Resistive type particle detection device and particle detection method

Abstract

A resistive type particle detection device includes a cathode, an amplification micro-gate, and an anode composed of a flat insulator including resistive tracks arranged on a face of the flat insulator facing the amplification micro-gate and reading tracks arranged on the opposite face of the flat insulator, the reading tracks being connected to a reading system. In a non-limiting embodiment, the resistive type particle detection device further includes a conductive track positioned between two resistive tracks.

Claims

1. A resistive type particle detection device, comprising: a cathode; an amplification micro-gate; an anode composed of a flat insulator comprising resistive tracks arranged on a face of said flat insulator facing the amplification micro-gate and reading tracks arranged on an opposite face of said flat insulator, said reading tracks being connected to a reading system, and conductive tracks arranged on said face of said flat insulator facing the amplification micro-gate so as to form an alternation of the resistive tracks and the conductive tracks on an active surface of the particle detection device situated under the amplification micro-gate.

2. The resistive type particle detection device according to claim 1, wherein a number of the conductive tracks is different from a number of the resistive tracks.

3. The resistive type particle detection device according to claim 1, wherein maximum distance separating one of the conductive tracks from a neighbouring resistive track is equal to half of a step separating two resistive tracks situated on either side of the one of the conductive tracks less half of the width of the one of the conductive tracks.

4. The resistive type particle detection device according to claim 1, wherein electric connections of the resistive tracks and/or conductive tracks are situated outside of a sealed enclosure comprising the cathode, the amplification micro-gate, and the anode.

5. The resistive type particle detection device according to claim 1, wherein the resistive tracks and the conductive tracks are physically independent of each other.

6. The resistive type particle detection device according to claim 1, further comprising at least one electric contact, the electric contact being connected at a first end to a first resistive track and at a second end to a second resistive track, one of the conductive tracks positioned between the two resistive tracks being sectioned at a level of the at least one electric contact, two sections of the one of the conductive tracks being connected together via a connection track arranged in the flat insulator.

7. A method for detecting particles implementing a resistive type particle detection device according to claim 1, the method for detecting particles comprising, in particle detection mode: applying a first determined electric voltage to the cathode; applying a second determined electric voltage to the amplification micro-gate; establishing an electric connection between the reading tracks and the reading system; establishing an electric connection between the resistive tracks and a ground, and establishing a floating connection to the conductive tracks.

8. A method for detecting particles implementing a resistive type particle detection device according to claim 1, the method for detecting particles comprising, in impurities cleaning mode: applying a first determined electric voltage to the cathode; applying a second determined electric voltage or a voltage ramp to the amplification micro-gate; establishing an electric connection between the reading tracks and the reading system or a floating connection of the reading tracks; establishing an electric connection between the resistive tracks and a ground, and establishing an electric connection between the conductive tracks and a ground.

9. A method for detecting particles implementing a resistive type particle detection device according to claim 1, the method for detecting particles comprising, in amplification optimisation mode: applying a first determined electric voltage to the cathode; applying a second determined electric voltage or a voltage ramp to the amplification micro-gate; establishing an electric connection between the reading tracks and the reading system; establishing an electric connection between the resistive tracks and a ground, and applying a third determined electric voltage to the conductive tracks, said third determined electric voltage being negative.

Description

DESCRIPTION OF THE FIGURES

(1) Other characteristics and benefits of the invention will become clearer from the description that is given thereof hereafter, as an indication and in no way limiting, with reference to the appended figures among which:

(2) FIG. 1 represents, schematically, an example of embodiment of a particle detection device according to the prior art,

(3) FIG. 2 represents, schematically, a different example of embodiment of a particle detection device according to the prior art,

(4) FIG. 3 represents, schematically, a first example of embodiment of a particle detection device according to an embodiment of the invention,

(5) FIG. 4 illustrates a top view of the particle detection device illustrated in FIG. 3,

(6) FIG. 5 illustrates, schematically, a second example of embodiment of a particle detection device according to the invention,

(7) FIG. 6 represents, schematically, a sectional view A-A of the particle detection device represented in FIG. 5,

(8) FIG. 7 illustrates a synoptic of the steps of a first mode of implementation of a method for detecting particles in accordance with an embodiment of the invention,

(9) FIG. 8 illustrates a synoptic of the steps of a second mode of implementation of a method for detecting particles in accordance with an embodiment of the invention,

(10) FIG. 9 illustrates a synoptic of the steps of a third mode of implementation of a method for detecting particles in accordance with an embodiment of the invention.

(11) For reasons of clarity, only elements useful for the understanding of the invention have been represented, and have been done so without respect for scale and in a schematic manner. Moreover, similar elements situated in the different figures bear identical references.

DETAILED DESCRIPTION

(12) FIGS. 1 and 2 have already been described previously with reference to the prior art.

(13) FIG. 3 illustrates a resistive type particle detection device 30 in accordance with that of the invention. The resistive type particle detection device 30 comprises: a cathode 31, an amplification micro-gate 32, and an anode 33, this anode 33 comprising a flat insulator 34 (forming a substrate) comprising resistive tracks 35 arranged on a face of the flat insulator 34 and facing the amplification micro-gate 32. The anode 33 also comprises reading tracks 36 arranged on the opposite face of the flat insulator 34, the reading tracks 36 being connected to a reading system 37.

(14) The resistive type particle detection device 30 further comprises, in the example illustrated, several conductive tracks 38, each conductive track 38 being positioned between two resistive tracks 35. This alternation of resistive tracks 35 and conductive tracks 38 on the active surface of the particle detection device 30 situated under the amplification micro-gate 32 is illustrated in FIG. 4.

(15) It should be noted that the resistive tracks 35 may be connected to a same voltage supply of the resistive tracks A35 (or to the ground M35) and the conductive tracks 38 may also be connected to a same voltage supply of the conductive tracks A38 (or to the ground M38). In this non-limiting implementation, the electric connections made between the resistive tracks 35 and the voltage supply of the resistive tracks A35 (or to the ground M35) are formed outside of a sealed enclosure 39 comprising the cathode 31, the amplification micro-gate 32, and the anode 33. Similarly, the electric connections made between the conductive tracks 38 and the voltage supply of the conductive tracks A38 (or to the ground M38) are made outside of the sealed enclosure 39 comprising the cathode 31, the amplification micro-gate 32, and the anode 33. The fact that the electric connections are positioned outside of the gas tight frame formed by the sealed enclosure 39 makes it possible to electrically disconnect one or more resistive 35 and/or conductive 38 tracks without opening, and thus polluting, the resistive type particle detection device 30.

(16) In order to avoid perturbing the operation of the particle detection device 30, it is beneficial that the two types of tracks, namely the resistive tracks 35 and the conductive tracks 38, do not have contact with each other. The conductive tracks 38 and the resistive tracks 35 are thus physically independent of each other (infinite Ohmic contact). In other words, the conductive tracks and the resistive tracks do not touch physically.

(17) The conductive tracks 38 may be formed by screen printing of polymer paste filled with conductor, for example copper oxide.

(18) In a non-limiting implementation, the conductive tracks 38 are made of copper on the flat insulator 34, which flat insulator 34 may be made of Kapton.

(19) In a non-limiting implementation, the resistive tracks 35 are formed by the screen printing application of carbon filled polymer paste. To avoid any contact between the conductive tracks 38 and the resistive tracks 35, the screen printing spares the conductive tracks 38. If the positioning precision of the printing screen is not sufficient to avoid contact between the conductive tracks 38 and the resistive tracks 35, then a protective mask, for example formed by a UV polymerisable film, is used. This protective mask in fact makes it possible to protect the tracks formed first, for example the conductive tracks 38, and to enable the deposition of the second, in this non-limiting example, the resistive tracks 35.

(20) The example illustrated in FIGS. 3 and 4 is in no way limiting. It is understood that the resistive type particle detection device 30 according to the invention may comprise a different number of conductive tracks 38, for example only one conductive track 38 out of ten resistive tracks 35.

(21) In a beneficial example illustrated in FIG. 4, the maximum distance d separating a conductive track 38 and a neighbouring resistive track 35 is equal to half of the step p separating two resistive tracks 35 situated on either side of the conductive track 38 less half of the width L of the conductive track 38 situated between the two resistive tracks 35. Thus, for a step p of 500 m between two resistive tracks 35 and a conductive track 38 having a width L of 80 m, the maximum distance d between the conductive track 38 and the neighbouring resistive track 35 is d: (500/2)-(80/2)=210 m. It follows that in this implementation the maximum distance between an impurity and a conductive track 38 will not exceed 210 m. This distance is sufficiently low so that the electric field generated by the conductive track 38 can vaporise the dust.

(22) In a non-limiting example illustrated in FIG. 5, the particle detection device 30 comprises electric contacts 40 (also known as ladders). Each of the electric contacts 40 is connected at a first end to a first resistive track 35 and at a second end to a second resistive track 35. In this embodiment, the conductive track 38 (only one is represented for reasons of clarity) positioned between a first resistive track 35 and a second resistive track 35 is sectioned at the level of the electric contacts 40 connecting the first resistive track 35 and the second resistive track 35 in order not to touch the electric contacts 40. In this case, the conductive tracks 38 are constituted of segments connected together by the use of internal connection tracks positioned in the flat insulator. FIG. 6 is a view along the section A-A of FIG. 5 and represents a connection track 41 arranged in the flat insulator 34.

(23) Generally speaking, the electric contacts 40 make it possible to increase the flow of charges and to avoid the electric voltage charging of the resistive tracks 35.

(24) An aspect of the invention also relates to a method for detecting particles implementing a resistive type particle detection device 30 according to the invention.

(25) FIG. 7 represents a method 100 for detecting particles operating in particle detection mode and implementing a resistive type particle detection device 30 according to an embodiment of the invention.

(26) In this non-limiting implementation, the method 100 for detecting particles comprises a step 101 of application of a first determined electric voltage HV1 to the cathode 31.

(27) It also comprises a step 102 of application of a second determined electric voltage HV2 to the amplification micro-gate 32.

(28) The method 100 further comprises a step 103 of establishing an electric connection between the reading tracks 36 and the reading system 37.

(29) In addition, the method 100 implements a step 104 of establishing an electric connection between the resistive tracks 35 and a ground M35.

(30) In this particle detection mode, the method 100 further comprises a step 105 of establishing a floating connection to the conductive track 38, in other words no electric voltage is applied and no connection to the ground M38 is established.

(31) In such an implementation, the electric field present between the amplification micro-gate 32 and the resistive tracks 35 connected to the ground M35 directs the charges of the electron avalanche linked to the detection to the resistive tracks 35. If the conductive tracks 38 charge over time under the effect of collection of electrons due to the electron avalanche, and do so despite the absence of electric voltage, then the collection of electrons will be reduced because the charging will be negative. A reduction in the efficiency of the detector ensues therefrom.

(32) If this reduction becomes bothersome, then the method 100 implements a step 106 (represented in dotted line in FIG. 7) of establishing a connexion to the ground M38 of the conductive tracks 38. Furthermore such a step may also be programmed and thus become systematic at predetermined time intervals.

(33) FIG. 8 represents a method 100 for detecting particles operating in impurities cleaning mode and implementing a resistive type particle detection device 30 according to an embodiment of the invention.

(34) In this non-limiting implementation, the method 100 for detecting particles comprises a step 101 of application of a first determined electric voltage HV1 to the cathode 31.

(35) It also comprises a step 107 of application of a second determined electric voltage HV2 or a voltage ramp (not illustrated) to the amplification micro-gate 32.

(36) The method further comprises a step 108 of establishing an electric connection between the reading tracks 36 and the reading system 37 or a floating connection (illustrated in dotted line in FIG. 8) of the reading tracks 36.

(37) It also comprises a step 104 of establishing an electric connection between the resistive tracks 35 and the ground M35.

(38) In addition, the method 100 comprises a step 106 of establishing an electric connection between the conductive track 38 and the ground M38.

(39) In such an implementation, this layout makes it possible to generate electric fields in the enclosure 39 and to induce a spark at the places where the impurities are located and thus to eliminate them.

(40) FIG. 9 represents a method 100 for detecting particles operating in amplification optimisation mode and implementing a resistive type particle detection device 30 according to an embodiment of the invention.

(41) In this non-limiting implementation, the method 100 for detecting particles comprises a step 101 of application of a first determined electric voltage HV1 to the cathode 31.

(42) The method 100 further comprises a step 107 of application of a second determined electric voltage HV2 or a voltage ramp (not illustrated) to the amplification micro-gate 32.

(43) It also comprises a step 103 of establishing an electric connection between the reading tracks 36 and the reading system 37.

(44) The method 100 further comprises a step of establishing 104 an electric connection between the resistive tracks 35 and the ground M35.

(45) In addition, the method 100 comprises a step 109 of application of a third determined electric voltage HV3 to the conductive track 38, the third determined electric voltage HV3 being negative. Then, in the same way as with the floating conductive tracks 38, the electric field between the amplification micro-gate 32 and the resistive tracks 35 connected to the ground M35 directs the charges of the electron avalanche linked to the detection to the resistive tracks 35. The fact that the conductive tracks 38 are connected to a negative electric voltage generates an electric field that focuses the collection of charges of the electron avalanche to the resistive tracks 35. For example, the third determined negative electric voltage HV3 is 100V. Moreover, it is desirable that the difference in electric voltage between the amplification micro-gate 32 and the conductive tracks 38, for example 400 V in absolute value, is lower than that between the resistive tracks 35 and the amplification micro-gate 32, for example 500 V in absolute value. In addition, this difference in electric voltage should be sufficiently low so as not to drive sparks between the amplification micro-gate 32 and the conductive tracks 38. The focusing effect induced by an electric voltage on the conductive tracks 38, focusing which pushes back the charges of the electron avalanche, then generates a gain of the resistive type particle detection device 30.