Device for characterizing an interface of a structure and corresponding device

Abstract

The present invention relates to a device (1) for characterizing an interface of a structure (6), said structure (6) comprising a solid first material and a second material, the materials being separated by said interface. The device (1) comprises: means (2) for generating a first mechanical wave; means (2) for forming Brillouin oscillations; means (10) for detecting time variation of the Brillouin oscillations; means (12) for responding to the time variation of the Brillouin oscillations to identify reflection of said first mechanical wave by said interface or transmission through said interface of a second mechanical wave interfering with the first mechanical wave; and means (13) for determining the variation in amplitude of the Brillouin oscillations before and after reflection or transmission by said interface. The invention also relates to a corresponding method of characterization.

Claims

1. A device configured to characterize an interface of a structure, said structure comprising a solid first material and a second material, which materials are separated by said interface, the device comprising: a generator configured to generate a first mechanical wave in the solid first material; a generator configured to generate probe radiation configured to propagate at least in part in the solid first material so as to form Brillouin oscillations; and a detector configured to detect the variation in time of the Brillouin oscillations in the solid first material; wherein the device further comprises: an identification device configured to use the time variation of the Brillouin oscillations in the solid first material to identify reflection of said first mechanical wave by said interface or transmission through said interface of a second mechanical wave interfering with the first mechanical wave; and a determination device configured to determine the variation in amplitude of the Brillouin oscillations in the solid first material before and after reflection or transmission by said interface.

2. The device according to claim 1, wherein the determination device is configured to determine the variation in amplitude of the Brillouin oscillations as a function of the wavelength of the probe radiation.

3. The device according to claim 1, wherein the second material is a gas, and wherein: the identification device is configured to identify a reflection of said first mechanical wave by said interface; and the determination device is configured to determine the variation in amplitude of the Brillouin oscillations before and after reflection by said interface, in order to characterize the roughness of said interface.

4. The device according to claim 3, wherein the generator configured to generate probe radiation is configured to change the wavelength of the probe radiation as a function of the size of the roughness to be measured.

5. The device according to claim 1, wherein the second material is a solid thin layer, and wherein: the identification device is configured to identify transmission by said interface of a second mechanical wave interfering with the first mechanical wave; and the determination device is configured to determine the variation in amplitude of the Brillouin oscillations before and after transmission by said interface of the second mechanical wave, in order to characterize the acoustic transmission coefficient of said interface.

6. The device according to claim 5, wherein the generator configured to generate a first mechanical wave in the solid first material is configured to form the first and second mechanical waves simultaneously respectively in the solid first material and in the second material.

7. The device according to claim 5, further comprising an adjustment device configured to adjust parameters of a theoretical model giving the values for variation in amplitude of the Brillouin oscillations for different probe radiation wavelengths, in order to obtain the amplitude variation of the Brillouin oscillations as determined by the determination device, with the parameters as adjusted in this way serving to characterize the interface.

8. A method of characterizing an interface of a structure, said structure comprising a solid first material and a second material, which materials are separated by said interface, the method comprising the following steps: forming a first mechanical wave in the solid first material; generating a probe radiation; forming Brillouin oscillations with probe radiation propagating at least in part in the solid first material; and detecting the time variation of the Brillouin oscillations in the solid first material; wherein the method further comprises the following steps: identifying reflection of said first mechanical wave by said interface or transmission through said interface of a second mechanical wave interfering with the first mechanical wave on the basis of the time variation of the Brillouin oscillations in the solid first material; and determining the variation in amplitude of the Brillouin oscillations in the solid first material before and after reflection or transmission by said interface.

9. The method according to claim 8, wherein the variation in amplitude of the Brillouin oscillations as a function of the wavelength of the probe radiation is determined.

10. The method according to claim 8, wherein the second material is a gas, and wherein a reflection of said first mechanical wave by said interface is identified, and the variation in amplitude of the Brillouin oscillations before and after reflection by said interface is determined in order to characterize the roughness of said interface.

11. The method according to claim 10, wherein the wavelength of the probe radiation is selected as a function of the size of the roughness to be measured.

12. The method according to claim 8, wherein the second material is a solid thin layer, and wherein transmission through said interface of a second mechanical wave interfering with the first mechanical wave is identified, and the variation in amplitude of the Brillouin oscillations before and after transmission by said interface of the second mechanical wave is determined in order to characterize the acoustic transmission coefficient of said interface.

13. The method according to claim 12, wherein the first and second mechanical waves are formed simultaneously respectively in the solid first material and in the second material.

14. The method according to claim 9, wherein the parameters of a theoretical model giving the values for variation in amplitude of the Brillouin oscillations for different wavelengths of the probe radiation are adjusted in order to obtain the variations in amplitude of the Brillouin oscillations as determined, with the parameters as adjusted in this way serving to characterize the interface.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

(1) The invention and its advantages can be better understood on reading the following detailed description of a particular embodiment given by way of non-limiting example and illustrated in the accompanying drawings, in which:

(2) FIG. 1 is a diagrammatic view of a characterization device of the invention;

(3) FIG. 2 shows a first implementation of the invention;

(4) FIG. 3 shows an example of a result that can be obtained in the first implementation of the invention;

(5) FIG. 4 shows a second implementation of the invention;

(6) FIG. 5 shows an example of a result that can be obtained in the second implementation of the invention; and

(7) FIGS. 6 and 7 are examples of flow charts for implementations of methods of the invention.

DETAILED DESCRIPTION OF THE INVENTION

(8) FIG. 1 is a diagram showing an embodiment of a characterization device 1 of the invention.

(9) The device 1 thus comprises a short-pulse laser source 2. The short pulses from the laser need to be matched to the desired time resolution. It is possible to envisage using pulses of the order of 1 picosecond (ps) or 0.1 ps.

(10) In a first embodiment, this source is wavelength tunable by means of a suitable oscillator, e.g. of the titanium: sapphire type, capable of producing 120 femtosecond (fs) pulses at a repetition rate of 76 megahertz (MHz) or indeed 80 MHz, centered on a wavelength that is suitable over the range 700 nanometers (nm) to 990 nm, or indeed over the range 680 nm to 1070 nm.

(11) The source produces radiation that is split by a splitter 3 into pump radiation 4 and probe radiation 5, both of which are to interact with the structure 6 for analysis.

(12) The probe radiation 5 is subjected to path length variation compared with the pump radiation 4, e.g. by means of a movable mirror 7 that is servo-controlled in position, so as to reach the structure 6 with a time offset relative to the pump radiation.

(13) It is then focused on the structure 6 by an optical system 8, and it is reflected in the form of a signal 9 to detector means 10, e.g. of the photodetector type, in order to generate a signal that can be analyzed by processor means 11, e.g. a conventional type of computer suitable for performing the processing of the invention.

(14) Alternatively, the probe signal may also be detected after transmission through the structure 6.

(15) In order to ensure that the signals pass properly from the source to the structure, the optical system is adapted to accommodate the variation in wavelength from the source. The person skilled in the art knows how to adapt such an optical system depending on the selected sources and wavelength ranges, and only a few examples of suitable optical systems are described herein.

(16) The optical systems should preferably be broadband systems, both concerning the mirrors and the treated lenses. In order to achieve a sufficient signal-to-noise ratio, pump-probe devices make use of modulation of the pump radiation and demodulation of the probe radiation. The modulation must be performed outside the noise range of the laser, typically at several 100 kilohertz (kHz). It is performed by an acousto-optical modulator that acts like an electrically controlled grating, or indeed by an electro-optical modulator, or indeed by an optical chopper. The way the grating diffracts the pump radiation varies with wavelength. Thus, by changing the wavelength, the pump radiation is caused to vary in direction, which means that the device can lose its adjustment. It is therefore possible to use an acousto-optical modulator that can be controlled using an electrical signal of variable frequency. Varying deflection of the pump radiation is thus compensated by changing the pitch of the electrically generated grating.

(17) When using a half-wavelength that is obtained by optical doubling in a non-linear crystal, e.g. of the beta barium borate (BBO) type, doubling relies on a phase tuning condition in the crystal, which is associated with its orientation relative to the radiation. The change in wavelength needs to be taken up over this angle. This step is performed manually or automatically.

(18) The person skilled in the art readily understands that the pump and probe beams may also be generated by two distinct sources. Under such circumstances, the sources may themselves be movable in order to generate the variation in the optical path length of the probe radiation relative to the pump radiation. It is also possible to use a laser source of fixed wavelength and a source that is tunable.

(19) In a second embodiment, the source 2 serves to generate a light continuum extending over a broad range of wavelengths. Under such circumstances, the detector means 10 may comprise a spectrometer (not shown) for analyzing the intensity of the received light prior to transmitting the signal for analysis to the processor means 11. It is also possible to use any system of filters in front of an ordinary photodetector.

(20) The plurality of wavelengths is then generated continuously, e.g. by a fixed wavelength femtosecond laser associated with an optical fiber.

(21) In general manner, any type of source suitable for generating short laser pulses corresponding to a discrete or continuous set of wavelengths may be used.

(22) Likewise, it is possible to use any means suitable for producing a time offset between the pump radiation and the probe radiation. This offset can thus be produced by varying the optical path length as described above, or by means enabling the arrival time of one pulse to be adjusted relative to another.

(23) The processor means 11 comprise identification means 12 and determination means 13.

(24) The identification means 12 receive the variation over time in the signals detected by the detector means 10, and in particular the Brillouin oscillations. The identification means 12 are configured to identify, from the received signal, a reflection of a mechanical wave on the interface of the structure, or indeed a transmission of a mechanical wave through the interface of the structure.

(25) An identification of Brillouin oscillations before and after reflection or transmission is then transmitted to the determination means 13, which are configured to determine the variation in amplitude of said Brillouin oscillations before and after reflection or transmission. Thus, the determination means 13 can calculate the ratio of the maximum amplitude of the Brillouin oscillations before reflection or transmission to the maximum amplitude of the Brillouin oscillations after reflection or transmission. The determination means 13 may also take account of a phase shift before and after reflection or transmission.

(26) Preferably, when the means for generating the probe radiation can emit probe radiation at different wavelengths, the determination means are configured to determine the variation in amplitude, before and after reflection or transmission of the Brillouin oscillations as a function of the wavelength of the probe radiation.

(27) Finally, the characterization device 1 may comprise adjustment means 14 for adjusting parameters of a theoretical model. The adjustment means 14 include a theoretical model predicting the variation in amplitude of the Brillouin oscillations as a function of certain structural characteristics (thicknesses, materials, etc.) of the structure being analyzed, and by modifying these parameters it can cause the results that are obtained experimentally to coincide with the results from the theoretical model. Under such circumstances, when the structure of the theoretical model corresponds to the structure being analyzed, it becomes possible to know the structural characteristics of the structure being analyzed by using the parameters obtained by the adjustment means 14.

(28) There follows a description of two embodiments and uses of the FIG. 1 characterization device 1.

(29) In one embodiment, the device 1 is used to characterize an interface I between a substrate and a thin layer. Thus (see FIG. 2), the structure 100 being analyzed comprises a substrate 101 that is preferably transparent and of determined thickness, having a thin layer 102 arranged thereon, which layer is preferably absorbent. The structure 100 is arranged in the device 1 so that the probe radiation S passes initially through the substrate 101 and subsequently the thin layer 102. The structure 100 may thus be a sample of a solar panel comprising a glass substrate with an electrode arranged thereon.

(30) The thin layer 102 is selected so as to absorb the pump radiation P. Thus, the soundwave produced by the pump radiation is formed at the interface I between the substrate 101 and the thin layer 102.

(31) Two soundwaves are then observed: a first soundwave 103 that propagates in the substrate 101 towards the free surface (that receives the probe radiation S), and a second soundwave 104 that propagates in the thin layer 102. Since the thin layer 102 presents thickness that is very small, the soundwave 104 propagating therein is reflected by the opposite surface of the thin layer 102 and returns towards the interface I through which it passes to a greater or lesser extent depending on the transmission coefficient of said interface I.

(32) The fraction of the second soundwave 105 passing through the interface I is coherent with the first soundwave 103, and can thus interfere therewith. Depending on the phase difference between the two soundwaves 103 and 105, and depending on their respective amplitudes, the interference is pronounced to a greater or lesser extent. The characterization device 1 makes it possible to observe the Brillouin oscillations due to the first soundwave 103 and then due to the interference between the first and second soundwaves 103 and 105. It is thus possible to determine the amplitude of the fraction of the second soundwave 105 that has interfered with the first soundwave 103, and to deduce therefrom the transmission coefficient of the interface I.

(33) In particular, the processor means 11 serve firstly to identify (using the means 12) the moment in the observation of the Brillouin oscillations at which the fraction of the second soundwave 105 interferes with the first soundwave 103, and then secondly to measure the variation in the amplitude of the Brillouin oscillations due to the interference (by using the means 13).

(34) Preferably, the processor means 11 can perform this analysis for different wavelengths, and then use the means 14 to compare the results obtained with a theoretical model in order to refine the structural parameters of the sample.

(35) FIG. 3 shows an example of a result obtained by a theoretical model: the figure shows how the ratio A2/A1 (where A1 is the amplitude of the Brillouin oscillations corresponding to the first soundwave 103 and A2 is the amplitude of the Brillouin oscillations corresponding to interference between the first soundwave 103 and the fraction of the second soundwave 105) varies as a function of the wavelength of the probe radiation. In particular, the amplitude of the curve that is obtained (difference between the smallest ratio A2/A1 and the largest ratio A2/A1) enables the interface I between the two materials to be characterized, and the wavelength differences between two successive extremums enables the thickness of the thin layer to be characterized.

(36) Alternatively, the structure being analyzed may be a multilayer structure having a plurality of thin layers on the transparent substrate. Under such circumstances, the successive interferences with the waves transmitted by the various thin layers can also be used as interpreted in order to characterize the interfaces between the various thin layers.

(37) In another embodiment, the device 1 is used for characterizing the roughness of a surface of a given layer. Thus (see FIG. 4), the structure 200 being analyzed mainly comprises a preferably transparent given layer 201 that presents a free surface 202 of roughness that is to be determined, and an absorbent layer (not shown) arranged on the surface opposite from the free surface 202. The structure 200 is arranged in the device 1 in such a manner that the probe radiation S passes firstly through the free surface 202 for analysis, then through the given layer 201, and then through the absorbent layer.

(38) Alternatively, instead of a free surface 202, it would be possible to provide a layer of a second material presenting acoustic impedance that is very different from the acoustic impedance of the given layer 201 (i.e. much greater than or much less than said impedance), in order to obtain almost complete reflection of the soundwave at the interface.

(39) The absorbent layer is selected so as to absorb the pump radiation. Thus, the soundwave produced by the pump radiation is formed at the interface between the given layer 201 and the absorbent layer.

(40) A first soundwave 203 is then observed that propagates from the absorbent layer towards the free surface 202 of the given layer 201, followed by a second soundwave 204 that is due to the first soundwave 203 being reflected on the free surface 202 and propagating towards the absorbent layer.

(41) The waveform of the second soundwave 204 then depends on the quality of the free surface 202 of the given layer, and in particular on its roughness, that enables reflection to take place more or less correctly. Thus, depending on the roughness of the free surface 202, the second soundwave 204 becomes spatially dispersed to a greater or lesser extent.

(42) The characterization device 1 enables the Brillouin oscillations due to the first soundwave 203 and then to the second soundwave 204 to be observed. It is thus possible to estimate the roughness of the free surface 202 that reflected the soundwave.

(43) In particular, the processor means 11 make it possible firstly to use the means 12 to identify the moment in the observation of the Brillouin oscillations at which the first soundwave reflects on the free surface 202 of the given layer in order to form the second soundwave, and then secondly to measure the variation in the amplitude of the Brillouin oscillations due to the reflection (by using the means 13).

(44) The processor means can preferably perform this analysis at different wavelengths.

(45) FIG. 5 gives an example of the results obtained for different roughnesses of the free surface (5 nm, 10 nm, and 20 nm) and for different wavelengths of the probe radiation. It can be seen in particular that by shortening the wavelength of the probe radiation S, it is possible to analyze higher frequency soundwaves that are more sensitive to the same irregularities of the free surface.

(46) FIG. 6 is a flow chart 15 of an implementation of a method of the invention for characterizing an interface between a first material and a second material.

(47) In a first step 16, a first mechanical wave and a second mechanical wave are formed, and then in a second step 17, Brillouin oscillations are formed in the first material. Thereafter, in a third step 18, transmission of the second mechanical wave in the first material is identified, and during a fourth step 19, the variation in the amplitude of the Brillouin oscillations before and after transmission of the second mechanical wave is determined. The fourth step 19 may be performed in particular as a function of the wavelength of the probe radiation. Finally, in a preferred last step 20, the parameters of a theoretical model are adjusted to the values that have been determined.

(48) FIG. 7 shows a flow chart 21 of an implementation of a method of the invention for characterizing the roughness of a surface of a first material.

(49) In a first step 22, a first mechanical wave is formed in the first material and then in a second step 23, Brillouin oscillations are formed in the first material. Then, in a third step 24, reflection of the first mechanical wave on the free surface of the first material is identified, and during a fourth step 25, the variation in the amplitude of the Brillouin oscillations before and after reflection of the first mechanical wave is determined. The fourth step 25 may in particular be performed as a function of the wavelength of the probe radiation.

(50) Thus, the subject matter of the invention makes it possible in reliable and non-destructive manner to obtain characteristics of a structure, in particular the roughness of a surface reflecting a soundwave, or indeed the transmission coefficient at an interface between two materials. Furthermore, the use of a probe of variable wavelength makes it possible to refine the above characteristics, and to obtain easily values that are more accurate and more complete.