Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit

Abstract

An imaging optical unit for projection lithography has a plurality of mirrors for guiding imaging light from an object field in an object plane into an image field in an image plane along an imaging light beam path. At least two of the mirrors are embodied as GI mirrors. Exactly one stop serves to predefine at least one section of an outer marginal contour of a pupil of the imaging optical unit. The stop is arranged spatially in front of a penultimate mirror in the imaging light beam path. This results in an imaging optical unit that is well defined with regard to its pupil and is optimized for projection lithography.

Claims

1. An imaging optical unit, comprising: a plurality of mirrors configured to guide imaging light from an object field in an object plane into an image field in an image plane along an imaging light beam path; and exactly one stop configured to define an entire outer marginal contour of a pupil of the imaging optical unit, wherein: the plurality of mirrors comprises first and second mirrors; the first mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the first mirror at an angle of incidence that is greater than 60; the second mirror is configured so that, during use of the imaging optical unit, the imaging light is incident on the second mirror at an angle of incidence that is greater than 60; in the imaging light beam path, the stop is in front of a penultimate mirror of the plurality of mirrors; the object field is spanned by a first Cartesian object field coordinate and a second Cartesian object field coordinate; a third Cartesian normal coordinate is perpendicular to both the first and second Cartesian object field co-ordinates; the imaging optical unit is configured so that, during use of the imaging optical unit: the imaging light extends in a first imaging light plane in which an imaging light main propagation direction lies; and the imaging light extends in a second imaging light plane in which the imaging light main propagation direction lies; the second imaging light plane is perpendicular to the first imaging light plane; a number of first plane intermediate images of the imaging light which extend in the first imaging light plane is different from a number of second plane intermediate images of imaging light which extend in the second imaging light plane.

2. The imaging optical unit of claim 1, wherein the plurality of mirrors comprises a last mirror in the imaging beam path which comprises an opening configured to pass imaging light during use of the imaging optical unit.

3. The imaging optical unit of claim 2, wherein the penultimate mirror in the imaging light beam path does not have an opening configured to pass imaging light during use of imaging optical unit.

4. The imaging optical unit of claim 3, wherein the stop is between the first and second mirrors.

5. The imaging optical unit of claim 4, wherein the plurality of mirrors comprises more than six mirrors, and the stop is between the fifth and sixth mirrors in the imaging light beam path.

6. The imaging optical unit of claim 5, wherein the stop has a 3D profile of a stop marginal contour.

7. The imaging optical unit of claim 6, wherein at least one of the intermediate images is between the first and second mirrors in the imaging light beam path.

8. The imaging optical unit of claim 7, wherein the plurality of mirrors comprises a mirror having an opening configured to pass imaging light during use of the imaging optical unit, and at least one of the intermediate images is arranged in a region of the opening.

9. The imaging optical unit of claim 8, wherein an entrance pupil of the imaging optical unit is upstream of the object field in the imaging light beam path.

10. The imaging optical unit of claim 9, wherein the pupil of the imaging optical unit has an obscuration, and provision is made of a stop for predefining at least one portion of an inner marginal contour of the obscuration of the pupil.

11. The imaging optical unit of claim 1, wherein the penultimate mirror in the imaging light beam path does not have an opening configured to pass imaging light during use of imaging optical unit.

12. The imaging optical unit of claim 1, wherein the stop is between the first and second mirrors.

13. The imaging optical unit of claim 1, wherein the plurality of mirrors comprises more than six mirrors, and the stop is between the fifth and sixth mirrors in the imaging light beam path.

14. The imaging optical unit of claim 1, wherein the stop has a 3D profile of a stop marginal contour.

15. The imaging optical unit of claim 1, wherein at least one of the intermediate images is between the first and second mirrors in the imaging light beam path.

16. The imaging optical unit of claim 1, wherein the plurality of mirrors comprises a mirror having an opening configured to pass imaging light during use of the imaging optical unit, and at least one of the intermediate images is arranged in a region of the opening.

17. The imaging optical unit of claim 1, wherein an entrance pupil of the imaging optical unit is upstream of the object field in the imaging light beam path.

18. The imaging optical unit of claim 1, wherein the pupil of the imaging optical unit has an obscuration, and provision is made of a stop for predefining at least one portion of an inner marginal contour of the obscuration of the pupil.

19. An optical system, comprising: an imaging optical unit according to claim 1; and an illumination optical unit configured to illuminate the object field with the imaging light.

20. An apparatus, comprising: an imaging optical unit according to claim 1; an illumination optical unit configured to illuminate the object field with the imaging light; and an EUV light source, wherein the apparatus is a projection exposure apparatus.

21. A method of using a projection exposure apparatus comprising an illumination optical unit and an imaging optical unit, the method comprising: using the illumination optical unit to illuminate a structure of a reticle; and using the imaging optical unit to project the illuminated structure of the reticle onto a light-sensitive material, wherein the imaging optical unit is an imaging optical unit according to claim 1.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) Exemplary embodiments of the disclosure are explained in greater detail below with reference to the drawing, in which:

(2) FIG. 1 schematically shows a projection exposure apparatus for EUV microlithography;

(3) FIG. 2 shows, in a meridional section, an embodiment of an imaging optical unit which can be used as a projection lens in the projection exposure apparatus according to FIG. 1, wherein an imaging beam path for chief rays and for an upper coma ray and a lower coma ray of a plurality of selected field points is depicted;

(4) FIG. 3 shows a view of the projection optical unit according to FIG. 2, according to the viewing direction III in FIG. 2;

(5) FIG. 4 shows plan views of marginal contours of optically used surfaces of the mirrors of the imaging optical unit according to FIG. 2;

(6) FIGS. 5 and 6 show, in illustrations similar to FIGS. 2 and 3, a further embodiment of an imaging optical unit, usable as a projection lens in the projection exposure apparatus according to FIG. 1;

(7) FIG. 7 shows a plan view of an inner stop contour of an aperture stop of the imaging optical unit according to FIG. 5;

(8) FIG. 8 shows a plan view of an outer stop contour of an obscuration stop of the imaging optical unit according to FIG. 5; and

(9) FIG. 9 shows plan views of marginal contours of optically used surfaces of the mirrors of the imaging optical unit according to FIG. 5.

DETAILED DESCRIPTION

(10) A microlithographic projection exposure apparatus 1 has a light source 2 for illumination light or imaging light 3. The light source 2 is an EUV light source, which produces light in a wavelength range of e.g. between 5 nm and 30 nm, in particular between 5 nm and 15 nm. In particular, the light source 2 may be a light source with a wavelength of 13.5 nm or a light source with a wavelength of 6.9 nm. Other EUV wavelengths are also possible. In general, even arbitrary wavelengths are possible for the illumination light 3 guided in the projection exposure apparatus 1, for example visible wavelengths or else other wavelengths which may find use in microlithography (for example, DUV, deep ultraviolet) and for which suitable laser light sources and/or LED light sources are available (e.g. 365 nm, 248 nm, 193 nm, 157 nm, 129 nm, 109 nm). A beam path of the illumination light 3 is depicted very schematically in FIG. 1.

(11) An illumination optical unit 6 serves to guide the illumination light 3 from the light source 2 to an object field 4 in an object plane 5. Using a projection optical unit or imaging optical unit 7, the object field 4 is imaged into an image field 8 in an image plane 9 with a predetermined reduction scale. The projection optical unit 7 has exactly one object field 4. The projection optical unit 7 has exactly one image field 8.

(12) In order to facilitate the description of the projection exposure apparatus 1 and the various embodiments of the projection optical unit 7, a Cartesian xyz-coordinate system is indicated in the drawing, from which system the respective positional relationship of the components illustrated in the figures is evident. In FIG. 1, the x-direction runs perpendicular to the plane of the drawing into the latter. The y-direction runs toward the left, and the z-direction runs upward.

(13) The object field 4 and the image field 8 have a bent or curved embodiment, in particular a partial-ring-shaped embodiment, in the object plane 5 and in the image plane 9. Alternatively, it is also possible to embody the object field 4 and image field 8 with a rectangular shape. The object field 4 and the image field 8 have an x/y-aspect ratio of greater than 1. Therefore, the object field 4 has a longer object field dimension in the x-direction and a shorter object field dimension in the y-direction. These object field dimensions extend along the field coordinates x and y.

(14) The exemplary embodiment depicted in FIG. 2 can be used for the projection optical unit 7. The projection optical unit 7 is anamorphic, i.e. it has a different reduction scale in the x-direction (reduction scale in the xz-plane, i.e. in a first imaging light plane that is also referred to as sagittal plane) than in the y-direction (reduction scale in the yz-plane, i.e. in a second imaging light plane that is also referred to as meridional plane). The projection optical unit 7 has a reduction scale of 4 in the x-direction. The projection optical unit 7 has a reduction scale of 8 in the y-direction. Other reduction scales for the reduction in the x-direction and/or for the reduction in the y-direction are also possible, for example 4, 5 or even reduction scales that are greater than 8. In the x-direction, the projection optical unit 7 can have a reduction scale in the range between 4 and 5, for example a reduction scale in the range between 4.6 and 4.9, for example a reduction scale of 4.8. In the y-direction, the projection optical unit 7 can have a reduction scale in the range between 6 and 9, for example in the range between 7 and 8, and, in particular, in the region of 7.5. An embodiment of the projection optical unit 7 with the same reduction scales as these in, firstly, the xz-plane and, secondly, in the yz-plane is also possible.

(15) A first imaging light plane xz.sub.HR is the plane which is spanned at the respective location of the beam path of the imaging light 3 by the first Cartesian object field coordinate x and a current imaging light main propagation direction z.sub.HR. The imaging light main propagation direction z.sub.HR is the beam direction of a chief ray 16 of a central field point. As a rule, this imaging light main propagation direction z.sub.HR changes at each mirror reflection at the mirrors M1 to M10. This change can be described as a tilt of the current imaging light main propagation direction z.sub.HR about the first Cartesian object field coordinate x about a tilt angle which equals the deflection angle of this chief ray 16 of the central field point at the respectively considered mirror M1 to M10. Subsequently, the first imaging light plane xz.sub.HR is also referred to as first imaging light plane xz for simplification purposes.

(16) The second imaging light plane yz likewise contains the imaging light main propagation direction z.sub.HR and is perpendicular to the first imaging light plane xz.sub.HR.

(17) Since the projection optical unit 7 is only folded in the meridional plane yz, the second imaging light plane yz coincides with the meridional plane.

(18) In the projection optical unit 7, the image plane at 9 is tilted in relation to the object plane 5 by 11.5 about the x-axis. The image plane 9 can also be arranged parallel to the object plane 5. What is imaged by the projection optical unit 7 is a section of a reflection mask 10, also referred to as reticle, coinciding with the object field 4. The reticle 10 is carried by a reticle holder 10a. The reticle holder 10a is displaced by a reticle displacement drive 10b.

(19) The imaging by way of the projection optical unit 7 is implemented on the surface of a substrate 11 in the form of a wafer, which is carried by a substrate holder 12. The substrate holder 12 is displaced by a wafer or substrate displacement drive 12a.

(20) FIG. 1 schematically illustrates, between the reticle 10 and the projection optical unit 7, a ray beam 13 of the illumination light 3 that enters into the projection optical unit and, between the projection optical unit 7 and the substrate 11, a ray beam 14 of the illumination light 3 that emerges from the projection optical unit 7. An image field-side numerical aperture (NA) of the projection optical unit 7 is not reproduced to scale in FIG. 1.

(21) The projection exposure apparatus 1 is of the scanner type. Both the reticle 10 and the substrate 11 are scanned in the y-direction during the operation of the projection exposure apparatus 1. A stepper type of the projection exposure apparatus 1, in which a stepwise displacement of the reticle 10 and of the substrate 11 in the y-direction is effected between individual exposures of the substrate 11, is also possible. These displacements are effected synchronously to one another by an appropriate actuation of the displacement drives 10b and 12a.

(22) FIG. 2 shows the optical design of the projection optical unit 7. FIG. 2 depicts the beam path of in each case three individual rays 15 emanating from a plurality of object field points which are spaced apart from one another in the y-direction in FIG. 2. What is depicted are chief rays 16, i.e. individual rays 15 which pass through the center of a pupil in a pupil plane of the projection optical unit 7, and in each case an upper coma ray and a lower coma ray of these two object field points. Proceeding from the object field 4, the chief ray 16 of a central object field point includes an angle CRAO of 5.1 with a normal on the object plane 5.

(23) The projection optical unit 7 has an image-side numerical aperture of 0.55.

(24) An entrance pupil EP is arranged in the beam path of the imaging light 3 upstream of the object field 4. Possible positions of the entrance pupil EP above the object plane 5 with the use of a reticle 10 that transmits the imaging light 3 and below the object plane 5 with the use of a reflective reticle 10 are indicated in each case in FIG. 2. This results in a divergent course of the chief rays 16 between the object field 4 and the mirror M1.

(25) The projection optical unit 7 according to FIG. 2 has a total of ten mirrors, which are numbered consecutively by M1 to M10 in the order of the beam path of the individual rays 15, proceeding from the object field 4. The projection optical unit 7 is a purely catoptric optical unit. The imaging optical unit 7 can also have a different number of mirrors, for example four mirrors, six mirrors or eight mirrors. An odd number of mirrors is also possible in the projection optical unit 7.

(26) FIG. 2 illustrates the calculated reflection surfaces of the mirrors M1 to M10. What can be identified in the illustration according to FIG. 2 is that only a portion of these calculated reflection surfaces is used. Only this actually used region of the reflection surfaces is actually present in the real mirrors M1 to M10. These used reflection surfaces are carried in a known manner by mirror bodies (not shown).

(27) In the case of the projection optical unit 7 according to FIG. 2, the mirrors M1, M9 and M10 are embodied as normal incidence mirrors, that is to say as mirrors on which the imaging light 3 is incident with an angle of incidence that is less than 45. Overall, the projection optical unit 7 according to FIG. 2 thus has three normal incidence mirrors M1, M9 and M10. Below, these mirrors are also referred to as NI mirrors.

(28) The mirrors M2 to M8 are mirrors for grazing incidence of the illumination light 3, that is to say mirrors onto which the illumination light 3 impinges with angles of incidence that are greater than 60. A typical angle of incidence of the individual rays 15 of the imaging light 3 on the mirrors M2 to M8 for grazing incidence lies in the region of 80. Overall, the projection optical unit 7 according to FIG. 2 has exactly seven mirrors M2 to M8 for grazing incidence. Below, these mirrors are also referred to as GI mirrors.

(29) The mirrors M2 to M8 reflect the imaging light 3 such that the angles of reflection of the individual rays 15 on the respective mirrors M2 to M8, and hence the deflection effect of the mirrors M2 to M8, add up.

(30) The mirrors M1 to M10 carry a coating that optimizes the reflectivity of the mirrors M1 to M10 for the imaging light 3. The coating can be, in particular for the GI mirrors, a ruthenium coating, a molybdenum coating or a molybdenum coating with a topmost layer of ruthenium. Other coating materials can also be used. A coating including for example a layer of molybdenum or ruthenium can be used in the case of the grazing incidence mirrors M2 to M8. The highly reflecting layers, in particular of the mirrors M1, M9 and M10 for normal incidence, can be configured as multi-ply layers, wherein successive layers can be manufactured from different materials. Alternating material layers can also be used. A typical multi-ply layer can have fifty bilayers, respectively made of a layer of molybdenum and a layer of silicon.

(31) Information concerning reflection at a GI mirror (grazing incidence mirror) can be found in WO 2012/126867 A. Further information concerning the reflectivity of NI mirrors (normal incidence mirrors) can be found in DE 101 55 711 A.

(32) An overall reflectivity or system transmission of the projection optical unit 7, emerging as a product of the reflectivities of all mirrors M1 to M10 of the projection optical unit 7, is approximately R=7.8%.

(33) The mirror M10, that is to say the last mirror upstream of the image field 8 in the imaging beam path, has a passage opening 17 for the passage of the imaging light 3 which is reflected from the antepenultimate mirror M8 toward the penultimate mirror M9. The mirror M10 is used in a reflective manner around the passage opening 17. None of the other mirrors M1 to M9 has passage openings and the mirrors are used in a reflective manner in a continuous region without gaps.

(34) In the first imaging light plane xz, the projection optical unit 7 has exactly one first plane intermediate image 18 in the imaging beam path in the region of the passage of the imaging light 3 through the passage opening 17 in the mirror M10. This first plane intermediate image 18 lies between the mirrors M8 and M9 in the imaging light beam path. In the z-direction, a distance between the passage opening 17 and the image field 8 is more than four times greater than a distance between the passage opening 17 and the first plane intermediate image 18.

(35) In the second imaging light plane yz that is perpendicular to the first imaging light plane xz, i.e. in the meridional plane illustrated in FIG. 2, the imaging light 3 passes through exactly two second plane intermediate images 19 and 20. The first one of these two second plane intermediate images 19 lies in the region of the reflection of the imaging light 3 at the mirror M3 in the imaging light beam path. The other of the two second plane intermediate images 20 lies between the mirrors M6 and M7 in the imaging light beam path.

(36) The number of the first plane intermediate images, i.e. exactly one first plane intermediate image in the projection optical unit 7, and the number of the second plane intermediate images, i.e. exactly two second plane intermediate images in the projection optical unit 7, differ from one another in the projection optical unit 7. In the projection optical unit 7, this number of intermediate images differs by exactly one. The second imaging light plane yz, in which the greater number of intermediate images, namely the two second plane intermediate images 19 and 20, are present, coincides with the folding plane yz of the GI mirrors M2 to M8. This folding plane is the plane of incidence of the chief ray 16 of the central field point upon reflection at the respective GI mirror. The second plane intermediate images are not, as a rule, perpendicular to the chief ray 16 of the central field point which defines the imaging light main propagation direction z.sub.HR. An intermediate image tilt angle, i.e. a deviation from this perpendicular arrangement, is arbitrary as a matter of principle and may lie between 0 and +/89.

(37) The projection optical unit 7 has exactly one stop AS for predefining an outer marginal contour of a pupil in the region of a pupil plane 21 of the projection optical unit 7. This exactly one stop AS can predefine a section of this outer marginal contour of the pupil or predefine the entire outer marginal contour of the pupil.

(38) The stop AS is arranged spatially in front of a penultimate mirror in the imaging light beam path, i.e. upstream of the mirror M9 in the imaging light beam path. In particular, the stop AS is arranged upstream of the antepenultimate mirror M8 in the imaging light beam path. In the illustrated embodiment, the stop AS is arranged between the mirrors M5 and M6 in the imaging light beam path. The stop AS is embodied with a three-dimensional (3D) profile of the inner marginal contour. In the illustrated embodiment of the projection optical unit 7, both the stop AS and an obscuration stop of the projection optical unit 7 in each case lie on a spherical surface. Alternatively, the stop AS can have an inner marginal contour that lies in a plane; i.e., it can be embodied with a stop body with an entirely planar embodiment, the stop body having this inner stop marginal contour. In a further variant, the stop AS can be embodied with a stop body that only has a planar embodiment in sections.

(39) The locations of the intermediate images 18 to 20 on the one hand and the curvatures of the mirrors M1 to M10 on the other hand are matched to one another in such a way that, in the first imaging light plane xz.sub.HR, the pupil that is arranged between the object plane 5 and the first plane intermediate image 18 and, in the second imaging light plane yz, the pupil that lies between the two second plane intermediate images 19, 20 respectively come to rest at the location of the aperture stop AS in the region of the pupil plane 21. Hence, the single stop AS is enough to predefine the outer marginal contour of the pupil of the projection optical unit 7.

(40) At the location of the stop AS, an entire beam of the imaging light 3 is completely accessible from the outside over its entire circumference.

(41) The extent of the stop AS can be smaller in the scan direction y than in the cross scan direction x.

(42) The non-illuminated obscuration region in the system pupil, which is predefined by the obscuration stop that was already mentioned above, can be round, elliptical, square or rectangular. Moreover, this surface in the system pupil which cannot be illuminated can be decentered in the x-direction and/or in the y-direction in relation to a center of the system pupil. As an alternative to an obscuration stop having a 3D profile of the outer marginal contour, use can also be made of an obscuration stop with a different marginal contour profile or with a different stop body design, as was described above in conjunction with the aperture stop AS.

(43) The mirrors M1 to M10 are embodied as free-form surfaces which cannot be described by a rotationally symmetric function. Other embodiments of the projection optical unit 7, in which at least one of the mirrors M1 to M10 is embodied as a rotationally symmetric asphere, are also possible. It is also possible for all mirrors M1 to M10 to be embodied as such aspheres.

(44) A free-form surface can be described by the following free-form surface equation (equation 1):

(45) $\begin{matrix} Z = \frac{c_{x} x^{2} + c_{y} y^{2}}{1 + \sqrt{1 - (1 + k_{x}) {(c_{x} x)}^{2} - (1 + k_{y}) {(c_{y} y)}^{2}}} + C_{1} x + C_{2} y + C_{3} x^{2} + C_{4} xy + C_{5} y^{2} + C_{6} x^{3} + .Math. + C_{9} y^{3} + C_{10} x^{4} + .Math. + C_{12} x^{2} y^{2} + {.Math.C}_{14} y^{4} + C_{15} x^{5} + .Math. + C_{20} y^{5} + C_{21} x^{6} + .Math. + C_{24} x^{3} y^{3} + .Math. + C_{27} y^{6} + .Math. & (1) \end{matrix}$

(46) The following applies to the parameters of this equation (1):

(47) Z is the sag of the free-form surface at the point x, y, where x.sup.2+y.sup.2=r.sup.2. Here, r is the distance from the reference axis of the free-form equation (x=0; y=0).

(48) In the free-form surface equation (1), C.sub.1, C.sub.2, C.sub.3 . . . denote the coefficients of the free-form surface series expansion in powers of x and y.

(49) In the case of a conical base area, c.sub.x, c.sub.y is a constant corresponding to the vertex curvature of a corresponding asphere. Thus, c.sub.x=1/R.sub.x and c.sub.y=1/R.sub.y applies. Here, k.sub.x and k.sub.y each correspond to a conical constant of a corresponding asphere. Thus, equation (1) describes a biconical free-form surface.

(50) An alternative possible free-form surface can be generated from a rotationally symmetric reference surface. Such free-form surfaces for reflection surfaces of the mirrors of projection optical units of microlithographic projection exposure apparatuses are known from US 2007 0 058 269 A1.

(51) Alternatively, free-form surfaces can also be described with the aid of two-dimensional spline surfaces. Examples for this are Bezier curves or non-uniform rational basis splines (NURBS). By way of example, two-dimensional spline surfaces can be described by a grid of points in an xy-plane and associated z-values, or by these points and gradients associated therewith. Depending on the respective type of the spline surface, the complete surface is obtained by interpolation between the grid points using for example polynomials or functions which have specific properties in respect of the continuity and the differentiability thereof. Examples for this are analytical functions.

(52) FIG. 4 shows marginal contours of the reflection surfaces in each case impinged upon by the imaging light 3 on the mirrors M1 to M10 of the projection optical unit 7, i.e. the so-called footprints of the mirrors M1 to M10. These marginal contours are in each case depicted in an x/y-diagram, which corresponds to the local x- and y-coordinates of the respective mirror M1 to M10. Moreover, the form of the passage opening 17 is depicted in the illustration relating to the mirror M10.

(53) The two tables below summarize the parameters Maximum angle of incidence, Extent of the reflection surface in the x-direction, Extent of the reflection surface in the y-direction and Maximum mirror diameter for the mirrors M1 to M10.

(54) TABLE-US-00001 M1 M2 M3 M4 M5 Maximum angle of 11.5 86.4 80.4 82.7 81.1 incidence [] Extent of the reflec- 686.8 569.3 536.3 496.9 438.2 tion surface in the x- direction [mm] Extent of the reflec- 288.8 194.9 211.5 326.0 384.4 tion surface in the y- direction [mm] Maximum mirror 687.0 569.3 538.0 505.1 446.2 diameter [mm] M6 M7 M8 M9 M10 Maximum angle of 80.2 75.4 76.7 21.2 13.8 incidence [] Extent of the reflec- 435.3 449.7 370.3 379.0 796.9 tion surface in the x- direction [mm] Extent of the reflec- 324.5 153.2 217.1 190.0 785.4 tion surface in the y- direction [mm] Maximum mirror 457.1 449.8 370.3 379.1 801.0 diameter [mm]

(55) The mirror M10 that predefines the image-side numerical aperture has the largest maximum mirror diameter, with a diameter of 801 mm. None of the other mirrors M1 to M9 has a maximum diameter that is greater than 700 mm. Eight of the ten mirrors, namely the mirrors M2 to M9, have a maximum mirror diameter that is less than 570 mm. Five of the ten mirrors, namely the mirrors M5 to M9, have a maximum mirror diameter that is less than 460 mm.

(56) The optical design data of the reflection surfaces of the mirrors M1 to M10 of the projection optical unit 7 can be gathered from the following tables. These optical design data in each case proceed from the image plane 9, i.e. describe the respective projection optical unit in the reverse propagation direction of the imaging light 3 between the image plane 9 and the object plane 5.

(57) The first of these tables provides an overview of the design data of the projection optical unit 7 and summarizes the numerical aperture NA, the calculated design wavelength for the imaging light, the dimensions of the image field in the x-direction and y-direction, image field curvature, a wavefront aberration rms, and a stop location. This curvature is defined as the inverse radius of curvature of the field.

(58) The image field 8 has an x-extent of two-times 13 mm and a y-extent of 1.2 mm. The projection optical unit 7 is optimized for an operating wavelength of the illumination light 3 of 13.5 nm. The wavefront aberration rms is 12.8 m.

(59) The second of these tables indicates vertex point radii (Radius_x=R.sub.x, Radius_y=R.sub.y) and refractive power values (Power_x, Power_y) for the optical surfaces of the optical components. Negative radii values denote curves that are concave toward the incident illumination light 3 at the intersection of the respective surface with the considered plane (xz, yz) that is spanned by a surface normal at the vertex point with the respective direction of curvature (x,y). The two radii Radius_x, Radius_y may explicitly have different signs.

(60) The vertex points at each optical surface are defined as points of incidence of a guide ray which travels from an object field center to the image field 8 along a plane of symmetry x=0, i.e. the plane of the drawing of FIG. 2 (meridional plane).

(61) The refractive powers Power_x (P.sub.x), Power_y (P.sub.y) at the vertex points are defined as:

(62) $P_{x} = - \frac{2 \cos AOI}{R_{x}}$ $P_{y} = - \frac{2}{R_{y} \cos AOI}$

(63) Here, AOI denotes an angle of incidence of the guide ray with respect to the surface normal.

(64) The third table indicates for the mirrors M1 to M10 in mm the conic constants k.sub.x and k.sub.y, the vertex point radius R.sub.x (=Radius_x) and the free-form surface coefficients C.sub.n. Coefficients C.sub.n that are not tabulated have the value 0 in each case.

(65) The fourth table also indicates the magnitude along which the respective mirror, proceeding from a reference surface, was decentered (DCY) in the y-direction, and displaced (DCZ) and tilted (TLA, TLB, TLC) in the z-direction. This corresponds to a parallel shift and a tilting in the case of the freeform surface design method. Here, a displacement is carried out in the y-direction and in the z-direction in mm, and tilting is carried out about the x-axis, about the y-axis and about the z-axis. In this case, the angle of rotation is specified in degrees. Decentering is carried out first, followed by tilting. The reference surface during decentering is in each case the first surface of the specified optical design data. Decentering in the y-direction and in the z-direction in the object plane 5 is also specified for the object field 4. In addition to the surfaces assigned to the individual mirrors, the fourth table also tabulates the image plane as the first surface, the object plane as the last surface and a stop surface (with the stop label AS) of the stop AS.

(66) The fifth table specifies the transmission data of the mirrors M10 to M1, namely the reflectivity thereof for the angle of incidence of an illumination light ray incident centrally on the respective mirror. The overall transmission is specified as a proportional factor remaining from an incident intensity after reflection at all mirrors in the projection optical unit.

(67) The sixth table specifies an inner boundary of the stop AS as a polygonal line in local co-ordinates xyz. As described above, the stop is decentered and tilted. The respective stop type of the polygonal line indicated is also mentioned in the last column of table 6. CLA here denotes a stop boundary that is transparent inward, that is to say toward a stop center, and is blocking outward (type aperture stop). An aperture stop boundary serves to define an outer delimitation of a pupil of the projection optical unit 7. The additional obscuration stop serves to define an obscured region situated in the interior of the pupil.

(68) The obscuration stop can be arranged on the same surface, for example spherical or aspherical or a planar surface, as the aperture stop AS. Alternatively, the obscuration stop can also lie on an arrangement surface that is separate from the arrangement surface of the aperture stop AS.

(69) The seventh table specifies an outer boundary of the obscuration stop as a polygonal line in local coordinates xyz, in a manner analogous to the sixth table. As described above, the obscuration stop is also decentered and tilted. In the case described by way of the design tables, the obscuration stop is arranged on the same surface as the aperture stop.

(70) A boundary of a stop surface of the stop AS (cf., also, tables 6 and 7 for FIG. 2) emerges from intersection points on the stop surface of all rays of the illumination light 3 which, on the image side, propagate at selected field points in the direction of the stop surface with a complete image-side telecentric aperture. To predetermine the boundary of the stop surface of the stop AS, use is made of the intersection points on the stop surface of all rays of the illumination light 3 which, on the image side, propagate from the field center point in the direction of the stop surface with a complete image-side telecentric aperture. To predetermine the boundary of the obscuration stop, use is made of the intersection points 3 of all rays of the illumination light at the stop surface which, on the image side, propagate from the field center point in the direction of the stop surface with an image-side telecentric aperture, which results in a complete obscuration of the passage opening 17 of the mirror M10 for all field points.

(71) In principle, there may also be a different selection of the employed image-side field points when defining the stop. The field center point and overall field selections are the possible extreme situations in this case.

(72) When the stop is embodied as an aperture stop, the boundary is an inner boundary. In the case of an embodiment as an obscuration stop, the boundary is an outer boundary.

(73) The respective stop can lie in a plane or else have a three-dimensional embodiment. The extent of the stop can be smaller in the scan direction (y) than in the cross scan direction (x).

(74) TABLE-US-00002 Table 1 for FIG. 2 Exemplary embodiment FIG. 2 NA 0.55 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.2 mm Field curvature 0.012345 1/mm rms 12.8 ml Stop AS

(75) TABLE-US-00003 Table 2 for FIG. 2 Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] Operation M10 822.0391694 0.0023757 745.0944866 0.0027489 REFL M9 5428.3780482 0.0003684 428.1801828 0.0046709 REFL M8 682.4490198 0.0008476 10617.6367533 0.0006513 REFL M7 824.9942389 0.0007573 72426.2221876 0.0000884 REFL M6 4087.4276655 0.0001001 4166.4289960 0.0023462 REFL M5 6430.4369302 0.0000584 5962.0536517 0.0017867 REFL M4 1927998.93098 0.0000002 15936.1600783 0.0007553 REFL M3 61326.6945678 0.0000071 3872.4920654 0.0023873 REFL M2 9298.4261196 0.0000403 1252.5250662 0.0085278 REFL M1 2958.7393791 0.0006682 1235.3843127 0.0016378 REFL

(76) TABLE-US-00004 Table 3a for FIG. 2 Coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 822.03916940 5428.37804800 682.44901980 C7 7.59561009e09 1.19177033e06 5.54997227e07 C9 6.17967923e09 1.42046134e06 1.98239928e07 C10 1.167041e11 6.47623499e10 7.77846837e11 C12 7.35665349e11 4.28782292e09 6.83063172e10 C14 3.23120308e11 3.9252927e09 9.24231955e10 C16 8.03639272e15 2.16430637e12 3.54075231e13 C18 2.06825179e14 8.06283678e12 4.76535109e13 C20 1.62936876e14 5.59600456e12 4.76262966e12 C21 3.13127772e17 1.26888436e15 1.94102344e16 C23 1.85374575e16 1.38192332e14 7.92445209e16 C25 2.07270045e16 2.85005583e14 1.31972871e16 C27 6.93618689e17 4.38316209e14 2.77921488e14 C29 2.46301384e20 9.09940987e18 3.75702546e18 C31 6.41372794e20 4.5605694e17 1.30280294e18 C33 7.52551053e20 1.58013183e16 1.49190752e17 C35 2.75825038e20 7.20345575e17 1.6943071e16 C36 5.37238002e23 4.05367876e22 7.70463206e22 C38 3.95381455e22 6.83731083e20 1.96698939e20 C40 6.96244222e22 3.38190484e19 6.40290038e21 C42 5.21487827e22 7.29074558e19 1.11504556e19 C44 1.34959021e22 3.50809955e19 9.60273288e19 C46 5.91785289e26 4.58241546e23 1.26095833e23 C48 1.49617548e25 2.61245246e22 1.60323716e22 C50 2.56839452e25 1.30349394e21 2.18286385e22 C52 1.81238889e25 6.17578113e22 4.22912447e22 C54 7.35409036e26 7.03044681e21 4.72760558e21 C55 1.5007842e28 1.20610026e25 2.45668115e28 C57 6.52632447e28 2.48535225e25 7.93364406e26 C59 1.53511583e27 7.13043882e25 5.25292027e25 C61 1.68489496e27 8.22311668e24 1.33723344e24 C63 8.76982094e28 2.39063206e25 9.40665782e24 C65 1.70785567e28 5.68827539e24 5.26704248e23 C67 6.98211817e32 6.03172492e29 4.17178867e28 C69 4.7125227e31 5.01560548e27 3.16044938e27 C71 1.07904671e30 3.6564895e26 1.23790518e26 C73 1.15295936e30 1.43791476e25 3.12653239e27 C75 5.40809988e31 5.38749394e26 2.63972545e25 C77 5.74595716e32 1.17541858e24 8.9201918e25 C78 1.72065347e34 1.80558412e30 1.73387342e31 C80 2.61593158e33 6.14017128e30 1.41360533e31 C82 7.59270432e33 1.14077832e28 2.47093107e29 C84 1 .27658562e32 9.64247712e28 2.81462628e30 C86 1.16778869e32 2.81211322e27 1.02972785e27 C88 5.66756592e33 2.37387626e28 5.86153499e27 C90 1.16036421e33 4.01969657e28 8.31485561e27 C92 5.06043217e37 6.13309682e33 5.54160746e33 C94 4.38076529e37 3.69118814e32 4.91610866e32 C96 5.0293366e37 6.69529176e31 3.26156085e31 C98 1.09675852e36 4.79090217e30 2.48876295e30 C100 1.04217188e36 1.70057971e29 1.17292031e29 C102 3.05640297e37 9.11259717e30 4.02030804e29 C104 8.01140127e37 9.50716715e29 3.72614845e29 C105 2.43051957e40 1.81108887e35 1.48296038e36 C107 3.46214151e39 7.04483078e35 4.17109372e35 C109 1.133791e38 1.72065752e33 3.31038732e34 C111 2.93088638e38 2.48878155e32 3.23600692e33 C113 3.88912762e38 1.30148605e31 1.31843764e32 C115 3.1050795e38 2.35354704e31 3.60231946e32 C117 1.43129644e38 7.77010646e32 9.47529027e32 C119 2.75428522e39 7.22333019e32 6.4548391e32 C121 1.37666925e43 3.45037391e38 0 C123 4.99513875e42 6.15580923e37 0 C125 1.60772039e41 9.29396055e36 0 C127 2.91572729e41 7.44976477e35 0 C129 3.32978221e41 3.54700943e34 0 C131 2.17433993e41 8.73189441e34 0 C133 5.89068623e42 4.26657992e34 0 C135 3.91052027e43 3.02191312e33 0 C136 1.86049826e45 7.73091643e41 0 C138 2.07787002e44 8.6514443e40 0 C140 8.42360789e44 1.48526056e38 0 C142 2.15483226e43 2.6152836e37 0 C144 3.3067953e43 1.90462418e36 0 C146 3.13907312e43 6.6877486e36 0 C148 1.89667844e43 9.16712464e36 0 C150 6.71152562e44 2.56154469e36 0 C152 1.01446084e44 4.24198041e36 0

(77) TABLE-US-00005 Table 3b for FIG. 2 Coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 824.99423890 4087.42766600 6430.43693000 C7 3.1340404e07 1.35287185e07 2.62002062e08 C9 5.79256608e07 1.39363488e08 9.90693269e08 C10 1.40347959e10 1.70420567e12 4.15575016e10 C12 1.47065796e09 1.79581243e11 9.79308809e11 C14 1.3453307e09 8.23743298e11 1.99536062e13 C16 8.67891282e13 1.38567624e13 2.21691313e13 C18 8.32975575e12 1.76087962e13 2.06413215e13 C20 1.13878406e11 3.44898684e14 2.69841551e13 C21 2.34274578e18 7.01120328e17 5.85148086e16 C23 1.28381118e14 5.02897048e17 5.37230528e16 C25 4.47305169e14 3.93398589e16 3.98906992e16 C27 1.69149633e15 9.860191e17 6.42052433e16 C29 7.08200417e18 3.02460634e19 7.28197823e19 C31 6.99791979e17 1.06124123e18 8.41172933e19 C33 9.18154271e17 4.36407254e19 1.55913103e18 C35 2.38841451e16 2.09962046e19 1.33260902e18 C36 2.07181756e21 4.39142639e21 1.6017644e21 C38 4.75222454e20 8.27891722e22 3.10914655e21 C40 3.01628341e19 2.92032152e21 2.10790363e21 C42 8.44315543e19 2.50009361e21 5.86576134e21 C44 5.45071272e19 1.65718978e21 3.0232953e21 C46 9.84751469e24 6.28524288e24 6.30486276e24 C48 3.31300798e22 5.88641092e24 5.80921568e25 C50 1.60018067e21 8.88580637e24 3.73224821e24 C52 1.49156749e20 1.0312708e23 2.13966448e23 C54 6.02161594e21 4.24623113e25 2.32274629e23 C55 2.20639347e26 1.04413245e25 6.94071335e26 C57 1.89155613e25 2.32469014e27 4.62405e27 C59 3.42825341e24 1.81332709e26 1.49726766e27 C61 4.88548936e23 2.93409303e26 5.75560211e26 C63 2.20317132e24 4.64804559e27 1.8916126e25 C65 1.98540374e22 8.76350391e26 2.32815141e25 C67 8.07299964e29 1.35769109e28 2.20093457e28 C69 1.99668103e27 8.15161626e29 9.94130808e29 C71 8.70533717e26 1.51629822e28 3.44776655e28 C73 2.1240469e25 1.71630005e28 4.44179448e28 C75 5.93838164e25 3.30050148e28 1.23472447e28 C77 8.26112935e25 1.18311748e28 1.61332177e28 C78 3.16769159e31 1.14694865e30 6.16362578e31 C80 4.40542213e31 2.37986663e31 2.12868021e31 C82 1.51291736e28 1.74643498e31 6.14815897e31 C84 4.56348886e28 1.33256532e31 7.5688032e31 C86 1.47625002e27 9.7899966e31 6.18045007e31 C88 2.09750998e26 2.11514184e32 4.43988247e30 C90 3.13102466e26 2.37554977e30 4.75711732e30 C92 4.12844674e33 1.03001112e33 1.45522221e33 C94 1.16018183e31 2.41855973e34 1.09144759e33 C96 1.14422228e31 2.06083988e33 3.29107344e33 C98 4.92624469e32 1.82557551e33 3.73868154e33 C100 2.5557089e29 5.09427205e33 1.7462798e33 C102 1.4088188e28 4.74548242e33 1.61691781e32 C104 2.60040854e28 1.92999857e33 1.08678166e32 C105 9.81057755e37 4.25801007e36 2.85309864e36 C107 7.97530998e35 1.87178727e36 1.98939532e36 C109 3.89519861e34 1.15967982e36 7.17267354e36 C111 3.86044968e33 8.24232024e36 1.0299072e35 C113 1.91026134e32 3.78900617e36 2.12821395e36 C115 4.31893614e32 2.33761849e35 2.80213497e35 C117 3.78137324e31 2.56053801e36 1.06932752e34 C119 7.49161891e31 2.43676088e35 9.30564684e35

(78) TABLE-US-00006 Table 3c for FIG. 3 Coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 1927998.93100000 61326.69457000 9298.42612000 C7 6.81580208e09 4.77227006e08 1.80052827e08 C9 2.25247271e08 2.50332776e07 1.5897532e06 C10 1.79825558e12 9.14107547e11 8.09785691e11 C12 9.17958602e14 5.62224913e11 2.30460463e10 C14 1.2807517e10 2.56233324e10 5.89246016e09 C16 1.35864855e13 9.66129034e15 3.91670202e13 C18 5.78649145e14 2.09706737e13 5.34285417e13 C20 2.37870869e13 2.27559538e12 1.82965502e11 C21 5.03388139e16 6.42611824e18 1.90700914e16 C23 9.55277193e18 2.73042231e17 2.54646577e15 C25 3.34585921e17 3.26568385e16 5.32389404e15 C27 1.2974972e15 3.57453712e16 3.49809571e14 C29 2.77482397e19 2.99079615e19 2.23894036e19 C31 8.56146007e19 1.97192241e18 7.50780376e18 C33 3.01055654e19 3.4495392e18 3.15087397e17 C35 3.69149641e18 3.77345722e17 2.49491199e17 C36 2.65124644e21 5.30483872e22 9.79523506e22 C38 5.46646926e22 5.48873916e22 2.27635583e21 C40 2.2168182e21 3.840318e21 2.56933038e20 C42 3.76939335e21 9.07536816e21 4.83398272e20 C44 1.86457946e20 9.63668394e20 5.45493641e19 C46 5.24731609e24 2.5631708e25 3.20750645e24 C48 4.86264022e24 1.51330483e24 4.38348996e23 C50 1.82040473e26 3.97798774e23 6.42761819e22 C52 1.13009972e23 1.73488434e23 7.42447451e22 C54 6.22344466e23 6.35455496e22 2.12120942e21 C55 5.6662751e26 9.53950513e27 1.92131492e26 C57 6.52204912e27 8.08699015e28 9.13682672e27 C59 2.68165153e26 2.96986005e26 2.68813966e25 C61 5.34696982e26 1.24373567e25 5.60581756e24 C63 9.24872883e26 3.0952415e25 4.68928507e24 C65 3.01545302e25 9.31651538e26 4.9930005e23 C67 7.16203673e29 1.82453847e29 2.71289579e29 C69 6.67462975e29 6.69383027e30 2.7415079e28 C71 3.91374995e29 1.03144138e28 6.79064423e29 C73 7.40659943e29 8.70571645e28 3.9179368e26 C75 6.94142135e28 3.60168545e27 5.78212519e26 C77 1.91855995e27 4.10222726e26 1.64936448e24 C78 5.04286053e31 6.03170016e32 1.3868818e31 C80 2.39232162e31 4.12626061e32 1.55612342e31 C82 4.80826798e31 5.04668712e31 2.30893545e30 C84 3.6212218e31 4.35794799e30 2.76456591e30 C86 3.97153357e30 4.9603724e30 1.48879199e28 C88 1.4192188e30 1.98634517e29 1.20402881e27 C90 1.11362398e29 3.78574516e28 1.98557688e26 C92 4.4205472e34 1.09205305e34 1.37766474e34 C94 3.22514903e34 6.84731866e35 1.40137894e33 C96 1.1716091e34 6.76421975e34 1.6988262e33 C98 1.07007682e33 5.34712961e33 1.08683924e31 C100 6.26665774e33 9.27174473e32 7.96489557e31 C102 2.22416397e32 1.204422e32 1.00300479e29 C104 3.20471058e32 8.3878196e31 1.09064529e28 C105 1.90445089e36 1.02129599e37 3.96432147e37 C107 1.56025862e36 2.36644674e37 1.20962825e36 C109 3.46402682e36 1.56907564e36 1.12989419e35 C111 6.03624666e36 2.4846533e35 3.4314462e35 C113 3.9474095e35 3.1675326e35 1.02169171e33 C115 6.76215332e36 2.56229693e34 6.38341573e33 C117 5.59159869e35 4.89077515e34 2.89783305e32 C119 3.73650661e35 2.13674351e33 2.28957713e31

(79) TABLE-US-00007 Table 3d for FIG. 2 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 2958.73937900 C7 9.49003659e09 C9 3.07193009e08 C10 8.91262932e12 C12 1.13758617e11 C14 1.21700955e10 C16 7.60923595e15 C18 3.99711358e14 C20 8.41607327e14 C21 4.16246415e18 C23 2.26653042e17 C25 3.87395288e17 C27 8.16460404e16 C29 2.63873242e21 C31 7.25194268e21 C33 4.32824596e19 C35 9.64157893e19 C36 1.48063571e23 C38 1.6894394e23 C40 3.50470157e22 C42 2.03042038e22 C44 6.10889397e21 C46 1.31684509e27 C48 3.02885549e26 C50 1.50022249e24 C52 5.54826497e24 C54 4.23012006e23 C55 1.88656326e28 C57 7.50832301e28 C59 8.67296427e27 C61 3.36303254e26 C63 8.34019597e26 C65 5.35649647e25 C67 8.65571939e33 C69 2.89230437e30 C71 2.73336712e29 C73 1.24809951e28 C75 3.2040601e28 C77 1.22368962e27 C78 1.04788846e33 C80 8.78177755e33 C82 1.19638938e31 C84 6.21594271e31 C86 2.38551896e30 C88 3.13914924e30 C90 3.19984707e29 C92 1.16289294e37 C94 2.62069946e35 C96 3.42335672e34 C98 1.84194813e33 C100 9.57587784e33 C102 3.03868144e33 C104 5.60304989e32 C105 2.13609687e39 C107 5.33232238e38 C109 9.59790795e37 C111 5.98820678e36 C113 2.69619845e35 C115 8.83369102e35 C117 1.42066402e34 C119 1.4409403e33 C121 1.26097283e42 C123 6.97372247e41 C125 1.30218358e39 C127 7.42449901e39 C129 5.35218027e38 C131 1.73751077e37 C133 1.69978425e37 C135 4.00667525e37 C136 9.25027199e46 C138 1.39746666e43 C140 2.84029421e42 C142 2.25579428e41 C144 1.00279788e40 C146 4.53773919e40 C148 1.58311764e39 C150 1.41999236e39 C152 2.17050522e38

(80) TABLE-US-00008 Table 4a for FIG. 2 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 682.54910274 M9 0.00000000 249.43345277 145.29208466 M8 0.00000000 220.05468953 1156.52693128 M7 0.00000000 183.45583878 1395.16642311 M6 0.00000000 243.45008686 1820.24509168 Stop 0.00000000 781.29871330 2029.56902646 M5 0.00000000 1160.98299518 2177.33738349 M4 0.00000000 1710.86880274 2173.71626521 M3 0.00000000 2011.56754641 2067.19445324 M2 0.00000000 2242.07573615 1840.71643886 M1 0.00000000 2569.16681637 1103.33520507 Object 0.00000000 2361.06513202 2931.79406196

(81) TABLE-US-00009 Table 4b for FIG. 2 Surface TLA[deg] TLB[deg] TLC[deg] Image 0.00000000 0.00000000 0.00000000 M10 12.45206393 0.00000000 0.00000000 M9 204.90412786 0.00000000 0.00000000 M8 98.09246024 0.00000000 0.00000000 M7 63.07895508 0.00000000 0.00000000 M6 33.07124029 0.00000000 0.00000000 Stop 86.59033686 0.00000000 180.00000000 M5 10.44403163 0.00000000 0.00000000 M4 9.94193456 0.00000000 0.00000000 M3 32.00064460 0.00000000 0.00000000 M2 55.28668769 0.00000000 0.00000000 M1 195.20719385 0.00000000 0.00000000 Object 11.49304323 0.00000000 0.00000000

(82) TABLE-US-00010 Table 5 for FIG. 2 Surface Angle of incidence[deg] Reflectivity M10 12.45206393 0.64804869 M9 0.00000000 0.66565840 M8 73.18833238 0.77117192 M7 71.79816246 0.74336573 M6 78.19412274 0.85360560 M5 79.17866859 0.86731610 M4 80.43536522 0.88397599 M3 77.50592474 0.84361983 M2 79.20803217 0.86771549 M1 8.71415063 0.65746288 Overall transmission 0.0779

(83) TABLE-US-00011 Table 6 for FIG. 2 X[mm] Y[mm] Z[mm] 0.00000000 26.28726367 0.63068162 31.69185598 26.09628851 1.53950183 62.64332842 25.51669909 4.18938979 92.12079882 24.53113873 8.35334657 119.40547685 23.11832594 13.66301694 143.80438508 21.26160430 19.62685072 164.66670456 18.95800828 25.66175785 181.40756151 16.22754881 31.14277456 193.53899715 13.12006877 35.47169919 200.70439461 9.71525276 38.15795403 202.70901570 6.11433110 38.89544770 199.53698197 2.42722099 37.61339305 191.34756415 1.23894609 34.48367665 178.45176595 4.78615349 29.88311471 161.27786082 8.12619947 24.32569197 140.33668518 11.17689805 18.38668998 116.19411687 13.85593322 12.63585690 89.45262946 16.07638154 7.58712638 60.74011192 17.74870904 3.66487194 30.70288782 18.79125679 1.18323036 0.00000000 19.14582736 0.33446470 30.70288782 18.79125679 1.18323036 60.74011192 17.74870904 3.66487194 89.45262946 16.07638154 7.58712638 116.19411687 13.85593322 12.63585690 140.33668518 11.17689805 18.38668998 161.27786082 8.12619947 24.32569197 178.45176595 4.78615349 29.88311471 191.34756415 1.23894609 34.48367665 199.53698197 2.42722099 37.61339305 202.70901570 6.11433110 38.89544770 200.70439461 9.71525276 38.15795403 193.53899715 13.12006877 35.47169919 181.40756151 16.22754881 31.14277456 164.66670456 18.95800828 25.66175785 143.80438508 21.26160430 19.62685072 119.40547685 23.11832594 13.66301694 92.12079882 24.53113873 8.35334657 62.64332842 25.51669909 4.18938979 31.69185598 26.09628851 1.53950183

(84) TABLE-US-00012 Table 7 for FIG. 2 X[mm] Y[mm] Z[mm] 0.00000000 4.58384652 0.01916625 6.23062250 4.53213351 0.05414911 12.30714552 4.37802319 0.15566608 18.07925857 4.12460516 0.31375494 23.40415256 3.77703638 0.51289064 28.15007563 3.34253897 0.73349935 32.19964733 2.83037255 0.95387719 35.45284073 2.25176240 1.15232970 37.82954084 1.61976608 1.30932093 39.27159199 0.94906620 1.40941462 39.74425946 0.25568401 1.44280696 39.23705170 0.44338340 1.40629081 37.76387678 1.13059187 1.30355222 35.36253789 1.78832901 1.14477294 32.09360239 2.39942334 0.94558797 28.03870421 2.94766255 0.72551494 23.29835626 3.41830005 0.50602285 17.98935804 3.79852921 0.30843758 12.24188376 4.07790588 0.15188880 6.19633084 4.24870102 0.05149000 0.00000000 4.30616654 0.01691445 6.19633084 4.24870102 0.05149000 12.24188376 4.07790588 0.15188880 17.98935804 3.79852921 0.30843758 23.29835626 3.41830005 0.50602285 28.03870421 2.94766255 0.72551494 32.09360239 2.39942334 0.94558797 35.36253789 1.78832901 1.14477294 37.76387678 1.13059187 1.30355222 39.23705170 0.44338340 1.40629081 39.74425946 0.25568401 1.44280696 39.27159199 0.94906620 1.40941462 37.82954084 1.61976608 1.30932093 35.45284073 2.25176240 1.15232970 32.19964733 2.83037255 0.95387719 28.15007563 3.34253897 0.73349935 23.40415256 3.77703638 0.51289064 18.07925857 4.12460516 0.31375494 12.30714552 4.37802319 0.15566608 6.23062250 4.53213351 0.05414911

(85) FIG. 3 shows a sagittal view of the projection optical unit 7. In this view, the location of the first plane intermediate image 18 adjacent to the passage opening 17 in the last mirror M10 in the imaging light beam path of the projection optical unit 7 becomes clear.

(86) The projection optical unit 7 has an image-side numerical aperture of 0.55. In an imaging light plane parallel to the xz-plane (sagittal view according to FIG. 3), the projection optical unit 7 has a reduction factor .sub.x of 4.00. In the yz-plane perpendicular thereto (meridional plane according to FIG. 2), the projection optical unit 7 has a reduction factor .sub.y of 8.00. An object-side chief ray angle is 5.1. The chief rays 16 run in a divergent fashion from the object field 4 toward the first mirror M1 in the beam path of the projection optical unit 7. An entrance pupil of the projection optical unit 7 thus lies in the beam path of the imaging light 3 upstream of the object field 4. The chief ray angle denotes the angle of a chief ray of a central object field point with respect to a normal to the object plane 5.

(87) A pupil obscuration of the projection optical unit 7 is 15% of the numerical aperture of the projection optical unit 7. Hence, a surface portion of 0.15.sup.2 of a pupil of the projection optical unit 7 is obscured. An object-image offset do's is approximately 2360 mm. The mirrors of the projection optical unit 7 can be accommodated in a parallelepiped having xyz-edge lengths of 797 mm3048 mm2115 mm.

(88) The object plane 5 extends at an angle of 11.5 in relation to the image plane 9; i.e., it is tilted in relation to the image plane 9.

(89) A working distance between the mirror M9 lying closest to the image plane at 9 and the image plane 9 is 97 mm.

(90) A further embodiment of a projection optical unit 22, which can be used in the projection exposure apparatus 1 according to FIG. 1 instead of the projection optical unit 7, is explained in the following text on the basis of FIGS. 5 and 6. Components and functions which have already been explained above in the context of FIGS. 1 to 4 are denoted, where applicable, by the same reference signs and are not discussed again in detail.

(91) The mirrors M1 to M10 are once again embodied as free-form surface mirrors for which the free-form surface equation (1) indicated above holds true.

(92) FIG. 9 shows, once again, the marginal contours of the reflection surfaces in each case impinged upon by the imaging light 3 on the surfaces M1 to M10 of the projection optical unit 22, i.e. the footprints of the mirrors M1 to M10. The illustration of FIG. 9 corresponds to that of FIG. 4.

(93) The following two tables once again show the mirror parameters of mirrors M1 to M10 of the projection optical unit 22.

(94) TABLE-US-00013 M1 M2 M3 M4 M5 Maximum angle of 11.2 85.8 80.8 81.7 82.0 incidence [] Extent of the reflec- 680.3 529.4 494.0 453.7 402.2 tion surface in the x- direction [mm] Extent of the reflec- 284.8 208.9 213.3 248.3 318.1 tion surface in the y- direction [mm] Maximum mirror 680.4 529.4 495.1 457.7 406.9 diameter [mm]

(95) TABLE-US-00014 M6 M7 M8 M9 M10 Maximum angle of 79.8 75.8 76.6 21.2 9.4 incidence [] Extent of the reflec- 379.1 372.0 294.5 358.8 850.5 tion surface in the x- direction [mm] Extent of the reflec- 341.3 118.8 200.2 180.6 831.0 tion surface in the y- direction [mm] Maximum mirror 420.4 372.0 294.5 358.8 850.8 diameter [mm]

(96) The mirror M10 that predefines the image-side numerical aperture has the largest maximum mirror diameter, with a diameter of 850.8 mm. None of the other mirrors M1 to M9 has a maximum diameter that is greater than 700 mm. Eight of the ten mirrors, namely the mirrors M2 to M9, have a maximum mirror diameter that is less than 530 mm. Five of the ten mirrors, namely the mirrors M5 to M9, have a maximum mirror diameter that is less than 425 mm.

(97) The optical design data from the projection optical unit 22 can be gathered from the following tables, which, in terms of their design, correspond to the tables for the projection optical unit 7 according to FIG. 2.

(98) TABLE-US-00015 Table 1 for FIG. 5 Exemplary embodiment FIG. 5 NA 0.55 Wavelength 13.5 nm beta_x 4.0 beta_y 8.0 Field dimension_x 26.0 mm Field dimension_y 1.2 mm Field curvature 0.012345 1/mm rms 13.3 ml Stops AS, OS

(99) TABLE-US-00016 Table 2 for FIG. 5 Opera- Surface Radius_x[mm] Power_x[1/mm] Radius_y[mm] Power_y[1/mm] tion M10 869.3080100 0.0022797 778.5928237 0.0025924 REFL M9 2602.0496747 0.0007686 384.2214696 0.0052053 REFL M8 718.2470514 0.0008150 30510.8098846 0.0002239 REFL M7 752.1182438 0.0008331 16042.2750216 0.0003979 REFL M6 3270.4125599 0.0001298 3670.6088227 0.0025669 REFL M5 39785.3326866 0.0000091 5765.5741935 0.0019141 REFL M4 16034.7922775 0.0000233 10216.6190309 0.0010499 REFL M3 9574.6132714 0.0000436 3930.1905682 0.0024367 REFL M2 5696.9592961 0.0000643 1485.2462497 0.0073485 REFL M1 2733.3789956 0.0007228 1297.6261153 0.0015603 REFL

(100) TABLE-US-00017 Table 3a for FIG. 5 Coefficient M10 M9 M8 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 869.30801000 2602.04967500 718.24705150 C7 3.50115108e09 9.7790374e07 6.28851853e07 C9 4.92545176e09 1.07564728e06 4.92758814e08 C10 1.56874319e11 7.64407422e10 1.46961089e10 C12 4.83471482e11 4.1944661e09 9.90784074e10 C14 1.4150121e11 2.20249239e09 5.26676904e10 C16 1.22638717e14 1.6991744e12 1.76931806e13 C18 1.82295329e14 5.09302083e12 1.63225989e12 C20 1.04417542e14 4.99474166e12 3.00741879e12 C21 3.14425027e17 1.74605563e15 6.95881583e16 C23 1.18753568e16 1.51762355e14 2.51525789e15 C25 1.1247438e16 3.06218684e14 2.2933979e15 C27 2.96708004e17 4.99892752e14 1.92742933e14 C29 1.93233858e20 1.18614919e17 1.08654612e17 C31 4.77737566e20 5.71762455e17 2.18043452e18 C33 4.65969274e20 1.72770763e16 4.0159214e17 C35 1.52531921e20 6.29688126e17 1.07460038e16 C36 4.9177484e23 2.78158452e21 8.64817602e21 C38 2.3529495e22 9.90406032e20 3.7077501e20 C40 3.67477654e22 4.04108731e19 1.90111998e19 C42 2.41658412e22 9.13512927e19 2.84898021e19 C44 5.28774981e23 3.9970345e20 4.28073704e19 C46 2.53619074e26 5.52648347e23 2.18242805e23 C48 9.35727071e26 3.06649246e22 8.15300946e22 C50 1.407507e25 1.63453782e21 1.45607087e21 C52 9.62763512e26 1.19312316e21 2.22879735e23 C54 3.38598262e26 1.32098082e20 5.29578348e21 C55 7.28461816e29 1.63707168e25 1.63052539e25 C57 3.89709184e28 5.17135447e25 8.23822216e25 C59 8.10206805e28 1.79799522e24 5.3386535e24 C61 8.06594025e28 1.67157766e24 2.63267781e23 C63 3.63229095e28 1.85929763e23 1.4978656e23 C65 6.94305626e29 1.37596582e22 1.60652574e22 C67 5.17390636e32 4.73635713e28 2.50723659e27 C69 2.76133587e31 9.68441245e27 3.18583903e26 C71 5.75470516e31 6.55981608e26 1.33755802e25 C73 5.37198691e31 2.14552978e25 4.67020493e26 C75 2.15218576e31 1.77890928e25 1.60245075e24 C77 2.61002136e32 2.52802452e24 2.4414866e24 C78 1.33351127e34 3.40975628e30 5.11409407e30 C80 1.0054419e33 8.63348315e30 7.37254112e29 C82 2.92630151e33 1.48899099e28 3.49120412e29 C84 4.57056217e33 1.03301246e27 1.71797008e27 C86 4.09582323e33 3.39897352e27 1.12084792e26 C88 2.04237423e33 4.15113593e27 2.61828937e26 C90 3.57674802e34 2.2979605e26 1.89501924e26 C92 6.41185373e39 4.74563151e33 6.71528349e32 C94 1.76112217e37 1.45876695e31 8.28287721e31 C96 5.5411331e37 1.42275073e30 6.82286679e30 C98 8.68097577e37 9.13558631e30 4.30994562e29 C100 3.42223873e37 3.51677458e29 1.32672418e28 C102 7.04829093e38 4.95216183e29 1.65234363e28 C104 1.81548666e37 1.5700553e28 7.44056128e29 C105 1.55137664e40 4.41526468e35 8.48895624e35 C107 5.82808475e40 1.23424716e34 1.6612053e33 C109 2.44087528e39 3.19549581e33 5.55352481e33 C111 5.93840503e39 3.09982368e32 4.5754064e32 C113 8.8212298e39 1.72638685e31 2.02996025e31 C115 8.63860896e39 4.69214518e31 4.39727396e31 C117 5.12960062e39 1.36535167e31 3.69770347e31 C119 1.0702848e39 1.55656455e30 1.18279441e31 C121 3.06949325e43 8.94064247e38 0 C123 2.18028671e42 2.46553946e36 0 C125 6.86344939e42 2.34166186e35 0 C127 1.22750442e41 1.49148863e34 0 C129 1.25985922e41 6.69544608e34 0 C131 6.60294366e42 2.18823933e33 0 C133 1.87633758e42 3.84766887e33 0 C135 1.60470913e43 2.36306182e33 0 C136 8.76656405e46 1.96833702e40 0 C138 6.55036406e45 1.86248388e39 0 C140 2.70449789e44 4.46630844e38 0 C142 6.29281844e44 4.28810046e37 0 C144 9.0993377e44 2.74468914e36 0 C146 8.52048374e44 1.13033506e35 0 C148 5.26001056e44 2.65031009e35 0 C150 2.06603634e44 1.59603141e35 0 C152 3.67734069e45 2.36167036e35 0

(101) TABLE-US-00018 Table 3b for FIG. 5 Coefficient M7 M6 M5 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 752.11824380 3270.41256000 39785.33269000 C7 3.70935649e07 1.14204884e07 6.97621412e08 C9 5.18161693e07 2.58530033e08 1.64595109e07 C10 1.80413353e10 1.14685523e10 3.9764206e10 C12 1.45283618e09 4.06990977e11 9.23529251e11 C14 1.9262961e09 1.07013295e10 4.76744117e12 C16 1.00096242e12 2.00016603e14 2.76247582e14 C18 1.13644156e11 2.28346094e13 2.0990975e13 C20 1.28051975e11 3.41794261e14 6.73454787e13 C21 8.3715012e17 2.98259863e16 3.50187845e16 C23 1.77779173e14 2.04228461e16 5.46941646e16 C25 5.64470665e14 5.08222775e16 4.10735525e16 C27 1.43209502e14 1.69707722e16 1.32927647e15 C29 1.11998186e17 2.61830238e19 1.03955351e18 C31 1.05022686e16 1.30229376e18 6.21046279e19 C33 2.95463553e18 7.79927697e19 1.93127092e18 C35 2.14030511e16 4.60656386e19 3.560526e18 C36 2.44510815e21 1.01255465e22 5.36113636e21 C38 8.10017031e20 1.09878129e21 4.88286477e21 C40 1.1541444e19 3.86591836e21 5.01325612e21 C42 5.82969588e19 4.75815597e21 1.61685259e20 C44 3.82357565e18 3.34054543e22 1.57036302e20 C46 3.67742759e23 3.42907869e24 1.66098704e23 C48 6.05641891e23 1.04056835e23 1.06940695e23 C50 2.94108386e21 1.73293359e23 3.20443027e23 C52 6.59269155e20 3.7771892e24 2.26337849e23 C54 6.05261138e20 2.31850349e24 4.27395429e23 C55 3.07155576e26 1.08429738e25 5.7022116e26 C57 3.72656739e25 2.23882015e27 2.18952932e26 C59 8.63020098e24 5.2563985e26 1.42738106e26 C61 1.37802616e22 2.03526409e26 1.3400957e25 C63 2.67412096e22 4.44652791e26 2.11929073e25 C65 1.83670311e23 2.65638153e27 3.61780494e25 C67 2.01045404e28 1.16463062e28 9.62937695e29 C69 4.23996647e27 1.69101472e28 1.66256514e28 C71 1.12510374e25 2.4234926e29 6.82413726e28 C73 1.2655875e24 1.14315405e28 2.05563097e27 C75 1.15062152e23 2.14241103e28 8.81664434e28 C77 1.49164327e23 2.42309874e28 6.98448231e28 C78 5.09922795e31 2.70326053e30 1.63047582e30 C80 8.13481643e30 5.19309314e31 2.55061914e31 C82 7.20263484e28 1.40971342e31 7.88723541e31 C84 1.41044744e27 1.31966847e30 6.65035053e30 C86 4.27948507e26 1.78133453e31 1.98171259e29 C88 2.33726115e25 2.19627873e30 1.4940962e29 C90 1.60918106e25 5.71949542e31 2.50340365e29 C92 9.92597124e33 2.06384653e33 1.7958732e33 C94 6.80777127e31 2.32035657e33 1.18993647e33 C96 7.95434859e30 4.83315819e34 4.72101252e33 C98 3.68480874e29 3.74828503e33 3.45232856e32 C100 3.69646028e28 4.72979312e34 4.98195809e32 C102 1.8079515e27 4.97237132e33 6.06049519e32 C104 1.73878827e28 4.10351172e33 6.76934322e32 C105 2.4962474e37 1.85872349e35 1.55540897e35 C107 2.68999959e34 5.30576886e36 5.9762438e36 C109 2.55096101e33 1.36308121e35 1.14874935e35 C111 4.70398078e32 3.18539277e35 3.45968317e35 C113 3.65950224e31 4.08064679e36 3.57260831e34 C115 2.69573984e31 1.49121892e35 4.50161712e34 C117 7.25231228e30 3.57447477e35 1.64662987e34 C119 5.11134204e30 1.46095543e35 1.98834381e34

(102) TABLE-US-00019 Table 3c for FIG. 5 Coefficient M4 M3 M2 KY 0.00000000 0.00000000 0.00000000 KX 0.00000000 0.00000000 0.00000000 RX 16034.79228000 9574.61327100 5696.95929600 C7 6.03925095e09 3.26239122e08 1.59791032e09 C9 6.94662012e09 2.27145809e07 1.40795422e06 C10 5.54884567e11 7.60877141e11 2.24741119e11 C12 2.52583724e11 1.46695947e10 7.62544795e11 C14 2.15044807e10 2.96089016e10 5.24306931e09 C16 1.9407843e13 1.10665551e13 4.41314287e13 C18 1.78662307e13 5.57607359e14 2.4313786e12 C20 2.16511379e13 2.02465861e12 1.61840093e11 C21 4.1439186e16 5.95471784e17 1.65281042e16 C23 9.4251442e17 1.12423275e16 2.11123946e15 C25 2.60263465e17 1.73026522e15 1.45428371e14 C27 2.55509799e15 7.08053399e16 3.46493571e14 C29 5.29272828e19 5.40817519e20 7.55616992e19 C31 6.91917763e19 1.61040978e18 3.77666807e18 C33 2.85395117e18 4.13936099e18 6.33486623e17 C35 4.96927209e18 3.49881437e17 3.46409803e17 C36 6.83763591e22 7.57909981e22 2.95766307e22 C38 2.13234959e21 3.4854016e21 4.95952942e21 C40 7.22731509e21 7.38743374e22 5.0046765e20 C42 2.09286651e20 4.40416504e20 1.3911305e19 C44 5.85604547e20 3.74858983e20 9.88543639e19 C46 6.43248577e24 9.63273701e24 4.88317263e24 C48 1.58441497e25 7.55811815e24 4.2542718e23 C50 1.56411013e24 1.94301035e23 7.69586872e22 C52 2.19059644e23 1.39352362e22 8.37467611e22 C54 3.01080627e22 1.62085554e22 5.43128229e21 C55 4.31558591e26 1.30815384e27 7.93299714e27 C57 3.18795075e26 4.60436614e26 8.0344969e28 C59 1.45255838e25 3.00241314e26 2.98448401e26 C61 5.17891518e25 1.07582737e25 6.21693076e24 C63 9.52938201e25 1.35257242e24 1.79376848e23 C65 3.92684321e25 1.42144281e25 6.20066641e23 C67 1.14006341e28 6.10553014e29 4.8721203e29 C69 1.3403719e28 1.78125834e28 2.57661074e28 C71 3.59493083e28 4.52829735e28 3.53707362e27 C73 1.60006756e27 9.51584504e28 3.93778871e26 C75 8.12793081e27 1.49319185e26 1.39599626e25 C77 6.05291213e27 5.94534387e26 1.70087313e24 C78 4.68845287e31 1.1876792e32 8.867378e32 C80 3.62849118e31 1.22291807e31 3.97705432e32 C82 2.8946197e30 2.0159866e33 2.92658857e31 C84 1.05806179e29 4.14509233e30 1.9866676e29 C86 3.90741277e29 2.17039478e29 9.23876488e29 C88 6.77151397e29 8.29600294e29 1.42395946e28 C90 5.19333773e29 3.55804272e28 1.58363793e26 C92 6.48128342e34 4.76107907e35 1.4337662e34 C94 8.09440725e34 1.27977811e33 1.98985191e33 C96 3.72660414e34 4.63315852e34 1.97598786e32 C98 2.0200799e34 9.06913701e33 1.78724463e31 C100 1.37280642e31 2.20197055e31 1.38421441e30 C102 6.74863143e32 1.11311398e31 7.2961796e30 C104 5.77905012e31 1.65281364e31 6.93095163e29 C105 1.51737981e36 1.31694944e37 2.35455933e37 C107 5.04387069e36 8.86231792e37 4.22965359e37 C109 1.65804642e35 2.46082309e36 7.14026917e36 C111 9.58931818e35 2.70484671e35 1.548961e35 C113 1.42091054e34 4.49614897e35 1.39836488e33 C115 1.01035364e33 6.52656741e34 7.91692777e33 C117 8.16033736e34 1.24041683e33 2.56592926e32 C119 1.3759859e33 3.94755303e33 1.19798385e31

(103) TABLE-US-00020 Table 3d for FIG. 5 Coefficient M1 KY 0.00000000 KX 0.00000000 RX 2733.37899600 C7 1.07227904e08 C9 2.08293311e08 C10 4.23699194e12 C12 9.10151978e13 C14 9.57929038e11 C16 1.00115091e14 C18 2.28938701e14 C20 6.5030622e14 C21 2.44883504e18 C23 1.95331906e17 C25 3.53111902e17 C27 6.39800102e16 C29 3.21472327e21 C31 4.15965877e20 C33 2.58607064e19 C35 3.80225246e19 C36 1.2674299e24 C38 9.81796216e25 C40 2.01060919e22 C42 9.42925968e22 C44 4.11392945e21 C46 5.46178217e26 C48 6.20216864e26 C50 2.14560789e24 C52 8.83279357e24 C54 6.68083614e23 C55 6.06665142e29 C57 6.72747508e28 C59 9.174949e27 C61 5.18881245e26 C63 2.18172279e25 C65 1.60516545e25 C67 5.07419186e31 C69 6.7941363e31 C71 1.74665297e29 C73 2.26352087e28 C75 1.56132886e27 C77 5.75078714e27 C78 4.80076165e34 C80 9.70304619e33 C82 1.40701044e31 C84 7.97696523e31 C86 4.88432697e30 C88 1.79588468e29 C90 1.6486908e29 C92 2.48841996e36 C94 5.84056891e36 C96 1.86712201e34 C98 2.27321062e33 C100 1.73055737e32 C102 9.02658619e32 C104 2.13388526e31 C105 1.40276955e39 C107 6.6231595e38 C109 1.24643269e36 C111 7.52164967e36 C113 4.07853266e35 C115 2.69022864e34 C117 7.8624425e34 C119 5.86612928e34 C121 6.36706031e42 C123 8.27274432e42 C125 5.76519274e40 C127 8.11565956e39 C129 7.13938807e38 C131 4.17623634e37 C133 1.90619557e36 C135 2.82473216e36 C136 1.11197415e45 C138 1.81264814e43 C140 4.08868567e42 C142 2.96820411e41 C144 1.30720619e40 C146 9.2106426e40 C148 5.73880943e39 C150 1.35075947e38 C152 3.90453273e39

(104) TABLE-US-00021 Table 4a for FIG. 5 Surface DCX DCY DCZ Image 0.00000000 0.00000000 0.00000000 M10 0.00000000 0.00000000 736.26370956 M9 0.00000000 171.11999157 118.44136653 M8 0.00000000 120.56531282 1171.56027175 M7 0.00000000 51.50722742 1377.26292259 M6 0.00000000 418.44349985 1705.41220513 Aperture 0.00000000 942.11125520 1801.65858675 Obscuration 0.00000000 955.76819944 1804.16863526 M5 0.00000000 1250.61134458 1858.35869294 M4 0.00000000 1681.77019009 1778.69965982 M3 0.00000000 1928.54516765 1624.74280671 M2 0.00000000 2106.37111455 1360.43276702 M1 0.00000000 2299.77363692 510.18493472 Object 0.00000000 2459.22890232 2306.49401564

(105) TABLE-US-00022 Table 4b for FIG. 5 Surface TLA[deg] TLB[deg] TLC[deg] Image plane 0.00000000 0.00000000 0.00000000 M10 7.74064239 0.00000000 0.00000000 M9 195.48128477 0.00000000 0.00000000 M8 88.46172756 0.00000000 0.00000000 M7 53.18367431 0.00000000 0.00000000 M6 22.66975270 0.00000000 0.00000000 Aperture stop 85.31587976 0.00000000 180.00000000 Obscuration stop 85.31587976 0.00000000 180.00000000 M5 0.02667676 0.00000000 0.00000000 M4 21.21335393 0.00000000 0.00000000 M3 44.01331845 0.00000000 0.00000000 M2 66.62640557 0.00000000 0.00000000 M1 183.87102353 0.00000000 0.00000000 Object plane 0.07275151 0.00000000 0.00000000

(106) TABLE-US-00023 Table 5 for FIG. 5 Surface Angle of incidence[deg] Reflectivity M10 7.74064239 0.65927620 M9 0.00000085 0.66565840 M8 72.98044279 0.76717179 M7 71.74150395 0.74217796 M6 77.74457445 0.84712279 M5 79.55899609 0.87244962 M4 79.25432675 0.86834411 M3 77.94570873 0.85004161 M2 79.44120415 0.87086874 M1 8.94377505 0.65699903 Overall transmission 0.0780

(107) TABLE-US-00024 Table 6 for FIG. 5 X[mm] Y[mm] Z[mm] 0.00000000 23.91268651 0.00000000 28.15240990 23.51768030 0.00000000 55.65557495 22.34769704 0.00000000 81.86338464 20.44910675 0.00000000 106.13929647 17.90216625 0.00000000 127.86860425 14.82214737 0.00000000 146.47747850 11.35686145 0.00000000 161.45701986 7.67867553 0.00000000 172.38882631 3.96936217 0.00000000 178.96836847 0.39914512 0.00000000 181.02225711 2.89452566 0.00000000 178.51592945 5.82123520 0.00000000 171.55051707 8.34014086 0.00000000 160.35054676 10.45133739 0.00000000 145.24617053 12.18109803 0.00000000 126.65406517 13.56709448 0.00000000 105.05980452 14.64754450 0.00000000 81.00272585 15.45516132 0.00000000 55.06326567 16.01491224 0.00000000 27.85208983 16.34401649 0.00000000 0.00000000 16.45259694 0.00000000 27.85208983 16.34401649 0.00000000 55.06326567 16.01491224 0.00000000 81.00272585 15.45516132 0.00000000 105.05980452 14.64754450 0.00000000 126.65406517 13.56709448 0.00000000 145.24617053 12.18109803 0.00000000 160.35054676 10.45133739 0.00000000 171.55051707 8.34014086 0.00000000 178.51592945 5.82123520 0.00000000 181.02225711 2.89452566 0.00000000 178.96836847 0.39914512 0.00000000 172.38882631 3.96936217 0.00000000 161.45701986 7.67867553 0.00000000 146.47747850 11.35686145 0.00000000 127.86860425 14.82214737 0.00000000 106.13929647 17.90216625 0.00000000 81.86338464 20.44910675 0.00000000 55.65557495 22.34769704 0.00000000 28.15240990 23.51768030 0.00000000

(108) TABLE-US-00025 Table 7 for FIG. 5 X[mm] Y[mm] Z[mm] 0.00000000 4.07043789 0.00000000 5.60146126 4.01626891 0.00000000 11.06508716 3.85552494 0.00000000 16.25637662 3.59341100 0.00000000 21.04743296 3.23832743 0.00000000 25.32010236 2.80147608 0.00000000 28.96890832 2.29634491 0.00000000 31.90370527 1.73810573 0.00000000 34.05197286 1.14296657 0.00000000 35.36067635 0.52752353 0.00000000 35.79762848 0.09184447 0.00000000 35.35230450 0.69950082 0.00000000 34.03608300 1.28097002 0.00000000 31.88190835 1.82323721 0.00000000 28.94339353 2.31492925 0.00000000 25.29340158 2.74639050 0.00000000 21.02215983 3.10967498 0.00000000 16.23497071 3.39848119 0.00000000 11.04958831 3.60805664 0.00000000 5.59333108 3.73509655 0.00000000 0.00000000 3.77765693 0.00000000 5.59333108 3.73509655 0.00000000 11.04958831 3.60805664 0.00000000 16.23497071 3.39848119 0.00000000 21.02215983 3.10967498 0.00000000 25.29340158 2.74639050 0.00000000 28.94339353 2.31492925 0.00000000 31.88190835 1.82323721 0.00000000 34.03608300 1.28097002 0.00000000 35.35230450 0.69950082 0.00000000 35.79762848 0.09184447 0.00000000 35.36067635 0.52752353 0.00000000 34.05197286 1.14296657 0.00000000 31.90370527 1.73810573 0.00000000 28.96890832 2.29634491 0.00000000 25.32010236 2.80147608 0.00000000 21.04743296 3.23832743 0.00000000 16.25637662 3.59341100 0.00000000 11.06508716 3.85552494 0.00000000 5.60146126 4.01626891 0.00000000

(109) An overall reflectivity of the projection optical unit 22 is approximately 7.8%.

(110) A wavefront aberration rms is 13.3 m.

(111) The projection optical unit 22 has an image-side numerical aperture of 0.55. In an imaging light plane parallel to the xz-plane, the projection optical unit 22 has a reduction factor .sub.x of 4.00. In the yz-plane perpendicular thereto, the projection optical unit 22 has a reduction factor .sub.y of 8.00. An object-side chief ray angle is 5.1. The chief rays 16 run in a divergent fashion from the object field 4 toward the first mirror M1 in the beam path of the projection optical unit 22. An entrance pupil of the projection optical unit 22 thus lies in the beam path of the imaging light 3 upstream of the object field 4. A pupil obscuration of the projection optical unit 22 is 14% of the numerical aperture of the projection optical unit 22. Hence, a surface portion of 0.14.sup.2 of a pupil of the projection optical unit 22 is obscured. An object-image offset do's is approximately 2460 mm. The mirrors of the projection optical unit 22 can be accommodated in a parallelepiped having xyz-edge lengths of 850 mm2823 mm1774 mm.

(112) In the projection optical unit 22, the object plane 5 extends at an angle of 0.1 in relation to the image plane 9.

(113) A working distance between the mirror M9 lying closest to the image plane 9 and the image plane 9 is 85 mm.

(114) In the imaging light beam path between the mirrors M5 and M6, the projection optical unit 22 firstly has an obscuration stop OS and, closely adjacent thereto, an aperture stop AS. Locations, orientations, and marginal contour forms of the stops AS, OS emerge from tables 4a, 4b, and 6. An inner stop contour 23 of the aperture stop AS is illustrated in FIG. 7. An outer stop contour 24 of the obscuration stop OS is illustrated in FIG. 8.

(115) Both stops AS, OS have an approximately elliptical form with a large x/y-aspect ratio, which is significantly greater than 5:1 in each case. The aperture stop AS has an extent of the inner stop contour 23 of 362 mm in the x-direction and an extent of the inner stop contour 23 of 40.5 mm in the y-direction. The obscuration stop OS has an extent of the outer stop contour 24 of 71.7 mm in the x-direction and of 8 mm in the y-direction.

(116) The respective large x/y-aspect ratio of the stops AS, OS results from the different imaging scales of the projection optical unit 22 in the x- and y-direction. Further, this large x/y-aspect ratio is a consequence of the two second plane intermediate images 19 and 20.

(117) In the projection optical unit 22, the first second plane intermediate image 19 lies between the mirrors M3 and M4 in the imaging light beam path.

(118) In the projection optical unit 22, the image plane 9 extends virtually parallel to the object plane 5.

(119) The two stops AS, OS do not lie on curved surfaces; i.e., they respectively lie in exactly one stop plane. The two stop or arrangement planes of the aperture stop AS on the one hand and of the obscuration stop OS on the other hand are spaced apart from one another. In order to produce a microstructured or nanostructured component, the projection exposure apparatus 1 is used as follows: First, the reflection mask 10 or the reticle and the substrate or the wafer 11 are provided. Subsequently, a structure on the reticle 10 is projected onto a light-sensitive layer of the wafer 11 with the aid of the projection exposure apparatus 1. Then, a microstructure or nanostructure on the wafer 11, and hence the microstructured component, is produced by developing the light-sensitive layer.

Imaging optical unit for imaging an object field into an image field, and projection exposure apparatus including such an imaging optical unit

Assignee

Inventors

Cpc classification

Classification Explorer

G02B17/0647

PHYSICS

Classification Explorer

G03F7/70233

PHYSICS

Classification Explorer

G03F7/2008

PHYSICS

Classification Explorer

G02B17/0657

PHYSICS

Classification Explorer

G02B17/0652

PHYSICS

Classification Explorer

G03F7/2004

PHYSICS

Classification Explorer

G03F7/7025

PHYSICS

International classification

Classification Explorer

G03F7/20

PHYSICS

Classification Explorer

G02B17/06

PHYSICS

Abstract

Claims

Description