection with said conducting wire coil not in series electrical connection with said at least one cylindrical anode band, said keeper through a resistive element, said solenoid of said gas valve, and in series electrical connection with the positive terminal of said single electrical power supply; a cathode in series electrical communication with the negative terminal of said single electrical power supply; and a capacitor in parallel electrical connection with the single electrical power supply, an impedance element electrically coupled between a first terminal of the capacitor and the positive terminal of the single electrical power supply, wherein the first terminal of the capacitor is electrically coupled to the electrical switch and the positive terminal of the single electrical power supply is electrically coupled through the impedance element to the electrical switch.
16. The Hall current plasma source of claim 15, wherein said single electrical power supply comprises a solar panel.
17. The Hall current plasma source of claim 15, wherein said capacitor, once charged, is effective for initiating a discharge between said anode and said metal cathode.
18. The Hall current plasma source of claim 15, further comprising at least one additional solenoid operated gas valve in parallel with said solenoid operated gas valve.
19. The Hall current plasma source of claim 15, wherein said cathode comprises a tube containing a low-work function electride material.
20. The Hall current plasma source of claim 19, wherein said low-work-function electride material comprises 12CaO-7Al.sub.2O.sub.3.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
(1) The accompanying drawings, which are incorporated in and form a part of the specification, illustrate the embodiments of the present invention and, together with the description, serve to explain the principles of the invention. In the drawings:
(2)
(3)
(4)
(5)
(6)
DESCRIPTION
(7) A long life miniature Hall current plasma source having a surface mounted hollow cathode is described. Hall current plasma sources when used on satellites are known as Hall thrusters. Hall current plasma sources create energetic ions in the 50 eV to 600 eV range at current density levels three to ten times higher than comparably sized gridded ion sources. As such, Hall current plasma sources may also serve as an ion assist source for thin film deposition systems.
(8) Long life may be attributable to magnetically keeping electrons and ions away from the walls to reduce erosion thereof. In one embodiment of the present invention, the current plasma source includes a 1/16 o.d., heaterless, instant-start electride hollow cathode mounted along the plasma source centerline, a location demonstrated to improve performance in higher power Hall current plasma sources. Although an instant-start electride hollow cathode is used in the source, other instant and quickly starting cathodes can be utilized. For example, commercially available hollow cathodes provide instant starting using bare tantalum foil or similar inserts. The chosen cathode diameter disposed inside the inner core opening of the thruster permits proper thruster scaling to be maintained for the desired low power operating condition without saturating the magnetic material surrounding the cathode. Scaling for a Hall current plasma source is based partially on achieving a desired power and current density in the discharge channel at a given operating condition without saturating the magnetic material surrounding the cathode. As the scale of a Hall thruster is reduced to the sub-7 cm channel diameter regime, the increase in the thruster surface-to-volume ratio significantly contributes to the nonlinear scaling of miniature Hall current plasma sources.
(9) Additionally, no scaling laws exist yet for magnetically shielded Hall current plasma sources; therefore, a proven scaling method for conventional Hall current plasma sources was applied with slight modifications to account for the larger surface-to-volume ratio and the effect of the magnetic shielding topography on the discharge channel wall profile (that is, as an example, the channel walls were chamfered to follow the field lines). Scaling relations relate the mean channel diameter, the channel width, the channel length, the discharge voltage, and the flow rate (or particle density). Data for these parameters for various thrusters were used to select these parameters for the present Hall current plasma source (See, e.g., Andrey A. Shaqayda, On Scaling of Hall Effect Thrusters, IEEE Transactions on Plasma Science 43, No. 1 (2015): 12-28).
(10) A Hall current plasma source can be designed with a larger discharge-channel width relative to the channel-outer diameter to improve performance and increase efficiency for a small Hall current plasma source with a high surface-to-volume ratio. In order to prevent saturation of the magnetic material in the inner core, it is advantageous to increase the inner core diameter, which requires that the source dimensions be expanded radially outward. This may lead to distortion of the desired magnetic field topography in the channel. A larger diameter Hall current plasma source will not perform well at low power (<400 W) due to poor electrical and propellant utilization efficiencies. The present Hall current plasma source retains efficiency at low power (beyond state-of-the-art thrusters) by making use of the efficiency improvement enabled by positioning the cathode along the centerline. In addition, 3D printing a plurality of small holes in a gas distributor, as opposed to drilling holes for flow passage, results in more uniform gas flow distribution around the channel that also contributes to higher performance.
(11) Reference will now be made in detail to the present embodiments of the invention, examples of which are illustrated in the accompanying drawings. In the FIGURES, similar structures will be identified using identical reference characters. It will be understood that the FIGURES are for the purpose of describing particular embodiments of the invention and are not intended to limit the invention thereto. Turning now to
(12) Hollow cathode discharge apparatus, 38, includes hollow metal tube, 40, having first end, 42, and second end, 44, and an inside surface with a low work function having, for example, a piece of 12CaO-7Al.sub.2O.sub.3 electride material mounted on a piece of graphite attached to the inner surface of metal tube 40, not shown in
(13) Second cylinder, 56, having a third axis collinear with the first axis, includes second cylindrical magnetizable screen, 58, having a fourth axis collinear with the first axis, and an inner diameter which is larger than the outer diameter of first cylindrical magnetic screen 36, forming an annular region, 60, therebetween; second conducting wire coil, 62, disposed around second magnetic screen 58; and magnetizable outer cylinder, 64, having a fifth axis collinear with the first axis surrounding second wire coil 62, outer cylinder 64 having first end, 66, and second end, 68, first end 66 being mounted to end plate 12, and outer surface 69. Second end 68 of outer cylinder 64 is formed into circular pole piece, 70, which faces pole piece 34 formed from the second end of core 20 across annular region 60 (See, e.g., loannis G. Mikellides et al., Magnetic Shielding of a Laboratory Hall Thruster, I. Theory and Validation, Journal of Applied Physics 115, No. 4 (2014): 043303).
(14) At least one cylindrical anode band, 72, is disposed in annular region 60, supported by cylindrical ion channel, 74, formed on both sides of annular region 60, and adapted to electrically insulate first magnetic screen 36 and second magnetic screen 58 from the least one anode band. Ion channel 74 is chamfered or tapered at its downstream or open end such that magnetic field lines follow the shape of the chamfer. The chamfer does not affect the field lines; rather, it is shaped to follow the field lines, since it is known that actual thrusters are eroded to this shape after which further erosion ceases. Ion channel 74 may be made from polycarbonate, polyether ether ketone, PEEK, graphite, boron nitride, or petalite ceramic, as examples. When using insulating channel materials a conductive anode is needed. Shown also in
(15) Power supply, 84, provides current to first conducting wire coil 32, and power supply, 86, supplies current to second conducting wire coil 62 for controlling the magnetic fields of the Hall current plasma source. Nonmagnetic thin spool, 88, may be provided to facilitate the winding of the second conducting wire coil. Power supply, 90, provides a selected voltage between anode band 72 and metal tube 40, for controlling the discharge of the Hall current plasma source, while power supply, 92, provides a chosen current for controlling the plasma discharge between the external keeper 52 and the hollow cathode discharge apparatus 38. Hollow cathode discharge apparatus 38, based on the mayenite form of electride material, is described in detail in U.S. Pat. No. 9,305,733, which issued on Apr. 5, 2016, and in U.S. Pat. No. 9,552,952, which issued on Jan. 24, 2017, the entire contents of both patents hereby being specifically incorporated by reference herein for all that they disclose and teach. The '733 and '952 patents describe electride hollow cathodes and instant starting of electride cathodes. As mentioned above, other hollow cathodes can be started instantly and can be used in hollow cathode discharge apparatus 38. However, in what follows, we describe only the electride hollow cathode.
(16) Turning now to
(17) Alternative external keeper designs for improving the utilization of the gas flow directed through the cathode and external keeper are shown. Additional description may be found in the '733 and '952 patents.
(18)
(19) In another embodiment of the hollow cathode apparatus 38 hereof,
(20) The hollow cathode embodiments 38 illustrated in
(21)
(22) To initiate operation of the externally surface-mounted cathode assembly, high voltage is applied between the insert and keeper with the positive terminal of power supply, 92, connected to the keeper lead 112b, and the negative terminal connected to the insert lead 112a, and gas flow is introduced to the gas tube. Either steady gas flow can be applied, or a short gas burst of temporary high gas flow followed by a lower, steady gas flow, can be used to initiate an arc discharge between the insert and keeper. As in the center-mounted hollow cathode assemblies shown in
(23) Current Hall current plasma sources use one power supply for each of the inner and outer magnet coils, one for the cathode heater, one for the cathode keeper, and one for the thruster anode for a total of five power supplies. The heater power supply provides heater power to raise the temperature of a cathode to a point where it will start. The use of hollow cathode assemblies that can be instantly started in accordance with the teachings of the present invention eliminates the need for a heater power supply. The keeper power supply is used to ignite an arc discharge between the insert and the keeper disposed immediately downstream of the cathode and the insert, and the anode power supply initiates a discharge between the cathode and the anode of the Hall current plasma source. One of the two power supplies (keeper or heater) and the cathode gas flow in a conventional Hall current plasma source must always be on, but the other could be switched on and off to pulse the cathode on and off, thereby allowing the Hall current plasma source to be operated in a pulsed, on and off manner. Use of instant start hollow cathodes permits the keeper-biasing power source to be switched on in order to switch the hollow cathode discharge on. The gas flow may also be switched off during the off portion of the pulsed Hall current plasma source operation when using an instant-start hollow cathode. The instant start capability of the present hollow cathode assembly, along with other modifications described below enables further simplification of the Hall current plasma source power supply system by reducing the number of power sources to a single DC power source for the cathode, keeper, magnet coils, and anode loads.
(24)
(25) The foregoing description of the invention has been presented for purposes of illustration and description and is not intended to be exhaustive or to limit the invention to the precise form disclosed, and obviously many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical application to thereby enable others skilled in the art to best utilize the invention in various embodiments and with various modifications as are suited to the particular use contemplated. It is intended that the scope of the invention be defined by the claims appended hereto.