SENSOR AND METHOD FOR REDUCING AN INTERFERENCE SIGNAL COMPONENT IN A MEASURING SIGNAL FROM A SENSOR

Abstract

A sensor including a sensor element for acquiring a measuring signal, the measuring signal including at least one useful signal component in a useful signal frequency range and at least one interference signal component in an interference signal frequency range, and a readout circuit for converting the measuring signal into an analog electrical sensor signal. A feedback circuit is provided, which feeds back the output signal of the readout circuit to the input of the readout circuit at which the measuring signal is applied, and the total transmission function H(s) of the readout circuit and feedback circuit induces an attenuation of the analog sensor signal in the interference signal frequency range, while the analog sensor signal in the useful signal frequency range is not attenuated.

Claims

1-10. (canceled)

11. A sensor, comprising: a sensor element configured to acquire a measuring signal, the measuring signal including at least one useful signal component in a useful signal frequency range and at least one interference signal component in an interference signal frequency range; a readout circuit configured to convert the measuring signal into an analog electrical sensor signal; and a feedback circuit, which feeds back an output signal of the readout circuit to an input of the readout circuit at which the measuring signal is applied, a total transmission function of the readout circuit and the feedback circuit inducing an attenuation of the analog sensor signal in the interference signal frequency range, while the analog sensor signal in the useful signal frequency range is not attenuated.

12. The sensor as recited in claim 11, wherein the feedback circuit is configured in such a way that a transmission function of the feedback circuit induces an attenuation of the analog sensor signal in the useful signal frequency range and an amplification of the analog sensor signal in the interference signal frequency range, and the output signal of the readout circuit is fed back to the input of the readout circuit where it is subtracted from the measuring signal.

13. The sensor as recited in claim 12, wherein the transmission function of the feedback circuit has different amplification factors for the useful signal frequency range and for the interference signal frequency range, and the ratio between the different amplification factors amounts to at least 10.

14. The sensor as recited in claim 12, wherein the feedback circuit includes a notch filter for the useful signal frequency range.

15. The sensor as recited in claim 12, wherein the feedback circuit includes a resonator for the interference signal frequency range.

16. The sensor as recited in claim 12, wherein the feedback circuit has a high-pass filter for a frequency range above the useful signal frequency range.

17. The sensor as recited in claim 12, wherein the sensor element includes at least one mechanically deflectable structural element for the acquisition of measuring signals.

18. The sensor as recited in claim 11, wherein the sensor element includes a MEMS sensor element, the MEMS sensor element including a yaw rate sensor, or an acceleration sensor, or a pressure sensor or a microphone.

19. The sensor as recited in claim 11, wherein the acquisition of the measuring signal takes place capacitively, and the readout circuit includes a capacitance-voltage converter, and the feedback circuit feeds an output signal of the capacitance-voltage converter back to an input of the capacitance-voltage converter.

20. A method for reducing an interference signal component in a measuring signal of a sensor, comprising the following steps: acquiring a measuring signal using the sensor, the measuring signal including at least one useful signal component in a useful signal frequency range and at least one interference signal component in an interference signal frequency range; converting the measuring signal into an analog electrical sensor signal using a readout circuit; and feeding an output signal of the readout circuit back to an input of the readout circuit at which the measuring signal is applied using a feedback circuit, a total transmission function of the readout circuit and the feedback circuit inducing an attenuation of the analog electrical signal in the interference signal frequency range, while the analog sensor signal in the useful signal frequency range is not attenuated.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0025] FIG. 1 shows a circuit diagram with components of a sensor according to an example embodiment of the present invention.

[0026] FIG. 2 shows a comparison of a conventional gyroscope measuring signal and a gyroscope measuring signal to which a method according to the present invention is applied.

[0027] FIG. 3 shows steps of a method according to an example embodiment of the present invention.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

[0028] The circuit shown in FIG. 1 includes a sensor element 2 for acquiring a measuring signal, and a readout circuit 3 for converting the measuring signal into an analog electrical sensor signal. In the described embodiment, sensor element 2 is the sensor element of an MEMS gyroscope. Sensor element 2 includes at least one seismic mass which is excited to a defined oscillation movement for the purpose of acquiring a measuring signal. In case of a rotary movement of sensor element 2 about an axis perpendicular to the oscillation direction of the seismic mass, a Coriolis force acts on the oscillating seismic mass. In the exemplary embodiment described here, the deflection of the seismic mass perpendicular to the oscillation direction and perpendicular to the axis of rotation caused by this force is acquired capacitively. The deflection of the seismic mass caused by a rotary movement of sensor element 2 is proportional to the yaw rate and is referred to as the useful signal component 11 in the following text. The frequency of this useful signal component 11 is a function of the excitation frequency, that is, the frequency of the defined oscillation movement of the seismic mass. The frequency range of useful signal component 11, which is termed the useful signal frequency range 30, is therefore able to be defined very well.

[0029] In addition to the useful signal component, the measuring signal includes at least one interference signal component 30 which superposes useful signal component 11. In the described exemplary embodiment, an interference signal caused by a vibration of sensor element 2 is superposed to the yaw rate signal. This is sketched in FIG. 1 by the frequency representation of vibration 20 acting on sensor element 2.

[0030] In addition to desired yaw rate signal 11 as the useful signal, the measuring signal output by sensor element 2 thus includes also undesired vibration signal 20 as an interference signal component. The frequency range of this vibration signal 20, hereinafter referred to as interference signal frequency range, is likewise clearly defined, does not overlap with the useful signal frequency range and lies clearly above useful signal frequency range 30, which may be gathered from the frequency representation 10a of the measuring signal.

[0031] Measuring signal 10a acquired by sensor element 2 is converted into an analog electrical measuring signal with the aid of readout circuit 3. In this particular case, the acquisition of the measuring signal takes place capacitively, and readout circuit 3 includes a capacitance-voltage converter having transmission function A(s) 3′ for converting measuring signal 10 into an analog electrical signal.

[0032] Situated between an output 3b of capacitance-voltage converter 3 and an input 3a of capacitance-voltage converter 3 is a feedback circuit 5 which applies a feedback circuit transmission function F(s) 5′ to the output signal of capacitance-voltage converter 3 that has the largest possible amplification outside the useful signal frequency range 30, in particular in the interference signal frequency range. The amplification thus occurs in the frequency range in which an undesired signal, e.g., vibration signal 20 or the like, appears. Conversely, the lowest possible amplification is used in the range of the useful signal frequency range 30. The signal amplified in this way is fed back to input 3a of capacitance-voltage converter 3 by being subtracted from an input signal at input 3a. This reduces undesired interference signal component 20.

[0033] As a whole, the transmission functions A(s) 3′ and F(s) 5′ result in a total transmission function H(s) for the two circuit components evaluation circuit 3 and feedback circuit 5 of sensor 1 according to

[00001]$H\left(s\right)=\frac{A\left(s\right)}{1+A\left(s\right).Math.F\left(s\right)}$

[0034] In the described exemplary embodiment, the total transmission function H(s) thus has the following characteristics:

[0035] The total transmission function H(s).fwdarw.A(s) if the feedback circuit transmission function F(s) goes.fwdarw.0, or in other words, yaw rate signal 11 is converted into an analog electrical voltage signal 10b essentially without any effect by feedback circuit 5.

[0036] Total transmission function H(s).fwdarw.0 if feedback circuit transmission F(s) goes.fwdarw.∞, or in other words, the undesired signal or interference signal component 20 is suppressed for the most part.

[0037] For example, feedback circuit transmission function F(s) 5′ is able to be provided with the aid of a notch filter in a useful signal frequency range 30, a resonator at a frequency of an undesired interference signal to be expected, and/or with the aid of a high-pass filter for frequencies above useful signal frequency range 30 in feedback circuit 5.

[0038] The analog measuring signal, largely purged of the interference signal component in the above-described manner, is then converted with the aid of an analog-to-digital converter 4, ADC, into a digital signal that in essence is ultimately based on the useful signal component of the MEMS gyroscope.

[0039] In comparison, FIG. 2 shows the frequency representation of two gyroscope measuring signals that were recorded under identical test conditions, one without and one with the compensation according to the present invention of a vibration-related interference signal component. In other words, FIG. 2 illustrates the effects of the measures by comparing frequency representations 20 and 20′ of two gyroscope measuring signals that were acquired under identical test conditions. The x-axis denotes the frequency, the y-axis denotes the frequency components in the measuring signal. The gyroscope was exposed to a mechanical vibration in this case, i.e., in a defined frequency range about the frequency X, in order to simulate an interference signal component in the gyroscope measuring signal. A DC voltage was applied as the useful signal component so that the frequency range of useful signal component 11 lies at zero here. In one case—frequency representation 20—no measures were taken to attenuate or compensate the vibration-related interference signal component in the gyroscope measuring signal. In the other case—frequency representation 20′—the measures for compensating for a vibration-related interference signal component as described in connection with the embodiments of FIG. 1 were applied, i.e., using an amplification factor of 100 in feedback circuit 5. The comparative illustration of FIG. 2 demonstrates that the measures attenuate the interference signal component by a factor of approximately 100 in each case while useful signal component 11 is essentially unaffected by feedback circuit 5.

[0040] FIG. 3 shows steps of a method for reducing undesired signals in a sensor signal.

[0041] The method includes the following steps:

[0042] In a first step S1, a measuring signal is acquired with the aid of the sensor, the measuring signal including at least one useful signal component in a useful signal frequency range and at least one interference signal component in an interference signal frequency range.

[0043] In a further step S2, the measuring signal is converted into an analog electrical sensor signal with the aid of a readout circuit.

[0044] In a further step S3, the output signal of the readout circuit is fed back to the input of the readout circuit at which the measuring signal is applied with the aid of a feedback circuit, and the total transmission function H(s) of the readout circuit and feedback circuit induces an attenuation of the analog electrical sensor signal in the interference signal frequency range, while the analog sensor signal in the useful signal frequency range is not attenuated.

[0045] In summary, at least one of the embodiments of the present invention offers at least one of the following advantages: [0046] a suppression of interference signals in a measuring signal essentially without an adverse effect on useful signals in the measuring signal, [0047] an improvement of the signal-to-noise ratio, [0048] an easier demodulation of sensor signals, [0049] an increased reliability of the sensor.

[0050] Although the present invention was described on the basis of preferred exemplary embodiments, it is not restricted to such but is able to be modified in a multitude of ways.